CN101718235A - Synthetic jet actuator with double films, single chamber and single spout - Google Patents

Synthetic jet actuator with double films, single chamber and single spout Download PDF

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Publication number
CN101718235A
CN101718235A CN200910219055A CN200910219055A CN101718235A CN 101718235 A CN101718235 A CN 101718235A CN 200910219055 A CN200910219055 A CN 200910219055A CN 200910219055 A CN200910219055 A CN 200910219055A CN 101718235 A CN101718235 A CN 101718235A
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copper foil
film
diameter
box body
vibration
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CN200910219055A
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郝礼书
乔志德
韩忠华
宋文萍
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Northwestern Polytechnical University
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Northwestern Polytechnical University
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Abstract

The invention relates to a synthetic jet actuator with double films, a single chamber and a single spout. An installing surface (4) of a vibration film (6) is arranged on the surface of an inner hole at one end of a film bracket (2); the arched vibration film (6) formed by a PZT ceramic sheet (9) and an arched copper foil sheet (8) is fixed on the installing surface (4); the film brackets (2) are respectively fixed at both ends of a box body (3); the ratio of the diameter of the PZT ceramic sheet (9) to the diameter of the copper foil sheet (8) is 0.4-0.8; the ratio of the diameter of a trapezoid lower bottom of the copper foil sheet (8) to the diameter of the copper foil sheet is 0.3-0.7; the ratio of a trapezoid upper bottom of the copper foil sheet (8) to the diameter of the trapezoid lower bottom of the copper foil sheet is 0.4-0.95; and the trapezoid angle is 22 degrees-56 degrees. The invention can obtain higher amount of distortion, improves the energy conversion capacity, enables the spout to generate larger kinetic energy, and has good application prospects in the aspects of improving the lifting force of airfoils, improving the stalling characteristics of airfoils and enhancing mixing.

Description

Synthetic jet actuator with double films, single chamber and single spout
Technical field
The present invention relates to aerospace field, is a kind of synthetic jet actuator with double films, single chamber and single spout.
Background technique
The synthesizing jet-flow technology is a kind of novel flow control technique that comes across the nineties in 20th century.Can postpone separation effectively, delay stall by the synthesizing jet-flow technology, increase substantially lift, reduction resistance, improve the purpose of flight performance thereby reach; Can realize the control of thrust vectoring; Can strengthen the steering force that mixes and improve minute vehicle; Also can realize control and the control of lifting airscrew dynamic stall to the precursor whirlpool, through the development over past ten years, become the focus of each state aviation space industry research, and very likely developed into the important breakthrough technology in the active Flow Control field.
The synthesizing jet-flow technology realizes a significant challenge of FLOW CONTROL is exactly how to develop higher, the more reliable FLOW CONTROL actuator of efficient.Synthetic jet actuator partly is made up of cavity, diaphragm, spout etc. usually, comes down to a kind of actuator of monofilm single chamber and single spout, and wherein vibration film is plate.When diaphragm moves downward, surrounding fluid is inhaled into cavity by spout.When diaphragm moves upward, fluid sprays from spout, and has formed a shear layer between jet flow and surrounding fluid, and shear layer is rolled and formed vortex to (being collar vortex during circular spout).Then, again surrounding fluid is dragged when making the return trip empty the chamber when diaphragm spout motion dorsad, this moment vortex under the induced velocity effect of self away from spout, almost no longer influenced.So when the film periodic vibration, can form a series of vortex, vortex is constantly toward the downstream migration.In the process of migration, vortex energy constantly dissipates, and its coherent structure constantly fades away, and develops into turbulent flow at random at last, combines together with on every side environment liquid.The film of cyclical movement causes the spout place constantly to produce vortex, vortex continuously with Momentum Transport to away from the flow field of spout and repeat whole evolutionary process, after leaving the spout certain distance, form the flow pattern that is similar to steady jet.
Synthetic jet actuator is a kind of small-sized or minisize fluid control means, as the action component that produces synthesizing jet-flow, is a key problem of synthesizing jet-flow technical development.Vibration film is the core component of actuator, and it is converted into kinetic energy to the electric energy of being imported or other form energy, produces synthesizing jet-flow by the excitation source excitation.Difference according to the excitation source form can roughly be divided into following a few class: piezoelectricity type excitation, electromagnetic type excitation, acoustic excitation, piston excitation, marmem metallic film oscillatory type, PVDF membrane oscillatory type etc.Result of study shows at present: characteristics such as the energy of providing is big, wide, the easy miniaturization of working frequency range, lightweight construction are provided piezoelectric excitation formula actuator, are a kind of actuators of studying at most at present, having application prospect most.Existing piezoelectricity type synthetic jet actuator mostly adopts monofilm single jet form, and vibration film adopts plate usually, its plane shape presents circle, direction of vibration is concentric with spout, the actuator both sides are the real walls of cylinder type cavity, cavity bottom is arranged vibration film, and its cross-section structure as shown in Figure 1.The conversion of the vibration realizing electric energy by film obtains higher kinetic energy at the spout place.
Summary of the invention
For overcoming the low deficiency of Conversion of energy ability that exists in the prior art, the present invention proposes a kind of synthetic jet actuator with double films, single chamber and single spout.
The present invention includes two film frames, two arc vibration films, box body and two pairs of electrode cables, and the outer rim of two arc vibration films is adhesively fixed on respectively on the attachment face of film frame endoporus one end.Two film frames that are fixed with arc vibration film lay respectively at the two ends of box body, and fixedly connected with box body.
Arc vibration film comprises PZT ceramic plate and arc copper foil, and ceramic plate and copper foil bond together, and the go to the bottom end face of excircle of ring copper foil bonds together by conductive adhesive and PZT ceramic plate, has formed the longitudinal section and has been arc vibration film; Formed trapezoidal film cavity between the upper surface of the inner arcuate surfaces of copper foil and PZT ceramic plate.The ratio of piezoelectric ceramic diameter and copper foil diameter is 0.4~0.8, and the trapezoidal ratio of going to the bottom diameter and copper foil diameter of copper foil is 0.3~0.7, and the ratio of the trapezoidal diameter of going to the bottom of the diameter of the trapezoidal upper base of copper foil and copper foil is 0.4~0.95; Trapezoidal angle is 22 °~56 °.
The diameter of film frame endoporus is with the external diameter of vibration film; Film frame one end bore area has the attachment face of arc vibration film.
The internal diameter of box body is with the maximum diameter of film frame one end endoporus.On the circumference of box body housing, the square or circular spout perpendicular to the box body center line arranged on the axial symmetrical line of box body.
Among the present invention, respectively two arc vibration films are loaded ac signal by two pairs of electrode cables, realize the film horizontal vibration, and make two arc vibration films opposite at the synchronization direction of vibration, vertical mutually between vibration film direction of vibration and the spout center line, then can there be the air-flow after electric energy is converted to kinetic energy to spray at the spout place.
Because the technical solution used in the present invention, make to be ladder cavity between piezoelectric constant and the copper foil, and the contact segment of the two does not produce and relatively moves.The compound body that Cymbal type piezoelectric constant and copper foil are formed has direct piezoelectric effect, and this compound body is not only at d 33Vibration longitudinally takes place down in effect, but also at d 31Horizontal stretching and contraction take place down in effect, thereby indirect reaction has increased vibratory output longitudinally to vibration longitudinally, has promptly fully utilized d 33And d 31, make Cymbal type piezoelectric constant and copper foil compound body obtain higher effective d 33Value is than flat structure vibration film (d only 33Play a role) can obtain higher amount of deformation, improve the ability of its Conversion of energy, make the spout produce bigger kinetic energy, promptly improved actuator is converted into spout kinetic energy by electric energy ability.The present invention is used to improve the lift of aerofoil profile, improves the stalling characteristics of aerofoil profile, and all has a good application prospect at aspects such as strengthening mixing.
Description of drawings
Accompanying drawing 1 is a synthetic jet actuator structural representation in the prior art;
Accompanying drawing 2 is synthetic jet actuator with double films, single chamber and single spout structural representations;
Accompanying drawing 3 is arc vibration film structural profile schematic representation;
Accompanying drawing 4 is arc vibration film plan views;
Accompanying drawing 5 is film frame structure plan views;
Accompanying drawing 6 is film frame structural profile schematic representation;
Accompanying drawing 7 is cavity lid structure plan views;
Accompanying drawing 8 is cavity lid structural profile schematic representation.Wherein:
1. plate vibration film 2. film frames 3. box bodys 4. attachment faces 5. spouts
6. arc vibration film 7. film cavitys 8. copper foil 9.PZT ceramic plates
Embodiment
Embodiment one
Present embodiment comprises two film frames 2, two arc vibration films 6, box body 3 and two pairs of electrode cables, and the outer rim of two arc vibration films 6 is adhesively fixed on respectively on the attachment face 4 of film frame 2 endoporus one end.Two film frames 2 that are fixed with arc vibration film 6 lay respectively at the two ends of box body 3, and fixedly connected with box body.
Arc vibration film 6 comprises PZT ceramic plate 9 and copper foil 8.PZT ceramic plate 9 is a thin rounded flakes, and its external diameter is less than the internal diameter of film frame 2.Copper foil 8 is circular, and its external diameter is with appear on the stage arc vibration film 6 attachment faces of scalariform of support 2 endoporus; The bucking ladder of the center of copper foil for protruding.The go to the bottom end face of excircle of ring copper foil 8 bonds together by conductive adhesive and PZT ceramic plate 9, has formed the longitudinal section and has been arc vibration film; Formed trapezoidal film cavity 7 between the upper surface of the inner arcuate surfaces of copper foil 8 and PZT ceramic plate 9.The ratio of piezoelectric ceramic diameter and copper foil diameter is 0.8, and copper foil 8 trapezoidal ratios of going to the bottom diameter and copper foil diameter are 0.7, and the ratio of the diameter of copper foil 8 trapezoidal upper bases and the trapezoidal diameter of going to the bottom of copper foil is 0.95; Trapezoidal angle is 22 °.Be welded with an electrode cable respectively at the circle centre position of the PZT of two arc vibration films ceramic plate 9 and the outer rim place of copper foil 8, the other end of electrode cable is connected with exciting bank.
The circular shell rod member of film frame 2 for making with epoxy resin board.The diameter of film frame 2 endoporus is with the external diameter of vibration film 1; The endoporus of film frame 2 one ends is a step hole, and the interior step surface of step hole has formed the attachment face 4 of arc vibration film; The outer rim of arc vibration film 6 is adhesively fixed on the attachment face 4.One end end face of ring film frame 2 is evenly distributed with attachment hole.
Box body 3 is a circular cylinder body, and its internal diameter is with the maximum diameter of film frame 2 one end endoporus.The height of box body 3 must be higher than the amplitude of arc vibration film 6.On the circumference of box body 3 housings, the square spout 5 perpendicular to box body 3 center lines arranged on the box body 3 axial symmetrical line.
During use, box body horizontal positioned in the present embodiment, respectively two arc vibration films are loaded ac signal by two pairs of electrode cables, realize the film horizontal vibration, and make two arc vibration films opposite at the synchronization direction of vibration, vertical mutually between vibration film direction of vibration and the spout center line, then can there be the air-flow after electric energy is converted to kinetic energy to spray at the spout place.
Embodiment two
Present embodiment comprises two film frames 2, two arc vibration films 6, box body 3 and two pairs of electrode cables, and the outer rim of two arc vibration films 6 is adhesively fixed on respectively on the attachment face 4 of film frame 2 endoporus one end.Two film frames 2 that are fixed with arc vibration film 6 lay respectively at the two ends of box body 3, and fixedly connected with box body.
Arc vibration film 6 comprises PZT ceramic plate 9 and copper foil 8.PZT ceramic plate 9 is a thin rounded flakes, and its external diameter is less than the internal diameter of film frame 2.Copper foil 8 is circular, and its external diameter is with appear on the stage arc vibration film 6 attachment faces of scalariform of support 2 endoporus; The bucking ladder of the center of copper foil for protruding.The go to the bottom end face of excircle of ring copper foil 8 bonds together by conductive adhesive and PZT ceramic plate 9, has formed the longitudinal section and has been arc vibration film; Formed trapezoidal film cavity 7 between the upper surface of the inner arcuate surfaces of copper foil 8 and PZT ceramic plate 9.The ratio of piezoelectric ceramic diameter and copper foil diameter is 0.4, and copper foil 8 trapezoidal ratios of going to the bottom diameter and copper foil diameter are 0.3, and the ratio of the diameter of copper foil 8 trapezoidal upper bases and the trapezoidal diameter of going to the bottom of copper foil is 0.4; Trapezoidal angle is 56 °.Be welded with an electrode cable respectively at the circle centre position of the PZT of two arc vibration films ceramic plate 9 and the outer rim place of copper foil 8, the other end of electrode cable is connected with exciting bank.
The circular shell rod member of film frame 2 for making with epoxy resin board.The diameter of film frame 2 endoporus is with the external diameter of vibration film 1; The endoporus of film frame 2 one ends is a step hole, and the interior step surface of step hole has formed the attachment face 4 of arc vibration film; The outer rim of arc vibration film 6 is adhesively fixed on the attachment face 4.One end end face of ring film frame 2 is evenly distributed with attachment hole.
Box body 3 is a circular cylinder body, and its internal diameter is with the maximum diameter of film frame 2 one end endoporus.The height of box body 3 must be higher than the amplitude of arc vibration film 6.On the circumference of box body 3 housings, the circular spout 5 perpendicular to box body 3 center lines arranged on the box body 3 axial symmetrical line.
During use, box body horizontal positioned in the present embodiment, respectively two arc vibration films are loaded ac signal by two pairs of electrode cables, realize the film horizontal vibration, and make two arc vibration films opposite at the synchronization direction of vibration, vertical mutually between vibration film direction of vibration and the spout center line, then can there be the air-flow after electric energy is converted to kinetic energy to spray at the spout place.
Embodiment three
Present embodiment comprises two film frames 2, two arc vibration films 6, box body 3 and two pairs of electrode cables, and the outer rim of two arc vibration films 6 is adhesively fixed on respectively on the attachment face 4 of film frame 2 endoporus one end.Two film frames 2 that are fixed with arc vibration film 6 lay respectively at the two ends of box body 3, and fixedly connected with box body.
Arc vibration film 6 comprises PZT ceramic plate 9 and copper foil 8.PZT ceramic plate 9 is a thin rounded flakes, and its external diameter is less than the internal diameter of film frame 2.Copper foil 8 is circular, and its external diameter is with appear on the stage arc vibration film 6 attachment faces of scalariform of support 2 endoporus; The bucking ladder of the center of copper foil for protruding.The go to the bottom end face of excircle of ring copper foil 8 bonds together by conductive adhesive and PZT ceramic plate 9, has formed the longitudinal section and has been arc vibration film; Formed trapezoidal film cavity 7 between the upper surface of the inner arcuate surfaces of copper foil 8 and PZT ceramic plate 9.The ratio of piezoelectric ceramic diameter and copper foil diameter is 0.6, and copper foil 8 trapezoidal ratios of going to the bottom diameter and copper foil diameter are 05, and the ratio of the diameter of copper foil 8 trapezoidal upper bases and the trapezoidal diameter of going to the bottom of copper foil is 0.8; Trapezoidal angle is 30 °.Be welded with an electrode cable respectively at the circle centre position of the PZT of two arc vibration films ceramic plate 9 and the outer rim place of copper foil 8, the other end of electrode cable is connected with exciting bank.
The circular shell rod member of film frame 2 for making with epoxy resin board.The diameter of film frame 2 endoporus is with the external diameter of vibration film 1; The endoporus of film frame 2 one ends is a step hole, and the interior step surface of step hole has formed the attachment face 4 of arc vibration film; The outer rim of arc vibration film 6 is adhesively fixed on the attachment face 4.One end end face of ring film frame 2 is evenly distributed with attachment hole.
Box body 3 is a circular cylinder body, and its internal diameter is with the maximum diameter of film frame 2 one end endoporus.The height of box body 3 must be higher than the amplitude of arc vibration film 6.On the circumference of box body 3 housings, the square spout 5 perpendicular to box body 3 center lines arranged on the box body 3 axial symmetrical line.
During use, box body horizontal positioned in the present embodiment, respectively two arc vibration films are loaded ac signal by two pairs of electrode cables, realize the film horizontal vibration, and make two arc vibration films opposite at the synchronization direction of vibration, vertical mutually between vibration film direction of vibration and the spout center line, then can there be the air-flow after electric energy is converted to kinetic energy to spray at the spout place.
Embodiment four
Present embodiment comprises two film frames 2, two arc vibration films 6, box body 3 and two pairs of electrode cables, and the outer rim of two arc vibration films 6 is adhesively fixed on respectively on the attachment face 4 of film frame 2 endoporus one end.Two film frames 2 that are fixed with arc vibration film 6 lay respectively at the two ends of box body 3, and fixedly connected with box body.
Arc vibration film 6 comprises PZT ceramic plate 9 and copper foil 8.PZT ceramic plate 9 is a thin rounded flakes, and its external diameter is less than the internal diameter of film frame 2.Copper foil 8 is circular, and its external diameter is with appear on the stage arc vibration film 6 attachment faces of scalariform of support 2 endoporus; The bucking ladder of the center of copper foil for protruding.The go to the bottom end face of excircle of ring copper foil 8 bonds together by conductive adhesive and PZT ceramic plate 9, has formed the longitudinal section and has been arc vibration film; Formed trapezoidal film cavity 7 between the upper surface of the inner arcuate surfaces of copper foil 8 and PZT ceramic plate 9.The ratio of piezoelectric ceramic diameter and copper foil diameter is 0.6, and copper foil 8 trapezoidal ratios of going to the bottom diameter and copper foil diameter are 0.5, and the ratio of the diameter of copper foil 8 trapezoidal upper bases and the trapezoidal diameter of going to the bottom of copper foil is 0.6; Trapezoidal angle is 40 °.Be welded with an electrode cable respectively at the circle centre position of the PZT of two arc vibration films ceramic plate 9 and the outer rim place of copper foil 8, the other end of electrode cable is connected with exciting bank.
The circular shell rod member of film frame 2 for making with epoxy resin board.The diameter of film frame 2 endoporus is with the external diameter of vibration film 1; The endoporus of film frame 2 one ends is a step hole, and the interior step surface of step hole has formed the attachment face 4 of arc vibration film; The outer rim of arc vibration film 6 is adhesively fixed on the attachment face 4.One end end face of ring film frame 2 is evenly distributed with attachment hole.
Box body 3 is a circular cylinder body, and its internal diameter is with the maximum diameter of film frame 2 one end endoporus.The height of box body 3 must be higher than the amplitude of arc vibration film 6.On the circumference of box body 3 housings, the circular spout 5 perpendicular to box body 3 center lines arranged on the box body 3 axial symmetrical line.
During use, box body horizontal positioned in the present embodiment, respectively two arc vibration films are loaded ac signal by two pairs of electrode cables, realize the film horizontal vibration, and make two arc vibration films opposite at the synchronization direction of vibration, vertical mutually between vibration film direction of vibration and the spout center line, then can there be the air-flow after electric energy is converted to kinetic energy to spray at the spout place.

Claims (2)

1. synthetic jet actuator with double films, single chamber and single spout, the vibration film, box body and the electrode cable that comprise film frame, form by PZT ceramic plate (9) and arc copper foil (8), and the outer rim of two vibration films is fixed on the film frame, be connected between the housing of box body and film frame, it is characterized in that, the section of forming the copper foil (8) of vibration film (6) is arc, has formed arc vibration film (6); At film frame (2) one end bore areas the attachment face (4) of vibration film (6) is arranged, vibration film (6) is fixed on this attachment face (4); Two film frames (2) that are fixed with arc vibration film (6) lay respectively at the two ends of box body (3); On the circumference of box body (3), box body (3) axially has the spout (5) perpendicular to box body (3) center line on the symmetrical line.
2. a kind of according to claim 1 synthetic jet actuator with double films, single chamber and single spout, it is characterized in that, the ratio of the diameter of PZT ceramic plate (9) and copper foil (8) diameter is 0.4~0.8, the trapezoidal ratio of going to the bottom diameter and copper foil diameter of copper foil (8) is 0.3~0.7, and the diameter of the trapezoidal upper base of copper foil (8) and the ratio of the trapezoidal diameter of going to the bottom of copper foil are 0.4~0.95; Trapezoidal angle is 22 °~56 °.
CN200910219055A 2009-11-19 2009-11-19 Synthetic jet actuator with double films, single chamber and single spout Pending CN101718235A (en)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102594202A (en) * 2012-03-12 2012-07-18 清华大学 Piezoelectric power generation device based on excitation of fluidic micro oscillator
CN106230313A (en) * 2016-09-14 2016-12-14 长春工业大学 The torsional mode piezoelectric generating device of the dijection head piece jet excitation of Internet of things node energy supply
CN107364583A (en) * 2017-07-05 2017-11-21 方剑 Miniature jet aircraft based on synthesizing jet-flow technology
CN110439781A (en) * 2018-05-03 2019-11-12 复盛精密工业股份有限公司 The hardened structure of storage gas with sunk type
CN113371178A (en) * 2021-07-13 2021-09-10 上海交通大学 Normal flow thrust vectoring nozzle control device based on oscillating jet flow and aircraft
CN113841018A (en) * 2019-12-06 2021-12-24 福珞尔***公司 Center anchored MEMS-based active cooling system
US11456234B2 (en) 2018-08-10 2022-09-27 Frore Systems Inc. Chamber architecture for cooling devices
US11503742B2 (en) 2019-12-06 2022-11-15 Frore Systems Inc. Engineered actuators usable in MEMS active cooling devices
US11765863B2 (en) 2020-10-02 2023-09-19 Frore Systems Inc. Active heat sink
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US11802554B2 (en) 2019-10-30 2023-10-31 Frore Systems Inc. MEMS-based airflow system having a vibrating fan element arrangement

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102594202A (en) * 2012-03-12 2012-07-18 清华大学 Piezoelectric power generation device based on excitation of fluidic micro oscillator
CN102594202B (en) * 2012-03-12 2014-11-26 清华大学 Piezoelectric power generation device based on excitation of fluidic micro oscillator
CN106230313A (en) * 2016-09-14 2016-12-14 长春工业大学 The torsional mode piezoelectric generating device of the dijection head piece jet excitation of Internet of things node energy supply
CN106230313B (en) * 2016-09-14 2018-01-02 长春工业大学 The torsional mode piezoelectric generating device of the dijection head piece jet excitation of Internet of things node energy supply
CN107364583A (en) * 2017-07-05 2017-11-21 方剑 Miniature jet aircraft based on synthesizing jet-flow technology
CN110439781A (en) * 2018-05-03 2019-11-12 复盛精密工业股份有限公司 The hardened structure of storage gas with sunk type
US11705382B2 (en) 2018-08-10 2023-07-18 Frore Systems Inc. Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices
US11710678B2 (en) 2018-08-10 2023-07-25 Frore Systems Inc. Combined architecture for cooling devices
US11830789B2 (en) 2018-08-10 2023-11-28 Frore Systems Inc. Mobile phone and other compute device cooling architecture
US11456234B2 (en) 2018-08-10 2022-09-27 Frore Systems Inc. Chamber architecture for cooling devices
US11784109B2 (en) 2018-08-10 2023-10-10 Frore Systems Inc. Method and system for driving piezoelectric MEMS-based active cooling devices
US11735496B2 (en) 2018-08-10 2023-08-22 Frore Systems Inc. Piezoelectric MEMS-based active cooling for heat dissipation in compute devices
US11532536B2 (en) 2018-08-10 2022-12-20 Frore Systems Inc. Mobile phone and other compute device cooling architecture
US11802554B2 (en) 2019-10-30 2023-10-31 Frore Systems Inc. MEMS-based airflow system having a vibrating fan element arrangement
US11503742B2 (en) 2019-12-06 2022-11-15 Frore Systems Inc. Engineered actuators usable in MEMS active cooling devices
US11510341B2 (en) 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
CN113841018A (en) * 2019-12-06 2021-12-24 福珞尔***公司 Center anchored MEMS-based active cooling system
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11432433B2 (en) 2019-12-06 2022-08-30 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11765863B2 (en) 2020-10-02 2023-09-19 Frore Systems Inc. Active heat sink
CN113371178A (en) * 2021-07-13 2021-09-10 上海交通大学 Normal flow thrust vectoring nozzle control device based on oscillating jet flow and aircraft
CN113371178B (en) * 2021-07-13 2023-04-07 上海交通大学 Normal flow thrust vectoring nozzle control device based on oscillating jet flow and aircraft

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Application publication date: 20100602