CN101344375B - High resolution heterodyne laser interference system and method for improving definition - Google Patents
High resolution heterodyne laser interference system and method for improving definition Download PDFInfo
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- CN101344375B CN101344375B CN2008100412612A CN200810041261A CN101344375B CN 101344375 B CN101344375 B CN 101344375B CN 2008100412612 A CN2008100412612 A CN 2008100412612A CN 200810041261 A CN200810041261 A CN 200810041261A CN 101344375 B CN101344375 B CN 101344375B
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Abstract
The invention provides a high-resolution heterodyne laser interferometer system and a method for increasing the resolution, the method comprises that: a laser beam which is used during measurement is generated, the laser beam is divided into transmission light and reflection light by a beam splitter, the transmission light is incident on a movable planar reflection mirror by a third quarter-wave plate, the first measurement light is reflected back, the reflection light is incident on a second reference planar reflection mirror by a second quarter-wave plate, the first reference light is reflected back, the first measurement light and the first reference light form respective emergent light by a plurality of transmission and reflection by an interferometer, the emergent light is received by a signal processing unit, the round trip times of the measurement light beam between the interferometer and the movable planar reflection mirror can be controlled by adopting different numbers of cube-corner prisms, thereby realizing the purpose of increasing the resolution.
Description
Technical field
The present invention relates to the method for dual-frequency laser interferometer system and raising resolution, and be particularly related to the method for high resolution heterodyne laser interference system and raising resolution.
Background technology
Heterodyne laser interferometer is because of its high resolving power, advantage such as high precision and be widely used in the precision positioning of photo-etching machine work-piece platform and mask platform.Along with the raising of work stage and mask platform bearing accuracy, the precision of heterodyne laser interferometer is had higher requirement.The resolution of heterodyne laser interferometer is the key factor that influences its measuring accuracy.Therefore, the resolution of raising heterodyne laser interferometer is to improve the important leverage of its measuring accuracy.
Patent 200410053441.4 has provided a kind of optics eight segmentation two-frequency laser interferometers, and Fig. 1 has provided at optics eight segmentation two-frequency laser interferometer synoptic diagram.Among Fig. 1, comprise a two-frequency laser 4 and a detector 3, measuring beam is at actionable corner cone prism 1, polarization splitting prism 2 reflects and transmission between fixed angles cone prism 7,8 and the catoptron 6, reference beam is at polarization splitting prism 2, reflect and transmission between fixed angles cone prism 5,7,8 and the catoptron 6.Measuring beam and reference beam are reflected at beam converter 9 places, by catoptron 10 measuring beam and reference beam are imported to afterwards and carry out signal Processing in the detector 3.Because formerly the movable member of the dual-frequency laser interferometer system in the technology 1 is a prism of corner cube, when using this interferometer to measure, has limited the movable direction of movable member.Promptly have only when movable member when a direction is moved, could use this interferometer to measure.When movable member has x simultaneously, y during the degree of freedom of three directions of z, then can't use this interferometer to measure.In addition,, make beam energy be subjected to twice decay, influenced the measuring accuracy of interferometer greatly because incident beam and outgoing beam all need to pass through beam converter 9 in the light path.
Summary of the invention
For the easy problem such as decay of the restriction that overcomes in the prior art movable direction and beam energy, but the invention provides a kind of apparatus and method that space three-dimensional moves, simple in structure, the raising resolution that is easy to realize that have.
To achieve these goals, the present invention proposes a kind of high resolution heterodyne laser interference system, it comprises: laser instrument, produce the laser beam of using when measuring, the first polarization spectro sheet and the second polarization spectro sheet, be arranged on the output light path of described laser instrument, the described first polarization spectro sheet is with described second the polarization spectro sheet is adjacent is in the same place, first quarter-wave plate and the first reference planes catoptron, be positioned over successively on the reflected light light path of the described first polarization spectro sheet, second quarter-wave plate and the second reference planes catoptron, be positioned over successively on the reflected light path of the described second polarization spectro sheet, the 3rd quarter-wave plate and movable plane mirror, be positioned over successively on the emitting light path of described first polarization spectro sheet and the described second polarization spectro sheet, at least one prism of corner cube, be positioned between the described first polarization spectro sheet and described second polarization spectro sheet and the described laser instrument, receiver, be positioned over a side of described laser instrument, on the light path of the described first polarization spectro sheet transmission, be used to accept signal at the reflection ray of described movable plane mirror from interferometer.
Further, the light beam through described first reference planes catoptron and the described second reference planes mirror reflects uses as the reference light beam.
Further, described removable catoptron is positioned on the device to be measured, and the distance that distance that described removable catoptron moves and device to be measured are moved equates.
Further, use as measuring beam through described movable plane mirror beam reflected.
Further, the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet is vertical mutually.
Further, the output light path angle all at 45 of the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet and described laser instrument.
Further, by the quantity of change prism of corner cube, the round number of times of control survey light beam between interferometer and movable plane mirror, thus realize different resolution.
Further, prism of corner cube quantity is 2 o'clock, and light beam is all 3 times through the number of times of described first reference planes catoptron and the described second reference planes mirror reflects, and the number of times of the described movable plane reflection mirror reflection of process is 6 times.
To achieve these goals, the present invention proposes a kind of method that improves heterodyne laser interference system resolution, it comprises: produce the laser beam of using when measuring, through second light splitting piece, be divided into transmitted light and reflected light, transmitted light is through being mapped to reflected back first measuring light on the movable plane mirror behind the 3rd quarter-wave plate, reflected light is through being mapped to reflected back first reference light on the second reference planes catoptron behind second quarter-wave plate, described first measuring light and first reference light first light splitting piece in interferometer, second light splitting piece, first quarter-wave plate, second quarter-wave plate, the 3rd quarter-wave plate, the first reference planes catoptron, the second reference planes catoptron, the repeatedly transmission and the reflection of movable plane mirror and at least one prism of corner cube, the final emergent light of described first measuring light and the emergent light of first reference light of forming accepted the emergent light from interferometer.
Further, the light beam through described first reference planes catoptron and the described second reference planes mirror reflects uses as the reference light beam.
Further, described removable catoptron is positioned on the device to be measured, and the distance that distance that described removable catoptron moves and device to be measured are moved equates.
Further, use as measuring beam through described movable plane mirror beam reflected.
Further, the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet is vertical mutually.
Further, the output light path angle all at 45 of the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet and described laser instrument.
Further, by the quantity of change prism of corner cube, the round number of times of control survey light beam between interferometer and movable plane mirror, thus realize different resolution.
Further, when prism of corner cube quantity was 2, light beam was all 3 times through the number of times of described first reference planes catoptron and the described second reference planes mirror reflects, and the number of times of the described movable plane reflection mirror reflection of process is 6 times.
The beneficial effect of the method for high resolution heterodyne laser interference system of the present invention and raising resolution mainly shows: when movably plane mirror is along the arbitrary motion of space three-dimensional direction, the light path of measuring beam is constant, do not influence the measurement of interferometer, simultaneously, the output beam of interferometer and input beam are not total to the road, beam energy is decay not, thereby has improved the measuring accuracy of interferometer.
Description of drawings
Fig. 1 is optics eight segmentation dual-frequency laser interferometer system synoptic diagram;
Fig. 2 improves the process flow diagram of interferometer resolution method for the present invention;
Fig. 3 is the heterodyne laser interference system structural drawing of first embodiment among the present invention;
Fig. 4 is the measurement light path synoptic diagram of first embodiment among the present invention;
Fig. 5 is the reference path synoptic diagram of first embodiment among the present invention;
Fig. 6 is the heterodyne ineterferometer synoptic diagram of second embodiment among the present invention;
Fig. 7 is the heterodyne ineterferometer synoptic diagram among the 3rd embodiment among the present invention.
Embodiment
The invention is further described below in conjunction with accompanying drawing.
Please refer to Fig. 2, Fig. 2 is the process flow diagram that the present invention improves interferometer resolution method, and our raising interferometer resolution method of the present invention as can be seen comprises the following steps: step 10 from Fig. 2: produce the laser beam of using when measuring; Step 11:, be divided into transmitted light and reflected light through second light splitting piece; Step 12: transmitted light is through being mapped to reflected back first measuring light on the movable plane mirror behind the 3rd quarter-wave plate; Step 13: reflected light is through being mapped to reflected back first reference light on the second reference planes catoptron behind second quarter-wave plate; Step 14: the repeatedly transmission and the reflection of described first measuring light and first reference light first light splitting piece, second light splitting piece, first quarter-wave plate, second quarter-wave plate, the 3rd quarter-wave plate, the first reference planes catoptron, the second reference planes catoptron, movable plane mirror and at least one prism of corner cube in interferometer finally form the emergent light of described first measuring light and the emergent light of first reference light; Step 15: accept emergent light from interferometer.
Fig. 3, Fig. 4 and Fig. 5 have provided a specific embodiment of laser heterodyne interferometer among the present invention.Interferometer 111 comprises the first polarization spectro sheet 19, the second polarization spectro sheet 20, first prism of corner cube 13, second prism of corner cube 14, be arranged in first quarter-wave plate, 15, the second quarter-wave plates 17 of reference path, be arranged in the 3rd quarter-wave plate 21 of measuring light path, the first reference planes catoptron, 16, the second reference planes catoptrons 18.Polarization spectro sheet 19 is vertical mutually with polarization spectro sheet 20, laser instrument 12 is used to produce the laser beam of using when measuring, receiver 11 is used to receive the signal from interferometer 111, and movable plane mirror 22 can be installed on the parts that need to measure, and forms measuring-signal in order to the reflection measurement light beam.Provide the reference path in the interferometer among Fig. 3 simultaneously and measured light path.Fig. 4 has provided the measurement light path in this specific embodiment.Fig. 5 has provided the reference path in this specific embodiment.
The double-frequency laser that laser instrument 12 sends incides on the second polarization spectro sheet 20 in the interferometer 111, and transmitted light forms measuring beam, and reflected light forms reference beam.Measuring beam incides movable plane mirror 22 upper edge Yuan Lu and returns, and reference beam incides the second reference planes catoptron upper edge Yuan Lu and returns.In this process, twice of measuring beam is through the 3rd quarter-wave plate 21, thereby change of polarized direction, measuring beam can be reflected at polarization spectro sheet place, twice of reference beam is through second quarter-wave plate 17, thereby change of polarized direction makes the reference beam can be in the place's transmission of polarization spectro sheet.Measuring beam is through the reflection of the second polarization spectro sheet 20, the reflection of the first polarization spectro sheet 19, incide once more on the movable plane mirror 22 and also return along former road once more, reference beam is through the transmission of the second polarization spectro sheet 20, the transmission of the first polarization spectro sheet 19 is incided on the first reference planes catoptron 16 and is also returned along former road once more.In this process, measuring beam once more twice through the 3rd quarter-wave plate 21, thereby change of polarized direction, make the measuring beam can be in the place's transmission of polarization spectro sheet, in this process, reference beam once more twice through first quarter-wave plate 15, thereby change of polarized direction can reflect measuring beam at polarization spectro sheet place.Measuring beam is through the reflection of first prism of corner cube 13, the transmission of the first polarization spectro sheet 19, incide for the third time on the movable plane mirror 22 and and return along former road, reference beam is through the reflection of first prism of corner cube 13, the reflection of the first polarization spectro sheet 19 is incided once more on the first reference planes catoptron 16 and along former road and is returned.In this process, measuring beam for the third time twice through the 3rd quarter-wave plate 21, thereby change of polarized direction, measuring beam can be reflected at polarization spectro sheet place, reference beam once more twice through first quarter-wave plate 15, thereby change of polarized direction makes the measuring beam can be in the place's transmission of polarization spectro sheet.Measuring beam is through the reflection of the first polarization spectro sheet 19, the reflection of the second polarization spectro sheet 20, incide on the movable plane mirror 22 and for the 4th time and return along former road, reference beam is through the transmission of the first polarization spectro sheet 19, the transmission of the second polarization spectro sheet 20 is incided once more on the second reference planes catoptron 22 and along former road and is returned.In this process, the 4th time twice of measuring beam is through the 3rd quarter-wave plate 21, thereby change of polarized direction, make the measuring beam can be in the place's transmission of polarization spectro sheet, reference beam once more twice through second quarter-wave plate 17, thereby change of polarized direction can reflect measuring beam at polarization spectro sheet place.Measuring beam is through the reflection of second prism of corner cube 14, the transmission of the second polarization spectro sheet 20, incide on the movable plane mirror 22 and for the 5th time and return along former road, reference beam is through the reflection of second prism of corner cube 14, the reflection of the second polarization spectro sheet 20 is incided for the third time on the second reference planes catoptron 18 and along former road and is returned.In this process, the 5th time twice of measuring beam is through the 3rd quarter-wave plate 21, thereby change of polarized direction, measuring beam can be reflected at polarization spectro sheet place, reference beam for the third time twice through second quarter-wave plate 17, thereby change of polarized direction makes the reference beam can be in the place's transmission of polarization spectro sheet.Measuring beam is through the reflection of the second polarization spectro sheet 20, the reflection of the first polarization spectro sheet 19, incide on the movable plane mirror 22 and for the 6th time and return along former road, reference beam is through the transmission of the second polarization spectro sheet 20, the transmission of the first polarization spectro sheet 19 is incided for the third time on the first reference planes catoptron 16 and along former road and is returned.In this process, the 6th time twice of measuring beam is through the 3rd quarter-wave plate 21, thereby change of polarized direction, make the measuring beam can be in the place's transmission of polarization spectro sheet, reference beam for the third time twice through the 3rd quarter-wave plate 15, thereby change of polarized direction can reflect reference beam at polarization spectro sheet place.At last, the reference beam of the measuring beam of transmission and reflection enters into signal processing unit 11 simultaneously and carries out signal Processing.
When the movement velocity of movable plane mirror 22 is v, Wavelength of Laser is λ, and during round trip, the additional Doppler shift Δ f of measuring beam is measuring beam between interferometer 111 and plane mirror 22
As can be known, measuring beam comes and goes six times between interferometer 111 and plane mirror 22 from said process, then the additional Doppler shift Δ f of interferometer measurement light beam among the present invention
MFor
Reference beam and measuring beam obtain the wave number N of doppler shifted signal, promptly through behind the signal processing unit 11
Wherein, L is the displacement of movable plane mirror 22.By following formula (4) as can be known, the resolution of heterodyne laser interference system is λ/12 among the present invention.By the fixed angles cone prism of employing varying number or different light path layouts, the round number of times of may command measuring beam between interferometer and movable plane mirror, thus realize different resolution.
Fig. 6 has provided second specific embodiment of heterodyne laser interference system among the present invention.Interferometer 112 comprises the first polarization spectro sheet 19, the second polarization spectro sheet 20, first prism of corner cube, 23, the second prism of corner cubes 24 are arranged in first quarter-wave plate 15 of reference path, second quarter-wave plate 17, be arranged in the 3rd quarter-wave plate 21, the first reference planes catoptrons 16, the second reference planes catoptrons 18 of measuring light path, first catoptron, 25, the second catoptrons 26.The principle of work of interferometer 112 is identical with the principle of work of interferometer 111 in the specific embodiment 1.
In interferometer 112, utilize different light path layouts, be reference beam and measuring beam by 23 reflections twice of first prism of corner cube, realized that measuring beam 8 times between interferometer 112 and movable plane mirror 22 are round, thereby make the resolution changing of interferometer.By formula (1)～(4) as can be known, the resolution of interferometer 112 is λ/16 in this specific embodiment, and with respect to the interferometer in the specific embodiment 1 111, resolution has improved 3/4 times.
Fig. 7 has provided the 3rd specific embodiment of heterodyne laser interference system among the present invention.Interferometer 113 comprises the first polarization spectro sheet 19, the second polarization spectro sheet 20, first prism of corner cube 27, second prism of corner cube 28, third angle cone prism 29 is arranged in first quarter-wave plate 15 of reference path, second quarter-wave plate 17, be arranged in the 3rd quarter-wave plate 21, the first reference planes catoptrons 16, the second reference planes catoptrons 18 of measuring light path.The principle of work of interferometer 113 is identical with the principle of work of interferometer 111 in the specific embodiment 1.
In interferometer 113, by using three prism of corner cubes, i.e. first prism of corner cube 27, second prism of corner cube 28, third angle cone prism 29 has realized that measuring beam 8 times between interferometer 113 and movable plane mirror 22 come and go, thereby makes the resolution changing of interferometer.By formula (1)～(4) as can be known, the resolution of interferometer 113 is λ/16 in this specific embodiment, and with respect to the interferometer in the specific embodiment 1 111, resolution has improved 3/4 times.
From the foregoing description as can be known, when movable plane mirror 22 has x simultaneously, when y, the freedom of motion of three directions of z, the light path of measuring beam is constant, thereby does not influence the measurement of interferometer.Simultaneously, the output beam of interferometer and input beam are not total to the road, need not to adopt beam converter to separate input beam and output beam, and beam energy is not decayed, thereby the measuring accuracy of interferometer is improved.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.The persond having ordinary knowledge in the technical field of the present invention, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore, protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (13)
1. a high resolution heterodyne laser interference system comprises two-frequency laser, interferometer, receiver and movable plane mirror, it is characterized in that described interferometer comprises:
The first polarization spectro sheet and the second polarization spectro sheet, be arranged on the output light path of described laser instrument, the described first polarization spectro sheet is with described second the polarization spectro sheet is adjacent is in the same place, the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet is vertical mutually, the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet and the output light path of described laser instrument angle all at 45;
First quarter-wave plate and the first reference planes catoptron are positioned on the reflected light light path of the described first polarization spectro sheet successively;
Second quarter-wave plate and the second reference planes catoptron are positioned on the reflected light path of the described second polarization spectro sheet successively;
The 3rd quarter-wave plate;
At least one prism of corner cube is positioned between the described first polarization spectro sheet and described second polarization spectro sheet and the described laser instrument,
Described the 3rd quarter-wave plate and described movable plane mirror are positioned on the emitting light path of described first polarization spectro sheet and the described second polarization spectro sheet successively.
2. high resolution heterodyne laser interference system according to claim 1 is characterized in that comprising: the light beam through described first reference planes catoptron and the described second reference planes mirror reflects uses as the reference light beam.
3. high resolution heterodyne laser interference system according to claim 1 is characterized in that comprising: described movable plane mirror is positioned on the device to be measured, and the distance that distance that described movable plane mirror moves and device to be measured are moved equates.
4. high resolution heterodyne laser interference system according to claim 1 is characterized in that comprising: use as measuring beam through described movable plane mirror beam reflected.
5. high resolution heterodyne laser interference system according to claim 1 is characterized in that comprising: by the quantity of change prism of corner cube, and the round number of times of control survey light beam between interferometer and movable plane mirror, thus realize different resolution.
6. high resolution heterodyne laser interference system according to claim 5, it is characterized in that comprising: prism of corner cube quantity is 2 o'clock, light beam is all 3 times through the number of times of described first reference planes catoptron and the described second reference planes mirror reflects, and the number of times of the described movable plane reflection mirror reflection of process is 6 times.
7. a method that improves laser interference system resolution comprises producing the laser beam of using when measuring, and laser beam is through interferometer and receive the emitting laser bundle, it is characterized in that described laser beam comprises through interferometer:
Through second light splitting piece, be divided into transmitted light and reflected light;
Transmitted light is through being mapped to reflected back first measuring light on the movable plane mirror behind the 3rd quarter-wave plate;
Reflected light is through being mapped to reflected back first reference light on the second reference planes catoptron behind second quarter-wave plate;
The repeatedly transmission and the reflection of described first measuring light and first reference light first light splitting piece, second light splitting piece, first quarter-wave plate, second quarter-wave plate, the 3rd quarter-wave plate, the first reference planes catoptron, the second reference planes catoptron, movable plane mirror and at least one prism of corner cube in interferometer finally form the emergent light of described first measuring light and the emergent light of first reference light.
8. a kind of method that improves laser interference system resolution according to claim 7 is characterized in that comprising: the light beam through described first reference planes catoptron and the described second reference planes mirror reflects uses as first reference light.
9. a kind of method that improves laser interference system resolution according to claim 7, it is characterized in that comprising: described movable plane mirror is positioned on the device to be measured, and the distance that distance that described movable plane mirror moves and device to be measured are moved equates.
10. a kind of method that improves laser interference system resolution according to claim 7 is characterized in that comprising: the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet is vertical mutually.
11. a kind of method that improves laser interference system resolution according to claim 7 is characterized in that comprising: the light splitting surface of described first polarization spectro sheet and the described second polarization spectro sheet and the output light path of described laser instrument angle all at 45.
12. a kind of method that improves laser interference system resolution according to claim 7, it is characterized in that comprising: by changing the quantity of prism of corner cube, the round number of times of control survey light beam between interferometer and movable plane mirror, thus realize different resolution.
13. a kind of method that improves laser interference system resolution according to claim 12, it is characterized in that comprising: when prism of corner cube quantity is 2, light beam is all 3 times through the number of times of described first reference planes catoptron and the described second reference planes mirror reflects, and the number of times of the described movable plane reflection mirror reflection of process is 6 times.
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| CN101629810B (en) * | 2009-08-14 | 2011-05-25 | 中国计量科学研究院 | Optical doubling frequency laser interference measurement system and optical doubling frequency laser interference measurement method for displacement of special geometric point |
| CN102818541B (en) * | 2012-08-13 | 2014-12-10 | 西安交通大学 | High-resolution rolling-angle measuring device and measuring method |
| CN104142123B (en) * | 2013-05-08 | 2017-04-05 | 上海微电子装备有限公司 | It is applied to the Three Degree Of Freedom laser measurement system of plant equipment geometric error measurement |
| CN103335704B (en) * | 2013-06-28 | 2016-05-04 | 西南科技大学 | A kind of laser interference rotor vibration detecting device and measuring method thereof |
| WO2016005167A1 (en) * | 2014-07-09 | 2016-01-14 | Asml Netherlands B.V. | Inspection apparatus, inspection method and device manufacturing method |
| CN111442715B (en) * | 2020-03-02 | 2021-09-07 | 哈尔滨工业大学 | Heterodyne laser interferometer based on integral secondary light splitting component |
| CN112857210B (en) * | 2021-03-09 | 2023-03-17 | 哈尔滨工业大学 | Single-beam three-degree-of-freedom heterodyne laser interferometer based on array detector |
| CN117553676B (en) * | 2023-11-17 | 2024-05-14 | 哈尔滨工业大学 | Heterodyne interferometer based on multi-target opposite displacement measurement and measurement method |
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