CN101893429A - Super-precision surface measuring system based on polarization phase-shifting microscopy interference technology - Google Patents
Super-precision surface measuring system based on polarization phase-shifting microscopy interference technology Download PDFInfo
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Abstract
The invention provides a super-precision surface measuring system based on a polarization phase-shifting microscopy interference technology, belonging to the field of an optical precision measurement technology. The system comprises a light source (1), a collimating mirror (2), a linear polarizer (3), a depolarization amici prism (4), a microscope (5), a polarization amici prism (6), a reference plane mirror (8), 1/4 wave plate (9), an analyzer (10), an imaging device (11) and a data processing system (12). The invention combines the polarization phase-shifting technology and the Michelson interference microscopy, overcomes a series of problems of the PZT phase-shifting method in a general phase-shifting microscopy interference system and has the advantages of simple structure, simple and accurate phase-shifting, high measuring precision, fast measuring speed and the like.
Description
Technical field
A kind of measuring system based on polarization phase-shifting micro-interference art of the present invention belongs to technical field of optical precision measurement.This system is mainly used in the measurement of ultraprecise (nanometer is to sub-micron) surface profile and structure.
Background technology
Along with the continuous development of Technology of Precision Measurement, the phase shift interference microscopy has obtained application more and more widely.It is a kind of position interference measuring method that optical interference art and digital phase-shifting technique technology are combined, and has the characteristics (referring to list of references [1]) of 3 D non-contacting type, nanometer resolution.Its measuring principle is: add accurate phase shifting device in system's micro-interference light path, make between measuring light and the reference light and constantly produce a relative phase shifts, constitute the multi-frame interferometry figure on the time series, detector is surveyed the sequence interference light intensity at each pixel place, and light intensity numerical value is sent into the tested phase place that COMPUTER CALCULATION obtains each pixel place.Yet, the phase shift interference microtechnic need accurately provide amount of phase shift, and the piezoelectric ceramics (PZT) that adopts usually drives the method for reference mirror phase shift owing to being subjected to the PZT effect of nonlinear to have phase displacement error (referring to list of references [2]), while PZT phase shift change reference mirror and microscopical relative position, the reference corrugated of each phase shift interference is in fact changed, introduce measuring error.
List of references [1] J.Schwider, " Advanced evaluation technique in interferometry, " in Prog.Opt.28,271-359 (1990) .[2] J.E.Greivenkamp and J.H.Brurninf, " Phase shiftinginterferometry; " in Optical Shop Testing, D.Malacara, Ed., pp.547-655, Wily, Hoboken, NJ (2007).
List of references [2] Wyant JC.Effect of piezoelectric transducer nonlinearity on phase shiftinterferometry.Appl.Opt.26:1112-6 (1987).
Summary of the invention
The objective of the invention is a series of problems of existing for the PZT phase-moving method that overcomes in the common phase shift micro-interference system, propose a kind of polarization phase-shifting micro-interference system that polarization phase-shifting (Polarized phase-shifting) technology is combined with the Michelson interference microscopy, realized the measurement of ultraprecise (nanometer is to sub-micron) surface profile and structure.
The objective of the invention is to be achieved through the following technical solutions.
A kind of polarization phase-shifting micro-interference system, be used to realize the measurement of ultra-precision surface profile and structure, this system comprises light source, collimating mirror, linear polarizer, depolarization Amici prism, microscope, polarization splitting prism, reference planes mirror, quarter wave plate, analyzer, imaging device and data handling system
The monochromatic light that sends from light source passes collimating mirror and linear polarizer becomes the linear polarization collimated light, entered microscope by the reflection of depolarization Amici prism, being polarized Amici prism after the outgoing vertically is divided into along the s component of X-direction with along the p component of Y direction, described s component incides reference planes mirror back reflection returns conduct with reference to light, the transmission of described p component is by behind the polarization splitting prism, incide measured surface, note the elevation information back reflection of measured surface and return as measuring light; Described reference light and measuring light are converged at the branch optical plane place of described this polarization splitting prism, the polarization phase-shifting interference takes place after together passing quarter wave plate and analyzer again, described imaging device is surveyed and is obtained interferogram, and input data processing system is handled and promptly obtained measured surface micro-profile and structure.
The invention has the beneficial effects as follows, combine polarization phase-shifting (Polarized phase-shifting) technology and Michelson interference microscopy, have simple in structurely, phase shift is simple and precision is high, measuring accuracy height, characteristics such as measuring speed is fast.
Description of drawings
Fig. 1 is the light path principle figure of polarization phase-shifting micro-interference of the present invention system.Wherein, 1-single color point light source, 2-collimating mirror, 3-linear polarizer, 4-depolarization Amici prism, 5-long reach microscope, 6-polarization splitting prism, 7-measured object, 8-plane reference mirror, 9-1/4 slide, 10-analyzer, 11-imaging device, 12-data handling system.
Embodiment
The present invention is used in combination polarization phase-shifting (Polarized phase-shifting) technology and Michelson interference microscopy.As shown in Figure 1, surface measurement of the present invention system comprises light source 1, collimating mirror 2, linear polarizer 3, depolarization Amici prism 4, long reach microscope 5, polarization splitting prism 6, reference planes mirror 8, quarter wave plate 9, analyzer 10, imaging device 11, data handling system 12.
The monochromatic light that sends from light source 1 passes collimating mirror 2 and linear polarizer 3 becomes the linear polarization collimated light, entered long reach microscope 5 by 4 reflections of depolarization Amici prism, be polarized Amici prism 6 vertical separated into two parts after the outgoing, promptly along the s component of X-direction with along the p component of Y direction.Wherein the s component incides reference mirror 8 and reflects conduct with reference to light through polarization splitting prism 6 reflections, and the p component incides measured surface 7 through polarization splitting prism 6 transmissions, notes the elevation information of measured surface, reflects as measuring light.This two-beam converges at the branch optical plane place of polarization splitting prism 6, together passes quarter wave plate 9 and analyzer 10 back generation polarization interferences, and wherein, the optical axis of quarter wave plate must be at 45 with X-axis.Phase shift interference is that the rotation by analyzer 10 realizes, when analyzer 10 rotation β angles, the phase-shift phase of 2 β has just produced.Then, obtain the multistep phase shifting interference by imaging device 11 (being preferably CCD) detection, separate the processing of wrapping up algorithm through phase extraction algorithms and phase place and obtain PHASE DISTRIBUTION, can obtain measured surface micro-profile and structure according to the relation of PHASE DISTRIBUTION and measured surface height.
Depolarization Amici prism 4 plays an important role with polarization splitting prism 6 in the system of the present invention.Depolarization Amici prism 4 mainly is the incident direction that changes light, but does not change the polarization of incident light attitude; Polarization splitting prism 6 mainly is the two-way light that the linearly polarized light of incident is resolved into the polarization state quadrature.If change depolarization Amici prism 4 into polarization splitting prism or common Amici prism, then can want ghost image sound measurement result even cause measuring failure.
Rotation by analyzer 10 in the system of the present invention realizes phase shift, because rotation angle can have degree of precision, and makes things convenient for Linear Control, thereby can guarantee high phase shift precision.Simultaneously, so phase shift realizes, does not have one phase shifting method such as PZT to drive the problem that the reference mirror phase-shift method may change the reference light corrugated, introduce measuring error.
Claims (4)
1. polarization phase-shifting micro-interference system, be used to realize the measurement of ultra-precision surface profile and structure, this system comprises light source (1), collimating mirror (2), linear polarizer (3), depolarization Amici prism (4), microscope (5), polarization splitting prism (6), reference planes mirror (8), quarter wave plate (9), analyzer (10), imaging device (11) and data handling system (12)
The monochromatic light that sends from light source (1) passes collimating mirror (2) and linear polarizer (3) becomes the linear polarization collimated light, entered microscope (5) by depolarization Amici prism (4) reflection, being polarized Amici prism (6) after the outgoing vertically is divided into along the s component of X-direction with along the p component of Y direction, described s component incides reference planes mirror (8) back reflection returns conduct with reference to light, the transmission of described p component is by behind the polarization splitting prism (6), incide measured surface (7), note the elevation information back reflection of measured surface 7 and return as measuring light; Described reference light and measuring light are converged at the branch optical plane place of described this polarization splitting prism (6), together pass quarter wave plate (9) and analyzer (10) back again the polarization phase-shifting interference takes place, described imaging device (11) is surveyed and is obtained interferogram, promptly obtains measured surface micro-profile and structure after input data processing system (12) is handled.
2. a kind of polarization phase-shifting micro-interference according to claim 1 system, it is characterized in that, the processing of described data handling system (12) comprises that described interferogram is carried out phase extraction and phase place to be separated parcel and handle, thereby obtain PHASE DISTRIBUTION, relation according to described PHASE DISTRIBUTION and measured surface height can obtain measured surface micro-profile and structure.
3. a kind of polarization phase-shifting micro-interference according to claim 1 and 2 system is characterized in that described phase shift interference is by quarter wave plate (9) and analyzer (10) combination, and rotation analyzer (10) is realized.
4. according to the described a kind of polarization phase-shifting micro-interference of one of claim 1-3 system, it is characterized in that, polarization phase-shifting is incorporated into micro-interference, constitute polarization phase-shifting micro-interference system, measure with the phase shift interference of realizing surface microscopic profile and structure.
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2010
- 2010-07-16 CN CN201010227703XA patent/CN101893429B/en not_active Expired - Fee Related
Non-Patent Citations (4)
| Title |
|---|
| 《中国机械工程》 20090930 刘晓军等 同步相移干涉表面精密测量 2218-2222 1-4 第20卷, 第18期 2 * |
| 《北京理工大学学报》 19911231 林永昌等 全介质宽波段消偏振分光镜 10-15 1-4 第11卷, 第4期 2 * |
| 《华中科技大学学报》 20080630 刘晓军等 基于偏振相移的干涉条纹细分原理 4-6 1-4 第36卷, 第6期 2 * |
| 《哈尔滨工程大学学报》 20080930 史金辉等 消偏振分光棱镜的设计与性能分析 1019-1022 1-4 第29卷, 第9期 2 * |
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| CN102539381B (en) * | 2010-12-24 | 2013-10-30 | 南京理工大学 | Refractive index chromatography device based on micro-off-axis microscopic interference projection |
| CN102539381A (en) * | 2010-12-24 | 2012-07-04 | 南京理工大学 | Refractive index chromatography device based on micro-off-axis microscopic interference projection |
| CN102645178A (en) * | 2011-02-18 | 2012-08-22 | 上海微电子装备有限公司 | Dual-frequency interference based facial contour measuring device and method |
| CN102645178B (en) * | 2011-02-18 | 2015-01-21 | 上海微电子装备有限公司 | Dual-frequency interference based facial contour measuring device and method |
| TWI472715B (en) * | 2013-07-18 | 2015-02-11 | Univ Nan Kai Technology | An interferometric configuration based of synchronous measurement of dynamic surface profile |
| CN103344198B (en) * | 2013-07-25 | 2016-05-11 | 哈尔滨工业大学 | The measuring instrument and the measuring method that detect for tiny spherical surface surface profile |
| CN103344198A (en) * | 2013-07-25 | 2013-10-09 | 哈尔滨工业大学 | Octave type phase-shifting diffraction interferometer and measurement method used for detecting micro spherical surface profile |
| CN103513429A (en) * | 2013-10-16 | 2014-01-15 | 中国科学院半导体研究所 | Collimation light splitter system |
| CN103712554A (en) * | 2013-12-27 | 2014-04-09 | 华南师范大学 | Dual-channel space-time mixing phase shifting Fizeau interferometer based on orthogonal polarized light |
| CN103712554B (en) * | 2013-12-27 | 2016-04-27 | 华南师范大学 | Based on the Dual-channel space-time mixing phase shift fizeau interferometer of crossed polarized light |
| CN104931477A (en) * | 2015-01-23 | 2015-09-23 | 成都鼎智汇科技有限公司 | High-precision Raman-spectrum explosive recognition instrument |
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| CN110186388A (en) * | 2019-05-13 | 2019-08-30 | 天津大学 | Synchronization phase shift measurement system and method based on white light interference spectrum |
| CN110186388B (en) * | 2019-05-13 | 2021-04-06 | 天津大学 | Synchronous phase shift measurement system and method based on white light interference spectrum |
| CN110095085A (en) * | 2019-05-31 | 2019-08-06 | 西安工业大学 | A kind of real-time phase shift interference with common path microscope equipment and method |
| CN111238397A (en) * | 2020-02-10 | 2020-06-05 | 北京理工大学 | Transient digital Moire phase-shifting interferometry device and method for optical element surface shape |
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