CN101438411A - 用于制造分离彩色滤光片的侧壁间隔物及对应图像传感器的方法 - Google Patents
用于制造分离彩色滤光片的侧壁间隔物及对应图像传感器的方法 Download PDFInfo
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- CN101438411A CN101438411A CNA2007800166274A CN200780016627A CN101438411A CN 101438411 A CN101438411 A CN 101438411A CN A2007800166274 A CNA2007800166274 A CN A2007800166274A CN 200780016627 A CN200780016627 A CN 200780016627A CN 101438411 A CN101438411 A CN 101438411A
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
- H01L31/02164—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
Claims (73)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/399,314 | 2006-04-07 | ||
US11/399,314 US20070238035A1 (en) | 2006-04-07 | 2006-04-07 | Method and apparatus defining a color filter array for an image sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101438411A true CN101438411A (zh) | 2009-05-20 |
Family
ID=38335740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2007800166274A Pending CN101438411A (zh) | 2006-04-07 | 2007-03-30 | 用于制造分离彩色滤光片的侧壁间隔物及对应图像传感器的方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070238035A1 (zh) |
EP (1) | EP2011151A1 (zh) |
JP (1) | JP2009533698A (zh) |
KR (1) | KR20090018044A (zh) |
CN (1) | CN101438411A (zh) |
TW (1) | TW200745629A (zh) |
WO (1) | WO2007123712A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104024143A (zh) * | 2011-11-04 | 2014-09-03 | 高通Mems科技公司 | 沿着导电线的侧壁间隔物 |
CN112397537A (zh) * | 2019-08-13 | 2021-02-23 | 豪威科技股份有限公司 | 图像传感器的全埋入式滤色器阵列 |
Families Citing this family (30)
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JP2008153594A (ja) * | 2006-12-20 | 2008-07-03 | Seiko Instruments Inc | イメージセンサic |
US20090189232A1 (en) * | 2008-01-28 | 2009-07-30 | Micron Technology, Inc. | Methods and apparatuses providing color filter patterns arranged to reduce the effect of crosstalk in image signals |
JP4835719B2 (ja) * | 2008-05-22 | 2011-12-14 | ソニー株式会社 | 固体撮像装置及び電子機器 |
US8138092B2 (en) | 2009-01-09 | 2012-03-20 | Lam Research Corporation | Spacer formation for array double patterning |
MX2010007359A (es) * | 2009-07-02 | 2011-06-02 | Tay Hioknam | Matriz de guia de luz para un sensor de imagen. |
US8269264B2 (en) | 2009-11-09 | 2012-09-18 | Omnivision Technologies, Inc. | Image sensor having waveguides formed in color filters |
US9093579B2 (en) | 2011-04-28 | 2015-07-28 | Semiconductor Components Industries, Llc | Dielectric barriers for pixel arrays |
US8530266B1 (en) | 2012-07-18 | 2013-09-10 | Omnivision Technologies, Inc. | Image sensor having metal grid with a triangular cross-section |
JP6398409B2 (ja) * | 2014-07-16 | 2018-10-03 | 三菱電機株式会社 | 受光素子 |
JPWO2018043654A1 (ja) | 2016-09-02 | 2019-06-24 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
US10856016B2 (en) | 2016-12-31 | 2020-12-01 | Turner Broadcasting System, Inc. | Publishing disparate live media output streams in mixed mode based on user selection |
US11503352B2 (en) | 2016-12-31 | 2022-11-15 | Turner Broadcasting System, Inc. | Dynamic scheduling and channel creation based on external data |
US10645462B2 (en) | 2016-12-31 | 2020-05-05 | Turner Broadcasting System, Inc. | Dynamic channel versioning in a broadcast air chain |
US11051074B2 (en) | 2016-12-31 | 2021-06-29 | Turner Broadcasting System, Inc. | Publishing disparate live media output streams using live input streams |
US12022142B2 (en) | 2016-12-31 | 2024-06-25 | Turner Broadcasting System, Inc. | Publishing a plurality of disparate live media output stream manifests using live input streams and pre-encoded media assets |
US10965967B2 (en) | 2016-12-31 | 2021-03-30 | Turner Broadcasting System, Inc. | Publishing a disparate per-client live media output stream based on dynamic insertion of targeted non-programming content and customized programming content |
US11546400B2 (en) | 2016-12-31 | 2023-01-03 | Turner Broadcasting System, Inc. | Generating a live media segment asset |
US11038932B2 (en) | 2016-12-31 | 2021-06-15 | Turner Broadcasting System, Inc. | System for establishing a shared media session for one or more client devices |
US10425700B2 (en) * | 2016-12-31 | 2019-09-24 | Turner Broadcasting System, Inc. | Dynamic scheduling and channel creation based on real-time or near-real-time content context analysis |
US11134309B2 (en) | 2016-12-31 | 2021-09-28 | Turner Broadcasting System, Inc. | Creation of channels using pre-encoded media assets |
US11962821B2 (en) | 2016-12-31 | 2024-04-16 | Turner Broadcasting System, Inc. | Publishing a disparate live media output stream using pre-encoded media assets |
US11109086B2 (en) | 2016-12-31 | 2021-08-31 | Turner Broadcasting System, Inc. | Publishing disparate live media output streams in mixed mode |
US10992973B2 (en) | 2016-12-31 | 2021-04-27 | Turner Broadcasting System, Inc. | Publishing a plurality of disparate live media output stream manifests using live input streams and pre-encoded media assets |
US10075753B2 (en) | 2016-12-31 | 2018-09-11 | Turner Broadcasting System, Inc. | Dynamic scheduling and channel creation based on user selection |
US11051061B2 (en) | 2016-12-31 | 2021-06-29 | Turner Broadcasting System, Inc. | Publishing a disparate live media output stream using pre-encoded media assets |
US10694231B2 (en) | 2016-12-31 | 2020-06-23 | Turner Broadcasting System, Inc. | Dynamic channel versioning in a broadcast air chain based on user preferences |
US11245964B2 (en) | 2017-05-25 | 2022-02-08 | Turner Broadcasting System, Inc. | Management and delivery of over-the-top services over different content-streaming systems |
US10880606B2 (en) | 2018-12-21 | 2020-12-29 | Turner Broadcasting System, Inc. | Disparate live media output stream playout and broadcast distribution |
US11082734B2 (en) | 2018-12-21 | 2021-08-03 | Turner Broadcasting System, Inc. | Publishing a disparate live media output stream that complies with distribution format regulations |
US10873774B2 (en) | 2018-12-22 | 2020-12-22 | Turner Broadcasting System, Inc. | Publishing a disparate live media output stream manifest that includes one or more media segments corresponding to key events |
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US3971065A (en) * | 1975-03-05 | 1976-07-20 | Eastman Kodak Company | Color imaging array |
JPS57185005A (en) * | 1981-05-08 | 1982-11-15 | Nec Corp | Color filter for solid-state image pickup element |
JPS5950411A (ja) * | 1982-09-17 | 1984-03-23 | Matsushita Electric Ind Co Ltd | 色フイルタの製造方法 |
US5708264A (en) * | 1995-11-07 | 1998-01-13 | Eastman Kodak Company | Planar color filter array for CCDs from dyed and mordant layers |
US6297071B1 (en) * | 1998-07-22 | 2001-10-02 | Eastman Kodak Company | Method of making planar image sensor color filter arrays |
KR100477789B1 (ko) * | 1999-12-28 | 2005-03-22 | 매그나칩 반도체 유한회사 | 이미지센서의 제조 방법 |
JP3787839B2 (ja) * | 2002-04-22 | 2006-06-21 | セイコーエプソン株式会社 | デバイスの製造方法、デバイス及び電子機器 |
US7502058B2 (en) * | 2003-06-09 | 2009-03-10 | Micron Technology, Inc. | Imager with tuned color filter |
CN1661806A (zh) * | 2004-02-24 | 2005-08-31 | 三洋电机株式会社 | 固体摄像元件和固体摄像元件的制造方法 |
KR100689885B1 (ko) * | 2004-05-17 | 2007-03-09 | 삼성전자주식회사 | 광감도 및 주변광량비 개선을 위한 cmos 이미지 센서및 그 제조방법 |
JP2005340299A (ja) * | 2004-05-24 | 2005-12-08 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法並びにカメラ |
JP4175298B2 (ja) * | 2004-07-07 | 2008-11-05 | セイコーエプソン株式会社 | カラーフィルタとその製造方法及び電気光学装置並びに電子機器 |
JP2006098528A (ja) * | 2004-09-28 | 2006-04-13 | Dainippon Printing Co Ltd | カラーフィルタ |
US7078779B2 (en) * | 2004-10-15 | 2006-07-18 | Taiwan Semiconductor Manufacturing Co., Ltd | Enhanced color image sensor device and method of making the same |
JP2006119270A (ja) * | 2004-10-20 | 2006-05-11 | Sharp Corp | 表示装置用基板 |
US7193289B2 (en) * | 2004-11-30 | 2007-03-20 | International Business Machines Corporation | Damascene copper wiring image sensor |
KR100606922B1 (ko) * | 2004-12-30 | 2006-08-01 | 동부일렉트로닉스 주식회사 | 보호막을 이용한 씨모스 이미지 센서 및 그 제조방법 |
JP4623641B2 (ja) * | 2005-02-23 | 2011-02-02 | パナソニック株式会社 | 固体撮像装置の製造方法 |
JP2006285104A (ja) * | 2005-04-04 | 2006-10-19 | Dainippon Printing Co Ltd | カラーフィルタおよびカラーフィルタの製造方法 |
-
2006
- 2006-04-07 US US11/399,314 patent/US20070238035A1/en not_active Abandoned
-
2007
- 2007-03-30 WO PCT/US2007/007954 patent/WO2007123712A1/en active Application Filing
- 2007-03-30 JP JP2009504220A patent/JP2009533698A/ja not_active Withdrawn
- 2007-03-30 EP EP07754470A patent/EP2011151A1/en not_active Withdrawn
- 2007-03-30 CN CNA2007800166274A patent/CN101438411A/zh active Pending
- 2007-03-30 KR KR1020087027114A patent/KR20090018044A/ko not_active Application Discontinuation
- 2007-04-04 TW TW096112182A patent/TW200745629A/zh unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104024143A (zh) * | 2011-11-04 | 2014-09-03 | 高通Mems科技公司 | 沿着导电线的侧壁间隔物 |
CN112397537A (zh) * | 2019-08-13 | 2021-02-23 | 豪威科技股份有限公司 | 图像传感器的全埋入式滤色器阵列 |
CN112397537B (zh) * | 2019-08-13 | 2022-06-14 | 豪威科技股份有限公司 | 图像传感器及其制造方法 |
US11750906B2 (en) | 2019-08-13 | 2023-09-05 | Omnivision Technologies, Inc. | Fully buried color filter array of image sensor |
Also Published As
Publication number | Publication date |
---|---|
WO2007123712A1 (en) | 2007-11-01 |
US20070238035A1 (en) | 2007-10-11 |
JP2009533698A (ja) | 2009-09-17 |
EP2011151A1 (en) | 2009-01-07 |
KR20090018044A (ko) | 2009-02-19 |
TW200745629A (en) | 2007-12-16 |
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