CN101387559A - Photo plasma temperature spatial distribution detecting device and detecting method - Google Patents
Photo plasma temperature spatial distribution detecting device and detecting method Download PDFInfo
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- CN101387559A CN101387559A CNA2008101434727A CN200810143472A CN101387559A CN 101387559 A CN101387559 A CN 101387559A CN A2008101434727 A CNA2008101434727 A CN A2008101434727A CN 200810143472 A CN200810143472 A CN 200810143472A CN 101387559 A CN101387559 A CN 101387559A
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Abstract
The invention relates to a detection facility for the temperature spatial distribution of laser induced plasmas and a method thereof. The method comprises: using multi-beam optical fibers as the detection and transmission medium, using a two-dimension moving stage to realize accurate location, using a row of multi-beam optical fibers to collect and output the spectrum of one section of the laser induced plasmas and using a spectrometer to record collected signals; treating the recorded spectrum signals via an inverse transformation algorism to fit a light intensity curve, using a relative light intensity method to obtain the temperatures of a plurality of points of the section and obtain the two-dimension temperature distribution of the section. Optionally, the invention can utilize multiple rows of the multi-beam optical fibers to synchronously detect a plurality of sections of the plasmas to obtain three-dimension temperature distribution. The detection facility for the temperature spatial distribution of laser induced plasmas and the method thereof can detect high temperature and obtain high accuracy, which can be applied for laser processing online detection, quality control and mechanism research, and can be generalized for all spectroscopic light source researches.
Description
Technical field:
The present invention relates to the spectral measurement method of mechanical engineering field, specifically is a kind of sniffer and detection method of photo plasma temperature space distribution.
Background technology:
The method of studying the chemical constitution of the structure of matter and mensuration material according to the characteristic spectrum of atom is called Atomic Emission Spectral Analysis.And plasma is the atomic emission spectrum light source that is most widely used at present.At present, utilize the plasma emission spectrometry method to survey the important means that plasma emission spectroscopy has become the inorganic samples constituent analysis, be widely used in analysis fields such as chemical, geology mineral, metal material, environment measuring and biological sample.
Wherein photo plasma is the plasma that laser action is produced in the metal works surface.Laser Processing tends to produce photo plasma, and the photo plasma that is produced plays crucial effects to the transmission and the crudy of laser energy.Specific in the Laser Deep Penetration Welding process because photo plasma is dispersed throughout inside and outside the penetration fustion welding aperture and is accompanied by whole penetration fustion welding process, the state of photo plasma and Temperature Distribution will directly reflect the change procedure and the penetration fustion welding quality of Laser Deep Penetration Welding.Therefore, being widely regarded as the breach of online this global problem of detection of Laser Deep Penetration Welding for the detection of photo plasma, also is the focus of Laser Deep Penetration Welding mechanism research.Because photo plasma temperature is too high, generally reaches several thousand degree up to ten thousand, thermograde is very big, and often middle flash is along low, and is small-sized, and temperature is difficult to measure.
The main spectrographic method that adopts is surveyed in distribution for photo plasma temperature.At present, mainly be that scioptics focus on daylighting and analyze in conjunction with spectrometer, this method is because accurate location survey target, and serious interference causes measuring accuracy poor.
In addition, following method has also appearred at present both at home and abroad:
Publication number is the measuring method of passing through optical fiber measurement single-point temperature that provides in CN201096521's " contactless plasma temperature and electron density measurement device " patent.
One of China's gongwu Research Institute in optical fiber as accept, six passage optical temperatures of transmission luminous energy, be used to study impact and load the radiance of material down.
Reported that abroad employing optical multichannel analyzer (OMA) measures the method for plasma temperature.It mainly obtains a monochromic beam by grating beam splitting, can only obtain a spectral line under the wavelength at every turn.
Above-mentioned measuring method can only the article on plasma body realizes the temperature measuring of single-point, can't obtain the space distribution information of plasmoid parameter, also can't obtain the three-dimensional Temperature Distribution situation of the whole gas ions of plasma different cross section two peacekeepings, seriously hinder the research of article on plasma body inner case.
Summary of the invention:
Defective at above-mentioned prior art existence, the object of the invention is intended to find a kind of method of surveying the photo plasma temperature space distribution, can be to the spectroscopically detectable of photo plasma different cross section, and then obtain the photo plasma space two-dimensional and three-dimensional temperature space distributes.
To achieve the above object of the invention, the technical scheme that the present invention takes is: a kind of sniffer of photo plasma temperature space distribution, comprise the fiber clamp of multi beam simple optical fiber, fixed fiber, two-dimension displacement platform, spectrometer and the computing machine of connection fiber clamp, wherein multi beam simple optical fiber two ends constitute detecting head and output terminal respectively, fiber section constitutes Transmission Part between the two, and described output terminal inserts the spectrometer that is connected with computing machine.
As further preferred version, described spectrometer is the multichannel light spectral measurement system.Described two-dimension displacement platform is selected automatically controlled precise 2-D displacement platform for use.
Simultaneously, above-mentioned multi beam simple optical fiber can be the single simple optical fiber of multi beam or multi beam is arranged simple optical fiber more.
The present invention also proposes a kind of detection method of photo plasma temperature space distribution, comprise the steps: with the multi beam simple optical fiber as the daylighting part, the multi beam simple optical fiber is located in the photo plasma dead ahead, survey photo plasma different cross section spectral signal, simultaneously, the multi beam simple optical fiber transfers signals to spectrometer as the Transmission Part of spectrum, and preserves; With the inverse transformation data processing method, simulate light intensity curve, calculate the temperature of some points on a certain cross section by the relative light intensity method, draw the two dimension and the whole gas ions three-dimensional temperature field space distribution of photo plasma different cross section.
As preferred version, above-mentioned inverse transformation data processing method is the Abel's inverse transformation numerical method based on fast fourier transform and the conversion of Hunk ear.
Principle of work of the present invention is: at first make the multi beam simple optical fiber, and according to the diameter of photic isoionic cloud cluster size of Laser Processing and bare fibre, definite with how many root optical fiber and become a row or multi-row single detection optical fiber that is rolled into.Wherein the size of optical fiber after side by side is greater than the size of a certain cross section of the cloud cluster that equals gas ions or whole isoionic cloud cluster, so that can detect a certain cross section of plasma or the whole spectrum of isoionic cloud cluster in a certain direction when these optical fiber face the cloud cluster of plasma, detection and output port grind, and form multi beam single row or multiple rows simple optical fiber.Come down to multifiber is tied up at one, two is fixed in a circle or the square probe by a row or multi-row concentrated arrangement, and two-port grinds, so that receive or output spectrum.
Port is over against gas ions when surveying for detecting head, and output terminal is used for over against spectrograph slit, and the multi beam simple optical fiber is used for transmitting light.When the isoionic cloud cluster of Laser Processing is surveyed, adopt the fiber clamp of two-dimension displacement platform control optical fiber to move, make detecting head over against isoionic cloud cluster, accurately locate, near isoionic cloud cluster, the single optical fiber of multi beam captures a certain cross section of isoionic cloud cluster spectral intensity signal as far as possible, and multi beam is arranged optical fiber more and captured each cross section spectral intensity signal of isoionic cloud cluster, output to multi-channel spectrometer based, be input to computing machine again and obtain the multichannel light spectrogram.The spectrum that each passage is obtained is handled respectively on computers.Adopt the Abel inverse transformation to obtain the light intensity of spatial point to the light intensity of wherein two spectral lines, the Two dimensional Distribution of emission ratio just, utilizing the relative light intensity method that the Two dimensional Distribution of emission ratio is converted again becomes two-dimensional distribution of temperatures.Multi beam is arranged optical fiber more capture each cross section spectral intensity signal of isoionic cloud cluster, carry out inverse transformation and can obtain three-dimensional parameter distribution situation, thereby grasp the internal state of photo plasma comprehensively.During application, its concrete steps are as follows:
1) selects suitable spectral line, obtain the corresponding calculated parameter;
2) with multi beam single row or multiple rows simple optical fiber horizontal fixed on fiber clamp, fiber clamp is fixed on the two-dimension displacement platform, by computer control multi beam single row or multiple rows simple optical fiber measuring head over against and near the photo plasma cloud cluster, realize accurately location;
3) spectral line of finishing spectrometer is demarcated, and the fibre bundle output terminal is fixed in the spectrograph slit place, and the measurement parameter of spectrometer is set;
4) start spectral analysis software, the beginning acquired signal;
5) preserve the multichannel light spectrum signal, obtain line strength of needs by processing, by the multi-channel spectral strength signal is carried out match, obtain the intensity curve of target spectral line on the measuring height, the emission ratio that goes out plane on the measuring height by the inverse transformation algorithm computation distributes, calculate on the corresponding flat every temperature by the temperature computation formula under the local thermodynamic equilibrium state, thereby restore temperature profile or whole plasma cloud cluster spatial distribution map on the measuring height cross section.
The sniffer of photo plasma temperature space distribution provided by the invention and method thereof have been utilized the superior optical characteristics of optical fiber, have minimum numerical aperture, very little survey area, can differentiate and detect the spectral signal of photo plasma different cross section, accurately locate by the two-dimension displacement platform, improved measuring accuracy; The single multichannel optical fiber structure of multi beam of invention, can gather and export the spectral signal in a certain cross section in small size photo plasma cloud cluster very or the Laser Deep Penetration Welding aperture simultaneously, obtain the space distribution information of photic gas ions temperature, extend to the research of all spectroscopic light sources, and can be applied to online detection, field of quality control and mechanism research.
The present invention will be described in detail below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is the sniffer synoptic diagram of described photo plasma temperature space distribution;
Fig. 2 is multi beam simple optical fiber profile synoptic diagram among the present invention;
Fig. 3 is the single simple optical fiber end face structure of multi beam synoptic diagram among the present invention;
Fig. 4 arranges simple optical fiber end face structure synoptic diagram for multi beam among the present invention more;
Fig. 5 is a plasma two-dimension temperature distribution plan outside the resulting width of cloth laser bonding hole of embodiment.
In above-mentioned accompanying drawing:
1-workpiece, 2-fiber clamp, 3-spectrometer,
4-multi beam simple optical fiber, 5-plasma, 6-automatically controlled two-dimension displacement platform,
7-condenser lens, 8-laser beam, 9-displacement platform controller,
10-computing machine, 11-detecting head, 12-Transmission Fibers,
13-output terminal, 14-fibre cladding, 15-single fiber core,
16-fibre cladding, 17-fiber core arranged more.
Embodiment
Embodiment 1
Produce the space distribution detection method of plasma temperature outside the most typical Laser Deep Penetration Welding hole of photo plasma in the laser processing.
Referring to Fig. 1, be the sniffer of plasma outside the present embodiment Laser Measurement penetration fustion welding hole-section temperature distribution.The power of laser beam 8 is 1～1.5KW; penetration fustion welding speed is 0.75～1.125m/min; defocusing amount is-1～+ 1mm; blanket gas is an Ar gas; flow is 1～2.5m3/h; the focal length of condenser lens 7 is 5, and " (127mm), the focal beam spot diameter is 0.4mm, and the material of penetration fustion welding workpiece 1 is a stainless steel.Spectrometer 3 adopts the Spectro-2356 of U.S. PI company to cooperate PIXIS400F area array CCD, 10 μ m gratings, resolution 0.1nm.Automatically controlled two-dimension displacement platform 6 repetitive positioning accuracies are less than 3 μ m.
Referring to Fig. 2, multi beam simple optical fiber 4 is that 8 silica fibres one row concentrates in the detecting head as detecting head 11 in the present embodiment, and output terminal 13 is similarly 8 silica fibres, one row and concentrates in the probe, and fiber section between the two is as Transmission Fibers 12.
Wherein the concrete employing of present embodiment is the single simple optical fiber of multi beam, referring to Fig. 3, comprising fibre cladding 14 and the single fiber core that is wrapped in its inside.Simultaneously, this fibre bundle also can adopt multi beam to arrange simple optical fiber more, is made up of many rows fiber core of fibre cladding 16 and its inside, referring to Fig. 4.
At first, use standard mercury lamp carries out Wavelength calibration to spectrometer 3, and be set at the scope of target wavelength, finish being connected of multi beam simple optical fiber 4 and spectrometer 3, spectrometer 3 is connected with computing machine 10, computing machine 10 is connected with displacement platform controller 9, the single simple optical fiber of multi beam is fixed on the fiber clamp 2, and fiber clamp 2 is fixed on the automatically controlled two-dimension displacement platform 6, displacement platform controller 9 moves to measuring height by control fiber clamp 2 with fiber detector 11, slowly approaching and level plasma 5 outside the hole; Open laser instrument, open spectrometer 3 acquired signal and export computing machine 10 to, plasma 5 a certain cross section spectral signal collections outside the hole when finishing Laser Deep Penetration Welding workpiece 1.
Adopt Abel's inverse transformation numerical method then based on fast fourier transform and the conversion of Hunk ear, carry out the data processing of plasma two-dimension temperature field distribution, and carried out the computational accuracy analysis, by deriving voluntarily and realizing by the MATLAB software programming, and carried out the Algorithm Error simulation, display error is little as a result, does not influence the accuracy of result of calculation.Adopt spectral analysis software that the multichannel light spectrum signal is handled, filter out two kinds of spectral signals that need, that present embodiment is selected for use is 402.45nm and the 394.52nm of iron spectral line Fe II, and correlation parameter is referring to table 1.Respectively two kinds of spectral signals are carried out match and obtain horizontal direction polishing wax strength distribution curve, utilize computing machine respectively two class curves to be carried out the plane distribution that inverse transformation calculates emission ratio, adopt the relative light intensity method on the plane every carry out temperature computation, computer graphics obtains the two-dimension temperature distribution plan in a certain cross section, as shown in Figure 5.
Table 1
Claims (5)
1, a kind of sniffer of photo plasma temperature space distribution, it is characterized in that, comprise the fiber clamp of multi beam simple optical fiber, fixed fiber, two-dimension displacement platform, spectrometer and the computing machine of connection fiber clamp, wherein multi beam simple optical fiber two ends constitute detecting head and output terminal respectively, fiber section constitutes Transmission Part between the two, and described output terminal inserts the spectrometer that is connected with computing machine.
According to the sniffer of the described photo plasma temperature space distribution of claim 1, it is characterized in that 2, described multi beam simple optical fiber is that single simple optical fiber of multi beam or multi beam are arranged simple optical fiber more.
According to the sniffer of claim 1,2 described photo plasma temperature space distributions, it is characterized in that 3, described spectrometer is the multichannel light spectral measurement system.
4, a kind of detection method of photo plasma temperature space distribution, it is characterized in that, comprise the steps: with the multi beam simple optical fiber as the daylighting part, the multi beam simple optical fiber is located in the photo plasma dead ahead, survey photo plasma different cross section spectral signal, simultaneously, the multi beam simple optical fiber is as the Transmission Part of spectrum, transfer signals to spectrometer, and preserve; With the inverse transformation data processing method, simulate light intensity curve, calculate the temperature of some points on the different cross section by the relative light intensity method, draw the two dimension and the whole photic plasma three-dimensional temperature field space distribution of photo plasma different cross section.
According to the detection method of the described photo plasma temperature space distribution of claim 4, it is characterized in that 5, described inverse transformation data processing method is the Abel's inverse transformation numerical method based on fast fourier transform and the conversion of Hunk ear.
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- 2008-10-31 CN CN2008101434727A patent/CN101387559B/en not_active Expired - Fee Related
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