CN102062485A - Heat collection plate of solar energy flat plate collector and film plating method for heat collection plate - Google Patents
Heat collection plate of solar energy flat plate collector and film plating method for heat collection plate Download PDFInfo
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- CN102062485A CN102062485A CN 201010552295 CN201010552295A CN102062485A CN 102062485 A CN102062485 A CN 102062485A CN 201010552295 CN201010552295 CN 201010552295 CN 201010552295 A CN201010552295 A CN 201010552295A CN 102062485 A CN102062485 A CN 102062485A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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Abstract
The invention discloses a film plating method for a heat collection plate of a solar energy flat plate collector. In the method, a sputtering gas is argon, and reactant gases are high-purity nitrogen and oxygen. The method comprises the following steps of: firstly, depositing a layer of aluminum-titanium nitride anti-infrared reflecting film on a metal base plate through magnetic control reaction sputtering; secondly, depositing two layers of aluminum-titanium nitride composite absorbing films; and finally, depositing a layer of aluminum-titanium oxide radiation resistant composite protective film to finally form a metal/TiAlN/TiAlON/TiAlON/TiAlO composite plated film collector. The film layers of the collector are formed by four times of sputtering; a coating layer on the collector has the characteristics of low low-temperature emission rate and heat loss and high heat-insulating property; and the TiAlN is a high-quality material with high hardness, abrasion resistance and oxidation resistance and low electrical resistivity, and the performance of the TiAlN is better than TiN, so the flat plate collector using the coating layer has high weathering resistance and medium-temperature service performance.
Description
Technical field the invention belongs to the plate solar collector technical field, relates to a kind of plate solar collector thermal-arrest plate and film plating process thereof.
Background technology is present, and known plate solar collector thermal-arrest plate is plating one deck reflectance coating on metal base plate, and Coating Materials is TiNxOy or NiCr, adopts one time coating process.There is the technical problem of resistivity and mid and far infrared emissivity height, weatherability and middle temperature serviceability difference in the plated film thermal-arrest plate of prior art.
Summary of the invention the objective of the invention is to solve the technical problem that prior art exists resistivity and mid and far infrared emissivity height, weatherability and middle temperature serviceability difference, and a kind of plate solar collector thermal-arrest plate and film plating process thereof are provided.
Plate solar collector thermal-arrest plate of the present invention comprises metal base plate, and its main points are to be provided with one deck TiAlN counter infrared ray reflectance coating, two-layer aluminum oxynitride titanium composite absorption film and one deck aluminium oxide titanium radioresistance composite protection film on metal base plate successively; Plated film adopts the reactive magnetron sputtering method; sputter gas is an argon gas; reacting gas is high pure nitrogen and oxygen; at first reactive magnetron sputtering deposits one deck TiAlN counter infrared ray reflectance coating on metal base plate; deposit two-layer aluminum oxynitride titanium composite absorption film again; deposit one deck aluminium oxide titanium radioresistance composite protection film at last, the concrete operations step is as follows:
1), on metal base plate sputter one deck TiAlN counter infrared ray reflectance coating, operating pressure 0.2-0.5Pa, reacting gas nitrogen amount 20-200Sccm, sputter thickness 0.04-0.3 μ m;
2), sputter ground floor aluminum oxynitride titanium composite absorption film on the counter infrared ray reflectance coating again, the mol ratio of titanium aluminium is 1: 1, operating pressure 0.2-0.8Pa, reacting gas nitrogen, nitrogen oxygen volume ratio 0.2: 1, gas flow 60-150Sccm, sputter thickness 0.04-0.1 μ m;
3), sputter second layer aluminum oxynitride titanium composite absorption film on ground floor aluminum oxynitride titanium composite absorption film then, the mol ratio of titanium aluminium is 1: 1, operating pressure 0.2-0.8Pa, reacting gas nitrogen, nitrogen oxygen volume ratio 0.2: 1, gas flow 60-150Sccm, sputter thickness 0.04-0.15 μ m;
4), sputter radioresistance composite protection film on the second composite absorption film at last, the mol ratio of titanium aluminium is 1: 1, operating pressure 0.2-0.8Pa, reacting gas amount of oxygen 30-200Sccm, sputter thickness 0.03-0.12 μ m.
Rete on the metal base plate of the present invention forms through four sputters, the invention has the beneficial effects as follows, because the gold that the infrared reflectivity of TiAlN and infrared reflectivity are minimum is approaching, so this coating has lower low temperature emissivity, so this film cording has lower heat waste, good heat insulating, TiAlN is a kind of high rigidity of high-quality, wear-resisting and non-oxidizability material simultaneously, and resistivity is low, and performance is better than TiN, therefore uses the weatherability and the middle temperature serviceability excellence of the flat plate collector of this coating.
Appended drawings is a structural representation of the present invention.
Among the figure 1, counter infrared ray reflectance coating 2, the first composite absorption film 3, the second composite absorption film 4, radioresistance composite protection film 5, metal base plate
Specific embodiment plate solar collector thermal-arrest of the present invention plate comprises metal base plate 5, is provided with one deck TiAlN counter infrared ray reflectance coating 1, two-layer aluminum oxynitride titanium composite absorption film 2,3 and one deck aluminium oxide titanium radioresistance composite protection film 4 on the metal base plate 5 successively; Plated film adopts the reactive magnetron sputtering method, and equipment is two target magnetic control sputtering coating machines, and this equipment is by forming with titanium and two magnetron sputtering cylindrical targets of aluminium, two shielding power supplies, a cover high vacuum system and planet turret system; Workpiece is contained on the pivoted frame when sputtered layer, rotation in the time of the workpiece revolution, and the operation of automatic program control sputter coating process, technology has been moved the back and has been taken out workpiece.
Preparation technology is as follows:
Plated film layer on metal base plate adopts the reactive magnetron sputtering method, and sputter gas is an argon gas, and reacting gas is oxygen and nitrogen, and rete is divided into four layers of sputter, and some transition zones are arranged therebetween;
1, the sputter of nitrogen titanium aluminide TiAlN counter infrared ray reflectance coating, the mol ratio of titanium aluminium 1: 1, operating pressure 0.2-0.5Pa, reacting gas nitrogen amount 20-200Sccm, sputter thickness 0.04-0.3 μ m;
2, the sputter of aluminum oxynitride titanium TiAlON ground floor composite absorption film, the mol ratio of titanium aluminium 1: 1, operating pressure 0.2-0.8Pa, reacting gas nitrogen, nitrogen oxygen volume ratio 0.2: 1, gas flow 60-150Sccm, sputter thickness 0.04-0.1 μ m;
3, the sputter of aluminum oxynitride titanium TiAlON second layer composite absorption film, the mol ratio of titanium aluminium 1: 1, operating pressure 0.2-0.8Pa, reacting gas nitrogen, nitrogen oxygen volume ratio 0.2: 1, gas flow 60-150Sccm, sputter thickness 0.04-0.15 μ m;
4, the sputter of aluminium oxide titanium TiAlO radioresistance composite protection film, the mol ratio of titanium aluminium 1: 1, operating pressure 0.2-0.8Pa, reacting gas amount of oxygen 30-200Sccm, sputter thickness 0.03-0.12 μ m.
Rete is pressed the sputter material branch, and film structure is divided into four layers of sputter and forms, and the thickness of each layer sputtered film is to be finished by twice above sputter at least by the material of identical material, final formation: metal/TiAlN/TiAlON/TiAlON/TiAlO composite film coating thermal-arrest plate.
Claims (2)
1. a plate solar collector thermal-arrest plate comprises metal base plate, it is characterized in that being provided with successively on metal base plate one deck TiAlN counter infrared ray reflectance coating, two-layer aluminum oxynitride titanium composite absorption film and one deck aluminium oxide titanium radioresistance composite protection film; Its film plating process is reactive magnetron sputtering deposition one deck TiAlN counter infrared ray reflectance coating on metal base plate at first, deposits two-layer aluminum oxynitride titanium composite absorption film again, deposits one deck aluminium oxide titanium radioresistance composite protection film at last.
2. the film plating process of plate solar collector thermal-arrest plate according to claim 1 is characterized in that sputter gas is an argon gas, and reacting gas is nitrogen and oxygen, and the concrete operations step is as follows:
1), on metal base plate sputter one deck TiAlN counter infrared ray reflectance coating, operating pressure 0.2-0.5Pa, reacting gas nitrogen amount 20-200Sccm, sputter thickness 0.04-0.3 μ m;
2), sputter ground floor aluminum oxynitride titanium composite absorption film on the counter infrared ray reflectance coating again, the mol ratio of titanium aluminium is 1: 1, operating pressure 0.2-0.8Pa, reacting gas nitrogen, nitrogen oxygen volume ratio 0.2: 1, gas flow 60-150Sccm, sputter thickness 0.04-0.1 μ m;
3), sputter second layer aluminum oxynitride titanium composite absorption film on ground floor aluminum oxynitride titanium composite absorption film then, the mol ratio of titanium aluminium is 1: 1, operating pressure 0.2-0.8Pa, reacting gas nitrogen, nitrogen oxygen volume ratio 0.2: 1, gas flow 60-150Sccm, sputter thickness 0.04-0.15 μ m;
4), sputter radioresistance composite protection film on the second composite absorption film at last, the mol ratio of titanium aluminium is 1: 1, operating pressure 0.2-0.8Pa, reacting gas amount of oxygen 30-200Sccm, sputter thickness 0.03-0.12 μ m.
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| CN 201010552295 CN102062485A (en) | 2010-11-19 | 2010-11-19 | Heat collection plate of solar energy flat plate collector and film plating method for heat collection plate |
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| CN 201010552295 CN102062485A (en) | 2010-11-19 | 2010-11-19 | Heat collection plate of solar energy flat plate collector and film plating method for heat collection plate |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721210A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Heat collecting plate of solar heat collecting device |
| CN102721208A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Heat collecting plate of solar heat collector |
| CN102721211A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Medium-temperature solar thermal collector panel |
| CN103411335A (en) * | 2013-07-30 | 2013-11-27 | 中国科学院上海技术物理研究所 | Selective absorbing film set of radiation absorbing layer based on mixture |
| CN103866243A (en) * | 2014-03-31 | 2014-06-18 | 沈阳大学 | Preparation method for nitrogen oxygen titanium aluminum/titanium aluminum nitrogen and titanium aluminum composite film |
| CN103911591A (en) * | 2014-03-31 | 2014-07-09 | 沈阳大学 | Method for preparing high-adhesion nitrogen oxygen titanium aluminum/titanium aluminum composite membrane |
| CN103998643A (en) * | 2011-12-15 | 2014-08-20 | 科学与工业研究委员会 | An improved solar selective coating having high thermal stability and a process for the preparation thereof |
| CN104567047A (en) * | 2013-11-28 | 2015-04-29 | 康雪慧 | Heat-collecting element hydrogen-resistant blocked layer using titanium aluminum nitride material and preparation method |
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| US20070196670A1 (en) * | 2006-02-21 | 2007-08-23 | Harish Chandra Barshilia | solar selective coating having higher thermal stability useful for harnessing solar energy and a process for the preparation thereof |
| CN101666557A (en) * | 2008-09-01 | 2010-03-10 | 北京有色金属研究总院 | Non-vacuum solar spectrum selective absorption film and preparation method thereof |
| CN101793437A (en) * | 2009-12-31 | 2010-08-04 | 沈阳百乐真空技术有限公司 | Multi-purpose solar spectrum selective absorbing coating and preparation method thereof |
| CN101886848A (en) * | 2009-05-11 | 2010-11-17 | 范天方 | Solar spectrum selective absorbing film and preparation method thereof |
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| US20070196670A1 (en) * | 2006-02-21 | 2007-08-23 | Harish Chandra Barshilia | solar selective coating having higher thermal stability useful for harnessing solar energy and a process for the preparation thereof |
| CN101666557A (en) * | 2008-09-01 | 2010-03-10 | 北京有色金属研究总院 | Non-vacuum solar spectrum selective absorption film and preparation method thereof |
| CN101886848A (en) * | 2009-05-11 | 2010-11-17 | 范天方 | Solar spectrum selective absorbing film and preparation method thereof |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103998643A (en) * | 2011-12-15 | 2014-08-20 | 科学与工业研究委员会 | An improved solar selective coating having high thermal stability and a process for the preparation thereof |
| CN103998643B (en) * | 2011-12-15 | 2016-12-07 | 科学与工业研究委员会 | Solar selective coat of improvement with high thermal stability and preparation method thereof |
| CN102721210A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Heat collecting plate of solar heat collecting device |
| CN102721208A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Heat collecting plate of solar heat collector |
| CN102721211A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Medium-temperature solar thermal collector panel |
| CN103411335A (en) * | 2013-07-30 | 2013-11-27 | 中国科学院上海技术物理研究所 | Selective absorbing film set of radiation absorbing layer based on mixture |
| CN104567047A (en) * | 2013-11-28 | 2015-04-29 | 康雪慧 | Heat-collecting element hydrogen-resistant blocked layer using titanium aluminum nitride material and preparation method |
| CN104567047B (en) * | 2013-11-28 | 2017-10-31 | 康雪慧 | Using the heat collecting element resistant to hydrogen barrier layer and preparation method of TiAlN material |
| CN103866243A (en) * | 2014-03-31 | 2014-06-18 | 沈阳大学 | Preparation method for nitrogen oxygen titanium aluminum/titanium aluminum nitrogen and titanium aluminum composite film |
| CN103911591A (en) * | 2014-03-31 | 2014-07-09 | 沈阳大学 | Method for preparing high-adhesion nitrogen oxygen titanium aluminum/titanium aluminum composite membrane |
| CN103911591B (en) * | 2014-03-31 | 2015-12-02 | 沈阳大学 | A kind of preparation method of high adhesive force nitrogen oxygen titanium aluminium/titanium aluminum composite membrane |
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Application publication date: 20110518 |