CN101380785A - Workholder for multi-line cutting machine - Google Patents
Workholder for multi-line cutting machine Download PDFInfo
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- CN101380785A CN101380785A CNA2008101215819A CN200810121581A CN101380785A CN 101380785 A CN101380785 A CN 101380785A CN A2008101215819 A CNA2008101215819 A CN A2008101215819A CN 200810121581 A CN200810121581 A CN 200810121581A CN 101380785 A CN101380785 A CN 101380785A
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- workpiece
- secondary connection
- connection block
- bolt
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Abstract
A workholding fixture used by a multi-wire cutting machine consists of a primary connection socket and a secondary connection socket, a primary connection sheet and a secondary connection sheet. The primary connection socket and the primary connection sheet are fixed by bolts in a plane connection and the secondary connection socket and the secondary connection sheet are fixed by positioning bolts in a plane connection. The present invention is characterized in that the shape of a positioning bolt hole of the secondary connection socket for holding the positioning bolt is different such as the long groove shape and the oval shape. Compared with the prior art, the present invention changes the shape of the bolt hole of the secondary connection socket for holding the positioning bolt; therefore, when the position of the secondary workpiece is inconsistent with the position of the primary workpiece after the primary workpiece is fixed and positioned, only the positioning bolt is unscrewed and the oval hole is used for adjusting the front and rear positions of the secondary connection sheet slightly, thereby carrying out fixing. The workholding fixture overcomes the defects that the shape of the bolt hole of the secondary connection socket for holding the positioning bolt in the prior art is round and the workpiece can not be adjusted forwards or backwards.
Description
[technical field]
The invention belongs to multi-thread cutting silicon single crystal ingot field, especially belong to a kind of and use, be used for fixing silicon single crystal ingot, utilize multi-line cutting machine silicon single crystal ingot to be cut into the work piece holder of silicon single crystal flake then with the multi-line cutting machine coupling.
[background technology]
Multi-thread cutting technique is present more advanced in the world silicon chip process technology, and its principle is the steel wire by a high-speed motion, drives and attached to the cutting blade material on the steel wire hard brittle materials such as semiconductor is rubbed, thereby reach cutting effect.In whole process, steel wire is by the guiding of tens guide rollers, on the main line roller, form a bracing cable net, and workpiece to be processed is realized the feeding of workpiece by the rise and fall of work stage, hard brittle materials such as semiconductor once can be cut into hundreds of simultaneously, multi-thread cutting technique is compared with other technologies, has the efficient height, the production capacity height, advantages such as precision height and material-saving, replaced gradually already traditional knife saw sheet, grinding wheel and in the circle cutting, be to adopt the most widely hard brittle material cutting technique such as semiconductor at present.
Carry out cutting operation, one connect with work stage, requisite annex is exactly the fixing work piece holder of workpiece to be processed.The structure of this work piece holder comprises main Connection Block and secondary Connection Block, and posts main brace and the secondary brace that is fixed on main Connection Block and the secondary Connection Block respectively.Before the operation, be silicon single crystal ingot with two workpieces to be processed earlier, be separately fixed on main Connection Block and the secondary Connection Block together with main brace and secondary brace, then, the anchor clamps that will carry workpiece again are docked on the work stage of multi-line cutting machine, finish rise and fall, realize the workpiece feeding by work stage, utilize gauze cutting.
Existing work piece holder is when fixation workpiece, there are the following problems: after leading workpiece is fixing, from leading workpiece must strict position with reference to leading workpiece be benchmark on request, fixing from leading workpiece, but, this work piece holder will be adjusted from the position of leading workpiece and bother very much, also be difficult to guarantee from leading the uniformity of workpiece and leading workpiece to such an extent as to waste time and energy, thereby the silicon chip thickness that causes multi-line cutting machine to cut out is inconsistent, qualification rate is low, sometimes wire jumper, broken string phenomenon also can appear in gauze, influence the multi-line cutting machine normal operation.
[summary of the invention]
For overcoming the above-mentioned defective that prior art exists, the present invention aims to provide the novel workholder for multi-line cutting machine of a kind of structure, this work piece holder is behind leading workpiece location, by simple adjustment, just can make from leading workpiece and locate, guarantee leading workpiece and from leading the uniformity of the location of workpiece, thereby it is inconsistent to eliminate the silicon chip thickness according to leading workpiece benchmark, qualification rate is low, and the gauze wire jumper, the broken string phenomenon.
For achieving the above object, the present invention has adopted following technical scheme:
This workholder for multi-line cutting machine, comprise main Connection Block and secondary Connection Block, main brace and secondary brace, main Connection Block is the plane with main brace through bolting and is connected, secondary Connection Block fixedly is the plane with secondary brace through bolt and is connected, and it is characterized in that: secondary Connection Block is used to admit the bolt hole shape of bolt to be abnormity.
Aforesaid workholder for multi-line cutting machine is characterized in that: secondary Connection Block fixedly is the plane with secondary brace through bolt and is connected, and is used to admit the positioning bolt hole of bolt to be shaped as front and back to long trough on the secondary Connection Block.
Aforesaid workholder for multi-line cutting machine is characterized in that: secondary Connection Block fixedly is the plane with secondary brace through bolt and is connected, and is used to admit the positioning bolt hole of bolt to be shaped as front and back to ellipse on the secondary Connection Block.
Beneficial effect: compared with prior art, the present invention is by changing the countersink type that secondary Connection Block is used to admit bolt, after leading workpiece stationary positioned, if occur and dominate the location of workpiece when inconsistent from leading workpiece, as long as unscrew bolt, after utilizing slotted eye to finely tune the front and back position of secondary brace, fixed and got final product, overcome and be used to admit the countersink type of bolt on the secondary Connection Block of prior art for circular, (about during actual job being to) was to the defective of adjusting before and after workpiece can not be done, because, when circular bolt holes adjusts, leading workpiece with can only do whole the adjustment from leading workpiece, and the relative position that can not change both reaches the fine setting effect.
[description of drawings]
Fig. 1 is the perspective view of one embodiment of the invention.
Among the figure: guide rail 1, loading and unloading groove 2, fastening screw 3, cutting cushion block 4, cutting cushion block 41, bolt 5, positioning bolt hole 6, secondary Connection Block 7, secondary brace 71, lead 8, mortar pipe 9, workpiece 10, workpiece 101, main Connection Block 11, main brace 12.
[specific embodiment]
Referring to Fig. 1.Guide rail 1 is fixed on the work stage of multi-line cutting machine through fastening screw 3 by fastening bolt by loading and unloading groove 2.Anchor clamps are symmetry with the mortar pipe 9 of guide rail 1 below, and both sides are provided with main Connection Block 11, secondary Connection Block 7 respectively.Main brace 12 and secondary brace 71 respectively by corresponding bolt 5 through positioning bolt hole 6, posting to be fixed on main Connection Block 11, the secondary Connection Block 7 (has corresponding circular bolt holes on main brace 12 and the secondary brace 71).
The workpiece 10 on right side claims leading workpiece, and workpiece 101 is from leading workpiece.Main brace 12, cutting cushion block 41 and workpiece 10 are by the bonding single piece that forms of viscose glue, and secondary brace 71, cutting cushion block 4 and workpiece 101 also are by the bonding single piece that forms of viscose glue.Innovation part of the present invention is: admit the shape of the positioning bolt hole 6 of bolt 5 to be abnormity, and for non-circular, for example strip, ellipse, the quantity of positioning bolt hole 6 can be decided according to actual conditions, is generally 6.During operation, behind leading workpiece location, unscrew bolt as long as adjust from leading the location of workpiece, the promptly fine-tuning unitarily formed front and back position that is connected on the secondary Connection Block 7 improves simple, convenient and practical.
Claims (3)
1, a kind of workholder for multi-line cutting machine, comprise main Connection Block (11) and secondary Connection Block (7), main brace (12) and secondary brace (71), main Connection Block (11) is the plane with main brace (12) through bolting and is connected, secondary Connection Block (7) fixedly is the plane with secondary brace (71) through bolt (5) and is connected, and it is characterized in that: secondary Connection Block (7) is used to admit positioning bolt hole (6) shape of bolt (5) to be abnormity.
2, workholder for multi-line cutting machine as claimed in claim 1, it is characterized in that: secondary Connection Block (7) fixedly is the plane with secondary brace (71) through bolt (5) and is connected, and is used to admit the positioning bolt hole (6) of bolt (5) to be shaped as front and back to long trough on the secondary Connection Block (7).
3, workholder for multi-line cutting machine as claimed in claim 1, it is characterized in that: secondary Connection Block (7) fixedly is the plane with secondary brace (71) through bolt (5) and is connected, and is used to admit the positioning bolt hole (6) of bolt (5) to be shaped as front and back to ellipse on the secondary Connection Block (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101215819A CN101380785A (en) | 2008-10-14 | 2008-10-14 | Workholder for multi-line cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101215819A CN101380785A (en) | 2008-10-14 | 2008-10-14 | Workholder for multi-line cutting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101380785A true CN101380785A (en) | 2009-03-11 |
Family
ID=40460926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101215819A Pending CN101380785A (en) | 2008-10-14 | 2008-10-14 | Workholder for multi-line cutting machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101380785A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101550604B (en) * | 2009-04-01 | 2011-02-16 | 汪昌伟 | Rod sticky device of silicon single crystal rod |
| CN101648301B (en) * | 2009-04-21 | 2011-04-20 | 新乡市华盛天龙数控设备有限公司 | Clamping mechanism of multi-wire sawing machine |
| CN104603916A (en) * | 2012-09-03 | 2015-05-06 | 日立金属株式会社 | Method for cutting high-hardness material by multi-wire saw |
-
2008
- 2008-10-14 CN CNA2008101215819A patent/CN101380785A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101550604B (en) * | 2009-04-01 | 2011-02-16 | 汪昌伟 | Rod sticky device of silicon single crystal rod |
| CN101648301B (en) * | 2009-04-21 | 2011-04-20 | 新乡市华盛天龙数控设备有限公司 | Clamping mechanism of multi-wire sawing machine |
| CN104603916A (en) * | 2012-09-03 | 2015-05-06 | 日立金属株式会社 | Method for cutting high-hardness material by multi-wire saw |
| CN104603916B (en) * | 2012-09-03 | 2018-04-17 | 日立金属株式会社 | The cutting-off method cut off using multi-line cutting machine to high hardness material |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090311 |