CN101628360A - Vibrating-mirror constant-temperature work system and control method thereof - Google Patents
Vibrating-mirror constant-temperature work system and control method thereof Download PDFInfo
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- CN101628360A CN101628360A CN 200810068398 CN200810068398A CN101628360A CN 101628360 A CN101628360 A CN 101628360A CN 200810068398 CN200810068398 CN 200810068398 CN 200810068398 A CN200810068398 A CN 200810068398A CN 101628360 A CN101628360 A CN 101628360A
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Abstract
The invention relates to the technical field of laser processing, and discloses a vibrating-mirror constant-temperature work system and a control method thereof. The system comprises an internal-circulation subsystem, a radiator, a radiator control unit and an external-circulation subsystem, wherein the internal-circulation subsystem is used to bring out the heat of a vibrating mirror; the radiator control unit is used to control the radiator to start working and allow the radiator to transfer the heat in the internal-circulation subsystem into the external-circulation subsystem when the temperature of the internal-circulation subsystem exceeds a preset range, and controls the radiator to stop working when the temperature of the internal-circulation subsystem is within the preset range; and the external-circulation subsystem is used to release the heat of the internal-circulation subsystem transferred by the radiator into the outside. The embodiment of the invention can provide the vibrating mirror with a work environment smaller in temperature fluctuation.
Description
Technical field
The present invention relates to technical field of laser processing, relate in particular to vibrating-mirror constant-temperature work system and control method thereof.
Background technology
In laser process equipment, usually can use the high-speed vibrating mirror scanning system.The laser beam of laser instrument output is mapped on the galvanometer, and galvanometer carries out high speed swinging by motor-driven under the control of computer system, thereby the control laser beam is realized the processing of diverse location in the certain limit.Galvanometer often could guarantee its operating accuracy under constant temperature, yet, owing to high-frequency, its drive motors of high speed deflection can produce heat,, not only can have influence on the operating accuracy of galvanometer if can not in time heat be shed, also can influence its service life.
In the prior art, adopting the single channel water circulation system usually is the galvanometer heat radiation, promptly directly looses to extraneous by the heat of single channel water circulation system with galvanometer.Though this method can be reached for the purpose of galvanometer heat radiation, but cause damage during owing to the cooling-water machine frequent starting in the water circulation system easily, therefore it is more limited (usually in 4 ℃ to control accuracy of temperature, be up to ± 1 ℃), thereby make that the temperature fluctuation of working environment of galvanometer is also relatively mutually big, thereby influence its operating accuracy.
Summary of the invention
The embodiment of the invention provides vibrating-mirror constant-temperature work system and control method thereof, can provide work environment smaller in temperature fluctuation for galvanometer.
A kind of vibrating-mirror constant-temperature work system comprises interior cycle subsystem, radiator, radiator control module and outer circulation subsystem:
Cycle subsystem is used for the heat of described galvanometer is taken out of in described;
When described radiator control module is used for that the temperature of cycle subsystem exceeds predetermined scope in described, controls described radiator and start working, described radiator is delivered to the heat in the cycle subsystem in described in the described outer circulation subsystem; And when the temperature of cycle subsystem belongs to described predetermined scope in described, control described radiator and quit work;
The heat that described outer circulation subsystem is used for interior cycle subsystem that described radiator is transmitted is discharged into the external world.
A kind of control method of vibrating-mirror constant-temperature work system comprises:
The temperature of cycle subsystem in detecting, described interior cycle subsystem is used for the heat of described galvanometer is taken out of;
Whether the temperature of judging described interior cycle subsystem exceeds predetermined scope, if, then control radiator and start working, described radiator is delivered to the heat in the cycle subsystem in described in the outer circulation subsystem, if not, then controlling described radiator quits work;
By described outer circulation subsystem the heat of the interior cycle subsystem that described radiator transmitted is discharged into the external world.
Adopt the mode of secondary cycle cooling in the embodiment of the invention, cycle subsystem is taken the heat of galvanometer out of in utilizing, and the temperature in interior cycle subsystem is when exceeding predetermined scope, the control radiator is delivered to the outer circulation subsystem with the heat of interior cycle subsystem, by the outer circulation subsystem heat of the interior cycle subsystem that radiator transmitted is discharged into the external world again.Owing to be the heat of interior cycle subsystem to be delivered to the outer circulation subsystem in the embodiment of the invention, thereby can realize that internal cycle subsystem carries out the temperature control of degree of precision, thereby provide work environment smaller in temperature fluctuation for galvanometer by radiator.
Description of drawings
Fig. 1 is the structure chart of vibrating-mirror constant-temperature work system embodiment one of the present invention;
Fig. 2 is the structure chart of vibrating-mirror constant-temperature work system embodiment two of the present invention.
The specific embodiment
The embodiment of the invention provides a kind of vibrating-mirror constant-temperature work system.The embodiment of the invention also provides the control method of this system, below is elaborated respectively.
Vibrating-mirror constant-temperature work system embodiment one of the present invention: with reference to figure 1, the vibrating-mirror constant-temperature work system of present embodiment comprises interior cycle subsystem 110, radiator 120, radiator control module 130 and outer circulation subsystem 140, wherein:
Interior cycle subsystem 110 is used for the heat of described galvanometer 150 is taken out of.
Radiator control module 130 is used for when the temperature of interior cycle subsystem 110 exceeds predetermined scope, and control radiator 120 is started working, and radiator 120 is delivered to the heat in the interior cycle subsystem 110 in the outer circulation subsystem 140; And when the temperature of interior cycle subsystem 110 belonged to described predetermined scope, control radiator 120 quit work.
The heat that outer circulation subsystem 140 is used for interior cycle subsystem 110 that radiator 120 is transmitted is discharged into the external world.
Adopt the mode of secondary cycle cooling in the embodiment of the invention, cycle subsystem is taken the heat of galvanometer out of in utilizing, and the temperature in interior cycle subsystem is when exceeding predetermined scope, the control radiator is delivered to the outer circulation subsystem with the heat of interior cycle subsystem, by the outer circulation subsystem heat of the interior cycle subsystem that radiator transmitted is discharged into the external world again.Owing to be the heat of interior cycle subsystem to be delivered to the outer circulation subsystem in the embodiment of the invention, thereby can realize that internal cycle subsystem carries out the temperature control of degree of precision, thereby provide work environment smaller in temperature fluctuation for galvanometer by radiator.
Vibrating-mirror constant-temperature work system embodiment two of the present invention: in the present embodiment, interior cycle subsystem and outer circulation subsystem all adopt water passage circulation system, and radiator adopts the semiconductor heat-dissipating sheet; With reference to figure 2, the vibrating-mirror constant-temperature work system of present embodiment comprises cycle subsystem 210 in the water route, semiconductor heat-dissipating sheet 220, first temperature sensor 230, semiconductor heat-dissipating sheet control module 240, water route outer circulation subsystem 250, second temperature sensor 270 and cooling-water machine controller 280, wherein:
Semiconductor heat-dissipating sheet 220 can be set at the outer wall of minitype water tank 212, the temperature that semiconductor heat-dissipating sheet control module 240 is detected according to first temperature sensor 230 is controlled the duty of semiconductor heat-dissipating sheet 220: when first temperature sensor, 230 detected temperature exceed predetermined scope, control semiconductor heat-dissipating sheet 220 is started working, and semiconductor heat-dissipating sheet 220 is delivered to the heat in the minitype water tank 212 in the water route outer circulation subsystem 250; When first temperature sensor, 230 detected temperature belong to predetermined scope, then control semiconductor heat-dissipating sheet 220 and quit work.Wherein, described preset range can be determined according to the ideal operation temperature of galvanometer and to the control accuracy of cycle subsystem in the water route, for example if the ideal operation temperature of galvanometer is 20 ℃, be ± 0.1 ℃ to the control accuracy of cycle subsystem in the water route, then this scope is 19.9 ℃～20.1 ℃.
Water route outer circulation subsystem 250 comprises cooling water flow pipeline 251 and cooling-water machine 252, and the heat of cycle subsystem 210 is taken out of in the water route that cooling water flow pipeline 251 can be transmitted the diffusing sheet 220 of semiconductor heat, rejects heat to the external world by cooling-water machine 252.Wherein, cooling-water machine 252 can adopt air-cooled or the water-cooled cooling-water machine.
The temperature that cooling-water machine controller 280 is detected according to second temperature sensor 270 is controlled the duty of cooling-water machine 252: when second temperature sensor, 270 detected temperature exceed predetermined scope, control cooling-water machine 252 is started working, and makes cooling-water machine 252 that the heat in the water route outer circulation subsystem 250 is discharged into the external world; When second temperature sensor, 270 detected temperature belong to predetermined scope, then control cooling-water machine 252 and quit work.Wherein, described preset range can be determined according to the ideal operation temperature of galvanometer and to the control accuracy of water route outer circulation subsystem, for example if the ideal operation temperature of galvanometer is 20 ℃, be ± 1 ℃ to the control accuracy of water route outer circulation, then this scope is 19 ℃～21 ℃.
In the present embodiment, adopt the semiconductor heat-dissipating sheet that the heat of cycle subsystem in the water route is delivered in the water route outer circulation subsystem, the reaction of semiconductor heat-dissipating sheet is relatively sensitive, helps further improving to cycle subsystem control accuracy of temperature in the water route (present embodiment scheme can reach ± 0.1 ℃ or higher).In the present embodiment, can provide temperature fluctuation less working environment for galvanometer by cycle subsystem in the water route, for water route outer circulation subsystem, as long as the heat that cycle subsystem in the water route can be transmitted in time is discharged into extraneous just passable, thereby can be less relatively, thereby can avoid the frequent starting of cooling-water machine to the control accuracy of water route outer circulation subsystem.
In addition, in the present embodiment, the assembly space of semiconductor heat-dissipating sheet is less, and the easier main frame inside that is integrated in can conserve space.And, in the water route, adopt minitype water tank in the present embodiment in the cycle subsystem, also help the water route and concentrate heat radiation.
The present invention also provides the control method of corresponding vibrating-mirror constant-temperature work system, and the present embodiment method comprises:
The temperature of cycle subsystem in A1, the detection.Cycle subsystem is used for the heat of galvanometer is taken out of in described.
A2, judge described in the temperature of cycle subsystem whether exceed predetermined scope, if, then control radiator and start working, described radiator is delivered to the heat in the interior cycle subsystem in the outer circulation subsystem, if not, then control radiator and quit work.
A3, the heat of the interior cycle subsystem that described radiator transmitted is discharged into the external world by described outer circulation subsystem.
In embodiments of the present invention, the outer circulation subsystem can adopt the water passage circulation system that comprises cooling water flow pipeline and cooling-water machine, and at this moment, A3 can comprise:
Detect the temperature of described outer circulation subsystem;
Whether the temperature of judging described outer circulation subsystem exceeds predetermined scope, if, then control cooling-water machine and start working, make cooling-water machine that the heat of the interior cycle subsystem that radiator transmitted is delivered to the external world.
The control method of vibrating-mirror constant-temperature work system of the present invention can adopt the vibrating-mirror constant-temperature work system that is provided among the vibrating-mirror constant-temperature work system embodiment two of the present invention to realize.
In various embodiments of the present invention, the cooling fluid in the water route in cycle subsystem or the water route outer circulation subsystem can select for use the specific heat system big, the liquid pure water that price is lower.
More than vibrating-mirror constant-temperature work system and control method thereof that the embodiment of the invention provided are described in detail, used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that all can change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (10)
1, a kind of vibrating-mirror constant-temperature work system is characterized in that, comprises interior cycle subsystem, radiator, radiator control module and outer circulation subsystem:
Cycle subsystem is used for the heat of described galvanometer is taken out of in described;
When described radiator control module is used for that the temperature of cycle subsystem exceeds predetermined scope in described, controls described radiator and start working, described radiator is delivered to the heat in the cycle subsystem in described in the described outer circulation subsystem; And when the temperature of cycle subsystem belongs to described predetermined scope in described, control described radiator and quit work;
The heat that described outer circulation subsystem is used for interior cycle subsystem that described radiator is transmitted is discharged into the external world.
2, the system as claimed in claim 1 is characterized in that, described in cycle subsystem be to comprise cycle subsystem in the water route of constant temperature water pipe and water tank, described constant temperature water pipe is brought into the heat of described galvanometer in the described water tank.
3, the system as claimed in claim 1 is characterized in that, described outer circulation subsystem is the water route outer circulation subsystem that comprises cooling water flow pipeline and cooling-water machine.
4, system as claimed in claim 3, it is characterized in that, described work system also comprises the cooling-water machine controller, be used for when the temperature of described water route outer circulation subsystem exceeds predetermined scope, control described cooling-water machine and start working, make described cooling-water machine that the heat in the described water route outer circulation subsystem is discharged into the external world.
As each described system of claim 1 to 4, it is characterized in that 5, described radiator is the semiconductor heat-dissipating sheet.
6, a kind of control method of vibrating-mirror constant-temperature work system is characterized in that, comprising:
The temperature of cycle subsystem in detecting, described interior cycle subsystem is used for the heat of described galvanometer is taken out of;
Whether the temperature of judging described interior cycle subsystem exceeds predetermined scope, if, then control radiator and start working, described radiator is delivered to the heat in the cycle subsystem in described in the outer circulation subsystem, if not, then controlling described radiator quits work;
By described outer circulation subsystem the heat of the interior cycle subsystem that described radiator transmitted is discharged into the external world.
7, method as claimed in claim 6 is characterized in that, described in cycle subsystem be to comprise cycle subsystem in the water route of constant temperature water pipe and water tank, described constant temperature water pipe is brought into the heat of described galvanometer in the described water tank.
8, method as claimed in claim 6 is characterized in that, described outer circulation subsystem is the water route outer circulation subsystem that comprises cooling water flow pipeline and cooling-water machine.
9, method as claimed in claim 8 is characterized in that, by described outer circulation subsystem the heat of the interior cycle subsystem that described radiator transmitted is discharged into the external world and comprises:
Detect the temperature of described outer circulation subsystem;
Whether the temperature of judging described outer circulation subsystem exceeds predetermined scope, if, then control described cooling-water machine and start working, make described cooling-water machine that the heat of the interior cycle subsystem that described radiator transmitted is discharged into the external world.
As each described method of claim 6 to 9, it is characterized in that 10, described radiator specifically is the semiconductor heat-dissipating sheet.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200810068398 CN101628360A (en) | 2008-07-14 | 2008-07-14 | Vibrating-mirror constant-temperature work system and control method thereof |
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| CN 200810068398 CN101628360A (en) | 2008-07-14 | 2008-07-14 | Vibrating-mirror constant-temperature work system and control method thereof |
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| CN101628360A true CN101628360A (en) | 2010-01-20 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107661980A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | Environment control method in 3D printing device and 3D printing device |
| CN108803007A (en) * | 2017-10-31 | 2018-11-13 | 成都理想境界科技有限公司 | One mode control method and laser scanning device |
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2008
- 2008-07-14 CN CN 200810068398 patent/CN101628360A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107661980A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | Environment control method in 3D printing device and 3D printing device |
| CN108803007A (en) * | 2017-10-31 | 2018-11-13 | 成都理想境界科技有限公司 | One mode control method and laser scanning device |
| CN108803007B (en) * | 2017-10-31 | 2021-01-01 | 成都理想境界科技有限公司 | Mode control method and laser scanning device |
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Application publication date: 20100120 |