CN103308281B - The pick-up unit of wedge-shaped lens and detection method - Google Patents
The pick-up unit of wedge-shaped lens and detection method Download PDFInfo
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- CN103308281B CN103308281B CN201310210297.XA CN201310210297A CN103308281B CN 103308281 B CN103308281 B CN 103308281B CN 201310210297 A CN201310210297 A CN 201310210297A CN 103308281 B CN103308281 B CN 103308281B
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Abstract
A kind of pick-up unit of wedge-shaped lens and detection method, this wedge-shaped lens pick-up unit formation comprises 4D dynamic interferometer, compensating glass group, platform, standard reflection mirror, high precision turntable adjustment rack, block prism, auto-collimation collimator, the method that the present invention utilizes machinery to combine with optics is measured, it can realize high-acruracy survey, and draws the angle of wedge difference of wedge-shaped lens and the value of tower difference respectively.The present invention can be widely used in processing and the detection of wedge-shaped lens, and particularly for high-precision wedge-shaped lens, the method can meet the detection of wedge-shaped lens of various profile, size.
Description
Technical field
The present invention relates to optical element, particularly a kind of pick-up unit of wedge-shaped lens and detection method, processing and the detection of wedge-shaped lens can be widely used in, particularly for high-precision wedge-shaped lens, the method can meet the detection of wedge-shaped lens of various profile, size, and reaches the requirement that degree of accuracy is high, measuring error is little.
Background technology
Wedge-shaped lens is the combination of plano-convex lens and right-angle prism.About the detection of wedge-shaped lens, most important two Testing index are that angle of wedge difference and tower are poor.The difference of the actual wedge-shaped lens angle of wedge number of degrees of processing and the angle of wedge number of degrees of Theoretical Design is angle of wedge difference; The rib intersected perpendicular to the face of optical propagation direction all should be parallel to each other after wedge-shaped lens launches, and not parallelly occurs that the tower being wedge-shaped lens is poor if had.Because wedge-shaped lens one side is sphere/aspheric surface, another side is plane, in sphere/aspheric surface, any point all can form an optical axis with the corresponding centre of sphere, therefore the final angle of wedge is poor and tower is poor to adopt conventional optical means accurately to record, and the method that can only combine with optics based on machinery be measured.
At present, the detection method commonly used wedge-shaped lens uses three-coordinate instrument or transit.Three-coordinate instrument is the coordinate by measuring lens surface multiple spot, coagulate conjunction coordinate points through computer software and show that the angle of wedge of wedge-shaped lens is poor and tower is poor, the method due to measurement point be on the curved surface of lens, measuring error is comparatively large, cannot meet the testing requirement of high precision wedge-shaped lens.Using during theodolite testing is be placed on by transit to detect in light path, records the angle on light path Plays catoptron and wedge-shaped lens inclined-plane, although the method measuring accuracy is better than three-coordinate instrument, cannot measure the value of angle of wedge difference and tower difference respectively.Above two kinds of methods all can only be suitable for the wedge-shaped lens of general precision, measure for high precision wedge-shaped lens, causing certain measuring error (comprise tower difference and the angle of wedge poor), bringing very large difficulty to processing.
Summary of the invention
The object of the invention is pick-up unit and the detection method that will provide a kind of wedge-shaped lens, the method accurately can be measured the angle of wedge of the wedge-shaped lens in processing, inspection is poor and tower is poor, provides accurate machined parameters.
Technical solution of the present invention is as follows:
For a pick-up unit for wedge-shaped lens, feature is that its formation comprises 4D dynamic interferometer, compensating glass group, platform, standard reflection mirror, high precision turntable adjustment rack, block prism, auto-collimation collimator, and the position relationship of said elements is as follows:
Wedge-shaped lens is placed on platform, the 4D dynamic interferometer set gradually, compensating glass group, wedge-shaped lens and standard reflection mirror form Wave-front measurement light path with optical axis, high precision turntable adjustment rack and block prism are positioned in the middle of wedge-shaped lens and standard reflection mirror, block prism is placed on high precision turntable adjustment rack, four sides of block prism are parallel to the rotating shaft of high precision turntable adjustment rack, and the rotating shaft of high precision turntable adjustment rack is perpendicular to the optical axis detecting light path, the optical axis of auto-collimation collimator is simultaneously perpendicular to the detection optical axis of light path and the rotating shaft of high precision turntable adjustment rack.
Described high precision turntable adjustment rack is made up of upper two-dimension adjustment frame, lower two-dimension adjustment frame and precise rotating platform.Upper two-dimension adjustment frame is mainly used in adjustment four sides of block prism and the shaft parallel of high precision turntable adjustment rack; The rotating shaft that lower two-dimension adjustment frame is mainly used in adjusting high precision turntable adjustment rack is vertical with detection light path, guarantees the correctness measured; Precise rotating platform is in order to the acquisition pin-point reading in rotary course.
Described upper two-dimension adjustment frame, its feature is that this adjustment rack is made up of control hand wheel, small ball, nut A, upper plate, jacking block, lower plate, screw, reed pipe, spherical spring pad, big steel ball;
Described lower two-dimension adjustment frame, its feature is that this adjustment rack is made up of footing, nut B, base plate, set nut, feet;
Described precise rotating platform, its feature is that this turntable is driven by computer software and detects, and draws measured value.
A detection method for wedge-shaped lens, its feature is that the method comprises the following steps:
1. 4D dynamic interferometer arranges diameter is that the light pencil of 2mm exports, and corrects 4D dynamic interferometer coaxial and guarantee the central point by wedge-shaped lens sphere with wedge-shaped lens;
2. between 4D dynamic interferometer and wedge-shaped lens, put into compensating glass group, first rectification building-out mirror group is coaxial and spacing with 4D dynamic interferometer, then corrects the interplanar distance of wedge-shaped lens and compensating glass group, finally standard reflection minute surface is vertical and detection optical axis;
3. 4D dynamic interferometer is set to test mode, mix the sphere camera lens of the sphere shots match matched with the focal length of wedge-shaped lens and the ratio of clear aperture, the two dimension angular of accurate adjustment standard reflection mirror and the distance of fine setting compensating glass group and wedge-shaped lens, make interference image put zero-field position (zero-field position refers to the position that number of interference fringes is minimum), Wave-front measurement light path has been debugged;
4. between wedge-shaped lens and standard reflection mirror, place high precision turntable adjustment rack and block prism, make the autocollimatic picture of block prism reflex to auto-collimation collimator field of view center by adjustment auto-collimation collimator;
5. with this position for benchmark, rotate precise rotating platform angle 180 °, the angle of the upper two-dimension adjustment frame of adjustment simultaneously, with the position of auto-collimation collimator monitoring autocollimatic picture, if there is upper lower deviation the position of autocollimatic picture, upper two-dimension adjustment frame adjusts 1/2 of its departure, and auto-collimation collimator is adjusted and also adjusted 1/2 of its departure, makes the position of the autocollimatic picture seen after adjusting be positioned at auto-collimation collimator field of view center;
6. precise rotating platform angle 90 ° is rotated, the angle of the upper two-dimension adjustment frame of adjustment simultaneously, with the position of auto-collimation collimator monitoring autocollimatic picture, if there is upper lower deviation the position of autocollimatic picture, upper two-dimension adjustment frame adjusts 1/2 of its departure, auto-collimation collimator also adjusts 1/2 of its departure, makes the position of the autocollimatic picture seen after adjusting be positioned at auto-collimation collimator field of view center;
7. by repeating 5., 6., make the autocollimatic picture of block prism four sides all at auto-collimation collimator field of view center, namely four sides of block prism are parallel to the rotating shaft of high precision turntable adjustment rack;
8. high precision turntable adjustment rack is turned clockwise and make the light of detection light path by block prism surface reflection in auto-collimation collimator visual field, lower two-dimension adjustment frame in adjustment high precision turntable adjustment rack, makes the center in the beam level direction detecting light path be transferred to auto-collimation collimator field of view center;
9. high precision turntable adjustment rack is gone back to the step anglec of rotation 8. counterclockwise, and adjust the luffing angle of auto-collimation collimator, make the autocollimatic picture of block prism pass through field of view center;
10. high precision turntable adjustment rack is turned counterclockwise the field of view center making the center of the autocollimatic picture of standard reflection mirror be positioned at auto-collimation collimator horizontal direction, again high precision turntable adjustment rack is turned 45 ° clockwise, the left and right angle of adjustment auto-collimation collimator, makes the center of the autocollimatic picture of block prism be positioned at the field of view center of auto-collimation collimator horizontal direction;
repeat 8.-10. step, guarantee that the rotating shaft of high precision turntable adjustment rack is perpendicular to the optical axis detecting light path, and the optical axis of auto-collimation collimator is simultaneously perpendicular to the detection optical axis of light path and the rotating shaft of high precision turntable adjustment rack.
by high precision turntable adjustment rack reading zero setting on conputer controlled software;
being rotated counterclockwise high precision turntable adjustment rack makes the autocollimatic picture of wedge-shaped lens plane by the surface reflection of the block prism center to auto-collimation collimator visual field horizontal direction, and the reading according to conputer controlled software records high precision turntable adjustment rack is γ
1, and to record the angular readings that auto-collimation collimator autocollimatic departs from field of view center as above-below direction be θ
1;
according to refraction law: nsin θ=sin θ
1, n is wedge-shaped lens Refractive Index of Material, calculates tower difference to be: θ=arcsin(sin θ
1/ n);
high precision turntable adjustment rack is controlled to go back to γ clockwise by computer software
1angle, is zero-bit;
the high precision turntable that turns clockwise again adjustment rack makes the autocollimatic picture of standard reflection mirror plane by the surface reflection of the block prism center to auto-collimation collimator visual field horizontal direction, and the reading according to conputer controlled software records high precision turntable adjustment rack is γ
2;
β=180, refraction angle of wedge-shaped lens °-(γ
1+ γ
2);
according to refraction law: nsin α=sin β, n is wedge-shaped lens Refractive Index of Material, and calculate the angle of wedge and be: α=arcsin(sin β/n), the angle of wedge difference of calculating is: Δ α=| α-α
theoretical|.
Technique effect of the present invention:
Due to the mode that this detection method combines with optics based on machinery, effectively prevent the problem cannot distinguishing accurate measuring wedge angular difference and tower difference in existing wedge-shaped lens measuring method, by using the repeated measurement of high precision turntable adjustment rack, improve the reliability of measurement, and measuring accuracy is brought up to be less than 5 ", far above existing measuring accuracy.
Accompanying drawing explanation
Fig. 1 is wedge-shaped lens pick-up unit schematic diagram
Fig. 2 is high precision turntable adjustment rack structural drawing
Fig. 3 is Wave-front measurement index path
Fig. 4 is that wedge-shaped lens detects index path
Fig. 5 is that wedge-shaped lens detects index path (when being rotated counterclockwise block prism)
Fig. 6 is that wedge-shaped lens detects index path when block prism (turn clockwise)
Fig. 7 is local calculation figure (when being rotated counterclockwise block prism)
Fig. 8 is local calculation figure when block prism (turns clockwise)
In figure: 1-4D dynamic interferometer; 2-compensating glass group; 3-wedge-shaped lens; 4-standard reflection mirror; 5-high precision turntable adjustment rack; 5-1-control hand wheel; 5-2-small ball; 5-3-nut A; 5-4-upper plate; 5-5-jacking block; 5-6-lower plate; 5-7-screw; 5-8-reed pipe; 5-9-spherical spring pad; 5-10-big steel ball; 5-11-footing; 5-12-nut B; 5-13-base plate; 5-14-set nut; 5-15-feet; 5-16-precise rotating platform; 6-block prism; 7-auto-collimation collimator.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.
In the present embodiment, tested wedge-shaped lens 3 profile is the square of 370mm × 370mm, focal length is 2200mm, and clear aperture is 340mm × 340mm, and material is quartz, Refractive Index of Material is 1.45711, angle of wedge theoretical value is 11 ° 13 ', and selected block prism 6 is of a size of 100mm × 100mm × 100mm, and precision is for being less than 2 "; the precision of precise rotating platform 5-16 is 0.1 ", the precision of auto-collimation collimator 7 is 0.1 ".
First refer to Fig. 1 and Fig. 4, Fig. 1 is wedge-shaped lens pick-up unit, Fig. 4 is that wedge-shaped lens detects index path, as seen from the figure, the pick-up unit of wedge-shaped lens of the present invention comprises 4D dynamic interferometer 1, compensating glass group 2, wedge-shaped lens to be measured 3 placing platform 8, standard reflection mirror 4, high precision turntable adjustment rack 5, block prism 6, auto-collimation collimator 7, and the position relationship of said elements is as follows:
4D dynamic interferometer 1, compensating glass group 2, wedge-shaped lens 3 and standard reflection mirror 4 form Wave-front measurement light path with optical axis, high precision turntable adjustment rack 5 and block prism 6 are positioned between wedge-shaped lens 3 and standard reflection mirror 4, block prism 6 is placed on high precision turntable adjustment rack 5, four sides of block prism 6 are parallel to the rotating shaft of high precision turntable adjustment rack 5, and the rotating shaft of high precision turntable adjustment rack 5 is perpendicular to the optical axis detecting light path, the optical axis of auto-collimation collimator 7 is simultaneously perpendicular to the detection optical axis of light path and the rotating shaft of high precision turntable adjustment rack 5.
As shown in Fig. 2 high precision turntable adjustment rack structural drawing, described is made up of upper two-dimension adjustment frame, lower two-dimension adjustment frame and precise rotating platform 5-16.Upper two-dimension adjustment frame is mainly used in adjustment four sides of block prism 6 and the shaft parallel of high precision turntable adjustment rack 5; The rotating shaft that lower two-dimension adjustment frame is mainly used in adjusting high precision turntable adjustment rack 5 is vertical with detection light path, guarantees the correctness measured; Precise rotating platform 5-16 is in order to the acquisition pin-point reading in rotary course.
Described upper two-dimension adjustment frame, is made up of control hand wheel 5-1, small ball 5-2, nut A5-3, upper plate 5-4, jacking block 5-5, lower plate 5-6, screw 5-7, reed pipe 5-8, spherical spring pad 5-9, big steel ball 5-10;
Described lower two-dimension adjustment frame, is made up of footing 5-11, nut B5-12, base plate 5-13, set nut 5-14, feet 5-15;
Described precise rotating platform 5-16 is driven by computer software and detects, and draws measured value.
A detection method for wedge-shaped lens, the method comprises the following steps:
1. 4D dynamic interferometer 1 arranges diameter is that the light pencil of 2mm exports, and corrects 4D dynamic interferometer 1 coaxial and guarantee the central point of light pencil by wedge-shaped lens 3 sphere with wedge-shaped lens 3;
2. between 4D dynamic interferometer 1 and wedge-shaped lens 3, put into compensating glass group 2, first rectification building-out mirror group 2 is coaxial and spacing with 4D dynamic interferometer 1, then corrects the interplanar distance of wedge-shaped lens 3 and compensating glass group 2, finally by standard reflection mirror 4 minute surface perpendicular to detection optical axis;
3. 4D dynamic interferometer 1 is set to test mode, mix the sphere camera lens matched with the focal length of wedge-shaped lens 3 and the ratio of clear aperture, select in this example the ratio of focal length and clear aperture be 5 sphere camera lens, the two dimension angular of accurate adjustment standard reflection mirror 4 and the distance of fine setting compensating glass group 2 and wedge-shaped lens 3, make interference image put zero-field position (zero-field position refers to the position that number of interference fringes is minimum), Wave-front measurement light path (Fig. 3) has been debugged;
4. between wedge-shaped lens 3 and standard reflection mirror 4, place high precision turntable adjustment rack 5 and block prism 6, make the autocollimatic picture of block prism 6 reflex to the field of view center of auto-collimation collimator 7 by adjustment auto-collimation collimator 7;
5. with this position for benchmark, rotate precise rotating platform 5-16 angle 180 °, the angle of the upper two-dimension adjustment frame of adjustment simultaneously, the position of autocollimatic picture is monitored with auto-collimation collimator 7, if there is upper lower deviation the position of autocollimatic picture, upper two-dimension adjustment frame adjusts 1/2 of its departure, and auto-collimation collimator adjusts 7 also to adjust 1/2 of its departure, makes the position of the autocollimatic picture seen after adjusting be positioned at the field of view center of auto-collimation collimator 7;
6. precise rotating platform 5-16 angle 90 ° is rotated, the angle of the upper two-dimension adjustment frame of adjustment simultaneously, the position of autocollimatic picture is monitored with auto-collimation collimator 7, if there is upper lower deviation the position of autocollimatic picture, upper two-dimension adjustment frame adjusts 1/2 of its departure, auto-collimation collimator 7 also adjusts 1/2 of its departure, makes the position of the autocollimatic picture seen after adjusting be positioned at the field of view center of auto-collimation collimator 7;
7. repeat step 5., 6., make the autocollimatic picture of block prism 6 four sides all at the field of view center of auto-collimation collimator 7, namely four sides of block prism 6 are parallel to the rotating shaft of high precision turntable adjustment rack 5;
8. high precision turntable adjustment rack 5 is turned clockwise and make the light of detection light path by block prism 6 surface reflection in auto-collimation collimator 7 visual field, lower two-dimension adjustment frame in adjustment high precision turntable adjustment rack 5, makes the center in the beam level direction detecting light path be transferred to the field of view center of auto-collimation collimator 7;
9. high precision turntable adjustment rack 5 is gone back to the step anglec of rotation 8. counterclockwise, and adjust the luffing angle of auto-collimation collimator 7, make the autocollimatic picture of block prism 6 pass through field of view center;
10. as Fig. 5 wedge-shaped lens detects shown in light path (when being rotated counterclockwise block prism), high precision turntable adjustment rack 5 is turned counterclockwise, makes the center of the autocollimatic picture of standard reflection mirror 4 be positioned at the field of view center of auto-collimation collimator 7 horizontal direction.As Fig. 6 wedge-shaped lens detects shown in light path when block prism (turn clockwise), again high precision turntable adjustment rack 5 is turned 45 ° clockwise, the left and right angle of adjustment auto-collimation collimator 7, makes the center of the autocollimatic picture of block prism 6 be positioned at the field of view center of auto-collimation collimator 7 horizontal direction;
repeat 8.-10. step, guarantee that the rotating shaft of high precision turntable adjustment rack 5 is perpendicular to the optical axis detecting light path, and the optical axis of auto-collimation collimator 7 is simultaneously perpendicular to the detection optical axis of light path and the rotating shaft of high precision turntable adjustment rack 5;
by high precision turntable adjustment rack 5 reading zero setting on conputer controlled software;
as shown in Fig. 7 local calculation figure (when being rotated counterclockwise block prism), be rotated counterclockwise high precision turntable adjustment rack 5, make the autocollimatic picture of wedge-shaped lens 3 plane by the surface reflection of block prism 6 center to auto-collimation collimator 7 visual field horizontal direction, now, be γ according to the reading of conputer controlled software records high precision turntable adjustment rack 5
1=73.592 °, and to record the angular readings that auto-collimation collimator 7 autocollimatic departs from field of view center as above-below direction be θ
1=92 ";
according to refraction law: nsin θ=sin θ
1, n is wedge-shaped lens 3 Refractive Index of Material, calculates tower difference to be: θ=arcsin(sin θ
1/ n)=63.14 ";
high precision turntable adjustment rack 5 is controlled to go back to γ clockwise by computer software
1=73.592 ° of angles, are zero-bit;
the high precision turntable that turns clockwise again adjustment rack 5 makes the autocollimatic picture of standard reflection mirror 4 plane by the surface reflection of block prism 6 center to auto-collimation collimator 7 visual field horizontal direction, and the reading according to conputer controlled software records high precision turntable adjustment rack 5 is γ
2=90 °;
as shown in Fig. 8 local calculation figure when block prism (turn clockwise), β=180, refraction angle of wedge-shaped lens 3 °-(γ
1+ γ
2)=16.408 °;
according to refraction law: nsin α=sin β, n is wedge-shaped lens Refractive Index of Material, calculates the angle of wedge and is: α=arcsin(sin β/n)=11 ° 10 ' 41 ", the angle of wedge difference of calculating is: Δ α=| α-α
theoretical|=2 ' 19 ";
In this example, selected block prism 6 precision is for being less than 2 ", the precision of precise rotating platform 5-16 is 0.1 ", the precision of auto-collimation collimator 7 is 0.1 ", composition error is about 2.5 ".
Claims (3)
1. the pick-up unit of a wedge-shaped lens, be characterised in that its formation comprises 4D dynamic interferometer (1), compensating glass group (2), platform, standard reflection mirror (4), high precision turntable adjustment rack (5), block prism (6), auto-collimation collimator (7), the position relationship of said elements is as follows:
Wedge-shaped lens (3) to be measured is placed on platform, the 4D dynamic interferometer (1) set gradually, compensating glass group (2), wedge-shaped lens (3) to be measured and standard reflection mirror (4) form the Wave-front measurement light path with optical axis, high precision turntable adjustment rack (5) and block prism (6) are placed between wedge-shaped lens (3) to be measured and standard reflection mirror (4), described block prism (6) is placed on described high precision turntable adjustment rack (5), four sides of block prism (6) are parallel to the rotating shaft of described high precision turntable adjustment rack (5), the rotating shaft of described high precision turntable adjustment rack (5) is perpendicular to the optical axis detecting light path, the optical axis of described auto-collimation collimator (7) is simultaneously perpendicular to the detection optical axis of light path and the rotating shaft of described high precision turntable adjustment rack (5).
2. the pick-up unit of wedge-shaped lens according to claim 1, it is characterized in that described high precision turntable adjustment rack (5) is made up of upper two-dimension adjustment frame, lower two-dimension adjustment frame and precise rotating platform (5-16), described upper two-dimension adjustment frame is made up of control hand wheel (5-1), small ball (5-2), nut A (5-3), upper plate (5-4), jacking block (5-5), lower plate (5-6), screw (5-7), reed pipe (5-8), spherical spring pad (5-9), big steel ball (5-10); Described lower two-dimension adjustment frame, is made up of footing (5-11), nut B (5-12), base plate (5-13), set nut (5-14), feet (5-15); Upper two-dimension adjustment frame and lower two-dimension adjustment frame are connected by precise rotating platform (5-16), the center of upper two-dimension adjustment frame, the center of lower two-dimension adjustment frame all with the center superposition of precise rotating platform (5-16); Described precise rotating platform (5-16), by conputer controlled and detection, obtains measured value.
3. utilize the pick-up unit of the wedge-shaped lens described in claim 1 to carry out the detection method of wedge-shaped lens, it is characterized in that the method comprises the following steps:
1. the platform (8) between described compensating glass group (2) and standard reflection mirror (4) is upper places wedge-shaped lens (3) to be measured, 4D dynamic interferometer (1) diameter described in adjustment is that the light pencil of 2mm exports, and makes described 4D dynamic interferometer (1) and wedge-shaped lens to be measured (3) coaxial and guarantees the central point of light pencil by wedge-shaped lens (3) sphere;
2. between 4D dynamic interferometer (1) and wedge-shaped lens to be measured (3), compensating glass group (2) is put into, first rectification building-out mirror group (2) is coaxial and spacing with 4D dynamic interferometer (1), correct the interplanar distance of wedge-shaped lens (3) and compensating glass group (2) again, finally by the minute surface of standard reflection mirror (4) perpendicular to detection optical axis;
3. Wave-front measurement light path debugging: 4D dynamic interferometer (1) is set to test mode, mix the sphere camera lens matched with the focal length of wedge-shaped lens (3) and the ratio of clear aperture, the two dimension angular of accurate adjustment standard reflection mirror (4) and the distance of fine setting compensating glass group (2) and wedge-shaped lens (3), interference image is made to put zero-field position, this zero-field position refers to the position that number of interference fringes is minimum, and Wave-front measurement light path has been debugged;
4. between wedge-shaped lens (3) and standard reflection mirror (4), place high precision turntable adjustment rack (5) and block prism (6), make the autocollimatic picture of block prism (6) reflex to auto-collimation collimator (7) field of view center by adjustment auto-collimation collimator (7);
5. with this position for benchmark, rotate precise rotating platform (5-16) 180 °, the angle of the upper two-dimension adjustment frame of adjustment simultaneously, with the position of auto-collimation collimator (7) monitoring autocollimatic picture, if there is upper lower deviation the position of autocollimatic picture, upper two-dimension adjustment frame adjusts 1/2 of its departure, and auto-collimation collimator adjusts (7) also to adjust 1/2 of its departure, makes the position of seen autocollimatic picture be positioned at auto-collimation collimator (7) field of view center;
6. precise rotating platform (5-16) angle 90 ° is rotated, the angle of two-dimension adjustment frame in adjustment, with the position of auto-collimation collimator (7) monitoring autocollimatic picture, if there is upper lower deviation the position of autocollimatic picture, upper two-dimension adjustment frame adjusts 1/2 of its departure, auto-collimation collimator (7) also adjusts 1/2 of its departure, makes the position of seen autocollimatic picture be positioned at auto-collimation collimator (7) field of view center;
7. step is repeated 5., 6., make the autocollimatic picture of block prism (6) four sides all at auto-collimation collimator (7) field of view center, namely four sides of block prism (6) are parallel to the rotating shaft of high precision turntable adjustment rack (5);
8. high precision turntable adjustment rack (5) is turned clockwise, make the light of detection light path by block prism (6) surface reflection in auto-collimation collimator (7) visual field, the lower two-dimension adjustment frame of adjustment high precision turntable adjustment rack (5), makes the center in the beam level direction detecting light path be transferred to auto-collimation collimator (7) field of view center;
9. high precision turntable adjustment rack (5) is gone back to the step anglec of rotation 8. counterclockwise, and adjust the luffing angle of auto-collimation collimator (7), make the autocollimatic picture of block prism (6) by auto-collimation collimator (7) field of view center;
10. being turned counterclockwise by high precision turntable adjustment rack (5) makes the center of the autocollimatic picture of standard reflection mirror (4) be positioned at the field of view center of auto-collimation collimator (7) horizontal direction, again high precision turntable adjustment rack (5) is turned 45 ° clockwise, the left and right angle of adjustment auto-collimation collimator (7), makes the center of the autocollimatic picture of block prism (6) be positioned at the field of view center of auto-collimation collimator (7) horizontal direction;
repeat 8. ~ 10. step, guarantee that the rotating shaft of high precision turntable adjustment rack (5) is perpendicular to the optical axis detecting light path, and the optical axis of auto-collimation collimator (7) is simultaneously perpendicular to the detection optical axis of light path and the rotating shaft of high precision turntable adjustment rack (5);
by the reading zero setting of the high precision turntable adjustment rack (5) of conputer controlled software;
being rotated counterclockwise high precision turntable adjustment rack (5) makes the autocollimatic picture of wedge-shaped lens (3) plane pass through the center of surface reflection to auto-collimation collimator (7) visual field horizontal direction of block prism (6), and the reading of conputer controlled software records high precision turntable adjustment rack (5) is γ
1be θ with the angular readings that auto-collimation collimator (7) autocollimatic departs from field of view center as above-below direction
1;
according to refraction law: nsin θ=sin θ
1, n is wedge-shaped lens (3) Refractive Index of Material, calculates tower difference to be: θ=arcsin (sin θ
1/ n)
control high precision turntable adjustment rack (5) by computer software and go back to γ clockwise
1angle, is zero-bit;
the high precision turntable that turns clockwise again adjustment rack (5) makes the autocollimatic picture of standard reflection mirror (4) plane pass through the center of surface reflection to auto-collimation collimator (7) visual field horizontal direction of block prism (6), is γ according to the reading of conputer controlled software records high precision turntable adjustment rack (5)
2;
β=180, refraction angle of wedge-shaped lens (3) °-(γ
1+ γ
2);
according to refraction law: nsin α=sin β, n is wedge-shaped lens Refractive Index of Material, calculates the angle of wedge and is: α=arcsin (sin β/n), and angle of wedge difference is: Δ α=| α-α
theoretical|.
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| CN103630073B (en) * | 2013-11-11 | 2016-04-13 | 中国科学院上海光学精密机械研究所 | The detection of wedge-shaped lens and bearing calibration |
| CN103994734B (en) * | 2014-05-22 | 2016-08-24 | 中国科学院上海光学精密机械研究所 | Axial cone mirror based on double-wavelength light source cone angle detecting device and detection method |
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