CN101944471A - Short arc discharge lamp - Google Patents
Short arc discharge lamp Download PDFInfo
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- CN101944471A CN101944471A CN2010102027956A CN201010202795A CN101944471A CN 101944471 A CN101944471 A CN 101944471A CN 2010102027956 A CN2010102027956 A CN 2010102027956A CN 201010202795 A CN201010202795 A CN 201010202795A CN 101944471 A CN101944471 A CN 101944471A
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- mentioned
- hydrogen
- hydrogen absorber
- cover body
- absorber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
- H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
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- Discharge Lamp (AREA)
- Projection Apparatus (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
A kind of short arc discharge lamp, in its luminous tube, have by possessing the radioparent airtight hollow container of hydrogen and the absorbing material of absorption hydrogen being enclosed the hydrogen absorber that this hollow container inside is become, provide above-mentioned hydrogen absorber is installed on electrode axis, and prevent the structure of this hydrogen absorber and interelectrode paradoxical discharge.It is characterized in that: to cover the mode of the hollow container that constitutes the hydrogen absorber, be provided with, on this cover body, form the connected entrance that is communicated with cover body inner space and discharge space by the cover body that materials with high melting point constituted.
Description
Technical field
The present invention relates to a kind of short arc discharge lamp, be applicable to that the exposure light source in manufacturing neck city etc. of semiconductor and liquid crystal and the backlight (back light) of projector use light source.
Background technology
Short arc discharge lamp is because to be disposed at the front end distance of the pair of electrodes in the luminous tube opposed to each other short and approach point-source of light, thereby by being used as the light source that light source that exposure device uses or the backlight of projector are used with the optical system combination.
Patent documentation 1 and 2 discloses existing short arc discharge lamp.As patent documentation 1 disclosed ground, luminous as the xenon-133 gas of luminous gas, quasi-molecule in the xenon short-arc lamp as xenon-133 gas, krypton-85 gas and the argon gas body of buffer gas in the mercury vapour short-arc lamp, can cause the problem that produces gonorrhoea at the discharge vessel inner face of quartz glass system.In the document, as the countermeasure of this kind problem, being defined as apart from the average OH base concentration of the scope of the inner face 200 μ m of the ultra violet radiation divergence the best part of this discharge vessel is 7.8 * 10
24Individual/m
3More than, and be 1.5 * 10 apart from the average OH base concentration of the scope of this inner surface degree of depth 20 μ m
25Individual/m
3More than 1.2 * 10
26Individual/m
3Below.So, in short arc discharge lamp, the situation that contains the OH base at the inner face of discharge vessel becomes general technology.
On the other hand, patent documentation 2 discloses following situation, promptly, if the OH base of high concentration is present in the zone of the inner surface that is in close proximity to luminous tube, then the lighting a lamp the initial stage of discharge lamp, along with the starting of lamp, it is very high that the temperature of luminous tube can become, thereby can emit the OH base from the luminous tube inner surface, the OH base of being emitted from the luminous tube inner surface becomes H
2O spreads in luminous tube.In the document,, will be defined as more than the 10ppm apart from the average OH base concentration of the scope of the inner face 20 μ m of ultra violet radiation divergence the best part, below the 190ppm as its countermeasure.
Comprise the OH base like this in luminous tube, this OH base is as H
2It is known that O spreads in emitting space.And, the H that in luminous tube, spreads
2O is used to from the heat of electric arc and is thermal decomposited be oxygen and hydrogen.By inventor's etc. wholwe-hearted research, find to be created on like this stability that hydrogen in the luminous tube can reduce illumination.The illumination stability be since electric arc rock cause to the amount of incident of the light of optical system and incident angle distribute change produce.The cycle of rocking is different along with the difference of optical system, and the illumination change becomes big what is called flicker between about several milliseconds to several seconds but be created in.The reduction of this illumination stability in image projection device, can become problem as the flicker of picture, and in exposure device, can cause the uneven problem of exposure.
Patent documentation 3 discloses and disposed the situation that absorbs the hydrogen absorber that is discarded to the hydrogen in the luminous tube in luminous tube.Figure 11 is the key diagram of summary of the structure of the expression document disclosed discharge lamp.Figure 12 represents the cross-section structure of the hydrogen absorber that discharge lamp possessed shown in Figure 11.
Discharge lamp shown in Figure 11 possesses: bulb (bulb) 201, electrode 202,203, sealing 204, metal forming 205.The 206th, quartz tube, the 207th, quartz pushrod, the 210th, hydrogen absorber.As shown in figure 12, hydrogen absorber 210 is made of metal sheath 213 and hydrogen absorbing material 214, this metal sheath 213 comprises that metal constituted that round-ended cylinder 211 and lid 212 are arranged by tantalum etc., this hydrogen absorbing material 214 is made of the yttrium cylindraceous that is sealed in these metal sheath 213 inside, be connected to the flange part 211A and lid 212 of round-ended cylinder 211 by electric resistance welding, make that the inside of metal sheath 213 is sealed.
So, this hydrogen absorber 210 ground as shown in the drawing utilize quartz tube 206 and are fixed in bulb, and the other end of the quartz pushrod 207 by will being located at this quartz tube 206 is deposited to be fixed in bulb 201 in bulb 201.Hydrogen in the bulb 201 has the radioparent metal sheath 213 of hydrogen and is immersed into the inside of metal sheath 213 via tantalum etc., is adsorbed by absorbing material 214.
According to the hydrogen absorber 210 that this document is put down in writing, hydrogen absorbing material 214 is owing to be sealed in the inside of metal sheath 213, thus can be not with emitting space in other material adsorb hydrogen with reacting.
Yet, as above-mentioned ground, hydrogen absorber 210 is installed on the structure of bulb 201, have the situation that the constituent silicon dioxide of hydrogen absorber 210 and bulb 201 reacts, thereby cause bulb devitrification and illumination to reduce, or cause bulb break.
In view of above-mentioned, the inventor etc. are in order to solve the shortcoming of above-mentioned prior art, motion once a kind of will by have the radioparent hollow container of hydrogen and the hydrogen absorber that absorbing material constituted that hydrogen is adsorbed in this hollow container inside be installed on electrode axis around structure.Japanese Patent Application 2009-048066 number is this motion.
Fig. 8 to Figure 10 represents this structure.In Fig. 8, short arc discharge lamp 10 possesses luminous tube 11 and the 12A of sealed tube portion, the 12B that are connected in its two ends.In the inside of luminous tube 11, dispose the main part 2B of negative electrode 2 and the main part 3B of anode 3 with facing one another face, and in discharge space S, enclose luminescent substance.
Negative electrode 2 is made of axial region 2A and the main part 2B also bigger than this axial region diameter, and in addition, anode 3 is made of axial region 3A and the main part 3B also bigger than this axial region diameter.
The X of Fig. 8 partly is illustrated in the position that the hydrogen absorber is installed among the discharge space S of luminous tube 11, and this hydrogen absorber is fixed in the axial region 2A of negative electrode 2.
The part key diagram of the mounting structure of Fig. 9 hydrogen absorber that to be expression partly enlarged the X of the short arc discharge lamp of Fig. 8, Figure 10 is the detailed structure view of hydrogen absorber.
In Figure 10, Figure 10 (A) is a stereogram of watching the hydrogen absorber from incline direction, Figure 10 (B) is the long side direction cutaway view with the A-A line sectility hydrogen absorber shown in Figure 10 (A), and Figure 10 (C) is the radial cross-section with the B-B line sectility hydrogen absorber shown in Figure 10 (A).
As shown in figure, hydrogen absorber 30 comprises by the straight tube-like hollow container 31 that metal constituted that hydrogen is seen through, and is sealed in the absorbing material 32 of the absorption hydrogen of these hollow container 31 inside.31A, 31A are sealed at both ends portions, and the two ends of straight tube member that constitute hollow container 31 are by crimping processing or deposited, welding and by airtight secretly.Thus, absorbing material in the hollow container 31 32 and discharge space are isolated, prevent that the interior gas of itself and discharge space from directly contacting, and this absorbing material 32 can not leak to the outside of hollow container 31.
In addition, hollow container 31 might not form sealing at its two ends, for example also can be to use the member of bottom tube-like and only seals the distolateral structure of one.
In addition, hollow container 31 is difficult for by hydrogen is seen through being constituted with the metal of mercury reaction, for example is made of tantalum or niobium.Tantalum and niobium can be monomers, also can be the compounds with other material.
By the hollow container 31 that these materials constituted, can hydrogen be seen through, and can prevent that especially discharge mediums such as absorbing material 32 and mercury from reacting, can also remove the impure gas of the hydrogen that produced in the luminous tube 11 etc.Hollow container 31 for example is that internal diameter is 3.0mm, and thickness is 0.1mm.
Being enclosed in the absorbing material 32 of hollow container 31 inside, is for example yttrium or zirconium.The material of so-called yttrium or zirconium has the absorption affinity of excellent hydrogen.Yttrium or zirconium can be monomers, also can be the compounds with other material.
As illustrated in fig. 9, have the mode of the hydrogen absorber 30 of said structure with the side of encirclement electrode axial region 2A, be configured with a plurality ofly apart from one another by ground along the circumferencial direction of this axial region 2A with being arranged in order, be fixed in the side of axial region 2A with the form parallel with the axis L of negative electrode 2.These hydrogen absorbers 30 are by making two fixed component 4A and 4B and surround each hollow container 31 and make it to be wound in the outside of each hollow container 31, thereby are fixed in the side of axial region 2A so that it can not drop from axial region 2A.
Utilize said structure, can avoid the react shortcoming of this prior art of hydrogen absorber and luminous tube, and, can give full play to making the hydrogen that in discharge space, produces be transmitted through inside, and utilize absorbing material 32 to come this function originally of absorption hydrogen by hollow container 31.
Yet, according to opinion thereafter such as inventor, prior art based on this previous application case, hydrogen absorber 30 is owing to its metallic hollow container 31 disposes with the state that is exposed to discharge space S, thereby according to the structure of lamp or the condition etc. of lighting a lamp, when starting if target 2 applies starting voltage with anode 3, this situation of paradoxical discharge then can take place between the hollow container 31 of anode 3 and hydrogen absorber 30 distinguished.
If this kind paradoxical discharge takes place, then on hollow container 31, can produce the hole, and through this hole, make the luminescent substances such as mercury of being enclosed discharge space S to react with absorbing material 32, cause reducing significantly, and become Insufficient situation as the hydrogen adsorption capacity of the original function of absorbing material 32.
Again, the hole on hollow container 31, absorbing material 32 can disperse to discharge space S, and is attached to bulb, thus the transmitance that causes bulb reduces, and the problem of radiating light reduction.
(patent documentation 1): No. 2891997, Japan Patent
(patent documentation 2): No. 3591470, Japan Patent
(patent documentation 3): Japanese Patent Publication 57-21835 number
Summary of the invention
The technical problem to be solved in the present invention, provide a kind of short arc discharge lamp, to be located in the luminous tube by the inclosure of the absorbing material of absorption hydrogen is had the hydrogen absorber that forms in the radioparent hollow container of hydrogen, it is characterized by: above-mentioned hydrogen absorber is installed on electrode axis, prevent the hydrogen that hydrogen absorber and luminous tube react and the discharge space of adsorbable luminous tube is interior, and, prevent the hollow container and the interelectrode paradoxical discharge of hydrogen absorber.
In order to solve above-mentioned problem, short arc discharge lamp of the present invention, it is characterized in that: above-mentioned hydrogen absorber is mounted in the mode that is wound in electrode axis, in the mode that covers this hydrogen absorber the cover body that is made of materials with high melting point is set, on this cover body, is formed with the inner space of this cover body of connection and the connected entrance of the discharge space in the luminous tube.
In addition, it is characterized in that: above-mentioned cover body is by the front bulkhead of the electrode body side that covers the hydrogen absorber and be connected in this front bulkhead and the side walls that covers the side of above-mentioned hydrogen absorber is constituted, and square end is by opening thereafter, and this open end constitutes above-mentioned connected entrance.
In addition, it is characterized in that: above-mentioned cover body by the front bulkhead of the electrode body side that covers the hydrogen absorber, be connected in this front bulkhead and cover above-mentioned hydrogen absorber the side side walls and be connected in this side walls and the aft bulkhead that covers a side opposite with the electrode body side of above-mentioned hydrogen absorber is constituted, above-mentioned connected entrance is formed at above-mentioned front bulkhead and/or side walls and/or aft bulkhead.
The invention effect
According to short arc discharge lamp of the present invention, because being installed on the hydrogen absorber of electrode axis is covered by the cover body that materials with high melting point became, thereby when the starting of discharge lamp, even between electrode, apply high voltage, can between hydrogen absorber and electrode paradoxical discharge not take place, as a result, can not cause situation based on the breakage of the hydrogen absorber of paradoxical discharge.
In addition, owing on cover body, be formed with the connected entrance of the inner space that is communicated with discharge space and cover body, thereby the hydrogen absorber in the cover body become with discharge space in the contacted structure of gas, and can utilize the hydrogen absorber to absorb the hydrogen that is present in discharge space reliably.
In addition, above-mentioned cover body is by the front bulkhead of the electrode body side that covers the hydrogen absorber and be connected in front bulkhead and the side walls that covers the side of hydrogen absorber is constituted, thereby the hydrogen absorber becomes and covers the structure that is easy to generate the part of paradoxical discharge between itself and the electrode most, can prevent paradoxical discharge reliably, prevent the breakage of hydrogen absorber reliably.
In addition, above-mentioned cover body by the front bulkhead of the electrode body side that covers the hydrogen absorber, be connected in this front bulkhead and cover the hydrogen absorber the side side walls and be connected in side walls and the aft bulkhead that covers a side opposite with the electrode body side of hydrogen absorber is constituted, thereby can fully cover the hydrogen absorber that is positioned at discharge space, prevent between hydrogen absorber and electrode, to take place the situation of paradoxical discharge reliably.
Description of drawings
Fig. 1 is the partial cross-sectional perspective view of mounting structure of the hydrogen absorber of expression short arc discharge lamp of the present invention.
Fig. 2 is the cutaway view of Fig. 1.
Fig. 3 is the cutaway view of other embodiment.
Fig. 4 is the cutaway view of other embodiment.
Fig. 5 is the cutaway view of other embodiment.
Fig. 6 is the key diagram of other embodiment.
Fig. 7 is the key diagram of other embodiment.
Fig. 8 is the overall diagram that shows the prior art of previous application.
Fig. 9 is the stereogram of the major part of Fig. 8.
Figure 10 is the details drawing of the hydrogen absorber of Fig. 9.
Figure 11 is the partial sectional view of prior art.
Figure 12 is the cutaway view of the major part of Figure 11.
Symbol description
2,3: electrode
2A, 3A: electrode axis
2B, 3B: electrode body
4A, 4B: fixed component
30: the hydrogen absorber
31: hollow container
50: cover body
51: front bulkhead
52: side walls
53: aft bulkhead
7: connected entrance
Embodiment
Fig. 1 is the hydrogen absorber 30 of the expression electrode axis 2A that is fixed in electrode 2 (Fig. 8) and the partial cross-sectional perspective view of the structure of cover body 50, and Fig. 2 is the axial cutaway view of its electrode.
In the drawings, hydrogen absorber 30 is structures same with above-mentioned prior art, utilizes fixed component 4A, 4B to be installed in electrode axis 2A.
In addition, be provided with cover body 50 in the mode that covers this hydrogen absorber 30.This cover body 50 is made of high-melting-point materials such as tungsten, molybdenum, tantalums.
This cover body 50 is by the front bulkhead 51 of the electrode body side that covers hydrogen absorber 30 and be connected in this front bulkhead 51 and the side walls 52 that covers the side of hydrogen absorber 30 is constituted, and square end 52A is by opening thereafter.
The part of above-mentioned front bulkhead 51 is engaged in electrode axis 2A by welding, makes cover body 50 become the state that is fixed in electrode axis 2A.
In addition, the open back square end 52A of this cover body 50 forms the connected entrance 7 of the inner space that is communicated with discharge space and cover body.
The following stated for example of representing above-mentioned cover body 50.
The front bulkhead 51 of cover body 50 is the discoid of diameter 6～40mm, and its center offers the hole that electrode axis 2A is connected.Side walls 52 is the length of cylinder and back square end one side with the hollow container 31 that surmounts hydrogen absorber 30, and has the length of 5～50mm in the electrode axis direction.
In addition, front bulkhead 51 is 0.3～5mm with the thickness of side walls 52.
Fig. 3 is the variation of cover body 50.
In addition, the part of front bulkhead 51 is engaged in electrode axis 2A by welding, makes cover body 50 become the state that is fixed in electrode axis 2A.
Fig. 4 is other variation of cover body 50.
In addition, be formed with the gap between above-mentioned front bulkhead 51 and electrode axis 2A, this gap constitutes connected entrance 7.
In addition, the part of aft bulkhead 53 is engaged in electrode axis 2A by welding, makes cover body 50 become the state that is fixed in axial region.
In addition, in above-mentioned Fig. 3 and embodiment shown in Figure 4, illustrated that the front bulkhead 51 that is formed at cover body 50 or the gap between aft bulkhead 53 and the electrode axis 2A constitute the such structure of connected entrance 7, but connected entrance 7 is not defined to this, can form openings with as connected entrance at front bulkhead 51 or aft bulkhead 53 yet.
Fig. 5 is the another variation of cover body 50.
In addition, in above-mentioned Fig. 3 to Fig. 5, illustrated respectively on aft bulkhead 53, front bulkhead 51, side walls 52, to be formed with the situation of connected entrance 7, but be not limited thereto that being arranged in can on or two or three of these walls.
That is, forming connected entrance 7 on front bulkhead 51 and/or side walls 52 and/or aft bulkhead 53 gets final product.
Fig. 6 is another variation of cover body 50.
Above-mentioned front bulkhead 51 and aft bulkhead 52, and electrode axis 2A between be formed with the gap respectively, this gap forms connected entrance 7,7.
In addition, at the electrode body side of front bulkhead 51 and the electrode body opposition side of aft bulkhead 53, be respectively equipped with the fixed component 9A, the 9B that constitute by helical spring etc. that move that prevent cover body 50.
In addition, the shape of the hollow container 31 of hydrogen absorber 30 is not limited to the straight tube-like as above-mentioned embodiment, also can be hollow and annular as illustrated in fig. 7.
In addition, though the diagram of not giving, the section of ring-type hollow container also can be circle etc.
This is mounted to the method for electrode axis, also can be, with elongated hollow container coiled type be wound in electrode axis.
That is, the shape of the hollow container 31 of hydrogen absorber 30 and the method that is installed on electrode axis thereof can adopt various forms.
In addition, for the surface that makes lid 50 can not become the discharge starting point of paradoxical discharge, the amount of oxide that is contained in the thorium oxide of cover body or group of the lanthanides is preferably 0.1W% below 1W%.
In addition, Fig. 3 is to cover body 50 shown in Figure 6, it is structure with front bulkhead 51, side walls 52 and aft bulkhead 53, thereby the hollow container 31 of hydrogen absorber 30 becomes the state that is positioned at cover body, according to the size relationship of hollow container 31, might not become the structure that hollow container 30 is fixed on electrode axis 2A by fixed component 4A, 4B with cover body 50.
Same diameter in addition, illustrates by electrode body and the electrode axis also littler and constitutes this structure of electrode, but be not limited thereto, for also can than its diameter.
In addition, represented on cathode axis, to install the structure of hydrogen absorber, but also can be installed on anode shaft.
As previously discussed, short arc discharge lamp of the present invention, to be installed on electrode axis by airtight hollow container and the hydrogen absorber of being enclosed wherein that absorbing material constituted, and cover body is set in the mode that covers this hydrogen absorber, thereby between the hollow container of this hydrogen absorber and electrode, can not produce paradoxical discharge, can not make the hollow container breakage, thereby realize guaranteeing its safe effect.
Claims (3)
1. short arc discharge lamp, possesses the luminous tube that forms discharge space, dispose in this luminous tube by electrode body and the pair of electrodes that electrode axis constituted that is connected with in this electrode body, in above-mentioned luminous tube, be provided with and the absorbing material of absorption hydrogen enclosed in the airtight hollow container that is made of the hydrogen transmission material and the hydrogen absorber that forms is characterized by:
Above-mentioned hydrogen absorber is installed on above-mentioned electrode axis,
This hydrogen absorber is covered by the cover body that materials with high melting point constituted, and is formed with the inner space of this cover body of connection and the connected entrance of above-mentioned discharge space on this cover body.
2. short arc discharge lamp as claimed in claim 1 is characterized by:
Above-mentioned cover body is by the front bulkhead of the electrode body side that covers above-mentioned hydrogen absorber and be connected in this front bulkhead and the side walls that covers the side of above-mentioned hydrogen absorber is constituted, and square end is by opening thereafter, and this open end constitutes above-mentioned connected entrance.
3. short arc discharge lamp as claimed in claim 1 is characterized by:
Above-mentioned cover body by the front bulkhead of the electrode body side that covers above-mentioned hydrogen absorber, be connected in this front bulkhead and cover above-mentioned hydrogen absorber the side side walls and be connected in this side walls and the aft bulkhead that covers a side opposite with the electrode body side of above-mentioned hydrogen absorber is constituted
Above-mentioned connected entrance is formed at above-mentioned front bulkhead and/or side walls and/or aft bulkhead.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP157429/2009 | 2009-07-02 | ||
| JP2009157429A JP4760964B2 (en) | 2009-07-02 | 2009-07-02 | Short arc type discharge lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101944471A true CN101944471A (en) | 2011-01-12 |
Family
ID=43299256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102027956A Pending CN101944471A (en) | 2009-07-02 | 2010-06-11 | Short arc discharge lamp |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4760964B2 (en) |
| KR (1) | KR101129963B1 (en) |
| CN (1) | CN101944471A (en) |
| DE (1) | DE102010022630B4 (en) |
| TW (1) | TW201103070A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114127884A (en) * | 2019-07-24 | 2022-03-01 | 迪睿合株式会社 | Protective element |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4826669B2 (en) * | 2009-11-05 | 2011-11-30 | ウシオ電機株式会社 | Short arc type discharge lamp |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002279932A (en) * | 2001-03-19 | 2002-09-27 | Ushio Inc | Discharge lamp |
| CN1953137A (en) * | 2005-10-18 | 2007-04-25 | 株式会社Orc制作所 | Sealing structure of discharge lamp |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| NL7315641A (en) * | 1973-11-15 | 1975-05-20 | Philips Nv | HIGH PRESSURE GAS DISCHARGE LAMP. |
| NL7611137A (en) * | 1976-10-08 | 1978-04-11 | Philips Nv | HIGH PRESSURE DISCHARGE LAMP. |
| JPS5847857B2 (en) | 1980-07-14 | 1983-10-25 | 富士通株式会社 | expansion device |
| JPS59132156U (en) * | 1983-02-24 | 1984-09-04 | 東芝ライテック株式会社 | cold cathode discharge lamp |
| EP0360927A1 (en) * | 1988-09-30 | 1990-04-04 | Gte Sylvania N.V. | Improved high vacuum lamp and getter means used to this end |
| JP2801692B2 (en) * | 1989-11-07 | 1998-09-21 | 三井化学株式会社 | Method for producing silyl peroxide |
| JPH0613036A (en) * | 1992-06-29 | 1994-01-21 | Ise Electronics Corp | Discharge tube |
| JP3380615B2 (en) * | 1994-02-09 | 2003-02-24 | 株式会社ワコム電創 | Short arc discharge lamp |
| JP3077538B2 (en) * | 1994-11-29 | 2000-08-14 | ウシオ電機株式会社 | Short arc mercury lamp |
| JP3158955B2 (en) * | 1995-04-12 | 2001-04-23 | ウシオ電機株式会社 | Short arc type mercury discharge lamp |
| JP2891997B1 (en) * | 1998-05-28 | 1999-05-17 | ウシオ電機株式会社 | UV lamp |
| JP2000149872A (en) * | 1998-11-10 | 2000-05-30 | Ushio Inc | Short-arc type discharge lamp |
| DE19951445C1 (en) * | 1999-10-25 | 2001-07-19 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Mercury short-arc lamp for exposure system, has specific diameter relation between head and rod of electrode and specific angle between longitudinal axis of electrode and imaginary auxiliary line |
| JP2009048066A (en) | 2007-08-22 | 2009-03-05 | Fujifilm Corp | Holographic recording medium and device |
| JP4591583B2 (en) * | 2008-09-10 | 2010-12-01 | ウシオ電機株式会社 | Discharge lamp |
| JP4650562B2 (en) * | 2008-12-03 | 2011-03-16 | ウシオ電機株式会社 | Short arc type discharge lamp |
| JP4678059B2 (en) * | 2009-03-02 | 2011-04-27 | ウシオ電機株式会社 | Short arc type discharge lamp |
-
2009
- 2009-07-02 JP JP2009157429A patent/JP4760964B2/en not_active Expired - Fee Related
-
2010
- 2010-05-05 TW TW99114383A patent/TW201103070A/en not_active IP Right Cessation
- 2010-05-12 KR KR1020100044430A patent/KR101129963B1/en not_active IP Right Cessation
- 2010-06-04 DE DE201010022630 patent/DE102010022630B4/en not_active Expired - Fee Related
- 2010-06-11 CN CN2010102027956A patent/CN101944471A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002279932A (en) * | 2001-03-19 | 2002-09-27 | Ushio Inc | Discharge lamp |
| CN1953137A (en) * | 2005-10-18 | 2007-04-25 | 株式会社Orc制作所 | Sealing structure of discharge lamp |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114127884A (en) * | 2019-07-24 | 2022-03-01 | 迪睿合株式会社 | Protective element |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI359438B (en) | 2012-03-01 |
| DE102010022630A1 (en) | 2011-01-05 |
| KR20110002784A (en) | 2011-01-10 |
| TW201103070A (en) | 2011-01-16 |
| JP4760964B2 (en) | 2011-08-31 |
| DE102010022630B4 (en) | 2012-10-31 |
| JP2011014375A (en) | 2011-01-20 |
| KR101129963B1 (en) | 2012-03-28 |
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Application publication date: 20110112 |