CN101614755A - Integrally formed micro-stretching type spring needle - Google Patents
Integrally formed micro-stretching type spring needle Download PDFInfo
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- CN101614755A CN101614755A CN 200810128402 CN200810128402A CN101614755A CN 101614755 A CN101614755 A CN 101614755A CN 200810128402 CN200810128402 CN 200810128402 CN 200810128402 A CN200810128402 A CN 200810128402A CN 101614755 A CN101614755 A CN 101614755A
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Abstract
A kind of integrally formed micro-stretching type spring needle comprises a body, a spring structure and a probe, and wherein, described body is a conductor, and electrically connects described probe, described body is corresponding with an end profile of described probe, and relative pivot bush unit; Described spring structure is located between described probe and the described body, and the two ends of described spring structure are connected with described probe with described body respectively, and described spring structure can be done drawing action.Described probe is a conductor, and electrically connects described body.
Description
Technical field
The present invention relates to a kind of stretching type spring needle, specifically, is a kind of integrally formed micro-stretching type spring needle.
Background technology
At first see also Figure 15, Figure 15 is known miniature compression pogo-pin structure stereographic map.As shown in the figure, the miniature compression spring needle that known photolithographic processes is made, it comprises a body (82) and places spring (84) within the described body (82), and the free-ended probe (85) that links described spring (84).In use, also oppress the measurement contact of a chip slightly with described probe (85) contact, because described probe (85) is linked to spring (84), described spring (84) is compressed when the measurement contact of probe (85) contact chip, thus make described probe (85) can with the measurement contact of described chip more driving fit contact.Yet, this elongated compression elastic body is excessive because of the height to width ratio of spring, structural stability is not good when causing the compression of compression elastomeric resilient easily, when described spring (84) is subjected to a micro-side force, to make the collapse of described spring (84) side direction crooked, and make described spring (84) and impaired even stuck can't the action of body (82) interior sidewall surface friction, and further influence the stability that electrically conducts.
Be to solve the structural stability problem of slender type compression spring needle, after have a drawing spring can avoid aforesaid drawbacks.Now see also Figure 16, Figure 16 is known micro-stretching type spring structure stereographic map.As shown in the figure, known micro-stretching type spring needle comprises a probe (86) ring set and is linked to described probe (86) peripheral and an end and the fixedly connected power spring (87) of described probe (86).In use, the free end of described power spring (87) is fixed on the pedestal (not being shown among the figure), when the measurement contact of probe (86) contact chip, described power spring (87) extends along its length direction, even and described probe (86) is when contacting the measurement contact of described chip with the angle of inclination, because described power spring (87) is not a compression and can avoid not causing because of structural stability is good the problem of side direction collapse deformation fully, is applicable to the application scenario that needs the high-density arrangement spring probe.
Yet,, can't become single needle body part and use for assembling because this known micro-stretching type spring is for whole batch of ground of array type makes and is installed in addition on the pedestal.
Therefore known micro-stretching type spring exists above-mentioned all inconvenience and problem.
Summary of the invention
Purpose of the present invention is to propose a kind of integrally formed micro-stretching type spring needle that uses for assembling with single needle body part.
For achieving the above object, technical solution of the present invention is:
A kind of integrally formed micro-stretching type spring needle comprises a body, a spring structure and a probe, wherein,
Described body is a conductor, and electrically connects described probe, and described body is corresponding with an end profile of described probe, and relative pivot bush unit;
Described spring structure is located between described probe and the described body, and the two ends of described spring structure are connected with described probe with described body respectively, and described spring structure can be done drawing action.
Described probe is a conductor, and electrically connects described body.
Integrally formed micro-stretching type spring needle of the present invention can also be further achieved by the following technical measures.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure comprises an insulation course at least, electric signal can't be transmitted by described spring structure because of described insulation course blocking-up, and a deflection lead is set in addition between described probe and the described body to electrically connect described probe and described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said insulation course are positioned at the two ends or the inner ad-hoc location of described spring structure.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are non-conducting material, and a deflection lead are set in addition to electrically connect described probe and described body between described probe and the described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are the elastic construction that possesses at least one bending.
Aforesaid integrally formed micro-stretching type spring needle, the profile of wherein said body and described probe is the two forked of correspondence mutually, and the relative socket of two forks of described body and described probe, and push up respectively in described pair of fork that one connects a slideable base, the cross section of described sliding bottom is corresponding with two fork external forms of described body and described probe respectively; Described spring structure is between described probe and the two forks of described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said body and described probe are shaft-like bending structure and spacing parallel arranging; The two ends of described spring structure link described body and described probe respectively.
Aforesaid integrally formed micro-stretching type spring needle, wherein said body respectively is connected a Movable loop with described probe, and described Movable loop comprises a movable span, and described body and described probe can be placed in the described movable span mutually.
Aforesaid integrally formed micro-stretching type spring needle wherein also comprises the correspondence position that a protective sleeve is located on described spring structure, and described protective sleeve and described spring structure form at interval, and links fixing with described body or described probe.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use manufacture of semiconductor to make.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use electroforming or electroless plating processing procedure to make.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure is made up of a plurality of spring assemblies.
A kind of integrally formed micro-stretching type spring needle comprises a body, a spring structure and a probe, wherein,
Described body is a conductor, and electrically connects described probe, and described body is provided with a holding part;
Described probe portion in one end of described spring structure and the holding part of described body is connected, and the other end is connected with the holding part wall of described body, and described spring structure can be done stretching and moves;
Described probe is a conductor, and electrically connects described body, and described probe portion places in the described holding part.
Integrally formed micro-stretching type spring needle of the present invention can also be further achieved by the following technical measures.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure comprises an insulation course at least, electric signal can't be transmitted by described spring structure because of described insulation course blocking-up, and a deflection lead is set in addition between described probe and the described body to electrically connect described probe and described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said insulation course are positioned at described spring structure and outside end points or the interior location that is connected.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are non-conducting material, and a deflection lead are set in addition to electrically connect described probe and described body between described probe and the described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are the elastic construction that possesses at least one bending.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure is made up of a plurality of spring assemblies.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use manufacture of semiconductor to make.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use electroforming or electroless plating processing procedure to make.
After adopting technique scheme, integrally formed micro-stretching type spring needle of the present invention has the following advantages:
1. can directly pick and place assembling uses and need not accurate assemble.
2. can avoid producing stray capacitance or inductive effect influences the telecommunication quality.
Description of drawings
Fig. 1 is the first embodiment of the invention stereographic map.
Fig. 2 is the first embodiment of the invention sectional view.
Fig. 3 is the second embodiment of the invention stereographic map.
Fig. 4 is the third embodiment of the invention sectional view.
Fig. 5 is the fourth embodiment of the invention stereographic map.
Fig. 6 is the fifth embodiment of the invention stereographic map.
Fig. 7 is the sixth embodiment of the invention stereographic map.
Fig. 8 is the seventh embodiment of the invention sectional view.
Fig. 9 is the eighth embodiment of the invention sectional view.
Figure 10 is the spring structure synoptic diagram of the different profiles of the present invention.
Figure 11 is the use synoptic diagram of first embodiment of the invention.
Figure 12 is a fabrication steps synoptic diagram of the present invention.
Figure 13 changes the structural representation of insulation course position for seventh embodiment of the invention.
Figure 14 changes the structural representation of insulation course position for eighth embodiment of the invention.
Figure 15 is known miniature compression pogo-pin structure stereographic map.
Figure 16 is known micro-stretching type spring structure stereographic map.
Embodiment
Below in conjunction with embodiment and accompanying drawing thereof the present invention is illustrated further.
Now see also Fig. 1 and Fig. 2, Fig. 1 is the first embodiment of the invention stereographic map, and Fig. 2 is the first embodiment of the invention sectional view.As shown in the figure, in the integrally manufactured shaping of photolithographic processes, described body (10) can be shaft-like and have electric conductivity, it can be any conductive material and is shaped, metal for example, alloy, compound substance etc., the one end links a part and is wide slideable base (11) than described body (10), with the present embodiment is example, it is two forked that described body (10) is, and its pair fork links described slideable base (11), and distance is a holding part (12) between the two forks of described body (10), wherein, the cross section of described slideable base (11) becomes the I font, and two wide connect the two forks of described body (10) respectively, and the narrow portion of described slideable base (11) is slightly larger than described body (10) double fork lever body width.
Described spring structure (20) can be any tortuous profile, with the present embodiment is example, described spring structure (20) is made of the conductive material that has a plurality of bendings at length direction, for example metal, alloy, compound substance etc., its external diameter is corresponding with described holding part (12) and can place in the described holding part (12), and it is fixedly connected that the end face of first end of described spring (20) and described slideable base (11) forms conduction.
Described probe (30) can be shaft-like and have electric conductivity, it can be any conductive material and is shaped, metal for example, alloy, compound substance etc., with the present embodiment is example, described probe (30) is corresponding two forked with the profile of described body (10), it also comprises a slideable base (31) and a holding part (32), and described probe (30) is relative with the two fork end of described body (10) and along its major axis rotate 90 the degree and with described body (10) fit, and described spring structure (20) is also placed in the described holding part (32), and second end of described spring structure (20) is connected with described slideable base (31).
The cross section of described slideable base (31) forms the I font, two wide is connected with the two fork end of described probe (30) respectively, and narrow internal diameter profile of described slideable base (31) is slightly larger than described body (10) double fork lever body external diameter profile, after making described probe (30) and described body (10) fit, can slide relatively.
Please refer to Fig. 3 again, Fig. 3 is the second embodiment of the invention stereographic map.Integrally formed micro-stretching type spring needle of the present invention is light lithography and the integrally manufactured shaping of electroforming processing procedure, place described body (10) and the spring structure (20) in the described probe (30) to be more convenient for discharging in order to make with the etching material, can correspondence position run through and be provided with etching bath (13,33) in the double fork lever body of described body (10) and described probe (30) in described spring structure (20).
Please refer to Fig. 4, Fig. 4 is the third embodiment of the invention sectional view.As shown in the figure, described housing (42) and place described housing (42) inner a spring structure (44) and a probe (46), described housing (42), spring structure (44) and described probe (46) all can conduct electricity and electrically connect, for example metal, alloy, compound substance etc.Wherein, described housing (42) is that an end is open hollow tube; One end of described spring structure (44) is connected with the pipe flange that described housing (42) is opened, and other end extension penetrates in described housing (42) pipe; It is one shaft-like that described probe (46) is, its first end penetrates in the described housing (42) and with described spring structure (44) and is connected, and the length of described probe (46) is greater than the length of described spring structure (44), and makes second end of described probe (46) expose to described housing (42).When described probe (46) and two free ends of described housing (42) are subjected to two electrical contact points to contact compressing respectively, described spring structure (44) in the described housing (42) presents the elastic stretching state, make it provide an elastic restoring force to described probe (46) and described housing (42), make described probe (46) push against corresponding electrical contact point respectively, reach good electrically contact with two free ends of described housing (42).
Please refer to Fig. 5, Fig. 5 is the fourth embodiment of the invention stereographic map.As shown in the figure, described body (52) and the spring structure (54) and the probe (56) that are serially connected with described body (52), wherein, described body (52) and described probe (56) form same structure, with the present embodiment is example, described body (52) and described probe (56) are L-shaped, and described body (52) and described probe (56) are antiparallel and be connected with described spring structure (54) respectively, and described spring structure (54) is placed between described body (52) and the described probe (56).Described body (52) and described probe (56) interconnect the end outside with described spring structure, can be respectively and a clipping ring (522,562) connect, wherein, described clipping ring (522,562) be equipped with a movable span, make described clipping ring (522,562) by described movable span be sheathed on described body (52) and described probe (56).Identical with the third embodiment of the present invention, when described probe (56) and two free ends of described housing (52) are subjected to two electrical contact points to contact compressing respectively, described spring structure (54) presents the elastic stretching state, and provide an elastic restoring force to described probe (56) and described housing (52), make the described probe (56) and the free end of described housing (52) push against described two electrical contact points respectively, and therefore the excellent electrical property contact is provided.
Please refer to Fig. 6, Fig. 6 is the fifth embodiment of the invention stereographic map.As shown in the figure; the body of described serial connection (52), spring structure (54) and described probe (56) are in the correspondence position of described spring structure (54); but ring set one protective sleeve (57); and its internal diameter is slightly larger than body (52), spring structure (54) and the described probe (56) of serial connection, and described protective sleeve (57) links fixing with described body (52).Described protective sleeve (57) can avoid described spring structure (54) to cause damage when being used by gripping.
Please refer to Fig. 7, Fig. 7 is the sixth embodiment of the invention stereographic map.As shown in the figure; described protective sleeve (57) can be equipped with a plurality of etch-holes (572) in the correspondence position of described spring structure (54); the easier etching material that removes was finished processing procedure to discharge needle body when wherein, described etch-hole (572) can supply to make described spring structure (54).In addition, aforementioned described protective sleeve (57) also can only be contained the spring structure (not shown).
Please refer to Fig. 8, Fig. 8 is the seventh embodiment of the invention sectional view.As shown in the figure, the structure of described body (10), spring structure (20) and described probe (30) is identical with annexation and first embodiment of the invention, precisely because be characterised in that the connection contact of described spring structure (20) and described probe (30) coats an insulation course (62) both are insulated fully, and the surface of described probe and described body (10) electrically connects with a deflection lead (64) in addition.Thus, in use, can avoid the output of described probe (30) conducting electrical signals to go into no longer and import described body (10) into via described spring structure (30), but get lead (64) and import described body (10) by described scratching, so, when present embodiment is applied to the high frequency measurement, can effectively reduce stray inductance or inductive effect that described spring structure (20) is produced.In like manner, described insulation course (62) also can be located at the contact that is connected of described body (10) and described spring structure (20), can make electric signal can't pass through described spring structure (20) equally, and only get lead (64) transmission of electric signals with described the scratching of described probe (30) by connecting described body (10); In addition, as shown in figure 13, Figure 13 changes the structural representation of insulation course position for seventh embodiment of the invention.As shown in the figure, described insulation course (66) also can be located in the described spring structure (20), same electric signal capable of blocking makes it not by described spring structure (20), and only gets lead (64) transmission of electric signals by connecting described body (10) with described the scratching of described probe (30).
Please refer to Fig. 9, Fig. 9 is the eighth embodiment of the invention sectional view.As shown in the figure, described body (42), the connecting structure of spring structure (44) and described probe (46) is identical with third embodiment of the invention, it is characterized in that the described probe (46) and the coupling position of described spring structure (44) are provided with an insulation course (63), and the surface in described probe (46) and described body (42) connects with a deflection lead (65) in addition, and the output that can avoid described probe (46) conducting electrical signals is gone into and is no longer imported described body (42) into via described spring structure (44), but import described body (42) by described deflection lead (65), so, when present embodiment is applied to the high frequency measurement, can effectively reduce stray inductance or inductive effect that described spring structure (44) is produced.Equally, described insulation course (63) also can be located at the contact that is connected of described body (42) and described spring structure (44), can make electric signal can't pass through described spring structure (44) equally, and only get lead (65) transmission of electric signals with described the scratching of described probe (46) by connecting described body (42); In addition, as shown in figure 14, described insulation course (67) also can be located in the described spring structure (44), and same electric signal capable of blocking makes it not by described spring structure (44), and only (described the scratching of (46) got lead (65) transmission of electric signals with described probe by connecting described body (42).
And aforementioned each spring structure (20,44,54) can be random appearance, for example continuous S-shaped, zigzag, C shape, S shape etc., and as shown in figure 10, Figure 10 is the spring structure synoptic diagram of the different profiles of the present invention.In use, please refer to Figure 11, Figure 11 is the use synoptic diagram of first embodiment of the invention.As shown in the figure, described body (10) is connected in one and electrically measures contact (arrow indication position among the figure); Wherein, when probe (30) contacts another and electrically measures contact, described body (10) and described probe (30) are electrically measured the contacts pressure that pushes against and exert pressure by two respectively, the spring structure (20) that is linked to this moment between described body (10) and the described probe (30) forms extended state, and provide an elastic-restoring force to make described body (10) and described probe (30) electrically measure more driving fit of contact with described two respectively, and promote electrically contact quality.And because described slideable base (11,31) when described body (10) and described probe (30) relative motion, limit described probe (30) described body (10) is carried out the side direction activity, so even described probe (30) is not vertical the contact with the measurement contact surface of described chip, described spring structure (20) also only extends along its axially-movable, and avoids the influence of abnormal side direction interference to described spring structure (20).
Preferred embodiment of the present invention is all finished with photolithographic processes, fabrication steps for each embodiment of illustrating further the integrally formed micro-stretching type spring needle of aforementioned the present invention, please refer to Figure 12, Figure 12 is a fabrication steps synoptic diagram of the present invention, and it comprises the following step:
(A) finishing the first photolithographic processes step, is on a substrate (71), forms an etch layer (721) earlier, and described etch layer (721) is removed a given configuration with photolithographic processes.
(B) in the part of the described given configuration of described etch layer (721), form the part (731) of the micro-stretching type spring needle that an one is shaped with processing procedures such as electroforming or vapour depositions.
(C) repeating step (A) and (B) plural number, wherein, in the photolithography step of a step of every execution (C), can adopt with identical or different light shield and finish, make and finish the part (732) (733) that each step (C) can be finished the etch layer (722) (723) (724) (725) and the described integrally formed micro-stretching type spring needle corresponding with described etch layer (722) (723) (724) (725) of another given configuration, and make the synthetic integrally formed micro-stretching type spring needle (73) in part (731) (732) (733) of each integrally formed micro-stretching type spring needle.
(D) remove each etch layer (722) (723) (724) (725), described integrally formed micro-stretching type spring needle (73) is separated with described substrate (71).
Other embodiments of the invention can be finished its corresponding contour structures with structure with a plurality of different light shields according to its profile.
And, the spring structure of aforementioned all embodiment indications (20) (44) (54) is not limited to single, in other words, it can comprise a plurality of described spring structures (20) (44) (54), thus, except that can according to each topology requirement being connected with a plurality of spring structures between described body (10) (52) or described housing (42) and the described probe (30) (46) (56), also reaching the effect of reinforcement described spring structure (20) (44) (54).
In addition, the described body (10) (52) of previous embodiment, described spring structure (20) (44) (54) and described probe (30) (46) (56) can identical material or unlike material make, to reach different results of use, for example, can select ductility can preferable metal form described spring structure, and select electric conductivity, form described body (10) (52) and described probe (30) (46) (56) than the material of tool rigidity.For example, described body (10) (52) and described probe (30) (46) (56) are copper, and described spring structure (20) (44) (54) is a nickel alloy.
Also having the electrical connection when described probe (30) (46) (56) and described body (10) (52) or described housing (42) is by described deflection lead (64) (65), described spring structure (20) (44) (54) is finished with non-conductive material, insulation course (62) (63) (66) (67) need not be set again, so, can reach the purpose of simplifying structure or processing procedure.
Above embodiment is only for the usefulness that the present invention is described, but not limitation of the present invention, person skilled in the relevant technique under the situation that does not break away from the spirit and scope of the present invention, can also be made various conversion or variation.Therefore, all technical schemes that are equal to also should belong to category of the present invention, should be limited by each claim.
The element numbers explanation
(10) body
(11) slideable base
(12) holding part
(20) spring structure
(30) probe
(31) slideable base
(42) housing
(44) spring structure
(46) probe
(52) body
(54) spring structure
(56) probe
(57) protective sleeve
(522) clipping ring
(562) clipping ring
(572) etch-hole
(62) insulation course
(63) insulation course
(64) deflection lead
(65) scratch and get lead
(66) insulation course
(67) insulation course
(82) body
(84) spring
(85) probe
(86) probe
(87) described power spring
Claims (20)
1. an integrally formed micro-stretching type spring needle comprises a body, and a spring structure and a probe is characterized in that:
Described body is a conductor, and electrically connects described probe, and described body is corresponding with an end profile of described probe, and relative pivot bush unit;
Described spring structure is located between described probe and the described body, and the two ends of described spring structure are connected with described probe with described body respectively, and described spring structure can be done drawing action.
Described probe is a conductor, and electrically connects described body.
2. integrally formed micro-stretching type spring needle as claimed in claim 1 is characterized in that described spring structure comprises an insulation course at least, and a deflection lead is set in addition to electrically connect described probe and described body between described probe and the described body.
3. integrally formed micro-stretching type spring needle as claimed in claim 2 is characterized in that, described insulation course is positioned at the two ends or the inner ad-hoc location of described spring structure.
4. integrally formed micro-stretching type spring needle as claimed in claim 1 is characterized in that, described spring structure is a non-conducting material, and a deflection lead is set in addition to electrically connect described probe and described body between described probe and the described body.
5. as claim 1,2 or 4 described integrally formed micro-stretching type spring needles, it is characterized in that described spring structure is the elastic construction that possesses at least one bending.
6. integrally formed micro-stretching type spring needle as claimed in claim 1, it is characterized in that, the profile of described body and described probe is the two forked of correspondence mutually, and the relative socket of two forks of described body and described probe, and push up respectively in described pair of fork that one connects a sliding bottom, the cross section of described sliding bottom is corresponding with two fork external forms of described body and described probe respectively; Described spring structure is between described probe and the two forks of described body.
7. integrally formed micro-stretching type spring needle as claimed in claim 1 is characterized in that, described body and described probe are shaft-like bending structure and spacing parallel arranging; The two ends of described spring structure link described body and described probe respectively.
8. integrally formed micro-stretching type spring needle as claimed in claim 7, it is characterized in that, described body respectively is connected a Movable loop with described probe, and described Movable loop comprises a movable span, and described body and described probe can be placed in the described movable span mutually.
9. integrally formed micro-stretching type spring needle as claimed in claim 1; it is characterized in that; also comprise the correspondence position that a protective sleeve is located on described spring structure, described protective sleeve and described spring structure form at interval, and link fixing with described body or described probe.
10. as claim 1,2 or 4 described integrally formed micro-stretching type spring needles, it is characterized in that described integrally formed micro-stretching type spring needle is to use manufacture of semiconductor to make.
11., it is characterized in that described integrally formed micro-stretching type spring needle is to use electroforming or electroless plating processing procedure to make as claim 1,2 or 4 described integrally formed micro-stretching type spring needles.
12., it is characterized in that described spring structure is made up of a plurality of spring assemblies as claim 1,2 or 4 described integrally formed micro-stretching type spring needles.
13. an integrally formed micro-stretching type spring needle comprises a body, a spring structure and a probe is characterized in that:
Described body is a conductor, and electrically connects described probe, and described body is provided with a holding part;
Described probe portion in one end of described spring structure and the holding part of described body is connected, and the other end is connected with the holding part wall of described body, and described spring structure can be done stretching and moves;
Described probe is a conductor, and electrically connects described body, and described probe portion places in the described holding part.
14. integrally formed micro-stretching type spring needle as claimed in claim 13 is characterized in that described spring structure comprises an insulation course at least, and a deflection lead is set in addition to electrically connect described probe and described body between described probe and the described body.
15. integrally formed micro-stretching type spring needle as claimed in claim 14 is characterized in that, described insulation course is positioned at described spring structure and outside end points or the interior location that is connected.
16. integrally formed micro-stretching type spring needle as claimed in claim 13 is characterized in that, described spring structure is a non-conducting material, and a deflection lead is set in addition to electrically connect described probe and described body between described probe and the described body.
17., it is characterized in that described spring structure is the elastic construction that possesses at least one bending as claim 13,14 or 16 described integrally formed micro-stretching type spring needles.
18., it is characterized in that described spring structure is made up of a plurality of spring assemblies as claim 13,14 or 16 described integrally formed micro-stretching type spring needles.
19., it is characterized in that described integrally formed micro-stretching type spring needle is to use manufacture of semiconductor to make as claim 13,14 or 16 described integrally formed micro-stretching type spring needles.
20., it is characterized in that described integrally formed micro-stretching type spring needle is to use electroforming or electroless plating processing procedure to make as claim 13,14 or 16 described integrally formed micro-stretching type spring needles.
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| CN 200810128402 CN101614755B (en) | 2008-06-24 | 2008-06-24 | Integrative formed micro-stretching type spring needle |
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|---|---|---|---|
| CN 200810128402 CN101614755B (en) | 2008-06-24 | 2008-06-24 | Integrative formed micro-stretching type spring needle |
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| CN101614755B CN101614755B (en) | 2013-06-26 |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798741A (en) * | 2011-05-27 | 2012-11-28 | 旺矽科技股份有限公司 | Spring type miniature high-frequency probe |
| CN104865424A (en) * | 2014-02-24 | 2015-08-26 | 旺矽科技股份有限公司 | Probe device with spring sleeve type probe |
| CN104897934A (en) * | 2014-01-28 | 2015-09-09 | 旺矽科技股份有限公司 | Spring probe |
| CN105074475A (en) * | 2013-07-19 | 2015-11-18 | 黄东源 | Spring contact |
| CN107817369A (en) * | 2016-09-12 | 2018-03-20 | 中华精测科技股份有限公司 | Slide rail type probe |
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