CN101656493B - MEMS wideband piezoelectricity energy collector based on bistable state frequency raising structure - Google Patents
MEMS wideband piezoelectricity energy collector based on bistable state frequency raising structure Download PDFInfo
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- CN101656493B CN101656493B CN2009101957828A CN200910195782A CN101656493B CN 101656493 B CN101656493 B CN 101656493B CN 2009101957828 A CN2009101957828 A CN 2009101957828A CN 200910195782 A CN200910195782 A CN 200910195782A CN 101656493 B CN101656493 B CN 101656493B
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Abstract
The invention relates to an MEMS wideband piezoelectricity energy collector based on a bistable state frequency raising structure in the technical field of electric appliances, which comprises a frame, a bistable state beam arranged in the frame, a piezoelectric over hanging beam, a permanent magnet and a soft magnet. The MEMS wideband piezoelectricity energy collector is characterized in that two ends of the bistable state beam are both fixed on the frame, the permanent magnet is attached to the bistable state beam, on end of the piezoelectric over hanging beam is fixed on the frame, and the soft magnet is arranged on the piezoelectric over hanging beam. The invention adopts a bistable state frequency raising structure to enable a piezoelectric transduction component to obtain greater output power in a low-frequency vibration environment. Compared with the prior MEMS piezoelectric energy collector, the invention has simple structure, easy manufacture and volume reduction, can be operated in a low-frequency environment, and can output stable frequency within wider environment vibration frequency range.
Description
Technical field
What the present invention relates to is a kind of device of energy technology field, specifically is a kind of MEMS broadband piezoelectric energy collector based on the bistable state raising structure.
Background technology
MEMS (micro electro mechanical system) (MEMS:Micro-Electro-Mechanical Systems) is an emerging research field that integrates micromachine, microsensor, microactrator, signal processing, Based Intelligent Control that grows up on the microelectric technique basis., work alone system low in energy consumption along with wireless sensor network, embedded intelligence structure and wearable health monitoring etc. develops rapidly, and be more and more stronger to long-life independent power supply technology requirement.At present, ambient vibration energy acquisition technology is the effective ways that overcome the above problems.The miniature piezoelectric Blast Furnace Top Gas Recovery Turbine Unit (TRT) of making as the transducing basic engineering with the piezoelectric effect of piezoelectric is little because of possessing volume, the energy density height, the life-span is long, can with advantage such as MEMS processing technology compatibility, thereby obtained concern widely.
The operation principle of MEMS piezoelectric energy collector is based on the direct piezoelectric effect of piezoelectric, its direct piezoelectric effect is that mechanical energy is converted into electric energy, when external force affacts on the piezoelectric element and causes that material deforms, distance between the positive and negative bound charge of material internal diminishes, polarization intensity also diminishes, cause being adsorbed on originally the free charge on the electrode, some is released, and electric discharge phenomena occur.The electric energy that is produced depends on the external environment condition vibration frequency, when the system frequency of piezoelectric energy collector and external vibration frequency are complementary when producing resonance, with Maximum Power Output, still, when the system frequency of piezoelectric energy collector departs from the external vibration frequency, the power of output will reduce.
Utilize the piezoelectric type vibrational energy collector of MEMS technology development, because small its natural frequency of size is higher, usually far above the ambient vibration frequency.The natural environment vibration frequency is generally less than in the 1000HZ scope, and mainly concentrates in the scope less than 100Hz.Therefore, present MEMS energy acquisition technology also can't be implemented in the energy acquisition of (less than 100Hz) under the low frequency environments.
Find by prior art documents, Marco Ferrari, Vittorio Ferrari etc. writes articles " Piezoelectricmultifrequency energy converter for power harvesting in autonomousmicrosystems " (" multi-frequency piezoelectric energy gatherer in the autonomous micro-system " " sensor and actuator A ") at " Sensors and Actuators A " 142 (2008) 329-335.The method of the realization frequency match that is mentioned in this article is to adopt the array of the twin lamella piezoelectric cantilever composition of a plurality of different natural frequencies to realize wideer equivalent frequency band.But, increased the physical dimension of piezoelectric energy collector on the one hand in this way, and made the manufacture process of cantilever beam become complicated.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of MEMS broadband piezoelectric energy collector based on the bistable state raising structure is proposed, make the piezoelectric energy-conversion element under the low-frequency vibration environment, obtain bigger power output, problems such as traditional MEMS piezoelectric energy collector working band is narrow to solve, natural frequency height.
The present invention is achieved by the following technical solutions, the present invention includes: framework and bistable state beam, piezoelectric cantilever, permanent magnet, the soft magnet be located in the framework, the two ends of bistable state beam are all solid props up on framework, permanent magnet is attached on the bistable state beam, one end of piezoelectric cantilever is fixed on the framework, and soft magnet is arranged on the piezoelectric cantilever.
The length of described bistable state beam is longer than the width of framework inside, bistable state beam horizontal positioned, and bistable state beam flexing is in framework.
The two ends of described bistable state beam are all solid props up on framework.
One end of described piezoelectric cantilever props up admittedly on framework, and the other end of piezoelectric cantilever is unsettled.
Described soft magnet is located at the upper surface of the free end of piezoelectric cantilever.
Described permanent magnet is attached to the middle part of the lower surface of bistable state beam.
Described permanent magnet is identical with the central axis of soft magnet.
Described piezoelectric cantilever comprises three layers, and the intermediate layer is a metal level, and the upper and lower are piezoelectric layer.
All be coated with electrode on upper strata piezoelectric layer and the lower floor's piezoelectric layer.
Upper strata piezoelectric layer electrode and lower floor's piezoelectric layer electrode are connected in series.
Operation principle of the present invention is: bistable state girder construction length is longer than the width of framework inside, and the bistable state girder construction is subjected under the responsive to axial force flexing to take place in framework inside, and the stable equilibrium is positioned over framework inside, and be first stable position of bistable state beam this moment.When ambient vibration acted on extraneous cross force on the bistable state beam and increases to certain value, the bistable state beam moved downward another state that is stabilized in, and be second stable position of bistable state beam this moment.When the present invention is positioned in the ambient vibration, under certain vibration acceleration condition, the bistable state beam can switch between first stable state and second stable state mutually.When the bistable state beam when first stable position transfers second stable position to, permanent magnet on the bistable state beam and the distance between the soft magnet on the piezoelectric cantilever will reduce, magnetic field force between permanent magnet and the soft magnet increases, can overcome the elastic deformation force of piezoelectric cantilever inside and attract soft magnet on the piezoelectric cantilever, piezoelectric cantilever is bent upwards, and the elastic deformation force of cantilever beam inside can move upward and constantly increase along with cantilever beam.Subsequently, because the vibration of external environment, the bistable state beam will switch to first stable position from second stable position, at this moment, distance between permanent magnet and soft magnet increases, and mutual magnetic field force is less, much smaller than piezoelectric cantilever inner elastomeric deformation force, piezoelectric cantilever will move downward under the effect of inner elastomeric deformation force, thereby cause piezoelectric cantilever to do the mechanical damping vibration with the natural frequency of self.Because of the natural frequency of piezoelectric cantilever far above the ambient vibration frequency in the 100HZ, thereby the low-frequency vibration in the external environment is converted into the dither of piezoelectric cantilever.Owing to there is damping, the Oscillation Amplitude of piezoelectric cantilever will reduce gradually, but at a time, when the bistable state beam switched to second stable position again, permanent magnet will attract soft magnet once more.Therefore, as long as the extraneous vibration acceleration enough provides the conversion of bistable state beam stable state required critical force, and the vertical direction distance suitably between piezoelectric cantilever and the bistable state beam, piezoelectric cantilever just can obtain enough bendings frequently, and the mechanical damping of making high frequency is vibrated, and with the ambient vibration frequency-independent in the external world, thereby realized obtaining under the low frequency environments bigger power output.
The present invention adopts the bistable state raising structure, make MEMS piezoelectric energy-conversion element under the low-frequency vibration environment, obtain power output, compare with existing MEMS piezoelectric energy collector, it is not only simple in structure, make easily, volume reduces, and it can run in the low frequency environments, and can export stable power in the ambient vibration frequency range of broad.
Description of drawings
Fig. 1 is an overall structure schematic diagram of the present invention.
Fig. 2 is the bistable state beam among the present invention and the structural representation of permanent magnet thereof.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises: framework 1, bistable state beam 2, permanent magnet 3, piezoelectric cantilever 4 and soft magnet 5, bistable state beam 2, permanent magnet 3, piezoelectric cantilever 4 and soft magnet 5 all are arranged at framework 1 inside.Permanent magnet 3 adheres to the centre position of the lower surface of bistable state beam 2.Piezoelectric cantilever 4 is to be made by piezoelectric, piezoelectric cantilever 4 comprises three layers, and the intermediate layer is a metal level, and the upper and lower are piezoelectric layer, all be coated with electrode on upper strata piezoelectric layer and the lower floor's piezoelectric layer, upper strata piezoelectric layer electrode and lower floor's piezoelectric layer electrode are connected in series.
One end of piezoelectric cantilever 4 is fixed on the framework 1, and the other end of piezoelectric cantilever 4 is unsettled.Soft magnet 5 adheres to the upper surface of piezoelectric cantilever 4, and in order to make the magnetic field force between permanent magnet and soft magnetic bodies big as far as possible, align with permanent magnet 3 in vertical direction in the position of soft magnet 5, and central axis is identical.
As shown in Figure 1 and Figure 2, present embodiment bistable state beam 2 is to be made by micro girder construction, the length of micro girder construction is longer than the width of framework 1 internal pore, micro girder construction is horizontal positioned in framework 1, and inner solid the propping up together of its two ends and framework, micro girder construction generation flexing under responsive to axial force constitutes bistable state beam 2.
Present embodiment adheres to a permanent magnet in the centre position of one straight beam when making; Make flexing bistable state beam, make beam be in first stable state.Straight beam is applied axis prestressing force, and this prestressing force is fixed on the electric organ framework flexing bistable state beam two ends greater than the flexing critical force of beam; Make piezoelectric cantilever, an end props up admittedly on the energy collecting device framework, other end freedom; Soft magnet is adhered to the free end position of piezoelectric cantilever.
Present embodiment can adopt corresponding size according to concrete application requirements.Having listed whole piezoelectric energy collector size as following table 1 is 1 * 1mm
2One group of design parameter.
Table 11 * 1mm
2One group of design parameter of size piezoelectric energy collector
| Whole piezoelectric energy collector size (mm 2) | Bistable state beam size (long * wide * thick) (mm 3) | The sagitta of bistable state beam (during the flexing stable state) (mm) | Distance between bistable state beam and piezoelectric cantilever (mm) | Permanent magnetic iron block size (long * thick) (mm 2) | Soft magnetism iron block size (long * thick) (mm 2) |
| 1×1 | 1×0.04×0.03 | 0.15 | 0.2 | 0.3×0.03 | 0.1×0.01 |
Claims (10)
1. MEMS broadband piezoelectric energy collector based on the bistable state raising structure, comprise: framework and bistable state beam, piezoelectric cantilever, permanent magnet, the soft magnet be located in the framework, it is characterized in that, the two ends of bistable state beam all are fixed on the framework, permanent magnet is attached on the bistable state beam, one end of piezoelectric cantilever is fixed on the framework, and soft magnet is arranged on the piezoelectric cantilever
Distance on described bistable state beam and the piezoelectric cantilever vertical direction satisfies: bistable state beam two ends are all solid props up in framework inside, and under responsive to axial force flexing takes place, and the stable equilibrium is positioned over framework inside, and be first stable position of bistable state beam this moment;
When the extraneous vibration acceleration is worth greater than certain, when also promptly acting on extraneous cross force on the bistable state beam and increasing to certain value, the bistable state beam is with another stable position of redirect, the permanent magnet of being located at bistable state beam lower surface middle part can attract each other with the soft magnet that is arranged on the piezoelectric cantilever, distance on bistable state beam and the piezoelectric cantilever vertical direction, should design the permanent magnet that guarantees on the bistable state beam and when second stable state of bistable state beam, can attract soft magnet on the piezoelectric cantilever, and should guarantee that permanent magnet and soft magnet can not be in contact with one another adhesive.
2. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 1 is characterized in that the length of described bistable state beam is longer than the width of framework internal voids.
3. according to claim 1 or 2 described MEMS broadband piezoelectric energy collectors, it is characterized in that based on the bistable state raising structure, described bistable state beam horizontal positioned, and bistable state beam flexing is in framework.
4. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 1 is characterized in that the other end of described piezoelectric cantilever is unsettled.
5. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 4 is characterized in that described soft magnet is located at the upper surface of the free end of piezoelectric cantilever.
6. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 1 is characterized in that described permanent magnet is attached to the middle part of the lower surface of bistable state beam.
7. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 1 is characterized in that described permanent magnet is identical with the central axis of soft magnet.
8. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 1 is characterized in that, described piezoelectric cantilever comprises three layers, and the intermediate layer is a metal level, and the upper and lower are piezoelectric layer.
9. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 8 is characterized in that, all is coated with electrode on upper strata piezoelectric layer and the lower floor's piezoelectric layer.
10. the MEMS broadband piezoelectric energy collector based on the bistable state raising structure according to claim 9 is characterized in that, upper strata piezoelectric layer electrode and lower floor's piezoelectric layer electrode are connected in series.
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| CN102064736B (en) * | 2010-12-08 | 2012-12-12 | 重庆大学 | Composite micro wind turbine generator |
| CN102255557B (en) * | 2011-07-20 | 2013-08-07 | 大连理工大学 | Rotary piezoelectric generation device |
| CN102332843B (en) * | 2011-09-16 | 2013-11-06 | 大连理工大学 | Symmetric rotation piezoelectric generation device |
| CN103023378B (en) * | 2013-01-11 | 2018-09-28 | 浙江工商大学 | The multi-direction vibration energy collector of broadband |
| CN103296923B (en) * | 2013-06-04 | 2016-01-06 | 中国科学院上海硅酸盐研究所 | Exempt from magnet bistable state PZT (piezoelectric transducer) |
| CN104242725B (en) * | 2013-06-13 | 2017-02-15 | 中国科学院上海微***与信息技术研究所 | Two-level vibrating type broadband energy harvester |
| CN105226992B (en) * | 2014-06-06 | 2017-06-16 | 中国科学院上海微***与信息技术研究所 | Energy collecting device and sensor that Oscillation Amplitude threshold drive generates electricity |
| CN105811804B (en) * | 2016-04-08 | 2017-10-31 | 厦门大学 | A kind of broadband piezoelectric energy gathering apparatus based on wire saws |
| CN106953545B (en) * | 2017-04-24 | 2019-06-04 | 合肥工业大学 | A kind of board-like piezoelectric energy collecting device of bistable state diagonally compressed |
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| CN107769616A (en) * | 2017-11-30 | 2018-03-06 | 安徽理工大学 | A kind of bistable state piezoelectric energy recovery structure |
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| CN109104123A (en) * | 2018-10-21 | 2018-12-28 | 吉林大学 | A kind of wide frequency domain self-tuning bistable state vibration energy collector and acquisition method |
| CN109450293A (en) * | 2018-12-04 | 2019-03-08 | 山东理工大学 | A kind of non-linear piezoelectric generating device towards two-way excitation in length and breadth |
| CN111953230B (en) * | 2020-07-31 | 2023-05-09 | 江苏大学 | Centrifugal distance optimization matching method for bistable energy collector |
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