CN101363753A - Spectroscopy device, spectroscopy apparatus and spectroscopy method - Google Patents
Spectroscopy device, spectroscopy apparatus and spectroscopy method Download PDFInfo
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- CN101363753A CN101363753A CNA2008101453272A CN200810145327A CN101363753A CN 101363753 A CN101363753 A CN 101363753A CN A2008101453272 A CNA2008101453272 A CN A2008101453272A CN 200810145327 A CN200810145327 A CN 200810145327A CN 101363753 A CN101363753 A CN 101363753A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2846—Investigating the spectrum using modulation grid; Grid spectrometers
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
- H04N1/02805—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a two-dimensional array
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/2859—Peak detecting in spectrum
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Abstract
The present invention provides a spectroscopy device that separates input light into a plurality of wavelength ranges. A metal body has a hole or aperture which is open on the upper side. The hole or aperture is formed in a polygonal shape having at least a pair of opposite faces not parallel to each other in horizontal cross-section. Inner side faces of the hole or aperture are finished as mirror like reflection surfaces. Polarized input light inputted from the opening to the hole or aperture is reflected by the reflection surfaces and a standing wave is generated inside of the hole or aperture by self interference, whereby the input light is separated into a plurality of wavelength ranges.
Description
Technical field
The present invention relates to be used for the light of input is carried out the beam splitter of beam split, the light-dividing device and the light-splitting method of the above-mentioned beam splitter of use.
Background technology
As beam splitter, light-dividing device and light-splitting method, various formations are generally used prism that the light of incident is carried out beam split by known to the people, and form record behind the electric signal with imaging apparatus.In the spectrophotometer in the past that constitutes like this,, thereby be difficult to detect simultaneously a plurality of wavelength because the wavelength change of beam split is corresponding with the machinery variation of the driving mechanism that uses prism.In order to address this problem, make invention as follows.
In patent documentation 1, a kind of light-dividing device is disclosed, it has the 1st imaging len, slit plate, the 1st collimation lens, beam splitter, the 2nd collimation lens, microprism array, the 2nd imaging len and the two-dimensional array sensor that is configured in order on the light path.The light beam that has provision wavelengths in the light beam by beam splitter beam split gained is by the microprism array bending, along the direction outgoing of regulation.Thus, the beam split portrait with provision wavelengths is imaged on the regulation sensor of two-dimensional array sensor, realizes obtaining simultaneously the light-dividing device of a plurality of beam split thus.
In patent documentation 2, a kind of light-dividing device is disclosed, it has prism, lens and imaging apparatus, wherein, the optical axis that described prism is formed with relative visual field baffle and optical system has a plurality of refractive optical surfaces of normal in different directions, is arranged near the pupil face of lens in the mode of the pupil face by this each refractive optical surface sectioned lens.Thus, a plurality of same portrait that generates on imaging apparatus is drawn a portrait and is formed as a plurality of same beam split of different mutually wavelength components, and realization can obtain the light-dividing device with the corresponding beam split portrait of a plurality of wavelength simultaneously.
Patent documentation 1: Japanese kokai publication hei 8-193884 communique
Patent documentation 2: Japanese kokai publication hei 8-233658 communique
In such light-dividing device, take the imaging apparatus of spectroscopy scheme picture relatively, the optical system that need constitute by lens and prism respectively, thus become big on the component configuration and the space that needs in the optical design, so the size of light-dividing device becomes very big.In addition since the parts of prism, lens and imaging apparatus etc. via the basket aligned position, therefore except adjustment needed the time, position alignment precision was also limited.
Summary of the invention
The object of the present invention is to provide a kind of new beam splitter, it can eliminate the problems referred to above point in the past beam splitter, light-dividing device and the light-splitting method.
Beam splitter of the present invention, it is characterized in that, constitute by sheet metal with hole portion or hole portion, described hole portion or hole portion be opening up, and for having mutually uneven at least one pair of the polygon of opposite face in horizontal section, the medial surface of above-mentioned hole portion or hole portion becomes specular reflecting surface, by reflecting the interference that is caused to the incident light of the polarization of above-mentioned hole portion or the incident of hole portion at above-mentioned reflecting surface from above-mentioned opening, produce standing wave in the inside of above-mentioned hole portion or hole portion, with above-mentioned incident light in a plurality of wavelength band beam split.
Herein, so-called " hole portion " is the hole with bottom, and so-called " hole portion " is meant through hole.
In addition, the size of this hole portion or hole portion is, produces the size of standing wave in inside in internal reflection by making incident light wherein, and the promptly not obvious size bigger than light wavelength for example is the size of several times degree.
In addition, so-called sheet metal generally is meant the thin plate with parallel upper surface (front) and lower surface (reverse side), but might not be parallel exactly at this pro and con, and thickness also is not limited to slight greatly than horizontal direction.
In addition, so-called is to instigate the light of different wave length band to gather or be stabilized in hole portion or the diverse location of hole portion inside incident light in a plurality of wavelength band beam split, if and had the sensor of light accepting part respectively in the configuration of these positions, the light of different wave length band then could be detected by each light accepting part.As an example, can make the branch light component of different wavelength bands be collected at positions different on the horizontal direction in the bottom of this hole portion or hole portion.
The shape of the horizontal section of above-mentioned hole portion or above-mentioned hole portion need be to have uneven mutually at least one pair of the polygon of opposite face, this is to be used to generate above-mentioned standing wave so that the light of different wave length band is collected at the condition of diverse location, particularly, for example can form the trapezoidal of isosceles trapezoid etc.Think owing to formed the mutual uneven opposite face of two trapezoidal waists, thereby be that the polarisation of above-mentioned opening incident reflects between this opposite face repeatedly from the top of hole portion or hole portion, can make the light of different wave length band be collected near the bottom of hole portion or hole portion diverse location.
In addition, more specifically, beam splitter of the present invention, it is characterized in that, has the upper surface that connects thickness even metal plate and lower surface hole portion to upper surface and lower surface, in the portion of above-mentioned hole, the figure that extended line surrounded on 3 limits the limit of the xsect that formation is seen from the upper surface direction or the lower surface direction of above-mentioned sheet metal, forming drift angle is the isosceles triangle of narrow angle, and, at least the medial surface that constitutes in the limit of above-mentioned xsect the above-mentioned hole portion of joining with isosceles triangle equilateral becomes specular reflecting surface, from the upper surface of above-mentioned sheet metal incident light to the polarization of above-mentioned hole portion incident, reflect the interference that is caused by incident light at the reflecting surface of above-mentioned hole portion, and in a plurality of wavelength band beam split.
In addition, beam splitter of the present invention can be provided with polarization element on the top of above-mentioned beam splitter, the polarization direction that makes above-mentioned polarization element for the parallel direction of vertical halving line on the base of above-mentioned isosceles triangle, perhaps be perpendicular direction.
And then beam splitter of the present invention is characterized in that, uses above-mentioned any one beam splitter, and the upper surface and the lower surface of the above-mentioned relatively sheet metal of above-mentioned hole portion vertically connect.
And then, beam splitter of the present invention is characterized in that, uses above-mentioned any one beam splitter, at the lower surface configuration photo detector of the above-mentioned beam splitter of the local location that distributes as the beam split after the above-mentioned incident light beam split, thereby be electric signal with above-mentioned beam split distribution transformation.
In addition, light-dividing device of the present invention can have a plurality of above-mentioned photo detectors, and a plurality of local locations that distribute according to above-mentioned beam split dispose above-mentioned photo detector.
In addition, light-dividing device of the present invention also can be a plurality of with being arranged by the light-dividing device that constitutes of above-mentioned beam splitter and single or multiple photo detector, as the bidimensional spectroscopy device.
Light-splitting method of the present invention, it is characterized in that, preparation has the sheet metal of hole portion or hole portion, described hole portion or hole portion have mutually uneven at least one pair of the polygon of opposite face in horizontal section, opening and its medial surface become specular reflecting surface up, the incident light that makes polarization from above-mentioned opening is to above-mentioned hole portion or the incident of hole portion, by on above-mentioned reflecting surface, reflecting the interference that is caused, produce standing wave in the inside of hole portion or hole portion and with incident light in a plurality of wavelength band beam split.
Beam splitter of the present invention is made of the sheet metal with hole portion or hole portion, described hole portion or hole portion have mutually uneven at least one pair of the polygon of opposite face in horizontal section, and at upper opening, the medial surface of hole portion or hole portion becomes specular reflecting surface, by reflecting the interference that is caused at reflecting surface from this opening incident polarized light, produce standing wave in inside, thereby can be with incident light in a plurality of wavelength band beam split, therefore can obtain and in the past the same spectrophotometric result of beam splitter with extremely simple structure.
And then, because this beam splitter and photo detector can be with the semiconductor technology manufacturings, thereby can realize small-sized and high-precision light-dividing device.
In addition, for the imaging apparatus of taking the spectroscopy scheme picture because the optical system that need enough become by lens and prism not, thus can make on the component configuration and optical design on the space that needs reduce, therefore can make light-dividing device become very little.In addition owing to do not use prism, lens and imaging apparatus, thus do not need to make they via basket aligned position, do not need to be used for the time that these parts are adjusted, can also improve the precision of position alignment.
Description of drawings
Fig. 1 represents the configuration example of beam splitter of the present invention.
Fig. 2 is the synoptic diagram of beam splitter of the present invention.
Fig. 3 is the shape definition figure of hole portion of beam splitter of the present invention.
Fig. 4 represents to use the beam split result of each wavelength of the Y direction polarized incident light of beam splitter of the present invention.
Fig. 5 represents to use the spectrophotometric spectra intensity of the Y direction polarized incident light of beam splitter of the present invention.
Fig. 6 represents to use the peak wavelength interdependence of spectrophotometric spectra intensity of the Y direction polarized incident light of beam splitter of the present invention.
Fig. 7 represents to use the beam split result of each wavelength of the directions X polarized incident light of beam splitter of the present invention.
Fig. 8 represents to use the spectrophotometric spectra intensity (later on editor) of the directions X polarized incident light of beam splitter of the present invention.
Fig. 9 represents the variation of the hole portion shape of beam splitter of the present invention.
Figure 10 represent to use hole portion shape variation beam splitter and carry out the beam split result of the incident light of Y direction polarization.
Figure 11 represents the 2nd embodiment of beam splitter of the present invention.
Figure 12 represents the beam split result that uses the 2nd embodiment and carry out the incident light of Y direction polarization.
Figure 13 represents to use beam splitter of the present invention to constitute the example of light-dividing device.
Figure 14 represents the formation with the imaging apparatus of light-dividing device combination.
Figure 15 represents to arrange a plurality of and bidimensional spectroscopy device that constitute along two-dimensional directional light-dividing device of the present invention.
Figure 16 represents the 5th embodiment of the present invention.
Figure 17 represents to use the spectrophotometric spectra intensity of the relative Z direction of Y direction polarized incident light of beam splitter of the present invention.
Figure 18 represents the 6th embodiment of the present invention.
Label declaration
10 beam splitters
11 reflectings surface
20 hole portions
The variation 1 of 90 hole portion shapes
The variation 2 of 92 hole portion shapes
1300 light-dividing devices
1301 semiconductor substrates
1420 photo detectors
1500 bidimensional spectroscopy devices
1510 light-dividing devices (as the formation purposes of bidimensional spectroscopy device)
Embodiment
Below, the preferred implementation of beam splitter of the present invention, light-dividing device and light-splitting method is described with reference to the accompanying drawings.
(the 1st embodiment)
Fig. 1 is an example of the formation of beam splitter 10 of the present invention.Fig. 1 (A) is the vertical view of beam splitter, the shape of the beam splitter 10 that expression is seen from the plane of incidence of incident light.Beam splitter 10 is that to have from upper surface on thickness even metal plate be that the plane of incidence connects to lower surface is the tectosome of the vertical hole portion 20 of exit facet.Though what describe seems that a beam splitter independently exists, yet wish to form structure with the total sheet metal of beam splitter of adjacent other on making or on using in Fig. 1.Therefore can think that the profile of Fig. 1 partly is imaginary structure.Fig. 1 (B) is the cut-open view of the A-A ' face of presentation graphs 1 (A).The sheet metal of the tectosome of formation beam splitter 10 is with the inwall reflection incident light of its hole portion 20, and its reflecting surface 11,12 and the plane of incidence 16 and outgoing plane 18 intersect vertically in the present embodiment.Fig. 1 (C) is the cut-open view of the B-B ' face of presentation graphs 1 (A), and is identical with Fig. 1 (B), and the reflecting surface 13,14 and the plane of incidence 16 and outgoing plane 18 intersect vertically.
As shown in the synoptic diagram of the beam splitter of representing among Fig. 2 of the present invention, arrive outgoing plane and interfere from the incident light of the plane of incidence 16 of beam splitter 10 and the not shown reflected light of incident light on reflecting surface, carry out beam split by the standing wave that this interference produced.Standing wave on the outgoing plane 18 becomes spectrophotometric intensity and distributes.
The definition of the hole portion shape of Fig. 3 (A) and Fig. 3 (B) expression beam splitter of the present invention.Shape for the hole portion 20 of the beam splitter of the present invention shown in Fig. 3 (A), from the shape that the plane of incidence or the outgoing plane of the relative beam splitter of incident light are seen, as 3 in the limit that constitutes hole portion 20 while being 22, the figure that surrounds of extended line 23, extended line 27, the extended line 29 of the extended line on limit 26 and limit 28, having formed the drift angle H shown in Fig. 3 (B) is the isosceles triangle 30 of narrow angle.Promptly constitute triangle.The hole portion shape of Fig. 3 (A) is that the top of isosceles triangle 30 and base 28 are cut off the trapezoidal shape that forms abreast.This depends on the wavelength band that will obtain the beam split result, if do not need in beam split result's the wavelength band will obtain the short band territory of wavelength, the top that then can omit isosceles triangle.Opposite if carry out beam split up to the short band territory of wavelength, then become the shape close with isosceles triangle, finally become isosceles triangle.
Beam splitter of the present invention reflects incident light on the reflecting surface of the inwall of beam splitter, and carry out beam split by standing wave based on reflected light and incident light, therefore under the very big situation of the optical energy loss of reflex time on the reflecting surface, the energy loss of reflex time incident light on the tectosome inwall of beam splitter is difficult in outgoing plane and obtains intensity distributions clearly.Therefore, need select the few material of reflex time energy loss for sheet metal.For example, silver, can be used by known to the people as the metal with good reflectivity.In addition, can also use the alloy of gold or copper, gold, copper and copper and tin or aluminium etc. as the mirror material.The technology of perforate critically can be used anisotropy etching as semiconductor fabrication techniques etc. on these materials.In addition, by using ultraprecise processing such as pulse laser or optical-fiber laser also can make.By utilizing semiconductor fabrication, can stably make high-precision beam splitter.
In addition, because the inwall of hole portion is a reflecting surface, thereby hole portion and its peripheral tectosome itself use the semiconductor substrate with the silicon of aftermentioned photo detector same material etc., and only the film or the thin plate of use above-mentioned gold, silver, copper and signal bronze get final product on inwall.Semiconductor substrate still can carry out perforate processing by semiconductor fabrication.The inwall of the hole portion that is formed on the semiconductor substrate to be opened for the film that makes the above-mentioned gold, silver, copper and the signal bronze that constitute reflecting surface can use methods such as spraying plating, evaporation and plating.Adopting under the situation of constructing like this, can realize Construction integration with the photo detector of on identical semiconductor substrate, making.
Fig. 4 represents to use beam splitter of the present invention to carry out the beam split result of the incident light of Y direction polarisation.The coordinate system in Fig. 4 left side is corresponding with the coordinate system of the beam splitter of Fig. 1.In the Y direction that is the longitudinal axis with the directions X of seeing from the upper surface of beam splitter, sees from the upper surface of beam splitter is the coordinate system of transverse axis, has represented how to carry out beam split 6 wavelength from wavelength 440nm to wavelength 690nm.Incident light has used along the light of Y direction polarisation in addition.Represent it is that the light of this wavelength is as the strong peak value that exists of standing wave at the white position that shows from each figure of Fig. 4 (A) to (F).This peak is difference according to each wavelength, works as beam splitter as can be known.
In Fig. 5, will use beam splitter of the present invention shown in Figure 4 to carry out the beam split result of the incident light of Y direction polarisation, on the central shaft of the directions X of beam splitter, make Y-axis get the coordinate of Y direction (distance), X-axis is got spectral intensity and is represented.Because the Y coordinate is standardized at the maximal value place of spectral intensity, thereby is relative value.Known the strong position that exists of the standing wave that in Fig. 4, is difficult to each clear wavelength clearly.For example, in the wavelength of 440nm, there is the peak value of spectral intensity near near near 3 positions the Y coordinate 250nm, the 2000nm, the 4200nm.In addition, if note near the Y coordinate 2500nm near 4500nm, then the wavelength peak of 590nm is present near the Y coordinate 2700nm as can be known, and increases the peak value that has shorter wavelength along with the Y coordinate.
In addition, in two wavelength of wavelength 640nm and wavelength 690nm, can not see wavelength peak clearly.This is very clear and definite at Fig. 4 (E), (F), is because have peak value in the position that the directions X central shaft from beam splitter leaves in these two wavelength.
Fig. 6 represents to use the beam splitter of the present invention shown in Fig. 5 to carry out the peak wavelength interdependence of spectral intensity of beam split of the incident light of Y direction polarization.X-axis is represented the incident light wavelength, and Y-axis is represented the peak of spectral intensity.0 place of the peak of spectral intensity is the position on the base 28 of the beam splitter hole portion of expression among Fig. 3 (A).
The peak value of the spectral intensity of each wavelength can be divided into two and organize greatly.With 0 close the 1st group of Y direction, from wavelength 440nm to 540nm, elongated along with wavelength, the peak of intensity is roughly point-blank near 0.Yet, elongated along with wavelength on the contrary from wavelength 590nm to 690nm, the peak of intensity roughly point-blank from 0 away from.The 2nd group of another one, from wavelength 440nm to 640nm, elongated along with wavelength, the peak of intensity is roughly point-blank near 0.Yet, elongated along with wavelength on the contrary from wavelength 640nm to 690nm, the peak of intensity from 0 away from.
The peak of these intensity is elongated along with wavelength similarly why, and the peak of intensity roughly point-blank near 0, is not because resonate in the hole of limited size portion.Reflecting surface on base 28 parts of the hole portion 20 of Fig. 3 (A) exerts an influence to resonance.When 28 infinities of base, the peak of intensity is along with wavelength is elongated roughly point-blank near 0.
(the 1st variation of the 1st embodiment)
Fig. 7 represents to use beam splitter of the present invention to carry out the beam split result of the incident light of directions X polarization.The coordinate system in Fig. 7 left side is corresponding with the coordinate system of the beam splitter of Fig. 1.Be illustrated in wavelength 440nm (A) how beam split in 6 wavelength of wavelength 690nm (F).The white position that shows represents it is the peak value of the light of this wavelength as the strong existence of standing wave among each figure from (A) to (F) of Fig. 7.Difference works as beam splitter this peak as can be known according to each wavelength.Different with Y direction polarisation result shown in Figure 4, become the peak value of the wire that is parallel to X-axis.
Represent use shown in Figure 4 beam splitter of the present invention is carried out the beam split result of the incident light of directions X polarization to make Y-axis get the coordinate of Y direction (distance) on the directions X central shaft of beam splitter at Fig. 8, X-axis is got spectral intensity and is represented.Because the Y coordinate is standardized at the maximal value place of spectral intensity, thereby is relative value.It is near the Y of wavelength 440nm coordinate 2800nm and Y coordinate 3800nm that the strong position that exists of the standing wave of each wavelength becomes independent and clear and definite.If for example consider wavelength band from wavelength 490nm to 590nm, then think near Y coordinate 3400nm, to have peak value, can use these characteristics to carry out the beam split of beam splitter of the present invention.
(the 2nd variation of the 1st embodiment)
Fig. 9 (A) and Fig. 9 (B) are with the example behind the hole portion warpage of beam splitter of the present invention.Because Fig. 9 (A) and Fig. 9 (B) do not change basically, at this main key diagram 9 (B).For the shape of the hole portion 92 of beam splitter of the present invention, from the shape that the plane of incidence or the outgoing plane of the relative beam splitter of incident light are seen, as 3 in the limit that constitutes hole portion 92 while being 22, the figure that surrounds of extended line 23, extended line 27, the extended line 29 of the extended line on limit 26 and limit 28, forming the drift angle H shown in Fig. 9 (B) is the isosceles triangle 30 of narrow angle.Promptly constitute triangle.The hole portion shape 92 of Fig. 9 (B) is the top of isosceles triangle 30 and base 28 to be cut off abreast and the trapezoidal shape that obtains.Different with the 1st embodiment is to make the angle of hole portion shape 92 become circle.
In Fig. 9 (A), make the angle become circle at Ra=0.1 μ m place, in Fig. 9 (B), make the angle become circle at Rb=0.5 μ m place.The hole portion shape of Fig. 1 is a desired shapes, if can be processed into such shape then can bring into play the highest performance.Yet the shape that the angle is become circle when having considered real machining precision can the qurer manufacturing.
(A)～(h) expression of Figure 10 uses the beam splitter of present embodiment to carry out the beam split result of the incident light of Y direction polarization.Though not shown, the coordinate system of Figure 10 is identical with the coordinate system of the beam splitter of Fig. 9.The incident light of representing each wavelength is from (A) of wavelength 380nm with (E) to (D) of wavelength 680nm and how beam split every 4 wavelength of 100nm (h).In each figure of Figure 10 (A)～(h), the white position that shows represents that the light of this wavelength exists consumingly as standing wave.Though the peak that this standing wave exists consumingly has trickle different part with its distribution, but, all be similarly to work as can be known as beam splitter as Figure 10 (A)～(D) of the beam split result of the hole portion shape that the angle is formed fillet with radius 0.1 μ m with as being roughly the same result with Figure 10 (E)～(h) of the beam split result of the hole portion shape of radius 0.5 μ m formation fillet with the angle.
(the 2nd embodiment)
Figure 11 is the 2nd embodiment of beam splitter 10 of the present invention.Figure 11 (A) is a vertical view, and beam splitter 10 is that to have on thickness even metal plate from upper surface be that the plane of incidence penetrates into the tectosome that lower surface is the tapered hole portion 21 of outgoing plane.Be that with the beam splitter difference of the 1st embodiment shown in Figure 1 in the shape of the hole portion 21 of beam splitter 10, the plane of incidence shape 1101 of the relative beam splitter 10 of incident light and outgoing plane shape 1102 are similar shape.Therefore, connect the reflecting surface of plane of incidence shape 1101 and outgoing plane shape 1102, the plane of incidence and reflecting surface are with vertical angle of intersection in addition relatively.
Figure 11 (B) is the sectional view of the B-B ' face of expression Figure 11 (A).The sheet metal of tectosome that constitutes beam splitter 10 is with the inwall reflection incident light of its hole portion 21, but its reflecting surface 1103 in the present embodiment with the plane of incidence 1104 and outgoing plane 1105 with vertical angle of intersection in addition.Figure 11 (C) is the sectional view of C-C ' face of expression Figure 11 (A), and is identical with Figure 11 (B), and reflecting surface 1103 and the plane of incidence 1104 and outgoing plane 1105 are with vertical angle of intersection in addition.
The beam split result that Figure 12 represents to use the 2nd embodiment of beam splitter 10 of the present invention and carries out the incident light of Y direction polarization.Though the coordinate system in Figure 12 left side is corresponding with the coordinate system of the beam splitter of Figure 11, the positive dirction that should be noted that X-axis has 180 differences of spending (this also can with the transposing up and down and the alignment of drawing).(A) being with the result after the wavelength 440nm beam split, is with the result after the wavelength 540nm beam split (B), (C) is with the result after the wavelength 640nm beam split.As the outward appearance of light, be blue (A), (B) be green, (C) be red.Though (A) compare the difference of peak with (B) very little, moves to 110nm in the Y direction from 106nm as can be known.In addition, if with (B) and (C) relatively, then further move to the 112nm along the Y direction except peak as can be known, also the 2nd and the 3rd peak value occurs near 145nm and 170nm as can be known.The element of present embodiment also works as beam splitter as can be known from these results.
(the 3rd embodiment)
Figure 13 represents to use beam splitter 10 of the present invention to constitute the example of light-dividing device 1300.Beam splitter 10 is above-described beam splitters.Embodiment as beam splitter self can use any form.Will be to the incident light (being white light as an example in the drawings) of beam splitter in 20 beam split of hole portion, by at the lower surface configuration photo detector (from 1302～1314) as the beam splitter of beam split distribution local location, the light-dividing device that realization can be an electric signal with above-mentioned beam split distribution transformation.
Photo detector (1302～1312) constitutes on semiconductor (for example silicon) substrate 1301.Photo detector on the semiconductor substrate 1301 can use photo detector and the manufacture method thereof on the general semiconductor substrate.
Single photo detector (1302～1312), because the wavelength that each photo detector is accepted is certain wavelength, if therefore in each photo detector, can change the luminous sensitivity that is subjected to of relative wavelength, then be subjected to luminous sensitivity and be subjected to optical wavelength consistent by making, can constitute more effective light-dividing device.For example, because photo detector 1302 is accepted blue wavelength, thereby has the photo detector that is subjected to the light dichroism that blue sensitivity improves by formation, even obtain the light-dividing device that very weak incident light also can obtain reliable beam split result.
In addition, if single photo detector (1302～1312) is to have the identical structure that is subjected to the light dichroism, then can make by the manufacturing process identical with the manufacturing process of in the past imaging apparatus, owing to can utilize a large amount of production engineerings of imaging apparatus to produce, thereby can realize cheap light-dividing device.
Figure 14 represents the formation with the imaging apparatus of this light-dividing device combination.Imaging apparatus shown in Figure 14, though be CMOS type imaging apparatus as the form of imaging apparatus, be not only CMOS type imaging apparatus, also can use the imaging apparatus of CCD type imaging apparatus and other form.
Each photo detector 1410 by the photodiode 1402 that phototransformation is become electric charge, will be stored in reset transistor 1404 that the electric charge in the photodiode resets by the signal from reset line 1405 before exposure beginning, amplifier 1406 that the signal of photodiode 1402 is increased and read amplification after signal and the transistor 1408 that reads that reads to read line 1421 of the signal by selection signal wire 1409 constitute.The read select signal line of each row is connected with vertical transfer register 1460, in the present embodiment, can export delegation simultaneously.Respectively reading selection wire is selected by vertical transfer register 1460 as required.
The light signal that is subjected to that reads from each photo detector is read by read line 1421～1431.The connection level is selected transistor 1441～1451 on each line, make accordingly to be connected with selection to be changed to ON from horizontal shifting register 1470, thereby with signal to output line 1480 outputs, finally export from lead-out terminal 1482.Certainly, the selection that element constitutes is freely, and the present invention is not limited by this formation.
The photo detector suitable with photo detector shown in Figure 13 1302～1314 is photo detector 1420～1430 in Figure 14, or photo detector 1440～1450.By according to required beam split resolution configuration photo detector, can constitute light-dividing device.Because when photo detector is disposed at certain intervals, from the spectrophotometric spectra intensity of the incident light of the Y direction polarisation of use beam splitter of the present invention shown in Figure 5 also as can be known, can obtain the roughly equally spaced beam split result of wavelength, so its advantage is to divert existing imaging apparatus or various photosensor arrays.
In order to connect beam splitter and photo detector, following method is arranged.At first, on silicon substrate etc., make photo detector according to semiconductor fabrication process.If surface smoothing then original appearance get final product, if unsmooth then lamination silex glass etc. are with surface smoothingization.Thereafter, the photo detector surface after smoothing is by lamination metal tunicles such as plasma CVD or evaporations, at last by formation hole portions such as etchings.By formation hole portions such as etchings, on the reflecting surface of the hole portion that forms, form the metal tunicle behind the perhaps further lamination silex glass by evaporation, CVD or electroless plating etc.These manufacture methods can be implemented according to semiconductor technology, have the advantage that relative photo detector positions beam splitter accurately.
(the 4th embodiment)
Figure 15 represents to arrange a plurality of and bidimensional spectroscopy device that constitute along two-dimensional directional light-dividing device of the present invention.Beam splitter 1510 of the present invention is disposed continuously along the XY direction a plurality of, as bidimensional spectroscopy device 1500.Can measure a light-dividing device the beam split of not measurable a plurality of light sources or light source beam split distribute.As above-mentioned, utilize semiconductor fabrication process beam splitter can be manufactured on accurately on a plurality of identical light-dividing devices, can realize high-precision bidimensional spectroscopy determinator.Signal output is read with common imaging apparatus the samely and is got final product, and output can either be become one, can export corresponding to each light-dividing device as required again.And then, because two dimension obtains the beam split result, thereby can also be as common imaging apparatus utilization.Under situation about using as imaging apparatus, owing to carry out beam split by standing wave, thereby can realize the few highly sensitive imaging apparatus of loss of incident light.
(the 5th embodiment)
Figure 16 represents other embodiments of beam splitter 10 of the present invention.Figure 16 is the vertical view of hole portion, and beam splitter 10 is that to have from the upper surface of thickness even metal plate be that the plane of incidence connects to lower surface is the tectosome of the trapezoidal hole portion 20 of exit facet.In the shape of hole portion 20, on not shown depth direction, has the thickness of 6.27 μ m.(A)～(E) expression of Figure 17 uses the beam splitter of present embodiment to carry out the beam split result of the incident light of Y direction polarization.In the configuration relation of Figure 17, wish to notice that rotation has taken place coordinate in Figure 16 and Figure 17.At (A) wavelength 390nm, (B) wavelength 490nm, (C) wavelength 590nm, (D) wavelength 690nm with (E) in 100nm 5 wavelength at interval of wavelength 790nm, represent the how beam split of incident light of each wavelength in the cross section at 8 positions of depth direction Z=0 μ m～Z=6.3 μ m.Among each beam split result in Figure 17, the white position that shows represents that the light of this wavelength exists strongly as standing wave among the figure.
As shown in figure 17 as can be known, strong peak that exists of standing wave and distribution thereof are along with deepening along the Z direction and existing at central portion.For Z=0 μ m, there is the parallel standing wave in Y direction side (trapezoidal hypotenuse) with hole portion 20, still can't see the part of strong existence.Relatively if (A)～(E), standing wave elongated along with wavelength then, the wave number of standing wave (line among the figure) has the tendency of minimizing.For Figure 17 (E) wavelength 790nm, the degree of depth more than Z=2.7 μ m can be seen strong peak value in central authorities, for (D) wavelength 690nm, the degree of depth more than Z=3.6 μ m, reach (B) wavelength 490nm for (C) wavelength 590nm, more than Z=4.5 μ m, for (A) wavelength 390nm, the degree of depth more than Z=5.4 μ m can be seen very strong peak value at central part.Want as can be known to obtain beam split at the middle body of hole portion 20, be suitable for the above degree of depth of Z=5.4 μ m for whole wavelength shown in Figure 17.
(the 6th embodiment)
Figure 18 represents the variation of shape of the hole portion 20 of beam splitter of the present invention with the form of table.Among the figure, about big and be divided into the length 12.8 μ m and the 6.4 μ m of Y direction, and then the length 6.4 μ m of the directions X on the left side, 3 kinds of 4.8 μ m, 3.2 μ m are arranged respectively.In addition, for the shape of 6 kinds shown in so far, the ratio on the right/left side is manufactured experimently every 25% to 75% from 0% (promptly becoming isosceles triangle).Confirm that these hole portion shapes also can work as beam splitter.
Claims (15)
1. a beam splitter is characterized in that, is made of the sheet metal with hole portion or hole portion, and described hole portion or hole portion be opening up, and for having mutually uneven at least one pair of the polygon of opposite face in horizontal section,
The medial surface of above-mentioned hole portion or hole portion becomes specular reflecting surface,
By reflecting the interference that is caused to the incident light of the polarization of above-mentioned hole portion or the incident of hole portion at above-mentioned reflecting surface from above-mentioned opening, produce standing wave in the inside of above-mentioned hole portion or hole portion, with above-mentioned incident light in a plurality of wavelength band beam split.
2. beam splitter as claimed in claim 1 is characterized in that, makes the branch light component of different wavelength bands be collected at positions different on the horizontal direction on the bottom of above-mentioned hole portion or hole portion.
3. beam splitter as claimed in claim 1 is characterized in that, the shape of the horizontal section of above-mentioned hole portion or hole portion is an isosceles triangle.
4. beam splitter as claimed in claim 2 is characterized in that, the shape of the horizontal section of above-mentioned hole portion or hole portion is an isosceles triangle.
5. beam splitter as claimed in claim 1 is characterized in that, the shape of the horizontal section of above-mentioned hole portion or hole portion is an isosceles trapezoid.
6. beam splitter as claimed in claim 2 is characterized in that, the shape of the horizontal section of above-mentioned hole portion or hole portion is an isosceles trapezoid.
7. a beam splitter is characterized in that, has the hole portion that penetrates into lower surface from the upper surface of thickness even metal plate,
Above-mentioned hole is portion and the shape of the xsect that above-mentioned upper surface above-mentioned sheet metal is parallel with above-mentioned lower surface, with 3 limits the limit that constitutes above-mentioned xsect from the select progressively from long to short of the longest limit the time, it is the isosceles triangle of narrow angle that the extended line on 3 limits forms drift angle
And, become specular reflecting surface with the equilateral medial surface that joins of above-mentioned isosceles triangle at least in the medial surface of above-mentioned hole portion,
From the upper surface of above-mentioned sheet metal incident light, reflect the interference that caused and in a plurality of wavelength band beam split at the above-mentioned reflecting surface of above-mentioned hole portion by above-mentioned incident light to the polarization of above-mentioned hole portion incident.
8. beam splitter as claimed in claim 7 is characterized in that, is provided with polarization element on the top of above-mentioned beam splitter, the polarization direction that makes above-mentioned polarization element for the parallel direction of vertical halving line on the base of above-mentioned isosceles triangle.
9. beam splitter as claimed in claim 7 is characterized in that, is provided with polarization element on the top of above-mentioned beam splitter, the polarization direction that makes above-mentioned polarization element for the vertical direction of vertical halving line on the base of above-mentioned isosceles triangle.
10. beam splitter as claimed in claim 7 is characterized in that, connect vertical with lower surface of upper surface of the above-mentioned relatively sheet metal of above-mentioned hole portion.
11. light-dividing device, it is characterized in that, by the described beam splitter of claim 7 and be configured in as after the above-mentioned incident light beam split the photo detector of lower surface of above-mentioned beam splitter of the local location that distributes of beam split constitute, be electric signal by this photo detector with above-mentioned beam split distribution transformation.
12. light-dividing device as claimed in claim 11 is characterized in that, a plurality of local locations that distribute according to above-mentioned beam split dispose a plurality of above-mentioned beam splitters.
13. a bidimensional spectroscopy device is characterized in that, arranges a plurality of along two-dimensional directional light-dividing device as claimed in claim 11.
14. a bidimensional spectroscopy device is characterized in that, arranges a plurality of along two-dimensional directional light-dividing device as claimed in claim 12.
15. a light-splitting method is characterized in that, preparation has the sheet metal of hole portion or hole portion, and described hole portion or hole portion have uneven mutually at least one pair of the polygon of opposite face in horizontal section, and opening and its medial surface become specular reflecting surface up,
The incident light that makes polarization from above-mentioned opening is to above-mentioned hole portion or the incident of hole portion, by on above-mentioned reflecting surface, reflecting the interference that is caused, produce standing wave in the inside of above-mentioned hole portion or hole portion and with incident light in a plurality of wavelength band beam split.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007205075 | 2007-08-07 | ||
| JP2007205075 | 2007-08-07 | ||
| JP2007-205075 | 2007-08-07 | ||
| JP2008200084 | 2008-08-01 | ||
| JP2008-200084 | 2008-08-01 | ||
| JP2008200084A JP5184251B2 (en) | 2007-08-07 | 2008-08-01 | Spectroscopic element, spectroscopic device, and spectroscopic method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101363753A true CN101363753A (en) | 2009-02-11 |
| CN101363753B CN101363753B (en) | 2012-02-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008101453272A Expired - Fee Related CN101363753B (en) | 2007-08-07 | 2008-08-07 | Spectroscopy device, spectroscopy apparatus and spectroscopy method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5184251B2 (en) |
| KR (1) | KR101401491B1 (en) |
| CN (1) | CN101363753B (en) |
| HK (1) | HK1125449A1 (en) |
| TW (1) | TWI434029B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353325A (en) * | 2011-07-22 | 2012-02-15 | 中国科学院上海光学精密机械研究所 | Four-axial four-subdivision interferometer |
| CN104584137A (en) * | 2012-07-05 | 2015-04-29 | 美国科技工程公司 | Variable angle collimator |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5094476B2 (en) * | 2008-03-04 | 2012-12-12 | 富士フイルム株式会社 | Spectroscopic element, solid-state imaging device, imaging apparatus, and spectral method |
| JP5657673B2 (en) * | 2009-09-16 | 2015-01-21 | メディグス リミテッド | Small-diameter video camera head and visualization probe and medical devices incorporating them |
| TWI703313B (en) * | 2015-12-09 | 2020-09-01 | 台灣超微光學股份有限公司 | Measuring method of spectrometer, spectrometer and electronic circuitry thereof |
| TWI612281B (en) * | 2016-09-26 | 2018-01-21 | 財團法人工業技術研究院 | Interference splitter package device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6357134A (en) * | 1986-08-28 | 1988-03-11 | Okuma Mach Works Ltd | Tool storing device |
| JPS6457134A (en) * | 1987-08-27 | 1989-03-03 | Minolta Camera Kk | Spectrum measuring sensor |
| US5144498A (en) * | 1990-02-14 | 1992-09-01 | Hewlett-Packard Company | Variable wavelength light filter and sensor system |
| DE4431412C1 (en) * | 1994-08-24 | 1996-03-14 | William Newton | Device for performing spectroscopic measurements |
| JPH09210781A (en) * | 1996-01-31 | 1997-08-15 | Ando Electric Co Ltd | Spectroscope |
| US6151114A (en) * | 1998-03-31 | 2000-11-21 | The Boeing Company | Coherent laser warning system |
| US7310153B2 (en) * | 2004-08-23 | 2007-12-18 | Palo Alto Research Center, Incorporated | Using position-sensitive detectors for wavelength determination |
| GB2419940B (en) * | 2004-11-04 | 2007-03-07 | Mesophotonics Ltd | Metal nano-void photonic crystal for enhanced raman spectroscopy |
| US7420677B2 (en) * | 2005-12-22 | 2008-09-02 | Palo Alto Research Center Incorporated | Sensing photon energies of optical signals |
-
2008
- 2008-08-01 JP JP2008200084A patent/JP5184251B2/en not_active Expired - Fee Related
- 2008-08-06 TW TW097129801A patent/TWI434029B/en not_active IP Right Cessation
- 2008-08-07 CN CN2008101453272A patent/CN101363753B/en not_active Expired - Fee Related
- 2008-08-07 KR KR1020080077566A patent/KR101401491B1/en not_active IP Right Cessation
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353325A (en) * | 2011-07-22 | 2012-02-15 | 中国科学院上海光学精密机械研究所 | Four-axial four-subdivision interferometer |
| CN102353325B (en) * | 2011-07-22 | 2013-08-14 | 中国科学院上海光学精密机械研究所 | Four-axial four-subdivision interferometer |
| CN104584137A (en) * | 2012-07-05 | 2015-04-29 | 美国科技工程公司 | Variable angle collimator |
| CN104584137B (en) * | 2012-07-05 | 2017-05-10 | 美国科技工程公司 | Variable angle collimator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009058948A (en) | 2009-03-19 |
| CN101363753B (en) | 2012-02-29 |
| TW200916743A (en) | 2009-04-16 |
| KR20090015005A (en) | 2009-02-11 |
| TWI434029B (en) | 2014-04-11 |
| KR101401491B1 (en) | 2014-06-03 |
| HK1125449A1 (en) | 2009-08-07 |
| JP5184251B2 (en) | 2013-04-17 |
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