CN101730924B - 用于硅基电路的干燥设备及方法 - Google Patents
用于硅基电路的干燥设备及方法 Download PDFInfo
- Publication number
- CN101730924B CN101730924B CN2007800536981A CN200780053698A CN101730924B CN 101730924 B CN101730924 B CN 101730924B CN 2007800536981 A CN2007800536981 A CN 2007800536981A CN 200780053698 A CN200780053698 A CN 200780053698A CN 101730924 B CN101730924 B CN 101730924B
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- China
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- container
- drying
- wafer
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- hothouse
- Prior art date
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Links
- 238000001035 drying Methods 0.000 title claims abstract description 86
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 239000010703 silicon Substances 0.000 title claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims description 16
- 235000012431 wafers Nutrition 0.000 claims description 40
- 230000032258 transport Effects 0.000 claims description 21
- 239000013078 crystal Substances 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 3
- 230000002596 correlated effect Effects 0.000 abstract 1
- 238000012546 transfer Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
- F26B15/14—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of materials being carried by trays or racks or receptacles, which may be connected to endless chains or belts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IT2007/000454 WO2009001379A1 (en) | 2007-06-26 | 2007-06-26 | Drying apparatus and method for silicon-based electronic circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101730924A CN101730924A (zh) | 2010-06-09 |
CN101730924B true CN101730924B (zh) | 2013-02-13 |
Family
ID=38670001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800536981A Active CN101730924B (zh) | 2007-06-26 | 2007-06-26 | 用于硅基电路的干燥设备及方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100307022A1 (zh) |
EP (1) | EP2162900A1 (zh) |
JP (1) | JP5043185B2 (zh) |
KR (1) | KR101379811B1 (zh) |
CN (1) | CN101730924B (zh) |
TW (1) | TW200921755A (zh) |
WO (1) | WO2009001379A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101826576B (zh) * | 2010-04-12 | 2012-07-25 | 中国电子科技集团公司第四十五研究所 | 一种用于太阳能电池片自动烘干链条式传动*** |
CN105043056B (zh) * | 2012-07-12 | 2017-10-31 | 艾博生物医药(杭州)有限公司 | 一种自动化快速烘干样品接收垫的方法 |
CN108582803B (zh) * | 2018-04-02 | 2020-06-19 | 武汉中科鑫海科技有限公司 | 一种动车组轴箱弹簧防雪罩的油电烤箱*** |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1253707A (zh) * | 1997-04-24 | 2000-05-17 | 希巴特殊化学控股公司 | 用于处理板形材料、尤其是印刷电路板的方法和设备 |
EP1041866B1 (en) * | 1999-04-02 | 2003-05-21 | Gisulfo Baccini | Device to produce electronic circuits |
CN1442661A (zh) * | 2002-03-05 | 2003-09-17 | 株式会社萌力克 | 烘干装置 |
CN1525535A (zh) * | 2003-02-26 | 2004-09-01 | 中芯国际集成电路制造(上海)有限公 | 晶片干燥方法和装置 |
EP1041865B1 (en) * | 1999-04-02 | 2005-05-18 | Gisulfo Baccini | Device to produce multi-layer electronic circuits |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0586772B1 (de) | 1992-09-09 | 1996-01-10 | Ciba-Geigy Ag | Vorrichtung zur Beschichtung von plattenförmigem Gut, insbesondere von Leiterplatten |
JPS60154531A (ja) * | 1984-01-24 | 1985-08-14 | Nec Corp | 半導体基板の乾燥方法 |
JPH02226790A (ja) * | 1989-02-28 | 1990-09-10 | Matsushita Electric Ind Co Ltd | 基板の乾燥装置 |
EP0441743A1 (de) * | 1990-02-05 | 1991-08-14 | Ciba-Geigy Ag | Transportvorrichtung für Platten mit empfindlicher Oberfläche, insbesondere für nassbeschichtete Leiterplatten |
IT1252949B (it) * | 1991-09-30 | 1995-07-06 | Gisulfo Baccini | Procedimento per la lavorazione di circuiti tipo green-tape e dispositivo adottante tale procedimento |
IT1259732B (it) * | 1992-07-07 | 1996-03-26 | Gisulfo Baccini | Dispositivo di prelievo, sovrapposizione e bloccaggio di fogli per circuiti green-tape |
US5379784A (en) * | 1993-01-23 | 1995-01-10 | Tokyo Electron Limited | Apparatus for cleaning conveyor chuck |
JP2604561B2 (ja) * | 1994-12-26 | 1997-04-30 | 山形日本電気株式会社 | ウェーハ乾燥装置 |
KR980012044A (ko) * | 1996-03-01 | 1998-04-30 | 히가시 데츠로 | 기판건조장치 및 기판건조방법 |
TW402758B (en) * | 1996-05-20 | 2000-08-21 | Tokyo Electorn Limtied | Spin dryer and method of drying substrates |
US6164297A (en) * | 1997-06-13 | 2000-12-26 | Tokyo Electron Limited | Cleaning and drying apparatus for objects to be processed |
JP3151613B2 (ja) * | 1997-06-17 | 2001-04-03 | 東京エレクトロン株式会社 | 洗浄・乾燥処理方法及びその装置 |
KR100505061B1 (ko) * | 2003-02-12 | 2005-08-01 | 삼성전자주식회사 | 기판 이송 모듈 |
KR100696379B1 (ko) * | 2005-04-26 | 2007-03-19 | 삼성전자주식회사 | 세정 장치 및 이를 이용한 세정 방법 |
JP5140641B2 (ja) * | 2009-06-29 | 2013-02-06 | 株式会社荏原製作所 | 基板処理方法及び基板処理装置 |
US8756826B2 (en) * | 2010-11-30 | 2014-06-24 | Mei, Llc | Liquid coalescence and vacuum dryer system and method |
WO2012082198A1 (en) * | 2010-12-13 | 2012-06-21 | Tp Solar, Inc. | Dopant applicator system and method of applying vaporized doping compositions to pv solar wafers |
-
2007
- 2007-06-26 CN CN2007800536981A patent/CN101730924B/zh active Active
- 2007-06-26 JP JP2010514257A patent/JP5043185B2/ja not_active Expired - Fee Related
- 2007-06-26 EP EP07805666A patent/EP2162900A1/en not_active Withdrawn
- 2007-06-26 US US12/666,525 patent/US20100307022A1/en not_active Abandoned
- 2007-06-26 KR KR1020107001789A patent/KR101379811B1/ko not_active IP Right Cessation
- 2007-06-26 WO PCT/IT2007/000454 patent/WO2009001379A1/en active Application Filing
-
2008
- 2008-06-25 TW TW097123689A patent/TW200921755A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1253707A (zh) * | 1997-04-24 | 2000-05-17 | 希巴特殊化学控股公司 | 用于处理板形材料、尤其是印刷电路板的方法和设备 |
EP1041866B1 (en) * | 1999-04-02 | 2003-05-21 | Gisulfo Baccini | Device to produce electronic circuits |
EP1041865B1 (en) * | 1999-04-02 | 2005-05-18 | Gisulfo Baccini | Device to produce multi-layer electronic circuits |
CN1442661A (zh) * | 2002-03-05 | 2003-09-17 | 株式会社萌力克 | 烘干装置 |
CN1525535A (zh) * | 2003-02-26 | 2004-09-01 | 中芯国际集成电路制造(上海)有限公 | 晶片干燥方法和装置 |
Non-Patent Citations (1)
Title |
---|
JP平2-226790A 1990.09.10 |
Also Published As
Publication number | Publication date |
---|---|
KR101379811B1 (ko) | 2014-05-07 |
KR20100049565A (ko) | 2010-05-12 |
WO2009001379A1 (en) | 2008-12-31 |
US20100307022A1 (en) | 2010-12-09 |
TW200921755A (en) | 2009-05-16 |
JP2010536001A (ja) | 2010-11-25 |
CN101730924A (zh) | 2010-06-09 |
EP2162900A1 (en) | 2010-03-17 |
JP5043185B2 (ja) | 2012-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211026 Address after: California, USA Patentee after: APPLIED MATERIALS, Inc. Address before: Amsterdam, The Netherlands Patentee before: AFCO C.V. Effective date of registration: 20211026 Address after: 8 Changi North Road, Singapore Patentee after: Applied materials Southeast Asia Pte. Ltd. Address before: California, USA Patentee before: APPLIED MATERIALS, Inc. |