CN101408413B - Device for detecting wide distance light beam parallelism - Google Patents
Device for detecting wide distance light beam parallelism Download PDFInfo
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- CN101408413B CN101408413B CN2008100514917A CN200810051491A CN101408413B CN 101408413 B CN101408413 B CN 101408413B CN 2008100514917 A CN2008100514917 A CN 2008100514917A CN 200810051491 A CN200810051491 A CN 200810051491A CN 101408413 B CN101408413 B CN 101408413B
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Abstract
The invention relates to a wide distance beam parallelism detecting apparatus, comprising a photoelectric auto-collimator and a diameter-expanding collimating arm. The apparatus can detect the parallelism of the wide distance parallel beams and the detecting distance can reach 1.5m; and two parallel beams do not need to be contained into the caliber of the photoelectric auto-collimator so as to reduce the caliber of the photoelectric auto-collimator and largely reduce the manufacturing cost of the photoelectric auto-collimator. Simultaneously, the adoption of pentaprism and optical wedge largely reduces the processing precision requirement of the pentaprism and has no impact on the detecting precision of the whole apparatus and higher precision can be provided. The use of an optical splitting system in the photoelectric auto-collimator leads the detecting wave band of the apparatus to be expanded to the laser and infrared spectrum band from the white spectrum band so as to become a multi-spectrum optical system.
Description
Technical field
The present invention is a device for detecting wide distance light beam parallelism, belongs to plain shaft parallelism detection technique field.
Background technology
Detection for wide distance light beam parallelism, up to the present, generally all use the heavy caliber parallel light tube, detected two-way directional light is included in the parallel light tube bore, according to the position that is imaged on the focal surface of collimator tube at 2, judge the parallel accuracy of two-way directional light.(list of references: the adjustment of multispectral optical system optical parallelism and the method for inspection are surveyed, Fu Yuegang, Wang Zhijian, Li Bo, Changchun Institute of Optics and Fine Mechanics's journal, Dec calendar year 2001, the 24th the 4th phase of volume) there is following shortcoming in prior art: 1, for actual measurement, the distance between the two route parallel beams is very wide, but clear aperature is little, use the large aperture parallel light tube to detect, waste real the genus; 2, when tested two parallel beam relative apertures were big, the large aperture parallel light tube can't be realized this test request again; 3, the bore of auto-collimation collimator must be greater than the distance of detected two route parallel beams, this changes with tested beam distance with regard to the bore that causes parallel light tube, this makes the manufacturing cost of parallel light tube increase, and is directly proportional with the cube and even the biquadratic of bore increase.Just be difficult to processing when increasing to the 500mm left and right sides, cost is very expensive, complicate fabrication process, and the cycle is long; 4, existing checkout equipment, need utilize other benchmark to derive and measure the process complexity apart from the drawing of benchmark for long.
Summary of the invention
For solving the deficiency that existing parallel beam checkout equipment exists, the invention provides device for detecting wide distance light beam parallelism, do not need with detected width from two route parallel beams be included within the bore of auto-collimation collimator, can realize that so small-bore auto-collimation collimator can detect wide distance light beam parallelism.
As shown in Figure 1, parallel light tube hole enlargement collimator apparatus provided by the invention by 1 and hole enlargement collimation arm 2 constitute, hole enlargement arm 2 is positioned at the front of auto-collimation collimator 1, and can rotate around auto-collimation collimator 1;
Described auto-collimation collimator 1 adopts traditional Newtonian structure, is made up of pointolite 21, parabolic shape principal reflection mirror 23, plane mirror 24 and beam splitting system 17; Described beam splitting system 17 is made up of Amici prism 18, catoptron 19 and secondary reflection mirror 20, and wherein, catoptron 19 is coated with the zinc sulphide rete; Above-mentioned all building blocks all place in the auto-collimation collimator housing;
By point 21 light that send, pass through catoptron 19 and secondary reflection mirror 20, plane mirror 24, become parallel beam 10 through parabolic shape principal reflection mirror 23 again; The part of parallel beam 10 enters the compound pentaprism 15 of hole enlargement arm 2 "; Described pointolite 21 provides visible or infrared light; Pointolite 21 is preferably bromine tungsten filament lamp;
Perhaps, light source adopts LASER Light Source 22, and LASER Light Source 22 adopts the optical fiber fitting method to enter beam splitting system, and laser sees through Amici prism 18, reflex to secondary reflection mirror 20 by catoptron 19, again via plane mirror 24 and parabolic shape principal reflection mirror 23 with parallel light emergence;
Described hole enlargement arm 2 is made up of compound pentaprism 15, compound pentaprism group 16, mercury boxes 8 and mercury boxes 9; Above-mentioned all building blocks all place in the housing of hole enlargement arm;
Described compound pentaprism 15 is combined by pentaprism 3 and wedge 6, and its adhesive surface is coated with transflective film; Compound pentaprism 15 is positioned at the front of auto-collimation collimator 1, and the part of the parallel beam 10 that parallel light tube 1 is sent is introduced in the hole enlargement arm 2, and light beam is divided into two-way, and one the tunnel is used for carrying out the self check of parallel light tube, and one the tunnel passes to compound pentaprism group 16;
Described compound pentaprism group 16 is made up of pentaprism 4, pentaprism 5 and a wedge 7, and wedge 7 is coated with transflective film with the adhesive surface of pentaprism 4, and wedge 7 does not have plated film with the adhesive surface of pentaprism 5, and light can directly see through; The light beam 13 of pentaprism 4 outgoing of compound pentaprism group 16 remains parallel with the light beam 14 through pentaprism 5 outgoing; And compound pentaprism group 16 and mercury boxes 9 be along with physical construction can be together moves along the inwall of the housing of whole hole enlargement arm 2, adjusts distance between compound pentaprism 15 and the compound pentaprism group 16 to adjust the distance between the tested two-way directional light.
The distance of adjusting between compound pentaprism 15 and the compound pentaprism group 16 does not reduce accuracy of detection simultaneously again with the distance of adjusting between the tested two-way directional light.This also is an inventive point of the present invention.
Among the present invention, utilize pentaprism light path can be transferred 90 °, and in pentaprism optical axis cross section, do not produce the characteristic that kine bias is changeed, this has just reduced one and has caused that outgoing beam departs from the factor of elementary beam direction, only needs to consider that pentaprism is in the influence to outgoing beam 14 of the offset error of other both direction.Simultaneously, the introducing of wedge makes light to the center deviation, has compensated the error that pentaprism causes.
For device for detecting wide distance light beam parallelism, after the distance between compound pentaprism 15 and the compound pentaprism group 16 changes, must calibrate system.And after using certain hour, considering the material deformation influence of hole enlargement arm, system also will calibrate.The advantage of this device just is to realize self calibration, need be by outside miscellaneous equipment.
System is calibrated the standard water plane that will utilize mercury boxes to provide.Further specify optics self check process of the present invention below in conjunction with Fig. 2 and Fig. 3.
At first, parallel light tube is calibrated.Parallel light tube 1 sends directional light 10, behind pentaprism 3, a part sees through wedge 6 outgoing, get on the mercury face of mercury boxes 8, light beam 11 returns by former road, being imaged on the parallel light tube image planes, by adjusting compound pentaprism 15, is that cross division line overlaps with the cross division line of parallel light tube itself with imaging.
Secondly, the light beam 10 of parallel light tube outgoing is through behind the pentaprism 3, some is turned back after 90 ° is that light beam 12 enters compound pentaprism group 16, emergent light 13 is got on the mercury boxes 9, light returns by former road, be imaged on the image planes by parallel light tube, see the picture of this moment is whether cross division line overlaps with the cross division line of light pipe itself, realize by adjusting compound pentaprism 15 equally.Because compound pentaprism group 16 mixes up in advance, outgoing beam 13,14 is parallel all the time, so be fed back into parallel light tube by former road when light beam 13, when making outgoing beam 13 and incident beam 10 parallel by debugging compound pentaprism 15, light beam 14 is also just parallel with light beam 10.
The detection of dynamic process is as follows: after the optics self check is finished, detected parallel beam 14 is turned back after 90 ° by compound pentaprism group 16, the compound pentaprism 15 of process is turned back again 90 ° enters auto-collimation collimator 1, forms a hot spot on the focal plane of auto-collimation collimator 1; Tested parallel beam 10 is directly injected in the auto-collimation collimator 1, same another hot spot that on the focal plane of auto-collimation collimator, forms, if two hot spots overlap, illustrate that parallel beam 10 and 14 is parallel, otherwise on auto-collimation collimator 1 focal plane, form the spacing of picture point and the focal length of auto-collimation collimator 1 according to parallel beam 10 and 14, just can calculate the parallel misalignment of parallel beam 10 and 14.
Device for detecting wide distance light beam parallelism of the present invention also has following technical scheme:
As shown in Figure 4, device for detecting wide distance light beam parallelism is by small-bore parallel light tube 25 with also have hole enlargement arm 2 to constitute;
Described small-bore parallel light tube 25 is made of telephotolens 26 and the graticule 27 that is placed on the focal plane of lens; The formation of hole enlargement arm 2 is identical with the structure of the hole enlargement arm 2 shown in Figure 1 of above-mentioned technical scheme; Just hole enlargement arm 2 is enclosed within on the small-bore parallel light tube 25, fixes by securing member, is locked on the parallel light tube 25.
Further specify the self check process of system in conjunction with Fig. 5.
Because in the actual detected process, light path is the same during with self check, and just direction is opposite, so the code name of detected light beam is decided to be light beam 32 and light beam 28 equally here.
The enforcement testing process is as follows: after the optics self check was finished, detected light beam 32 was turned back after 90 ° through compound pentaprism group 16, and being turned back again 90 ° through compound pentaprism 15 enters small-bore auto-collimation collimator 25, forms a hot spot on its focal plane; Tested parallel beam 28 directly enters parallel light tube 25 through compound pentaprism 15, also forms a hot spot on focal plane; If these two hot spots overlap, illustrate that parallel beam 28 and 32 is parallel, otherwise on auto-collimation collimator 25 focal planes, form the spacing of picture point and the focal length of auto-collimation collimator 25 according to parallel beam 28 and 32, just can calculate the parallel misalignment of parallel beam 28 and 32.
The device for detecting wide distance light beam parallelism that this technical scheme provides, adopt the structure and the light path of the hole enlargement arm 2 identical with Fig. 2 with above-mentioned Fig. 1, so difference is at its light that utilizes parallel light tube to send fully, in other words, enter pick-up unit from the external world, the light beam of the compound pentaprism 15 of process is received by parallel light tube fully.Simultaneously, this device volume is little, and is also very convenient during detection.The device for detecting wide distance light beam parallelism that this technical scheme provides is applicable to the detection of small-bore width from the light parallel beam.
Beneficial effect: apparatus of the present invention can detect the collimation of width from parallel beam, its distance can reach 1.5m, do not need detected two route parallel beams is included within the bore of auto-collimation collimator, can reduce the bore of auto-collimation collimator like this, and greatly reduce the cost of making auto-collimation collimator.Simultaneously, the use of pentaprism and wedge, feasible requirement on machining accuracy to pentaprism reduces greatly, but this does not influence whole Device Testing precision, and very high precision is provided on the contrary.Cost of the present invention is very low, and manufacturing process is simple, and the cycle is short, can detect the collimation of width from parallel beam, and the precision height.
The introducing of beam splitting system in the auto-collimation collimator makes this Device Testing wave band extend to laser and infrared light spectrum section by the white-light spectrum section, becomes multispectral optical system, has increased the usable range of instrument.
Description of drawings
Fig. 1 is the structural representation of device for detecting wide distance light beam parallelism.It also is a Figure of abstract.
Fig. 2 is the structure and the light path synoptic diagram of hole enlargement arm in the device for detecting wide distance light beam parallelism.
Light path synoptic diagram when Fig. 3 is the device for detecting wide distance light beam parallelism detection of dynamic.
Fig. 4 is a kind of device for detecting wide distance light beam parallelism structural representation of embodiment 2.
Fig. 5 is the light path synoptic diagram of a kind of device for detecting wide distance light beam parallelism of embodiment 2.
Embodiment
As shown in Figure 1, parallel light tube hole enlargement collimator apparatus provided by the invention by 1 and hole enlargement collimation arm 2 constitute, hole enlargement arm 2 is positioned at the front of auto-collimation collimator 1, and can rotate around auto-collimation collimator 1;
Described auto-collimation collimator 1 adopts traditional Newtonian structure, is made up of pointolite 21, parabolic shape principal reflection mirror 23, plane mirror 24 and beam splitting system 17; Described beam splitting system 17 is made up of Amici prism 18, catoptron 19 and secondary reflection mirror 20, and wherein, catoptron 19 is coated with the zinc sulphide rete; Above-mentioned all building blocks all place in the auto-collimation collimator housing;
By point 21 light that send, pass through catoptron 19 and secondary reflection mirror 20, plane mirror 24, become parallel beam 10 through parabolic shape principal reflection mirror 23 again; The part of parallel beam 10 enters the compound pentaprism 15 of hole enlargement arm 2 "; Described pointolite 21 provides visible or infrared light; Pointolite 21 is preferably bromine tungsten filament lamp;
Perhaps, light source adopts LASER Light Source 22, and LASER Light Source 22 adopts the optical fiber fitting method to enter beam splitting system, and laser sees through Amici prism 18, reflex to secondary reflection mirror 20 by catoptron 19, again via plane mirror 24 and parabolic shape principal reflection mirror 23 with parallel light emergence;
Described hole enlargement arm 2 is made up of compound pentaprism 15, compound pentaprism group 16, mercury boxes 8 and mercury boxes 9; Above-mentioned all building blocks all place in the housing of hole enlargement arm;
Described compound pentaprism 15 is combined by pentaprism 3 and wedge 6, and its adhesive surface is coated with transflective film; Compound pentaprism 15 is positioned at the front of auto-collimation collimator 1, and the part of the parallel beam 10 that parallel light tube 1 is sent is introduced in the hole enlargement arm 2, and light beam is divided into two-way, and one the tunnel is used for carrying out the self check of parallel light tube, and one the tunnel passes to compound pentaprism group 16;
Described compound pentaprism group 16 is made up of pentaprism 4, pentaprism 5 and a wedge 7, and wedge 7 is coated with transflective film with the adhesive surface of pentaprism 4, and wedge 7 does not have plated film with the adhesive surface of pentaprism 5, and light can directly see through; The light beam 13 of pentaprism 4 outgoing of compound pentaprism group 16 remains parallel with the light beam 14 through pentaprism 5 outgoing; And compound pentaprism group 16 and mercury boxes 9 be along with physical construction can be together moves along the inwall of the housing of whole hole enlargement arm 2, adjusts distance between compound pentaprism 15 and the compound pentaprism group 16 to adjust the distance between the tested two-way directional light.
The distance of adjusting between compound pentaprism 15 and the compound pentaprism group 16 does not reduce accuracy of detection simultaneously again with the distance of adjusting between the tested two-way directional light.This also is an inventive point of the present invention.
Among the present invention, utilize pentaprism light path can be transferred 90 °, and in pentaprism optical axis cross section, do not produce the characteristic that kine bias is changeed, this has just reduced one and has caused that outgoing beam departs from the factor of elementary beam direction, only needs to consider that pentaprism is in the influence to outgoing beam 14 of the offset error of other both direction.Simultaneously, the introducing of wedge makes light to the center deviation, has compensated the error that pentaprism causes.
For device for detecting wide distance light beam parallelism, after the distance between compound pentaprism 15 and the compound pentaprism group 16 changes, must calibrate system.And after using certain hour, considering the material deformation influence of hole enlargement arm, system also will calibrate.The advantage of this device just is to realize self calibration, need be by outside miscellaneous equipment.
System is calibrated the standard water plane that will utilize mercury boxes to provide.Further specify optics self check process of the present invention below in conjunction with Fig. 2 and Fig. 3.
At first, parallel light tube is calibrated.Parallel light tube 1 sends directional light 10, behind pentaprism 3, a part sees through wedge 6 outgoing, get on the mercury face of mercury boxes 8, light beam 11 returns by former road, being imaged on the parallel light tube image planes, by adjusting compound pentaprism 15, is that cross division line overlaps with the cross division line of parallel light tube itself with imaging.
Secondly, the light beam 10 of parallel light tube outgoing is through behind the pentaprism 3, some is turned back after 90 ° is that light beam 12 enters compound pentaprism group 16, emergent light 13 is got on the mercury boxes 9, light returns by former road, be imaged on the image planes by parallel light tube, see the picture of this moment is whether cross division line overlaps with the cross division line of light pipe itself, realize by adjusting compound pentaprism 15 equally.Because compound pentaprism group 16 mixes up in advance, outgoing beam 13,14 is parallel all the time, so be fed back into parallel light tube by former road when light beam 13, when making outgoing beam 13 and incident beam 10 parallel by debugging compound pentaprism 15, light beam 14 is also just parallel with light beam 10.
The detection of dynamic process is as follows: after the optics self check is finished, detected parallel beam 14 is turned back after 90 ° by compound pentaprism group 16, the compound pentaprism 15 of process is turned back again 90 ° enters auto-collimation collimator 1, forms a hot spot on the focal plane of auto-collimation collimator 1; Tested parallel beam 10 is directly injected in the auto-collimation collimator 1, same another hot spot that on the focal plane of auto-collimation collimator, forms, if two hot spots overlap, illustrate that parallel beam 10 and 14 is parallel, otherwise on auto-collimation collimator 1 focal plane, form the spacing of picture point and the focal length of auto-collimation collimator 1 according to parallel beam 10 and 14, just can calculate the parallel misalignment of parallel beam 10 and 14.
A part of light beam that whole detection has just utilized parallel light tube to provide, but do not influence accuracy of detection, just spot intensity diminishes.The scheme of present embodiment is applicable to that multispectral multiaxis concentrates the detection of parallel and discrete plain shaft parallelism.
The present invention can also have following this form except embodiment 1.
As shown in Figure 4, device for detecting wide distance light beam parallelism is by small-bore parallel light tube 25 with also have hole enlargement arm 2 to constitute;
Described small-bore parallel light tube 25 is made of telephotolens 26 and the graticule 27 that is placed on the focal plane of lens; The formation of hole enlargement arm 2 is identical with the structure of the hole enlargement arm 2 shown in Figure 1 of above-mentioned technical scheme; Just hole enlargement arm 2 is enclosed within on the small-bore parallel light tube 25, fixes by securing member, is locked on the parallel light tube 25.
Further specify the self check process of system in conjunction with Fig. 5.
Because in the actual detected process, light path is the same during with self check, and just direction is opposite, so the code name of detected light beam is decided to be light beam 32 and light beam 28 equally here.
The enforcement testing process is as follows: after the optics self check was finished, detected light beam 32 was turned back after 90 ° through compound pentaprism group 16, and being turned back again 90 ° through compound pentaprism 15 enters small-bore auto-collimation collimator 25, forms a hot spot on its focal plane; Tested parallel beam 28 directly enters parallel light tube 25 through compound pentaprism 15, also forms a hot spot on focal plane; If these two hot spots overlap, illustrate that parallel beam 28 and 32 is parallel, otherwise on auto-collimation collimator 25 focal planes, form the spacing of picture point and the focal length of auto-collimation collimator 25 according to parallel beam 28 and 32, just can calculate the parallel misalignment of parallel beam 28 and 32.
The device for detecting wide distance light beam parallelism that this technical scheme provides, adopt the structure and the light path of the hole enlargement arm 2 identical with Fig. 2 with above-mentioned Fig. 1, so difference is at its light that utilizes parallel light tube to send fully, in other words, enter pick-up unit from the external world, the light beam of the compound pentaprism 15 of process is received by parallel light tube fully.Simultaneously, this device volume is little, and is also very convenient during detection.The device for detecting wide distance light beam parallelism that this technical scheme provides is applicable to the detection of small-bore width from the light parallel beam.
Claims (2)
1. device for detecting wide distance light beam parallelism is characterized in that, it is made of auto-collimation collimator (1) and hole enlargement collimation arm (2), and hole enlargement collimation arm (2) is positioned at the front of auto-collimation collimator (1), and can rotate around auto-collimation collimator (1);
Described auto-collimation collimator (1) adopts traditional Newtonian structure, is made up of pointolite (21), parabolic shape principal reflection mirror (23), first plane mirror (24) and beam splitting system (17); Described beam splitting system (17) is made up of Amici prism (18), second catoptron (19) and secondary reflection mirror (20), and wherein, second catoptron (19) is coated with the zinc sulphide rete; Pointolite (21), parabolic shape principal reflection mirror (23), first plane mirror (24) and beam splitting system (17) all place in the housing of auto-collimation collimator (1);
The light that is sent by pointolite (21) is through second catoptron (19) and secondary reflection mirror (20), first plane mirror (24), pass through parabolic shape principal reflection mirror (23) again and become parallel beam (10); The part of parallel beam (10) enters the compound pentaprism (15) of hole enlargement collimation arm (2); Described pointolite (21) provides visible or infrared light;
Perhaps, light source adopts LASER Light Source (22), LASER Light Source (22) adopts the optical fiber fitting method to enter beam splitting system, laser sees through Amici prism (18), reflex to secondary reflection mirror (20) by second catoptron (19), again via first plane mirror (24) and parabolic shape principal reflection mirror (23) with parallel light emergence;
Described hole enlargement collimation arm (2) is made up of compound pentaprism (15), compound pentaprism group (16), first mercury boxes (8) and second mercury boxes (9);
Described compound pentaprism (15) is combined by first pentaprism (3) and first wedge (6), and the bonding plane of described first pentaprism (3) and described first wedge (6) is coated with transflective film; Compound pentaprism (15) is positioned at the front of auto-collimation collimator (1), the part of the parallel beam (10) that auto-collimation collimator (1) is sent, introduce in the hole enlargement collimation arm (2), and light beam is divided into two-way, one the tunnel is used for carrying out the self check of auto-collimation collimator (1), and one the tunnel passes to compound pentaprism group (16);
Described compound pentaprism group (16) is made up of second pentaprism (4), the 3rd pentaprism (5) and one second wedge (7), second wedge (7) is coated with transflective film with the adhesive surface of second pentaprism (4), second wedge (7) does not have plated film with the adhesive surface of the 3rd pentaprism (5), and light can directly see through; The light beam (13) of second pentaprism (4) outgoing of compound pentaprism group (16) remains parallel with the light beam (14) through the 3rd pentaprism (5) outgoing; And compound pentaprism group (16) and second mercury boxes (9) be along with physical construction can be together moves along the inwall of the housing of whole hole enlargement collimation arm (2), adjusts distance between compound pentaprism (15) and the compound pentaprism group (16) to adjust the tested described distance that remains between the parallel two-way outgoing beam.
2. device for detecting wide distance light beam parallelism is characterized in that, it is made of small-bore parallel light tube (25) and hole enlargement collimation arm (2);
Described small-bore parallel light tube (25) is made of telephotolens (26) and the graticule (27) that is placed on telephotolens (26) focal plane;
Described hole enlargement collimation arm (2) is made up of compound pentaprism (15), compound pentaprism group (16), first mercury boxes (8) and second mercury boxes (9);
Described compound pentaprism (15) is combined by first pentaprism (3) and first wedge (6), and the bonding plane of described first pentaprism (3) and described first wedge (6) is coated with transflective film; Compound pentaprism (15) is positioned at the front of auto-collimation collimator (1), the part of the parallel beam (10) that auto-collimation collimator (1) is sent, introduce in the hole enlargement collimation arm (2), and light beam is divided into two-way, one the tunnel is used for carrying out the self check of auto-collimation collimator (1), and one the tunnel passes to compound pentaprism group (16);
Described compound pentaprism group (16) is made up of second pentaprism (4), the 3rd pentaprism (5) and one second wedge (7), second wedge (7) is coated with transflective film with the adhesive surface of second pentaprism (4), second wedge (7) does not have plated film with the adhesive surface of the 3rd pentaprism (5), and light can directly see through; The light beam (13) of second pentaprism (4) outgoing of compound pentaprism group (16) remains parallel with the light beam (14) through the 3rd pentaprism (5) outgoing; And compound pentaprism group (16) and second mercury boxes (9) be along with physical construction can be together moves along the inwall of the housing of whole hole enlargement collimation arm (2), adjusts distance between compound pentaprism (15) and the compound pentaprism group (16) to adjust the tested described distance that remains between the parallel two-way outgoing beam;
Described hole enlargement collimation arm (2) is enclosed within on the small-bore parallel light tube (25), fixes by securing member, is locked on the small-bore parallel light tube (25).
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| CN2008100514917A CN101408413B (en) | 2008-11-28 | 2008-11-28 | Device for detecting wide distance light beam parallelism |
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| CN101408413A (en) | 2009-04-15 |
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