CN101776967A - Method for manufacturing touch panel, touch panel, display device, and electronic apparatus - Google Patents

Method for manufacturing touch panel, touch panel, display device, and electronic apparatus Download PDF

Info

Publication number
CN101776967A
CN101776967A CN201010001452A CN201010001452A CN101776967A CN 101776967 A CN101776967 A CN 101776967A CN 201010001452 A CN201010001452 A CN 201010001452A CN 201010001452 A CN201010001452 A CN 201010001452A CN 101776967 A CN101776967 A CN 101776967A
Authority
CN
China
Prior art keywords
aforementioned
electrode
touch panel
wiring
bridge joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201010001452A
Other languages
Chinese (zh)
Inventor
傅田敦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN101776967A publication Critical patent/CN101776967A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)

Abstract

The invention provides a method for manufacturing a touch panel with low manufacturing cost, a touch panel, a display device, and an electronic apparatus. The method for manufacturing the touch panel including a substrate, a first electrode, and a second electrode, the first and second electrodes being formed on one side of the substrate in a plural numbers and extending in directions intersecting with each other, the method includes: an electrode deposition step S10 of forming an electrode film on the substrate by a plurality of first electrodes and second electrodes separated at the intersection portion with the first electrode; an insulating film forming step S30 of forming an insulating film by a printing method on at least an intersection of the first electrode with the second electrode; and a bridge wiring line forming process S40 of forming a bridge wiring line connecting the electrode films over the insulating film by the printing method.

Description

The manufacture method of touch panel, touch panel, display device and electronic equipment
Technical field
The present invention relates to manufacture method, touch panel, display device and the electronic equipment of touch panel.
Background technology
The touch screen of capacitance type, be such device: between the electrode of finger and panel, form electric capacity by pointing etc. near the precalculated position of the panel that is formed with electrode, the electric current that charges by the electric capacity that detects such formation, and detect the precalculated position.For the touch screen of capacitance type, following content is for example disclosed.
The coordinate entering device of being put down in writing in the patent documentation 1 is following structure: by the substrate that is provided with the X electrode and be provided with the substrate clamping liquid crystal layer of Y electrode.And, forming floating capacitance near the electrode of the detecting pen of the substrate of X electrode side between itself and X electrode and Y electrode, the voltage according to induction when floating capacitance is charged generates detects (with reference to patent documentation 1) to the position of detecting pen.
Secondly, the information input/output unit of being put down in writing in the patent documentation 2, each pixel of itself and display part is configured to rectangular electrode accordingly and is formed on the same substrate for the active component of each electrode setting.And, the sensing electrode of these electrodes during play a role (with reference to patent documentation 2) as position probing.
Secondly, the coordinate entering device of being put down in writing in the patent documentation 3 is following structure: its cross one another X electrode and Y electrode are formed on each of the surface of sensor base plate and the back side.And, according to changing detection position (with reference to patent documentation 3) to the electric current of the line of electric force variation of Y electrode because of being accompanied by from the near finger of X electrode side joint from the X electrode.
Secondly, the coordinate position input media of being put down in writing in the patent documentation 4 is following structure: be provided with and a plurality ofly relatively dispose and cross one another electrode across insulation course.And,, carry out position probing (with reference to patent documentation 4) by detecting the electric current that has changed because of operator's finger near electrode.
[patent documentation 1] spy opens flat 4-337824 communique
[patent documentation 2] spy opens flat 6-318136 communique
[patent documentation 3] spy opens flat 9-305289 communique
[patent documentation 4] spy opens flat 10-63403 communique
But, in the invention that these patent documentations 1～4 are put down in writing, because when becoming the electrode that on being formed on all directions, extends or on same substrate, forming electrode and active circuit, make the structure of wiring layer lamination by repeating repeatedly metallikon, photoetching process and etching method etc., so exist the problem that manufacturing cost rises.
Summary of the invention
Therefore, one of purpose of the present invention is to provide a kind of manufacture method, touch panel, image display device and electronic equipment that has suppressed the touch panel of manufacturing cost.
The manufacture method of touch panel of the present invention, be to have substrate, form and in the manufacture method of the touch panel of upwardly extending a plurality of the 1st electrodes of cross one another side and a plurality of the 2nd electrodes in the one side side of aforesaid base plate, comprise: the electrode film formation process, it forms a plurality of aforementioned the 1st electrodes and aforementioned the 2nd electrode is disconnected the electrode film of the shape that forms with the cross part office of aforementioned the 1st electrode on aforesaid base plate; Dielectric film forms operation, and it on aforementioned the 1st electrode that becomes with the position of the cross section of aforementioned the 2nd electrode, uses print process to form dielectric film at least; And bridge joint wiring formation operation, it uses print process to form through the bridge joint wiring between the aforementioned dielectric film top connection former electrodes film.
In view of the above, by in same operation, forming the 1st electrode and the electrode film that becomes the 2nd electrode, and utilize the bridge joint between the print process formation connection electrode film to connect up, owing to can cut down the man-hour that forms the 1st and the 2nd electrode, so the manufacture method of the touch panel that has reduced manufacturing cost can be provided.
Preferably, aforementioned the 1st electrode and aforementioned the 2nd electrode have a plurality of island electrode part and connect bridge joint wiring between the adjacent aforementioned island electrode part, and mutual aforementioned bridge joint wiring is intersected; In the former electrodes film formation process, form the aforementioned island electrode part of aforementioned the 1st electrode and aforementioned the 2nd electrode; Form in the operation at the aforementioned dielectric film, in the aforementioned bridge joint wiring of aforementioned the 1st electrode, form the aforementioned dielectric film at least; Form in the operation in aforementioned bridge joint wiring, form the aforementioned bridge joint wiring of aforementioned the 2nd electrode.
In view of the above, by forming the island electrode part of the 1st and the 2nd electrode with same operation, and form the bridge joint wiring with print process, owing to can cut down the man-hour that forms the 1st and the 2nd electrode, so the manufacture method of the touch panel that has reduced manufacturing cost can be provided.
Preferably, in the former electrodes film formation process, form the aforementioned island electrode part of overlooking rectangular shape rectangularly, and the aforementioned bridge joint wiring between the bight of the aforementioned island electrode part of aforementioned the 1st electrode of formation connection; Form in the operation the aforementioned bridge joint wiring between the bight of the aforementioned island electrode part of aforementioned the 2nd electrode of formation connection in aforementioned bridge joint wiring.
In view of the above, because the zone of overlooking of the cross section that bridge joint can be connected up forms minimumly, make the 1st and the 2nd electrode manufacture method of cross-up touch panel mutually so can provide with the shortest bridge joint wiring.
Preferably, form in the operation, the aforementioned dielectric film is formed the middle plan view shape that attenuates at the part place of the aforementioned bridge joint wiring that forms aforementioned the 2nd electrode at the aforementioned dielectric film.
In view of the above and since can utilize the dielectric film of the side in the zone that attenuates in the middle of being positioned at reduce the bridge joint wiring the formation material soak diffusion, so the manufacture method of the touch panel of the mistake wiring that has prevented the bridge joint wiring can be provided.
Preferably, after the former electrodes film formation process, comprise following operation: on the aforementioned the 1st and the 2nd electrode outside being led to the input area of this touch panel, lamination forms auxiliary wiring, and this auxiliary wiring has than the aforementioned the 1st and the 2nd low sheet resistance of electrode.
In view of the above, reduced because of auxiliary wiring owing to lead to the cloth line resistance of the wiring on every side of input area, so the manufacture method of the touch panel that has suppressed power consumption can be provided.
Preferably, form in the operation, comprise following operation: together form the wiring protective film that covers aforementioned auxiliary wiring with the aforementioned dielectric film at the aforementioned dielectric film.
In view of the above, owing to can in same operation, form dielectric film and wiring protective film, so the manufacture method of having cut down man-hour, having reduced the touch panel of manufacturing cost can be provided.
Preferably, after the wiring of aforementioned bridge joint forms operation, comprising: diaphragm forms operation, and it in the zone of the input area aforementioned one side side, that comprise this touch panel of aforesaid base plate, forms diaphragm at least.
In view of the above, owing to can protect the 1st and the 2nd electrode that forms at input area, so the manufacture method of the touch panel that has prolonged life of product can be provided.
Preferably; after aforementioned bridge joint wiring forms operation or aforementioned diaphragm formation operation; comprise following operation: at least in the zone of the input area aforementioned one side side, that comprise this touch panel of aforesaid base plate; form adhesive linkage, this adhesive linkage is bonding with protective substrate or optical element substrate and aforesaid base plate.
In view of the above, because can be by protective substrate or optical element substrate are installed in the one side side of substrate reliably, and protect the 1st and the 2nd electrode of input area reliably, so the further manufacture method that has prolonged the touch panel of life of product can be provided.
Preferably, before the former electrodes film forms operation, comprise following operation: in the aforementioned one side side of aforesaid base plate, the dielectric film of lamination conducting film and the aforementioned conducting film of covering.
In view of the above, owing to can interdict the noise that comes from the face of an opposition side of substrate, so the manufacture method of the touch panel that has prevented the generation that delays work can be provided.
Preferably, comprising: on aforesaid base plate and a face aforementioned opposition side, form the operation of conducting film.
In view of the above, owing to can interdict the noise that comes from the face of an opposition side of substrate, so the manufacture method of the touch panel that has prevented the generation that delays work can be provided.
Preferably, comprising: in zone on the aforesaid base plate, between aforementioned the 1st electrode and aforementioned the 2nd electrode, form the operation of dummy electrode, this dummy electrode has and the aforementioned the 1st and the 2nd essentially identical composition of electrode.
In view of the above, owing to can reduce the gap of the 1st electrode and the 2nd electrode, alleviated from the manufacture method of user's side for the touch panel of the identification of the wiring pattern of the 1st and the 2nd electrode so can provide.
Touch panel of the present invention has substrate, forms and at upwardly extending a plurality of the 1st electrodes of cross one another side and a plurality of the 2nd electrode, have on aforesaid base plate: aforementioned the 1st electrode in the one side side of aforesaid base plate; Aforementioned the 2nd electrode is disconnected the electrode film of the shape that forms with the cross part office of aforementioned the 1st electrode; At least the dielectric film that on aforementioned the 1st electrode that becomes with the position of the cross section of aforementioned the 2nd electrode, forms; And the bridge joint that connects between the former electrodes film through aforementioned dielectric film top connects up.
In view of the above, because the 1st, the 2nd electrode is formed on the same one side of substrate, and forms and cut down man-hour, so the touch panel that has reduced manufacturing cost can be provided.In addition, owing to electrode film is formed on on the one side, so can realize the raising of light transmission, the slimming of touch panel etc.
Touch panel of the present invention, preferably, aforementioned the 1st electrode and aforementioned the 2nd electrode have a plurality of island electrode part and connect bridge joint wiring between the adjacent aforementioned island electrode part, and mutual aforementioned bridge joint wiring is intersected; Cross part office at the aforementioned the 1st and the 2nd electrode: in the aforementioned bridge joint wiring of aforementioned the 1st electrode, form the aforementioned dielectric film; The aforementioned bridge joint wiring of aforementioned the 2nd electrode connects between the aforementioned island electrode part of aforementioned the 2nd electrode through aforementioned dielectric film top.
In view of the above, because as long as partly form dielectric film and bridge joint wiring, so the touch panel that has reduced manufacturing cost can be provided.
Touch panel of the present invention, preferably, aforementioned island electrode part is overlooked basic rectangular shape, and aforementioned bridge joint wiring connects between the bight of aforementioned island electrode part.
In view of the above, because the zone of overlooking of the cross section that bridge joint can be connected up forms minimumly, make the 1st and the 2nd electrode cross-up touch panel mutually so can provide with the shortest bridge joint wiring.
Touch panel of the present invention, preferably, aforementioned dielectric film, the plan view shape that in the middle of the position of the bridge joint wiring that is formed with aforementioned the 2nd electrode has, attenuates.
In view of the above, owing to can utilize the dielectric film of the side that is positioned at the middle zone that attenuates to make the formation material of bridge joint wiring be difficult to soak diffusion, can provide the touch panel of the mistake wiring that has prevented the bridge joint wiring.
Touch panel of the present invention, preferably, on the aforementioned the 1st and the 2nd electrode outside being led to the input area of this touch panel, lamination has auxiliary wiring, and this auxiliary wiring has than the aforementioned the 1st and the 2nd low sheet resistance of electrode.
In view of the above, reduced because of auxiliary wiring owing to lead to the cloth line resistance of the wiring on every side of input area, so the touch panel that has suppressed power consumption can be provided.
Touch panel of the present invention preferably, covers aforementioned auxiliary wiring ground and is formed with wiring protective film, and this wiring protective film comprises the composition identical with the aforementioned dielectric film.
In view of the above, owing to can in same operation, form dielectric film and wiring protective film, so the touch panel of having cut down man-hour, having reduced manufacturing cost can be provided.
Touch panel of the present invention preferably, has: diaphragm, it covers the aforementioned the 1st and the 2nd electrode of the input area that is disposed at this touch panel at least.
In view of the above, owing to be protected at the 1st and the 2nd electrode of input area formation, so the touch panel that has improved reliability can be provided.
Touch panel of the present invention, preferably, the aforementioned the 1st and the 2nd electrode ground that covers the input area that is disposed at this touch panel at least is formed with adhesive linkage, and via bonding protective substrate of aforementioned adhesive linkage or optical element substrate.
In view of the above, because can be by protective substrate or optical element substrate are installed in the one side side of substrate reliably, and protect the 1st and the 2nd electrode of input area reliably, so the further touch panel that improves reliability can be provided.
Touch panel of the present invention preferably, in the aforementioned one side side of aforesaid base plate, forms the dielectric film of conducting film and the aforementioned conducting film of covering; On the aforementioned dielectric film, be formed with the aforementioned the 1st and the 2nd electrode.
In view of the above, owing to can interdict the noise that comes from the face of an opposition side of substrate, so the touch panel that has prevented the generation that delays work can be provided.
Touch panel of the present invention preferably, on aforesaid base plate and a face aforementioned opposition side, is formed with conducting film.
In view of the above, owing to can interdict the noise that comes from the face of an opposition side of substrate, so the touch panel that has prevented the generation that delays work can be provided.
Touch panel of the present invention, preferably, aforesaid base plate is the substrate that constitutes display device.
In view of the above, owing to can on a substrate, form the electrode that electrode that touch panel uses and display device are used, so the touch panel that has reduced manufacturing cost can be provided.
In addition, preferably, in display device, possesses touch panel of the present invention.
In view of the above, owing to the touch panel with the low cost manufacturing can be used for display device, so can reduce the manufacturing cost of display device.
Preferably, in electronic equipment, possess touch panel of the present invention or display device of the present invention.
In view of the above, owing to touch panel or the display device with the low cost manufacturing can be used for electronic equipment, so can reduce the manufacturing cost of electronic equipment.
Description of drawings
Fig. 1 is the diagrammatic top view of touch panel 100;
Fig. 2 is the constructed profile of touch panel 100;
Fig. 3 is the constructed profile of touch panel 100A;
Fig. 4 is the process flow diagram of the manufacture method of touch panel;
Fig. 5 is the stereographic map of the schematic configuration of expression droplet discharge apparatus IJ;
Fig. 6 is the figure that is used to illustrate the discharge principle of fluent material;
Fig. 7 is the manufacturing procedure picture of touch panel 100;
Fig. 8 is the manufacturing procedure picture of touch panel 100;
Fig. 9 is the synoptic diagram at the drop of cross part office configuration;
Figure 10 is the synoptic diagram at the drop of cross part office configuration;
Figure 11 is the diagrammatic top view of touch panel 200;
Figure 12 is the constructed profile of touch panel 200;
Figure 13 is the diagrammatic top view and the constructed profile of liquid crystal indicator 500; And
Figure 14 is the stereographic map of an example of expression electronic equipment of the present invention.
Symbol description
1... substrate; 2... input area; 12; 22... island electrode part; 10; 110...X electrode (the 1st electrode); 20; 120...Y electrode (the 2nd electrode); 30; 80A; 130... dielectric film; 11; 21; 121... bridge joint wiring; 40; 140... planarization film, 50... protective substrate, 60... draw around wiring; 62... wiring protective film; 70; 70A... shielding layer (conducting film), 100; 100A; 200... touch panel, the 125... dummy electrode; 500... liquid crystal indicator; 1100... portable personal computer; S10... electrode film formation process, the S20... auxiliary wiring forms operation, and the S30... dielectric film forms operation; S40... the bridge joint wiring forms operation; S50... planarization film forms operation (diaphragm formation operation), and the S60... protective substrate engages operation (adhesive linkage formation operation), and the S70... shielding layer forms operation (conducting film formation operation).
Embodiment
Below use manufacture method, display device and the electronic equipment of description of drawings touch panel of the present invention, touch panel.
In addition, below the embodiment of Shi Shiing is the embodiment of expression a kind of form of the present invention, and is not to limit the present invention, can at random be out of shape in the scope of technological thought of the present invention.In addition, in following accompanying drawing, understand easily in order to make each structure, engineer's scale, quantity that makes each structure etc. is different with practical structure.
＜the 1 embodiment 〉
[touch panel]
Fig. 1 is the diagrammatic top view of the touch panel 100 of present embodiment.Fig. 2 is the A-A ' constructed profile of touch panel 100.
Touch panel 100 has substrate 1, input area 2 and draws around wiring 60.
Substrate 1 is shaped as overlooks rectangular shape, as its material, uses transparent materials such as glass, acryl resin.
Input area 2 be in Fig. 1 by a dot-and-dash line area surrounded, be the zone of detecting the positional information of the finger on touch panel, import.
At input area 2, dispose a plurality of X electrodes 10 and a plurality of Y electrode 20 respectively.X electrode 10 extends along X-direction in diagram, and a plurality of X electrode 10 is arranged along Y direction.Y electrode 20 extends along Y direction in diagram, and each Y electrode 20 is arranged along X-direction.X electrode 10 and Y electrode 20 intersect by making its mutual bridge joint wiring, and intersect in input area 2.
X electrode 10 possesses in a plurality of island electrode part 12 of arranging on the X-direction and connects bridge joint wiring 11 between the adjacent island electrode part 12.Island electrode part 12 forms overlooks rectangular shape, and is configured to one bar diagonal line along X-axis.
Y electrode 20 possesses in a plurality of island electrode part 22 of arranging on the Y direction and connects bridge joint wiring 21 between the adjacent island electrode part 22.Island electrode part 22 forms overlooks rectangular shape, and is configured to one bar diagonal line along Y-axis.
Island electrode part 12 and island electrode part 22 are configured (configuration of chequer shape) for interlaced on X-direction and Y direction, and in input area 2, the island electrode part 12,22 of rectangular shape is configured to overlook rectangular.
Material as constituting X electrode 10 and Y electrode 20 can adopt ITO (indium tin oxide), IZO (indium-zinc oxide, registered trademark), ZnO etc. to have the resistive element of light transmission.
Draw around wiring 60 and is connected, and be connected with drive division and converting electrical signal/operational part (all omission illustrates) in inside that is arranged on touch panel 100 or the external device (ED) with X electrode 10 and Y electrode 20.
Then, the sectional view for Fig. 2 describes.
On the function face 1a of substrate 1, be provided with island electrode part 12 (omitting diagram), island electrode part 22 and bridge joint wiring 11.In bridge joint wiring 11, be formed with dielectric film 30.And, on dielectric film 30, dispose bridge joint wiring 21.
In addition, on the function face 1a of substrate 1, dispose and draw around wiring 60.Draw around wiring 60 and constitute by the 2nd layer of 60b that is configured in the 1st layer of 60a on the function face 1a and be stacked on the 1st layer of 60a.And, cover to draw and be formed with wiring protective film 62 around wiring 60 ground.
Cover these electrodes and wiring ground, be formed with planarization film 40.On planarization film 40, dispose protective substrate 50 across adhesive linkage 51.On the 1b of the back side of substrate 1, be provided with shielding layer 70.
Dielectric film 30 is with bridge joint wiring 11 and bridge joint wiring 21 insulation that intersect three-dimensionally.Dielectric film 30 can use print process coating polysiloxane, acrylic resin and acrylic monomers etc., and makes it dry solidification and form.
Under the situation about forming using polysiloxane, dielectric film 30 becomes the inorganic insulating membrane that is made of Si oxide.On the other hand, under the situation that adopts acrylic resin and acrylic monomers, dielectric film 30 becomes the organic insulating film that is made of resin material.
For the constituent material of dielectric film 30, preferably adopt relative dielectric constant smaller or equal to 4.0, it is desirable to material smaller or equal to 3.5.Thus, can reduce the stray capacitance of the cross part office of bridge joint wiring, thereby keep the position probing performance of touch panel.
In addition, for the constituent material of dielectric film 30, preferably use refractive index smaller or equal to 2.0, it is desirable to material smaller or equal to 1.7.Thus, the refringence with substrate 1, X electrode 10, Y electrode 20 etc. can be reduced, thereby the situation that the pattern of dielectric film 30 is watched by the user can be prevented.
Drawing around wiring 60 the 1st layer of 60a is that X electrode 10 or Y electrode 20 are extended to the wiring that the zone in the outside of input area 2 forms, and it is formed by ITO, IZO constant resistance body.
The 2nd layer of 60b lamination is formed on the 1st layer of 60a, reduces to draw the cloth line resistance around wiring 60.The 2nd layer of 60b can use with one or more organic compounds as composition in metals such as Au, Ag, Al, Cu, Pd and the carbon (nano-sized carbon such as graphite, carbon nano-tube), nanoparticle, nano wire etc. and form.The constituent material of the 2nd layer of 60b needs only its sheet resistance and compare and can diminish with the 1st layer of 60a, and there is no particular limitation.
Covering is drawn around wiring 60 wiring protective film 62, and is same with dielectric film 30, can utilize print process and forms, and this print process is used as the formation material with polysiloxane, acrylic resin and acrylic monomers etc.Therefore, wiring protective film 62 can side by side form in the operation that forms dielectric film 30.
The input area at least 2 of the function face 1a of planarization film 40 covered substrates 1 and forming, the concavo-convex planarization of the function face 1a that it is caused X electrode 10, Y electrode 20 etc.Planarization film 40, preferably as shown in the figure, whole substantially (except the external connection terminals portion) of covering function face 1a and forming.By utilizing the function face 1a side planarization of planarization film 40, can spread all over a roughly whole ground substrate 1 is engaged equably with protective substrate 50 substrate 1.
In addition, for the constituent material of planarization film 40, preferably use refractive index smaller or equal to 2.0, it is desirable to material smaller or equal to 1.7.Thus, can reduce the refringence with substrate 1, X electrode 10, Y electrode 20 etc., can make the wiring pattern of X electrode 10, Y electrode 20 be difficult to viewed arriving.
Protective substrate 50 is transparency carriers of glass, plastics etc.Perhaps; be configured at the touch panel 100 of present embodiment under the situation of front of display device such as liquid crystal panel, organic EL panel; as protective substrate 50; also can use optical element substrate (polarization plates, polarizer etc.), this optical element substrate is used as the part of display device.
Shielding layer 70 is by forming ITO, IZO transparent conductive material film forming such as (registered trademarks) at the back side of substrate 1 1b.Perhaps, also can prepare to be formed with the film of the nesa coating that becomes shielding layer, form such film is bonded in the structure that the back side 1b of substrate 1 forms.
By shielding layer 70 is set, the electric field of the back side 1b side of substrate 1 will be interdicted.Thus, the electric field action that can prevent touch panel 100 in the electric field action of the external unit of display device etc., display device etc. in the situation of touch panel 100.
In addition, in the present embodiment,, also can shielding layer be formed on the function face 1a side of substrate 1 as shown in Figure 3 though formed shielding layer 70 at the back side of substrate 1 1b.Fig. 3 is the constructed profile of the touch panel 100A of the such variation of expression.
In touch panel 100A shown in Figure 3, on the function face 1a of substrate 1, form shielding layer 70A, overlay masking layer 70A and be formed with dielectric film 80A.Structure on the dielectric film 80A is identical with the touch panel 100 shown in Fig. 2.In touch panel 100A,,, can form the touch panel of manufacturing excellence so can avoid miscellaneousization of manufacturing process owing to form shielding layer 70A, X electrode 10, Y electrode 20 at the single face of substrate 1, draw around wiring 60 etc.
At this, describe simply for the principle of work of touch panel 100.
At first, from diagram abridged drive division, supply with predetermined current potential to X electrode 10 and Y electrode 20 via drawing around wiring 60.
In addition, on shielding layer 70, import for example earthing potential.
Under the state that is supplied to current potential as mentioned above,, then will form stray capacitance near between each of the finger of protective substrate 50 and near X electrode 10 the approximated position and Y electrode 20 if finger is approaching from protective substrate 50 side direction input areas 2.And, on X electrode 10 that has formed stray capacitance and Y electrode 20, cause that for this stray capacitance is charged temporary transient current potential reduces.
In drive division, the current potential of each electrode of sensing immediately detects X electrode 10 and the Y electrode 20 that above-mentioned current potential reduces has taken place.And, analyze the position of the electrode that is detected by utilizing converting electrical signal/operational part, and detect the positional information of finger in input area 2.
Particularly, utilize the X electrode 10 on X-direction, extend, detect finger the approaching Y coordinate of position in input area 2, utilize the Y electrode 20 that on Y direction, extends, detect the X coordinate in input area 2.
[manufacture method of touch panel]
Then, the manufacture method for touch panel describes.In the present embodiment, the manufacture method for the touch panel 100 of Figure 1 and Figure 2 describes with reference to accompanying drawing.Fig. 4 is the process flow diagram of the manufacture method of touch panel.
The manufacturing process of the touch panel of present embodiment as shown in Figure 4, comprising: form island electrode part 12,22, bridge joint wiring 11 and draw electrode film formation process S10 around the 1st layer of 60a of wiring 60 on the function face 1a of substrate 1; At the auxiliary wiring formation operation S20 that draws around the 2nd layer of 60b of the 1st layer of 60a superimposed layer of wiring 60; In bridge joint wiring 11, form dielectric film 30 and cover the dielectric film that draws around wiring 60 ground formation wiring protective film 62 and form operation S30; The bridge joint wiring that forms through the bridge joint wiring 21 between the adjacent island electrode part 22 of dielectric film 30 tops connection forms operation S40; Formation forms operation (diaphragm formation operation) S50 with the planarization film of the planarization film 40 of the function face 1a side planarization of substrate 1; Via adhesive linkage 51 protective substrate that protective substrate 50 engages with planarization film 40 is engaged operation (adhesive linkage formation operation) S60; The shielding layer that forms shielding layer 70 at the back side of substrate 1 1b forms operation (conducting film formation operation) S70.
The manufacturing process of the touch panel 100 of present embodiment comprises that utilization carries out the operation of film forming as a kind of drop discharge method of print process.Therefore, before the explanation of the manufacture method of touch panel, describe for droplet discharge apparatus.
Fig. 5 is the stereographic map that the schematic configuration of droplet discharge apparatus IJ is shown.Droplet discharge apparatus IJ possesses that drop discharges 1001, X-direction driving shaft 1004, Y direction guidance axis 1005, control device CONT, stand 1007, cleaning mechanism 1008, base station 1009, well heater 1015.Discharge 1001 as drop, use the drop of electromechanical mapping mode to discharge head, the drop of this electromechanical mapping mode is discharged head and has been used piezoelectric element.
Stand 1007 supports by the substrate P of this droplet discharge apparatus IJ configuration fluent material (wiring pattern ink), and it possesses the diagram abridged fixed mechanism that substrate P is fixed on the reference position.
It is that the drop that possesses the multi-nozzle type of a plurality of discharge nozzles is discharged head that drop discharges 1001, and its longitudinally is consistent with X-direction.A plurality of discharge nozzles are arranged on drop at certain intervals and discharge a lower surface of 1001.Discharge a discharge nozzle of 1001 from drop,, discharge the aforementioned wiring pattern ink that comprises electrically conductive microparticle being supported on the substrate P on the stand 1007.
On X-direction driving shaft 1004, connecting X-direction driving motor 1002.This X-direction driving motor 1002 is made of stepping motor etc., and it makes 1004 rotations of X-direction driving shaft when control device CONT is supplied to the drive signal of X-direction.If X-direction driving shaft 1004 rotation, then drop is discharged 1001 and is moved on X-direction.
Y direction guidance axis 1005 is fixed to respect to base station 1009 and does not move.Stand 1007 possesses Y direction driving motor 1003.Y direction driving motor 1003 is stepping motors etc., and it moves stand 1007 when control device CONT is supplied to the drive signal of Y direction on Y direction.
Control device CONT discharges the voltage that usefulness is controlled in 1001 discharge of supplying with drop to drop.In addition, supply with the drive pulse signal that moves that the control drops are discharged an X-direction of 1001, supply with the drive pulse signal that moves of the Y direction of control stands 1007 to Y direction driving motor 1003 to X-direction driving motor 1002.
Cleaning structure 1008 is discharged 1001 to drop and is cleaned.In cleaning mechanism 1008, possesses the driving motor of diagram abridged Y direction.Utilize the driving of the driving motor of this Y direction, cleaning mechanism moves along Y direction guidance axis 1005.Moving of cleaning mechanism 1008 also controlled by control device CONT.
Well heater 1015 is the unit that utilizes lamp annealing that substrate P is heat-treated at this, and it is configured in the evaporation and the drying of the solvent that is comprised in the fluent material on the substrate P.The connection of the power supply of this well heater 1015 and cut-out are also controlled by control device CONT.
Droplet discharge apparatus IJ, to drop discharge 1001 and the stand 1007 of supporting substrate P relatively scan, and to substrate P, from discharge a lower surface of 1001 at drop, a plurality of discharge nozzles that are configured on the X-direction are discharged drops.
Fig. 6 is the figure of explanation based on the discharge principle of the fluent material of piezoelectricity mode.In Fig. 6, be adjacent to be provided with piezoelectric element 1022 with the liquid chamber 1021 of taking in fluent material (wiring pattern with ink, functional liquid).For liquid chamber 1021, via fluent material feed system 1023 feed fluid materials, this fluent material feed system 1023 comprises the stuffing-box of taking in fluent material.Piezoelectric element 1022 is connected to driving circuit 1024, applies voltage via 1024 pairs of piezoelectric elements 1022 of this driving circuit, and by making piezoelectric element 1022 distortion, liquid chamber 1021 is out of shape, thereby from discharge nozzle 1025 discharged liquid materials.In the case, change the deflection of control piezoelectric element 1022 by making the value that applies voltage.In addition, by making the frequency change that applies voltage, control the deformation velocity of piezoelectric element 1022.Owing to discharge based on the drop of piezoelectricity mode and material not to be applied heat, be difficult to the advantage that the composition to material exerts an influence so have.
At this, turn back to the explanation of the manufacture method of touch panel.Fig. 7 and Fig. 8 are the figure that the manufacturing process of touch panel 100 is shown.These process charts show the operation that forms structure shown in Figure 2 (cross section of bridge joint wiring and draw around wiring 60).
At first, describe for electrode film formation process S10.
In electrode film formation process S10, on the substrate 1 that for example is glass substrate, utilize droplet discharge apparatus IJ shown in Figure 5, optionally configuration for example comprises the drop of the fluent material of ITO particulate.Particularly, on substrate 1, formation is by X electrode 10, as the island electrode part 22 of the part of Y electrode 20, from island electrode part 12 and the island electrode part 22 extended patterns that draw around the 1st layer of fluent material that 60a constitutes of wiring 60, and this X electrode 10 is made of island electrode part 12 and bridge joint wiring 11.After this, make fluent material (drop) drying that is configured on the substrate 1.Thus, shown in Fig. 7 (a), on substrate 1, form X electrode 10 (island electrode part 12, bridge joint wiring 11), the island electrode part 22 that the aggregate by the ITO particulate constitutes and draw the 1st layer of 60a around wiring 60.
In the electrode film formation process S10 of present embodiment, form the ITO film though contain the drop of ITO particulate by discharge, but in addition, also can use the drop that contains IZO (registered trademark) particulate to form the nesa coating that constitutes by IZO (registered trademark).
In addition, in electrode film formation process S10, also can not use drop to discharge method, and use photolithographic pattern formation method of having used.Promptly, also can by utilize form the ITO film at the function face 1a of substrate 1 roughly whole such as metallikon after, use photoetching process and etching method that the ITO film is carried out pattern and form, and form X electrode 10 (island electrode part 12, bridge joint wiring 11), island electrode part 22 and draw the 1st layer of 60a around wiring 60.
Then, advance to auxiliary wiring and form operation S20.
Form among the operation S20 at auxiliary wiring, utilize droplet discharge apparatus IJ, will comprise to draw to discharge and be configured on the 1st layer of 60a around the drop of the fluent material of the constituent material of the 2nd layer of 60b of wiring 60.Fluent material as being used to form the 2nd layer of 60b can use the fluent material that for example comprises silver-colored particulate.After this, make the droplet drying of the configuration of discharging.Thus, shown in Fig. 7 (b), on the 1st layer of 60a, form low-resistance the 2nd layer of 60b, thereby on the substrate 1 in the outside of input area 2, form the drawing of 2 layers of structure around wiring 60.
Draw fluent material as formation, except the fluent material that comprises silver-colored particulate, can also use the fluent material of metal particles such as for example comprising Au, Al, Cu, Pd, comprise the fluent material of graphite, carbon nano-tube etc. etc. around wiring 60 the 2nd layer of 60b.Metal particle, carbon particulate etc. are scattered in the fluent material with the form of nanoparticle, nano wire etc.In addition, in that the 2nd layer of 60b formed under the situation of metal film, also can use the fluent material that comprises organometallics.
Then, carry out dielectric film successively and form operation S30 and bridge joint wiring formation operation S40.
Fig. 9 further illustrates the key diagram that dielectric film forms operation S30 and bridge joint wiring formation operation S40 particularly.Fig. 9 (b) is and the corresponding vertical view of Fig. 7 (c) that it is the figure that the formation zone of bridge joint wiring 21 is shown.Fig. 9 (c) is and the corresponding vertical view of Fig. 7 (d).
Below, describe with reference to Fig. 7 and Fig. 9.
Form among the operation S30 at dielectric film, utilize droplet discharge apparatus IJ, shown in Fig. 7 (c) and Fig. 9 (b), for the regioselectivity ground configuration drop in the bridge joint wiring 11 of X electrode 10.After this,, make it dry solidification, and in bridge joint wiring 11, form dielectric film 30 by the fluent material on the substrate 1 is heated.
In addition, when forming dielectric film 30, shown in Fig. 9 (b), preferred zone in bridge joint wiring 11 at least seamlessly disposes drop.Thus, can form the dielectric film 30 in the hole that do not arrive bridge joint wiring 11, crack etc., thereby prevent the defective insulation of dielectric film 30, the broken string of bridge joint wiring 21 etc.
In addition, shown in Fig. 7 (c), with zone in the bridge joint wiring 11 together also to drawing the regioselectivity ground configuration drop in wiring 60.After this,, make it dry solidification, cover the wiring protective film 62 that draws around wiring 60 and form by the fluent material on the substrate 1 is heated.
As the aforesaid liquid material, can use the fluent material that for example comprises polysiloxane, the fluent material that comprises acrylic resin or acrylic monomers etc.
Then, advance to the bridge joint wiring and form operation S40.
Form among the operation S40 in the bridge joint wiring, shown in Fig. 7 (d) and Fig. 9 (c), spread all over island electrode part 22 tops and the ground, dielectric film 30 tops that are adjacent to dispose, the droplet configuration that will comprise the fluent material of ITO particulate is a wiring shape.After this, with the fluent material dry solidification on the substrate 1.Thus, form the bridge joint wiring 21 that connects between the island electrode part 22.As employed fluent material in the formation of bridge joint wiring 21, except the above-mentioned fluent material that comprises the ITO particulate, can also use the fluent material that comprises IZO (registered trademark) particulate, ZnO particle to form.
Connected up 21 o'clock at the formation bridge joint, shown in Fig. 9 (c).
Form among the operation S40 in the bridge joint wiring, the preferred use fluent material identical with electrode film formation process S10 forms bridge joint wiring 21.That is, for the constituent material of bridge joint wiring 21, the constituent material identical materials of preferred use and X electrode 10, island electrode part 22 etc.
Then, advance to planarization film and form operation S50.
Form among the operation S50 at planarization film, shown in Fig. 8 (a), so that the smooth purpose that turns to of function face 1a of substrate 1 forms the planarization film 40 that is made of insulating material on roughly whole of function face 1a.
Planarization film 40, though can use the fluent material identical to form with the fluent material that forms the dielectric film 30 formation usefulness of using among the operation S30 at dielectric film, because of the smooth purpose that turns to, so preferably use resin material to form with substrate 1 surface.
Then, advance to protective substrate and engage operation S60.
Engage among the operation S60 at protective substrate, shown in Fig. 8 (b), placement of adhesives between protective substrate of preparing in addition 50 and planarization film 40 is pasted protective substrate 50 with planarization film 40 mutually via the adhesive linkage 51 that is made of such bonding agent.Protective substrate 50 except being the transparency carrier that is made of glass, plastics etc., also can be optical element substrates such as polarization plates, polarizer.Bonding agent as constituting adhesive linkage 51 can use transparent resin material etc.
Then, advance to shielding layer and form operation S70.
Form among the operation S70 at shielding layer, shown in Fig. 8 (c), go up the shielding layer 70 that formation is made of conducting film at the back side of substrate 1 1b (with the face of function face 1a opposition side).Shielding layer 70 can use known one-tenth embrane methods such as vacuum film formation method, silk screen (ス Network リ one Application) print process, hectograph (オ Off セ Star ト) print process, drop discharge method to form.For example using print process such as drop discharge method to form under the situation of shielding layer 70, can use in electrode film formation process S10 and bridge joint wiring and form the fluent material that comprises ITO particulate etc. that uses among the operation S40.
In addition, except forming by film forming the method for shielding layer 70 to substrate 1, the film that conducting film also can be arranged by other preparation film forming on one or both sides, and with such film applying on the 1b of the back side of substrate 1, with the conducting film on the film as shielding layer 70.
In addition, in the present embodiment, though at the last enforcement shielding layer 70 of touch panel manufacturing process, shielding layer 70 can regularly form arbitrarily.For example, also can in electrode film formation process S10 and later operation thereof, provide the substrate 1 that is pre-formed shielding layer 70.In addition, also can engage the arrangement shielding layer formation operation between the operation arbitrarily of operation S60 at electrode film formation process S10～protective substrate.
In addition, in the present embodiment, though 1b has formed shielding layer 70 at the back side of substrate 1, but the touch panel 100A in as shown in Figure 3 variation forms under the situation of shielding layer 70A in the function face 1a of substrate 1 side like that, before electrode film formation process S10, carry out operation that forms shielding layer 70A and the operation that forms dielectric film 80A.In the case, shielding layer 70A also can utilize with shielding layer and form the identical method formation of operation S70.In addition, the formation operation of dielectric film 80A can be set at for example dielectric film formation operation S30 is identical.
In the above-described embodiment,, as shown in Figure 9, formed the dielectric film 30 of overlooking basic rectangular shape,, also can change the shape of dielectric film 30 for the formation that makes bridge joint wiring 21 further becomes easily though form among the operation S30 at dielectric film.
Figure 10 is the process chart that the manufacture method of variation is shown.Figure 10 (a)～(c) be respectively with the corresponding figure of Fig. 9 (a)～(c).
In this routine manufacture method, shown in Figure 10 (b), form among the operation S30 at dielectric film, form the partly dielectric film 30 of the middle shape that attenuates.In more detail, form: the width of dielectric film 30 of the orientation (bearing of trend of Y electrode 20) of island electrode part 22 is narrowed down at the central portion 30a place of diagram left and right directions (bearing of trend of X electrode 10), and broaden gradually towards the end of both sides 30b, 30b.
And, form among the operation S40 in bridge joint wiring, shown in Figure 10 (c), form bridge joint in the mode of the central portion 30a (part that the centre attenuates) by dielectric film 30 and connect up 21.By adopting such manufacture method, when configuration on substrate 1 was used to form the drop of bridge joint wiring 21, the outstanding position of the end 30b side of dielectric film 30 was as preventing that the weir devices that drop soaks diffusion from playing a role.Thus, can prevent effectively that bridge joint wiring 21 is short-circuited with X electrode 10, can make touch panel 100 in the yield rate highland.
If the manufacture method of the touch panel 100 that explains more than adopting then can access following effect.
At first, in the manufacture method of present embodiment, can on the same one side on the substrate 1, form the island electrode part 22 of X electrode 10 (island electrode part 12, bridge joint wiring 11), formation Y electrode 20, use drop to discharge the zone of method in bridge joint wiring 11 and form dielectric film 30, thereafter and then the bridge joint wiring of using drop discharge method to form to connect island electrode part 22 21 thereafter.Form and the syndeton of the Y electrode 20 that X electrode 10 intersects by such use drop discharge method, compared with the past can the reduction man-hour can be suppressed the manufacturing cost of touch panel.
If explanation in further detail, then in the formation operation of in the past syndeton, after the operation shown in Fig. 7 (a), what carry out is the operation that (1) forms the interlayer dielectric that covers X electrode 10 and island electrode part 22, (2) operation of formation contact hole on interlayer dielectric, this contact hole is used for setting up bridge joint wiring on adjacent island electrode part 22, (3) thus forming the bridge joint wiring at the zone map that comprises contact hole connects operation between the island electrode part 22.
If above-mentioned operation is in the past compared with the operation of present embodiment then as can be seen, in the manufacture method of present embodiment, do not need the photo-mask process that is used on interlayer dielectric, forming contact hole (and etching work procedure) in the operation in the past, and then, do not need to be used for photo-mask process and the etching work procedure that pattern forms the bridge joint wiring yet.
Therefore, if adopt the manufacture method of present embodiment, such photo-mask process that especially can cutting down cost then can reduce the manufacturing cost of touch panel.In addition, in drop discharge method, because only optionally at the area configurations drop that forms each film, so can suppress the use amount of material, thus on the raw material expense this point, also help manufacturing cost to reduce.
In addition, in the manufacture method of present embodiment, in electrode film formation process S10, use drop discharge method to form the island electrode part 22 of X electrode 10 and formation Y electrode 20.Thus, in electrode film formation process S10, do not need photo-mask process and etching work procedure yet, thereby can further realize cutting down the reduction of the manufacturing cost of bringing because of man-hour.
In addition, in the manufacture method of present embodiment, in the same one deck on substrate 1, form X electrode 10 (island electrode part 12, bridge joint wiring 11), island electrode part 22.Thus, and compare with the situation of Y electrode 20 in the independent layer of interlayer dielectric, forming X electrode 10, form required man-hour owing to can cut down the pattern of X electrode 10 or Y electrode 20, so can reduce manufacturing cost.
In addition, in the manufacture method of present embodiment, on substrate 1, the island electrode part 12 of rectangular shape and island electrode part 22 formed interlaced rectangularly, be configured at their place, bight approaching between the adjacent island electrode part 12 and between the adjacent island electrode part 22.And, connect between the bight of adjacent island electrode part 12 with bridge joint wiring 11, connect between the bight of adjacent island electrode part 22 with bridge joint wiring 21.Thus, can connect between the adjacent island electrode part 12 with bee-line, between the island electrode part 22, thereby form the length of bridge joint wiring 11,21 the shortest.Therefore, can reduce X electrode 10 and Y electrode 20 cross section overlook the zone, the structure that can form the cross part office is difficult to the viewed structure that arrives.
In addition, because narrow bridge joint wiring 11 of line width and bridge joint wiring 21 are shortened, so the cloth line resistance of X electrode 10 and Y electrode 20 is reduced.
In addition, though in the present embodiment, the shape of island electrode part 12,22 being formed overlook square, in addition, both can be rectangular shape such as rhombus for example, also can be polygon, circle etc.
In addition, in the manufacture method of modified embodiment of the present embodiment, dielectric film 30 is formed the middle plan view shape that attenuates in the zone that is formed bridge joint wiring 21.Thus and since in the middle of being positioned at the dielectric film 30 of the side in the zone that attenuates can suppress bridge joint wiring 21 drop soak diffusion, so can prevent the mistake wiring that X electrode 10 and Y electrode 20 are connected, thereby the fabrication yield of touch panel is improved.In addition, if adopt the touch panel 100 that possesses such structure, then can realize the touch panel of manufacturing excellence.
In addition, in the touch panel 100 of present embodiment, be formed on the drawing of periphery of input area 2, have lamination X electrode 10 and Y electrode 20 extended the 1st layer of 60a forming, sheet resistance than the 1st layer of the 2nd layer of structure that 60b forms that 60a is little around wiring 60.Thus, can form to make and draw the touch panel that has reduced around wiring 60 cloth line resistance.Therefore, because the scale that can dwindle the peripheral circuit such as buffer circuits that the signal from input area 2 is amplified, so can suppress power consumption.
In addition, in the touch panel 100 of present embodiment, preferably form the wiring protective film 62 of the periphery of input area 2 with such material, this material comprise with at the identical composition of the dielectric film 30 of the cross part office of bridge joint wiring 11,21 formation.If adopt such structure, then because the enough same operations of energy form dielectric film 30 and wiring protective film 62, so become the structure that to cut down man-hour, can reduce manufacturing cost.
In addition, in the touch panel 100 of present embodiment, film 40 planarizations that are flattened of the function face 1a side of substrate 1.If adopt this structure, then the function face 1a side of substrate 1 and protective substrate 50 roughly can engaged on whole, thereby can prevent that bubble is incorporated in the adhesive linkage 51.In addition, can utilize planarization film 40 to protect X electrode 10 and the Y electrode 20 that is formed on the substrate 1, can the high touch panel of fabrication reliability.
In addition, engage with planarization film 40 via adhesive linkage 51, become the structure that between protective substrate 50 and planarization film 40, does not have the little air layer of refractive index by making protective substrate 50.Thus, can prevent light reflection on the interface of interface, air layer and the planarization film of air layer and protective substrate 50 etc., thereby can access good quality as the touch panel that is disposed at the front face side of display device.
In addition, in the touch panel 100 of present embodiment, on the 1b of the back side of substrate 1, formed shielding layer 70.Thus, can utilize the unwanted electric field of shielding layer 70 blocking, can prevent that electric field that noise enters into the input area 2 of touch panel 100, touch panel 100 from leaking to the situations such as external unit side of display device etc.
＜the 2 embodiment 〉
Then, the touch panel for the 2nd embodiment of the present invention describes.
Figure 11 is the diagrammatic top view of the touch panel 200 of the 2nd embodiment of the present invention, and Figure 12 is the B-B ' constructed profile of touch panel 200.
In addition, in the present embodiment,, omit for its detailed explanation is suitable about having the position of the structure identical with touch panel 100, the 100A of Fig. 1～shown in Figure 3.
Touch panel 200, as shown in figure 11, have substrate 1, input area 2 and draw around the wiring 60.
Substrate 1 is shaped as overlooks rectangular shape, as its material, uses transparent materials such as glass, acryl resin.
Input area 2 be in Figure 11 by a dot-and-dash line area surrounded, be the zone of detecting the positional information of the finger on touch panel, import.
At input area 2, dispose a plurality of X electrodes 110 and a plurality of Y electrode 120.
X electrode 110 extends on X-direction in diagram, and a plurality of X electrode 110 is arranged along Y direction.Y electrode 120 extends along Y direction in diagram, and a plurality of Y electrode 120 is arranged along X-axis.X electrode 110 and Y electrode 120 intersect with X electrode 110 by make the bridge joint wiring that is provided with 121 on the Y electrode, and in input area 2 intersection.
X electrode 110 is the electrodes along the rectangular shape of X-direction extension.
Y electrode 120 possesses in a plurality of island electrode part 122 of arranging on the Y direction and connects bridge joint wiring 121 between the adjacent island electrode part 122 of X electrode 110.Island electrode part 122 forms overlooks rectangular shape.Zone between the island electrode part 122 adjacent along X-direction disposes dummy electrode 125.Therefore, at input area 2,, alternately dispose island electrode part 122 and dummy electrode 125 along X-direction.
Material as constituting X electrode 110, Y electrode 120 and dummy electrode 125 can adopt ITO (indium tin oxide), IZO (indium-zinc oxide, registered trademark), ZnO etc. to have the resistive element of light transmission.
Draw around wiring 60 and is connected, and be connected with drive division and converting electrical signal/operational part (all omission illustrates) in inside that is arranged on touch panel 200 or the external device (ED) with X electrode 110 and Y electrode 120.
Then, the sectional view for Figure 12 describes.
On the function face 1a of substrate 1, be provided with X electrode 110, island electrode part 122 and dummy electrode 125.On X electrode 110, be formed with dielectric film 130.And, on dielectric film 130, dispose bridge joint wiring 121.
In addition, on the function face 1a of substrate 1, dispose and draw around wiring 60.Draw around wiring 60 laminations the 1st layer of 60a and the 2nd layer of 60b are arranged.And, cover to draw and be formed with wiring protective film 62 around wiring 60 ground.
Cover these electrodes and wiring ground, be formed with planarization film 140.On planarization film 140, dispose protective substrate 50 across adhesive linkage 51.On the 1b of the back side of substrate 1, be provided with shielding layer 70.
Dielectric film 130 is with X electrode 110 and bridge joint wiring 121 insulation that intersect three-dimensionally.Dielectric film 130 can use print process coating polysiloxane, acrylic resin and acrylic monomers etc., and makes it dry solidification and form.
The input area at least 2 of the function face 1a of planarization film 140 covered substrates 1 and forming, the concavo-convex planarization of the function face 1a that it is caused X electrode 110, Y electrode 120 etc.
Protective substrate 50 is transparency carriers of glass, plastics etc.Perhaps; be configured at the touch panel 200 of present embodiment under the situation of front of display device such as liquid crystal panel, organic EL panel; as protective substrate 50; also can use optical element substrate (polarization plates, polarizer etc.), this optical element substrate is used as the part of display device.
Shielding layer 70 is by forming ITO, IZO transparent conductive material film forming such as (registered trademarks) at the back side of substrate 1 1b.Perhaps, also can prepare to be formed with the film of the nesa coating that becomes shielding layer, form such film is bonded in the structure that the back side 1b of substrate 1 forms.
In addition, though formed shielding layer 70, also can shielding layer be formed on the function face 1a side of substrate 1 as shown in Figure 3 in the present embodiment at the back side of substrate 1 1b.
In the case, on the shielding layer 70A and dielectric film 80A that are stacked on the function face 1a of substrate 1, form X electrode 110, Y electrode 120, dummy electrode 125, draw around wiring 60 etc.
Then, for the manufacture method of the touch panel 200 of present embodiment, describe with reference to the process flow diagram of Fig. 4.
In the manufacturing process of touch panel 200, also the electrode film formation process S10 of execution graph 4～shielding layer forms operation S70.
At first, in electrode film formation process S10, on the substrate 1 that for example is glass substrate, optionally configuration comprises the drop of the fluent material of ITO particulate.Particularly, on substrate 1, form by X electrode 110, as the part of Y electrode 120 island electrode part 122, dummy electrode 125, from X electrode 110 and the island electrode part 122 extended patterns that draw around the 1st layer of fluent material that 60a constitutes of wiring 60.After this, by making fluent material (drop) drying that is configured on the substrate 1, and form X electrode 110, island electrode part 122, dummy electrode 125, draw the 1st layer of 60a around wiring 60.
In addition, both can form the nesa coating that constitutes by IZO (registered trademark) by the drop that discharge comprises IZO (registered trademark) particulate, also can use and use photolithographic pattern formation method, form X electrode 110, island electrode part 122, dummy electrode 125 and draw around wiring 60 the 1st layer of 60a.
Then, form among the operation S20, will comprise to draw to discharge and be configured on the 1st layer of 60a around the drop of the fluent material of the constituent material of the 2nd layer of 60b of wiring 60 at auxiliary wiring.After this, make the droplet drying of configuration of discharging, and form the 2nd layer of 60b.
Then, form among the operation S30, for the predetermined zone on the X electrode 110 and draw around wiring 60 tops and optionally dispose drop at dielectric film.After this,, make it dry solidification, and form dielectric film 130 and wiring protective film 62 by the fluent material on the substrate 1 is heated.
In the present embodiment, the plan view shape that also dielectric film 130 can be attenuated in the middle of the zone that is formed bridge joint wiring 121 forms.
Then, form among the operation S40 in the bridge joint wiring, spread all over the island electrode part 122 and dielectric film 130 ground that are adjacent to dispose along Y direction, the droplet configuration that will comprise the fluent material of ITO particulate is a wiring shape.After this, by with the fluent material dry solidification on the substrate 1, connect up 121 and form bridge joint.
Then, form among the operation S50, so that the smooth purpose that turns to of function face 1a of substrate 1 forms the planarization film 140 that is made of insulating material on roughly whole of function face 1a at planarization film.
Then, engage among the operation S60 at protective substrate, placement of adhesives between protective substrate of preparing in addition 50 and planarization film 140 is pasted protective substrate 50 with planarization film 140 mutually via the adhesive linkage 51 that is made of such bonding agent.Protective substrate 50 except being the transparency carrier that is made of glass, plastics etc., also can be optical element substrates such as polarization plates, polarizer.Bonding agent as constituting adhesive linkage 51 can use transparent resin material etc.
Then, form among the operation S70, go up at the back side of substrate 1 1b (with the face of function face 1a opposition side) and form the shielding layer 70 that constitutes by conducting film at shielding layer.
If adopt the manufacture method of the touch panel 200 of above explanation, then can access following effect.
At first, in the manufacture method of present embodiment, can on the same one side on the substrate 1, form the island electrode part 122 of X electrode 110, formation Y electrode 120, use the drop method of discharging to form dielectric film 130 along the zone between the island electrode part 122 of Y direction configuration, thereafter and then the bridge joint wiring of using drop discharge method to form to connect island electrode part 122 121 in the connection on the X electrode 110 thereafter.Form the syndeton of intersecting with X electrode 110 by such use drop discharge method, compared with the past can the reduction man-hour can be suppressed the manufacturing cost of touch panel.
In addition, in the manufacture method of present embodiment, in electrode film formation process S10, use drop discharge method to form the island electrode part 122 and the dummy electrode 125 of X electrode 110, formation Y electrode 120.Thus, in electrode film formation process S10, do not need photo-mask process and etching work procedure yet, thereby can further realize cutting down the reduction of the manufacturing cost of bringing because of man-hour.
In addition, in the manufacture method of present embodiment, in the same one deck on substrate 1, form X electrode 110, island electrode part 122, dummy electrode 125.Thus, and compare with the situation of Y electrode 120 in the independent layer of interlayer dielectric, forming X electrode 110, form required man-hour owing to can cut down the pattern of X electrode 110, Y electrode 120 or dummy electrode 125, so can reduce manufacturing cost.
In addition, in the touch panel 200 of present embodiment, the dummy electrode 125 that is formed by the resistive element identical with X electrode 110 and Y electrode 120 is set between adjacent island electrode part 122.Thus, because in input area 2, zone between X electrode 110 and Y electrode 120 is provided with the resistive element of the material identical with X electrode 110 and Y electrode 120, so the refractive index of the light in the input area 2, reflectivity become evenly, thereby the wiring pattern that can prevent X electrode 110 and Y electrode 120 is watched by the user.
In addition, in the manufacture method of modified embodiment of the present embodiment, dielectric film 130 is formed the middle plan view shape that attenuates in the zone that is formed bridge joint wiring 121.Thus, since the dielectric film 130 of the side in the zone that attenuates in the middle of being positioned at can suppress bridge joint wiring 121 drop soak diffusion, so can prevent the mistake wiring that X electrode 110 and Y electrode 120 are connected, the fabrication yield of touch panel is improved.In addition, if adopt the touch panel 200 that possesses such structure, then can realize the touch panel of manufacturing excellence.
In addition, in the touch panel 200 of present embodiment, be formed on the drawing of periphery of input area 2, have lamination X electrode 110 and Y electrode 120 extended the 1st layer of 60a forming, sheet resistance than the 1st layer of the 2nd layer of structure that 60b forms that 60a is little around wiring 60.Thus, can form to make and draw the touch panel that has reduced around wiring 60 cloth line resistance.Therefore, because the scale that can dwindle the peripheral circuit such as buffer circuits that the signal from input area 2 is amplified, so can suppress power consumption.
In addition, in the touch panel 200 of present embodiment, preferably form the wiring protective film 62 of the periphery of input area 2 with such material, this material comprise with at the identical composition of the dielectric film 130 of the cross part office formation of X electrode 110 and bridge joint wiring 121.If adopt such structure, then because the enough same operations of energy form dielectric film 130 and wiring protective film 62, so become the structure that to cut down man-hour, can reduce manufacturing cost.
In addition, in the touch panel 200 of present embodiment, film 140 planarizations that are flattened of the function face 1a side of substrate 1.If adopt this structure, then the function face 1a side of substrate 1 and protective substrate 50 roughly can engaged on whole, thereby can prevent that bubble is incorporated in the adhesive linkage 51.In addition, can utilize planarization film 140 to protect X electrode 110 and the Y electrode 120 that is formed on the substrate 1, can the high touch panel of fabrication reliability.
In addition, engage with planarization film 140 via adhesive linkage 51, become the structure that between protective substrate 50 and planarization film 40, does not have the little air layer of refractive index by making protective substrate 50.Thus, can prevent light reflection on the interface of interface, air layer and the planarization film of air layer and protective substrate 50 etc., thereby can access good quality as the touch panel that is disposed at the front face side of display device.
In addition, in the touch panel 200 of present embodiment, on the 1b of the back side of substrate 1, formed shielding layer 70.Thus, can utilize the unwanted electric field of shielding layer 70 blocking, can prevent that electric field that noise enters into the input area 2 of touch panel 200, touch panel 200 from leaking to the situations such as external unit side of display device etc.
[display device]
Then, describe for the display device that possesses touch panel of the present invention.In the present embodiment, the example as display device describes for the liquid crystal indicator that possesses touch panel.Figure 13 is the synoptic diagram as the liquid crystal indicator 500 of one embodiment of the present invention, (a) expression vertical view, (b) H-H ' sectional view of expression vertical view.
Liquid crystal indicator 500 shown in Figure 13 (a), has device substrate 410, counter substrate 420 and image display area 410a.
Device substrate 410 is the substrates that have than the rectangular shape of overlooking the zone of opposed substrate 420 broadnesses.
Counter substrate 420 is that the image of liquid crystal indicator 500 shows side, and it is the transparent substrate that is formed by glass, acryl resin etc.Counter substrate 420 is bonded on the middle body of device substrate 410 via encapsulant 452.
Image display area 410a is the zone of overlooking of counter substrate 420, is the medial region along the peripheral break line 453 that is provided with in interior week of encapsulant 452.
The periphery place of the counter substrate 420 on device substrate 410, dispose data line drive circuit 401, scan line drive circuit 404, with data line drive circuit 401 and scan line drive circuit 404 connection terminals 402 and connect up 405 etc., wiring 405 connects between the scan line drive circuit 404 that relatively disposes with respect to counter substrate 420.
Then, the section for liquid crystal indicator 500 describes.
On the face of liquid crystal layer 450 sides of device substrate 410, lamination has pixel electrode 409 and alignment films 418 etc.
On the face of liquid crystal layer 450 sides of counter substrate 420, lamination has photomask (black matrix) 423, color filter 422, common electrode 425 and alignment films 429 etc.
Liquid crystal layer 450 is seized on both sides by the arms by device substrate 410 and counter substrate 420.
And, on the face in the outside of counter substrate 420 (opposition side of liquid crystal layer 450), dispose touch panel 100 of the present invention across adhesive linkage 101.
If adopt the liquid crystal indicator of above explanation, then can access following effect.
The touch panel 100 that is provided with in liquid crystal indicator 500 utilizes drop discharge method to form electrode that position probing uses and the dielectric film that makes electrode crossing.Thus, owing to reduced manufacturing cost related with touch panel, so can form the liquid crystal indicator that has suppressed manufacturing cost.
In addition, the touch panel that is provided with in liquid crystal indicator also can be as the touch panel 100A of the variation of the 1st embodiment or the touch panel 200 of the 2nd embodiment.These touch panels, also by utilizing drop discharge method to carry out the operation manufacturing of film forming, its manufacturing cost can reduce.Thereby, can suppress the manufacturing cost of liquid crystal indicator.
In addition, in the liquid crystal indicator of present embodiment, preferably on the face in the outside of counter substrate 420 (opposition side of liquid crystal layer 450), form each layer of touch panel.Thus, can be with the counter substrate 420 of liquid crystal indicator and substrate 1 sharing of touch panel, thus can further reduce manufacturing cost, and can make the liquid crystal indicator lightweight.
In addition, though be illustrated about liquid crystal indicator in the present embodiment, in addition, in display device such as organic El device, electrophoretic display apparatus, also can use touch panel of the present invention rightly.
[electronic equipment]
Then, describe for the example of electronic equipment that has touch panel of the present invention or possess the liquid crystal indicator of touch panel.Figure 14 is the stereographic map that portable personal computer 1100 is shown.Portable personal computer 1100 possesses main part 1103, and this main part 1103 has display part 1101, keyboard 1102.Portable personal computer 1100 possesses the liquid crystal indicator 500 of above-mentioned embodiment in display part 1101.
If adopt the portable personal computer 1100 that possesses such structure, then owing to touch panel of the present invention is used for display part, so can form the electronic equipment that has suppressed manufacturing cost.
In addition, above-mentioned electronic equipment is used for illustration electronic equipment of the present invention, and is not to limit technical scope of the present invention.For example in the display part of mobile phone, portable audio device, PDA (Personal Digital Assistant, personal digital assistant) etc., also can use touch panel of the present invention rightly.

Claims (24)

1. the manufacture method of a touch panel, this touch panel have substrate, form and at upwardly extending a plurality of the 1st electrodes of cross one another side and a plurality of the 2nd electrode, it is characterized in that this method comprises in the one side side of aforesaid base plate:
The electrode film formation process, it forms a plurality of aforementioned the 1st electrodes and aforementioned the 2nd electrode is disconnected the electrode film of the shape that forms with the cross part office of aforementioned the 1st electrode on aforesaid base plate;
Dielectric film forms operation, and it on aforementioned the 1st electrode that becomes with the position of the cross section of aforementioned the 2nd electrode, uses print process to form dielectric film at least; And
The bridge joint wiring forms operation, and its use print process forms the bridge joint that connects between the former electrodes film through aforementioned dielectric film top and connects up.
2. the manufacture method of the described touch panel of claim 1 is characterized in that:
Aforementioned the 1st electrode and aforementioned the 2nd electrode have a plurality of island electrode part and connect bridge joint wiring between the adjacent aforementioned island electrode part, and mutual aforementioned bridge joint wiring is intersected;
In the former electrodes film formation process, form the aforementioned island electrode part of aforementioned the 1st electrode and aforementioned the 2nd electrode;
Form in the operation at the aforementioned dielectric film, in the aforementioned bridge joint wiring of aforementioned the 1st electrode, form the aforementioned dielectric film at least;
Form in the operation in aforementioned bridge joint wiring, form the aforementioned bridge joint wiring of aforementioned the 2nd electrode.
3. the manufacture method of the described touch panel of claim 2 is characterized in that:
In the former electrodes film formation process, form the aforementioned island electrode part of overlooking rectangular shape rectangularly, and the aforementioned bridge joint wiring between the bight of the aforementioned island electrode part of aforementioned the 1st electrode of formation connection;
Form in the operation the aforementioned bridge joint wiring between the bight of the aforementioned island electrode part of aforementioned the 2nd electrode of formation connection in aforementioned bridge joint wiring.
4. the manufacture method of claim 2 or 3 described touch panels is characterized in that:
Form in the operation at the aforementioned dielectric film, the aforementioned dielectric film is formed the middle plan view shape that attenuates at the part place of the aforementioned bridge joint wiring that forms aforementioned the 2nd electrode.
5. the manufacture method of any described touch panel in the claim 1～4 is characterized in that:
After the former electrodes film formation process, comprise following operation:
On the aforementioned the 1st and the 2nd electrode outside being led to the input area of this touch panel, lamination forms auxiliary wiring, and this auxiliary wiring has than the aforementioned the 1st and the 2nd low sheet resistance of electrode.
6. the manufacture method of the described touch panel of claim 5 is characterized in that:
Form in the operation at the aforementioned dielectric film, comprise following operation:
Together form the wiring protective film that covers aforementioned auxiliary wiring with the aforementioned dielectric film.
7. the manufacture method of any described touch panel in the claim 1～6 is characterized in that:
After aforementioned bridge joint wiring forms operation, comprising:
Diaphragm forms operation, and it in the zone of the input area aforementioned one side side, that comprise this touch panel of aforesaid base plate, forms diaphragm at least.
8. the manufacture method of any described touch panel in the claim 1～7 is characterized in that:
After aforementioned bridge joint wiring forms operation or aforementioned diaphragm formation operation, comprise following operation:
At least in the zone of the input area aforementioned one side side, that comprise this touch panel of aforesaid base plate, form adhesive linkage, this adhesive linkage is bonding with protective substrate or optical element substrate and aforesaid base plate.
9. the manufacture method of any described touch panel in the claim 1～8 is characterized in that:
Before the former electrodes film forms operation, comprise following operation:
In the aforementioned one side side of aforesaid base plate, the dielectric film of lamination conducting film and the aforementioned conducting film of covering.
10. the manufacture method of any described touch panel in the claim 1～8 is characterized in that, comprising:
On aforesaid base plate and a face aforementioned opposition side, form the operation of conducting film.
11. the manufacture method of any described touch panel in the claim 1～10 is characterized in that, comprising:
In zone on the aforesaid base plate, between aforementioned the 1st electrode and aforementioned the 2nd electrode, form the operation of dummy electrode, this dummy electrode has and the aforementioned the 1st and the 2nd essentially identical composition of electrode.
12. a touch panel has substrate, forms and at upwardly extending a plurality of the 1st electrodes of cross one another side and a plurality of the 2nd electrode, it is characterized in that having on aforesaid base plate in the one side side of aforesaid base plate:
Aforementioned the 1st electrode;
Aforementioned the 2nd electrode is disconnected the electrode film of the shape that forms with the cross part office of aforementioned the 1st electrode;
At least the dielectric film that on aforementioned the 1st electrode that becomes with the position of the cross section of aforementioned the 2nd electrode, forms; And
The bridge joint that connects between the former electrodes film through aforementioned dielectric film top connects up.
13. the described touch panel of claim 12 is characterized in that:
Aforementioned the 1st electrode and aforementioned the 2nd electrode have a plurality of island electrode part and connect bridge joint wiring between the adjacent aforementioned island electrode part, and mutual aforementioned bridge joint wiring is intersected;
Cross part office at the aforementioned the 1st and the 2nd electrode:
In the aforementioned bridge joint wiring of aforementioned the 1st electrode, form the aforementioned dielectric film;
The aforementioned bridge joint wiring of aforementioned the 2nd electrode connects between the aforementioned island electrode part of aforementioned the 2nd electrode through aforementioned dielectric film top.
14. the described touch panel of claim 13 is characterized in that:
Aforementioned island electrode part is overlooked basic rectangular shape, and aforementioned bridge joint wiring connects between the bight of aforementioned island electrode part.
15. any described touch panel in the claim 12～14 is characterized in that:
The aforementioned dielectric film, the plan view shape that in the middle of the position of the bridge joint wiring that is formed with aforementioned the 2nd electrode has, attenuates.
16. any described touch panel in the claim 12～15 is characterized in that:
On the aforementioned the 1st and the 2nd electrode outside being led to the input area of this touch panel, lamination has auxiliary wiring, and this auxiliary wiring has than the aforementioned the 1st and the 2nd low sheet resistance of electrode.
17. the described touch panel of claim 16 is characterized in that:
Cover aforementioned auxiliary wiring ground and be formed with wiring protective film, this wiring protective film comprises the composition identical with the aforementioned dielectric film.
18. any described touch panel in the claim 12～17 is characterized in that having:
Diaphragm, it covers the aforementioned the 1st and the 2nd electrode of the input area that is disposed at this touch panel at least.
19. any described touch panel in the claim 12～18 is characterized in that:
At least the aforementioned the 1st and the 2nd electrode ground that covers the input area that is disposed at this touch panel is formed with adhesive linkage, and via bonding protective substrate of aforementioned adhesive linkage or optical element substrate.
20. any described touch panel in the claim 12～19 is characterized in that:
In the aforementioned one side side of aforesaid base plate, form the dielectric film of conducting film and the aforementioned conducting film of covering;
On the aforementioned dielectric film that covers aforementioned conducting film, be formed with the aforementioned the 1st and the 2nd electrode.
21. any described touch panel in the claim 12～19 is characterized in that:
On aforesaid base plate and a face aforementioned opposition side, be formed with conducting film.
22. any described touch panel in the claim 12～21 is characterized in that:
Aforesaid base plate is the substrate that constitutes display device.
23. a display device is characterized in that, possesses any described touch panel in the claim 12～22.
24. an electronic equipment is characterized in that, possesses any described touch panel or the described display device of claim 23 in the claim 12～22.
CN201010001452A 2009-01-08 2010-01-08 Method for manufacturing touch panel, touch panel, display device, and electronic apparatus Pending CN101776967A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP002240/2009 2009-01-08
JP2009002240A JP2010160670A (en) 2009-01-08 2009-01-08 Method for manufacturing touch panel, touch panel, display and electronic apparatus

Publications (1)

Publication Number Publication Date
CN101776967A true CN101776967A (en) 2010-07-14

Family

ID=42311376

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010001452A Pending CN101776967A (en) 2009-01-08 2010-01-08 Method for manufacturing touch panel, touch panel, display device, and electronic apparatus

Country Status (3)

Country Link
US (1) US20100171718A1 (en)
JP (1) JP2010160670A (en)
CN (1) CN101776967A (en)

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101950225A (en) * 2010-08-24 2011-01-19 深圳市中显微电子有限公司 Capacitance touch screen and production method thereof
CN102385462A (en) * 2010-08-25 2012-03-21 乐金显示有限公司 Type touch screen panel
CN102447162A (en) * 2010-09-30 2012-05-09 汉王科技股份有限公司 Antenna board of electromagnetic-type touch pad and manufacturing process thereof
CN102467290A (en) * 2010-11-09 2012-05-23 宸鸿光电科技股份有限公司 Touch panel structure and manufacturing method thereof
CN102681734A (en) * 2011-03-07 2012-09-19 昆山维信诺显示技术有限公司 Capacitor touch screen and manufacturing method thereof
CN102750025A (en) * 2011-04-22 2012-10-24 扬升照明股份有限公司 Manufacturing method of touch device
CN102819359A (en) * 2011-06-08 2012-12-12 比亚迪股份有限公司 Capacitive touch screen and touch device with same
CN103034354A (en) * 2011-09-30 2013-04-10 瀚宇彩晶股份有限公司 Touch display device and forming method thereof
CN103092452A (en) * 2013-01-28 2013-05-08 北京京东方光电科技有限公司 Capacitive touch screen and manufacturing method thereof and touch display screen
CN103207699A (en) * 2012-01-16 2013-07-17 Smk株式会社 Wiring structure of touch panel and manufacturing method thereof
CN103218092A (en) * 2012-01-24 2013-07-24 株式会社日本显示器西 Touch panel, display device, and electronic apparatus
CN103262012A (en) * 2010-12-09 2013-08-21 夏普株式会社 Touch panel, display device provided with same, and method for producing touch panel
CN103376938A (en) * 2012-04-19 2013-10-30 三星显示有限公司 Touch screen panel
CN103403654A (en) * 2011-03-16 2013-11-20 京瓷株式会社 Input device, electronic apparatus, and portable terminal
CN103455197A (en) * 2012-05-31 2013-12-18 Lg伊诺特有限公司 Touch panel
TWI447481B (en) * 2011-06-09 2014-08-01 Shih Hua Technology Ltd Method for making touch panel
CN104142747A (en) * 2013-05-10 2014-11-12 柏腾科技股份有限公司 Sputtering type touch panel bridging structure and manufacturing method thereof
CN104205030A (en) * 2012-03-28 2014-12-10 日本写真印刷株式会社 Touch sensor and manufacturing method for same, as well as transfer ribbon for touch sensor manufacturing
CN104375689A (en) * 2013-08-16 2015-02-25 胜华科技股份有限公司 touch control display device
CN104820510A (en) * 2014-02-05 2015-08-05 三星显示有限公司 Touch screen panel and manufacturing method thereof
CN105408841A (en) * 2013-07-11 2016-03-16 保力马科技(日本)株式会社 Touch sensor
US9448672B2 (en) 2013-12-20 2016-09-20 Industrial Technology Research Institute Touch panel structure and fabrication method for the same
US9563315B2 (en) 2010-11-09 2017-02-07 Tpk Touch Solutions Inc. Capacitive touch panel and method for producing the same
CN103443750B (en) * 2011-01-20 2017-02-15 日产化学工业株式会社 Coating composition for touch panels, coating film, and touch panel
CN106415453A (en) * 2014-06-02 2017-02-15 凸版印刷株式会社 Touch sensor electrode, touch panel, and display device
CN106908973A (en) * 2015-11-30 2017-06-30 株式会社日本显示器 The display device and sensor device of belt sensor
CN113271837A (en) * 2019-02-19 2021-08-17 奥林巴斯株式会社 Endoscope distal end structure and endoscope

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8605050B2 (en) 2007-08-21 2013-12-10 Tpk Touch Solutions (Xiamen) Inc. Conductor pattern structure of capacitive touch panel
JP5178379B2 (en) 2008-07-31 2013-04-10 株式会社ジャパンディスプレイイースト Display device
EP2410411B1 (en) 2009-03-20 2019-03-06 TPK Touch Solutions (Xiamen) Inc. Capacitive touch circuit pattern
TW201040818A (en) * 2009-05-08 2010-11-16 Sintek Photronic Corp Capacitive touch panel structure with high optical uniformity
KR20110100792A (en) * 2010-03-05 2011-09-15 삼성전자주식회사 Touch screen module construction
TWI409684B (en) * 2010-03-10 2013-09-21 Tpk Touch Solutions Inc Electrode pattern structure of a capacitive touch panel and method of manufacturing the same
KR101735568B1 (en) * 2010-03-30 2017-05-15 엘지디스플레이 주식회사 Color filter array substrate, liquid crystal display device comprising the same, and method for manufacturing the same
TWM388043U (en) * 2010-04-28 2010-09-01 Minlead Ltd Touch control panel
US20140132861A1 (en) * 2010-05-31 2014-05-15 Wintek Corporation Touch panel and touch-sensitive display device
TW201145125A (en) * 2010-06-03 2011-12-16 J Touch Corp Touch panel manufacturing method and structure thereof
JP5601944B2 (en) * 2010-06-28 2014-10-08 帝人株式会社 Touch panel device and display device with touch panel device
JP2013531317A (en) 2010-07-14 2013-08-01 エルジー イノテック カンパニー リミテッド Touch panel and manufacturing method thereof
JP5997146B2 (en) * 2010-07-30 2016-09-28 エルジー イノテック カンパニー リミテッド Touch panel
KR101156782B1 (en) * 2010-08-03 2012-06-18 삼성전기주식회사 Touch Panel
KR101669538B1 (en) * 2010-08-11 2016-10-28 삼성디스플레이 주식회사 Touch Screen Panel and Fabricating Method Thereof
KR101314779B1 (en) * 2010-08-18 2013-10-08 엘지디스플레이 주식회사 Electrostatic capacity type touch screen panel and method of manufacturing the same
JP5659684B2 (en) * 2010-10-18 2015-01-28 凸版印刷株式会社 Touch panel substrate and manufacturing method thereof
JP5520776B2 (en) * 2010-10-20 2014-06-11 信越ポリマー株式会社 Sensor sheet and manufacturing method thereof
KR20120044041A (en) * 2010-10-27 2012-05-07 삼성모바일디스플레이주식회사 Display device
JP5579572B2 (en) * 2010-10-28 2014-08-27 三洋電機株式会社 Capacitive touch panel
KR101230196B1 (en) * 2010-10-29 2013-02-06 삼성디스플레이 주식회사 Liquid Crystal Display having a Touch Screen Panel
CN102566842B (en) * 2010-12-06 2014-10-29 乐金显示有限公司 Electrostatic capacity type touch screen panel
EP2469328A1 (en) * 2010-12-22 2012-06-27 Chimei InnoLux Corporation Method for fabricating a touch panel
EP3521986B1 (en) 2011-01-19 2020-05-20 Lg Innotek Co. Ltd Touch panel
KR20120091871A (en) * 2011-02-10 2012-08-20 삼성디스플레이 주식회사 Display device and method for manufacturing the same
KR101908492B1 (en) 2011-04-12 2018-10-17 엘지디스플레이 주식회사 Display device associated with touch panel
TWI512555B (en) * 2011-06-09 2015-12-11 Shih Hua Technology Ltd Touch panel and method for making the same
CN102866794A (en) 2011-06-15 2013-01-09 宸鸿光电科技股份有限公司 Touch control sensing layer and manufacturing method thereof
US9727176B2 (en) 2011-06-21 2017-08-08 Synaptics Incorporated Capacitive sensor pattern
JP2013020530A (en) * 2011-07-13 2013-01-31 Dainippon Printing Co Ltd Touch sensor panel member, display device with touch sensor panel member, and method of manufacturing touch sensor panel member
TW201310291A (en) * 2011-08-17 2013-03-01 Wintek Corp Touch display panel
CN102955628B (en) * 2011-08-26 2015-12-09 宸鸿科技(厦门)有限公司 The manufacture method of contact panel
CN103092384A (en) * 2011-11-02 2013-05-08 宸鸿科技(厦门)有限公司 Touch panel with conductive bridge structure and manufacturing method thereof
US20140335350A1 (en) * 2011-12-05 2014-11-13 Hitachi Chemical Company, Ltd. Method for forming protective film on electrode for touch panel, photosensitive resin composition and photosensitive element, and method for manufacturing touch panel
WO2013084283A1 (en) 2011-12-05 2013-06-13 日立化成株式会社 Method for forming protective film for touch panel electrodes, photosensitive resin composition, and photosensitive element
WO2013084282A1 (en) 2011-12-05 2013-06-13 日立化成株式会社 Method for forming resin cured film pattern, photosensitive resin composition, and photosensitive element
TWI471795B (en) * 2011-12-14 2015-02-01 Wintek Corp Capacitive touch panel
US10159146B2 (en) * 2012-01-18 2018-12-18 Kyocera Corporation Input apparatus, display apparatus, and electronic apparatus
JP5036913B1 (en) * 2012-02-29 2012-09-26 アルプス電気株式会社 Input device
WO2013136719A1 (en) * 2012-03-12 2013-09-19 凸版印刷株式会社 Touch panel sensor of electrostatic capacitance type and method for producing same, and display device
KR101477340B1 (en) * 2012-05-07 2014-12-30 주식회사 엘지화학 Transparent Conducting Polymer Electrodes Formed Using Inkjet Printing Process, Display Apparatus Comprising The Same and Manufacturing Method The Same
JP5901451B2 (en) * 2012-07-03 2016-04-13 富士フイルム株式会社 Transparent laminate, capacitance input device, and image display device
JP2014021581A (en) * 2012-07-13 2014-02-03 J Touch Corp Method for manufacturing touch sensor element of polarizer and polarization device
CN103576951B (en) * 2012-07-24 2016-12-28 宸鸿科技(厦门)有限公司 Contact panel, its manufacture method and display device thereof
CN103631426B (en) * 2012-08-26 2016-12-21 宸鸿科技(厦门)有限公司 Contact panel and manufacture method thereof
JP5270030B1 (en) * 2012-09-24 2013-08-21 日本写真印刷株式会社 Touch panel and method for manufacturing touch panel
TWI515778B (en) * 2012-12-20 2016-01-01 恆顥科技股份有限公司 Touch electrode device
TWM461098U (en) * 2012-12-28 2013-09-01 Hannstouch Solution Inc Touch panel
KR102056928B1 (en) * 2013-01-16 2019-12-18 삼성디스플레이 주식회사 Touch screen panel and method for manufacturing the same
CN103309539A (en) * 2013-06-20 2013-09-18 深圳南玻伟光导电膜有限公司 Capacitive touch screen provided with in OGS structure and fabrication method of capacitive touch screen
CN104461092B (en) * 2013-09-13 2019-12-13 宸鸿科技(厦门)有限公司 Touch panel and touch electrode structure thereof
KR102119818B1 (en) * 2013-09-24 2020-06-05 엘지이노텍 주식회사 Touch panel
KR102232774B1 (en) * 2013-12-27 2021-03-26 삼성디스플레이 주식회사 Touch panel and display device imcluding the same
DE102014100803B4 (en) * 2014-01-24 2022-03-31 Preh Gmbh Method for manufacturing an electrode arrangement for a touch-sensitive capacitive input device and electrode arrangement and input device
KR20150092384A (en) * 2014-02-03 2015-08-13 삼성디스플레이 주식회사 Display device and manufacturing method thereof
CN110045862B (en) * 2014-03-31 2023-05-23 宸盛光电有限公司 Capacitive touch device and manufacturing method thereof
KR102229018B1 (en) * 2014-06-02 2021-03-17 엘지이노텍 주식회사 Touch panel with resistive pattern for electrostatic discharge protection
KR102355326B1 (en) * 2014-07-24 2022-01-26 삼성디스플레이 주식회사 Touch screen panel and fabrication method of the same
JP6360748B2 (en) * 2014-08-25 2018-07-18 株式会社ジャパンディスプレイ Manufacturing method of liquid crystal display device
JP2016133937A (en) * 2015-01-16 2016-07-25 アルプス電気株式会社 Capacitance type sensor manufacturing method, capacitance type sensor, photosensitive conductive sheet, touch panel, and electronic apparatus
KR102313216B1 (en) * 2015-04-15 2021-10-18 삼성디스플레이 주식회사 Touch Screen Panel and Method for Manufacturing the Same
CN104932764B (en) * 2015-06-25 2017-12-08 京东方科技集团股份有限公司 A kind of capacitance type touch control screen and preparation method thereof, display device
KR102629580B1 (en) * 2016-01-08 2024-01-26 삼성디스플레이 주식회사 Flexible touch screen panel and method of manufacturing a flexible touch screen panel
US10268273B1 (en) * 2016-09-09 2019-04-23 Apple Inc. Stylus with multiple inputs
US10725544B1 (en) 2016-09-09 2020-07-28 Apple Inc. Pencil haptics
US10268288B1 (en) 2016-09-20 2019-04-23 Apple Inc. Stiffness rendering for a pencil
TWI677669B (en) 2016-09-20 2019-11-21 友達光電股份有限公司 Pressure sensing array and pressure sensing method
TWI622911B (en) * 2017-02-14 2018-05-01 宏碁股份有限公司 Touch apparatus
TWI748063B (en) * 2017-03-06 2021-12-01 南韓商東友精細化工有限公司 Electrode connecting structure, touch sensor and image display device
KR102349699B1 (en) * 2017-05-31 2022-01-10 엘지디스플레이 주식회사 Display device with integrated touch screen and method for fabricating the same
KR102424289B1 (en) * 2017-06-01 2022-07-25 엘지디스플레이 주식회사 Touch display device and panel
KR102329084B1 (en) * 2017-06-30 2021-11-18 엘지디스플레이 주식회사 Touch screen panel and display apparatus with integrated touch screen
CN107422932B (en) * 2017-08-01 2020-09-22 上海天马微电子有限公司 Display panel, mobile terminal and driving method thereof
CN107491222A (en) * 2017-09-01 2017-12-19 业成科技（成都）有限公司 Contact panel
KR102426269B1 (en) 2017-12-14 2022-07-27 엘지디스플레이 주식회사 Display device with integrated touch screen
CN110456943B (en) * 2019-08-13 2023-11-03 京东方科技集团股份有限公司 Touch substrate, manufacturing method thereof, touch display panel and touch display device
CN114442832A (en) * 2020-11-04 2022-05-06 宸美（厦门）光电有限公司 Touch panel and manufacturing method thereof
US11675448B2 (en) 2020-12-11 2023-06-13 Tpk Advanced Solutions Inc. Touch panel and method for forming the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1506724A (en) * 2002-12-10 2004-06-23 统宝光电股份有限公司 Planar display with touch panel
CN101324827A (en) * 2007-06-14 2008-12-17 爱普生映像元器件有限公司 Capacitive input device

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3426847B2 (en) * 1996-05-14 2003-07-14 アルプス電気株式会社 Coordinate input device
WO1997040482A1 (en) * 1996-04-24 1997-10-30 Logitech, Inc. Touch and pressure sensing method and apparatus
US7663607B2 (en) * 2004-05-06 2010-02-16 Apple Inc. Multipoint touchscreen
US20040188150A1 (en) * 2003-03-25 2004-09-30 3M Innovative Properties Company High transparency touch screen
US20050030048A1 (en) * 2003-08-05 2005-02-10 Bolender Robert J. Capacitive sensing device for use in a keypad assembly
JP2005190125A (en) * 2003-12-25 2005-07-14 Fujitsu Component Ltd Panel type input device
JP2006065021A (en) * 2004-08-27 2006-03-09 Seiko Epson Corp Method for manufacturing active matrix substrate, active matrix substrate, electro-optical device and electronic equipment
KR101374887B1 (en) * 2006-05-16 2014-03-13 삼성디스플레이 주식회사 Display panel
US8243027B2 (en) * 2006-06-09 2012-08-14 Apple Inc. Touch screen liquid crystal display
CN101553776B (en) * 2007-02-08 2011-11-23 夏普株式会社 Touch panel apparatus and method for manufacturing the same
JP2008262326A (en) * 2007-04-11 2008-10-30 Matsushita Electric Ind Co Ltd Touch panel
TW200842681A (en) * 2007-04-27 2008-11-01 Tpk Touch Solutions Inc Touch pattern structure of a capacitive touch panel
JP4720857B2 (en) * 2008-06-18 2011-07-13 ソニー株式会社 Capacitance type input device and display device with input function
JP2010049618A (en) * 2008-08-25 2010-03-04 Shin Etsu Polymer Co Ltd Capacitive sensor
JP5639473B2 (en) * 2008-09-12 2014-12-10 京セラディスプレイ株式会社 Capacitive touch panel and display device with capacitive touch panel function
JP2010079734A (en) * 2008-09-26 2010-04-08 Casio Computer Co Ltd Electrostatic capacitance type touch panel

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1506724A (en) * 2002-12-10 2004-06-23 统宝光电股份有限公司 Planar display with touch panel
CN101324827A (en) * 2007-06-14 2008-12-17 爱普生映像元器件有限公司 Capacitive input device

Cited By (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101950225B (en) * 2010-08-24 2012-07-25 深圳市中显微电子有限公司 Capacitance touch screen and production method thereof
CN101950225A (en) * 2010-08-24 2011-01-19 深圳市中显微电子有限公司 Capacitance touch screen and production method thereof
CN102385462A (en) * 2010-08-25 2012-03-21 乐金显示有限公司 Type touch screen panel
CN102447162B (en) * 2010-09-30 2014-08-27 汉王科技股份有限公司 Antenna board of electromagnetic-type touch pad and manufacturing process thereof
CN102447162A (en) * 2010-09-30 2012-05-09 汉王科技股份有限公司 Antenna board of electromagnetic-type touch pad and manufacturing process thereof
CN102467290A (en) * 2010-11-09 2012-05-23 宸鸿光电科技股份有限公司 Touch panel structure and manufacturing method thereof
US10048783B2 (en) 2010-11-09 2018-08-14 Tpk Touch Solutions Inc. Touch panel device
US9563315B2 (en) 2010-11-09 2017-02-07 Tpk Touch Solutions Inc. Capacitive touch panel and method for producing the same
CN103262012B (en) * 2010-12-09 2016-01-20 夏普株式会社 Touch panel and possess the display device of this touch panel and the manufacture method of touch panel
US9215800B2 (en) 2010-12-09 2015-12-15 Sharp Kabushiki Kaisha Touch panel, display device including the touch panel, and method of manufacturing the touch panel
CN103262012A (en) * 2010-12-09 2013-08-21 夏普株式会社 Touch panel, display device provided with same, and method for producing touch panel
CN105320388B (en) * 2010-12-09 2018-04-17 夏普株式会社 Touch panel and the display device for possessing the touch panel
CN105320388A (en) * 2010-12-09 2016-02-10 夏普株式会社 Touch panel and display device including touch panel
CN103443750B (en) * 2011-01-20 2017-02-15 日产化学工业株式会社 Coating composition for touch panels, coating film, and touch panel
CN102681734A (en) * 2011-03-07 2012-09-19 昆山维信诺显示技术有限公司 Capacitor touch screen and manufacturing method thereof
CN103403654A (en) * 2011-03-16 2013-11-20 京瓷株式会社 Input device, electronic apparatus, and portable terminal
CN102750025A (en) * 2011-04-22 2012-10-24 扬升照明股份有限公司 Manufacturing method of touch device
CN102819359A (en) * 2011-06-08 2012-12-12 比亚迪股份有限公司 Capacitive touch screen and touch device with same
TWI447481B (en) * 2011-06-09 2014-08-01 Shih Hua Technology Ltd Method for making touch panel
CN103034354A (en) * 2011-09-30 2013-04-10 瀚宇彩晶股份有限公司 Touch display device and forming method thereof
CN103034354B (en) * 2011-09-30 2016-03-30 瀚宇彩晶股份有限公司 Touch display device and forming method thereof
CN103207699B (en) * 2012-01-16 2016-04-27 Smk株式会社 The wire structures of touch panel and manufacture method thereof
CN103207699A (en) * 2012-01-16 2013-07-17 Smk株式会社 Wiring structure of touch panel and manufacturing method thereof
CN103218092B (en) * 2012-01-24 2017-05-17 株式会社日本显示器 Touch panel, display device, and electronic apparatus
CN103218092A (en) * 2012-01-24 2013-07-24 株式会社日本显示器西 Touch panel, display device, and electronic apparatus
CN104205030A (en) * 2012-03-28 2014-12-10 日本写真印刷株式会社 Touch sensor and manufacturing method for same, as well as transfer ribbon for touch sensor manufacturing
CN104205030B (en) * 2012-03-28 2016-03-30 日本写真印刷株式会社 Touch sensor and manufacture method thereof and touch sensor manufacture transfer printing ribbon
CN106125999A (en) * 2012-04-19 2016-11-16 三星显示有限公司 Display device
US9239654B2 (en) 2012-04-19 2016-01-19 Samsung Display Co., Ltd. Touch screen panel
US11182033B2 (en) 2012-04-19 2021-11-23 Samsung Display Co., Ltd. Display device
US10551983B2 (en) 2012-04-19 2020-02-04 Samsung Display Co., Ltd. Display device
CN106125999B (en) * 2012-04-19 2019-10-25 三星显示有限公司 Display device
CN103376938A (en) * 2012-04-19 2013-10-30 三星显示有限公司 Touch screen panel
US9952729B2 (en) 2012-04-19 2018-04-24 Samsung Display Co., Ltd. Display device
TWI621974B (en) * 2012-05-31 2018-04-21 Ｌｇ伊諾特股份有限公司 Touch panel
CN103455197A (en) * 2012-05-31 2013-12-18 Lg伊诺特有限公司 Touch panel
CN103092452B (en) * 2013-01-28 2016-03-23 北京京东方光电科技有限公司 Capacitance touch screen and preparation method thereof and touch display unit
CN103092452A (en) * 2013-01-28 2013-05-08 北京京东方光电科技有限公司 Capacitive touch screen and manufacturing method thereof and touch display screen
CN104142747A (en) * 2013-05-10 2014-11-12 柏腾科技股份有限公司 Sputtering type touch panel bridging structure and manufacturing method thereof
CN105408841B (en) * 2013-07-11 2018-06-05 积水保力马科技株式会社 touch sensor
CN105408841A (en) * 2013-07-11 2016-03-16 保力马科技(日本)株式会社 Touch sensor
CN104375689A (en) * 2013-08-16 2015-02-25 胜华科技股份有限公司 touch control display device
US9448672B2 (en) 2013-12-20 2016-09-20 Industrial Technology Research Institute Touch panel structure and fabrication method for the same
CN104820510B (en) * 2014-02-05 2019-05-10 三星显示有限公司 Touch screen panel and its manufacturing method
CN104820510A (en) * 2014-02-05 2015-08-05 三星显示有限公司 Touch screen panel and manufacturing method thereof
CN106415453A (en) * 2014-06-02 2017-02-15 凸版印刷株式会社 Touch sensor electrode, touch panel, and display device
CN106415453B (en) * 2014-06-02 2019-11-19 Vts-触动感应器有限公司 Touch sensor electrode, touch panel and display device
CN106908973A (en) * 2015-11-30 2017-06-30 株式会社日本显示器 The display device and sensor device of belt sensor
CN113271837A (en) * 2019-02-19 2021-08-17 奥林巴斯株式会社 Endoscope distal end structure and endoscope

Also Published As

Publication number Publication date
JP2010160670A (en) 2010-07-22
US20100171718A1 (en) 2010-07-08

Similar Documents

Publication Publication Date Title
CN101776967A (en) Method for manufacturing touch panel, touch panel, display device, and electronic apparatus
CN102402323B (en) Flat panel display with integrated touch screen panel
US8994669B2 (en) Display with in-cell touch sensor
CN102405457B (en) Touch actuated sensor configuration integrated with an OLED structure
CN108549506B (en) Display device
US9207819B2 (en) Touch sensing display panel and touch sensing liquid crystal display panel
KR101743385B1 (en) Touch screen stack-ups
US8692948B2 (en) Electric field shielding for in-cell touch type thin-film-transistor liquid crystal displays
US8717333B2 (en) Electrostatic capacity type touch panel, display device and process for producing electrostatic capacity type touch panel
CN103513842B (en) Touch panel
KR101564332B1 (en) Touch screen panel integrated with liquid crystal display method of manufacturing the same and method of touch sensing
CN102736780B (en) Input device
CN102023746B (en) Conductive film stacked member, electro-optical device, and electronic apparatus
US20150110953A1 (en) Touch panel, method for manufacturing the same, and liquid crystal display device including the touch panel
US20100253646A1 (en) Position input device
JP2009259063A (en) Touch panel and its production method
CN108572757B (en) Touch panel, manufacturing method thereof and touch display device
CN102096532A (en) Electrostatic capacitance-type input device and method of manufacturing thereof
US20140340597A1 (en) Electronic component and electronic device using the same
JP2010231288A (en) Touch panel, method for manufacturing the same, display device, and electronic equipment
JP2011039759A (en) Touch panel device, method for manufacturing the same, display, and electronic equipment
JP2011039758A (en) Touch panel device, display, and electronic equipment
JP2010231287A (en) Touch panel, method for manufacturing the same, method for manufacturing display device, and method for manufacturing electronic equipment
JP2013003915A (en) Projected capacitive touch panel sensor, manufacturing method of the same and display device having projected capacitive touch panel sensor
CN106354320B (en) Touch screen, preparation method thereof and touch display device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20100714