CN101428973A

CN101428973A - Magnetic controlled film coating chamber for film coating glass

Info

Publication number: CN101428973A
Application number: CNA2008102359901A
Authority: CN
Inventors: 赵子东
Original assignee: SUZHOU XIN'AIKE DEPOSITION EQUIPMENT CO Ltd
Current assignee: SUZHOU XIN'AIKE DEPOSITION EQUIPMENT CO Ltd
Priority date: 2008-11-19
Filing date: 2008-11-19
Publication date: 2009-05-13
Anticipated expiration: 2028-11-19
Also published as: CN101428973B

Abstract

The invention discloses a vacuum magnetically controlled film coating chamber with even air suction for film coating glass. The vacuum magnetically controlled film coating chamber comprises a cavity, wherein three separating channels are arranged in the cavity, and divide the cavity into four areas; each separating channel is provided with a glass conveying channel; wall plates of two sides forming the separating channels and an upper clapboard and a lower clapboard forming the glass conveying channels are provided with air suction holes; two air suction channels are also arranged in the cavity, are distributed on two ends of the separating channels, and are communicated with a cavity in each separating channel; and two ends of each air suction channel are communicated with air suction holes on the cavity. The vacuum magnetically controlled film coating chamber is applicable in the field of production of vacuum coated glass.

Description

Magnetic controlled film coating chamber for film coating glass

Technical field

The present invention relates to a kind of magnetic controlled film coating chamber for film coating glass.

Background technology

Traditional coated glass vacuum film coating chamber adopts a chamber, because chamber is very big, the bleeding point of several fixed points when being vacuumized, this chamber can only be set, when bleeding, peripheral very fast being taken away of air, intermediary air around slowly the flow direction, are taken away by aspirating hole more at last, will produce the vacuum suction non-uniform phenomenon like this, very easily cause the ununiformity of plated film rete.

Summary of the invention

Technical problem to be solved by this invention is: a kind of uniform magnetic controlled film coating chamber for film coating glass of bleeding will be provided.

For addressing the above problem, the technical solution used in the present invention is: magnetic controlled film coating chamber for film coating glass, comprise: chamber, in chamber, be provided with three channel isolations, channel isolation is divided into four zones with chamber, each channel isolation is provided with the glass transfer passage, constitute on the both sides wallboard of channel isolation and constitute the glass transfer passage on, offer aspirating hole on the lower clapboard, in chamber, also be provided with two bleed-off passages, bleed-off passage is distributed in the channel isolation two ends and communicates with cavity in the channel isolation, and the two ends of bleed-off passage communicate with bleeding point on the chamber.

Advantage of the present invention is: by adopting channel isolation, the innovation of bleeding from common both sides is multi-faceted to chamber evacuation for upper and lower, left and right etc., has effectively improved the homogeneity of vacuum suction, prevents the bleed generation of non-uniform phenomenon of coating chamber part.

Description of drawings

Fig. 1 is the structural principle synoptic diagram that magnetic controlled film coating chamber for film coating glass of the present invention is overlooked direction;

Fig. 2 is the A-A sectional structure enlarged view of channel isolation described in Fig. 1.

Among the figure: 1, chamber, 2, channel isolation, 3, bleed-off passage, 4, cavity, 41, wallboard, 42, wallboard, 5, aspirating hole, 6, the glass transfer passage, 61, dividing plate, 62, dividing plate, 7, bleeding point.

Embodiment

Below in conjunction with the drawings and specific embodiments technical solutions according to the invention and principle of work thereof and advantage are further described.

As Fig. 1, shown in Figure 2, a kind of magnetic controlled film coating chamber for film coating glass, comprise: chamber 1, in chamber 1, be provided with three channel isolations 2, channel isolation 2 is divided into four zones with chamber 1, each channel isolation 2 is provided with glass transfer passage 6, at the both sides wallboard 41 that constitutes channel isolation 2, on 42 and constitute glass transfer passage 6 on, lower clapboard 61, offer aspirating hole 5 on 62, in chamber 1, also be provided with two bleed-off passages 3, bleed-off passage 3 is distributed in channel isolation 2 two ends and communicates with cavity 4 in the channel isolation 2, and the two ends of bleed-off passage 3 communicate with bleeding point 7 on the chamber 1.

Principle of work of the present invention is: when glass be transferred from the left side of chamber 1 enter chamber 1 after, when being arranged on the glass transfer passage 6 on the channel isolation 2, the diffusion pump that is arranged on chamber 1 outside is bled by 7 pairs of chambers 1 of bleeding point, air enters cavity 4 according to direction shown in the arrow among Fig. 1 from the aspirating hole 5 that is arranged on

wallboard

41,42 and the dividing

plate

61,62, the two ends that flow to channel isolation 2 then enter pump-line 3, discharge from the aspirating hole 7 at the two ends of pump-line 3 at last.

The present invention is directly bled to coating chamber upper and lower surface and the coating chamber that changes into glass of bleeding simultaneously by diffusion pump, homogenizing the homogeneity of bleeding, fundamentally reduced the uneven phenomenon of vacuum suction.

Claims

1, magnetic controlled film coating chamber for film coating glass, comprise: chamber, it is characterized in that: in chamber, be provided with three channel isolations, channel isolation is divided into four zones with chamber, each channel isolation is provided with the glass transfer passage, offering aspirating hole on the both sides wallboard that constitutes channel isolation and on the upper and lower dividing plate of formation glass transfer passage, in chamber, also be provided with two bleed-off passages, bleed-off passage is distributed in the channel isolation two ends and communicates with cavity in the channel isolation, and the two ends of bleed-off passage communicate with bleeding point on the chamber.