CN101526744A - Positioning access mechanism of mask - Google Patents
Positioning access mechanism of mask Download PDFInfo
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- CN101526744A CN101526744A CN200910044990A CN200910044990A CN101526744A CN 101526744 A CN101526744 A CN 101526744A CN 200910044990 A CN200910044990 A CN 200910044990A CN 200910044990 A CN200910044990 A CN 200910044990A CN 101526744 A CN101526744 A CN 101526744A
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Abstract
The invention relates to a positioning access mechanism of a mask in photoetching equipment, comprising an elevating mechanism and a dividing positioning mechanism. The elevating mechanism is used for driving a support plate of a mask box to move up and down; the dividing positioning mechanism is used for positioning the position of the support plate of the mask box; the support plate of the mask box is directly connected with the dividing and positioning mechanism to drive the dividing positioning mechanism to position the support plate of the mask box. The dividing and positioning mechanism is driven by the support plate of the mask box instead of the elevating mechanism, the elevating mechanism only bear the gravity of the support plate of the mask box and a mask box rack on the support plate without driving the dividing and positioning mechanism, and force on two sides does not acts on a synchronous cog belt in the elevating mechanism any more, thereby the elevating synchronous cog belt is not easily damaged due to fatigue, the work reliability and the positioning precision of the elevating synchronous cog belt are improved, and the service life of the elevating synchronous cog belt is prolonged. In addition, an external force of the elevating mechanism vertically acts on the central axis of a ballscrew, so that the elevating mechanism can stably and reliably move and can ensure a brake resistance which is needed when the support plate of the mask box pauses at any position in the vertical direction.
Description
Technical field
The present invention relates to litho machine equipment, especially relate to the positioning access mechanism of mask in the lithographic equipment.
Background technology
Positioning access mechanism of mask in the existing lithographic equipment, positioning access mechanism of mask as the release of Dutch A Simai (ASML) company, comprise: drive motor, the synchronous pulley mechanism that forms by synchronous pulley and the vertical synchronous cog belt of installing, with the calibration locating wheel of the parallel installation of synchronous pulley, and the gathering sill of vertical setting.Its elevating movement directly drives synchronous pulley mechanism by drive motor, and synchronous cog belt links to each other by the profile of tooth strap clamp with version storehouse lifting table mask version box supporting plate.Like this when drive motor rotates, the motion of a version storehouse lifting table mask version box supporting plate carrying mask plate rack in the vertical direction, this synchronous cog belt directly drives calibration location crop rotation and rotates synchronously simultaneously.
The shortcoming of this mechanism is as follows:
One, synchronous cog belt not only will directly carry mask version box supporting plate and go up the mask plate rack and move up and down, and also will directly drive calibration location opinion, makes synchronous cog belt be in two kinds of stresses simultaneously always, and cog belt damages because of tired easily.And synchronous cog belt can't brake, must be by the braking moment braking of drive motor self, and the location is inaccurate, and it is unreliable to work, and can't satisfy work requirements.
Two, owing to location behind the lifting unit componental movement is inaccurate, when the version fork damages mask easily when the mask plate rack picks and places mask plate.
Summary of the invention
In view of this, technical matters to be solved by this invention provides a kind of positioning access mechanism of mask, and under the prerequisite that guarantees bearing accuracy, its elevating mechanism only directly is responsible for carrying version box supporting plate, effectively reduces the tired damage situations of mechanism, improves functional reliability.
For solving the problems of the technologies described above, the present invention has adopted following technical scheme:
A kind of positioning access mechanism of mask, comprise that driving elevating mechanism and that mask version box supporting plate moves up and down is used for dividing and positioning mechanism that mask version box blade position is positioned, described mask version box supporting plate directly is connected with described dividing and positioning mechanism, drives dividing and positioning mechanism it is located.
Described elevating mechanism comprises a support, a driven unit and a guide assembly, and described driven unit drives mask version box supporting plate and does straight reciprocating motion along guide assembly.
Described driven unit comprises drive motor, synchronous pulley and synchronous cog belt assembly and ball-screw nut assembly, described drive motor drives synchronous pulley and synchronous cog belt assembly, and described synchronous pulley and synchronous cog belt assembly drive mask version box carriage by the ball-screw nut assembly and do straight reciprocating motion along guide assembly.
Described synchronous pulley and synchronous cog belt assembly comprise: driving pulley, first cog belt and driven pulley, the output shaft of described drive motor is fixedlyed connected with the central shaft of driving pulley, described driving pulley drives described driven pulley through described first cog belt and rotates, and the central shaft of described driven pulley is fixedlyed connected with the leading screw of ball-screw nut assembly and driven its rotation.
Described ball-screw nut assembly comprises nut and the leading screw that is meshed, and described nut is fixedlyed connected with the nut bearing, and described nut bearing is fixedlyed connected with described mask version box supporting plate by a lifting slide carriage.
Described guide assembly comprises one group of rolling guide in the one group of vertical guide seat that is installed in described support, and described rolling guide is set in parallel in the leading screw both sides of described ball-screw nut assembly, and described lifting slide carriage is set on the described rolling guide.
Described elevating mechanism also comprises a dust cover, and described dust cover is installed between described lifting slide carriage and the described vertical guide seat.
Described dividing and positioning mechanism comprises: location Tooth Profile band, calibration locating wheel and location Tooth Profile belt wheel, described location Tooth Profile band drives the calibration locating wheel respectively and location Tooth Profile belt wheel rotates, described location Tooth Profile band is fixedlyed connected with mask version box supporting plate by a profile of tooth strap clamp, and peripheral uniform several detents of described calibration locating wheel, the distance of the adjacent two mask corresponding positions on the described mask version box supporting plate equals the arc length distance of adjacent positioned groove corresponding position on the reference circle circumference of described calibration locating wheel.
Be equipped with on the posterior bracket of described calibration locating wheel one with the corresponding gathering sill of described detent size shape, a vertical plane of described gathering sill is provided with upper and lower chute.
Be provided with one on the dividing plate between the described upper and lower chute for edition pin-and-hole passage that the guide finger of fork side is changed between two chutes.
The invention has the beneficial effects as follows:
Because dividing and positioning mechanism is not directly to be driven by elevating mechanism, drive and change by version box supporting plate, therefore, elevating mechanism only directly is responsible for carrying version box supporting plate, and need not directly to drive calibration and detent mechanism, therefore, synchronous cog belt in original elevating mechanism can not occur and be subjected to the effect of both sides power simultaneously and easy tired damage situations, improve its functional reliability and locating accuracy, also prolonged serviceable life simultaneously.
Because drive motor drives the ball-screw nut assembly by synchronous pulley and synchronous cog belt assembly and rotates, and is fixed with the nut bearing on the nut.Therefore, during the drive motor rotation, rotatablely moving of drive motor changed into the rectilinear motion of nut bearing along vertical rolling guide, this mechanism's stress action spot is in the centre of two rolling guides, therefore, and good stability; External force to acting on the leading screw, can provide edition box supporting plate required damping force when vertical any station suspends, reliable operation along lead screw shaft.
By dividing and positioning mechanism is set, can check mask version box carriage location whether correct, improve the accuracy of mask version box carriage location, can check edition accuracy of box carriage location, avoid mask and when being picked and placeed, suffer damage because the position is inaccurate by setting up gathering sill.Therefore, more stable work is reliable.
In addition, owing between lifting slide carriage and vertical guide seat, be provided with dust cover, can prevent of the pollution of the particulate pollutant of moving component generation to the mask box.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is that the structural representation of elevating mechanism of the present invention is the N-N cut-open view of Fig. 1;
Fig. 3 is the structural representation of calibration locating wheel;
Fig. 4 is the synoptic diagram that version fork of the present invention is got mask;
Fig. 5 is the structural representation of version fork.
Among the figure: 1-version box supporting plate, 2-drive motor, 3-synchronous pulley and synchronous cog belt assembly, 4-nut bearing, 5-ball-screw nut assembly, 6-lifting slide carriage, 7-vertical guide seat, 8-rolling guide, the 9-dust cover, 10-location Tooth Profile belt wheel, 11-calibration locating wheel, 110-locating slot, 12-location Tooth Profile band, 13-mask plate rack, 14-mask, the 15-contiguous block, 16-profile of tooth strap clamp, 17-gathering sill, 18-version fork, the right safe beam of 19-, 20-guide finger.
Embodiment
Below in conjunction with accompanying drawing the present invention is done explanation clearly and completely:
See also Fig. 1 and Fig. 5, this positioning access mechanism of mask, comprise that driving elevating mechanism and that mask version box supporting plate 1 moves up and down is used for dividing and positioning mechanism that mask version box supporting plate 1 position is positioned, described mask version box supporting plate 1 directly is connected with described dividing and positioning mechanism, drives dividing and positioning mechanism it is located.Described elevating mechanism directly carries edition box supporting plate 1 and goes up the gravity of mask plate rack 13, and drives described version box supporting plate 1 in the vertical direction and do elevating movement.Described dividing and positioning mechanism can accurately be located mask 14 vertical positions in the mask plate rack 13 on edition box supporting plate 1, and when version fork 18 picks and places mask 14, version fork 18 is played guide effect.
See also Fig. 1 and Fig. 2, described elevating mechanism comprises a support, a driven unit and a guide assembly.Described driven unit drives mask version box supporting plate 1 and does straight reciprocating motion along guide assembly.Wherein, described driven unit comprises: drive motor 2, synchronous pulley and synchronous cog belt assembly 3 and ball-screw nut assembly 5.Wherein, described synchronous pulley and synchronous cog belt assembly 3 comprise: driving pulley, first cog belt and driven pulley.The output shaft of described drive motor 2 is fixedlyed connected with the central shaft of driving pulley to drive the driving pulley rotation, described driving pulley drives described driven pulley through described first cog belt and rotates, and the central shaft of described driven pulley is fixedlyed connected with the leading screw of ball-screw nut assembly 5 to drive the leading screw rotation.The leading screw and the nut of described ball-screw nut assembly 5 are meshing with each other, and leading screw drives nut and does straight reciprocating motion.Described nut is fixedlyed connected with a lifting slide carriage 6 through nut bearing 4, and described lifting slide carriage 6 is fixedlyed connected with mask version box supporting plate 1.Described guide assembly comprises one group of rolling guide 8 in the one group of vertical guide seat 7 that is fixedly arranged in the described support.Described rolling guide 8 has two, is set in parallel in the leading screw both sides of ball-screw nut assembly 5, and described lifting slide carriage 6 is set on the described rolling guide 8.Adopt said structure, when drive motor 2 rotations, rotatablely moving of drive motor 2 changed into the rectilinear motion of nut bearing 4 along vertical rolling guide 8, this mechanism's stress action spot is in the centre of two rolling guides 8, therefore, and good stability; External force on leading screw, can provide edition box supporting plate 1 required damping force when vertical any station suspends along the axial action of leading screw, and working stability is reliable.Also effectively alleviated simultaneously the tired impaired situation of elevating mechanism.
Described elevating mechanism also comprises a dust cover 9, and described dust cover 9 is installed between described lifting slide carriage 6 and the described vertical guide seat 7.By setting up dust cover 9, kinematic pair mechanism and outside that synchronous pulley and synchronous cog belt assembly 3, ball-screw nut assembly 5 and rolling guide 8 are formed are isolated, prevent that the particulate pollutant that moving component produces from producing pollution to mask 14.
See also Fig. 1 and Fig. 3, dividing and positioning mechanism is mainly used in accurate location mask version version box supporting plate 1 position and version fork 18 is led correctly to pick and place mask 14.Described dividing and positioning mechanism comprises: location Tooth Profile band 12, calibration locating wheel 11 and location Tooth Profile belt wheel 10.Described location Tooth Profile band 12 drives calibration locating wheel 11 respectively and location Tooth Profile belt wheel 10 rotates.And peripheral uniform several detents 110 of described calibration locating wheel 11, and the distance of adjacent two masks, 14 corresponding positions on the described mask version box supporting plate 1 equals the arc length distance of adjacent positioned groove 110 corresponding positions on the reference circle circumference of described calibration locating wheel 11.The side of described mask version box supporting plate 1 is fixed with a contiguous block 15.The location Tooth Profile band 12 of described dividing and positioning mechanism is fixedlyed connected with the web joint 15 of mask version box supporting plate 1 by profile of tooth strap clamp 16.So, when mask version box supporting plate 1 in the vertical direction pumps, simultaneously, calibration locating wheel 11 rotatablely moves synchronously around its rotating shaft.
In the posterior bracket of calibration locating wheel 11, be equipped with one with the corresponding gathering sill 17 of described detent 110 size shape.Be provided with two chutes in the vertical plane of described gathering sill 17: upper and lower chute.Being provided with one on the dividing plate between the described chute up and down supplies the guide finger 20 of version fork 18 sides to change the pin-and-hole passage of (moving) between two chutes.The distance of described upper and lower chute, be version fork 18 when picking and placeing mask 14 rising or the distance of decline.So, when picking and placeing mask 14, can pitch 18 to version and lead, avoid mask 14 being caused damage owing to pick and place time dislocation.In the present embodiment, the pin-and-hole passage is arranged on the centre position of upper and lower chute.
Working mechanism of the present invention is as follows:
In the design of the back of location reference circle gathering sill 17 is arranged, as shown in Figure 1.If version fork 18 is by the detent 110 on the calibration locating wheel 11,1 motion of then explanation version box supporting plate puts in place.Right safe beam 19 lateral layout on version fork 18 have guide finger 20.When taking out mask 14, behind the detent 110 that version fork 18 passes through on the calibration locating wheel 11, the guide finger 20 of right safe beam 19 sides on the version fork 18 just enters the gliding groove of gathering sill 17, when guide finger 20 arrives the gliding groove centre positions when arriving version fork 18 and getting edition position, version fork 18 could lift straight up, and the guide finger 20 of right safe beam 19 sides on the version fork 18 arrives the upper hopper chute of gathering sill 17 by the pin-and-hole passage.That is to say that version fork 18 degree of freedom in the horizontal direction is restrained, and in the vertical direction, version fork 18 is moving between the chute about in the of two.After version fork 18 arrived upper hopper chutes, version fork 18 can grasp mask 14 and oppositely take out mask 14 along the upper hopper chute of gathering sill 17.In like manner, put edition flow process, mask 14 is put back on the mask plate rack 13 according to the reverse flow process of getting version.Because version fork 18 positions that pick and place 6 masks 14 are fixed.Therefore; if because of the distance that distance that edition box supporting plate 1 rises or descend is not equal to two adjacent mask versions 14 appears in chance failure; locate so on the reference circle detent 110 just and be in the right safe beam 19 of version fork on 18 (as shown in Figure 5) that picks and places edition position and dislocation occurs; can't enter and pick and place mask 14 in the mask plate rack 13; suffer damage when version fork 18 picks and places it to avoid mask 14 because the position is inaccurate; and then guarantee that mask 14 is among the safeguard protection in picking and placeing the whole process of mask 14.Therefore, more stable work is reliable.
In sum, because dividing and positioning mechanism is not directly to be driven by elevating mechanism, drive and change by version box supporting plate, therefore, elevating mechanism only directly is responsible for carrying version box supporting plate, and need not directly to drive calibration and detent mechanism, therefore, can not occur in original elevating mechanism that synchronous cog belt is subjected to the effect of both sides power simultaneously and easy tired damage situations has improved its functional reliability and locating accuracy, prolong serviceable life simultaneously yet.
Because drive motor drives the ball-screw nut assembly by synchronous pulley and synchronous cog belt assembly and rotates, and is fixed with the nut bearing on the nut.Therefore, during the drive motor rotation, rotatablely moving of drive motor changed into the rectilinear motion of nut bearing along vertical rolling guide, this mechanism's stress action spot is in the centre of two rolling guides, therefore, and good stability; External force to acting on the leading screw, can provide edition box supporting plate required damping force when vertical any station suspends, reliable operation along lead screw shaft.
By dividing and positioning mechanism is set, can check mask version box carriage location whether correct, improve the accuracy of mask version box carriage location, can check edition accuracy of box carriage location, avoid mask and when being picked and placeed, suffer damage because the position is inaccurate by setting up gathering sill.Therefore, more stable work is reliable.
In addition, owing between lifting slide carriage and vertical guide seat, be provided with dust cover, can prevent of the pollution of the particulate pollutant of moving component generation to the mask box.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.The persond having ordinary knowledge in the technical field of the present invention, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (10)
1. positioning access mechanism of mask, comprise that driving elevating mechanism and that mask version box supporting plate moves up and down is used for dividing and positioning mechanism that mask version box blade position is positioned, it is characterized in that: described mask version box supporting plate directly is connected with described dividing and positioning mechanism, drives dividing and positioning mechanism it is located.
2. positioning access mechanism of mask as claimed in claim 1 is characterized in that: described elevating mechanism comprises a support, a driven unit and a guide assembly, and described driven unit drives mask version box supporting plate and does straight reciprocating motion along guide assembly.
3. positioning access mechanism of mask as claimed in claim 2, it is characterized in that: described driven unit comprises drive motor, synchronous pulley and synchronous cog belt assembly and ball-screw nut assembly, described drive motor drives synchronous pulley and synchronous cog belt assembly, and described synchronous pulley and synchronous cog belt assembly drive mask version box carriage by the ball-screw nut assembly and do straight reciprocating motion along guide assembly.
4. positioning access mechanism of mask as claimed in claim 3, it is characterized in that: described synchronous pulley and synchronous cog belt assembly comprise: driving pulley, first cog belt and driven pulley, the output shaft of described drive motor is fixedlyed connected with the central shaft of driving pulley, described driving pulley drives described driven pulley through described first cog belt and rotates, and the central shaft of described driven pulley is fixedlyed connected with the leading screw of ball-screw nut assembly and driven its rotation.
5. positioning access mechanism of mask as claimed in claim 2, it is characterized in that: described ball-screw nut assembly comprises nut and the leading screw that is meshed, described nut is fixedlyed connected with the nut bearing, and described nut bearing is fixedlyed connected with described mask version box supporting plate by a lifting slide carriage.
6. the positioning access mechanism of mask of stating as claim 5, it is characterized in that: described guide assembly comprises one group of rolling guide in the one group of vertical guide seat that is installed in described support, described rolling guide is set in parallel in the leading screw both sides of described ball-screw nut assembly, and described lifting slide carriage is set on the described rolling guide.
7. positioning access mechanism of mask as claimed in claim 6 is characterized in that: described elevating mechanism also comprises a dust cover, and described dust cover is installed between described lifting slide carriage and the described vertical guide seat.
8. positioning access mechanism of mask as claimed in claim 1, it is characterized in that: described dividing and positioning mechanism comprises: location Tooth Profile band, calibration locating wheel and location Tooth Profile belt wheel, described location Tooth Profile band drives the calibration locating wheel respectively and location Tooth Profile belt wheel rotates, described location Tooth Profile band is fixedlyed connected with mask version box supporting plate by a profile of tooth strap clamp, and peripheral uniform several detents of described calibration locating wheel, the distance of the adjacent two mask corresponding positions on the described mask version box supporting plate equals the arc length distance of adjacent positioned groove corresponding position on the reference circle circumference of described calibration locating wheel.
9. positioning access mechanism of mask as claimed in claim 8 is characterized in that: be equipped with on the posterior bracket of described calibration locating wheel one with the corresponding gathering sill of described detent size shape, a vertical plane of described gathering sill is provided with upper and lower chute.
10. positioning access mechanism of mask as claimed in claim 9 is characterized in that: be provided with one on the dividing plate between the described upper and lower chute for edition pin-and-hole passage that the guide finger of fork side is changed between two chutes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910044990 CN101526744B (en) | 2009-01-07 | 2009-01-07 | Positioning access mechanism of mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910044990 CN101526744B (en) | 2009-01-07 | 2009-01-07 | Positioning access mechanism of mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101526744A true CN101526744A (en) | 2009-09-09 |
| CN101526744B CN101526744B (en) | 2011-06-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910044990 Active CN101526744B (en) | 2009-01-07 | 2009-01-07 | Positioning access mechanism of mask |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102418777A (en) * | 2011-09-22 | 2012-04-18 | 深圳市锦瑞电子有限公司 | Synchronous belt-driven vertical movement mechanism |
| CN103863821A (en) * | 2012-12-07 | 2014-06-18 | 上海微电子装备有限公司 | Mask transmission device and method |
| CN104142612A (en) * | 2013-05-08 | 2014-11-12 | 上海微电子装备有限公司 | Mask pushback mechanism |
| CN107243878A (en) * | 2017-07-28 | 2017-10-13 | 京东方科技集团股份有限公司 | A kind of mask plate storage device |
| WO2019029634A1 (en) * | 2017-08-11 | 2019-02-14 | 上海微电子装备（集团）股份有限公司 | Mask fork for transferring mask, and corresponding mask box and mask transferring method |
| CN109782532A (en) * | 2017-11-14 | 2019-05-21 | 上海微电子装备（集团）股份有限公司 | A kind of edition library device and mask access method |
| CN109891323A (en) * | 2016-10-24 | 2019-06-14 | Asml荷兰有限公司 | Equipment for moving the object into and/or removing shell |
| CN110361936A (en) * | 2018-03-26 | 2019-10-22 | 上海微电子装备（集团）股份有限公司 | Mask thickness detection apparatus, storing mechanism, transmission mechanism and lithography system |
| CN114476669A (en) * | 2022-02-11 | 2022-05-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Version library device, version library system and attitude adjustment method |
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| JP3059582B2 (en) * | 1992-07-14 | 2000-07-04 | タイガースポリマー株式会社 | Method of manufacturing rotary roller for suction port of vacuum cleaner |
| US5679059A (en) * | 1994-11-29 | 1997-10-21 | Ebara Corporation | Polishing aparatus and method |
| WO2003041156A1 (en) * | 2001-11-07 | 2003-05-15 | Yient Co., Ltd. | Component separation and indexing unit utilizing vacuum holding and detection |
| JP3916148B2 (en) * | 2002-11-15 | 2007-05-16 | Ｔｄｋ株式会社 | Wafer processing apparatus with wafer mapping function |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102418777A (en) * | 2011-09-22 | 2012-04-18 | 深圳市锦瑞电子有限公司 | Synchronous belt-driven vertical movement mechanism |
| CN103863821A (en) * | 2012-12-07 | 2014-06-18 | 上海微电子装备有限公司 | Mask transmission device and method |
| CN103863821B (en) * | 2012-12-07 | 2016-12-21 | 上海微电子装备有限公司 | Mask transmitting device and method |
| CN104142612A (en) * | 2013-05-08 | 2014-11-12 | 上海微电子装备有限公司 | Mask pushback mechanism |
| CN104142612B (en) * | 2013-05-08 | 2016-07-06 | 上海微电子装备有限公司 | A kind of mask plate pushes back mechanism |
| CN109891323A (en) * | 2016-10-24 | 2019-06-14 | Asml荷兰有限公司 | Equipment for moving the object into and/or removing shell |
| CN109891323B (en) * | 2016-10-24 | 2021-03-16 | Asml荷兰有限公司 | Device for moving objects into and/or out of a housing |
| CN107243878A (en) * | 2017-07-28 | 2017-10-13 | 京东方科技集团股份有限公司 | A kind of mask plate storage device |
| CN107243878B (en) * | 2017-07-28 | 2019-08-02 | 京东方科技集团股份有限公司 | A kind of mask plate storage device |
| WO2019029634A1 (en) * | 2017-08-11 | 2019-02-14 | 上海微电子装备（集团）股份有限公司 | Mask fork for transferring mask, and corresponding mask box and mask transferring method |
| KR20200035135A (en) * | 2017-08-11 | 2020-04-01 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | Mask fork for transporting the mask and the corresponding mask box and method of transporting the mask |
| US11106143B2 (en) | 2017-08-11 | 2021-08-31 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Mask fork for transferring mask, and corresponding mask box and mask transferring method |
| KR102369044B1 (en) * | 2017-08-11 | 2022-02-28 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미 티드 | Mask fork for mask transfer and corresponding mask box and mask transfer method |
| CN109782532A (en) * | 2017-11-14 | 2019-05-21 | 上海微电子装备（集团）股份有限公司 | A kind of edition library device and mask access method |
| CN109782532B (en) * | 2017-11-14 | 2020-09-11 | 上海微电子装备（集团）股份有限公司 | Version library device and mask access method |
| CN110361936A (en) * | 2018-03-26 | 2019-10-22 | 上海微电子装备（集团）股份有限公司 | Mask thickness detection apparatus, storing mechanism, transmission mechanism and lithography system |
| CN114476669A (en) * | 2022-02-11 | 2022-05-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Version library device, version library system and attitude adjustment method |
| CN114476669B (en) * | 2022-02-11 | 2023-10-03 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Plate library device, plate library system and posture adjustment method |
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| CN101526744B (en) | 2011-06-29 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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