CN101560648A - Device and method for depositing acid-resistant and alkaline-resistant diamond film on surface of compact disc - Google Patents
Device and method for depositing acid-resistant and alkaline-resistant diamond film on surface of compact disc Download PDFInfo
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- CN101560648A CN101560648A CNA2009100115875A CN200910011587A CN101560648A CN 101560648 A CN101560648 A CN 101560648A CN A2009100115875 A CNA2009100115875 A CN A2009100115875A CN 200910011587 A CN200910011587 A CN 200910011587A CN 101560648 A CN101560648 A CN 101560648A
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Abstract
The invention relates to a method for coating a film on the surface of a compact disc and a method for depositing an acid-resistant and alkaline-resistant diamond film on the surface of the compact disc. The method comprises the steps of using a low and medium frequency medium to baffle high voltage discharge; using micromolecule hydrocarbon gas; and under the condition of lower air pressure, using the compact disc as a depositing substrate to deposit an ultrahard diamond film on the surface of the compact disc. The invention uses the medium to baffle discharge plasma to deposit the film, has the following unique advantages: simple discharge mode, low power energy and low gas flow, and can realize deposition on an insulating medium. The film has permeability which is more than 90% in blue light and red light for CD-ROM work recording and reading laser wave length. By testing the coated compact disc in a way of recording and reading, the film is proved to have no effect to the normal work of the compact disc. The invention effectively improves the chemical stability and the mechanical property of the surface of the compact disc, therefore, the coated compact disc has good acid-resistant and alkaline-resistant property.
Description
Technical field:
The present invention relates to the optical disc surface film covering method, particularly the method for optical disc surface depositing diamond-like film also relates to film covering device in addition.
Background technology:
CD is that high density compact disc (Compact Disc) is the optical storage medium that RECENT DEVELOPMENTS gets up to be different from magnetic carrier, and method storage and regenerating information with the hydrogen ion laser beam treatment recording medium that focuses on claim laser-optical disk again.The development course of CD and the invention of paper have greatly promoted human civilization advance, and it has put down in writing the development history of human civilization, have brought up a collection of new industry.CD substrate material is an aromatic polycarbonate, and the chemical structure of its molecule is:
Contain aromatic nucleus and carboxyl in its structure, do not have resistance to acids and bases.Owing to be a kind of typical polymerized organics, so hardness is low.Quasi-diamond (DLC) film has the performance of a series of excellences such as high rigidity, high chemical stability, high IR perviousness, high-wearing feature and low-friction coefficient, thereby has a wide range of applications in fields such as machinery, optics, acoustics, electronics and magneticmedium protections.Since the eighties in last century, be one of focus of various countries' coating technique area research always.Dielectric barrier discharge (DBD) is a kind of discharge mode that can produce nonequilibrium plasma in higher air pressure range.Utilizing dielectric barrier discharge depositing diamond-like film, is a kind of film preparing technology of novelty.This method has that electric discharge device is simple, less energy-consumption, air consumption is little and can at room temperature realize on the multiple base advantage such as large-area coating film.In recent years, the corrosion resistance nature to the DLC film has carried out extensive studies both at home and abroad, but mainly concentrates on the DLC film to the stainless steel effect on corrosion.Relevant DLC film is less to the research of glass effect on corrosion.For utilizing dielectric barrier discharge plasma to strengthen chemical vapour deposition (DBD-PECVD) method at optical disc surface depositing diamond-like film, and to film anti-acid and alkali-resistance test yet there are no and reports for work.
Summary of the invention:
The objective of the invention is to overcome above-mentioned not enough problem, a kind of method that deposits the acid and alkali-resistance diamond like carbon film on CD is provided, simple, the energy-conservation cost of this method is low, the present invention also provides a kind of device that deposits the acid and alkali-resistance diamond like carbon film on CD in addition, simple in structure, can be implemented in depositing diamond-like film on the dielectric, energy consumption is low.
The technical scheme that the utility model is adopted for achieving the above object is: the method for deposition acid and alkali-resistance diamond like carbon film on CD, utilize medium and low frequency dielectric impedance electrion, use the small molecules hydrocarbon gas, than under the low air pressure condition, as deposition substrate, deposit superhard diamond like carbon film with CD at optical disc surface.
Keep-up pressure at 500-1000Pa during described discharge, discharge depositing 5-20 minute, film thickness was controlled at about 200-600nm, after deposition finishes, stopped discharge, with the discharge chamber inflation, took out CD.
Before the described discharge depositing, use rare gas such as argon gas or helium, clean optical disc surface as discharge gas.
Described cleaning optical disc surface is with the emptying of discharge chamber gas before the discharge, pressure is remained on below the 3Pa, use the sinusoidal wave electrion power supply of 3kHz, at crest voltage is under the 30kV condition, use argon gas as discharge gas, discharge is 5 minutes under argon pressure 200Pa condition, cleans optical disc surface, carries out discharge depositing again.
Described medium adopts glass or quartz etc. as dielectric.
Described small molecules hydrocarbon gas is meant CH
4, C
2H
6, C
2H
4, C
2H
2Deng the small molecules hydrocarbon gas.
The present invention deposits the device of acid and alkali-resistance diamond like carbon film on CD, the discharge plasma cavity is a vacuum sealing chamber, the AC sine wave high pressure is connected on the high voltage electrode, it between high voltage electrode and the ground electrode gas gap, the dielectric of barrier discharge has air intake and air outlet, air intake is connected with mass flow controller, and the air outlet is connected with vacuum mechanical pump.
Described gas gap size 1-10mm.
The present invention utilizes the dielectric barrier discharge plasma deposit film, has its special advantages: simple as discharge mode, energy consumption is low, and gas flow is low, can be implemented on the dielectric to deposit.Utilize atomic force microscope, scanning electronic microscope, Fourier transform infrared spectroscopy, acid and alkali-resistance test etc. that film performance is characterized, analysed film deposition back optical disc surface characteristic.Film all has at blue light and ruddiness＞90% above perviousness for CD-ROM drive work read-write optical maser wavelength.Carry out readwrite tests for the CD behind the plated film, find that film does not produce any influence for the CD works better.The present invention effectively improves the chemical stability and the mechanical property of optical disc surface.The optical disc surface of plated film is level and smooth, even, through salt tolerant acid corrosion test, does not show any destructive sign, mainly is because chemical reaction does not take place for diamond like carbon film and hydrochloric acid, and CD has been played provide protection.CD behind not plated film and the plated film is carried out tests such as anti-sulfuric acid, chloroazotic acid, nitric acid, sodium hydroxide, potassium hydroxide equally, find that all plated film is not destroyed by these solution, and the CD behind the plated film has had good acid and alkali-resistance characteristic.
Equipment cost is low; Discharge chamber gas gap little (common several millimeters), gas volume is little, and gas flow is low; Energy consumption is low etc.
Description of drawings:
Fig. 1 is apparatus of the present invention vertical section structure synoptic diagram.
Fig. 2 is the cross-section structure that is deposited on diamond like carbon film surface sweeping electron microscope on the optical disc substrate.
Fig. 3 is film photopermeability analysis chart at glass surface in the 350-900nm scope.
Fig. 4 is the uncoated CD scanning electron microscope picture that 36.5% hydrochloric acid soln was handled for concentration.
Fig. 5 is the plated film CD scanning electron microscope picture that 36.5% hydrochloric acid soln was handled for concentration.
Embodiment:
The invention will be further described below in conjunction with the drawings and specific embodiments.
Dielectric barrier discharge plasma optical disc surface diamond like carbon film deposition apparatus as shown in Figure 1, discharge plasma cavity (1) is a vacuum sealing chamber.The AC sine wave high pressure (2) that is used to produce plasma body is connected high voltage electrode (3), is producing plasma body (5) on the gas gap between high voltage electrode and the ground electrode (4) behind the electrion.The gas gap size is adjustable between 1-10mm.Cleaning CD (6) places on the ground electrode, and as deposition substrate, the active specy of plasma generation is deposited on optical disc surface, forms diamond like carbon film.Glass medium (7) is as the dielectric that produces dielectric barrier discharge.Discharge gas such as Ar, CH
4, C
2H
4Enter Deng by air intake (8), discharge by air outlet (9).Air intake is connected with mass flow controller, gas Ar, CH
4, C
2H
4Deng flowing into mass flow controller, by mass flow controller pilot-gas flow velocity and gaseous tension; The air outlet is connected with the 4L vacuum mechanical pump, is used for exhaust.After the deposition,, take out CD with the cavity inflation.Fig. 2 is the section microstructure figure of sedimentary film under SEM observes on the optical disc substrate, and film thickness is about 600nm.
To analyzing discovery in same experimental conditions deposit hardness of diamond like carbon film on silicon base, film hardness can be up to 27GPa.Figure 3 shows that film in the 350-900nm scope for photopermeability, visible film all has at blue light and ruddiness＞90% above perviousness for CD-ROM drive work read-write optical maser wavelength.We carry out readwrite tests by the CD after for plated film, find that film does not produce any influence for the CD works better.
Fig. 4 drips in the optical disc surface of plated film and plated film not for using 36.5% concentrated hydrochloric acid solution, and is positioned over the picture that utilizes sem observation to obtain after 5 minutes in the air.Wherein left side figure is uncoated CD, and right figure is the optical disc surface of surface deposition 500nm plated film of the present invention.Clearly, uncoated optical disc surface has tangible scar, and this is owing to concentrated hydrochloric acid and optical disc substrate material polycarbonate generation chemical reaction, the destruction of causing optical disc surface.The optical disc surface of plated film of the present invention is level and smooth, even, does not show any destructive sign, mainly is because chemical reaction does not take place for diamond like carbon film and hydrochloric acid, and CD has been played provide protection.CD behind not plated film and the plated film of the present invention tests such as anti-sulfuric acid, chloroazotic acid, nitric acid, sodium hydroxide, potassium hydroxide have been carried out equally, find that all the plated film CD is not all destroyed by these solution, and the CD behind the plated film of the present invention has good acid and alkali-resistance characteristic, keeps superperformance constant.
Claims (8)
1, the method for deposition acid and alkali-resistance diamond like carbon film on CD, it is characterized in that: utilize medium and low frequency dielectric impedance electrion, use the small molecules hydrocarbon gas, than under the low air pressure condition, as deposition substrate, deposit superhard diamond like carbon film with CD at optical disc surface.
2, the method that on CD, deposits the acid and alkali-resistance diamond like carbon film according to claim 1, it is characterized in that: keep-up pressure during discharge at 500-1000Pa, discharge depositing 5-20 minute, film thickness is controlled at about 200-600nm, after deposition finishes, stop discharge,, take out CD the discharge chamber inflation.
3, the method that deposits the acid and alkali-resistance diamond like carbon film on CD according to claim 1 is characterized in that: before the discharge depositing, use rare gas such as argon gas or helium as discharge gas, clean optical disc surface.
4, the method that on CD, deposits the acid and alkali-resistance diamond like carbon film according to claim 1, it is characterized in that: cleaning optical disc surface is with the emptying of discharge chamber gas before the discharge, pressure is remained on below the 3Pa, use the sinusoidal wave electrion power supply of 3kHz, at crest voltage is under the 30kV condition, uses argon gas as discharge gas, and discharge is 5 minutes under argon pressure 200Pa condition, clean optical disc surface, carry out discharge depositing again.
5, the method that deposits the acid and alkali-resistance diamond like carbon film on CD according to claim 1 is characterized in that: medium adopts glass or quartz etc. as dielectric.
6, the method that deposits the acid and alkali-resistance diamond like carbon film on CD according to claim 1, it is characterized in that: the small molecules hydrocarbon gas is meant CH
4, C
2H
6, C
2H
4, C
2H
2Deng the small molecules hydrocarbon gas.
7, the device of deposition acid and alkali-resistance diamond like carbon film on CD, it is characterized in that: the discharge plasma cavity is a vacuum sealing chamber, the AC sine wave high pressure is connected on the high voltage electrode, it between high voltage electrode and the ground electrode gas gap, the dielectric of barrier discharge has air intake and air outlet, air intake is connected with mass flow controller, and the air outlet is connected with vacuum mechanical pump.
8, the device that deposits the acid and alkali-resistance diamond like carbon film on CD according to claim 7 is characterized in that: gas gap size 1-10mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100115875A CN101560648A (en) | 2009-05-15 | 2009-05-15 | Device and method for depositing acid-resistant and alkaline-resistant diamond film on surface of compact disc |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100115875A CN101560648A (en) | 2009-05-15 | 2009-05-15 | Device and method for depositing acid-resistant and alkaline-resistant diamond film on surface of compact disc |
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| CN101560648A true CN101560648A (en) | 2009-10-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115613004A (en) * | 2021-07-12 | 2023-01-17 | 北京印刷学院 | Plastic pipe with coated inner wall and preparation method thereof |
-
2009
- 2009-05-15 CN CNA2009100115875A patent/CN101560648A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115613004A (en) * | 2021-07-12 | 2023-01-17 | 北京印刷学院 | Plastic pipe with coated inner wall and preparation method thereof |
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Open date: 20091021 |