CN101661220A - Liquid crystal display panel and mask plate - Google Patents
Liquid crystal display panel and mask plate Download PDFInfo
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- CN101661220A CN101661220A CN200810119136A CN200810119136A CN101661220A CN 101661220 A CN101661220 A CN 101661220A CN 200810119136 A CN200810119136 A CN 200810119136A CN 200810119136 A CN200810119136 A CN 200810119136A CN 101661220 A CN101661220 A CN 101661220A
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Abstract
The invention relates to a liquid crystal display panel and a mask plate, wherein the liquid crystal display panel comprises an array substrate and a color film substrate; alignment precision measurement check marks are formed in a pixel area of an effective area of the array substrate; a black matrix is formed at the position corresponding to the alignment precision measurement check marks on thecolor film substrate; and the black matrix is used for shielding the alignment precision measurement check marks. The mask plate comprises a reusable area and a non-reusable area, and the alignment precision measurement check marks are set in the effective areas of the reusable area and a non-reusable area. The liquid crystal display panel and the mask plate effectively solve problems caused by poor alignments so that the alignment precision of a Stitch area can be controlled in a required range, and the adverse problems of a thin-film transistor liquid crystal display (TFT-LCD) are avoided.
Description
Technical field
The present invention relates to LCD and make the field, relate in particular to a kind of panel of LCD and mask plate.
Background technology
Along with Thin Film Transistor-LCD (Thin Film Transistor-Liquid Crystal Display, hereinafter to be referred as: the TFT-LCD) fast development of technology, the size of TFT-LCD panel also constantly increases, the producer of each TFT-LCD furnishes a huge amount of money for to build new advanced lines production line one after another, to produce larger sized panel.But, a newly-built new production line, the production line of advanced lines more particularly, need huge investment, and has very big risk, therefore, the panel of exploitation and part producing large-size becomes an efficient ways that addresses the above problem on present production line, as shown in Figure 1, produce a synoptic diagram of large-size panel for adopting present production line, this method is specially: utilize the mask plate (Mask) of several reduced sizes to carry out repeatedly substep exposure, form the panel of large-size, again by certain design with arrange and realize the function of large-size panel.
Though on low production line from generation to generation, adopt the method for repeatedly substep exposure can produce the panel of large-size; but butt joint zone (zones shown among Fig. 1 10) in the double exposure zone; occur covering a series of problems that (Overlay) exceeds standard and cause by sewing up butt joint (Stitch) and interlayer through regular meeting, this also is the technical all the time difficulty that is difficult to break through.As shown in Figure 2, produce another synoptic diagram of large-size panel for adopting present production line, the key of its problem is that general mask plate all is arranged at alignment mark in the technology (Mark) (representing with the star among Fig. 2) and aligning accuracy measurement check mark (representing with the triangle among Fig. 2) outside effective (Active) zone.For the less panel of size, because the formation of panel does not need to adopt mask plate to carry out repeatedly substep exposure, in technological process, its aligning accuracy is more easy to control within the scope that designing institute needs; But panel for the large-size that adopts mask plate to form through repeatedly exposing step by step, because the alignment mark of mask plate and aligning accuracy are measured check mark and are arranged at outside the effective coverage, also be formed at outside the effective coverage so the alignment mark of large-size panel and aligning accuracy are measured check mark, can not guarantee the effective coverage that the large-size panel is all like this, the aligning accuracy that particularly adopts mask plate to carry out the butt joint zone of substep exposure is controlled within the needed scope, and can't carry out aligning accuracy inspection and control to this type of zone, cause TFT-LCD bad problem to occur.
Summary of the invention
The object of the present invention is to provide a kind of panel of LCD and mask plate, make the aligning accuracy of effective coverage be controlled within the needed scope, avoid TFT-LCD bad problem to occur.
The invention provides a kind of mask plate, comprise repeated use zone and non-repeated use zone, in the effective coverage in described repeated use zone and non-repeated use zone, be provided with aligning accuracy and measure check mark.
The invention provides a kind of panel of LCD, comprise array base palte and color membrane substrates, in the pixel region of described array base palte effective coverage, be formed with aligning accuracy and measure check mark, measure the corresponding position of check mark with described aligning accuracy and be formed with black matrix on described color membrane substrates, described black matrix is used to block described aligning accuracy and measures check mark.
The present invention is provided with the mask plate that aligning accuracy is measured check mark by adopting in the effective coverage, in the pixel region of panel of LCD, form aligning accuracy and measured check mark, solved bad effectively and problem that cause by contraposition, the aligning accuracy that has guaranteed the effective coverage that the large-size panel is all is controlled in the needed scope, has avoided TFT-LCD bad problem to occur.
Description of drawings
Fig. 1 produces a synoptic diagram of large-size panel for adopting present production line;
Fig. 2 produces another synoptic diagram of large-size panel for adopting present production line;
Fig. 3 is the synoptic diagram of mask plate one embodiment of the present invention;
Fig. 4 is the synoptic diagram of array base palte among panel of LCD one embodiment of the present invention;
Fig. 5 is the synoptic diagram of array base palte one dot structure among the panel of LCD embodiment of the present invention;
Fig. 6 is the synoptic diagram of color membrane substrates one dot structure among the panel of LCD embodiment of the present invention;
Fig. 7 is the synoptic diagram of another dot structure of array base palte among the panel of LCD embodiment of the present invention.
Embodiment
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
As shown in Figure 3, synoptic diagram for mask plate one embodiment of the present invention, this mask plate comprises three zones, be respectively zone 21, zone 22 and zone 23, wherein zone 22 is for reusing the zone, be repeatedly used in a photoetching process, zone 21 and zone 23 are non-repeated use zone, only use once in a photoetching process.Zone 21 comprises effective coverage (among the figure shown in the A) and non-effective coverage (among the figure shown in the A '), zone 22 comprises effective coverage (among the figure shown in the B) and non-effective coverage (among the figure shown in the B '), and regional 23 comprise effective coverage (among the figure shown in the C) and non-effective coverage (among the figure shown in the C ').
Compared with prior art, present embodiment not only is provided with alignment mark (representing with star) and aligning accuracy and measures check mark (representing with triangle) in non-effective coverage A ', B ' and C ', and in effective coverage A, the C in effective coverage B that reuses zone 22 and non-repeated use zone 21,23, be provided with aligning accuracy measurement check mark, also defined this aligning accuracy and measured check mark in exact position on the mask plate and the exact position on the panel that this mask plate of employing forms.
In the present embodiment, aligning accuracy is measured the optional position that check mark can be arranged on A, B and C, wherein more excellent embodiment is: in the left hand edge zone of the effective coverage C in the non-right hand edge zone of reusing the effective coverage A in zone 21, non-repeated use zone 23, the left hand edge zone of effective coverage B of reusing zone 22 and right hand edge zone aligning accuracy is set and measures check mark, aligning accuracy promptly is set in gray area shown in Figure 3 measures check mark.
The number of above-mentioned aligning accuracy measurement check mark can be for more than one, and A, B, C can have more than one aligning accuracy to measure check mark on each zone.Divide according to function, aligning accuracy is measured check mark and can be divided into overall tilt mark (Total Pitch Mark), sew up butt joint mark (StitchMark) and interlayer covering mark (Overlay Mark).
In sum, the present embodiment difference with the prior art is to be provided with aligning accuracy to measure check mark in the effective coverage of mask plate, like this, when adopting this mask plate to form the array base palte of large-size panel, in the effective coverage of array base palte, also form aligning accuracy and measured check mark, the aligning accuracy that has guaranteed the effective coverage that the large-size panel is all is controlled in the needed scope, has avoided TFT-LCD bad problem to occur.
The embodiment of display panels of the present invention specifically comprises array base palte and color membrane substrates, and wherein array base palte adopts mask plate manufacturing shown in Figure 3 to form.As shown in Figure 4, synoptic diagram for array base palte among panel of LCD one embodiment of the present invention, measure check mark owing to be provided with aligning accuracy in the effective coverage of mask plate, then also be formed with aligning accuracy in the effective coverage of the array base palte that forms by this mask plate manufacturing and measure check mark.Specifically, array base palte shown in Figure 4 is formed through repeatedly exposing step by step by mask plate shown in Figure 3, the effective coverage of this array base palte comprises a plurality of exposure areas of being exposed step by step and being formed by mask plate, wherein exposure area a is formed by the regional A single exposure among Fig. 3, exposure area c is formed by the zone C single exposure among Fig. 3, exposure area b is formed by the area B multiexposure, multiple exposure among Fig. 3, dotted line is represented the zone of repeating to form, and the number of times of repetition is different because of the design of the size of panel and mask plate.
As shown in Figure 4, the array base palte of present embodiment comprises the exposure area that a plurality of substep exposures form, zone 20 is the butt joint zone of adjacent per two exposure areas among the figure, if the mask plate that present embodiment uses is above-mentioned more excellent embodiment, promptly be provided with aligning accuracy and measure check mark in gray area shown in Figure 3, then the array base palte that is formed by this mask plate manufacturing has formed aligning accuracy and has measured check mark in zone 20.
In order not influence the performance of panel, the present invention specifically is formed with aligning accuracy and measures check mark in the pixel region of array base palte effective coverage, measure the corresponding position of check mark with aligning accuracy and be formed with black matrix on color membrane substrates, this black matrix is used to block aligning accuracy and measures check mark.
A dot structure with aligning accuracy measurement check mark 33 places among Fig. 4 is an example below, further introduces technical scheme of the present invention.
As shown in Figure 5, synoptic diagram for array base palte one dot structure among the panel of LCD embodiment of the present invention, this dot structure comprises TFT structure 31, pixel region 32 and aligning accuracy measurement check mark 33, wherein adopts mask plate of the present invention that aligning accuracy is measured check mark 33 and is formed in the pixel region 32.The position of aligning accuracy measurement check mark 33 is not limited only to position shown in Figure 5 among the present invention, can also be arranged on other positions in the pixel region 32.
As shown in Figure 6, synoptic diagram for color membrane substrates one dot structure among the panel of LCD embodiment of the present invention, this dot structure comprises black matrix and pixel region 42, wherein black matrix be included in array base palte on the black matrix 41 that forms of TFT structure 31 correspondence positions and with array base palte on aligning accuracy measure the black matrix 43 that the corresponding position of check mark 33 forms, black matrix 43 is used to block aligning accuracy and measures check mark 33.
Further, aligning accuracy is measured check mark and can be formed on the optional position of pixel region in the present embodiment, but need know this exact position of aligning accuracy measurement check mark on panel.The number that the aligning accuracy of present embodiment is measured check mark can be arranged in the above pixel region for more than one.The related aligning accuracy of present embodiment is measured check mark and can be divided into overall tilt mark (Total Pitch Mark), sew up butt joint mark (Stitch Mark) and interlayer covering mark (OverlayMark) by function.Wherein, the aligning accuracy that function is identical is measured check mark and can be arranged in the pixel region, also can be arranged in a plurality of pixel regions; The aligning accuracy that function is different is measured check mark and can be arranged in the pixel region, also can be arranged in a plurality of pixel regions.As shown in Figure 7, be the synoptic diagram of another dot structure of array base palte among the panel of LCD embodiment of the present invention, wherein aligning accuracy measurement check mark 51 and 52 is arranged in the pixel region.The function of these two aligning accuracy measurement check marks can be identical, also can be different.
Present embodiment is provided with the mask plate that aligning accuracy is measured check mark by adopting in the effective coverage, in the pixel region of panel of LCD effective coverage, form aligning accuracy and measured check mark, especially form aligning accuracy in the butt joint zone of substep exposure and measure check mark, guaranteed that all effective coverages of large-size panel, the particularly aligning accuracy in the butt joint zone of substep exposure are controlled in the needed scope, solved bad effectively and problem that cause has avoided TFT-LCD bad problem to occur by contraposition.
Description below by back process inspection flow process, further specify mask plate of the present invention and panel of LCD the aligning accuracy in butt joint (Stitch) zone of substep exposure can be controlled within the needed scope, effectively solve the bad problem that TFT-LCD occurs.After producing panel of LCD, adopt following inspection flow process to control aligning accuracy, specifically comprise the steps:
Step 1, when the back process inspection of mask lithography technology, use specific equipment, adopting certain method that the aligning accuracy on the panel of LCD is measured check mark measures, obtain measurement result, be respectively between the adjacent area of substep exposure position offset and and benchmark mask lithography technology between the contraposition side-play amount;
Step 2, the measurement result obtained in the step 1 and the desired value and the designated value of design are compared,, finish back process inspection flow process if in the scope that error allows, then do not need the technological parameter of mask to adjust; If exceed error range, then the technological parameter of this mask is adjusted, carry out mask lithography technology, execution in step 1 once more.
By above-mentioned back process inspection flow process, guaranteed that the aligning accuracy in butt joint (Stitch) zone of exposure can be controlled within the needed scope step by step, effectively solve the bad problem that TFT-LCD occurs.
It should be noted that at last: above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment the present invention is had been described in detail, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (8)
1, a kind of mask plate comprises repeated use zone and non-repeated use zone, it is characterized in that, is provided with aligning accuracy and measures check mark in the effective coverage in described repeated use zone and non-repeated use zone.
2, mask plate according to claim 1, it is characterized in that the described aligning accuracy that is provided with is measured check mark and is specially in reusing zone and the non-effective coverage of reusing the zone: in a non-right hand edge zone of reusing the effective coverage in zone, another non-left hand edge zone of reusing the effective coverage in zone, left hand edge zone and right hand edge zone of reusing the effective coverage in zone be provided with aligning accuracy measurement check mark.
3, mask plate according to claim 1 is characterized in that, the number that described aligning accuracy is measured check mark is more than one.
4, mask plate according to claim 3 is characterized in that, described aligning accuracy is measured check mark and comprised the overall tilt mark, sews up butt joint mark and interlayer covering mark.
5, a kind of panel of LCD that adopts the arbitrary described mask plate of claim 1～4 to make, comprise array base palte and color membrane substrates, it is characterized in that: in the pixel region of described array base palte effective coverage, be formed with aligning accuracy and measure check mark, measure the corresponding position of check mark with described aligning accuracy and be formed with black matrix on described color membrane substrates, described black matrix is used to block described aligning accuracy and measures check mark.
6, panel of LCD according to claim 5, it is characterized in that, the effective coverage of described array base palte comprises a plurality of exposure areas of being exposed step by step and being formed by described mask plate, is formed with aligning accuracy and measures check mark in the pixel region in the butt joint zone of per two adjacent exposure areas.
7, panel of LCD according to claim 5 is characterized in that, the number that described aligning accuracy is measured check mark is more than one, is arranged in the above pixel region.
8, panel of LCD according to claim 7 is characterized in that, described aligning accuracy is measured check mark and comprised the overall tilt mark, sews up butt joint mark and interlayer covering mark.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101191369A CN101661220B (en) | 2008-08-27 | 2008-08-27 | Liquid crystal display panel and mask plate |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101191369A CN101661220B (en) | 2008-08-27 | 2008-08-27 | Liquid crystal display panel and mask plate |
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| CN101661220A true CN101661220A (en) | 2010-03-03 |
| CN101661220B CN101661220B (en) | 2013-03-13 |
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| CN2008101191369A Active CN101661220B (en) | 2008-08-27 | 2008-08-27 | Liquid crystal display panel and mask plate |
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| CN102789126A (en) * | 2011-03-02 | 2012-11-21 | 株式会社东芝 | Photomask and method for manufacturing the same |
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