CN101408249A - Sluice valve and substrate processing apparatus using the same - Google Patents
Sluice valve and substrate processing apparatus using the same Download PDFInfo
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- CN101408249A CN101408249A CNA2008101673041A CN200810167304A CN101408249A CN 101408249 A CN101408249 A CN 101408249A CN A2008101673041 A CNA2008101673041 A CN A2008101673041A CN 200810167304 A CN200810167304 A CN 200810167304A CN 101408249 A CN101408249 A CN 101408249A
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- valve body
- substrate
- strip member
- moving
- framework
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Abstract
The invention provides a gate valve and a substrate processing unit suing the gate valve, which can maintain the valve body at a state of being pressed at the substrate exit/entrance in the absence of the work force of the actuator. , the valve will maintain pressure on the substrate to move out of the state of the. The gate valve (200) is constituted that a cam mechanism (260) is used to advance and retreat the valve body (210) for opening and closing the substrate exit/entrance (112). For example, the cam mechanism has: a sliver component (261), freely sliding in a direction perpendicular to the advance and retreat direction of the valve body; a valve body drive roller(280), provided on the valve body (210) oppositely to a support roller (290) supporting the sliver component from the back board of the frame body; and a tabular cam (270) provided at the valve body drive roller side of the sliver component, so that the sliver component slide to a direction and advance to a direction for closing the valve body by a valve body drive roller, at a position for pressing to seal the substrate exit/entrance, a back-pressure force from the substrate exit/entrance is acted on the sliver component, accordingly holding the valve body at an occlusion position.
Description
Technical field
The present invention relates to be used to open and close the substrate board treatment that taking out of of substrate moved into the gate valve of mouth and used this gate valve.
Background technique
In that (Flat PanelDisplay: flat panel display) substrate carries out in the substrate board treatment that for example regulation such as etching, film forming is handled to the FPD of the substrate of semiconductor wafer etc. or liquid crystal base plate etc., have the substrate that is used to transfer substrate and take out of and move into mouth, and have and a plurality ofly take out of the inner chamber that forms vacuum atmosphere under the state of moving into mouthful closing substrate.As such chamber, for example can exemplify the processing chamber (comprising reaction vessel) that under vacuum atmosphere, carries out the processing of substrate, under vacuum atmosphere the conveyance substrate conveying chamber and between vacuum atmosphere and barometric pressure atmosphere the load locking room etc. of exchange substrate.
Gate valve generally is that the chamber that will constitute vacuum atmosphere as mentioned above when closing covers with airtight conditions, can transfer the vacuum valve of substrate when opening, and the substrate that is used to open and close chamber is taken out of and moved into mouth, perhaps will separate each other between adjacent chamber.
Particularly, gate valve has rectangular tabular valve body, this valve body laterally forms longly takes out of and moves into mouth can inaccessible be used for flat-hand position substrate being taken out of the substrate of moving into, and drives valve body by actuators such as cylinder or oil hydraulic cylinders, takes out of and moves into mouth to open and close substrate.In this case, the position (for example substrate is taken out of the lower position of moving into mouthful) that valve body is not become obstacle during from substrate transferring moves to substrate and takes out of and move into mouth, take out of for hermetic sealing substrate and to move into mouthful and with the pressing force of regulation valve body is pressed and to be attached to substrate and to take out of and move into mouthful and, take out of and move into mouth thereby close substrate with its obturation.
As such gate valve, for example in patent documentation 1, record such structure, tabular gate pedestal by the oil hydraulic cylinder lifting is set in the framework on being located at the sidewall of chamber, the gate pedestal freely is connected by the connecting rod rotation with two ends of valve body, constitute parallel crank mechanism.In view of the above, valve body is risen with the gate pedestal if drive oil hydraulic cylinder, the top board butt of valve body and framework then, and limited by top board, forwards extruded.Thus, only by driving the oil hydraulic cylinder that lifting is used, promptly can push the ground occlusion substrate and take out of and move into mouth.
But, in the such structure of patent documentation 1, except valve body, also must make the gate pedestal also lifting onesize with it, therefore only this part just must increase being used as power of oil hydraulic cylinder.And, because only the oil hydraulic cylinder of using by lifting is except carrying out the lifting action of valve body, also to push valve body and close substrate and take out of the action of moving into mouthful, so in order to ensure take out of the pressing force of moving into mouthful necessary valve body for hermetic sealing substrate, bigger oil hydraulic cylinder need be used as power.
Relevant this point for example, shown in patent documentation 2,3, but is arranged to free lifting with valve body itself, and the cylinder of using with the valve body lifting also is provided with dividually from the back side of valve body to be pushed valve body with the action force of the cylinder that opens and closes usefulness and carry out inaccessible member.In view of the above, drive the cylinder that lifting is used, valve body is risen after, the cylinder used of driven opening only just can press valve body be attached to substrate and take out of and move into mouthful and with its obturation, so can alleviate the burden of the cylinder that the valve body lifting uses.
Patent documentation 1: Japanese kokai publication hei 5-196150 communique
Patent documentation 2: TOHKEMY 2004-316916 communique
Patent documentation 3: TOHKEMY 2005-76845 communique
Yet the cylinder of the switching usefulness that is arranged by the cylinder branch of using with lifting that drives as described above presses valve body to be attached to substrate and to take out of in the structure of moving into mouthful, and in order to keep valve body, being used as power of cylinder that opens and closes usefulness also is necessary under this state.Therefore, in order to be attached to substrate and to take out of to move into and carry out inaccessible state on the mouth it is kept, need continue to make the cylinder operation that opens and closes usefulness so that valve body is pressed.The structure of this point and patent documentation 1 record is same, in order to be attached to substrate and to take out of the state of moving on the mouth it is kept so that valve body being pressed, need make the oil hydraulic cylinder continuous firing.
Like this, if for example actuator such as oil hydraulic cylinder or cylinder breaks down or has a power failure etc. and make the disappearance that is used as power of actuator, perhaps owing to do reductions that be used as power that the leakage etc. of moving medium (start gas, start wet goods) makes actuator, then the pressure difference by the chamber inboard and the outside can make valve body open.
Summary of the invention
Therefore, the present invention finishes in view of the above problems, the substrate board treatment that its purpose is to provide a kind of gate valve and uses this gate valve, even without being used as power of the driving mechanism of the actuator that drives valve body etc., also can be with valve body to take out of the state of moving on the mouth and keep by being pressed in substrate.
In order to address the above problem, according to a certain viewpoint of the present invention, the invention provides a kind of gate valve, it is used to open and close substrate on the sidewall of being located at chamber and takes out of and move into mouth, it is characterized in that, comprising: take out of framework on the sidewall that mouthful mode of moving into is arranged on described chamber to surround described substrate; Lifting freely is arranged in the described framework and opens and closes described substrate takes out of the valve body of moving into mouth; Move into mouthful relative position and take out of from described substrate and to move into the lift drive mechanism that makes described valve body lifting between the position that mouth keeps out of the way taking out of with described substrate; And move into mouthful relative position and push the inaccessible described substrate in ground and take out of the driving mechanism for opening or closing that constitutes by cam mechanism that makes described valve body advance and retreat between the position of moving into mouthful taking out of with described substrate, described cam mechanism has: strip member, it is configured in the back side of described valve body along the whole length direction of described valve body, and freedom movably is supported on the described framework; And cam.It is followed the action of described strip member and pushes and drive described valve body, and makes and take out of the masterpiece of moving into the described valve body quilt of oral-lateral back-pressure from described substrate and be used on the described strip member, keeps described valve body thereby push at described occlusion locations.In this case, cam for example can be tabular cam, also can be rotating cam in addition.
In order to address the above problem, according to another viewpoint of the present invention, the invention provides a kind of substrate board treatment, its with substrate transferring to a plurality of chambers, and substrate carried out predetermined process, it is characterized in that described each chamber has and is used to open and close the substrate of being located on its sidewall and takes out of the gate valve of moving into mouthful, described gate valve comprises: take out of framework on the sidewall that mouthful mode of moving into is arranged on described chamber to surround described substrate; Lifting freely is arranged in the described framework and opens and closes described substrate takes out of the valve body of moving into mouth; Move into mouthful relative position and take out of from described substrate and to move into the lift drive mechanism that makes described valve body lifting between the position that mouth keeps out of the way taking out of with described substrate; And move into mouthful relative position and push the inaccessible described substrate in ground and take out of the driving mechanism for opening or closing that constitutes by cam mechanism that makes described valve body advance and retreat between the position of moving into mouthful taking out of with described substrate, described cam mechanism has cam, this cam is configured in the back side of described valve body by the whole length direction along described valve body and the strip member that is supported on the described framework drives, push the described valve body of driving from this strip member, and make and take out of the masterpiece of moving into the described valve body of oral-lateral back-pressure from described substrate and be used on the described strip member, keep described valve body thereby press at described occlusion locations.In addition, above-mentioned chamber is the process chamber that carries out the processing of substrate, the conveying chamber that is connected with this process chamber, the load locking room that is connected with this conveying chamber.
According to such the present invention, take out of when moving into mouthful by the valve body occlusion substrate, by lift drive mechanism make valve body rise to substrate take out of move into mouthful relative position after, make strip member movable by driving mechanism for opening or closing, thereby follow the action of strip member, push the driving valve body by the cam of cam mechanism.Thus, before the valve body and then push the ground occlusion substrate and take out of and move into mouth, make and take out of the masterpiece of moving into oral-lateral back-pressure valve body from substrate and be used on the strip member, thereby valve body can be remained on this occlusion locations.Thus, for example even without being used as power of the actuator that drives strip member, also valve body can being attached to substrate in pressure and taking out of under the state of moving on the mouth it is kept, so the situation that existing such valve body is opened can not occur.
In addition, above-mentioned cam for example is made of tabular cam, shown in cam mechanism for example can have: driving mechanism, its described strip member that is supported on the described framework slides to the direction vertical with the advance and retreat direction of described valve body with making free sliding; Drive with valve body and use roller, its be located at described strip member and described valve body between the described valve body of camming surface butt ground driving of described tabular cam, the advance and retreat that make the sliding action of described strip member be converted to described valve body are moved.In this case, described tabular cam preferably has: first camming surface, it slides in one direction by making described strip member, thereby with described valve body driving roller butt, this valve body is driven advance to the direction of closing described valve body, move to and push the inaccessible described substrate in ground and take out of the position of moving into mouth with roller; Second camming surface, it is taken out of the masterpiece of moving into the described valve body of oral-lateral back-pressure from described substrate and is used on the described strip member by making, thereby keeps described valve body at described occlusion locations.
According to such the present invention, take out of when moving into mouthful by the valve body occlusion substrate, by lift drive mechanism make valve body rise to substrate take out of move into mouthful relative position after, strip member is slided to a direction, thereby valve body drives and while contacting first camming surface valve body to be advanced with roller, pushes the ground occlusion substrate and takes out of and move into mouth.And, slide by further making strip member, make valve body take out of the state of moving into mouthful and be held thereby drive with roller by valve body to push the ground occlusion substrate by second camming surface.At this moment, for example even without being used as power of the actuator that drives strip member, valve body also can be accepted by strip member and take out of the power of moving into the oral-lateral back-pressure from substrate and be held.
Also can make above-mentioned tabular cam be located at the valve body side of described strip member, described valve body drives and is arranged on the described valve body with roller, so that take out of when moving on the relative position of mouth relative with described strip member when described valve body is positioned at described substrate.In addition, also can make above-mentioned tabular cam be arranged on the strip member side of described valve body, described valve body drives and is arranged on the described strip member with roller, so that take out of when moving on the relative position of mouth relative with described valve body when described valve body is positioned at described substrate.Like this, use roller by disposing the driving of tabular cam and valve body, thereby can push the driving valve body by the slip strip member.
In addition, preferred above-mentioned valve body drives with roller a plurality of along the length direction configuration of described valve body, and described tabular cam only is provided with described valve body and drives with the corresponding quantity of roller, by described strip member is slided, drive whole described valve bodies in the lump and drive and make described valve body advance and retreat with roller, while and can push described valve body with roller by whole described valve bodies drivings described valve body is remained on described occlusion locations.In view of the above, drive quantity owing to can change valve body, so, also can keep this valve body to push for the required sufficient pressing force of sealing even the size of valve body is big with roller according to the size of the length direction of valve body.
In addition, also can be provided with from the back side of described strip member and support described strip member so that described strip member is accepted the supporting part of the power (described valve body is taken out of the power that oral-lateral pushes back of moving into from described substrate) from described valve body effect.Like this, by supporting strip member, thereby support, so strip member can be caught the power that is subjected to from valve body more powerfully at opposition side from the direction of the power of valve body effect from the back side of strip member.Thus, can under the state of pushing valve body, keep valve body more powerfully.
In this case, described supporting part can be made of the back-up roll on the sidewall of the backboard of being located at described framework or other chambers, also can be made of the back-up roll of being located on the described strip member.In addition, under the situation that described supporting part is made of back-up roll, preferred described back-up roll is configured to be positioned at when pushing the inaccessible described substrate in ground and taking out of on the position of moving into mouthful with described tabular cam and the driving of described valve body with roller across described strip member and come on the straight line when described valve body.In view of the above, the power of accepting from valve body passes to strip member via the valve body driving with roller and tabular cam, this power can be accepted via strip member by the back-up roll that is positioned at the opposition side on this straight line, so strip member can be caught from the power of valve body effect more powerfully.Thus, can keep this valve body with the state of pushing valve body more powerfully.
In addition, preferred described lift drive mechanism is by piston rod is flexible to constitute the actuator of the vertical lifting of valve body by making, the front end of described piston rod via the valve body slide mechanism that described valve body is free to slide in described advance and retreat direction from the described valve body of the supported underneath of described valve body.By the effect of such valve body slide mechanism, can drive driven for opening and closing valve body on the advance and retreat direction independently with the lifting of actuator.Therefore, about the actuator that lifting is used, be enough as long as be fixed on assigned position, so can form mechanism extremely simply.
In order to address the above problem, according to another viewpoint of the present invention, the invention provides a kind of gate valve, it is used to open and close substrate on the sidewall of being located at chamber and takes out of and move into mouth, it is characterized in that, comprising: take out of the mode of moving into mouthful and be arranged on framework on the sidewall of described chamber to surround described substrate; Lifting freely is arranged in the described framework and opens and closes described substrate takes out of the valve body of moving into mouth; Move into mouthful relative position and take out of from described substrate and to move into the lift drive mechanism that makes described valve body lifting between the position that mouth keeps out of the way taking out of with described substrate; And move into mouthful relative position and push the inaccessible described substrate in ground and take out of the driving mechanism for opening or closing that constitutes by cam mechanism that makes described valve body advance and retreat between the position of moving into mouthful taking out of with described substrate, described cam mechanism has: strip member, it is configured in the back side of described valve body along the whole length direction of described valve body, and freedom movably is supported on the described framework; Cam, it is followed the action of described strip member and pushes to drive described valve body and make and take out of the masterpiece of moving into the described valve body of oral-lateral back-pressure from described substrate and be used on the described strip member, keeps described valve body thereby press at described occlusion locations; Driving mechanism, its described strip member that is supported on the described framework slides to the direction vertical with the advance and retreat direction of described valve body with making free sliding; Valve body drives use roller, itself and be located at described strip member and described valve body between the described valve body of camming surface butt ground driving of described tabular cam; And framework, it is provided with in the mode of surrounding described valve body and driving with roller and described tabular cam, and the advance and retreat that make the sliding action of described strip member be converted to described valve body are moved.
In this case, preferred described framework separates on the backboard that is arranged on described framework with gap or on the sidewall of other chambers from the back side of described valve body, described valve body drives with the roller rotation and is mounted freely on the support of being located in the described framework, described support has to the outstanding jut of the back side of described valve body, this support free sliding ground constitutes, so that described jut and described valve body drive with the action of roller accordingly this from being formed at hole on the described framework and giving prominence to or submerging, by the back side driven for opening and closing described valve body of described jut from described valve body.
According to such the present invention, take out of when moving into mouthful by the valve body occlusion substrate, by lift drive mechanism make valve body rise to substrate take out of move into mouthful relative position after, make strip member movable by driving mechanism for opening or closing, thereby follow the action of strip member, valve body drives the camming surface with the tabular cam of roller butt, pushes the driving valve body.Thus, valve body advances, and pushes the ground occlusion substrate and take out of and move into mouth, takes out of the masterpiece of moving into oral-lateral back-pressure valve body from substrate and is used on the strip member, thereby valve body can be remained on this occlusion locations.Thus, for example,, also can make valve body be attached to substrate and take out of under the state of moving on the mouth and be held, so the situation that existing such valve body is opened can not occur in pressure even without being used as power of the actuator that drives strip member.In addition, surround the framework of valve body driving by being provided with roller and tabular cam, thereby valve body drives and can carry out in framework with contacting of roller and tabular cam, so even produce powder because of valve body drives with contacting of roller and tabular cam, can prevent that also this powder from dispersing outside framework.
In addition, also can in described framework, be provided with and support described strip member so that described strip member is accepted from the supporting part of the power of described valve body effect from the back side of described strip member.This supporting part for example is made of the back-up roll of being located in the described framework.In view of the above, strip member with carry out in framework from its contacting also of supporting part of back support, so, can prevent that also this powder from dispersing outside framework even therefore produce powder.
According to the present invention, a kind of gate valve can be provided and use the substrate board treatment of this gate valve, even without being used as power of the driving mechanism of the actuator that drives valve body etc., also can making valve body be attached to substrate and take out of the state of moving on the mouth and be held with pressure.
Description of drawings
Figure 1A is the transverse cross-sectional view of schematic configuration of the gate valve of expression embodiments of the present invention, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Figure 1B is the transverse cross-sectional view of schematic configuration of the gate valve of this mode of execution of expression, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Fig. 2 A is the longitudinal sectional drawing of schematic configuration of the gate valve of this mode of execution of expression, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Fig. 2 B is the longitudinal sectional drawing of schematic configuration of the gate valve of this mode of execution of expression, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Fig. 2 C is the longitudinal sectional drawing of schematic configuration of this embodiment's of expression gate valve, the figure when it is positioned at retreating position for valve body.
Fig. 3 A is the longitudinal sectional drawing of schematic configuration of the gate valve of this mode of execution of expression, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Fig. 3 B is the longitudinal sectional drawing of schematic configuration of the gate valve of this mode of execution of expression, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Fig. 3 C is the longitudinal sectional drawing of schematic configuration of this embodiment's of expression gate valve, the figure when it is positioned at retreating position for valve body.
Fig. 4 A is the stereogram of action of major component of the gate valve of this mode of execution of expression, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Fig. 4 B is the stereogram of action of major component of the gate valve of this mode of execution of expression, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Fig. 4 C is the stereogram of action of major component of this embodiment's of expression gate valve, the figure when it is positioned at retreating position for valve body.
Fig. 5 A is the longitudinal sectional drawing of structure example of the valve body slide mechanism of this mode of execution of expression, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Fig. 5 B is the longitudinal sectional drawing of structure example of the valve body slide mechanism of this mode of execution of expression, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Fig. 6 A is the transverse cross-sectional view of action that is used to illustrate the cam mechanism of this mode of execution, and it takes out of figure when moving into mouthful relative position for valve body is positioned at substrate.
Fig. 6 B is the transverse cross-sectional view of action that is used to illustrate the cam mechanism of this mode of execution, and it takes out of figure when moving into mouthful position that begins to move for valve body is positioned at towards substrate.
Fig. 6 C is the transverse cross-sectional view of action that is used to illustrate the cam mechanism of this mode of execution, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouthful for valve body is positioned at.
Fig. 7 A is the transverse cross-sectional view of schematic configuration of first variation of the gate valve of expression embodiments of the present invention, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Fig. 7 B is the transverse cross-sectional view of schematic configuration of the gate valve of expression first variation, its push for valve body is positioned at occlusion substrate take out of figure when moving into mouthful.
Fig. 8 A is the transverse cross-sectional view of schematic configuration of second variation of the gate valve of expression embodiments of the present invention, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Fig. 8 B is the drawing in side sectional elevation of schematic configuration of the gate valve of expression second variation, and it is taken out of and move into mouthful one side occlusion substrate and take out of figure when moving into mouthful for valve body is positioned at pressured substrate on one side.
Fig. 9 A is the drawing in side sectional elevation of schematic configuration of the 3rd variation of the gate valve of expression embodiments of the present invention, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Fig. 9 B is the drawing in side sectional elevation of schematic configuration of the gate valve of expression the 3rd variation, and it is taken out of and move into mouthful one side occlusion substrate and take out of figure when moving into mouthful for valve body is positioned at pressured substrate on one side.
Figure 10 A is the partial enlarged drawing of schematic configuration that is used to illustrate the 4th variation of gate valve of the present invention, and it takes out of figure when moving into mouthful relative position for valve body is positioned at substrate.
Figure 10 B is the partial enlarged drawing of schematic configuration of the gate valve of expression the 4th variation, and it takes out of figure when moving into the position that mouth begins to move for valve body is positioned at towards substrate.
Figure 10 C is the partial enlarged drawing of schematic configuration of the gate valve of expression the 4th variation, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Figure 11 A is the transverse cross-sectional view of schematic configuration of the gate valve of expression the 4th variation, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Figure 11 B is the transverse cross-sectional view of schematic configuration of the gate valve of expression the 4th variation, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Figure 12 A is the longitudinal sectional drawing of schematic configuration of the gate valve of expression the 4th variation, and it takes out of figure when moving into the relative position of mouth for valve body is positioned at substrate.
Figure 12 B is the longitudinal sectional drawing of schematic configuration of the gate valve of expression the 4th variation, the figure when it is pushed the ground occlusion substrate and takes out of the position of moving into mouth for valve body is positioned at.
Figure 13 is the figure of schematic configuration that is used to illustrate the substrate board treatment of the gate valve that is suitable for this mode of execution.
Figure 14 is first sectional drawing that is suitable for example that is used to illustrate the gate valve of this mode of execution.
Figure 15 is second sectional drawing that is suitable for example that is used to illustrate the gate valve of this mode of execution.
Figure 16 is the 3rd sectional drawing that is suitable for example that is used to illustrate the gate valve of this mode of execution.
Symbol description
100: chamber
110: sidewall
112: substrate is taken out of and is moved into mouth
114: frame
200: gate valve
202: framework
202a: backboard
202b, 202c: side plate
202d: top board
202e: base plate
203: opening portion
204a: through hole
210: valve body
212: the valve body dunnage
212a: patchhole
220: guide rail
222: slide block
224: guide rod
224a: backstopping assembly
226: force application part
230: lift drive mechanism
232: the actuator that lifting is used
252: the actuator that opens and closes usefulness
234: piston rod
235: diameter reducing part
236: head
240: the valve body slide mechanism
242: frame portion
242a: patchhole
243: coupling component
244: guiding body
245: rotatable parts
246: recess
250: driving mechanism for opening or closing
252: actuator
254: piston rod
256: supporting part
260: cam mechanism
261: strip member
262: bar-like member
263: lining
264: connected components
270: tabular cam
272: the inclined-plane
274: the plane
276: baffle plate
280: valve body drives uses roller
282: support
282a: jut
284: roller
290: back-up roll
292: support
294: roller
300: framework
302: guide rod
303,304,306: the hole
The 400:FPD substrate board treatment
410: shared conveying chamber
420A, 420B, 420C: process chamber
430: load locking room
Embodiment
Below, the preferred forms that present invention will be described in detail with reference to the accompanying.In addition, in this specification and accompanying drawing,, use identical reference character, thereby omit repeat specification about having the structural element of identical functions structure in fact.
(gate valve)
At first, with reference to the gate valve of description of drawings embodiments of the present invention.Figure 1A, Figure 1B, Fig. 2 A～Fig. 2 C, Fig. 3 A～Fig. 3 C, Fig. 4 A～Fig. 4 C are the figure of structure that is used to illustrate the gate valve of present embodiment.In the present embodiment, shown in Figure 1A, Figure 1B, exemplified the example of gate valve 200, this gate valve 200 has the valve body 210 that the substrate that can open and close chamber 100 is taken out of the size of moving into mouth 112, lifting drives and advance and retreat drive this valve body 210, opens and closes substrate and takes out of and move into mouthfuls 112.
Figure 1A, Figure 1B see the sectional drawing of gate valve when cutting open by take out of near the central authorities that move into mouthful horizontal plane by substrate from the top.Fig. 2 A, Fig. 2 B, Fig. 2 C are the sectional drawings of seeing gate valve when cutting gate valve open with the vertical face of the parallel sidewalls of chamber from the back side, and it is the A-A sectional drawing shown in Figure 1A.Fig. 3 A, Fig. 3 B, Fig. 3 C are the sectional drawings of seeing gate valve when the vertical face vertical with the sidewall of chamber cut gate valve open from the side, and it is the B-B sectional drawing shown in Fig. 2 B.Fig. 4 A, Fig. 4 B, Fig. 4 C are the stereograms of action that is used to illustrate the major component of gate valve.
Figure 1A, Fig. 2 A, Fig. 3 A, Fig. 4 A represent that valve body is positioned at substrate and take out of a state of moving into mouthful relative position, and Figure 1B, Fig. 2 B, Fig. 3 B, Fig. 4 B represent that valve body is positioned at and push the ground occlusion substrate and take out of the state of moving into mouthfuls 112 position.Fig. 2 C, Fig. 3 C, Fig. 4 C represent that valve body is positioned at from substrate and take out of a state of moving into position mouthful to be kept away.
The chamber 100 that is provided with the gate valve 200 of present embodiment be constitute vacuum atmosphere can be airtight chamber arbitrarily (comprising container), for example FPD substrate etc. is carried out the process chamber, conveying chamber, load locking room of the substrate board treatment that regulations such as etching, film forming handle etc.
At this, the encirclement substrate is installed on the sidewall 110 of chamber 100 takes out of the frame 114 of moving into mouthful 112 peripheries.Thus, produce substrate crackle or dislocation when mouth 112 is taken out of substrates such as moving into glass substrate, also can make it not injured by protective side wall 110 even for example substrate is taken out of to move into.Be not provided with under the situation of frame 114, injured if substrate is taken out of near the sidewall of moving into mouthfuls 112 110, move into mouthfuls 112 even then take out of by valve body 210 occlusion substrates, this hurt also can become the slit and can not keep air-tight state.In this case, must change the container of the sidewall 110 that constitutes chamber 100 itself.
With respect to this, be provided with under the situation of frame 114 on the sidewall 110, even injured on the frame 114 when producing substrate crackle etc., can prevent that also sidewall 110 is directly injured.In this case,, also only need to change frame 114 and get final product,,, can prolong the life-span of chamber 100 so maintenance also becomes simply so do not need to change chamber 100 containers itself even if frame 114 is injured.
For example be provided with on the sidewall 110 under the situation of frame 114, pressing the surface (valve body bearing surface) that is attached to frame 114 to go up valve body 210 and occlusion substrate is taken out of and moved into mouthfuls 112.In this case, in order to improve sealing effect, preferably on the surface of the frame 114 that contacts with valve body 210, take out of and move into mouthful 112 modes sealed members (not shown) such as O type circle are set to surround substrate.
In addition, frame 114 neither be set.Under the situation that frame 114 is not set, directly press the surface (valve body bearing surface) that is attached to sidewall 110 to go up valve body 210 and occlusion substrate is taken out of and moved into mouthfuls 112.In this case, preferably on the surface of the sidewall 110 that contacts with valve body 210, take out of and move into mouthful 112 modes sealed members such as O type circle are set to surround substrate.In addition, sealed member also can replace being arranged on substrate takes out of on the wall of moving into around mouthfuls 112 (surface of the surface of sidewall 110 or frame 114), takes out of and moves into mouth 112 and be arranged on the surface of the valve body 210 that contact with this wall to surround substrate.
(the concrete structure example of gate valve)
The concrete structure example of gate valve 200 then, is described.Shown in Figure 1A, Fig. 2 A, Fig. 3 A, gate valve 200 has to surround substrate at least takes out of the framework (shell) 202 that mouthfuls 112 the mode moved into is arranged on the roughly case shape on the sidewall 110 of chamber 100.Framework 202 has the backboard 202a right with sidewall 110 parallel surfaces, and has side plate 202b, 202c, top board 202d, base plate 202e, covers sidewall 110 by these.On the backboard 202a of framework 202, to move into mouthfuls 112 substrates of coming in and going out and pass through in order to make to take out of, and take out of mouthful 112 same shaped aperture portions 203 that move into taking out of to move into to form with substrate on mouthfuls 112 relative positions with substrate via substrate.
The lifting guiding part of valve body 210 and switching guiding part for example are constructed as follows.In this lifting guiding part guiding valve body 210 vertical liftings, open and close guiding part guiding valve body 210 levels advance and retreat ground and open and close.Particularly, for example shown in Figure 1A, Fig. 2 A, be provided with on the sidewall 110 of chamber 100 substrate take out of move into mouthfuls 112 about the pair of guide rails 220 of configuration and vertical extension.Being provided with respectively on the guide rail 220 can be along the slide block 222 of their slips.Be respectively equipped with on each slide block 222 from its back side to the outstanding guide rod (support stick) 224 of level advance and retreat direction of valve body 210.Each guide rod 224 free sliding ground trip is embedded in about valve body 210 to be given prominence to the patchhole 212a of the valve body dunnage 212 that is provided with laterally from the end.
According to such structure, valve body 210 moves and along the vertical direction free lifting along guide rail 220 by making slide block 222.In addition, valve body 210 is taken out of on the direction of moving into mouth 112 at the switching substrate along guide rod 224 and is flatly freely advanced.The structure of such lifting guiding part and switching guiding part is not limited to above-mentioned such.
On above-mentioned guide rod 224, between valve body dunnage 212 and slide block 222, insert force application part (for example disc spring) 226.This force application part 226 is to being attached to substrate and taking out of the side that moves on mouthfuls 112 and (open direction) in the opposite direction and go up the application of force with valve body 210 being pressed.In addition, on guide rod 224, backstopping assembly 224a is set, so that valve body dunnage 212 does not come off from guide rod 224 in its front end.In addition, backstopping assembly 224a for example also can form the structure of the front end of guide rod 224 than patchhole 212a hole enlargement, in addition, also can independently be made of miscellaneous parts such as baffle rings.
In addition, do not take out of by this backstopping assembly 224a limiting valve body 210 and move into mouthfuls 112 and leave more than the predetermined distance from substrate.Promptly, valve body 210 by the power that applies of force application part 226 by being supported on, so can move into mouthful 112 states that leave predetermined distance and make its lifting always to take out of with substrate by the position of backstopping assembly 224a backstop (take out of and move into mouthfuls 112 position) away from substrate.In view of the above, can make valve body 210 always rise to substrate takes out of and moves into mouthfuls 112 and the same position of 260 of cam mechanisms.
In addition, above-mentioned force application part 226 also has such effect, promptly drive with roller 280 butt camming surfaces (inclined-plane 272, plane 274) when driving, drive the mode application of force of not leaving with roller 280 with valve body from camming surface (inclined-plane 272, plane 274) when the effect by cam mechanism 260 described later makes valve body.Thus, can drive valve body along camming surface (inclined-plane 272, plane 274) and drive with roller 280, thus can make the action of valve body 210 stable, and driven for opening and closing valve body 210 reliably.
(lift drive mechanism)
Then, with reference to the concrete structure example of description of drawings lift drive mechanism 230.Lift drive mechanism 230 makes valve body 210 along guide rail 220 liftings taking out of to move into mouthfuls 112 relative positions (for example position shown in Fig. 2 A, Fig. 3 A) and take out of to move between mouthful 112 positions of keeping out of the way (for example position shown in Fig. 2 C, Fig. 3 C) from substrate with substrate.
Particularly, shown in Fig. 2 A, Fig. 2 C (or Fig. 3 A, Fig. 3 C), lift drive mechanism 230 is by constituting by straight-line actuator 232.As such actuator 232, exemplify by making piston rod 234 flexible and can straight-line cylinder or oil hydraulic cylinder etc., but be not limited to these.At this, situation about being made of cylinder with actuator 232 is an example.
Particularly, actuator 232 so that piston rod 234 be installed on the base plate 202e of framework 202 from the modes that the through hole 204a that is formed on base plate 202e and goes up and be provided with airtightly inserts in the framework 202.And the front end that utilizes piston rod 234 is from supported underneath valve body 210, thereby makes actuator 232 with predetermined stroke lifting moving (driving up and down) piston rod 234, can make thus valve body 210 along guide rail 220 in the vertical direction lifting moving.In addition, while the airtight conditions in keeping framework 202 makes under the flexible situation of piston rod 234, piston rod 234 is inserted in the through hole 204a via not shown lining.
The front end of piston rod 234 supports valve body 210 via the valve body slide mechanism 240 of the following central position of being located at valve body 210.This valve body slide mechanism 240 can support valve body 210 with respect to piston rod 234 makes it move freely in advance and retreat directions (switching direction).
The structure example of such valve body slide mechanism 240 is shown in Fig. 5 A, Fig. 5 B.Shown in Fig. 5 A, valve body slide mechanism 240 is equipped with frame portion 242 valve body 210 below by bolt equijoin parts 243.On the bottom of frame portion 242, form the patchhole 242a of the front end that inserts piston rod 234.
In frame portion 242, be provided with the guiding body 244 that valve body 210 is relatively moved in the advance and retreat direction.Particularly, top a plurality of rotatable parts 245 of being located at guiding body 244 rotate and freely support valve body 210 with following contact of valve body 210.In addition, can be ball part as rotatable parts 245, also can be cylindrical member.
Below guiding body 244, for example form pit recesses 246 such as (ザ グ リ), the front end of butt piston rod 234 on this recess 246.Particularly, the front end of piston rod 234 is connected with the head 236 of curved surface above it via diameter reducing part 235, and this head 236 enters the recess 246 of guiding body 244.Thus, guiding body 244 is supported by the front end of piston rod 234.
By forming such structure, valve body 210 is supported by the front end of piston rod 234 via guiding body 244, and valve body 210 can move in advance and retreat directions (switching direction) via guiding body 244 by the front end of piston rod 234.For example valve body 210 is taken out of when moving into mouthfuls 112 relative positions when being positioned at substrate, even advance to the position shown in Fig. 5 B from the position shown in Fig. 5 A, valve body 210 also can be supported by piston rod 234 on one side, on guiding body 244, move on one side, so can make piston rod 234 and guiding body 244 advance and retreat, and valve body 210 is moved in the horizontal direction.
By the effect of such valve body slide mechanism 240, can make the valve body 210 and the lifting of actuator 232 drive driven for opening and closing on the advance and retreat direction independently.Therefore, the actuator of using about lifting 232, as long as be fixed on the assigned position just enough, so structure is constituted extremely simply.That is, do not need when advance and retreat drive valve body 210 actuator 232 self to want to advance and retreat complicated structures such as driving such mechanism yet.
In addition, the size (for example the size of the size of frame portion 242, patchhole 242a, guiding body 244 or rotatable parts 245 etc.) that constitutes the each several part of valve body slide mechanism 240 is preferably according to the amount of movement decision of the substantially horizontal of valve body 210.In addition, in Fig. 5 A, Fig. 5 B, the situation that forms diameter reducing part 235 on piston rod 234 has been described, but also can formed diameter reducing part 235.As Fig. 5 A, formation diameter reducing part 235 shown in Figure 5, plunger the bar 234 and position of diameter reducing part 235 is overlapped with the position of patchhole 242a, thereby can enter diameter reducing part 235 until the inner side edge portion of patchhole 242a by mobile valve 210, so can reduce patchhole 242a with corresponding therewith amount, and can increase the stroke of valve body 210.
(driving mechanism for opening or closing)
Then, with reference to description of drawings driving mechanism for opening or closing 250.Driving mechanism for opening or closing 250 is made of cam mechanism 260, and this cam mechanism 260 is moved into mouthfuls 112 relative positions (position shown in Figure 1A, Fig. 2 A, Fig. 3 A) and pushed the ground occlusion substrate and take out of to move into valve body 210 is advanced and retreat opening and closing direction along guide rod 224 taking out of with substrate.The cam mechanism 260 of present embodiment is an example with the situation that what is called craspedodrome cam mechanism constitutes.At this, the strip member 261 that tabular cam 270 is installed is slided in the direction vertical with the advance and retreat direction along valve body 210, valve body 210 is moved in the advance and retreat direction, and can be with its maintenance under the state that valve body 210 is pressed be attached to substrate to be taken out of to move on mouthfuls 112 on the plane 274 of tabular cam 270.
The driving mechanism that drives strip member 261 is by making can constituting by straight-line actuator such as for example cylinder or oil hydraulic cylinder etc. 252 of strip member 261 slips.At this, as actuator 252 so that the flexible situation about can straight-line cylinder constituting of piston rod 254 is an example.In addition, actuator 252 is not limited thereto.
Illustrate in greater detail such cam mechanism 260.For example shown in Figure 1A, Figure 1B, strip member 261 forms longly than the length of the length direction of valve body at least, and it is along the backboard 202a configuration near framework 202 of the length direction of valve body 210.Strip member 261 and substrate are taken out of the degree that can insert uninterruptedly when being separated into valve body 210 liftings between the mouth 112 of moving into.
The strip member 261 of present embodiment constitutes, and the bar-like member 262 that respectively disposes respectively on the upside of the opening portion 203 of framework 202 and downside can one slide.Thus, can prevent during the conveyance substrate that substrate or carrying arm and cam mechanism 260 from interfering, and can not make when making valve body 210 on-off actions valve body 210 obliquely relatively substrate take out of and move into mouthful 112 levels advance and retreat.
Particularly, the end of each bar-like member 262 is outstanding from side plate 202b, 202c respectively, and the contact segment that contacts with each bar-like member 262 at side plate 202b, 202c for example is separately installed with the lining 263 that is made of resin and can airtightly slides.In addition, for example fixing and integrated by tabular connected components 264 respectively in the end of each bar-like member 262 from the outstanding end of side plate 202c.The front end of the piston rod 254 of actuator 252 is installed on this connected components 264.Thus, only by this piston rod 254 being stretched and can making each bar-like member 262 one and slip simultaneously.In this case, actuator 252 for example is installed in the outside of side plate 202c via supporting part 256.
Each bar-like member 262 of strip member 261 passes through to rotate support freely from the outstanding a plurality of back-up rolls 290 that are provided with of inner face of the backboard 202a of framework 202 and by the backboard 202a from framework 202.In Figure 1A, Figure 1B, back-up roll 290 is an example so that four situation respectively to be set respectively on each bar-like member 262 at certain intervals, but the quantity and the allocation position of back-up roll 290 are not limited to this, also can be respectively to be provided with one, also can respectively be provided with (for example 8) more than 5.In addition, under the situation that strip member 261 is made of a bar-like member, back-up roll 290 can be provided with one, also can be provided with a plurality of.Can adjust the quantity and the position of back-up roll 290 according to the length of the length direction of valve body 210 and weight etc.For example can be the long more quantity that then increases back-up roll 290 more of length of the length direction of valve body 210, the short more quantity that then reduces back-up roll 290 more.In addition, being example at this each bar-like member 262 to form tabular situation, but may not being defined in this, also can for example be the square tube shape.Also can be cylindric or cylindric in addition.
Back-up roll 290 also rotates the support 292 that freely supports this roller 294 by roller 294 that can rotate with the back side butt of each bar-like member 262 and the inner face that is installed in backboard 202a and constitutes.In addition, the back side of each bar-like member 262 with the butt position of roller 294 butts on baffle plate 276 is set, protect the surface of each bar-like member 262 and roller 294 rotated on the face of baffle plate 276, thereby make the action of strip member 261 more smooth and easy.The strip member 261, baffle plate 276, the roller 294 that comprise each such bar-like member 262 can be made of same material respectively, also can be made of different materials.For example, strip member 261 is made of stainless steel (TM trade mark), and baffle plate 276 and roller 294 are made of resin.
On the other hand, shown in Figure 1A, Figure 1B, Fig. 2 C, Fig. 4 C, on valve body 210, a plurality of valve bodies are set respectively drive with following in the above with rollers 280.Each valve body drives with roller 280 side-prominent and during when slip strip member 261 and each tabular cam 270 butt to strip member 261 from the back side of valve body 210.Each valve body drives with roller 280 and back-up roll 290 and is set to equal number.And, when being positioned at substrate, valve body 210 takes out of when moving into mouthfuls 112 relative positions, and each valve body drives with roller 280 relative and be configured on the valve body 210 across each bar-like member 262 of strip member 261 and each back-up roll 290.Valve body drives with roller 280 and is made of with being installed on the valve body 210 and rotating the support 282 that freely supports this roller 284 roller 284 that can rotate with tabular cam 270 butts.
In its valve body 210 1 sides a plurality of a plurality of valve bodies of butt that are used for respectively being set on each bar-like member 262 of strip member 261 drives with roller 280 its a plurality of tabular cam 270 that drives.Tabular cam 270 has as the inclined-plane 272 of first camming surface with as the plane 274 of second camming surface, this inclined-plane 272 slides to a direction by making strip member 261, with the valve body driving this valve body being driven advances on the direction of valve body 210 with roller 280, move it and push the ground occlusion substrate and take out of and move into mouthfuls 112 position, this plane 274 makes valve body 210 be moved into by taking out of from substrate that power that mouthful 112 side pressures return drives with roller 280 and back-up roll 290 via valve body and accepted by the backboard 202a of framework 202, thereby valve body 210 is remained on occlusion locations.
The inclined-plane 272 of tabular cam 270 is made of the inclined-plane that tilts in the mode that increases (valve body drives with roller 280 and advances gradually or retreat) along the glide direction of strip member 261 from strip member 261 thickness gradually, and the plane 274 of tabular cam 270 is by increasing to the thickest position (valve body 210 push ground occlusion substrate take out of move into mouthfuls 112 position) with the continuous plane formation of this thickness at first camming surface.
The inclined-plane 272 of tabular cam 270 forms and can drive valve body and drive inclined-plane with roller 280, and before making when strip member 261 slides on direction of traction valve body 210 gradually and then push substrate and take out of and move into mouth 112.For example shown in Figure 1A, the inclined-plane 272 of tabular cam 270 constitutes the inclined-plane that reduces height from the plane 274 of tabular cam 270 to actuator 252 sides gradually in this case.
In addition, the inclined-plane 272 of tabular cam 270 is not limited to above-mentioned structure, also can form can drive that valve body drives with the inclined-plane of roller 280 so that strip member 261 when extruding direction and slide valve body 210 gradually before so that push substrate and take out of and move into mouth 112.In this case, though not shown, the inclined-plane 272 of tabular cam 270 constitutes the inclined-plane that reduces height from the plane 274 of tabular cam 270 to the opposition side of actuator 252 gradually.In this case, when strip member 261 valve body when extruding direction and slide drives with roller 280 butt inclined-planes 272 and moves, so at this moment the power accepted via inclined-plane 272 with roller 280 from the valve body driving of strip member 261 plays effect as compressive force.Therefore, the size of the power of accepting according to strip member 261, strip member 261 might be crooked, so need the shape and the material of design strip member 261 to make strip member 261 not crooked.
With respect to this, if the inclined-plane shown in Figure 1A 272, then strip member 261 valve body when direction of traction is slided drives with roller 280 butt inclined-planes 272 and moves, so at this moment valve body drives that 272 power of accepting play effect as the tractive force of strip member 261 from the inclined-plane with roller 280, do not play effect, so there is not the worry of strip member 261 bendings as compressive force.
According to such cam mechanism 260, then shown in Figure 1A, Fig. 3 A, take out of when moving into mouthfuls 112 relative positions when valve body 210 is positioned at substrate, make actuator 252 drive and make piston rod 254 to shrink, slide thereby strip member 261 is gone up in direction of traction (direction of arrow shown in Figure 1A).So each valve body drives with roller 280 inclined-plane 272 of each tabular cam 270 of butt simultaneously, along the inclined-plane 272 and move in the direction vertical (valve body 210 is taken out of towards substrate and moved into mouthful 112 directions of advancing) with the glide direction of strip member 261.Thus, valve body 210 drives with roller 280 to closing substrate via these each valve bodies and takes out of and move into mouthfuls 112 direction and advance mobilely, and butt and pressing gradually is attached to substrate and takes out of and move on the mouth 112.
Afterwards, and then traction strip member 261, then each valve body drives and rides over simultaneously on the plane 274 of each tabular cam 270 with roller 280.Thus, shown in Figure 1B, Fig. 3 B, valve body 210 is attached to substrate with pressure and takes out of the state of moving on mouthfuls 112 and be held.
Like this, valve body 210 power (counteractive power) of pressing attached substrate to take out of to move into mouthfuls of 112 o'clock valve bodies 210 to be taken out of from substrate to move into oral-lateral and push back can drive with roller 280 and back-up roll 290 and be accepted by the backboard 202a of framework 202 via valve body.Thus, can keep valve body 210 at occlusion locations.Therefore, each valve body drives with roller 280 and rides under the state on the plane 274, even do not keep being used as power of actuator 252 in advance, also valve body 210 can be firmly held in and be attached to substrate and take out of on the occlusion locations of moving on the mouth 112.
Describe the cam mechanism 260 when occlusion locations keeps valve body 210 and the action of valve body 210 like this in detail with reference to accompanying drawing.Fig. 6 A～Fig. 6 C is conceived to the enlarged view that a tabular cam 270 illustrates the action of cam mechanism 260 and valve body 210.At first, the retreating position of valve body 210 along guide rail 220 from the below rises to take out of with substrate moves into mouthfuls 112 relative positions, then as shown in Figure 6A.At this moment, strip member 261 is positioned at initial position, and valve body drives with roller 280 inclined-plane 272 of the tabular cam 270 of butt not also.
Then, by being used as power of actuator 252 strip member 261 is pulled in the diagram direction of arrow, then shown in Fig. 6 B, valve body drives the inclined-plane 272 with the tabular cam 270 of roller 280 butts, further 272 moves along the inclined-plane afterwards.At this moment, valve body drive with roller 280 by force application part 226 to the direction application of force of inclined-plane 272 butts, 272 move along the inclined-plane reliably so can not leave inclined-plane 272.Thus, valve body 210 is taken out of and is moved into mouthfuls 112 direction and move to closing substrate, the butt substrate take out of move into mouthfuls 112 around wall (be the wall of frame 114) at this, take out of and move into mouth 112 while then further push this wall occlusion substrate.
Further draw strip member 261 from this state, then shown in Fig. 6 C, valve body drives and rides on the plane 274 of tabular cam 270 with roller 280.Thus, while valve body 210 with push substrate take out of move into mouthfuls 112 around the wall occlusion substrate take out of the state of moving into mouth 112 and be held.
Like this, according to present embodiment, valve body 210 is by the wedge effect of tabular cam 270, be attached to substrate when taking out of on the wall of moving into around mouthfuls 112 and valve body 210 pressed, the power that pushes back from this wall drives with roller 280 and back-up roll 290 via valve body and is accepted by the backboard 202a of framework 202, thereby valve body 210 is taken out of and mechanically remained on substrate under mouthfuls 112 the state moved into and take out of between the backboard 202a that moves into mouth 112 and framework 202 pushing substrate.In this case, shown in Fig. 6 C, when valve body 210 is positioned at occlusion locations, each back-up roll 290 be configured to the plane 274 of each tabular cam 270 and each valve body drive with roller 280 across strip member 261 and and come on the straight line.Like this, the power of accepting from valve body 210 passes to strip member 261 with roller 280 with each tabular cam 270 via each valve body driving, this power acts directly on via strip member 261 on each back-up roll 290 of the opposition side that is positioned on this straight line, so strip member 261 can further bear from the power of valve body 210 effects powerfully.Thus, can under the further state of pushing valve body 210, valve body 210 be remained on the occlusion locations powerfully.Therefore, even do not keep being used as power of actuator 252 in advance, also valve body 210 can be firmly held in and be attached to substrate and take out of on the occlusion locations of moving on mouthfuls 112.
Like this, according to the gate valve of present embodiment, do not need to press attached valve body 210 by being used as power of actuator 252 in advance as in the past.In addition, the power that valve body 210 can be accepted according to the backboard 202a from framework 202 and take out of the size of mouthful 112 power of accepting moved into from substrate, make frictional force action to surpass the gravity of valve body 210, so, also can support valve body 210 and not fall even the actuator 232 that lifting is used moves.
Therefore, even for example make actuator 232,252 akinesias, valve body 210 is opened because of the fault of actuator 232,252 or the cut-out of supply capability.In addition, about actuator 232,252, need not adopt the existing main equipment of valve body 210 degree of fully pushing like that.For example about actuator 252, adopt valve body is driven move to the mini-plant of degree on plane 274 with roller 280 just enough.In addition, about actuator 232, adopt to make valve body 210 its gravity of opposing at least and the mini-plant of the degree of lifting is just enough.Therefore, can make the gate valve integral miniaturization.Thus, can cut down manufacture cost significantly.
In addition, valve body 210 self also can miniaturization and, so about actuator 232,252, also can use further small-sized equipment.In addition, as shown in Figure 6A, when making valve body 210 liftings, valve body 210 and valve body drive with roller 280 can be respectively from substrate take out of move into mouthfuls 112 and tabular cam 270 state that leaves predetermined distance move down, so the bump substrate is taken out of and is moved into mouth 112 and tabular cam 270 and breakage etc. occurs can prevent valve body 210 liftings the time.In addition, do not need the action force of actuator 232,252 for valve body 210 is remained on blocked state,, can cut down consumption significantly as the air of its action media so for example constitute under the situation of actuator 232,252 by cylinder.
(action of gate valve)
Then, with reference to a series of action of the gate valve of description of drawings present embodiment.At this, valve body 210 when be positioned at the substrate shown in Fig. 3 C, Fig. 4 C take out of the retreating position of moving into mouthfuls 112 below the time be the original position of valve body 210.
At first, illustrate and when valve body 210 is positioned at retreating position, begin to push the ground occlusion substrate and take out of a series of action when moving into mouthfuls 112 position to being driven into.Mouthfuls 112 relative positions are moved in taking out of with substrate from the retreating position of the below shown in Fig. 3 C, Fig. 4 C to the top shown in Fig. 3 A, Fig. 4 A, make actuator 232 actions, make piston rod 234 elongations, thereby valve body 210 is risen along guide rail 220.
Then, make actuator 252 action, piston rod 254 is shortened, thereby strip member 261 is slided along direction of traction, make valve body 210 take out of and move into mouthfuls 112 direction and advance along closing substrate.Thus, valve body 210 is closed substrate and is taken out of and move into mouthfuls 112 shown in Fig. 3 B, Fig. 4 B, and pushes the ground occlusion substrate with certain pressing force and take out of and move into mouthfuls 112, further keeps under this state.Like this, substrate is taken out of and is moved into mouth 112 by valve body 210 inaccessible and sealings, so for example can carry out the processing of substrate simultaneously with specified vacuum pressure to chamber 100 decompressions afterwards.At this moment, valve body 210 is mechanically remained on the backboard 202a of framework 202 and substrate and takes out of and move between mouthfuls 112 by the wedge effect of cam mechanism 260 as mentioned above.
Then, illustrate that opening substrate takes out of and move into mouthfuls 112 o'clock a series of action.Make actuator 252 from position shown in Fig. 3 B, Fig. 4 B action, and make piston rod 254 elongations, thereby strip member 261 is slided along extruding directions, make valve body 210 take out of and move into mouthfuls 112 direction and retreat along opening substrate.Thus, return the position shown in Fig. 3 A, Fig. 4 A.
Then, move into the retreating position of mouthfuls 112 relative positions, make actuator 232 actions, and piston rod 234 is shortened, thereby valve body 210 is descended along guide rail 220 to the below shown in Fig. 3 C, Fig. 4 C from taking out of of the top shown in Fig. 3 A, Fig. 4 A with substrate.Thus, substrate is taken out of and is moved into mouthful 112 openings, and valve body 210 returns initial position, moves into so can carry out taking out of of substrate to chamber 100.
In the above-mentioned mode of execution, side plate 202b, 202c free sliding ground by framework 202 support strip member 261, and are further supported this strip member 261 and made strip member 261 catch the power of accepting from valve body 210 by the back side of back-up roll 290 from strip member 261.Like this, not only from side plate 202b, the 202c of framework 202, also support strip member 261 by back-up roll 290 from back side, thereby can support, so can accept power (valve body 210 is taken out of mouthful 112 power that push back of moving into from substrate) from valve body 210 effects at opposition side from the direction of the power of valve body 210 effect more powerfully.Thus, can under the state of pushing valve body 210, valve body 210 be remained on the occlusion locations more powerfully.In addition, also back-up roll 290 need not be set, and only support strip member 261 by the side plate 202b of framework 202,202c free sliding ground.
In addition, the configuration of back-up roll 290 is not limited to the structure shown in Figure 1A, Figure 1B.That is, in the cam mechanism shown in Figure 1A, Figure 1B 260, having illustrated that back-up roll 290 is arranged on the situation on the backboard 202a of framework 202, but be not limited thereto, also can be that back-up roll 290 is arranged on the strip member 261.
First variation shown in Fig. 7 A, Fig. 7 B for example also can be arranged to make back-up roll 290 outstanding to the backboard 202a of framework 202 from strip member 261 particularly, rotates free on this backboard 202a.In addition, baffle plate 276 also can be arranged among the backboard 202a on the butt position with back-up roll 290.Configuration like this, back-up roll 290 also can be supported strip member 261 and strip member 261 is caught from the power of valve body 210 effects from strip member 261 back side.In this case, preferably each back-up roll 290 is configured to, when valve body 210 is positioned on the occlusion locations, with the plane 274 of each tabular cam 270 and each valve body drive with roller 280 across strip member 261 and and come on the straight line.
According to such structure, be positioned to take out of as Fig. 7 valve body that A is shown in 210 and move under mouthfuls 112 relative locational states with substrate, by with strip member 261 along the traction of the diagram directions of arrow, thereby valve body 210 is advanced.Draw by further strip member 261 edges being illustrated the directions of arrow, thereby the valve body driving rides on the plane 274 of tabular cam 270 with roller 280 shown in Fig. 7 B.Thus, while valve body 210 push substrate take out of move into mouthfuls 112 around the wall occlusion substrate take out of under the state of moving into mouth 112 and be held.
At this moment, shown in Fig. 7 B, the plane 274 of each back-up roll 290 and each tabular cam 270 and each valve body drive with roller 280 across strip member 261 and and come on the straight line.By each back-up roll 290 of such configuration, thereby similarly can under the state of pushing valve body 210, valve body 210 be remained on the occlusion locations with the situation shown in Figure 1B further more powerfully.
In addition, in the above-mentioned mode of execution, the situation of having used back-up roll 290 as the supporting part that supports this strip member 261 from strip member 261 back side has been described, as long as but can support strip member 261 in free sliding ground, then be not limited to back-up roll 290.
In addition, in the above-mentioned mode of execution, shown in Figure 1A, Figure 1B, exemplify each tabular cam 270 and be located at valve body 210 sides of strip member 261, each valve body drives with roller 280 and takes out of when moving on the relative position of mouth 112 with substrate and situation that the mode relative with strip member 261 is arranged on the valve body 120 describes to be positioned at when valve body 210, still is not limited thereto.
For example, second embodiment shown in Fig. 8 A, Fig. 8 B, also tabular cam 270 can be arranged on strip member 261 sides of valve body 210, valve body drives with roller 280 and takes out of when moving on the relative position of mouth 112 with substrate the mode relative with valve body 120 and be arranged on the strip member 261 to be positioned at when valve body 210.In this case, preferably each back-up roll 290 be configured to when valve body 210 is positioned on the occlusion locations and the plane 274 of each tabular cam 270 and each valve body drive with roller 280 across strip member 261 and and come on the straight line.
According to such structure, be positioned to take out of as Fig. 8 valve body that A is shown in 210 and move under mouthfuls 112 relative locational states with substrate, along diagram direction of arrow traction strip member 261, thereby valve body 210 is advanced.Further draw strip member 261, thereby the valve body driving rides on the plane 274 of tabular cam 270 with roller 280 shown in Fig. 8 B along the diagram direction of arrow.Thus, valve body 210 pressured substrate on one side take out of move into mouthfuls 112 around wall on one side occlusion substrate take out of under mouthfuls 112 the state moved into and be held.
At this moment, shown in Fig. 8 B, the plane 274 of each back-up roll 290 and each tabular cam 270 and each valve body drive with roller 280 across strip member 261 and and come on the straight line.By each back-up roll 290 of such configuration, thereby similarly can under the state of pushing valve body 210, valve body 210 be remained on the occlusion locations with the situation shown in Figure 1B further more powerfully.In addition in this case, for example the 3rd variation shown in Fig. 9 A, Fig. 9 B not only can be provided with each valve body and drive with roller 280 on strip member 261, and each back-up roll 290 also can be set.In this case, each back-up roll 290 preferred disposition becomes across strip member 261 and each valve body to drive with roller 280 and come on the straight line.
According to such structure, be positioned to take out of as Fig. 9 valve body that A is shown in 210 and move under mouthfuls 112 relative locational states with substrate, thereby by along diagram direction of arrow traction strip member 261 valve body 210 being advanced.Further draw strip member 261, thereby the valve body driving rides on the plane 274 of tabular cam 270 with roller 280 shown in Fig. 9 B along the diagram direction of arrow.Thus, while valve body 210 take out of the wall occlusion substrate of moving into around mouthfuls 112 and take out of under the state of moving into mouth 112 and be held pushing substrate.
At this moment, shown in Fig. 9 B, the plane 274 of each back-up roll 290 and each tabular cam 270 and each valve body drive with roller 280 across strip member 261 and and come on the straight line.By each back-up roll 290 of such configuration, thereby similarly can under the state of pushing valve body 210, valve body 210 be remained on the occlusion locations with the situation shown in Figure 1B further more powerfully.
Wherein, in the above-described embodiment, drive strip member 261 and when opening and closing valve body 210, valve body drives and is in contact with one another while the power of accepting from valve body 210 with roller 280 and tabular cam 270, so because the size of the power that is subjected to and valve body drive with the material of roller 280 with tabular cam 270, their contacts may produce powder, disperse to periphery.Between back-up roll 290 and the baffle plate 276 that is in contact with it also powder may appear similarly.Therefore the 4th variation shown in Figure 10 A, Figure 11 A, Figure 12 A for example also can drive each valve body with roller 280 and each back-up roll 290 respectively by constituting framework 300 encirclements that strip member 261 can be inserted with tabular cam 270 and baffle plate 276.
Be described more specifically the 4th such embodiment gate valve with reference to Figure 10 A～Figure 10 C, Figure 11 A, Figure 11 B, Figure 12 A, Figure 12 B.Figure 10 A～Figure 10 C is conceived to the enlarged view that a tabular cam 270 illustrates the action of cam mechanism 260 and valve body 210.Figure 11 A, Figure 11 B are the transverse cross-sectional view of schematic configuration of expression the 4th embodiment's gate valve integral body, and Figure 12 A, Figure 12 B are its longitudinal sectional drawings.Figure 11 A, Figure 12 A are that valve body 210 is positioned at substrate and takes out of figure when moving on mouthfuls 112 relative positions, and Figure 11 B, Figure 12 B are that valve body 210 is positioned at and pushes the ground occlusion substrate and take out of and move into mouthfuls 112 o'clock figure.
Shown in Figure 10 A, the valve body of the 4th variation drives with roller 280 and back-up roll 290 and is located in the framework 300 of case shape roughly.Framework 300 with and valve body 210 between separate the space mode be installed on the backboard 202a.Strip member 261 slides between valve body drives with roller 280 and back-up roll 290 in the hole 303,304 that tabular cam 270 and baffle plate 276 insert on the two end part that are formed on framework 300.
Back-up roll 290 constitutes roller 294 rotations is mounted freely on the support 292 that is fixed in the backboard 202a side in the framework 300.With respect to this, the valve body driving constitutes with roller 280 roller 284 rotations is mounted freely on the support 282, is installed in valve body 210 sides in the framework 300 these support 282 free slidings.
That is, be supported on a pair of guide rod 302 support 282 free slidings in the 4th variation, this a pair of guide rod 302 is installed in valve body 210 sides in the framework 300.The support 282 here has to the outstanding jut 282a of valve body 210 sides (opposition side of roller 284), and by sliding support 282 front and back, thereby this jut 282a is outstanding and submerge wherein from being formed at hole 306 on the framework 300.
In view of the above, rotate contiguously by roller 284 and tabular cam 270, thereby support 282 advances to valve body 210 sides.Thus, not from framework 300 outstanding Figure 10 A, Figure 11 A, the state shown in Figure 12 A, become jut 282a, can push valve body 210 and carry out obturation from framework 300 outstanding Figure 10 C, Figure 11 B, the state shown in Figure 12 B from jut 282a.Like this, in the 4th embodiment, jut 282a contact valve body 210 carries out driven for opening and closing on the advance and retreat direction.In addition, support 282 also can be by being located at the force application part toward back plate 202a side application of forces such as not shown disc spring in the framework 300 or leaf spring.In view of the above, can support 282 be retreated.
Illustrate in greater detail the action of the 4th variation of such structure with reference to Figure 10 A～Figure 10 C.At first, the retreating position of valve body 210 along guide rail 220 from the below rises to take out of with substrate moves into mouthfuls 112 relative positions, then shown in Figure 10 A.At this moment, strip member 261 is positioned at initial position, and valve body drives uses the not inclined-plane 272 of the tabular cam 270 of butt of roller 280, and jut 282a is also outstanding from framework 300.
Then, by being used as power strip member 261 along the traction of the diagram directions of arrow of actuator 252, then valve body drives inclined-plane 272 with the tabular cam 270 of roller 280 butts shown in Figure 10 B, further 272 moves along the inclined-plane afterwards.Thus, jut 282a is also from the outstanding and butt valve body 210 of framework 300, and then pushes valve body 210 and take out of to move on mouthfuls 112 the direction and move along closing substrate.And,, take out of and move into mouth 112 while then further push this wall occlusion substrate if valve body 210 butt substrates are taken out of the wall of moving into around mouthfuls 112 (be the wall of frame 114 at this).
Further draw strip member 261 from this state, then the valve body driving rides on the plane 274 of tabular cam 270 with roller 280 shown in Figure 10 C.Thus, valve body 210 pressured substrate on one side take out of the wall moved into around mouthfuls 112 on one side occlusion substrate take out of under mouthfuls 112 the state moved into and be held.
Like this, according to the 4th embodiment, with in the above-mentioned mode of execution or other embodiments same, valve body 210 is pushed substrate and is taken out of to move into mouthfuls 112 o'clock and take out of the power (counteractive power) of moving into oral-lateral back-pressure valve body 210 from substrate and also can drive with roller 280, back-up roll 290 and be accepted by the backboard 202a of framework 202 via jut 282a, valve body.Thus, valve body 210 can be remained on occlusion locations.Therefore, drive under the state that rides over roller 280 on the plane 274,, also can hold valve body 210 protected securely pushing substrate and take out of on the occlusion locations of moving into mouth 112 states even do not keep being used as power of actuator 252 in advance at each valve body.
In addition, according to the 4th embodiment, valve body drives with the contacting of roller 280 and tabular cam 270, back-up roll 290 and contacting in framework 300 separately of baffle plate 276 and carries out, so even if because of their contact generation powder, can prevent that also it from dispersing outside framework 300.
(the suitable example of gate valve)
Then, with reference to the concrete example that is suitable for of the gate valve in the above-mentioned the embodiments of the present invention of description of drawings.At this, exemplify the concrete example of the situation of the FPD substrate board treatment that is applicable to many chamber profile.Figure 13 is the Block Diagram of the schematic configuration of expression FPD substrate board treatment.FPD substrate board treatment 400 shown in Figure 13 has shared conveying chamber 410, this shared conveying chamber 410 is accommodated the conveyance robot (not shown) of the carrying arm with conveyance substrate, and a plurality of process chamber 420A, 420B, 420C and load locking room 430 are set around it.These shared conveying chambers 410, chambers 420A, 420B, 420C, load locking room 430 constitute respectively vacuum atmosphere as described above can be airtight chamber.
In FPD substrate board treatment 400 shown in Figure 13, shared conveying chamber 410 is connected via the gate valve in the present embodiment 200 respectively with its chambers 420A, 420B, 420C, load locking room 430 on every side.In addition, take out of to move into gate valve 200 also is set on the mouth being used for taking out of the substrate of moving into substrate from the carrying arm of the atmospheric pressure side of load locking room 430.
In addition, as manage throughout between chamber 420A, 420B, 420C and the shared conveying chamber 410, between load locking room 430 and the shared conveying chamber 410 etc., constituting between two chambers of vacuum atmosphere and be provided with under the situation of gate valve 200, for example shown in Figure 14, also can be so that the opening portion 203 of gate valve 200 is configured in the substrate of other chambers 100 takes out of mouthfuls 112 the locational mode moved into and the sidewall 110 of other chambers 100 is installed on the backboard 202a of framework 202 of gate valve 200.
In addition, be provided with under the situation of gate valve 200 for example shown in Figure 15ly 100 of two chambers, framework 202 also can be surrounded between sidewall 202b, the 202c shown in Fig. 2 A, top board 202d, bottom 202e are with each chamber 100 by omitting its backboard 202a.In this case, each back-up roll 290 also can be located on the sidewall 110 of other chambers 100 as shown in figure 15, in addition, though not shown, also each back-up roll 290 can be located on the strip member 261, baffle plate is located on the sidewall 110 of other chambers 100.
In addition, in addition, the backboard 202a that each framework 202 also can be installed in such a way for example shown in Figure 16 is about to gate valve 200 and is located at respectively on the sidewall 110 of each chamber 100, the opening portion 203 of another gate valve 200 of configuration on the position of the opening portion 203 of one gate valve 200.
More than, preferred forms of the present invention that description of drawings has been added in reference, but the invention is not restricted to above-mentioned example naturally.Those skilled in the art can expect various variation or revise example that these also belong to technology category of the present invention certainly naturally in the scope that the scope of claim is put down in writing.
For example in the above-described embodiment, illustrated to make to push to drive or push to keep the cam of valve body to constitute situation, but be not limited thereto, also can constitute by rotating cam by tabular cam.In this case, for example strip member rotation freely is supported on the framework, fixing rotating cam on strip member.And, also can rotate by making strip member, thus the rotary driving cam, and push driving or push the maintenance valve body by the camming surface of this rotating cam.
Utilizability on the industry
The present invention can be applicable to that the substrate that opens and closes chamber takes out of the gate valve of moving into mouthful and use it Substrate board treatment.
Claims (17)
1. gate valve, it is used to open and close substrate on the sidewall of being located at chamber takes out of and moves into mouth, it is characterized in that, comprising:
Take out of the mode of moving into mouthful and be arranged on framework on the sidewall of described chamber to surround described substrate;
Lifting freely is arranged in the described framework and opens and closes described substrate takes out of the valve body of moving into mouth;
Move into mouthful relative position and take out of from described substrate and to move into the lift drive mechanism that makes described valve body lifting between the position that mouth keeps out of the way taking out of with described substrate; With
Move into mouthful relative position and push the inaccessible described substrate in ground and take out of the driving mechanism for opening or closing that constitutes by cam mechanism that makes described valve body advance and retreat between the position of moving into mouthful taking out of with described substrate,
Described cam mechanism has: back side and freedom that strip member, its whole length direction along described valve body are configured in described valve body movably are supported on the described framework; And cam, it is followed the action of described strip member and pushes and drive described valve body, and takes out of the masterpiece of moving into the described valve body of oral-lateral back-pressure from described substrate and be used in described strip member by making, and pushes at described occlusion locations to keep described valve body.
2. gate valve as claimed in claim 1 is characterized in that:
Described cam is tabular cam,
Described cam mechanism has: driving mechanism, be supported on the described framework its free sliding, and described strip member slides to the direction vertical with the advance and retreat direction of described valve body; Roller is used in driving with valve body, and it contacts and drive described valve body with the camming surface of being located at the described tabular cam between described strip member and the described valve body, the sliding action of described strip member is converted to the advance and retreat action of described valve body.
3. gate valve as claimed in claim 2 is characterized in that:
Described tabular cam has: first camming surface, it slides to a direction by making described strip member, drive with the roller butt and this valve body driven with described valve body and advance to the direction of closing described valve body with roller, move to push inaccessible described substrate take out of the position of moving into mouth; Second camming surface, it is taken out of the masterpiece of moving into the described valve body of oral-lateral back-pressure from described substrate and is used on the described strip member by making, and keeps described valve body at described occlusion locations.
4. gate valve as claimed in claim 2 is characterized in that:
Described tabular cam is located at the valve body side of described strip member,
Described valve body drives and is arranged on the described valve body with roller, so that take out of when moving on the relative position of mouth relative with described strip member when described valve body is positioned at described substrate.
5. gate valve as claimed in claim 2 is characterized in that:
Described tabular cam is arranged on the strip member side of described valve body,
Described valve body drives and is arranged on the described strip member with roller, so that take out of when moving on the relative position of mouth relative with described valve body when described valve body is positioned at described substrate.
6. gate valve as claimed in claim 2 is characterized in that:
Described valve body drives uses roller a plurality of along the long side direction configuration of described valve body, and described tabular cam only is provided with and described valve body drives with the corresponding quantity of roller,
By described strip member is slided, drive whole described valve bodies in the lump and drive with roller and make described valve body advance and retreat, while and can drive by whole described valve bodies and push described valve body with roller described valve body is remained on described occlusion locations.
7. gate valve as claimed in claim 2 is characterized in that:
Be provided with supporting part, this supporting part supports described strip member from the back side of described strip member, so that described strip member is accepted from the power of described valve body effect.
8. gate valve as claimed in claim 7 is characterized in that:
Described supporting part is made of the back-up roll on the sidewall of the backboard of being located at described framework or other chambers.
9. gate valve as claimed in claim 7 is characterized in that:
Described supporting part is made of the back-up roll of being located on the described strip member.
10. gate valve as claimed in claim 7 is characterized in that:
Described supporting part is made of back-up roll,
Described back-up roll is configured to be positioned at when pushing the inaccessible described substrate in ground and taking out of on the position of moving into mouthful with described tabular cam and the driving of described valve body with roller across described strip member and come on the straight line when described valve body.
11. gate valve as claimed in claim 1 is characterized in that:
Described lift drive mechanism is by piston rod is flexible to constitute the actuator of the vertical lifting of valve body by making,
The valve body slide mechanism of the front end of described piston rod by with respect to this piston rod described valve body is free to slide in described advance and retreat direction is from the described valve body of the supported underneath of described valve body.
12. a substrate board treatment, it to a plurality of chambers, and carries out predetermined process to substrate with substrate transferring, it is characterized in that:
Described each chamber has and is used to open and close the substrate of being located on its sidewall and takes out of the gate valve of moving into mouthful,
Described gate valve comprises: take out of the mode of moving into mouthful and be arranged on framework on the sidewall of described chamber to surround described substrate; Lifting freely is arranged in the described framework and opens and closes described substrate takes out of the valve body of moving into mouth; Move into mouthful relative position and take out of from described substrate and to move into the lift drive mechanism that makes described valve body lifting between the position that mouth keeps out of the way taking out of with described substrate; And move into mouthful relative position and push the inaccessible described substrate in ground and take out of the driving mechanism for opening or closing that constitutes by cam mechanism that makes described valve body advance and retreat between the position of moving into mouthful taking out of with described substrate,
Described cam mechanism has cam, this cam is configured in the back side of described valve body by the whole length direction along described valve body and the strip member that is supported on the described framework drives, push the described valve body of driving from this strip member, and make and take out of the masterpiece of moving into the described valve body of oral-lateral back-pressure from described substrate and be used on the described strip member, keep described valve body thereby push at described occlusion locations.
13. substrate board treatment as claimed in claim 12 is characterized in that:
The load locking room that described chamber is the process chamber that carries out the processing of substrate, the conveying chamber that is connected with this process chamber, be connected with this conveying chamber.
14. a gate valve, it is used to open and close substrate on the sidewall of being located at chamber takes out of and moves into mouth, it is characterized in that having:
Take out of framework on the sidewall that mouthful mode of moving into is arranged on described chamber to surround described substrate;
Lifting freely is arranged in the described framework and opens and closes described substrate takes out of the valve body of moving into mouth;
Move into mouthful relative position and take out of from described substrate and to move into the lift drive mechanism that makes described valve body lifting between the position that mouth keeps out of the way taking out of with described substrate; With
Move into mouthful relative position and push the inaccessible described substrate in ground and take out of the driving mechanism for opening or closing that constitutes by cam mechanism that makes described valve body advance and retreat between the position of moving into mouthful taking out of with described substrate,
Described cam mechanism has: strip member, and it is configured in the back side of described valve body along the whole length direction of described valve body, and freedom movably is supported on the described framework; Cam, it is followed the action of described strip member and pushes and drive described valve body, and makes and take out of the masterpiece of moving into the described valve body quilt of oral-lateral back-pressure from described substrate and be used on the described strip member, keeps described valve body thereby press at described occlusion locations; Driving mechanism, its described strip member that is supported on the described framework slides to the direction vertical with the advance and retreat direction of described valve body with making free sliding; Valve body drives use roller, itself and be located at described strip member and described valve body between the described valve body of camming surface butt ground driving of described tabular cam; And framework, it is provided with in the mode of surrounding described valve body and driving with roller and described tabular cam, and the advance and retreat that make the sliding action of described strip member be converted to described valve body are moved.
15. gate valve as claimed in claim 14 is characterized in that:
Described framework separates from the back side of described valve body on the sidewall of the backboard that is arranged on described framework with gap or other chambers,
Described valve body drives with the roller rotation and is mounted freely on the support of being located in the described framework,
Described support has to the outstanding jut of the back side of described valve body, and this support free sliding ground constitutes, and uses the action of roller corresponding so that described jut drives with described valve body, and give prominence to and submerge from being formed at hole on the described framework,
By the back side driven for opening and closing described valve body of described jut from described valve body.
16, gate valve as claimed in claim 15 is characterized in that:
Be provided with supporting part in described framework, this supporting part supports described strip member from the back side of described strip member, so that described strip member is accepted from the power of described valve body effect.
17. gate valve as claimed in claim 16 is characterized in that:
Described supporting part is made of the back-up roll of being located in the described framework.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007263992 | 2007-10-10 | ||
| JP2007263992 | 2007-10-10 | ||
| JP2007-263992 | 2007-10-10 | ||
| JP2008229367 | 2008-09-08 | ||
| JP2008-229367 | 2008-09-08 | ||
| JP2008229367A JP2009109006A (en) | 2007-10-10 | 2008-09-08 | Gate valve and base board treating device using it |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101408249A true CN101408249A (en) | 2009-04-15 |
| CN101408249B CN101408249B (en) | 2011-01-05 |
Family
ID=40571386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101673041A Expired - Fee Related CN101408249B (en) | 2007-10-10 | 2008-10-10 | Sluice valve and substrate processing apparatus using the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (2) | JP2009109006A (en) |
| KR (1) | KR20100122884A (en) |
| CN (1) | CN101408249B (en) |
| TW (1) | TWI439622B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101988586A (en) * | 2009-08-04 | 2011-03-23 | 东京毅力科创株式会社 | Gate valve and substrate processing system using same |
| CN102147019A (en) * | 2010-01-29 | 2011-08-10 | 东京毅力科创株式会社 | Gate valve and substrate processing apparatus using the same |
| CN102168763A (en) * | 2011-05-18 | 2011-08-31 | 朱国辉 | Convex top type single gate valve |
| CN103307290A (en) * | 2011-12-16 | 2013-09-18 | 株式会社新动力等离子体 | Two way gate valve and substrate processing system having the same |
| CN104514891A (en) * | 2013-09-30 | 2015-04-15 | 东京毅力科创株式会社 | Gate valve and substrate processing apparatus |
| CN107611063A (en) * | 2012-08-09 | 2018-01-19 | 斯克林集团公司 | Substrate board treatment |
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| KR101125828B1 (en) | 2010-08-02 | 2012-04-02 | 주식회사 밀레니엄투자 | Gate device for wafer processing system |
| KR101363527B1 (en) * | 2012-05-31 | 2014-02-14 | (주)에스더블유피 | vacuum gate valve |
| KR101534783B1 (en) * | 2013-08-20 | 2015-07-08 | 서울대학교산학협력단 | Nutrient Film Plant Growing System |
| CN103451616B (en) * | 2013-09-16 | 2016-07-27 | 南方科技大学 | A kind of vacuum coating system and vacuum gate device thereof |
| DE102013226586A1 (en) * | 2013-12-19 | 2015-07-09 | Robert Bosch Gmbh | Valve with a connecting element |
| TWM528296U (en) * | 2016-05-02 | 2016-09-11 | Chung King Entpr Co Ltd | Latch mechanism and wafer cassette having the same |
| JP6902409B2 (en) * | 2017-06-23 | 2021-07-14 | 東京エレクトロン株式会社 | Plasma processing equipment |
| CN107858666A (en) * | 2017-12-13 | 2018-03-30 | 北京创昱科技有限公司 | A kind of integrated chamber of vacuum coating |
| KR101920414B1 (en) * | 2018-07-12 | 2018-11-20 | 한국진공주식회사 | Gate valve of Vacuum chamber apparatus |
| EP4283277A1 (en) * | 2022-05-24 | 2023-11-29 | Leica Mikrosysteme GmbH | Sample holder, loading device, and method for inserting a sample into a sample holder |
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|---|---|---|---|---|
| JPS6040940Y2 (en) * | 1980-11-06 | 1985-12-11 | 日本電子株式会社 | sluice valve |
| US4779649A (en) * | 1987-01-30 | 1988-10-25 | Huntington Mechanical Laboratories, Inc. | Gate valve with camming wedge, pressure equalizer, and replaceable bleeder valve |
| JP2002206650A (en) * | 2001-01-10 | 2002-07-26 | Anelva Corp | Gate valve |
-
2008
- 2008-09-08 JP JP2008229367A patent/JP2009109006A/en active Pending
- 2008-10-09 TW TW097138992A patent/TWI439622B/en not_active IP Right Cessation
- 2008-10-10 CN CN2008101673041A patent/CN101408249B/en not_active Expired - Fee Related
-
2010
- 2010-09-30 KR KR1020100094984A patent/KR20100122884A/en not_active Application Discontinuation
-
2013
- 2013-08-15 JP JP2013168861A patent/JP5724091B2/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101988586A (en) * | 2009-08-04 | 2011-03-23 | 东京毅力科创株式会社 | Gate valve and substrate processing system using same |
| CN101988586B (en) * | 2009-08-04 | 2013-01-02 | 东京毅力科创株式会社 | Gate valve and substrate processing system using same |
| CN102147019A (en) * | 2010-01-29 | 2011-08-10 | 东京毅力科创株式会社 | Gate valve and substrate processing apparatus using the same |
| CN102147019B (en) * | 2010-01-29 | 2013-11-06 | 东京毅力科创株式会社 | Gate valve and substrate processing apparatus using the same |
| CN102168763A (en) * | 2011-05-18 | 2011-08-31 | 朱国辉 | Convex top type single gate valve |
| CN102168763B (en) * | 2011-05-18 | 2012-11-14 | 汨罗市金成管道阀门工程有限公司 | Convex top type single gate valve |
| CN103307290A (en) * | 2011-12-16 | 2013-09-18 | 株式会社新动力等离子体 | Two way gate valve and substrate processing system having the same |
| CN107611063A (en) * | 2012-08-09 | 2018-01-19 | 斯克林集团公司 | Substrate board treatment |
| CN107611063B (en) * | 2012-08-09 | 2021-09-14 | 斯克林集团公司 | Substrate processing apparatus |
| CN104514891A (en) * | 2013-09-30 | 2015-04-15 | 东京毅力科创株式会社 | Gate valve and substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI439622B (en) | 2014-06-01 |
| TW200928160A (en) | 2009-07-01 |
| KR20100122884A (en) | 2010-11-23 |
| JP2014016035A (en) | 2014-01-30 |
| CN101408249B (en) | 2011-01-05 |
| JP5724091B2 (en) | 2015-05-27 |
| JP2009109006A (en) | 2009-05-21 |
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