CN101536203B - 多层压电元件和使用该多层压电元件的喷射装置 - Google Patents
多层压电元件和使用该多层压电元件的喷射装置 Download PDFInfo
- Publication number
- CN101536203B CN101536203B CN200680056255.3A CN200680056255A CN101536203B CN 101536203 B CN101536203 B CN 101536203B CN 200680056255 A CN200680056255 A CN 200680056255A CN 101536203 B CN101536203 B CN 101536203B
- Authority
- CN
- China
- Prior art keywords
- stress
- piezoelectric element
- layer
- piezoelectric
- multilayer piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
Landscapes
- Fuel-Injection Apparatus (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
编号 | 内电极层 和应力消 除层的构 造 | 金属层12 的组成(重 量%) | 金属层 12b的组 成(重量%) | 在初始状 态下的位 移(μm) | 在连续操作 (1×109次循 环)之后的位 移(μm) | 在厚度方向 上穿透压电 层的裂纹的 存在 |
1 | 图5 | Ag70% Pd30% | Ag75% Pd25% | 45.0 | 44.9 | 否 |
2 | 图6 | Ag70% Pd30% | Ag75% Pd25% | 44.5 | 44.4 | 否 |
3 | 图7 | Ag80% Pd20% | Ag85% Pd15% | 50.0 | 49.9 | 否 |
4 | 图8 | Ag80% Pd20% | Ag85% Pd15% | 49.5 | 49.4 | 否 |
5 | 图9 | Ag90% Pd10% | Ag95% Pd5% | 55.0 | 55.0 | 否 |
6 | 图10 | Ag90% Pd10% | Ag95% Pd5% | 54.5 | 54.4 | 否 |
7 | 图9 | Ag95% Pd5% | Ag98% Pd2% | 60.0 | 60.0 | 否 |
8 | 图10 | Ag95% Pd5% | Ag98% Pd2% | 59.9 | 59.9 | 否 |
9 | 图11 | Ag70% Pd30% | Ag85% Pd15% | 46.0 | 44.0 | 否 |
10 | 没有应力 消除层 | Ag80% Pd20% | 无 | 45.0 | 20.0 | 是 |
Claims (9)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2006/322212 WO2008053569A1 (en) | 2006-10-31 | 2006-10-31 | Multi-layer piezoelectric element and injection apparatus employing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101536203A CN101536203A (zh) | 2009-09-16 |
CN101536203B true CN101536203B (zh) | 2011-10-05 |
Family
ID=38055622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200680056255.3A Active CN101536203B (zh) | 2006-10-31 | 2006-10-31 | 多层压电元件和使用该多层压电元件的喷射装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8212451B2 (zh) |
EP (1) | EP2087535B1 (zh) |
JP (1) | JP5050165B2 (zh) |
CN (1) | CN101536203B (zh) |
DE (1) | DE602006017603D1 (zh) |
WO (1) | WO2008053569A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007037377A1 (ja) * | 2005-09-29 | 2007-04-05 | Kyocera Corporation | 積層型圧電素子およびこれを用いた噴射装置 |
WO2008047460A1 (en) * | 2006-10-20 | 2008-04-24 | Kyocera Corporation | Piezoelectric actuator unit and method for manufacturing the same |
DE102007015457B4 (de) * | 2007-03-30 | 2009-07-09 | Siemens Ag | Piezoelektrisches Bauteil mit Sicherheitsschicht, Verfahren zu dessen Herstellung und Verwendung |
JP5055370B2 (ja) | 2007-08-29 | 2012-10-24 | 京セラ株式会社 | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム |
EP2190042A4 (en) * | 2007-09-18 | 2012-04-11 | Kyocera Corp | STACKED PIEZOELECTRIC ELEMENT, SPRAY DEVICE AND FUEL JET SYSTEM EQUIPPED WITH SAME |
JP5776890B2 (ja) | 2010-11-16 | 2015-09-09 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置並びに圧電素子 |
DE102010063217A1 (de) * | 2010-12-16 | 2012-06-21 | Robert Bosch Gmbh | Elektroden-Trägerfolie, insbesondere zur Herstellung von piezoelektrischen Bauelementen, und Verfahren zur Herstellung eines piezoelektrischen Bauelements |
JP5790922B2 (ja) | 2011-04-22 | 2015-10-07 | セイコーエプソン株式会社 | 圧電素子、液体噴射ヘッド、液体噴射装置、超音波デバイス及びセンサー |
JP5905292B2 (ja) * | 2012-02-21 | 2016-04-20 | 日本碍子株式会社 | 圧電素子及び圧電素子の製造方法 |
WO2014009303A1 (de) * | 2012-07-09 | 2014-01-16 | Continental Automotive Gmbh | Piezoelektrischer vielschichtaktor und einspritzventil |
USD751044S1 (en) * | 2014-05-22 | 2016-03-08 | Hzo, Inc. | Control switch for an electronic device |
AT519442B1 (de) * | 2016-12-13 | 2018-09-15 | Piezocryst Advanced Sensorics | Messelementstapel zum messen von kräften oder drücken und verfahren zur herstellung eines derartigen messelementstapels |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2524377Y (zh) * | 2001-12-17 | 2002-12-04 | 宋宽宽 | 积层压电变压装置 |
CN1392052A (zh) * | 2001-06-14 | 2003-01-22 | 兄弟工业株式会社 | 压电致动器和使用该压电致动器的喷墨器 |
WO2005086247A1 (ja) * | 2004-03-09 | 2005-09-15 | Kyocera Corporation | 積層型圧電素子とその製造方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1023478B (de) | 1955-07-08 | 1958-01-30 | Metallgesellschaft Ag | Verfahren und Einrichtung zur elektrischen Reinigung der Abgase beim Sauerstoff-Frischen von Stahl |
JPS63142875A (ja) * | 1986-12-05 | 1988-06-15 | Sumitomo Special Metals Co Ltd | 圧電積層アクチユエ−タ− |
JPH06181343A (ja) * | 1992-12-11 | 1994-06-28 | Hitachi Metals Ltd | 積層型変位素子及びその製造方法 |
JP2986706B2 (ja) * | 1995-03-03 | 1999-12-06 | 日立金属株式会社 | 圧電素子及びそれを用いた圧電アクチュエータ |
JP3082731B2 (ja) * | 1997-12-17 | 2000-08-28 | 日本電気株式会社 | 積層型圧電トランス及びその製造方法 |
JP2001102646A (ja) * | 1999-09-28 | 2001-04-13 | Tokin Ceramics Corp | 積層型圧電セラミックス |
DE10121270A1 (de) * | 2001-04-30 | 2003-02-06 | Epcos Ag | Passivierungsmaterial für ein elektrisches Bauteil sowie piezoelektrisches Bauteil in Vielschichtbauweise |
JP2003258328A (ja) * | 2002-02-27 | 2003-09-12 | Kyocera Corp | 積層型圧電アクチュエータ |
JP3921171B2 (ja) * | 2002-12-26 | 2007-05-30 | 京セラ株式会社 | セラミック電子部品及びその製法並びに噴射装置 |
DE10307825A1 (de) * | 2003-02-24 | 2004-09-09 | Epcos Ag | Elektrisches Vielschichtbauelement und Schichtstapel |
JP2006156690A (ja) * | 2004-11-29 | 2006-06-15 | Kyocera Corp | 積層型圧電素子およびこれを用いた噴射装置 |
DE102005018791A1 (de) * | 2005-01-18 | 2006-07-27 | Epcos Ag | Piezoaktor mit niedriger Streukapazität |
DE602005011970D1 (de) * | 2005-09-16 | 2009-02-05 | Delphi Tech Inc | Piezoelektrischer Aktor |
DE102005051289B3 (de) * | 2005-10-26 | 2007-05-16 | Siemens Ag | Piezoaktor und Verfahren zur Herstellung desselben |
CN101390228B (zh) * | 2006-02-27 | 2010-12-08 | 京瓷株式会社 | 陶瓷构件的制造方法、陶瓷构件、气体传感器元件、燃料电池元件、过滤元件、层叠型压电元件、喷射装置以及燃料喷射*** |
EP2073283B1 (en) * | 2006-09-28 | 2014-12-17 | Kyocera Corporation | Laminated piezoelectric element, injection apparatus and fuel injection system using the laminated piezoelectric element, and method for manufacturing laminated piezoelectric element |
WO2008047460A1 (en) * | 2006-10-20 | 2008-04-24 | Kyocera Corporation | Piezoelectric actuator unit and method for manufacturing the same |
DE102006062076A1 (de) * | 2006-12-29 | 2008-07-10 | Siemens Ag | Piezokeramischer Vielschichtaktor und Verfahren zu seiner Herstellung |
JP4911066B2 (ja) * | 2007-02-26 | 2012-04-04 | 株式会社デンソー | 積層型圧電素子 |
JP4930410B2 (ja) * | 2007-02-26 | 2012-05-16 | 株式会社デンソー | 積層型圧電素子 |
-
2006
- 2006-10-31 CN CN200680056255.3A patent/CN101536203B/zh active Active
- 2006-10-31 US US12/447,640 patent/US8212451B2/en active Active
- 2006-10-31 EP EP06823116A patent/EP2087535B1/en active Active
- 2006-10-31 JP JP2009518658A patent/JP5050165B2/ja not_active Expired - Fee Related
- 2006-10-31 DE DE602006017603T patent/DE602006017603D1/de active Active
- 2006-10-31 WO PCT/JP2006/322212 patent/WO2008053569A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1392052A (zh) * | 2001-06-14 | 2003-01-22 | 兄弟工业株式会社 | 压电致动器和使用该压电致动器的喷墨器 |
CN2524377Y (zh) * | 2001-12-17 | 2002-12-04 | 宋宽宽 | 积层压电变压装置 |
WO2005086247A1 (ja) * | 2004-03-09 | 2005-09-15 | Kyocera Corporation | 積層型圧電素子とその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP5050165B2 (ja) | 2012-10-17 |
US8212451B2 (en) | 2012-07-03 |
WO2008053569A1 (en) | 2008-05-08 |
JP2010508648A (ja) | 2010-03-18 |
US20100060110A1 (en) | 2010-03-11 |
CN101536203A (zh) | 2009-09-16 |
EP2087535A1 (en) | 2009-08-12 |
EP2087535B1 (en) | 2010-10-13 |
DE602006017603D1 (de) | 2010-11-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101536203B (zh) | 多层压电元件和使用该多层压电元件的喷射装置 | |
CN101563795B (zh) | 压电致动器装置及其制造方法 | |
EP2461385B1 (en) | Multi-layer piezoelectric element, and injection device and fuel injection system using the same | |
CN101390228B (zh) | 陶瓷构件的制造方法、陶瓷构件、气体传感器元件、燃料电池元件、过滤元件、层叠型压电元件、喷射装置以及燃料喷射*** | |
JP5066098B2 (ja) | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム | |
JP4933554B2 (ja) | 積層型圧電素子、これを用いた噴射装置及び燃料噴射システム、並びに積層型圧電素子の製造方法 | |
US7429817B2 (en) | Multilayer piezoelectric element | |
JP5084744B2 (ja) | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム | |
CN101558506B (zh) | 层叠型压电元件、具有其的喷射装置以及燃料喷射*** | |
CN101593808B (zh) | 叠层型压电元件及其制造方法 | |
EP2667425B1 (en) | Laminated-type piezoelectric element, and piezoelectric actuator, injection apparatus, and fuel injection system provided with same | |
CN101681983B (zh) | 多层压电元件和制备该多层压电元件的方法 | |
JP5203621B2 (ja) | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム | |
EP2889926B1 (en) | Laminated piezoelectric element, piezoelectric actuator provided with same, injection apparatus, and fuel injection system | |
JP5562382B2 (ja) | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム | |
EP2437322A1 (en) | Laminated piezoelectric element, jetting device using same, and fuel jetting system | |
WO2013146984A1 (ja) | 積層型圧電素子およびこれを備えた噴射装置ならびに燃料噴射システム | |
WO2013065709A1 (ja) | 積層型圧電素子およびこれを備えた圧電アクチュエータ、噴射装置、燃料噴射システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180330 Address after: Kyoto Japan Co-patentee after: Continental automobile Limited by Share Ltd Patentee after: KYOCERA Corporation Address before: Kyoto Japan Co-patentee before: Siemens AG Patentee before: KYOCERA Corporation |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200917 Address after: Kyoto Japan Patentee after: KYOCERA Corp. Address before: Kyoto Japan Patentee before: KYOCERA Corp. Patentee before: Continental automobile Limited by Share Ltd. |
|
TR01 | Transfer of patent right |