CN101975981A - Mixed integrated structure for planar optical waveguide and active optical device - Google Patents
Mixed integrated structure for planar optical waveguide and active optical device Download PDFInfo
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- CN101975981A CN101975981A CN 201010292074 CN201010292074A CN101975981A CN 101975981 A CN101975981 A CN 101975981A CN 201010292074 CN201010292074 CN 201010292074 CN 201010292074 A CN201010292074 A CN 201010292074A CN 101975981 A CN101975981 A CN 101975981A
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Abstract
The invention discloses a mixed integrated structure for a planar optical waveguide and an active optical device. The mixed integrated structure comprises a planar optical waveguide and at least one active optical device and is also provided with a substrate, a connecting piece and a gasket, wherein the connecting piece and the planar optical waveguide are arranged on the substrate; the connecting piece is positioned on an emergent side of the planar optical waveguide; one side of the connecting piece facing the emergent side of the planar optical waveguide is an inclined plane; the gasket is arranged on the planar optical waveguide; an upper plane of the gasket and an upper plane of the connecting piece are positioned on the same horizontal plane; the active optical device is horizontally arranged on the connecting piece and the gasket; and an illuminated face or a luminous surface of the active optical device faces a reflecting inclined plane of the connecting piece. The mixed integrated structure has a simple structure, can be applied in the fields of optical communication, light sensing and the like, and is easier to use and process compared with a structure consisting of separate photoelectric devices.
Description
Technical field
The present invention relates to a kind of planar optical waveguide and active optical component.Particularly relate to and a kind ofly can be simply planar optical waveguide and active optical component be mixed the integrated planar optical waveguide and the integrated morphology of mixing of active optical component.
Background technology
Optic communication device is according to its functional active device and passive device two classes of being divided into usually.Promptly there is photoelectric conversion process in active device thereby needs the type of device of injection current, its material normally can be with being positioned at communication wavelengths neighbouring semiconducting compound such as indium phosphide (InP), gallium arsenide (GaAs), indium gallium arsenic (InGaAs) etc., passive device does not promptly have photoelectric action only to have only the decomposition of light, conversion, the device of control function such as restriction considers that it adopts silicon dioxide (SiO usually to the influence of the propagation of light and the ability of control light
2), high molecular polymer (Ploymer), lithium niobate materials such as (LiNbO3).Planar optical waveguide is the integrated a kind of important implementation of passive device, and the passive device of existing multiple this technology of employing is applied in the communication at present.In the actual light communication system, active device and passive device usually need to use together, waveguide technology is integrated even passive device has utilized plane light wave, but since with the differences in materials of active device, still have to produce then respectively and couple together by optical fiber, this has not only brought additional space and cost expense to communication, also owing to the link that has increased has reduced performance.Therefore, seek can be integrated active and technology passive device be the important directions of optic communication device development.
Patent CN97193532.7 discloses a kind of hybrid integration technology, and the ducting layer of planar optical waveguide is removed a part, then with remaining substrate as substrate, lay brace thereon, reflection enters top photovalve from the light signal of ducting layer.Patent JP2008009302A discloses another kind of hybrid integration technology, carves a groove in the ducting layer intermediate etch, and one side is the inclined-plane, the light signal of another side outgoing can be reflexed to top receiving device.The disclosed mixing integrated approach of patent US5966478, slot at ducting layer equally, different is that this groove is and angled oblique the leaving of planar waveguide, make that the exiting surface of ducting layer itself is exactly an inclined-plane, directly the light signal that propagation is come reflexes to the light receiving element that ducting layer is close to above.
But, in each above-mentioned patent all in various degree exist some shortcomings.Peel off the scheme of ducting layer and need do reprocessing to the planar optical waveguide chip, technological process is comparatively complicated.The method of slotting in waveguide then is difficult to groove both sides light exit surface or reflecting surface are carried out polishing, can cause bigger luminous energy loss.
Summary of the invention
Technical matters to be solved by this invention is, provide a kind of can be on substrate the integrated morphology of mixing of planar optical waveguide and active optical component of integrated planar optical waveguide and at least a active optical component.
The technical solution adopted in the present invention is: the integrated morphology of mixing of a kind of planar optical waveguide and active optical component, comprise: a planar optical waveguide and at least a active optical component, also be provided with substrate, brace and pad, described brace and planar optical waveguide all are arranged on the substrate, described brace is positioned at the bright dipping side of planar optical waveguide, and is an inclined-plane at brace over against the one side of planar optical waveguide bright dipping side, described pad be arranged at planar optical waveguide above, the last plane of described pad and the last plane of brace are on the same surface level, being arranged on brace and the pad of described active optical component level, the sensitive surface of described active optical component or light-emitting area are over against the reflecting slant of brace.
The inclined-plane of described brace and the angle of bottom surface are 45 ° ± 5 °, and the horizontal range between the edge of the base on the inclined-plane of described brace and planar optical waveguide bright dipping side is less than 50 microns.
The inclined-plane of described brace is coated with one deck, and flashlight is had the rete of high reflex, described rete is the layer of metal film that multilayer dielectric film or the mode that adopts sputter plate.
Described substrate and brace adopt glass or silicon or stupalith, and substrate surface is smooth and smooth plane.
Described brace and planar optical waveguide all are bonded on the substrate.
Another technical scheme of the present invention is: the integrated morphology of mixing of a kind of planar optical waveguide and active optical component, comprise: a planar optical waveguide and at least a active optical component, also be provided with substrate and brace, described substrate is by the integrally formed staircase structure of height two parts, described planar optical waveguide is arranged on the high end parts of substrate, described brace is arranged on the lower portion of substrate, the height of the high end parts of described substrate is that last plane that is positioned at the planar optical waveguide on this high end parts and the last plane that is positioned at the brace on the substrate lower portion are on the same surface level, and, described brace is positioned at the bright dipping side of planar optical waveguide, and is an inclined-plane at brace over against the one side of planar optical waveguide bright dipping side, being arranged on brace and the planar optical waveguide of described active optical component level, the sensitive surface of described active optical component or light-emitting area are over against the reflecting slant of brace.
The inclined-plane of described brace and the angle of bottom surface are 45 ° ± 5 °, and the horizontal range between the edge of the base on the inclined-plane of described brace and planar optical waveguide bright dipping side is less than 50 microns.
The inclined-plane of described brace is coated with one deck, and flashlight is had the rete of high reflex, described rete is the layer of metal film that multilayer dielectric film or the mode that adopts sputter plate.
Described substrate and brace adopt glass or silicon or stupalith, and substrate surface is smooth and smooth plane.
Described brace and planar optical waveguide all are bonded on the substrate.
The integrated morphology of mixing of planar optical waveguide of the present invention and active optical component, simple in structure, just utilize the output light end face of a brace and planar optical waveguide close, brace towards plating one deck reflectance coating or metal film on the inclined-plane of output light end face so that the light of outgoing reflect upward or make above the light of light-emitting component outgoing reflect to waveguide core layer, between brace and planar optical waveguide across photovalve such as photo-detector, laser instrument etc.Thereby can simply planar optical waveguide and active optical component mixing be integrated.The present invention can be used on optical communication, fields such as light sensing, and the structure of being made up of discrete photoelectric device is easier to use and handle.
Description of drawings
Fig. 1 is the structural representation of first embodiment of the invention;
Fig. 2 is the structural representation of second embodiment of the invention.
Wherein:
1: active optical component 2: brace
3: pad 4: covering
5: waveguide core layer 6: bottom
7: substrate 8: inclined-plane
9: planar optical waveguide 10: substrate
Embodiment
Below in conjunction with embodiment and accompanying drawing planar optical waveguide of the present invention is made a detailed description with the integrated morphology of mixing of active optical component.
As shown in Figure 1, the integrated morphology of mixing of planar optical waveguide of the present invention and active optical component comprises: a planar optical waveguide 9 and an at least a active optical component 1 that adopts PECVD or FHD to make also is provided with substrate 7, brace 2 and pad 3.
Described planar optical waveguide 9 is by the bottom 6 as substrate, is arranged at the two-layer covering 4 up and down on the bottom 6 and is clipped in the waveguide core layer 5 between the two-layer covering 4 up and down, constitutes a complete fiber waveguide device.
Described brace 2 and planar optical waveguide 9 all are arranged on the substrate 7, described brace 2 adopts glass or materials such as silicon or pottery, be arranged at the bright dipping side of planar optical waveguide 9, and is an inclined-plane 8 at brace 2 over against the one side of planar optical waveguide 9 bright dipping sides, the inclined-plane 8 of described brace 2 is 45 ° ± 5 ° with the angle of bottom surface, and the horizontal range between the edge of the base on the inclined-plane 8 of described brace 2 and planar optical waveguide 9 bright dipping sides is less than 50 microns.And on the inclined-plane 8 of described brace 2, be coated with one deck has high reflex to flashlight rete, described rete is the layer of metal film that multilayer dielectric film or the mode that adopts sputter plate, as gold or aluminium, this skim should have very high reflectivity to emergent light.
Planar optical waveguide chip 9 is thinner generally speaking; and brace 2 is for convenience of plated film or splash-proofing sputtering metal on the inclined-plane; need bigger working (finishing) area; so brace 2 usually can be than planar optical waveguide 9 height; so on the surface of planar optical waveguide 9, also placed a pad 3; this pad can be a glass, silicon, and materials such as metal or pottery are made.Described pad 3 be arranged at planar optical waveguide 9 above, the height of pad should be suitable, the last plane of described pad 3 and the last plane of brace 2 are on the same surface level, just in time make being arranged on brace 2 and the pad 3 of described active optical component 1 level, the sensitive surface of described active optical component 1 or light-emitting area are over against the reflecting slant of brace 2.
Described substrate 7 adopts glass or materials such as silicon or pottery, and substrate surface is smooth and smooth plane, so that brace 2 and planar optical waveguide 9 can move aligning on substrate 7.Described brace 2 and planar optical waveguide 9 all are bonded on the substrate 7.
Inclined-plane 8 reflections that emergent light is connected sheet 2 after waveguide core layer 5 outgoing enter the active optical component 1 that is placed on brace and planar optical waveguide top, and perhaps 8 reflections are laggard through the brace inclined-plane goes into waveguide sandwich layer 5 from the light of active optical component 1 outgoing.This structure has realized that the mixing of planar optical waveguide and active optical component is integrated.
As shown in Figure 2, the integrated morphology of mixing of planar optical waveguide of the present invention and active optical component, can also be to comprise: a planar optical waveguide 9 and at least a active optical component 1, also be provided with substrate 10 and brace 2, described substrate 10 adopts glass or silicon or stupalith, substrate surface is smooth and smooth plane, and be by the integrally formed staircase structure of height two parts, described planar optical waveguide 9 is arranged on the high end parts of substrate 10, described brace 2 adopts glass or silicon or stupalith, be arranged on the lower portion of substrate 10, the height of described substrate 10 high end parts is that last plane that is positioned at the planar optical waveguide 9 on this high end parts and the last plane that is positioned at the brace 2 on substrate 10 lower portions are on the same surface level, described brace 2 is positioned at the bright dipping side of planar optical waveguide 9, and is an inclined-plane 8 at brace 2 over against the one side of planar optical waveguide 9 bright dipping sides, described inclined-plane 8 is 45 ° ± 5 ° with the angle of bottom surface, and the horizontal range between the edge of the base on the inclined-plane 8 of described brace 2 and planar optical waveguide 9 bright dipping sides is less than 50 microns.Being coated with one deck on the inclined-plane 8 of described brace 2, flashlight is had the rete of high reflex, described rete is the layer of metal film that multilayer dielectric film or the mode that adopts sputter plate.
Being arranged on brace 2 and the planar optical waveguide 9 of described active optical component 1 level, the sensitive surface of described active optical component 1 or light-emitting area are over against the reflecting slant of brace 2.
Described brace 2 and planar optical waveguide 9 all are bonded on the substrate 10.
It is simple to the invention provides a kind of manufacture craft, can realize that planar optical waveguide is integrated with mixing of active device.The present invention need not to peel off ducting layer or slots on ducting layer, therefore can do the surface grinding polishing to the exiting surface of planar optical waveguide separately, and the reflecting surface of brace then can plate reflectance coating, to reduce the loss of optically-coupled.Substrate is an independently flat board, provides planar optical waveguide to be bonded on it with brace and aims at.For the homogeneity that guarantees that the substrate surface bonded adhesives flows, can also open the groove of some pros or triangle at substrate surface.
Claims (10)
1. the integrated morphology of mixing of a planar optical waveguide and active optical component, comprise: a planar optical waveguide (9) and at least a active optical component (1), it is characterized in that, also be provided with substrate (7), brace (2) and pad (3), described brace (2) and planar optical waveguide (9) all are arranged on the substrate (7), described brace (2) is positioned at the bright dipping side of planar optical waveguide (9), and is an inclined-plane (8) at brace (2) over against the one side of planar optical waveguide (9) bright dipping side, described pad (3) be arranged at planar optical waveguide (9) above, the last plane of the last plane of described pad (3) and brace (2) is on the same surface level, being arranged on brace (2) and the pad (3) of described active optical component (1) level, the sensitive surface of described active optical component (1) or light-emitting area are over against the reflecting slant of brace (2).
2. the integrated morphology of mixing of planar optical waveguide according to claim 1 and active optical component, it is characterized in that, the inclined-plane (8) of described brace (2) is 45 ° ± 5 ° with the angle of bottom surface, and the horizontal range between the edge of the base on the inclined-plane (8) of described brace (2) and planar optical waveguide (9) bright dipping side is less than 50 microns.
3. the integrated morphology of mixing of planar optical waveguide according to claim 1 and active optical component, it is characterized in that, the inclined-plane (8) of described brace (2) is coated with one deck, and flashlight is had the rete of high reflex, described rete is the layer of metal film that multilayer dielectric film or the mode that adopts sputter plate.
4. the integrated morphology of mixing of planar optical waveguide according to claim 1 and active optical component is characterized in that, described substrate (7) and brace (2) adopt glass or silicon or stupalith, and substrate surface is smooth and smooth plane.
5. the integrated morphology of mixing of planar optical waveguide according to claim 1 and active optical component is characterized in that described brace (2) and planar optical waveguide (9) all are bonded on the substrate (7).
6. the integrated morphology of mixing of a planar optical waveguide and active optical component, comprise: a planar optical waveguide (9) and at least a active optical component (1), it is characterized in that, also be provided with substrate (10) and brace (2), described substrate (10) is by the integrally formed staircase structure of height two parts, described planar optical waveguide (9) is arranged on the high end parts of substrate (10), described brace (2) is arranged on the lower portion of substrate (10), the height of the high end parts of described substrate (10) is that the last plane of the planar optical waveguide (9) that is positioned on this high end parts and the last plane that is positioned at the brace (2) on substrate (10) lower portion are on the same surface level, and, described brace (2) is positioned at the bright dipping side of planar optical waveguide (9), and is an inclined-plane (8) at brace (2) over against the one side of planar optical waveguide (9) bright dipping side, being arranged on brace (2) and the planar optical waveguide (9) of described active optical component (1) level, the sensitive surface of described active optical component (1) or light-emitting area are over against the reflecting slant of brace (2).
7. the integrated morphology of mixing of planar optical waveguide according to claim 7 and active optical component, it is characterized in that, the inclined-plane (8) of described brace (2) is 45 ° ± 5 ° with the angle of bottom surface, and the horizontal range between the edge of the base on the inclined-plane (8) of described brace (2) and planar optical waveguide (9) bright dipping side is less than 50 microns.
8. the integrated morphology of mixing of planar optical waveguide according to claim 7 and active optical component, it is characterized in that, the inclined-plane (8) of described brace (2) is coated with one deck, and flashlight is had the rete of high reflex, described rete is the layer of metal film that multilayer dielectric film or the mode that adopts sputter plate.
9. the integrated morphology of mixing of planar optical waveguide according to claim 7 and active optical component is characterized in that, described substrate (10) and brace (2) adopt glass or silicon or stupalith, and substrate surface is smooth and smooth plane.
10. the integrated morphology of mixing of planar optical waveguide according to claim 7 and active optical component is characterized in that described brace (2) and planar optical waveguide (9) all are bonded on the substrate (10).
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010292074 CN101975981A (en) | 2010-09-26 | 2010-09-26 | Mixed integrated structure for planar optical waveguide and active optical device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010292074 CN101975981A (en) | 2010-09-26 | 2010-09-26 | Mixed integrated structure for planar optical waveguide and active optical device |
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| CN101975981A true CN101975981A (en) | 2011-02-16 |
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| CN 201010292074 Pending CN101975981A (en) | 2010-09-26 | 2010-09-26 | Mixed integrated structure for planar optical waveguide and active optical device |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981223A (en) * | 2012-12-07 | 2013-03-20 | 武汉光迅科技股份有限公司 | Optical waveguide chip and PD (photodiode) array coupling packaging structure |
| CN103376516A (en) * | 2012-04-27 | 2013-10-30 | 鸿富锦精密工业（深圳）有限公司 | Optical fiber transmission module |
| CN103400759A (en) * | 2013-08-06 | 2013-11-20 | 东南大学 | Grinding method of indium phosphide-based plane light wave light path waveguide chip and clamp applied to same |
| CN103424824A (en) * | 2012-05-25 | 2013-12-04 | 鸿富锦精密工业（深圳）有限公司 | Light transmission connection component and photoelectric conversion module using same |
| CN103454731A (en) * | 2012-06-01 | 2013-12-18 | 鸿富锦精密工业（深圳）有限公司 | Optics circuit board and photoelectricity communication module |
| CN104049319A (en) * | 2013-03-13 | 2014-09-17 | 鸿富锦精密工业（深圳）有限公司 | Optical communication device |
| CN104297867A (en) * | 2013-07-15 | 2015-01-21 | 鸿富锦精密工业（深圳）有限公司 | Optical communication device |
| CN106092080A (en) * | 2016-08-26 | 2016-11-09 | 武汉光迅科技股份有限公司 | PLC chip and lithium niobate modulator hybrid integrated optics |
| US9658412B2 (en) | 2013-03-08 | 2017-05-23 | Scienbizip Consulting (Shenzhen) Co., Ltd. | Optical communication device |
| CN104049315B (en) * | 2013-03-11 | 2017-06-16 | 赛恩倍吉科技顾问（深圳）有限公司 | Optical communication device |
| CN107340573A (en) * | 2017-08-25 | 2017-11-10 | 西安电子科技大学 | Lamination photoelectricity interconnects printed board and its implementation |
| CN109814201A (en) * | 2019-03-14 | 2019-05-28 | 青岛海信宽带多媒体技术有限公司 | A kind of optical module |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1251660A (en) * | 1997-02-07 | 2000-04-26 | 布克哈姆技术有限公司 | Device for reedirecting light from optical waveguide |
| CN1423145A (en) * | 2001-12-04 | 2003-06-11 | 松下电器产业株式会社 | Optical mounting substrate and optical device |
-
2010
- 2010-09-26 CN CN 201010292074 patent/CN101975981A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1251660A (en) * | 1997-02-07 | 2000-04-26 | 布克哈姆技术有限公司 | Device for reedirecting light from optical waveguide |
| CN1423145A (en) * | 2001-12-04 | 2003-06-11 | 松下电器产业株式会社 | Optical mounting substrate and optical device |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376516B (en) * | 2012-04-27 | 2016-07-06 | 鸿富锦精密工业（深圳）有限公司 | Fiber-optic transfer module |
| CN103376516A (en) * | 2012-04-27 | 2013-10-30 | 鸿富锦精密工业（深圳）有限公司 | Optical fiber transmission module |
| CN103424824A (en) * | 2012-05-25 | 2013-12-04 | 鸿富锦精密工业（深圳）有限公司 | Light transmission connection component and photoelectric conversion module using same |
| CN103454731A (en) * | 2012-06-01 | 2013-12-18 | 鸿富锦精密工业（深圳）有限公司 | Optics circuit board and photoelectricity communication module |
| CN103454731B (en) * | 2012-06-01 | 2016-08-03 | 鸿富锦精密工业（深圳）有限公司 | Optical circuit board and photoelectric communication module |
| CN102981223A (en) * | 2012-12-07 | 2013-03-20 | 武汉光迅科技股份有限公司 | Optical waveguide chip and PD (photodiode) array coupling packaging structure |
| CN102981223B (en) * | 2012-12-07 | 2014-10-01 | 武汉光迅科技股份有限公司 | Optical waveguide chip and PD (photodiode) array coupling packaging structure |
| US9658412B2 (en) | 2013-03-08 | 2017-05-23 | Scienbizip Consulting (Shenzhen) Co., Ltd. | Optical communication device |
| CN104049315B (en) * | 2013-03-11 | 2017-06-16 | 赛恩倍吉科技顾问（深圳）有限公司 | Optical communication device |
| CN104049319A (en) * | 2013-03-13 | 2014-09-17 | 鸿富锦精密工业（深圳）有限公司 | Optical communication device |
| CN104049319B (en) * | 2013-03-13 | 2017-08-08 | 赛恩倍吉科技顾问（深圳）有限公司 | optical communication device |
| CN104297867A (en) * | 2013-07-15 | 2015-01-21 | 鸿富锦精密工业（深圳）有限公司 | Optical communication device |
| CN103400759B (en) * | 2013-08-06 | 2016-04-20 | 东南大学 | The Ginding process of indium phosphide planar lightwave circuit waveguide chip and fixture |
| CN103400759A (en) * | 2013-08-06 | 2013-11-20 | 东南大学 | Grinding method of indium phosphide-based plane light wave light path waveguide chip and clamp applied to same |
| CN106092080A (en) * | 2016-08-26 | 2016-11-09 | 武汉光迅科技股份有限公司 | PLC chip and lithium niobate modulator hybrid integrated optics |
| CN106092080B (en) * | 2016-08-26 | 2019-04-09 | 武汉光迅科技股份有限公司 | PLC chip and lithium niobate modulator hybrid integrated optical device |
| CN107340573A (en) * | 2017-08-25 | 2017-11-10 | 西安电子科技大学 | Lamination photoelectricity interconnects printed board and its implementation |
| CN107340573B (en) * | 2017-08-25 | 2019-06-21 | 西安电子科技大学 | Lamination photoelectricity interconnects printed board and its implementation |
| CN109814201A (en) * | 2019-03-14 | 2019-05-28 | 青岛海信宽带多媒体技术有限公司 | A kind of optical module |
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Open date: 20110216 |