CN101786631A - Method and device for cooling trichlorosilane synthetic furnace - Google Patents
Method and device for cooling trichlorosilane synthetic furnace Download PDFInfo
- Publication number
- CN101786631A CN101786631A CN201010131500A CN201010131500A CN101786631A CN 101786631 A CN101786631 A CN 101786631A CN 201010131500 A CN201010131500 A CN 201010131500A CN 201010131500 A CN201010131500 A CN 201010131500A CN 101786631 A CN101786631 A CN 101786631A
- Authority
- CN
- China
- Prior art keywords
- heat
- heat pipe
- synthetic furnace
- liquid medium
- reaction zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Silicon Compounds (AREA)
Abstract
The invention relates to a method and a device for cooling equipment in a trichlorosilane production (comprising trichlorosilane production by silicon tetrachloride hydrogenation) process, in particular to a method and a device for cooling a trichlorosilane synthetic furnace. The invention adopts the technical scheme that a heat pipe (2) is adopted for direct heat transfer, a heat absorption end (3) of the heat pipe is formed in a reaction area (5), a heat release end (4) of the heat pipe is formed in an evaporation chamber (6), a liquid medium is introduced into the evaporation chamber, and the heat release end and the heat absorption end of the heat pipe are totally separated by using a tube plate (7). The method and the device have the advantages that because the heat pipe is adopted for transferring heat in the middle and the liquid medium and the reaction area are totally separated, the accident caused when the liquid medium enters the reaction area is radically avoided once the pipe is destroyed, and even if a certain heat pipe is destroyed, only a little medium in the heat pipe enters the reaction area and the influence and accident are not produced; and the method and the device can reduce the reaction temperature, inhibit the generation of a side product SiCl4 and improve the yield of the product. Meanwhile, the pressure steam can be produced, 12 tons of low-pressure steam of 0.25MPa is produced every day based on the synthetic furnace with the yield of 15tons/day, and the energy is saved and the consumption is reduced.
Description
Affiliated technical field:
The present invention relates to the method for cooling and the device of the method and the device, particularly trichlorosilane synthetic furnace of apparatus cools in a kind of trichlorosilane production (comprising hydrogenation of silicon tetrachloride production trichlorosilane) process.
Background technology:
At present, trichlorosilane production (comprising hydrogenation of silicon tetrachloride production trichlorosilane) chemical reaction is as follows: Si+3HCl=SiHCl
3+ H
2Si+4HCl=SiCl
4+ 2H
2Hydrogenation 3SiCl
4+ 2H
2+ Si=4SiCl
3Main device synthetic furnace, its refrigerating unit are the internal and external casing structure.A kind of method of cooling is: the interior pipe of hot water from sleeve pipe enters the bottom (jacket exterior is the exothermic heat of reaction district) of pipe, and heat is taken away in vaporization in the bottom, discharges from the gap between the interior pipe outer tube; The another kind of type of cooling is: the low temperature thermal oil enters the bottom from interior pipe and is heated, and high temperature oil is discharged from the inner and outer pipes gap, cools off, circulated, also heat conduction cooling of hull outside.Owing to be by interior pipe direct heat transfer all, there are the common shortcoming in this two kinds of methods and device: 1. owing to wearing and tearing, corrosion and reaction produce the hydrogen embrittlement that hydrogen causes, impact pipe, be easy to damage interior pipe; Pipe is in case damage makes water (or thermal oil) enter material system, water and SiHCl
3, SiCl
4Vigorous reaction causes obstruction, the damage of back processing apparatus, even blasts, and thermal oil enters material, is difficult to cleaning and separates.2. owing to this kind limitation of design, cause the inequality of arranging of cooling tube, the amount inequality of water inlet (or oil) causes temperature deviation big at reaction zone, reacts undesirable.
Summary of the invention:
The object of the invention provides a kind of method of cooling and device of trichlorosilane synthetic furnace, by the heat pipe indirect heat transfer, prevents that damaged tubular from having an accident, and improves reaction effect, solves the problems referred to above that exist in the background technology.
Technical scheme of the present invention is:
The method of cooling of trichlorosilane synthetic furnace comprises following steps: adopt the heat pipe indirect heat transfer, the heat absorbing end of heat pipe places in the reaction zone of synthetic furnace, the release end of heat of heat pipe places the outer liquid medium of reaction zone, the heat of reaction zone is derived by heat pipe, and then by the liquid medium heat radiation, liquid medium and reaction zone separate fully.
Embodiment more specifically: the heat absorbing end of one group of heat pipe is arranged in the reaction zone, from the position of bottom 1-3 rice, and the release end of heat of heat pipe is arranged in the evaporator room, feeds liquid medium in the evaporator room, separates fully with tube sheet between the release end of heat of heat pipe and the heat absorbing end.
According to the quantity of heat pipe the hole that several are evenly arranged is set on the tube sheet, the hole that heat pipe passes on the tube sheet is provided with, and tube sheet will thoroughly separate between the release end of heat of heat pipe and the heat absorbing end, has guaranteed that again heat pipe evenly arranges.
Said liquid medium can be water or oil; Evaporator room is arranged on the top of synthetic furnace.
If use water as liquid medium, evaporator room is an encloses container, and is provided with vapour outlet, produces band simultaneously and presses steam, uses for enterprise's productive life, and is energy-saving and cost-reducing.
The refrigerating unit of trichlorosilane synthetic furnace comprises heat pipe, evaporator room, and the heat absorbing end of heat pipe places in the reaction zone of synthetic furnace, and the release end of heat of heat pipe is arranged in the evaporator room, feeds liquid medium in the evaporator room, separates between the release end of heat of heat pipe and the heat absorbing end.
The quantity of heat pipe is arbitrarily, and according to the parameter setting of synthetic furnace, some heat pipes evenly arrange on the cross section of synthetic furnace reaction zone, and the distance between every heat pipe is impartial, can reduce temperature of reaction, suppresses byproduct SiCl
4Generation, improve product yield.
The present invention is provided with tube sheet, according to the quantity of heat pipe the hole that several are evenly arranged is set on the tube sheet, and the hole that heat pipe passes on the tube sheet is provided with, and tube sheet will thoroughly separate between the release end of heat of heat pipe and the heat absorbing end, has guaranteed that again heat pipe evenly arranges.
The heat absorbing end of heat pipe is arranged in the reaction zone, from the position of bottom 1-3 rice; Evaporator room is arranged on the top of synthetic furnace.
Said liquid medium can be water or oil, if use water as liquid medium, evaporator room is an encloses container, and is provided with water inlet and vapour outlet, produces band simultaneously and presses steam, uses for enterprise's productive life.
Along with the requirement of equipment enlarging, the uneven problem of heat radiation is more and more outstanding, and the present invention is from the heat radiation angle, and the size of equipment can infinitely be amplified.
Beneficial effect of the present invention: owing to adopt heat pipe at the intermediate transfer heat, liquid medium and reaction zone separate fully, fundamentally stopped pipe in case damage, liquid medium enters in the reaction zone and causes the accident, even certain root heat pipe damages, also only be that seldom medium enters reaction zone in this root heat pipe, can not exert an influence and accident; The present invention can reduce temperature of reaction, suppresses byproduct SiCl
4Generation, improve product yield.
The present invention can produce band simultaneously and press steam, is the synthetic furnace calculating of 15t/d by output, and the amount that produces the 0.25Mpa low-pressure steam every day is 12t, and is energy-saving and cost-reducing.
Description of drawings:
Fig. 1 is an embodiment of the invention structural representation;
Among the figure: synthetic furnace 1, heat pipe 2, heat absorbing end 3, release end of heat 4, reaction zone 5, evaporator room 6, tube sheet 7, vapour outlet 8, water-in 9.
Embodiment:
Below in conjunction with accompanying drawing, the invention will be further described by embodiment.
In an embodiment, the method of cooling of trichlorosilane synthetic furnace comprises following steps: adopt heat pipe 2 indirect heat transfers, the heat absorbing end 3 of heat pipe is arranged in the reaction zone 5, be the position of two meters away from bottom, the release end of heat 4 of heat pipe is arranged in the evaporator room 6, feed liquid medium in the evaporator room, separate fully with tube sheet 7 between the release end of heat of heat pipe and the heat absorbing end.According to the quantity of heat pipe the hole that several are evenly arranged is set on the tube sheet 7, the hole that heat pipe passes on the tube sheet is provided with, and tube sheet will thoroughly separate between the release end of heat of heat pipe and the heat absorbing end, has guaranteed that again heat pipe evenly arranges.Said liquid medium is a water, and evaporator room is arranged on the top of synthetic furnace 1, and evaporator room is an encloses container, and is provided with vapour outlet 8 and water-in 9, produces band simultaneously and presses steam, uses for enterprise's productive life, and is energy-saving and cost-reducing.
The refrigerating unit of trichlorosilane synthetic furnace comprises heat pipe 2, evaporator room 6, and the heat absorbing end 3 of heat pipe places in the reaction zone of synthetic furnace, and the release end of heat 4 of heat pipe is arranged in the evaporator room, feeds liquid medium in the evaporator room, separates between the release end of heat of heat pipe and the heat absorbing end.The quantity of heat pipe is arbitrarily, and according to the parameter setting of synthetic furnace, some heat pipes evenly arrange on the cross section of synthetic furnace reaction zone, and the distance between every heat pipe is impartial, can reduce temperature of reaction, suppresses byproduct SiCl
4Generation, improve product yield.
Claims (10)
1. the method for cooling of a trichlorosilane synthetic furnace, it is characterized in that comprising following steps: adopt the heat pipe indirect heat transfer, the heat absorbing end of heat pipe places in the reaction zone of synthetic furnace, the release end of heat of heat pipe places the outer liquid medium of reaction zone, the heat of reaction zone is derived by heat pipe, and then by the liquid medium heat radiation, liquid medium and reaction zone separate fully.
2. according to the method for cooling of the described trichlorosilane synthetic furnace of claim 1, it is characterized in that embodiment more specifically: the heat absorbing end of one group of heat pipe is arranged in the reaction zone, from the position of bottom 1-3 rice, the release end of heat of heat pipe is arranged in the evaporator room, feed liquid medium in the evaporator room, separate fully with tube sheet between the release end of heat of heat pipe and the heat absorbing end.
3. according to the method for cooling of the described trichlorosilane synthetic furnace of claim 2, it is characterized in that the hole that several are evenly arranged being set for the quantity according to heat pipe on the tube sheet, the hole that heat pipe passes on the tube sheet is provided with, and tube sheet will thoroughly separate between the release end of heat of heat pipe and the heat absorbing end.
4. according to the method for cooling of claim 1 or 2 described trichlorosilane synthetic furnaces, it is characterized in that said liquid medium is water or oil, evaporator room is arranged on the top of synthetic furnace.
5. according to the method for cooling of the described trichlorosilane synthetic furnace of claim 2, it is characterized in that using water as liquid medium, evaporator room is an encloses container, and is provided with vapour outlet, produces band simultaneously and presses steam.
6. the refrigerating unit of a trichlorosilane synthetic furnace, it is characterized in that comprising heat pipe (2), evaporator room (6), the heat absorbing end of heat pipe (3) places in the reaction zone of synthetic furnace, the release end of heat of heat pipe (4) is arranged in the evaporator room, feed liquid medium in the evaporator room, separate between the release end of heat of heat pipe and the heat absorbing end.
7. according to the refrigerating unit of the described trichlorosilane synthetic furnace of claim 6, it is characterized in that the parameter setting of the quantity of heat pipe according to synthetic furnace, some heat pipes evenly arrange on the cross section of synthetic furnace reaction zone, and the distance between every heat pipe is impartial.
8. according to the refrigerating unit of the described trichlorosilane synthetic furnace of claim 7, it is characterized in that being provided with tube sheet, according to the quantity of heat pipe the hole that several are evenly arranged is set on the tube sheet, the hole that heat pipe passes on the tube sheet is provided with, and tube sheet will thoroughly separate between the release end of heat of heat pipe and the heat absorbing end.
9. according to the refrigerating unit of the described trichlorosilane synthetic furnace of claim 7, the heat absorbing end that it is characterized in that heat pipe is arranged in the reaction zone, from the position of bottom 1-3 rice; Evaporator room is arranged on the top of synthetic furnace.
10. according to the refrigerating unit of the described trichlorosilane synthetic furnace of claim 7, it is characterized in that using water as liquid medium, evaporator room is an encloses container, and is provided with water inlet and vapour outlet, produces band simultaneously and presses steam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010131500A CN101786631A (en) | 2010-03-25 | 2010-03-25 | Method and device for cooling trichlorosilane synthetic furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010131500A CN101786631A (en) | 2010-03-25 | 2010-03-25 | Method and device for cooling trichlorosilane synthetic furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101786631A true CN101786631A (en) | 2010-07-28 |
Family
ID=42530032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010131500A Pending CN101786631A (en) | 2010-03-25 | 2010-03-25 | Method and device for cooling trichlorosilane synthetic furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101786631A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104891501A (en) * | 2014-03-07 | 2015-09-09 | 新特能源股份有限公司 | Silicon tetrachloride high-temperature hydrogenation method and device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87201483U (en) * | 1987-04-20 | 1988-03-16 | 济南市槐荫低压锅炉厂 | Hot tube heat exchanger |
| CN2113460U (en) * | 1991-05-07 | 1992-08-19 | 程宝华 | Multifunctional energy-saving heat-exchanger with heat pipe |
| CN2237217Y (en) * | 1995-01-25 | 1996-10-09 | 冶金工业部鞍山焦化耐火材料设计研究院 | Central heat exchanging heat pipe heat exchanger |
-
2010
- 2010-03-25 CN CN201010131500A patent/CN101786631A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87201483U (en) * | 1987-04-20 | 1988-03-16 | 济南市槐荫低压锅炉厂 | Hot tube heat exchanger |
| CN2113460U (en) * | 1991-05-07 | 1992-08-19 | 程宝华 | Multifunctional energy-saving heat-exchanger with heat pipe |
| CN2237217Y (en) * | 1995-01-25 | 1996-10-09 | 冶金工业部鞍山焦化耐火材料设计研究院 | Central heat exchanging heat pipe heat exchanger |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104891501A (en) * | 2014-03-07 | 2015-09-09 | 新特能源股份有限公司 | Silicon tetrachloride high-temperature hydrogenation method and device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101279735A (en) | Production method and apparatus for trichlorosilane | |
| CN102432016B (en) | Optimization recovery system for reduction tail gas heat energy in polycrystalline silicon production | |
| CN103896280B (en) | A kind of operation method of polysilicon cold hydrogenation | |
| CN102786055A (en) | Method and device for heat utilization in polycrystalline silicon production process | |
| CN109665527A (en) | The tail gas heat quantity recovery system and operation method of production of polysilicon equipment | |
| CN104018010B (en) | Reduction and distillation furnace in titanium sponge production | |
| CN101786631A (en) | Method and device for cooling trichlorosilane synthetic furnace | |
| CN203648502U (en) | Uniform-temperature hydrogenation reactor | |
| CN207779195U (en) | A kind of energy-saving graphite heat exchanger that thermal energy is synthesized using monochloro methane | |
| CN102674359B (en) | Device and method for cooing tail gas recovery liquid of polysilicon reduction furnace with inner tank | |
| CN201648007U (en) | Cooling plant of trichlorosilane synthetic furnace | |
| CN202594789U (en) | High-potential energy steam generating system with chemical vapor deposition (CVD) reaction furnace | |
| CN217808778U (en) | Energy-saving cold hydrogenation product purification system in production of polycrystalline silicon by GCL method | |
| CN215893283U (en) | Reduction tail gas waste heat recovery system | |
| CN206989768U (en) | Dehydrogenating propane device reaction device input and output material high-performance heat exchanger | |
| CN212988122U (en) | Heat energy recovery system suitable for cold hydrogenation technology | |
| CN201704079U (en) | High-efficiency energy-saving reaction apparatus for preparing sodium silicate with liquid phase method | |
| CN104016350A (en) | Polycrystalline silicon reduction furnace chassis and tail gas cooling system and method thereof | |
| CN210045222U (en) | Alkylation reaction waste heat recovery utilizes device | |
| CN210825444U (en) | Cooling system of polycrystalline silicon reduction furnace | |
| CN207745852U (en) | A kind of methane chloride reaction heat treatment system | |
| CN203582816U (en) | Gasification furnace with heat exchange device | |
| CN207109143U (en) | A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip | |
| CN201809176U (en) | Magnesium silicide spiral cooling device | |
| CN101655325B (en) | Temperature reduction method for hot gas and device thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Open date: 20100728 |