CN101968606B - 掩膜基板和边框胶固化*** - Google Patents
掩膜基板和边框胶固化*** Download PDFInfo
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- CN101968606B CN101968606B CN2009100899007A CN200910089900A CN101968606B CN 101968606 B CN101968606 B CN 101968606B CN 2009100899007 A CN2009100899007 A CN 2009100899007A CN 200910089900 A CN200910089900 A CN 200910089900A CN 101968606 B CN101968606 B CN 101968606B
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CN2009100899007A CN101968606B (zh) | 2009-07-27 | 2009-07-27 | 掩膜基板和边框胶固化*** |
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CN2009100899007A CN101968606B (zh) | 2009-07-27 | 2009-07-27 | 掩膜基板和边框胶固化*** |
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CN101968606A CN101968606A (zh) | 2011-02-09 |
CN101968606B true CN101968606B (zh) | 2013-01-23 |
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CN2009100899007A Expired - Fee Related CN101968606B (zh) | 2009-07-27 | 2009-07-27 | 掩膜基板和边框胶固化*** |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102650820B (zh) * | 2011-10-31 | 2014-02-26 | 北京京东方光电科技有限公司 | 一种掩膜架及光固化方法 |
CN102736324B (zh) * | 2012-06-25 | 2014-06-25 | 深圳市华星光电技术有限公司 | 框胶固化之光罩及液晶显示面板制作方法 |
JP6004582B2 (ja) * | 2013-04-30 | 2016-10-12 | 信越化学工業株式会社 | ペリクル |
CN109387960A (zh) * | 2018-11-01 | 2019-02-26 | 深圳市华星光电技术有限公司 | 框胶固化掩膜板、框胶固化***和框胶固化方法 |
CN109696454A (zh) * | 2018-12-28 | 2019-04-30 | 江苏日托光伏科技股份有限公司 | 一种验证mwt光伏组件边框胶固化速度的方法 |
CN113534600A (zh) * | 2021-06-28 | 2021-10-22 | 上海华虹宏力半导体制造有限公司 | 暗场图形的辅助图形及其设计方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1605397A (zh) * | 2003-09-29 | 2005-04-13 | Hoya株式会社 | 掩膜坯及掩膜坯的制造方法 |
CN101122737A (zh) * | 2006-08-07 | 2008-02-13 | 三星电子株式会社 | 被校正的光掩模对准误差及校正光掩模的对准误差的方法 |
JP2009116268A (ja) * | 2007-11-09 | 2009-05-28 | V Technology Co Ltd | フォトマスク及びそれを使用した凸状パターン形成方法 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1605397A (zh) * | 2003-09-29 | 2005-04-13 | Hoya株式会社 | 掩膜坯及掩膜坯的制造方法 |
CN101122737A (zh) * | 2006-08-07 | 2008-02-13 | 三星电子株式会社 | 被校正的光掩模对准误差及校正光掩模的对准误差的方法 |
JP2009116268A (ja) * | 2007-11-09 | 2009-05-28 | V Technology Co Ltd | フォトマスク及びそれを使用した凸状パターン形成方法 |
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Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150616 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150616 |
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Effective date of registration: 20150616 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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Granted publication date: 20130123 Termination date: 20210727 |