CN101633220A - Micro lens, manufacturing method of mold insert of micro lens and luminescent device - Google Patents

Micro lens, manufacturing method of mold insert of micro lens and luminescent device Download PDF

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Publication number
CN101633220A
CN101633220A CN200810134471A CN200810134471A CN101633220A CN 101633220 A CN101633220 A CN 101633220A CN 200810134471 A CN200810134471 A CN 200810134471A CN 200810134471 A CN200810134471 A CN 200810134471A CN 101633220 A CN101633220 A CN 101633220A
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little
nanostructured
lenticule
die
manufacturing micro
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CN200810134471A
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林伟平
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Aurotek Corp
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Aurotek Corp
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Priority to CN200810134471A priority Critical patent/CN101633220A/en
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Abstract

The invention relates to a micro lens, a manufacturing method of a mold insert of the micro lens and a luminescent device. The manufacturing method mainly comprises the following steps of: providing a substrate with a first surface so as to arrange a plurality of micro or nano structures of a single grain size on the first surface; depositing metal film layers on the first surface and the micro or nano structures on the substrate and exposing part of the micro or nano structures from the metal film layers on; removing each micro or nano structure to form a mold insert with a second surface, and using the mold insert to further form the micro lens with a micro or nano bumpy surface array. The micro lens makes a large amount of the light from a light source reflected by the micro or nano structures, so that the illumination is more uniform and the light shape is more richful. In addition, the micro lens can reduce material and energy consumption and utilization rate of equipment.

Description

The manufacture method of lenticule and die thereof and light-emitting device
Technical field
The manufacture method and the light-emitting device of relevant a kind of lenticule of the present invention and die thereof, more detailed it, be relevantly a kind ofly can make the lenticule of the even bright dipping of light source and the manufacture method and the light-emitting device of die thereof in order to make.
Background technology
Press light-emittingdiode (light emitting diode; LED) be a kind of semiconductor optoelectronic element that can be luminous, its principle of luminosity is to utilize electronics and hole in the process that the P-N interface combines, emit enough photons with the form released energy of light and produce light source, and this light-emitting component encapsulated with a lens face, appear efficient light sources with suitable refraction, to reach the bright dipping illuminating effect by these lens.Because light-emittingdiode has that volume is little, light weight and luminous efficiency advantages of higher, therefore, extensively apply at present to throw light on or the use of information indicating on.But the light-emitting component of this light-emittingdiode is via becoming radial scattering in conjunction with the light that pedestal sent, light source also can't be concentrated emission, therefore, light-emittingdiode brightness can't get a desired effect, and also produced too much heat energy because of scattering of light, therefore how to allow light source present homogenising, optimization,, be the problem that to endeavour to solve now to improve light extraction efficiency.
The homogenising of light source, design optimization and processing mode technology are quite a lot of, the technology of the overwhelming majority all applies to module backlight, one of blooming piece in the module for example backlight diffusion barrier, be that many single, polycrystalline encapsulating light emitting element lens are only done at the design of the light shape of light source mostly and adjusted or the design secondary lens is adjusted light source direction, fewer meeting goes to do design optimization at the amount of light of light source and uniformity, in other words, most light-emitting component designs be with light extraction efficiency for preferentially considering, go correction as for bright dipping light shape is many by light fixture.
For example United States Patent (USP) 6,155, and 699 disclose a kind of high index of refraction and low-index material of utilizing forms multicycle distributing Bragg mirror (distributed bragg reflector; DBR) structure is as the reflecting layer of light-emittingdiode, in order to promote the light extraction efficiency of light-emittingdiode.
For example the TaiWan, China notification number the 541st, No. 728 patent cases, it has disclosed a kind of highly reflective dielectric medium stacked structure that forms on the table top wall of flip-chip wafer light-emittingdiode, this dielectric medium stacked structure is made up of staggered low-index layer, wherein high reflectance piles up and can reflect the major part that is incident in the direct light of cated table top wall in the LED Chips for Communication, so can reduce the light loss consumption that penetrates the table top wall, but this patent forms the highly reflective dielectric medium piles up, only be formed at light-emittingdiode table top wall surface, but the phenomenon of light loss consumption can take place on other side still.
By above-mentioned traditional light-emittingdiode light emitting structures as can be known, no matter be with the DBR or the structure of optical reflectance coating, can only the reflecting part or the light of specific wavelength, adjust light source direction and all need to design secondary lens, and above-mentioned mentioned conventional art, also all must utilize manufacture methods such as complicated little shadow and etching, therefore, it is very big to consume cost on the manufacture method.
In addition, than traditional light source luminous lens design, traditional design is difficult for because of size and the related die exploitation that is confined to geometry, make the homogenising and the brightness of bright dipping effectively to promote, more to make the mode cost higher because of the luminous lens of light-emittingdiode, so less similar products like on the market.
Therefore, how to provide a kind of and can improve above-mentioned disappearance, reducing consumptive material power consumption, and the utilization rate of equipment and can produce and reflect, make the ejaculation illumination can be more even and the light shape manufacture method of lenticule and die thereof more widely in a large number to provide, is the industry problem demanding prompt solution in fact.
Summary of the invention
In view of the shortcoming of above-mentioned prior art, one object of the present invention be to provide a kind of can produce reflect in a large number, make penetrate illumination can be more even and light the shape manufacture method and the light-emitting device of lenticule and die thereof more widely.
Another object of the present invention is to provide a kind of low consumptive material power consumption and can reduce the lenticule of utilization rate of equipment and the manufacture method and the light-emitting device of die thereof.
Another purpose of the present invention is to provide that a kind of manufacture method is simple and easy possesses fast the lenticule of high time cost benefit and the manufacture method and the light-emitting device of die thereof.
For reaching above-mentioned purpose and other purposes, the invention provides the manufacture method and the light-emitting device of a kind of lenticule and lenticule die.The manufacture method of this lenticule die may further comprise the steps: base material is provided, and this base material has first surface; A plurality of little, nanostructureds that synthesize single particle size are elaborated be arranged on this first surface; First surface on this base material and little, nanostructure deposition metal film layer, and make respectively that this is little, nanostructured is partly exposed this metal film layer; And remove respectively this little, nanostructured, have the die of second surface with formation.
According to the manufacture method of the present invention in the above-mentioned die that provides, method for manufacturing micro-lens of the present invention may further comprise the steps: the microlens material that desire is shaped is poured in the second surface of this die after sneaking into little, nano particle again; And behind this microlens material solidification forming, it is taken out, have lenticule little, nano concavo-convex face array with formation.
According to above-mentioned manufacture method, respectively should be little, nanostructured elaborates arrangement with gas, liquid, and it is arranged and controls parameter and be selected from external electrical field, magnetic field, solution soda acid, temperature.
According to above-mentioned manufacture method, respectively this is little, nanostructured is selected from and is macromolecular material or ceramic material.
According to above-mentioned manufacture method, respectively this is little, the size of nanostructured is between 0.01 micron to 1 micron.
According to above-mentioned manufacture method, respectively this is little, nanostructured is not limit with the matrix of systematicness and arranged, for example: face-centered cubic arranges, six stacked arrangement, each other for the arrangement of no gap or be gapped arrangement each other, wherein, respectively this is little, the clearance distance of nanostructured is between 0.001 to 10 micron.
According to above-mentioned manufacture method, little, the nano-structured particles of this microlens material and quantitative concentrations mix with certain proportion.
According to above-mentioned manufacture method, further comprise the lenticule of making sandwich construction according to above-mentioned steps, the method for manufacturing micro-lens of this sandwich construction comprises: base material is provided, and this base material has first surface; A plurality of little, nanostructureds that synthesize single particle size are elaborated be arranged on this first surface; First surface on this base material and little, nanostructure deposition metal film layer, and make respectively that this is little, nanostructured is partly exposed this metal film layer; Remove respectively this little, nanostructured, have first die of second surface with formation; That the microlens material that desire is shaped is sneaked into is little, behind the nano particle, be poured in the second surface of this first die again; And behind this microlens material solidification forming, it is taken out, have lenticule little, nano concavo-convex face array with formation; Make second die according to the step that forms this first die, wherein this second die has the 3rd surface of this male and fomale(M﹠F); With this lenticular the 3rd surperficial pressing, make between this lenticular the 3rd surface with little, nano concavo-convex face array and second die and form the space with little, nano concavo-convex face array towards this second die; In this space, inject the material that desire forms lens jacket; After waiting to inject the material solidification shaping in this space, this second die takes out this lenticule certainly, can form the lenticule of this sandwich construction.
In the lenticule of this sandwich construction, the microlens material of each layer structure is selected from and is materials such as silica gel, acryl or epoxy resin; The refractive index of the microlens material of each layer structure is for rule or randomly successively decrease or increase progressively; And the thickness of the microlens material of each layer structure is between 0.01 millimeter to 10 millimeters.
Light-emitting device of the present invention comprises pedestal; Light-emitting component is located on this pedestal; And lenticule, be covered with this pedestal encapsulating this light-emitting component, and this lenticule has exiting surface little, the nano concavo-convex face.
Among another embodiment of light-emitting device of the present invention, this lenticule is to have microlens layer little, the nano concavo-convex face by multilayer to be formed by stacking.
In sum, the manufacture method of lenticule disclosed in this invention and die thereof and light-emitting device, it mainly provides the base material with first surface, to synthesize the little of single particle size with a plurality of, nanostructured is elaborated and is arranged on this first surface, then, first surface on this base material and little, the nanostructure deposition metal film layer, and make respectively this little, nanostructured is partly exposed this metal film layer, it is little to remove respectively this afterwards again, nanostructured has the die of second surface with formation, and utilize the further formation of this die to have little, the lenticule of nano concavo-convex face array, the light of using light source is through little, nanostructured can produce a large amount of refractions, make penetrate illumination can be more even and light shape is more extensive, and this lenticular manufacturing has low consumptive material power consumption, can reduce the characteristics such as utilization rate of equipment, further be built up multilayer microlens again, make the uniformity of bright dipping more thorough with the microlens material of utilizing different refractivity, to allow the more desirable single light source of convergence of several higher source luminances.
Description of drawings
Fig. 1 utilizes method for manufacturing micro-lens of the present invention to apply to the bright dipping schematic diagram of the first embodiment aspect of light-emitting device;
Fig. 2 A to 2D is the generalized section of first embodiment of the manufacture method of lenticule die of the present invention;
Fig. 3 A and 3B for the present invention with synthetic nanosphere through the obtained image of SEM (SEM);
Fig. 4 A to 4D utilizes first embodiment of the manufacture method of lenticule die of the present invention to make lenticular generalized section;
Fig. 5 is the bright dipping schematic diagram that the lenticule that utilizes method for manufacturing micro-lens of the present invention to manufacture applies to second embodiment of light-emitting device;
Fig. 6 A to 6C is the generalized section of second embodiment of method for manufacturing micro-lens of the present invention;
Fig. 7 is in the manufacture method of lenticule die of the present invention, is distributed in the schematic diagram that little, the nanostructured on the base material is arranged with no gap face-centered cubic;
Fig. 8 is for being distributed in little, the schematic diagram that nanostructured is arranged with gapped face-centered cubic on the base material in the manufacture method of lenticule die of the present invention;
Fig. 9 is for being distributed in little, nanostructured on the base material in the manufacture method of lenticule die of the present invention with the schematic diagram of six stacked arrangement in space; And
Figure 10 is for being distributed in little, nanostructured on the base material in the manufacture method of lenticule die of the present invention with the schematic diagram of six stacked arrangement of tight.
The main element symbol description
10 light-emitting devices
11 light-emitting components
12 pedestals
20,60 lenticules
201,611,621 little, nano concavo-convex faces
21,51 base materials
211 first surfaces
22 metal film layers
23 dies
231 second surfaces
24 microlens material
241 little, nano-structured particles
30 little, nanostructureds
55 second dies
551 the 3rd surfaces
61 first microlens layers
62 second microlens layers
The specific embodiment
Below by specific instantiation explanation embodiments of the present invention, those skilled in the art can understand other advantages of the present invention and effect easily by the disclosed content of this specification.The present invention also can be implemented or be used by other different specific embodiments, and the every details in this specification also can be based on different viewpoints and application, carries out various modifications and change under the spirit of the present invention not deviating from.
First embodiment
See also shown in Figure 1ly, for the lenticule that utilizes method for manufacturing micro-lens of the present invention to manufacture applies to the bright dipping schematic diagram of the first embodiment aspect of light-emitting device, this light-emitting device is light-emittingdiode for example.As shown in the figure, this light-emitting device 10 is made up of light-emitting component 11 and pedestal 12, this light-emitting component 11 is arranged on this pedestal 12, in order to light source to be provided, and be covered with this pedestal 12 to encapsulate this light-emitting component 11 with lenticule 20, and, evenly derive in order to the light source that light-emitting component 11 is produced because the exiting surface of lenticule 20 of the present invention is little, nano concavo-convex face 201 (pothole or projection).
Seeing also Fig. 2 A to 2D, is the generalized section of first embodiment that shows the manufacture method of lenticule die of the present invention.
Shown in Fig. 2 A, a base material 21 is provided, this base material has first surface 211.
Then, shown in Fig. 2 B, then, a plurality of little, nanostructureds 30 that synthesize single particle size are elaborated be arranged on this first surface 211; Wherein, these little, nanostructured 30 optional macromolecular material or ceramic materials of doing for oneself respectively, and respectively this is little, the size of nanostructured 30 between 0.01 micron to 1 micron (shown in Fig. 3 A and 3B, be distributed in the SEM image of substrate surface for nanosphere), with with macromolecular material or ceramic material respectively this is little, nanostructured 30 is elaborated the first surface 211 that is arranged in this base material 21, make respectively that this is little, nanostructured 30 presents rule or irregular arrangement in this first surface 211.Particularly, respectively this is little, nanostructured can be elaborated arrangement by gas, liquid, for example, this base material 21 can be suspended in (figure does not show) in the electrolyte, and this electrolyte and this base material 21 are applied the external voltage of positive and negative polarity respectively, make particle little, nanostructured 30 be subjected to the electric field influence that this external voltage produces and drive to vacillate, thereby on the first surface on this base material, elaborated arrangement, electrophoresis for example, wherein external electrical field, magnetic field, solution soda acid, temperature controlling parameter need suitably limit, to produce the good arrangement of elaborating.
Then, shown in Fig. 2 C, first surface 211 on this base material 21 and little, nanostructured 30 depositing metal films layers 22, and make respectively that this is little, nanostructured 30 parts are exposed this metal film layer 22; Wherein, the mode that deposits this metal film layer 22 is not limited to physics or chemical vapour deposition technique, and the thickness of this metal film layer 22 is little to be no more than, nanostructured is principle.
Afterwards, shown in Fig. 2 D, remove respectively this little, nanostructured 30, promptly form die 23 with second surface 231.Particularly, can utilize the wet etching or the mode of dry ecthing with macromolecule or pottery large tracts of land regular array module little, nanostructured removes in the surface, so can obtain having the die 23 of the second surface 231 of large-area orderly or unordered little, nano-structure array.
Seeing also Fig. 4 A to 4D, is that first embodiment that shows the manufacture method of the lenticule die that utilizes the invention described above makes lenticular generalized section.
At first, shown in Fig. 4 A, for reaching the purpose of homogenising bright dipping, the microlens material 24 that desire is shaped is sneaked into little, nano particle 241, particularly, little, the nano-structured particles of this microlens material 24 and quantitative concentrations 241 mixes with certain proportion, makes that this is little, nano particle 241 is uniformly distributed in this microlens material 24, generally speaking, sneak into that this is little, the amount of nano particle 241 is about between 10wt%~35wt%.
Then, shown in Fig. 4 B, after the microlens material 24 above-mentioned even mixing that has prepared is little, nano particle 241 is softened, be poured into again in the second surface 231 of this die 23.
Afterwards, shown in Fig. 4 C, with the above-mentioned microlens material solidification forming (for example, baking is shaped) that has been poured into the second surface 231 of this die 23.
At last, shown in Fig. 4 D, microlens material behind the solidification forming 231 is taken out from this die 23, have lenticules 20 little, nano concavo-convex face 201 arrays to form single face, thereby, promote with the bright dipping uniformization effect that makes light-emitting component by this male and fomale(M﹠F) 201 with these lenticule 20 encapsulating light emitting elements (referring to Fig. 1).
Second embodiment
See also shown in Figure 5ly, for the lenticule that utilizes method for manufacturing micro-lens of the present invention to manufacture applies to the bright dipping schematic diagram of second embodiment of light-emitting device, this light-emitting device is light-emittingdiode for example.As shown in the figure, this light-emitting device 10 ' also is made up of light-emitting component 11 and pedestal 12, this light-emitting component 11 is arranged on this pedestal 12, in order to light source to be provided, and be covered with this pedestal 12 to encapsulate this light-emitting component 11 with lenticule 60, different with light-emitting device shown in Figure 1 10 is, the lenticule 60 of second embodiment be have by multilayer little, nano concavo-convex face 611,621 microlens layer 61,62 institutes are formed by stacking, and each layer lenticule 61,62 have different refractivity because of employed material is different, form the multilayer film design with mutual encapsulation, make goodization of the uniformity of bright dipping with the microlens material of utilizing several layers of different refractivity, to allow the more desirable single light source of convergence of several higher source luminances.
Seeing also Fig. 6 A to 6C, is the generalized section in order to second embodiment that shows method for manufacturing micro-lens of the present invention, the method for making of present embodiment is different with Fig. 4 A to 4D be in, can make the lenticule 60 of providing sandwich construction by present embodiment.
At first, adopt the manufacture method of the lenticule die of the present invention shown in earlier figures 2A to Fig. 2 D to make first die (do not give at this graphic), and make first microlens layer 61 with method for manufacturing micro-lens of the present invention and this first die shown in aforementioned Fig. 4 A to Fig. 4 D, in addition, also adopt the manufacture method of the lenticule die of the present invention shown in earlier figures 2A to Fig. 2 D to make second die 55, what must propose explanation especially is that the size on this second die 55 is greater than first die.
Then, as shown in Figure 6A, this first microlens layer 61 is pressed on second die 55.
Then, shown in Fig. 6 B, because the size on this second die 55 is greater than the size of first die that forms this first microlens layer 61, so after this first microlens layer 61 is pressed on second die 55, can form space 7 between this first microlens layer 61 and second die 55, the lens material that desire is formed second microlens layer 62 injects this space 7.
At last, shown in Fig. 6 C, after waiting to inject the lens material solidification forming in this space 7, this second die 55 takes out certainly, has the sandwich construction lenticule 60 of this first microlens layer 61 and this second microlens layer 62 with formation.What must propose explanation is, can sneak into little in the present embodiment microlens material uncured in advance in order to form this first microlens layer 61 and this second microlens layer 62, nano particle, perhaps select not sneak into little, nano particle, and the optional silica gel of doing for oneself of the microlens material that forms this first microlens layer 61 and this second microlens layer 62, acryl or epoxide resin material, moreover, the refractive index of microlens material that forms the microlens material of this first microlens layer 61 and form this second microlens layer 62 is for rule or randomly successively decrease or increase progressively, for example, refraction coefficient successively successively decreases with the systematicness ground that is equal difference or geometric ratio relation mutually or increases progressively, or successively to successively decrease or increase progressively in no regularity ground.
Analogize with aforementioned manufacture method, can also form the 3rd microlens layer with the step of above-mentioned Fig. 6 A to 6B, will have superimposed again the 3rd microlens layer of sandwich construction lenticule 60 (being illustrated) of first microlens layer 61 and second microlens layer 62 at this, make the uniformity of bright dipping more thorough with the microlens material of utilizing different refractivity, to allow the more desirable single light source of convergence of several higher source luminances.
Moreover, in the manufacture method of lenticule die of the present invention, be distributed on the base material respectively this is little, nanostructured 30 is not limit with the matrix of systematicness and is arranged, for example: no gap face-centered cubic arranges (as shown in Figure 7) or gapped face-centered cubic is arranged (as shown in Figure 8), promptly little, nanostructured can also other mode be spread journey and is arranged, for example: six stacked arrangement in space (as shown in Figure 9), or be six stacked arrangement in no gap (as shown in figure 10) each other, wherein, respectively this is little, the clearance distance of nanostructured is between 0.001 to 10 micron, but do not exceed with above-mentioned.
In sum, the manufacture method of lenticule disclosed in this invention and die thereof, it mainly provides the base material with first surface, to synthesize the little of single particle size with a plurality of, nanostructured is elaborated and is arranged on this first surface, then, first surface on this base material and little, the nanostructure deposition metal film layer, and make respectively this little, nanostructured is partly exposed this metal film layer, it is little to remove respectively this afterwards again, nanostructured has the die of second surface with formation, and utilize the further formation of this die to have little, the lenticule of nano concavo-convex face array, reduce the consumptive material power consumption, and the utilization rate of equipment and producing in a large number reflects, make penetrate illumination can be more even and light shape is more extensive, further that each lenticule is superimposed and form multilayer microlens again, make the uniformity of bright dipping more thorough with the microlens material of utilizing different refractivity, to allow the more desirable single light source of convergence of several higher source luminances.

Claims (30)

1, a kind of manufacture method of lenticule die is characterized in that, may further comprise the steps:
Base material is provided, and this base material has first surface;
A plurality of little, nanostructureds that synthesize single particle size are elaborated be arranged on this first surface;
First surface on this base material and little, nanostructure deposition metal film layer, and make respectively that this is little, nanostructured is partly exposed this metal film layer; And
Remove respectively this little, nanostructured, have the die of second surface with formation.
2, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this is little, nanostructured is elaborated arrangement with gas, liquid.
3, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this arrangement control parameter little, nanostructured is selected from external electrical field, magnetic field, solution soda acid, temperature.
4, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this is little, nanostructured is selected from and is macromolecular material or ceramic material.
5, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this is little, the size of nanostructured is between 0.01 micron to 1 micron.
6, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this is little, nanostructured is arranged with face-centered cubic.
7, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this is little, nanostructured is with six stacked arrangement.
8, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this is little, nanostructured is the arrangement of no gap each other.
9, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this is little, nanostructured is gapped arrangement each other.
10, the manufacture method of lenticule die according to claim 9 is characterized in that, respectively this clearance distance little, nanostructured is about between 0.001 to 10 micron.
11, the manufacture method of lenticule die according to claim 1 is characterized in that, respectively this step that removes little, nanostructured is removed with Wet-type etching or dry-etching.
12, a kind of method for manufacturing micro-lens, this lenticule is characterized in that in order to the encapsulating light emitting element this method for manufacturing micro-lens may further comprise the steps:
Base material is provided, and this base material has first surface;
A plurality of little, nanostructureds that synthesize single particle size are elaborated be arranged on this first surface;
First surface on this base material and little, nanostructure deposition metal film layer, and make respectively that this is little, nanostructured is partly exposed this metal film layer;
Remove respectively this little, nanostructured, have first die of second surface with formation;
That the microlens material that desire is shaped is sneaked into is little, behind the nano particle, be poured in the second surface of this first die again; And
Behind this microlens material solidification forming, it is taken out, have lenticule little, nano concavo-convex face array with formation.
13, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this is little, nanostructured is elaborated arrangement with gas, liquid.
14, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this arrangement control parameter little, nanostructured is selected from external electrical field, magnetic field, solution soda acid, temperature.
15, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this is little, nanostructured is selected from and is macromolecular material or ceramic material.
16, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this is little, the size of nanostructured is between 0.01 micron to 1 micron.
17, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this is little, nanostructured is arranged with face-centered cubic.
18, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this is little, nanostructured is with six stacked arrangement.
19, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this is little, nanostructured is the arrangement of no gap each other.
20, method for manufacturing micro-lens according to claim 12, wherein, respectively this is little, nanostructured is gapped arrangement each other.
21, method for manufacturing micro-lens according to claim 20 is characterized in that, respectively this clearance distance little, nanostructured is about between 0.001 to 10 micron.
22, method for manufacturing micro-lens according to claim 12 is characterized in that, respectively this step that removes little, nanostructured is removed with Wet-type etching or dry-etching.
23, method for manufacturing micro-lens according to claim 12 is characterized in that, further comprises:
Make second die according to the step that forms this first die, wherein this second die has the 3rd surface of this male and fomale(M﹠F);
With this lenticular the 3rd surperficial pressing, make between this lenticular the 3rd surface with little, nano concavo-convex face array and second die and form the space with little, nano concavo-convex face array towards this second die;
In this space, inject the material that desire forms lens jacket;
After waiting to inject the material solidification shaping in this space, this second die takes out this lenticule certainly, to form the lenticule of sandwich construction.
24, method for manufacturing micro-lens according to claim 23 is characterized in that, each layer microlens material is selected from the material into silica gel, acryl or epoxy resin.
25, method for manufacturing micro-lens according to claim 23 is characterized in that, the refractive index of each layer microlens material is rule or random successively decreasing.
26, method for manufacturing micro-lens according to claim 23 is characterized in that, the refractive index of each layer microlens material is rule or random increasing progressively.
27, method for manufacturing micro-lens according to claim 23 is characterized in that, the thickness of each layer microlens material is between 0.01 millimeter to 10 millimeters.
According to claim 12 or 23 described method for manufacturing micro-lens, it is characterized in that 28, little, the nano-structured particles of this microlens material and quantitative concentrations mix with certain proportion.
29, a kind of light-emitting device is characterized in that, comprising:
Pedestal;
Light-emitting component is located on this pedestal; And
Lenticule be covered with this pedestal encapsulating this light-emitting component, and this lenticule has exiting surface little, the nano concavo-convex face.
30, light-emitting device according to claim 29 is characterized in that, this lenticule is to have microlens layer little, the nano concavo-convex face by multilayer to be formed by stacking.
CN200810134471A 2008-07-23 2008-07-23 Micro lens, manufacturing method of mold insert of micro lens and luminescent device Pending CN101633220A (en)

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CN102563414A (en) * 2010-12-20 2012-07-11 恩普乐股份有限公司 Light emitting device and illumination device
CN103943733A (en) * 2014-03-24 2014-07-23 上海交通大学 Method for manufacturing LED ultra-parallel light source based on vertical nanowires
CN107863440A (en) * 2017-11-28 2018-03-30 西安科锐盛创新科技有限公司 High luminous efficiency led
CN107863441A (en) * 2017-11-28 2018-03-30 西安科锐盛创新科技有限公司 High luminous efficiency LED preparation method and high luminous efficiency LED

Cited By (8)

* Cited by examiner, † Cited by third party
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CN102270725A (en) * 2010-06-01 2011-12-07 展晶科技(深圳)有限公司 Light emitting diode packaging structure
CN102563414A (en) * 2010-12-20 2012-07-11 恩普乐股份有限公司 Light emitting device and illumination device
CN102130236A (en) * 2010-12-31 2011-07-20 北京大学深圳研究生院 Packaging method of LED (light-emitting diode) chip and packaging device
CN103943733A (en) * 2014-03-24 2014-07-23 上海交通大学 Method for manufacturing LED ultra-parallel light source based on vertical nanowires
CN103943733B (en) * 2014-03-24 2016-08-17 上海交通大学 A kind of preparation method of LED hyperparallels light source based on vertical nano-wire
CN107863440A (en) * 2017-11-28 2018-03-30 西安科锐盛创新科技有限公司 High luminous efficiency led
CN107863441A (en) * 2017-11-28 2018-03-30 西安科锐盛创新科技有限公司 High luminous efficiency LED preparation method and high luminous efficiency LED
CN107863441B (en) * 2017-11-28 2020-12-22 嘉兴明禾智能家居用品有限公司 Preparation method of high-luminous-rate LED and high-luminous-rate LED

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