CN101893592A - Method for preparing carbon nano-tube gas-sensitive sensors - Google Patents

Method for preparing carbon nano-tube gas-sensitive sensors Download PDF

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Publication number
CN101893592A
CN101893592A CN 201010208238 CN201010208238A CN101893592A CN 101893592 A CN101893592 A CN 101893592A CN 201010208238 CN201010208238 CN 201010208238 CN 201010208238 A CN201010208238 A CN 201010208238A CN 101893592 A CN101893592 A CN 101893592A
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carbon nano
tube
tubes
gas
sensitive sensors
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潘敏
杨昊
王仁慧
李春香
韦彩虹
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The invention discloses a method for preparing carbon nano-tube gas-sensitive sensors, which is characterized in that: based on the principle of dielectrophoresis, carbon nano-tubes are arranged on interdigital gold electrodes to form a film by using an alternating-electric field, and in the process of preparation, A) the carbon nano-tubes are subjected to acidizing and sonic oscillation so as to form carbon nano-tube electrophoresis buffer; B) based on the principle of dielectrophoresis, carbon nano-tubes are directionally arranged between the interdigital gold electrodes under the action of the alternating-electric field so as to form a uniform and dense carbon nano-tube film; and C) the optimal electrophoretic parameters are that: the field frequency is 10MHz, the voltage amplitude is 10V, and the electrophoresis settling time is 5 minutes. Compared with the prior art, the method for preparing the carbon nano-tube gas-sensitive sensors has the advantages that: the catalyst pollution problem cannot be caused in the process of preparation, expensive instruments and vacuum environment are not required, the operation is simple, and the time and labor can be saved; the method is suitable for mass production of the carbon nano-tube gas-sensitive sensors, the impurities generated in the process of preparing the carbon nano-tubes can be removed, and the performance of the film can be improved; and the obtained sensors are small in volume, high in sensitivity, high in response speed and uniform in distribution, and can perform detection at normal temperature.

Description

A kind of preparation method of carbon nano-tube gas-sensitive sensors
Technical field
The present invention relates to a kind of gas sensor, particularly a kind of preparation method of carbon nano-tube gas-sensitive sensors.
Technical background
Carbon nano-tube has just received the concern of many research fields with its particular structure, excellent electric property and stable chemico-physical properties since coming out.Kong in 2000 etc. have reported that on Science Single Walled Carbon Nanotube is at NO 2And NH 3The result of study that resistance changes under the environment indicates that carbon nano-tube constitutes the beginning of gas sensor as sensitive material.The gas sensor that adopts carbon nano-tube to make has that volume is little, can detect under the normal temperature, highly sensitive, advantage such as response speed is fast.
And to realize that carbon nano-tube is applied in the micro-nano device as function element, and need carbon nano-tube be arranged between two electrodes usually, so that measure the variation of nano material with measuring object, the form with electric signal spreads out of simultaneously.At present, the normally used method that carbon nano-tube is placed in appointed positions has three kinds.First kind is to adopt the method that is coated with, promptly nano material is dissolved in and forms suspending liquid in the solvent, directly be coated on the substrate of electrode again, solvent evaporates is fallen after the oven dry, can exist the part nano material to be connected across between two electrodes, the skewness of the nano material on the electrode of application by this method, and uncontrollable, and the selectivity of dispensing area is also relatively poor; Second method is the oriented growth method, and promptly direct oriented growth nano material on electrode although this process is controlled, can be brought the catalyst contamination problem, and the kind of the nano material that can control with the oriented growth method also is restricted; The third method is that instrument is accurately controlled method, promptly controls nano material by accurate instrument, and material is put into the target location, and this method needs expensive instrument and vacuum environment, and operation easier is big, wastes time and energy.
Dielectrophoresis technology (abbreviating DEP as) is a kind of very potential nano material technology of arranging, and by controlled electric field, can be implemented in oriented alignment nano material on the electrode.And this alignment technology is not subjected to the restriction of the electric conductivity of material own, material shape, go for all nano materials in theory, comprise carbon nano-tube, metal oxide nano-material, DNA etc., thus can utilize dielectrophoresis carry out carbon nano-tube resettlement, arrange, locate, separate and screening etc. is controlled.
People such as Yamamoto utilize dielectrophoresis technology that carbon nano-tube has been done directional operation at first, in recent years, also have a lot of people to study AC field or DC electric field and relation carbon nano-tube oriented, that arrange, and ac electric field strength, frequency height are to the influence of orientation.The present invention proposes technology of preparing, carbon nano-tube is arranged, and drawn the parameters optimization for preparing carbon nano tube sensor with the dielectrophoresis method with AC field based on the quantitative carbon nano-tube gas-sensitive sensors of DEP.
Summary of the invention
The object of the present invention is to provide a kind of preparation method of carbon nano-tube gas-sensitive sensors, comprise the preparation carbon nano-tube electrophoretic liquid, the processing of sensor electrode, the preparation of the carbon nano tube sensor that the dielectrophoresis method is arranged, have being evenly distributed, become the fast advantage of mould, suitable for mass production can also be removed the impurity of the generation in the made of carbon nanotubes process, improves the performance of film.
A kind of preparation method of carbon nano-tube gas-sensitive sensors is characterized in that adopting following steps:
A) selected have 13 pairs of interdigital gold electrodes as sensor electrode, and interdigital width and interdigital spacing are all 40 μ m, soaked 10 minutes in piranha solution, again through sonic oscillation 10 minutes, dries up standby afterwards with nitrogen after cleaning with absolute ethyl alcohol;
B) preparation carbon nano-tube electrophoretic liquid, the mix acid liquor of the elder generation's preparation red fuming nitric acid (RFNA) and the concentrated sulphuric acid, the volume ratio of the red fuming nitric acid (RFNA) and the concentrated sulphuric acid is 1: 3; Get an amount of multi-walled carbon nano-tubes and pour in the container that mix acid liquor is housed, and stir, at room temperature disperseed 30 minutes, disperseed 8 hours down at 80 ℃ again, be cooled to room temperature and form potpourri with the sonic oscillation washer; Potpourri is repeated suction filtration and cleaning, to the pH of mixed value be 7; Cleaning and filtering to neutral multi-walled carbon nano-tubes is placed 60 ℃ of baking oven dry for standby; The carbon nano-tube of getting after an amount of processing places absolute ethyl alcohol to be mixed with the multi-walled carbon nano-tubes electrophoresis liquid that concentration is 0.1mg/ml;
C) get the multi-walled carbon nano-tubes absolute ethyl alcohol electrophoresis liquid that above-mentioned concentration is 0.1mg/ml, splash in the ELISA Plate, the more interdigital gold electrode of handling well is immersed in this multi-walled carbon nano-tubes absolute ethyl alcohol electrophoresis liquid; With the two ends of interdigital gold electrode respectively and function signal generator both positive and negative polarity connect, with the dielectrophoresis method carbon nano-tube of arranging, formation carbon nano-tube gas-sensitive film is made carbon nano-tube gas-sensitive sensors; Best electrophoresis parameter: frequency is 10MHz, and voltage amplitude is 10V, and the settling time is 5 minutes.
Compare with prior art, advantage of the present invention is: 1) because the sensor electrode that adopts is to have 13 pairs of interdigital gold electrodes, interdigital width and interdigital spacing all are 40 μ m, so the volume of the gas sensor that the present invention obtains is very little; 2) character of the carbon nano-tube material sensor that determined the present invention to obtain has the advantage highly sensitive, that response speed is fast; 3) because dielectrophoresis technology passes through controlled electric field, can be implemented in oriented alignment nano material on the electrode, and be not subjected to the restriction of the electric conductivity of material own, material shape, so process of the present invention has controllability, the gas sensor that obtains is evenly distributed, film forming is fast, can also remove the impurity that produces in the made of carbon nanotubes process, improves the performance of film; 4) the present invention does not need to control orientation with catalyzer, so can not bring the catalyst contamination problem; Do not need expensive instrument and vacuum environment, so simple to operate, time saving and energy saving yet; 5) the present invention has quantitatively drawn best electrophoresis parameter: frequency is 10MHz, and voltage amplitude is 10V, and the settling time is 5 minutes.
Description of drawings
Fig. 1 is interdigital gold electrode vertical view, and 1a is air-sensitive film coating place, and 2a is a gold electrode, and 3a is a contact conductor.
Fig. 2 is the AC field carbon nano-tube synoptic diagram of arranging, and 1b is an AC power, and 2b is a multi-walled carbon nano-tubes solution, and 3b is a carbon nano-tube.
Fig. 3 is the arrange distribution design sketch of carbon nano-tube of AC field.
The arrange SEM figure of carbon nano-tube when Fig. 4 is 10MHz, 10V, 5min for the alternating current electrophoresis parameter on interdigital gold electrode.
Fig. 5 is an air-sensitive experiment test system synoptic diagram, the 1st, and nitrogen cylinder, the 2nd, drying tube, the 3rd, gas admittance valve, the 4th, nitrogen, the 5th, syringe, the 6th, sensor electrode, the 7th, air chamber (400ml), the 8th, CHI electrochemical analyser, the 9th, air outlet valve, the 10th, waste gas, the 11st, PC.
Fig. 6 is the absorption and the desorption synoptic diagram of multi-wall carbon nano-tube tube sensor.
Fig. 7 is the multi-wall carbon nano-tube tube sensor of the dielectrophoresis method preparation electric current-time plot to ammonia.
The linear fit curve that the multi-wall carbon nano-tube tube sensor that Fig. 8 prepares for the dielectrophoresis method responds ammonia.
Embodiment
Embodiment 1:
A kind of preparation method of carbon nano-tube gas-sensitive sensors is characterized in that adopting following steps:
A) selected have 13 pairs of interdigital gold electrodes as sensor electrode, and interdigital width and interdigital spacing are all 40 μ m, soaked 10 minutes in piranha solution, again through sonic oscillation 10 minutes, dries up standby afterwards with nitrogen after cleaning with absolute ethyl alcohol;
B) preparation carbon nano-tube electrophoretic liquid; Prepare the mix acid liquor of the red fuming nitric acid (RFNA) and the concentrated sulphuric acid earlier, the volume ratio of the red fuming nitric acid (RFNA) and the concentrated sulphuric acid is 1: 3; Get an amount of multi-walled carbon nano-tubes and pour in the container that mix acid liquor is housed, and stir, at room temperature disperseed 30 minutes, disperseed 8 hours down at 80 ℃ again, be cooled to room temperature and form potpourri with the sonic oscillation washer; Potpourri is repeated suction filtration and cleaning, to the pH of mixed value be 7; Cleaning and filtering to neutral multi-walled carbon nano-tubes is placed 60 ℃ of baking oven dry for standby; The carbon nano-tube of getting after an amount of processing places absolute ethyl alcohol to be mixed with the multi-walled carbon nano-tubes electrophoresis liquid that concentration is 0.1mg/ml;
C) get the multi-walled carbon nano-tubes absolute ethyl alcohol electrophoresis liquid that above-mentioned concentration is 0.1mg/ml, splash in the ELISA Plate, the more interdigital gold electrode of handling well is immersed in this multi-walled carbon nano-tubes absolute ethyl alcohol electrophoresis liquid; With the two ends of interdigital gold electrode respectively and function signal generator both positive and negative polarity connect, with the dielectrophoresis method carbon nano-tube of arranging, formation carbon nano-tube gas-sensitive film is made carbon nano-tube gas-sensitive sensors; Best electrophoresis parameter: frequency is 10MHz, and voltage amplitude is 10V, and the settling time is 5 minutes.
The gas sensing property test of the carbon nano-tube gas-sensitive sensors of dielectrophoresis method preparation:
The test gas that the present invention uses is an ammonia, adopts high concentration ammoniacal liquor (density is 0.88g/ml, and ammoniacal liquor content is 25%) to make.Get the gas cylinder of 600ml, add about 20ml lime powder therein, seal with rubber stopper.Ammoniacal liquor with syringe extraction 1.16ml splashes in the gas cylinder by pin hole, extracts syringe out, clings the pin mouth with adhesive tape again.Steam and calcium oxide in the ammoniacal liquor are fully reacted, left standstill 12 hours.Be ready to the small gas cylinder of 5 140ml, from the gas cylinder of 600ml, extract the original high concentration ammonia of 1ml, inject the small gas cylinder that posts first 140ml rapidly with syringe.Because the reaction air chamber that adopts in our experiment is 400ml,, can calculates the ammonia concentration that reacts air chamber this moment and be so, squeeze into the reaction air chamber if from the small gas cylinder of first 140ml, extract 1ml gas: The rest may be inferred, extracts original high concentration ammonia respectively and make remaining bottle gas concentration be respectively 20ppm, 40ppm, 60ppm, 80ppm from the gas cylinder of 600ml.
The synoptic diagram of whole experiment device as shown in Figure 5.Test macro is made up of nitrogen cylinder, gas admittance valve, air outlet valve, syringe, air chamber (test chamber), CHI660A electrochemical analyser, computing machine, exhaust gas processing device.The air-sensitive experiment is carried out in sealed gas chamber, when beginning to detect, opens gas admittance valve and air outlet valve, opens the pressure valve of nitrogen cylinder again, to 5 minutes nitrogen of total system feeding, the air in the discharge system.And then close gas admittance valve and air outlet valve, and extract the ammonia of the respective concentration that configures with syringe, inject air chamber.The method that in the CHI660A electrochemical analyser resistance variations of sensor is detected is electric current-time series analysis (an i-t method).The i-t method promptly adds a constant voltage at the electrode two ends, the electric current of potential electrode can be used to observe the transient behavior of electrode resistance (electricity is led) before and after gas injects and changes over time.
In order to study the dynamic response process of multi-wall carbon nano-tube tube sensor, come the transient behavior of testing sensor before and after ammonia injects to change with the electric current-time method of CHI660A electrochemical analyser to ammonia.Fig. 6 is that sensor is exposed to the electric current-time curve in the ammonia of 30ppm.As can be seen from Figure 6, the A-C section is the process of carbon nano tube sensor absorbing ammonia, and the C-D section is the process of carbon nano-tube desorption ammonia.It can also be seen that from figure after the multi-wall carbon nano-tube tube sensor touched ammonia, electric current descended, resistance increases, wait feed nitrogen after, the current value of sensor is elevated to initial value again.This explanation ammonia has caused the decline of the conductive capability of carbon nano-tube in the absorption of multi-wall carbon nano-tube tube-surface.
In this experiment, we prepare the ammonia of 10ppm, 20ppm, 40ppm, 60ppm, these 5 concentration gradients of 80ppm with the method for aforementioned introduction, as gas to be measured.Electric current-time series analysis function under the constant voltage of selection CHI660 electrochemical analyser, test voltage is constant to be 0.01V.All experiments are all at room temperature carried out.Fig. 7 is the electric current-time curve of the multi-wall carbon nano-tube tube sensor of dielectrophoresis method preparation to ammonia.As can be seen, along with the rising of gas concentration, absorption and desorption time are elongated, and it is big that the sensitivity of sensor also becomes.
We react the air-sensitive response of finite concentration lower sensor than the stationary value once more of sensor current in last each test with the current change quantity of sensor.Promptly
ΔR = ( R - R 0 ) R 0 × 100 % = ( R R 0 - 1 ) × 100 % = ( I 0 I - 1 ) × 100 %
I wherein 0Be the initial current value of sensor, I is that sensor is exposed in the gas to be measured, and electric current reaches the test value when stablizing once more.
Can calculate air-sensitive response, response time and the release time of the multi-wall carbon nano-tube tube sensor of dielectrophoresis method preparation according to Fig. 7 to the ammonia of 10ppm, 20ppm, 40ppm, 60ppm and 80ppm concentration, as shown in table 1.
Fig. 8 draws the linear fit curve that forms according to the data of the gas concentration in the table 1 and sensor response, and the multi-wall carbon nano-tube tube sensor that obtains the preparation of dielectrophoresis method to the air-sensitive response formula of ammonia is:
Y=0.01642X+1.69733 R 2=0.97484
Definition K is the resistance change rate of sensor with respect to the gas to be measured of 10ppm concentration, i.e. the slope value of the match linear line of unit resistance rate of change-gas concentration curve, and unit is ohm/10ppm.The size of K value can reflect the size cases of transducer sensitivity more intuitively.R 2Then reacted the linearity that transducer sensitivity changes with gas concentration.Therefore, be 0.01642 with the K value of this sensor of dielectrophoresis method preparation, R 2Value is 0.97484.
The air-sensitive performance parameter of the multi-wall carbon nano-tube tube sensor of table 1 dielectrophoresis method preparation
Gas concentration (ppm) Sensor response (%) Response time (s) Release time (s)
?10 1.916 11.76 ?17.76
?20 1.939 13.52 ?17.52
?40 2.336 14.64 ?20.64
?60 2.744 14.88 ?23.52
?80 2.961 17.76 ?26.4

Claims (2)

1. the preparation method of a carbon nano-tube gas-sensitive sensors is characterized in that adopting following steps:
A) selected have 13 pairs of interdigital gold electrodes as sensor electrode, and interdigital width and interdigital spacing are all 40 μ m, soaked 10 minutes in piranha solution, again through sonic oscillation 10 minutes, dries up standby afterwards with nitrogen after cleaning with absolute ethyl alcohol;
B) preparation carbon nano-tube electrophoretic liquid: prepare the mix acid liquor of the red fuming nitric acid (RFNA) and the concentrated sulphuric acid earlier, the volume ratio of the red fuming nitric acid (RFNA) and the concentrated sulphuric acid is 1: 3; Get an amount of multi-walled carbon nano-tubes and pour in the container that mix acid liquor is housed, and stir, at room temperature disperseed 30 minutes, disperseed 8 hours down at 80 ℃ again, be cooled to room temperature and form potpourri with the sonic oscillation washer; Potpourri is repeated suction filtration and cleaning, to the pH of mixed value be 7; Cleaning and filtering to neutral multi-walled carbon nano-tubes is placed 60 ℃ of baking oven dry for standby; The carbon nano-tube of getting after an amount of processing places absolute ethyl alcohol to be mixed with the multi-walled carbon nano-tubes electrophoresis liquid that concentration is 0.1mg/ml;
C) get the multi-walled carbon nano-tubes absolute ethyl alcohol electrophoresis liquid that above-mentioned concentration is 0.1mg/ml, splash in the ELISA Plate, the more interdigital gold electrode of handling well is immersed in this multi-walled carbon nano-tubes absolute ethyl alcohol electrophoresis liquid; With the two ends of interdigital gold electrode respectively and function signal generator both positive and negative polarity connect, with the dielectrophoresis method carbon nano-tube of arranging, formation carbon nano-tube gas-sensitive film is made carbon nano-tube gas-sensitive sensors.
2. the preparation method of a carbon nano-tube gas-sensitive sensors, it is characterized in that: best electrophoresis parameter is that frequency is 10MHz, and voltage amplitude is 10V, and the settling time is 5 minutes.
CN 201010208238 2010-06-24 2010-06-24 Method for preparing carbon nano-tube gas-sensitive sensors Pending CN101893592A (en)

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Cited By (3)

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CN104891424A (en) * 2015-05-28 2015-09-09 东北大学 New parallel electric field type photoelectric chip capable of chaining carbon nano tubes
CN110927220A (en) * 2019-12-10 2020-03-27 苏州慧闻纳米科技有限公司 Preparation method of gas-sensitive material for detecting ammonia gas and gas sensor
CN111413374A (en) * 2020-04-20 2020-07-14 苏州慧闻纳米科技有限公司 Preparation method of gas-sensitive material for detecting hydrogen sulfide at room temperature and gas sensing chip

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CN104891424A (en) * 2015-05-28 2015-09-09 东北大学 New parallel electric field type photoelectric chip capable of chaining carbon nano tubes
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CN110927220A (en) * 2019-12-10 2020-03-27 苏州慧闻纳米科技有限公司 Preparation method of gas-sensitive material for detecting ammonia gas and gas sensor
CN111413374A (en) * 2020-04-20 2020-07-14 苏州慧闻纳米科技有限公司 Preparation method of gas-sensitive material for detecting hydrogen sulfide at room temperature and gas sensing chip
CN111413374B (en) * 2020-04-20 2024-01-16 苏州慧闻纳米科技有限公司 Preparation method of gas-sensitive material for detecting hydrogen sulfide at room temperature and gas sensing chip

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Application publication date: 20101124