CN101327536A - Composite synchronous superaudio vibrating micro electrolytic machining method - Google Patents
Composite synchronous superaudio vibrating micro electrolytic machining method Download PDFInfo
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Abstract
The invention discloses a complex synchronous ultrasonic vibration micro-electrolytic machining method. A micro pressure adjustment device is used to keep the micro pressure contact of workpieces with the micro cathode; a micro displacement laser sensor is used for rapid dynamic measurement of the location of the ultrasonic vibrations, and to convert the vibrations into electrical signals carrying ultrasonic frequencies, phases and amplitudes, then the signals are transmitted to a chopper circuit for processing and conversion to produce chopping signals to turn on and shut off the electrolytic power source, thus achieving the synchronization of the electrolytic electrification and ultrasonic vibration of the cathode; a current sensor converts electrolytic signals into voltage signals, which are displayed, measured and storage by a digital storage oscillograph and then are transmitted to a control computer for automatic adjustment of the ultrasonic parameters and the electrical parameter. The method reasonably combines micro electrolysis with ultrasonic vibration in synchronization and in the same frequency, and eliminates passivation of the electrolysis through the function of ultrasonic vibration, thus improving accuracy of the machining and the quality of the surface and reducing the cost; and the invention can achieve micro machining of micro-structures of any type.
Description
Technical field
The present invention relates to a kind of composite synchronous superaudio vibrating micro electrolytic machining method, belong to composite fine special processing technology field.
Background technology
In fine special processing technology field, many processing methods are arranged, the fine Compound Machining that combines as fine electric spark processing, micro-electrochemical machining processing, fine Ultrasonic machining, the processing of fine high energy beam current and by two or more processing method etc., these processing methods can solve precision, the microfabrication difficult problem that common machining is difficult to realize, have brought into play important function in the little fine finishining of parts.Yet existing fine machining method also has certain limitation in each tool advantage.
Fine Ultrasonic machining is particularly suitable for hard brittle materia micro hole, groove processing, has the good process characteristic of efficient height, precision and surface quality, but when material hardness and toughness height, working (finishing) area and aspect ratio are big, working (machining) efficiency is very low, and because the relative wear of ultrasonic instrument is big, the microfabrication precision is difficult to guarantee;
Electrochemistry processing is that processing is removed by " molecule " level unit, has little fine finishining mechanism advantage, the feasibility that has the processing of microfabrication or even nm level, wherein can make tiny metal parts complex-shaped, that precision is very high, but have material castability, percent defective height and inefficient technical limitation based on the micro electroforming technology of electrochemistry cathodic deposition principle; Dispersion corrosion effect when processing owing to high current density based on the micro-electrochemical machining of electrochemistry anodic solution; the difficult control of machining accuracy; and micro-current electroanalysis is because passivation; process is difficult to continue; adopt high frequency, burst pulse micro-electrochemical machining can eliminate passivation; realize the little fine finishining in little gap; but the minim gap process changes complicated; processing is cathode construction, electrolyte system reasonably; and need the precision micro-displacement feed system, high-frequency narrow-pulse power supply and fast short-circuit protective system, equipment investment cost is very high.
Chinese invention patent specification " CN 87101455 A " discloses a kind of compound processing method of electric spark and ultrasonic wave, comprise high frequency high peak current narrow-pulse generator, supersonic generator and by the modulation circuit of supersonic frequency signal controlling electric spark pulse generation, between the instrument and glomerocryst adamas work piece of ultrasonic vibration, adding is by the high-frequency spark pulsed discharge of supersonic frequency signal of telecommunication modulation, make instrument machinery grinding work piece when ultrasonic transducer extends, discharge ablation workpiece during shortening is to improve polycrystalline diamond process velocity and surface quality.The device of this patent of invention is modulated the high-frequency spark pulsed discharge with the supersonic frequency signal, carry out the shutoff of spark discharge and open-minded, truly feasible on circuit theory, on processing mechanism mechanical grinding and high-frequency spark pulsed discharge mutually organic compound, have obvious technical advantage.It is modulating input signal that this combination process adopts the ultrasonic generator output signal of telecommunication, modulation circuit produces the electric spark power supply and opens, it is very little to close the signal lag error, but because ultrasonic transducer, amplitude enlarges rod, the mechanical ultrasonic vibration system intrinsic frequency of formations such as discharge machined electrode changes with processing conditions, be delivered to the ultrasonic vibration of tool-electrode end face and the supersonic frequency alternate electrical signal of ultrasonic generator output the phase place hysteresis error is arranged, this error changes with the system of processing condition, be difficult to guarantee that pulsed discharge is to take place all the time in the backhaul of tool-electrode vibration, sometimes may because of phase place lag behind and the pulse that requires to power up phase sequence opposite, not only can not improve machining accuracy and efficient, it is chaotic that process is taken place, precision, deterioration of efficiency, compound action are brought into play very obvious or are not had compound action.
Chinese invention patent ublic specification of application " CN 1400077A " discloses a kind of manufacture method and Hydrodynamic bearing apparatus of Hydrodynamic bearing apparatus, its flesh and blood is to utilize the ultrasonic vibration generating means to give the ultrasonic vibration excitation to electrolyte on one side, carry out Electrolyzed Processing on one side, in the anti-shape of work piece surface formation tool-electrode, machining accuracy is good.This patent is mainly used in the high accuracy groove processing of hydrodynamic bearing, is of limited application, and is difficult to realize the microfabrication of micro-structural, arbitrary shape part; The vibration of its electrolysis and supersonic frequency is simple superposition compound action on the other hand, does not carry out synchronously organic compoundly, and the compound action effect is performance fully.
Chinese invention patent application " CN200610037902.8 " discloses a kind of ultrasonic electrolysis compounding micro processing method, get the supersonic frequency signal of telecommunication by the modulation circuit power supply chopping signal that produces electrolysis, because the action of ultrasonic vibration mechanical system lags behind, the composite sync precision is difficult effectively to be guaranteed, and asynchronous hysteresis error accumulation, will occur electrolysis in the process and power up the phase place disorder, big gap location takes place to continue power up electrolysis or electrolysis short circuit, destroy negative electrode and workpiece when serious, and this hysteresis error is difficult to carry out real-Time Compensation by modulation circuit; For avoiding electrolysis short circuit and spark discharge burn workpiece and negative electrode, must in processing electrolyte, sneak into the bigger ultrasonic abrasive particle of granularity in the practicality, what stop workpiece and negative electrode directly contacts the electrolysis short circuit that causes, but ultrasonic abrasive is being eliminated passivation, rise and necessarily to remove material effects simultaneously, also unavoidably tool cathode is produced wearing and tearing, make that negative electrode is restricted service life in the microfabrication, in the big microfabrication of aspect ratio, be difficult to reach the microfabrication required precision.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of composite synchronous superaudio vibrating micro electrolytic machining method, micro-electrochemical machining and supersonic frequency are vibrated with frequency, synchronously organic compound, realize that low-voltage, little gap, no abrasive material or micro powder grade abrasive material, little current density, high-frequency impulse electrolysis and supersonic frequency vibrate synchronous Compound Machining, realize micro-structural high speed, high-precision, low-cost microfabrication.
For solving above technical problem, technical scheme of the present invention is, a kind of composite synchronous superaudio vibrating micro electrolytic machining method is provided, and comprises the steps:
At first according to the workpiece processing request, process fine negative electrode profile, and make the fine negative electrode processing end face opposite with the required cross sectional shape of workpiece with the combination special processing technology, supersonic frequency vibration radiation head connects with fine cathode end with screw thread, and the connection place is coupled with vaseline or high density vegetable fat;
By guider fine negative electrode and workpiece are located again, perhaps workpiece is bonded on the insulation workbench,, use the insulation film electricity to isolate between workbench and the workpiece by measuring microscope observation, demarcation and location;
Then, artificial instillation low conductivity passivation electrolyte between workpiece and fine negative electrode, or the processing district placed electrolyte fully, open the ultrasonic generator power supply, produce frequency and the continuously adjustable supersonic frequency alternate electrical signal of power by ultrasonic generator, piezoelectric transducer and supersonic frequency vibration radiation head amplify this supersonic frequency alternate electrical signal the same frequency supersonic frequency mechanical oscillation that are converted to fine negative electrode end face;
Automatically regulate the exciting electric capacity of ultrasonic generator by manual adjustment or control computer, change supersonic frequency alternate electrical signal frequency of oscillation, the excitation ultrasonic vibration system is realized resonance, this moment, the negative electrode end face produced the supersonic frequency vibration, atomizing will appear in cathode end electrolyte, utilize the precise fine counterweight, remain by the minute-pressure apparatus for adjusting force that 0.01N～3.00N minute-pressure power contacts between workpiece and the fine negative electrode, open the electrolysis ring current, voltage magnitude 1V～5V, begin processing,, drive workpiece and the workbench microdisplacement that makes progress by linker pressure oil along with working depth increases;
In the process, undertaken dynamically measuring fast by the supersonic frequency vibration position of laser micro-displacement sensor to fine negative electrode, and be converted into the signal of telecommunication that comprises ultrasonic vibration frequency, phase place, amplitude information, being sent to chopper circuit again handles, changes, produce and cut off and the chopping signal of opening electrolysis power, the electrolysis loop is opened or is turn-offed, realize electrolysis power up with the vibration of negative electrode supersonic frequency accurately with frequently, synchronously;
By current sensor Faradaic current is converted to voltage signal, show, measure, store by digital storage oscilloscope, with two passages of digital storage oscilloscope, the synchronization accuracy and the situation of change of observation decomposition voltage and Faradaic current, can manually carry out parametric optimization and adjusting to the composite fine electrochemical machining process, the signal of telecommunication can be sent in the control computer by serial port and show, handles, and carries out the automatic adjusting of ultrasound parameter and electrical quantity, keeps process optimization.
In the above method, it is 1%～5% sodium nitrate solution that electrolyte is selected mass concentration for use, it is the supersonic frequency alternate electrical signal of 16KHz～24KHz that ultrasonic generator produces frequency range, and ultrasonic power is 10W～150W, and the supersonic frequency vibration amplitude of fine negative electrode end face is 0.005mm～0.100mm.
In the above method, can select following parameter for use: decomposition voltage is direct current 4V, system's supersonic frequency vibration resonance frequency is 19.63KHz, ultrasonic power 60W, ultrasonic amplitude 0.05mm, workpiece is 2.0N with the static pressure that contacts between the fine negative electrode, electrolyte is 5% sodium nitrate aqueous solution, in sodium nitrate aqueous solution, add 1600 order silicon carbide abrasives, 3 minutes process times.
In the above method, can also select following parameter for use: decomposition voltage is a pulse voltage, amplitude 2V, frequency 5000Hz, dutycycle 4: 6, the supersonic frequency vibration resonance frequency 20.12KHz of system, ultrasonic power 45W, ultrasonic amplitude 0.03mm, workpiece is 1.60N with the static pressure that contacts between the fine negative electrode, electrolyte is 5% sodium nitrate aqueous solution, adds boron carbide W10 micro mist in sodium nitrate aqueous solution, 3 minutes process times.
This composite synchronous superaudio vibrating micro electrolytic machining method, with micro-electrochemical machining and supersonic frequency vibration frequency, combination synchronously together, rely on supersonic frequency vibration effect to eliminate electrolytic passivation, realize the eliminating of elaboration products and the circulation renewal of working solution, improve the machining gap process, improve the localization processing characteristics,, can further improve microfabrication precision, surface quality having high working (machining) efficiency simultaneously; Workpiece keeps certain minute-pressure power to contact with negative electrode in the processing, can carry out minute-pressure power continuous stepless regulates, need not the necessary little feed system of accurate speed stabilizing of Electrolyzed Processing, adopt low concentration passivation electrolyte simultaneously, need not complicated electrolyte circulation system, frequently, synchronously turn on and off the Electrolyzed Processing power supply together with the supersonic frequency vibration, powering up the gap can regulate in real time, can be without the auxiliary composite fine Electrolyzed Processing of carrying out of ultrasonic abrasive, negative electrode is lossless in theory, can effectively improve machining accuracy, and reduce cost greatly.
Description of drawings
Fig. 1 is a composite synchronous superaudio vibrating micro electrolytic machining method operation principle block diagram;
Fig. 2 is the chopper circuit schematic diagram;
Fig. 3 powers up mode for composite sync;
Among the figure: the 2a laser micro-displacement sensor signal of telecommunication, 2b voltage comparator, 2c photoelectrical coupler, 2d copped wave pipe, 2e copped wave pulse, 2f electrolysis power, 2g fly-wheel diode, 2h processing district, 3a pulse power up district, 3b pulse-off district, 3c electrolysis and power up the gap.
The specific embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
As shown in Figure 1, composite synchronous superaudio vibrating micro electrolytic machining method of the present invention comprises the steps, producing frequency range by ultrasonic generator is the continuous adjustable supersonic frequency alternate electrical signal of 16KHz～24KHz, ultrasonic power is that 10W～150W is adjustable continuously, piezoelectric transducer and supersonic frequency vibration radiation head amplify this supersonic frequency alternate electrical signal same frequency, the mechanical oscillation of homophase supersonic frequency that are converted to fine negative electrode end face, amplitude can reach 0.005mm～0.100mm, satisfies the requirement of composite fine processing supersonic frequency vibration amplitude.Supersonic frequency vibration radiation cephalic par with vaseline or the coupling of high density vegetable fat, is avoided ultrasonic energy losses by the fine negative electrode of thread connection.
Utilize Electrolyzed Processing mechanism, remove material, utilize supersonic frequency vibration effect to remove electrolysate, upgrade electrolyte, can adopt " static feed flow " mode to supply with working solution, need not complicated electrolyte circulation system in " molecular melting " mode; Adopt 1%～5% low quality concentration sodium nitrate passivation electrolyte, avoid electrolysis dispersion corrosion and non-environmental-pollution problem; Adopt little gap to power up electrolysis and composite ultraphonic frequency vibration, can realize localization trace removal processing; Without ultrasonic abrasive, the negative electrode theory is lossless.Adopt these processing modes, on processing mechanism, be very beneficial for realizing accurate, fine, efficient, low-cost green manufacturing.
Electrolysis unit is made up of fine negative electrode, workpiece, electrolyte, power supply, current sensor and chopper, isolate with the insulation film electricity between workbench and the workpiece, the low concentration passivation electrolyte that manually instils in the processing district also can place electrolyte fully with the processing district.The ultrasonic vibration impact involves " cavitation " effect can in time take elaboration products out of processing district, and makes fresh electrolyte realize the circulation renewal.
The laser micro-displacement sensor carries out dynamically measuring fast to the supersonic frequency vibration position of fine negative electrode, and be converted into and comprise the ultrasonic vibration frequency, phase place, the signal of telecommunication of amplitude information, be sent to chopper circuit again and produce the chopping signal of cutting off and opening electrolysis power, the electrolysis loop is opened or turn-offed, guarantee that electrolysis powers up the same frequency that vibrates with the negative electrode supersonic frequency, synchronously, be that ultrasonic vibration is carried out Electrolyzed Processing at little gap location, the big gap location of ultrasonic vibration carries out the circulation of electrolysate eliminating and fresh electrolyte to be upgraded, precise laser micro-displacement sensor response frequency is up to 50KHz, the Ultrasonic machining frequency 16KHz～24KHz that surpasses far away, therefore the tool cathode ultrasonic vibration is minimum with the phase place hysteresis error that adds signal of telecommunication generation, powering up the interval can remain with frequently with the machining gap variation relation, synchronously, stablely satisfy powering up between ultrasonic vibration and the power supply, turn-off the requirement of action sync response.
The minute-pressure apparatus for adjusting force utilizes the precise fine counterweight, the little pressure that contacts that keeps 0.01N～3.00N between workpiece and the fine negative electrode by linker pressure oil, workpiece keeps one stablize minute-pressure power and contact with fine negative electrode all the time in the processing, with the working depth increase, and the feeding that makes progress automatically of z axle; X, y table feed are driven by electrostriction micrometric displacement feed arrangement, realize that high rigidity do not have the microdisplacement of gap displacement and very fine, and resolving power can reach 1.0～2.5nm.
Decomposition voltage, current measurement and analytical equipment are made up of current sensor, digital storage oscilloscope, control computer, current sensor is converted to voltage signal with Faradaic current, show, measure, store by digital storage oscilloscope, with two passages of digital storage oscilloscope, the synchronism and the situation of change of observation decomposition voltage and electric current are so that carry out real-time analysis, parametric optimization and adjusting to the micro-electrochemical machining process.The signal of telecommunication can be sent to control by serial port and store in the computer, so as to analyze, calculation process.Manual adjustment or control computer are regulated the exciting electric capacity of ultrasonic generator automatically, change supersonic frequency alternate electrical signal frequency of oscillation, can encourage ultrasonic vibration system to reach the resonance processing conditions.
Composite synchronous superaudio vibrating micro electrolytic machining method can solve under little current density on the one hand, because the problem that electrolytic passivation makes single electrolysis microfabrication process be difficult to continue, by supersonic frequency vibration reducing activation polarization, concentration polarization, eliminate electrolytic passivation, realize low-voltage 1～5V, little gap 0.005mm～0.05mm, less than 20A/cm
2The effect of little current density, 16KHz～24KHz high-frequency impulse electrolysis processing, improve microfabrication precision, surface quality and efficient; Utilize chopper circuit can control electrolysis on the other hand and power up the gap, avoid the electrolysis contact short circuit, need not ultrasonic abrasive, can realize " tool cathode is lossless " in theory, overcome simple fine Ultrasonic machining tool loss and seriously reach when material area, toughness are big efficient, the significantly reduced problem of precision.Electrolysis is that " ion " formula is removed, and has little accurately machined real feasibility of realization on processing mechanism; Rely on the ultrasonic vibration effect to realize that electrolysate is got rid of and the circulation of fresh electrolyte is upgraded, need not complicated electrolyte circulation system; Adopt low concentration passivation electrolyte, non-environmental-pollution protection problem; Adopt the accurate minute-pressure apparatus for adjusting force of liquid transfer, can keep the little pressure that contacts between workpiece and the negative electrode automatically, the constant speed that need not Electrolyzed Processing is stablized feed mechanism, improves precision, keeps the high efficiency while being easy to, and equipment and processing cost greatly reduce.
When working (machining) efficiency requires height, when required precision is general, can adopt the micro powder grade abrasive material to help to eliminate passivation, carry out ultrasonic synchronous Electrolyzed Processing, improve working (machining) efficiency greatly.
Adopt low conductivity passivation sex work liquid such as water, emulsion or low quality concentration sodium nitrate, adopt dc source or high frequency pulse power supply, amplitude 4V and above supply voltage, can on processing unit (plant), carry out composite synchronous superaudio vibrating micro Electrolyzed Processing, composite synchronous superaudio vibrating micro spark machined, composite synchronous superaudio vibrating micro electrolysis/spark machined and single ultrasonic microfabrication, satisfy the workpiece process requirements of different rapidoprints, different machining accuracy and different working (machining) efficiencies;
How accurately to take out the supersonic frequency vibration signal, be to realize micro-electrochemical machining and supersonic frequency vibration compound key problem in technology synchronously.The present invention is a benchmark with the negative electrode end face of supersonic frequency mechanical oscillation, utilizes the precise laser micro-displacement sensor to gather negative electrode supersonic frequency vibration signal.Adopt " LK-G10 " type CCD precise laser micro-displacement sensor, have the superelevation sample rate of 50kHz, 0.02% pinpoint accuracy, the superelevation repeatability of 0.01 μ m, measurement category are 10 ± 1mm.The negative electrode ultrasonic vibration signal of telecommunication that sensor is converted to reflects that directly the machining gap between fine negative electrode end face and the workpiece changes, the fine negative electrode end face ultrasonic vibration signal of telecommunication is introduced in the chopper circuit, chopper circuit produces and to open, the chopping signal of disconnected direct current or pulse electrolysis power supply, the opening of control Electrolyzed Processing, disconnected.When fine negative electrode vibrates near workpiece, power up Electrolyzed Processing, fine negative electrode cuts off electrolysis power when vibrating away from workpiece, carries out the elaboration products removing and upgrades electrolyte.
As shown in Figure 2, the reference voltage signal of laser micro-displacement sensor signal of telecommunication 2a and voltage comparator 2b is compared, by comparative result, the on off state of decision photoelectrical coupler 2c, produce copped wave pulse 2e, copped wave pulse 2e determines the on off state of copped wave pipe 2d, determines the open and close of electrolysis power 2f by the on off state of copped wave pipe 2d, thereby controls the duty of Electrolyzed Processing district 2h.Fly-wheel diode 2g plays the reverse afterflow protective effect of voltage, and the reference voltage of voltage comparator 2b can be regulated by adjustable resistance R3.Copped wave pipe 2d adopts the MOSFET FET, and it is big to have a capacity, is fit to low-voltage and big electric current, 15kHz～35kHz operating frequency, ns level switching speed, characteristics such as loss is low, voltage endurance good, reliability height, especially is fit to this technology.
Directly gather negative electrode end face supersonic frequency vibration signal with the laser micro-displacement sensor, avoided ultrasonic vibration system with respect to the phase place hysteresis error between the supersonic frequency alternate electrical signal, by chopper circuit laser micro-displacement sensor signal of telecommunication 2a is handled again, obtain copped wave pulse 2e electrolysis power 2f is opened, breaks and control, it is accurate together frequently, synchronously with the vibration of negative electrode supersonic frequency to realize that electrolysis powers up the district.
Figure 3 shows that the composite sync power-on method of employing, when fine negative electrode along z axially down the vibration, when fine negative electrode and workpiece gap powered up gap 3c less than electrolysis, chopper circuit provided copped wave pulse 2e and opens electrolysis power 2f, for pulse powers up district 3a, carry out electrolysis and add electric machining; When fine negative electrode is axially gone up vibration along z, when fine negative electrode and workpiece gap power up gap 3c greater than electrolysis, the chopping signal 2e that chopper circuit provides is a cut-off signals, electrolysis power 2f outage is pulse-off district 3b, can carry out product and get rid of, upgrade electrolyte, the uniform gap parameter stops dispersion corrosion, improves machining accuracy.
Adopt composite sync power-on method shown in Figure 3, when fine negative electrode vibration contacts with workpiece,, can not produce excessive peak point current because the metering function of electrolysis loop resistance R9 is arranged; Supersonic frequency vibration also can be avoided workpiece and the negative electrode contact discharge galvanic action to workpiece and fine negative electrode, and compound processing course need not ultrasonic abrasive particle, can realize that negative electrode does not have the wearing and tearing microfabrication;
When sneaking into micron order abrasive dust such as boron carbide in electrolyte, because the micro mist blocking effect, the short circuit that can not produce electrolysis of negative electrode and workpiece can improve the processing electrical quantity, adopts than large amplitude, under assurance machining accuracy condition, can significantly improve working (machining) efficiency.
On this external this device, adopt the insulation working solution, can realize composite sync ultrasonic edm microfabrication; Adopt low conductivity working solutions such as water, emulsion or low quality concentration sodium nitrate, adopt amplitude 4V and above supply voltage, can realize composite sync ultrasonic electrolysis/electric spark composite fine processing.
Composite synchronous superaudio vibrating micro Electrolyzed Processing step is as follows:
1) according to the workpiece processing request, design fine negative electrode, process fine negative electrode profile, use fine combined electrical processing method again, utilize " inside and outside surface transformation ", " the compound translation discharge of female electrode copy ", " the online discharge grinding " modes such as " mask lithographies " that reaches to make the fine negative electrode processing end face opposite with required processing cross sectional shape;
2) fine negative electrode and workpiece can be located with guider; Also available double faced adhesive tape or special bonding agent are bonded in workpiece on the insulation workbench, by measuring microscope observation, demarcation and location;
3) require to select working solution and electrolysis electrical quantity according to microfabrication, passivation electrolyte such as mass concentration 1%～5% low concentration sodium nitrate, voltage magnitude 1V～5V are adopted in the composite fine electrolysis.Higher when requirement on machining accuracy, working (machining) efficiency requires when general, and concentration of electrolyte, voltage magnitude will be got relative low value, and power supply can be selected high frequency pulse power supply; Working (machining) efficiency is had relatively high expectations, and when requirement on machining accuracy was general, concentration of electrolyte, voltage magnitude were got high relatively value, can select dc source; When the surface requirements polishing adds man-hour, adopt passivation electrolyte such as insulation working media or low quality concentration sodium nitrate, voltage magnitude must be not less than 4V, carries out composite sync ultrasonic edm microfabrication or composite sync ultrasonic electrolysis/electric spark composite fine processing;
4) according to workpiece working (finishing) area, working depth and efficient requirement, select ultrasonic power, can between 10W～150W, regulate, the ultrasonic resonance amplitude is a certain value in 0.005mm～0.100mm scope.
5) select appropriate little pressure that contacts according to workpiece with the negative electrode contact area, can between 0.01N～3.00N, select, realize that by combination of precise fine counterweight and pressure communication device available dynamometer detects.
6) electrolyte that instils between workpiece and the negative electrode, or workpiece and negative electrode placed electrolyte, open ultrasonic vibration, frequency is adjustable continuously between 16KHz～24KHz, the manual adjustments ultrasonic vibration system reaches resonance state, atomizing will appear in negative electrode end face working solution, open the system of processing general supply, the processing beginning; The precise laser micro-displacement sensor is with real-time, high speed acquisition negative electrode supersonic frequency vibration displacement signal, be converted to the signal of telecommunication and send chopper circuit to, chopper circuit is controlled opening, breaking of power supply, guarantee that negative electrode and workpiece spacing are being provided with below the gap, open power supply and add electric machining, otherwise power cutoff carries out product removing and electrolyte and upgrades;
7) the process parameter is shown by current sensor, digital storage oscilloscope, control computer measurement, the fluctuation of machined parameters, can cause the resonance point drift, regulate ultrasonic generator exciting electric capacity automatically by the control computer and keep resonance, make the negative electrode end face obtain peak swing; Change according to electric current and process velocity, can online adjusting power up gap, electrical quantity, to keep process optimization;
8) be machined to certain depth or certain hour, system's ultrasonic vibration and Electrolyzed Processing power supply automatically shut down, and process finishing is changed working position and processed again or remove locator and take off workpiece, carries out test analysis.
This composite synchronous superaudio vibrating micro electrolytic machining method technique effect:
Micro-electrochemical machining processing is compound with frequency, synchronizing ultrasound frequency vibration, double effects with high-frequency impulse electrolysis and synchronizing ultrasound frequency vibration, can realize that low-voltage, little gap, no abrasive material, little current density, high-frequency impulse electrolysis and supersonic frequency vibrate the processing of synchronous composite fine, have at a high speed, high-precision, process characteristic cheaply; (2) but electrolysis powers up the gap on-line continuous regulates, guarantee process optimization, can give full play to the complex technique advantage; (3) supersonic frequency vibration can be avoided workpiece and the negative electrode contact discharge ablation effect to workpiece and fine negative electrode; Electrolysis loop current-limiting resistance can limit short circuit peak, and compound processing course can ultrasonic abrasive particle, can realize that negative electrode does not have the wearing and tearing microfabrication; (3), can on processing unit (plant), carry out composite synchronous superaudio vibrating micro Electrolyzed Processing, composite synchronous superaudio vibrating micro spark machined, composite synchronous superaudio vibrating micro electrolysis/spark machined and single ultrasonic microfabrication according to processing request; (4) control x, y, z workbench interlock feeding, can realize the generate formula composite fine processing of workpiece with form surface, microfabrication is shaped and depends on fine negative electrode and workpiece relative motion envelope track, can reduce fine negative electrode manufacture difficulty, improves the adaptability of the method to the difformity part processing.
Example one: square microflute composite fine Electrolyzed Processing
Dc electrolysis voltage 1V～4V, the supersonic frequency vibration resonance frequency 19.63KHz of system, ultrasonic power 60W, ultrasonic amplitude 0.05mm, abrasive material 1600 order carborundum, electrolyte is 5% sodium nitrate aqueous solution, contacts static pressure 2.0N between workpiece and the fine negative electrode.Use the square negative electrode of length of side 1mm that the electrolysis composite ultraphonic that carbide alloy YG 8 carries out different DC voltages is vibrated processing experiment, 3 minutes process times, along with machining voltage increases, the surface of the work square groove degree of depth increases gradually; When surpassing 3V, voltage increases obviously, but the voltage rising, electrolysis strengthens, and the processing locality weakens, and material is removed uniformity variation, accurate to dimension variation; When voltage reached 4V, the discharge of visible low baking temperature flower because electrolysis, electric spark acting in conjunction, processed more deeply, bigger little hole; Workpiece surface roughness Ra minimum during decomposition voltage 2V, along with decomposition voltage increases, electrolysis strengthens, elaboration products are easier in time be removed by ultrasonication, reduced anticathode lasting rubbing down, thereby the cathode abrasion amount is descended, descended more remarkable above wear extent behind the 3V.
The vibration of process Faradaic current wave form varies and supersonic frequency with frequently, synchronously, vibration near the time electric current become big, vibration away from the time reduce, be zero and turn-off district's electric current at decomposition voltage.
Machining shape has wedge angle to become the circle phenomenon, discharge fillet effect when reason has negative electrode to make, the ultrasonic rubbing down fillet effect and the micro-current electroanalysis fillet effect of fine abrasive dust, adopt littler discharge parameter to make fine negative electrode, reduce ultrasonic abrasive dust granularity or without abrasive material, reduce the decomposition voltage amplitude, can reduce wedge angle and become the circle degree.
Example two: square tapered array nick hole combined electrolysis microfabrication
Pulse power voltage magnitude 0V (corresponding single Ultrasonic machining), 1V, 2V, 4V, frequency 5000Hz, dutycycle 4: 6, the supersonic frequency vibration resonance frequency 20.32KHz of system, ultrasonic power 45W, ultrasonic amplitude 0.03mm, electrolyte is 5% sodium nitrate aqueous solution, in sodium nitrate aqueous solution, add boron carbide W10 micro mist, contact static pressure 1.60N, 3 minutes process times between workpiece and the fine negative electrode.
The composite ultraphonic frequency vibration micro-electrochemical machining side's of processing taper nick hole degree of depth and efficient are apparently higher than single Ultrasonic machining, voltage increases, working (machining) efficiency increases, increase to some extent owing to the micro-electrochemical machining machining gap simultaneously, the pit planar dimension also enlarges to some extent, wherein 2V voltage electrolysis Compound Machining precision and surface quality the best.
During the side's of processing taper nick hole, the decomposition voltage that the two-channel digital storage oscillograph is gathered, Faradaic current waveform corresponding current sensor output voltage signal, it is synchronous that electrolysis and pulse add piezoelectric voltage, powering up between pulse area, high-frequency harmonic appears in current signal, its frequency changes corresponding to the supersonic frequency of pole clearance, and first-harmonic is the electrolysis waveform, and spike is a low baking temperature flower discharge waveform, promptly when taper nick in processing side's is cheated, micro-electrochemical machining and fine electric spark synthesis are arranged.
Example three: the little gear electrolysis of carbide alloy YBD151 Compound Machining
Pulse power voltage magnitude 2V, frequency 5000Hz, dutycycle 4: 6, the supersonic frequency vibration resonance frequency 20.12KHz of system, ultrasonic power 45W, ultrasonic amplitude 0.03mm, workpiece is 1.60N with the static pressure that contacts between the fine negative electrode, electrolyte is 5% sodium nitrate aqueous solution, adds boron carbide W10 micro mist in sodium nitrate aqueous solution, 3 minutes process times.
With the fine negative electrode in internal tooth form hole is arranged, jacking processing modulus 0.25mm on the high-wearing feature matrix composite anti-wear coating carbide alloy YBD151 material is being arranged, the little gear of the involute that pressure angle is 20 °, little gear thickness 0.30mm of processing, the involute profile form accuracy can reach ± 0.001mm, and tooth-face roughness Ra is 0.16 μ m.
Claims (4)
1. composite synchronous superaudio vibrating micro electrolytic machining method, at first according to the workpiece processing request, process fine negative electrode profile, and make the fine negative electrode processing end face opposite with the required cross sectional shape of workpiece with the combination special processing technology, supersonic frequency vibration radiation head connects with fine cathode end with screw thread, and the connection place is coupled with vaseline or high density vegetable fat; By guider fine negative electrode and workpiece are located again, perhaps workpiece is bonded on the insulation workbench,, use the insulation film electricity to isolate between workbench and the workpiece by measuring microscope observation, demarcation and location; Then, artificial instillation low conductivity passivation electrolyte between workpiece and fine negative electrode, or the processing district placed electrolyte fully, open the ultrasonic generator power supply, produce frequency and the continuously adjustable supersonic frequency alternate electrical signal of power by ultrasonic generator, piezoelectric transducer and supersonic frequency vibration radiation head amplify the same frequency supersonic frequency mechanical oscillation that are converted to fine negative electrode end face with this supersonic frequency alternate electrical signal, it is characterized in that:
Automatically regulate the exciting electric capacity of ultrasonic generator by manual adjustment or control computer, change supersonic frequency alternate electrical signal frequency of oscillation, the excitation ultrasonic vibration system is realized resonance, this moment, the negative electrode end face produced the supersonic frequency vibration, atomizing will appear in cathode end electrolyte, utilize the precise fine counterweight, remain by the minute-pressure apparatus for adjusting force that 0.01N～3.00N minute-pressure power contacts between workpiece and the fine negative electrode, open the electrolysis ring current, voltage magnitude 1V～5V, begin processing,, drive workpiece and the workbench microdisplacement that makes progress by linker pressure oil along with working depth increases;
In the process, undertaken dynamically measuring fast by the supersonic frequency vibration position of laser micro-displacement sensor to fine negative electrode, and be converted into the signal of telecommunication that comprises ultrasonic vibration frequency, phase place, amplitude information, being sent to chopper circuit again handles, changes, produce and cut off and the chopping signal of opening electrolysis power, the electrolysis loop is opened or is turn-offed, realize electrolysis power up with the vibration of negative electrode supersonic frequency accurately with frequently, synchronously;
By current sensor Faradaic current is converted to voltage signal, show, measure, store by digital storage oscilloscope, with two passages of digital storage oscilloscope, the synchronization accuracy and the situation of change of observation decomposition voltage and Faradaic current, can manually carry out parametric optimization and adjusting to the composite fine electrochemical machining process, the signal of telecommunication can be sent in the control computer by serial port and show, handles, and can carry out the automatic adjusting of ultrasound parameter and electrical quantity, keeps process optimization.
2. composite synchronous superaudio vibrating micro electrolytic machining method according to claim 1, it is characterized in that: described electrolyte is the sodium nitrate solution of mass concentration 1%～5%, it is the supersonic frequency alternate electrical signal of 16KHz～24KHz that ultrasonic generator produces frequency range, ultrasonic power is 10W～150W, and the amplitude of the supersonic frequency mechanical oscillation of fine negative electrode end face is 0.005mm～0.100mm.
3. composite synchronous superaudio vibrating micro electrolytic machining method according to claim 2, it is characterized in that: decomposition voltage is direct current 4V, system's supersonic frequency vibration resonance frequency is 19.63KHz, ultrasonic power 60W, ultrasonic amplitude 0.05mm, workpiece is 2.0N with the static pressure that contacts between the fine negative electrode, electrolyte is 5% sodium nitrate aqueous solution, in sodium nitrate aqueous solution, add 1600 order silicon carbide abrasives, 3 minutes process times.
4. composite synchronous superaudio vibrating micro electrolytic machining method according to claim 2, it is characterized in that: decomposition voltage is a pulse voltage, amplitude 2V, frequency 5000Hz, dutycycle 4: 6, the supersonic frequency vibration resonance frequency 20.12KHz of system, ultrasonic power 45W, ultrasonic amplitude 0.03mm, workpiece is 1.60N with the static pressure that contacts between the fine negative electrode, electrolyte is 5% sodium nitrate aqueous solution, adds boron carbide W10 micro mist in sodium nitrate aqueous solution, 3 minutes process times.
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