CN101806928B - Hard resin lens and organic glass lens surface ultra-hard coat coating method - Google Patents
Hard resin lens and organic glass lens surface ultra-hard coat coating method Download PDFInfo
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- CN101806928B CN101806928B CN2010101361649A CN201010136164A CN101806928B CN 101806928 B CN101806928 B CN 101806928B CN 2010101361649 A CN2010101361649 A CN 2010101361649A CN 201010136164 A CN201010136164 A CN 201010136164A CN 101806928 B CN101806928 B CN 101806928B
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Abstract
The invention discloses a hard resin lens and organic glass lens surface ultra-hard coat coating method, which comprises the following steps that: an amorphous tetrahedral carbon film is formed on the surface of the lens through pretreatment, glow discharge cleaning, electric arc discharge and carbon ion precipitation, the film has good light transmission and good corrosion resistance, the abrasion resistance of the coated lens is remarkably improved compared with that of the non-coated lens, the coherence force between the amorphous tetrahedral carbon film and the resin and organic glass substrate is strong, the film is difficult to drop of, and the ultraviolet light test indicates that the ultraviolet transmission rate can be effectively reduced by the coat; and the hardness of the coated lens which is prepared with the method can reach more than 85 GPa, the SP3 key structure content in the coat is more than or equal to 85 percent, the friction coefficient is small, the abrasion resistant time is long, and the abrasion resistance is greatly improved.
Description
Technical field:
The invention belongs to the ion beam material surface modifying field, relate to the film plating process that resin and organic glass lens surface prepare the amorphous carbon superhard coating, be particularly related to and prevent that eyeglass from scratching, improve the eyeglass wear-resistant property, improve eyeglass serviceable life, stop the lens surface film plating process that sees through of ultraviolet light.
Background technology:
It is little that resin lens has weight, the advantage of easy-formation, and the light transmission of organic glass is good, and is corrosion-resistant, easily processing.Therefore the two has become the preferred material of various optical lenses, glasses and other industrial goods basically.But hardness, wearing quality as the plastic products resin lens are very poor, and the organic glass quality is more crisp, and skin hardness is little, wears no resistance, and this has limited their application and popularization greatly.
In order to improve the skin hardness of resin and organic glass, the main method that adopts is a coating technology at present, as: adopt Al
2O
3, SiO
2Etc. coating, about the hardness 20-27GPa of these coatings, the main damage of eyeglass is to scratch and wearing and tearing under many service conditions, and the mar proof that therefore how to improve resin and organic glass eyeglass is still one problem to be solved.
At present, generally believe that both at home and abroad adopting the higher diamond thin of hardness is a kind of solution preferably.Adamas have a lot of optics aspect good characteristic, and wearing quality is good as a kind of good optical material, and friction factor is little, and very strong hardness and chemical inertness etc. are arranged.The diamond thin preparation method divides chemical vapour deposition and physical vapour deposition (PVD) two classes, and the adamantine advantage of chemical gaseous phase depositing process preparation is crystallinity, transparency and hardness height, and shortcoming is organic materials such as depositing temperature height, uncomfortable resin and organic glass.And adopting the diamond thin of method preparations such as traditional magnetron sputtering, electric arc to be commonly referred to as diamond like carbon (DLC) coating at present, the subject matter of existence is SP
3Linkage content is low, influences transmittance, and hardness and mar proof also can't be satisfied the demand.Therefore, reduce depositing temperature, improve the SP of film
3Linkage content, thus film hardness improved, be the gordian technique that depositing diamond film is badly in need of solution on organic materials such as resin and organic glass.
Summary of the invention:
Deficiency based on above-mentioned prior art existence, the object of the present invention is to provide a kind of resin and organic glass lens surface to prepare the film plating process of amorphous tetrahedral carbon superhard coating, the amorphous tetrahedral carbon films of this method preparation, the transmittance height, the bond strength height, mar proof is strong, can fundamentally solve the problem of eyeglass mar proof difference.
For realizing above-mentioned performance, the present invention has taked following solution:
A kind of resin lens, organic glass lens surface superhard coating film plating process comprise following basic step:
(1) pre-service: adopt deionized water to soak eyeglass, use ultrasonic cleaning, dry up with nitrogen at last;
(2) glow discharge is cleaned: pretreated eyeglass is put on the frock turntable of coating machine vacuum chamber, charged into argon gas to vacuum chamber, being charged to gas pressure in vacuum is 4.0 * 10
-1Pa, the starting voltage of being added to 400V for the frock turntable, argon gas discharging formation this moment ion bombardment eyeglass cleans, and scavenging period is 15 minutes;
(3) form amorphous carbon film: finish glow discharge and clean back startup filtered arc ion gun, ionogenic operating air pressure is 2 * 10
-2Pa, flame current are 80A, and the carbon purity of graphite target negative electrode is 99.99%; Gasify by graphite surface by arc discharge and carbon atom and carbon molecule, the further ionization in arc chamber of carbon atom and carbon molecule forms carbon ion, filter out carbon neutral atom and carbon molecule through magnetic filter, carbon ion after the filtration is deposited on the surface of eyeglass, makes lens surface form superhard amorphous tetrahedral carbon films.
The carbon ion deposition is meant in the described step (3), bias voltage adopts DC pulse, it is 1: 1 that power supply accounts for wide ratio, the bias voltage amplitude is 120V, and turntable guarantees that with the linear velocity rotation of 3r/min basal body coating layer is laterally even, the field scan coil is along the longitudinal scanning of eyeglass, the frequency of scanning is 50Hz, and lens surface temperature≤80C °, coating film thickness is 50～200nm.
Adopt the plated film lens of the present invention's preparation to have following beneficial effect:
1, have good light transmittance, experiment shows that the plated film lens transmittance is not 99%, and plated film 50nm eyeglass transmittance is 97%, and plated film 200nm eyeglass transmittance is 96%, illustrates that plated film is very little to the influence of eyeglass transmittance;
2, have good anti-corrosion, salt-fog test 48 hours, plated film lens does not have any corrosion pit; Illustrate that corrosion resistance characteristic strengthens greatly, and have obvious anti-aging effect, prolong serviceable life greatly;
3, the mar proof of plated film lens is significantly increased than non-plated film lens;
4, the adhesion between plated film and resin, organic glass substrate is good, the film difficult drop-off;
5, the ultraviolet light experiment shows that plated film can effectively stop ultraviolet light to see through.
Adopt the resin lens and the organic glass lens surface superhard coating of the inventive method preparation, hardness can reach more than the 85GPa, the SP of plated film
3Bond structure content 〉=85%, friction factor are 0.08-0.15, and the adhesion between film and the eyeglass is 15-20N, glasses lens plated front and back contrast experiment:
Do ball-dish abrasion test on MS-2 type frictional testing machine, bistrique is φ 4 steel balls, loads 2N, and rotating speed is 120r/min.Till visible continuous polishing scratch occurring, revolution is wear-out life, and test result is as follows:
Be milled to 80 before the coating and iris out now obviously polishing scratch, behind the coating thickness 50nm, be milled to 4086 and iris out existing polishing scratch;
It is 1--2% only that ultraviolet ray sees through.
Make base material with sight glass and Su Na board resin lens, the amorphous carbon-film of plating 60-100nm is measured visible light transmittance rate on TOPCONCL-100 type lensmeter, be 99% before the coating, being 96-97% after the coating, is transparent to visible light, and transmittance only reduces 2-3% behind the plated film.This amorphous carbon-film, at infrared band, light transmission is better, because the antireflection effect is arranged, even 1～3% antireflective effect is arranged.
Ultraviolet ray is stoped at 98-99%, and to the film not damaged, plating 80nm film places 3300W/m
2Strong ultraviolet light under, shine after 240 hours, take out and to test.Under 80 power microscopes, observe, do not find bubbling, peeling, peeling phenomenon, and indifference before its wearing quality and the illumination.
Experimental result proves, because the amorphous tetrahedral carbon has extreme hardness, and high SP
3Therefore linkage content, not only can play the effect of protection eyeglass, and to infrared and visible transparency height, and ultraviolet is had interception, therefore is suitable for various eyeglasses, is particularly suitable for infrared window.
Description of drawings:
Fig. 1 is for realizing the structural representation of the inventive method institute operative installations;
Among the figure: 1-filtered arc ion gun; 2-S type magnetic filter; The 3-vacuum chamber; The 4-cold-cathode source; 5-frock turntable; The 6-machine frame; The 7-bleeding point; The 8-air intake opening; The 9-vacuum meter; 10-magnetic scanning coil; The 11-graphite cathode;
Fig. 2 is the structural representation of S type twin elbow magnetic filter;
Fig. 3 calculates SP qualitatively for the Raman spectrogram of the prepared coating of the present invention
3Bond structure;
Fig. 4 is the atomic force microscope picture of the prepared coating of the present invention, and the display surface roughness is 0.25nm;
Fig. 5 prepares the friction factor figure of coating for the present invention.
Embodiment:
Below in conjunction with accompanying drawing the present invention is described in further detail:
A kind of resin and organic glass lens surface prepare the film plating process of amorphous carbon superhard coating:
(1) adopts deionized water to soak eyeglass, and use ultrasonic cleaning, dry up with nitrogen at last;
(2) machine frame 6 of packing into of the eyeglass after drying up is put on the frock turntable 5 of coating machine vacuum chamber 3 immediately, as shown in Figure 1, prevents to pollute once more, influences coating quality.The coating filming equipment comprises filtered arc ion gun 1 at least, S type magnetic filter 2, vacuum chamber 3, cold-cathode source 4, frock turntable 5, machine frame 6, bleeding point 7, air intake opening 8, vacuum meter 9, magnetic scanning coil 10, graphite cathode 11.Adopt magnetic scanning, the direction of scanning is vertical at vacuum chamber, and transversal scanning relies on the rotation guarantee of turntable, and plated film is scanned on a plane, guarantees the homogeneity of plated film.
(3) adopt glow discharge to clean eyeglass: pretreated eyeglass is put on the frock turntable of coating machine vacuum chamber, charged into argon gas to vacuum chamber, being charged to gas pressure in vacuum is 4.0 * 10
-1Pa adds the bias voltage of 400V for the frock turntable, reaches starting voltage, and argon gas discharging formation this moment ion bombardment eyeglass cleans, and scavenging period is 15 minutes.
(4) start the filtered arc ion gun, the present invention prepares the amorphous tetrahedral carbon, adopts a kind of filtering cathode arc source of S type, and ionogenic operating air pressure is 2 * 10
-2Pa, flame current are 80A, and the carbon purity of graphite target negative electrode 11 is 99.99%.At first gasify by graphite surface and carbon atom and carbon molecule by the localized hyperthermia of arc discharge generation, the further ionization in arc chamber of carbon atom and carbon molecule forms carbon ion, through a S type twin elbow magnetic filter 2 shown in Figure 2, magnetic filter 2 electric currents are 10A, carbon neutral atom and carbon molecule are filtered, and have improved film hardness, reduce surfaceness, be deposited on lens surface by the carbon ion after magnetic filter 2 filtrations, form superhard amorphous tetrahedral carbon films.Bias voltage adopts DC pulse, it is 1: 1 that power supply accounts for wide ratio, and the bias voltage amplitude is 120V, and the frock turntable is with the linear velocity rotation of minute 3r/min, to guarantee that lens coating is laterally even, vertically finishing of eyeglass by a field scan, magnetic scanning coil 10 vertically scans along eyeglass, and the frequency of scanning is 50Hz, in the coating process, the plating piece surface temperature is no more than 80C °, and resin and pmma material can not be out of shape, and coating thickness is generally 50nm.
In order to guarantee film purity, employing purity is 99.99% graphite cathode target, in order to guarantee the high SP of film
3Linkage content, bias voltage will be stablized, and the deposition ion energy will be controlled at 80-120eV.
Under above-mentioned process conditions, can guarantee that resin, organic glass surface preparation go out amorphous tetrahedron carbon film and have good bonding force, even curface, its surfaceness is very low as can be seen from Figure 4, and the display surface roughness is 0.25nm; Referring to shown in Figure 3, can obtain the SP of coating by the control coatings Raman spectrum
3Bond structure content 〉=85%; Referring to shown in Figure 5, detect by bolt dish experiment friction and wear behavior coating, under DRY SLIDING, when friction pair was diameter 4mm bearing ball, friction factor was between the 0.08-0.12, and fraction time surpasses 60 minutes and do not draw yet and wears; Utilize salt fog cabinet to carry out corrosion resistance test, 48 hours parts lights have superpower corrosion-resistant effect.
Above content is to further specifying that the present invention did in conjunction with concrete embodiment; can not assert that the specific embodiment of the present invention only limits to this; for the general technical staff of the technical field of the invention; all any simple modification that spirit is done according to the present invention and equivalent structure transformation or modification, the scope of patent protection that the claims that all belong to the present invention and submitted to are determined.
Claims (2)
1. a resin lens, organic glass lens surface superhard coating film plating process is characterized in that this method comprises following basic step:
(1) pre-service: adopt deionized water to soak eyeglass, use ultrasonic cleaning, dry up with nitrogen at last;
(2) glow discharge is cleaned: pretreated eyeglass is put on the frock turntable of coating machine vacuum chamber, charged into argon gas to vacuum chamber, being charged to gas pressure in vacuum is 4.0 * 10
-1Pa, the starting voltage of being added to 400V for the frock turntable, argon gas discharging formation this moment ion bombardment eyeglass cleans, and scavenging period is 15 minutes;
(3) form amorphous carbon film: finish glow discharge and clean back startup filtered arc ion gun, ionogenic operating air pressure is 2 * 10
-2Pa, flame current are 80A, and the carbon purity of graphite target negative electrode is 99.99%; Gasify by graphite surface by arc discharge and carbon atom and carbon molecule, the further ionization in arc chamber of carbon atom and carbon molecule forms carbon ion, filter out carbon neutral atom and carbon molecule through magnetic filter, carbon ion after the filtration is deposited on the surface of eyeglass, makes lens surface form superhard amorphous tetrahedral carbon films; Described carbon ion deposition is meant, bias voltage adopts DC pulse, it is 1: 1 that power supply accounts for wide ratio, the bias voltage amplitude is 120V, and turntable guarantees that with the linear velocity rotation of 3r/min basal body coating layer is laterally even, the field scan coil is along the longitudinal scanning of eyeglass, the frequency of scanning is 50Hz, and lens surface temperature≤80C °, coating film thickness is 50～200nm.
2. a kind of resin lens according to claim 1, organic glass lens surface superhard coating film plating process is characterized in that: the amorphous tetrahedral carbon films that described lens surface forms is a non crystalline structure, SP in the plated film
3Linkage content 〉=85%, the hardness 〉=85GPa of plated film, friction factor are 0.08-0.15, and the adhesion between film and the eyeglass is 15-20N, and coating film thickness is 50-200nm.
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| CN2010101361649A CN101806928B (en) | 2010-03-31 | 2010-03-31 | Hard resin lens and organic glass lens surface ultra-hard coat coating method |
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| CN102816913B (en) * | 2012-09-04 | 2013-11-13 | 北京理工大学 | Method for improving plasticity of amorphous alloy through supersonic particle bombarding (SPB) technique |
| CN104099568B (en) * | 2013-04-12 | 2016-09-14 | 昆山艾诺美航天材料有限公司 | A kind of aerial organic glass laminated coating technique |
| CN104911546B (en) * | 2015-05-25 | 2017-11-07 | 瑞之路(厦门)眼镜科技有限公司 | A kind of PC ophthalmic lens film plating process |
| CN110760798A (en) * | 2018-07-27 | 2020-02-07 | 比亚迪股份有限公司 | Electronic product shell and preparation method thereof |
| CN109353040A (en) * | 2018-08-13 | 2019-02-19 | 江苏硕延光学眼镜有限公司 | A kind of refractive index is that resin lens are protected in 1.60 impact resistances |
| CN109023232B (en) * | 2018-10-22 | 2020-12-01 | 中国科学院宁波材料技术与工程研究所 | Method for forming amorphous carbon film on surface of plastic substrate |
| CN109520924A (en) * | 2018-11-29 | 2019-03-26 | 哈尔滨汽轮机厂有限责任公司 | Metal Substrate workpiece surface sheet metal coating strength detecting method in conjunction with ontology |
| CN111041430A (en) * | 2020-01-10 | 2020-04-21 | 安徽纯源镀膜科技有限公司 | Production process of high-temperature-resistant diamond-like carbon film layer |
| CN111101104A (en) * | 2020-01-10 | 2020-05-05 | 安徽纯源镀膜科技有限公司 | Method for metalizing surface of insulating material |
| CN112126894B (en) * | 2020-09-25 | 2023-02-24 | 中国科学院宁波材料技术与工程研究所 | Preparation method of ultraviolet-proof plastic film |
| CN117430348B (en) * | 2023-12-20 | 2024-03-12 | 中光科技（福建）有限公司 | Coated glass and production equipment thereof |
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| JPS63210099A (en) * | 1987-02-26 | 1988-08-31 | Nissin Electric Co Ltd | Preparation of diamond film |
| CN1020158C (en) * | 1987-12-22 | 1993-03-24 | 昆明物理研究所 | Method for coating diamond-like carbon film on infrared lens of germanium and silicon |
| GB9503304D0 (en) * | 1995-02-20 | 1995-04-12 | Univ Nanyang | Deposition apparatus |
| RU2114210C1 (en) * | 1997-05-30 | 1998-06-27 | Валерий Павлович Гончаренко | Process of formation of carbon diamond-like coat in vacuum |
| CN100404270C (en) * | 2005-05-31 | 2008-07-23 | 哈尔滨工业大学 | Amorphous diamond wear proof protective layer of heat-sensitive printing head and its preparing method |
| CN101298656B (en) * | 2008-01-18 | 2010-07-21 | 西南交通大学 | Preparation of high-hardness diamond-like multi-layer film |
| CN101319324B (en) * | 2008-06-17 | 2010-06-23 | 庄严 | Diamond-like film preparation method |
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