CN101608301A - Production line of continuous vacuum plasma evaporation metal composite material - Google Patents
Production line of continuous vacuum plasma evaporation metal composite material Download PDFInfo
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- CN101608301A CN101608301A CNA2009100318009A CN200910031800A CN101608301A CN 101608301 A CN101608301 A CN 101608301A CN A2009100318009 A CNA2009100318009 A CN A2009100318009A CN 200910031800 A CN200910031800 A CN 200910031800A CN 101608301 A CN101608301 A CN 101608301A
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Abstract
The present invention relates to the metal coating field, especially a kind of production line of continuous vacuum plasma evaporation metal composite material, has vacuum chamber, vacuum chamber comprises entrance, process section and outlet section, process section comprises import lock section successively, heating is the section of taking out in advance, reverse sputtering decontamination section, the ionic fluid activation section, plasma body composite log and outlet lock section, import lock section is provided with the import vacuum lock, the heating section of taking out in advance is provided with heating system and exhaust system, reverse sputtering decontamination section is provided with the reverse sputtering decontamination system, the ionic fluid activation section is provided with the ionic fluid activation system, the plasma body composite log is provided with vacuum-evaporation ion composite system, inlet system and exhaust system, outlet lock section is provided with the outlet vacuum lock, and vacuum-evaporation ion composite system is provided with two compound chambers of evaporation.Advantage of the present invention is to have reduced energy consumption, has improved compounding efficiency.
Description
Technical field
The present invention relates to the metal coating field, especially a kind of production line of continuous vacuum plasma evaporation metal composite material.
Background technology
At present, in existing technology, ion plating makes Coating Materials be evaporated to metallic vapor under vacuum condition exactly, between evaporation source and workpiece, add a voltage, make between workpiece and evaporation source and produce glow discharge, the metallic vapor atom is ionized in the glow discharge electric field and is the metal positive ion, and the metal positive ion flies to workpiece surface, formation of deposits film on workpiece surface at a high speed under electric field action.Yet existing technology is difficult for long-time stable equilibrium evaporation, and the speed of plated film is slower.
Summary of the invention
The technical problem to be solved in the present invention is: shortcoming and deficiency in order to solve above-mentioned existence provide a kind of production line of continuous vacuum plasma evaporation metal composite material.
The technical solution adopted for the present invention to solve the technical problems is: a kind of production line of continuous vacuum plasma evaporation metal composite material, has entrance, process section and outlet section, process section comprises import lock section successively, heating is the section of taking out in advance, reverse sputtering decontamination section, the ionic fluid activation section, plasma body composite log and outlet lock section, import lock section is provided with the import vacuum lock, the heating section of taking out in advance is provided with heating system and exhaust system, reverse sputtering decontamination section is provided with the reverse sputtering decontamination system, the ionic fluid activation section is provided with the ionic fluid activation system, the plasma body composite log is provided with vacuum-evaporation ion composite system, inlet system and exhaust system, outlet lock section is provided with the outlet vacuum lock, vacuum-evaporation ion composite system is provided with two compound chambers of evaporation, workpiece enters vacuum chamber, pass through successively in order, respectively finish the plated film on a surface two compound chambers of evaporation.
Further, in order to guarantee that effective recombination process normally carries out continuously, import vacuum lock and outlet vacuum lock are the roller of front and back dislocation, effectively regulate the gas in it, when the workpiece stop motion, cut off the pressure difference between the vacuum type box atmosphere, keep the vacuum atmosphere of vacuum chamber, guarantee that simultaneously effective recombination process normally carries out continuously.
In order to carry out care and maintenance easily, the heating gangway of the section of taking out in advance is provided with the loam cake that is used for care and maintenance.
Observe for convenience, reverse sputtering decontamination section and ionic fluid activation section all are provided with and prevent the viewing window that polluted by the sputter thing.
Maintenance for convenience, the plasma body composite log has the compound chamber of plasma body, the upper end of the compound chamber of plasma body is provided with the upper cover plate with the flange that is used to wear band and maintains, the compound chamber of evaporation that stainless steel is made is installed in the lower end of the compound chamber of plasma body, workpiece carries out plated film in the compound chamber of evaporation, each evaporates the surface that workpiece is finished in compound chamber, can open the door and install simultaneously anti-composite bed in the left and right sides, the compound chamber of plasma body and protect saturating viewing window, the convenient observation when crossing film.
In order to satisfy exhaust and compound needs, exhaust system has the high vacuum exhaustion machine, the high vacuum exhaustion machine comprises diffusion pump, lobe pump, fore pump, holding pump, valve, corrugated tube, vacuum-lines, survey sensor, cold-trap and baffle plate, total power in total system is bigger, vacuum chamber interconnects, the time that vacuumizes is shorter, can be for the needs of complex reaction film.
In order to improve reliability, the cost of reduction equipment, heating system has the stainless steel tubulose well heater by the control of heating adjustment unit, adopt buffering to abandon type of heating, make workpiece under vacuum environment, arrive sputter, ion, arranged before compound enough residence time, thereby make the surface reach processing requirement, the control of heater element is subjected to the guide of temperature sensor signal that whole control, its precise control are arranged.
For composite effect good, evaporate compound chamber end cap, import and export, liner plate and the plasma evaporation ionization source that is convenient for changing is set, made things convenient for the maintenance of equipment, the plasma evaporation ionization source is to be installed on the special-purpose end flange in the insulating mode, and end flange seal is installed on the compound chamber of evaporation.
The invention has the beneficial effects as follows that production line of continuous vacuum plasma evaporation metal composite material of the present invention has reduced energy consumption, has improved compounding efficiency.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is a structural representation of the present invention.
1. imports lock section 2. heats the section of taking out in advance among the figure, 3. reverse sputtering decontamination section, 4. ionic fluid activation section, 5. plasma body composite log, 6. outlet lock section, 7. evaporation compound chamber, 8. roller.
Embodiment
The present invention is further detailed explanation with preferred embodiment in conjunction with the accompanying drawings now.These accompanying drawings are the synoptic diagram of simplification, basic structure of the present invention only is described in a schematic way, so it only show the formation relevant with the present invention.
The production line of continuous vacuum plasma evaporation metal composite material of preferred forms as shown in Figure 1, has entrance, process section and outlet section, process section comprises import lock section 1 successively, heating is the section of taking out 2 in advance, reverse sputtering decontamination section 3, ionic fluid activation section 4, plasma body composite log 5 and outlet lock section 6, import lock section 1 is provided with the import vacuum lock, the heating section of taking out 2 in advance is provided with heating system and exhaust system, reverse sputtering decontamination section 3 is provided with the reverse sputtering decontamination system, ionic fluid activation section 4 is provided with the ionic fluid activation system, plasma body composite log 5 is provided with vacuum-evaporation ion composite system, inlet system and exhaust system, outlet lock section 6 is provided with the outlet vacuum lock, vacuum-evaporation ion composite system is provided with two compound chambers 7 of evaporation, integral body is connected to electrical control system, and the adjusting by electrical control system reaches the compound function.
Import vacuum lock and outlet vacuum lock are the roller 8 of front and back dislocation, the diameter of roller 8 is set to 300mm, adopt the exhaust of level Four difference, one-level is the mechanical pump exhaust, secondary is mechanical pump and lobe pump exhaust, three grades is mechanical pump and lobe pump exhaust, and level Four is mechanical pump, lobe pump and diffusion pump series connection exhaust.
The heating gangway of the section of taking out 2 in advance is provided with the loam cake that is used for care and maintenance, conveniently safeguard, reverse sputtering decontamination section 3 and ionic fluid activation section 4 all are provided with and prevent the viewing window that polluted by the sputter thing, plasma body composite log 5 has the compound chamber of plasma body, the upper end of the compound chamber of plasma body is provided with the upper cover plate with the flange that is used to wear band and maintains, the compound chamber 7 of evaporation that stainless steel is made is installed in the lower end of the compound chamber of plasma body, and workpiece is finished recombination process in the compound chamber 7 of evaporation.
Exhaust system has the high vacuum exhaustion machine, the high vacuum exhaustion machine comprises diffusion pump, lobe pump, fore pump, holding pump, valve, corrugated tube, vacuum-lines, survey sensor, cold-trap and baffle plate, exhaust system has three covers, two covers are installed on the wall of the compound chamber of plasma body, one cover is installed in heating zone, and exhaust and compound needs have been satisfied in three cover startups.Heating system has the stainless steel tubulose well heater by the control of heating adjustment unit, and well heater is controlled by high-power heating adjustment unit, likes under the guide of temperature sensor signal, by electric control system controls.Evaporate compound chamber 7 end cap, import and export, liner plate and the plasma evaporation ionization source that is convenient for changing is set.
During the invention process, workpiece enters into process section from entrance, import vacuum lock at process section, adjusting by vacuum lock, make workpiece under the condition of vacuum, enter the heating section of taking out 2 in advance then, by well heater workpiece is heated, carry out exhaust by exhaust system simultaneously, enter reverse sputtering decontamination section 3 then, magnetron sputtering target by the reverse sputtering decontamination system carries out the decontamination cleaning, carry out entering ionic fluid activation section 4 after the decontamination, the ionic fluid activation system directly affacts the metal lattice place with high energy particle, makes avidity and the sticking power of metal generation to new steam material, even workpiece produces avidity and sticking power to new steam material, then enter into plasma body composite log 5, the high ionization degree that is produced by the plasma body composite system, the steam of high-density metal or alloy is in vapor diffusion, the steel plate negative voltage attracts to arrive workpiece surface down, forms film.
With above-mentioned foundation desirable embodiment of the present invention is enlightenment, and by above-mentioned description, the related work personnel can carry out various change and modification fully in the scope that does not depart from this invention technological thought.The technical scope of this invention is not limited to the content on the specification sheets, must determine its technical scope according to the claim scope.
Claims (8)
1. production line of continuous vacuum plasma evaporation metal composite material, has entrance, process section and outlet section, it is characterized in that: process section comprises import lock section (1) successively, heating is the section of taking out (2) in advance, reverse sputtering decontamination section (3), ionic fluid activation section (4), plasma body composite log (5) and outlet lock section (6), import lock section (1) is provided with the import vacuum lock, the heating section of taking out (2) in advance is provided with heating system and exhaust system, reverse sputtering decontamination section (3) is provided with the reverse sputtering decontamination system, ionic fluid activation section (4) is provided with the ionic fluid activation system, plasma body composite log (5) is provided with vacuum-evaporation ion composite system, inlet system and exhaust system, outlet lock section (6) is provided with the outlet vacuum lock, and vacuum-evaporation ion composite system is provided with two evaporation compound chambers (7).
2. production line of continuous vacuum plasma evaporation metal composite material according to claim 1 is characterized in that: described import vacuum lock and outlet vacuum lock are the roller (8) of front and back dislocation.
3. production line of continuous vacuum plasma evaporation metal composite material according to claim 1 is characterized in that: the described heating gangway of the section of taking out (2) in advance is provided with the loam cake that is used for care and maintenance.
4. production line of continuous vacuum plasma evaporation metal composite material according to claim 1 is characterized in that: described reverse sputtering decontamination section (3) and ionic fluid activation section (4) all are provided with and prevent the viewing window that polluted by the sputter thing.
5. production line of continuous vacuum plasma evaporation metal composite material according to claim 1, it is characterized in that: described plasma body composite log (5) has the compound chamber of plasma body, the upper end of the compound chamber of plasma body is provided with the upper cover plate with the flange that is used to wear band and maintains, and the compound chamber of evaporation (7) that stainless steel is made is installed in the lower end of the compound chamber of plasma body.
6. production line of continuous vacuum plasma evaporation metal composite material according to claim 1, it is characterized in that: described exhaust system has the high vacuum exhaustion machine, and the high vacuum exhaustion machine comprises diffusion pump, lobe pump, fore pump, holding pump, valve, corrugated tube, vacuum-lines, survey sensor, cold-trap and baffle plate.
7. production line of continuous vacuum plasma evaporation metal composite material according to claim 1 is characterized in that: described heating system has the stainless steel tubulose well heater by the control of heating adjustment unit.
8. production line of continuous vacuum plasma evaporation metal composite material according to claim 1 is characterized in that: the compound chamber of described evaporation (7) is provided with end cap, import and export, liner plate and the plasma evaporation ionization source that is convenient for changing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100318009A CN101608301B (en) | 2009-06-24 | 2009-06-24 | Production line of continuous vacuum plasma evaporation metal composite material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100318009A CN101608301B (en) | 2009-06-24 | 2009-06-24 | Production line of continuous vacuum plasma evaporation metal composite material |
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| Publication Number | Publication Date |
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| CN101608301A true CN101608301A (en) | 2009-12-23 |
| CN101608301B CN101608301B (en) | 2011-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009100318009A Expired - Fee Related CN101608301B (en) | 2009-06-24 | 2009-06-24 | Production line of continuous vacuum plasma evaporation metal composite material |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102653852A (en) * | 2011-03-03 | 2012-09-05 | 住友重机械工业株式会社 | Film forming apparatus |
| CN104032262A (en) * | 2013-11-01 | 2014-09-10 | 魏海波 | Coating device for horizontally producing solar heat collection plate |
| CN111479950A (en) * | 2017-12-14 | 2020-07-31 | 安赛乐米塔尔公司 | Vacuum deposition apparatus and method for coating a substrate |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5021138A (en) * | 1985-01-17 | 1991-06-04 | Babu Suryadevara V | Side source center sink plasma reactor |
| DE19753656C1 (en) * | 1997-12-03 | 1998-12-03 | Fraunhofer Ges Forschung | Installation for vacuum coating of sliding bearings |
| NL1010531C2 (en) * | 1998-11-11 | 2000-05-15 | Vacumetal B V | Device and method for applying a layer to objects by means of vapor deposition (PVD). |
| CN201158699Y (en) * | 2008-01-16 | 2008-12-03 | 甘国工 | Coiling film-plating machine |
-
2009
- 2009-06-24 CN CN2009100318009A patent/CN101608301B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102653852A (en) * | 2011-03-03 | 2012-09-05 | 住友重机械工业株式会社 | Film forming apparatus |
| CN102653852B (en) * | 2011-03-03 | 2014-12-10 | 住友重机械工业株式会社 | Film forming apparatus |
| CN104032262A (en) * | 2013-11-01 | 2014-09-10 | 魏海波 | Coating device for horizontally producing solar heat collection plate |
| CN104032262B (en) * | 2013-11-01 | 2017-02-08 | 辽宁装备制造职业技术学院 | Coating device for horizontally producing solar heat collection plate |
| CN111479950A (en) * | 2017-12-14 | 2020-07-31 | 安赛乐米塔尔公司 | Vacuum deposition apparatus and method for coating a substrate |
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| Publication number | Publication date |
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| CN101608301B (en) | 2011-12-07 |
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Effective date of registration: 20190115 Address after: 213000 No. 256, North Zhulin Road, Tianning District, Changzhou City, Jiangsu Province, 1132-2 Patentee after: Changzhou Jieshun Composite Material Co., Ltd. Address before: 213023 Xinggang Road CI Block, Economic Development Zone, Zhonglou District, Changzhou City, Jiangsu Province Patentee before: Jiangsu Changsong Machinery Group Co., Ltd. |
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