CN101324471A - Method for testing transient cutting temperature using multi-layer compound film temperature sensor - Google Patents
Method for testing transient cutting temperature using multi-layer compound film temperature sensor Download PDFInfo
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Abstract
The invention relates to a method for detecting transient cutting temperature by using a multilayer composite thin-film temperature sensor, and belongs to the field of advanced manufacture and cutting technology, particularly to the field of cutting temperature detection method. The method using the multilayer composite thin-film temperature sensor comprises the following steps: carrying out static and dynamic calibration of the multilayer composite thin-film temperature sensor and carrying out cold-end temperature compensation for a transient cutting temperature; installing the multilayer composite thin-film temperature sensor; and depositing a protection thin film on a high-speed steel or hard alloy cutter body with an insulation film by RF reactive unbalanced magnetron sputtering enhanced by a microwave ECR plasma source. During detection of the transient cutting temperature, the relationship characteristic curve of thermoelectric potential and hot-end temperature of the multilayer composite thin-film temperature sensor obtained by static calibration is inputted to system test software to carry out cold-end temperature compensation. The sensor has the advantages of small heat capacity of hot junction and good fast response characteristics, and can effectively solve the problem in detecting transient cutting temperature in the metal cutting process.
Description
Technical field
The invention belongs to advanced the manufacturing and cutting technology field, particularly cutting temperature method of testing field.
Background technology
Cutting temperature is unusual The key factor in the metal cutting.Especially in high-speed cutting, cutting temperature especially perplexs people's a key factor.Monitoring in real time, and reflect that accurately the temperature variation in the working angles is necessary.At present, domestic and international application thermometric method in working angles has cutter/worker's natural thermocouple method, artificial thermocouple method, half artificial thermocouple method, light and heat radiation method etc.Cutter/worker's natural thermocouple method is simple to operate, can only measure the medial temperature of working angles, because the natural thermocouple method dynamic response is slow, can not satisfy the quick temperature measurement requirement.The thermal cross of artificial thermocouple method and point of a knife be distance more or less, and the thermograde at point of a knife place is bigger, thereby the temperature of temperature of being surveyed and workpiece itself differs far away.The hot thermocouple inertia of this structure is bigger simultaneously, still is difficult to satisfy the test needs of transient cutting temp of cutting.Light and heat radiation temperature measurement method has response speed faster, but this method can only be used for the dry state cutting, the temperature that records is not real cutting temperature, just reflect the temperature that heat in metal cutting produced of importing the part processing surface into indirectly approx, be difficult to the accurately transient cutting temp of cutting of reflection cutting zone.The designed thermometric cutter head of film thermocouple temperature sensor of the quick-fried material cutting temperature test of being used to of this seminar research is for dividing blade type, its in metal cutting process up and down knife face under metal function, easily produce and separate and destroyed.On-insulated its cutting temperature that can not be used for conductive materials such as metal that causes between designed temperature sensor and lathe, workpiece is tested.The multi-arc ion coating method that adopts NiCr/NiSi film and the target composition apart from each other made.In sum, existing cutting temperature measurement method can only be measured the medial temperature and the distribution situation of temperature in smear metal, cutter and workpiece of cutting zone, is difficult to accurately to determine near the actual temperature of the each point cutting zone and the transient changing process of cutting zone temperature is monitored in real time.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the difficulty that above-mentioned cutting temperature method of testing exists, utilize non-equilibrium microwave plasma magnetron sputtering on high-speed steel or wimet cutter hub, to make a kind of multi-layer compound film temperature sensor, static state and dynamic calibration through multi-layer compound film thermopair cutting temperature sensor, make it in temperature-measuring range, have favorable linearity, and dynamic response is fast, and time constant is about 0.8ms.Adopt the method for multi-layer compound film temperature sensor testing transient cutting temperature that near the transient cutting temp of cutting cutting edge in the aluminium alloy working angles is tested, the bond strength of laminated film and high speed steel substrate reaches pre-provisioning request.Invented a kind of integrate cutting, thermometric can be to the monitoring in real time of cutting zone actual temperature and the accurate cutting temperature method of testing of reflection cutting zone temperature variation, can solve in the metal cutting transient cutting temp of cutting test problem in the especially high-speed cutting.
The technical solution used in the present invention is to adopt the method for multi-layer compound film temperature sensor testing transient cutting temperature to use the multi-layer compound film temperature sensor, carry out quiet, the dynamic calibration of multi-layer compound film temperature sensor, transient cutting temp of cutting adopts the cold junction compensation mode; Concrete steps are as follows:
The first step is carried out the installation of multi-layer compound film temperature sensor:
1) has SiO
2 Dielectric film 2 utilizes the microwave ECR plasma source to strengthen the radio frequency reaction non-balance magnetically controlled sputter and deposits Si on the high-speed steel of NiCr film 3, NiSi film 4 and groove C or the wimet cutter hub 1
3N
4Protective film 5 constitutes multi-layer compound film temperature sensor I;
2) with an end and membrane electrode 3 bondings of high temperature resistant conductive silver glue 6, with NiSi thermocouple wire 8 one ends and membrane electrode 4 bondings of high temperature resistant conductive silver glue 6 ' with 0.2mm with the NiCr thermocouple wire 7 of 0.2mm;
3) other end of the other end of NiCr thermocouple wire 7 and NiSi thermocouple wire 8 passes groove C respectively, then, and groove C insulating gel 9 embeddings;
4) at the knife bar 10 cannelure F that goes to the bottom out, on knife bar 10, bore lateral aperture D, upright opening E, uropore G in order respectively, and remove burr;
5) add insulating sheath for the extension line of NiCr thermocouple wire 7 and NiSi thermocouple wire 8 after, draw after making its lateral aperture D that passes knife bar 10 bottoms, upright opening E, cannelure F and uropore G;
When 6) multi-layer compound film temperature sensor I being installed, make cutter hub 1 bottom surface and knife bar 10 insulation with insulation edge bearing 12; At cutter hub 1 other four side fixed insulation pads 11, clamping screw 13 and pressing plate 14 are fixing with cutter hub 1 by insulation spacer 11; With two screws 17 baffle plate 16 is fixed on the knife bar 10;
7) workpiece 21 is installed on the scroll chuck 19 by insulation spacer, when workpiece is longer, adopts top 22 axial restraints of insulation;
Second step was carried out static demarcating to multi-layer compound film temperature sensor I in 0 ℃～600 ℃ scopes, deposit on high-speed steel or wimet cutter hub 1 in the NiCr/NiSi thermopair film, at 16*16mm
2Be coated with the NiCr/NiSi film thermocouple with stove respectively on the quartz glass plate, use film thermocouple, whole temperature calibration scope is divided into three sections, 0 ℃～100 ℃, adopt standard water tank as demarcating; 100 ℃～300 ℃ employing standard oil tanks; 300 ℃～600 ℃ are adopted horizontal electric thermo-couple test furnace; Timing signal in tank and oil groove, the pyrometer fire-end temperature is to control with standard platinum resistance; And at the assay furnace timing signal, hot-side temperature platinum rhodium
10-platinum thermocouple control according to the size of calibrating point temperature, is successively put into the same temperature field of tank, oil groove or assay furnace to the measuring junction of being demarcated thermopair and standard couple, and their cold junction is placed 0 ℃ Freezing point device; Regulate intelligent high accuracy temperature control instrument and make temperature reach a calibrating point temperature, treat temperature constant after, measure the thermoelectrical potential value of tested thermopair with the multifunctional digital multimeter, obtain the relation property curve of multi-layer compound film temperature sensor thermoelectrical potential and hot-side temperature;
The 3rd step was carried out dynamic calibration to multi-layer compound film temperature sensor I, send the laser pulse that a branch of duration is 20ns with laser pulse generator, vertical irradiation is to the contact B of film thermocouple, film thermocouple is experienced temperature rise and is produced voltage signal output, through amplifier, after the laser pulse response electromotive force of film thermocouple is amplified by ratio, use the data collecting card acquired signal, send into computing machine and carry out data processing with the system test software that VC works out, analyze and demonstration, obtain the step response curve of temperature test system, by computing time constant be about 0.8 millisecond;
The 4th step was carried out transient cutting temp of cutting when test, the multi-layer compound film temperature sensor thermoelectrical potential that static demarcating is obtained and the relation property curve input system testing software of hot-side temperature; The cold junction compensation of multi-layer compound film temperature sensing is experienced the cold junction environment temperature with AD590 integrated temperature sensing chip, introduces bias voltage loop, R in the circuit
1And R
2Value be the Seebeck coefficient of corresponding film thermocouple.
Remarkable result of the present invention is owing to adopt the multi-layer compound film temperature sensor, and the hot junction thermal capacity of the film thermocouple temperature sensor of thermometric cutter head is little, has quick features of response.And temperature probe embeds the main cutting edge place, therefore can reflect variation of temperature process in 0～600 ℃ of scope of cutting zone in Millisecond, has effectively solved the test problem of transient cutting temp of cutting in the metal cutting process.
Description of drawings
Accompanying drawing 1 is a multi-layer compound film temperature sensor I structural drawing, and accompanying drawing 2 is the thermopair film and the location drawing of dielectric film on the knife face of back.Wherein, 1-high-speed steel or wimet cutter hub, 2-SiO
2Dielectric film, 3-NiCr film, 4-NiSi film, 5-Si3N4 protective seam, the high temperature resistant conductive silver glue of 6-, 6 '-high temperature resistant conductive silver glue, 7-NiCr compensating wire, 8-NiSi compensating wire, 9-insulating gel, C-groove, B-film thermocouple hot junction.
Accompanying drawing 5 is multi-layer compound film temperature sensor dynamic calibration curve maps.
Accompanying drawing 6 is workpiece and machine insulation installation diagram.18-lathe wherein, the 19-scroll chuck, the 20-insulation spacer, the 21-workpiece, the 22-insulation is top;
Embodiment
Below in conjunction with technical scheme and accompanying drawing, describe specific implementation process of the present invention in detail.The test macro that the present invention adopts comprises multi-layer compound film temperature sensor, cold junction compensation and signal conditioner, data collecting card, computing machine and testing software; The cutting temperature signal converts 0～5v voltage to after by signal conditioner, through data collecting card, enters computing machine, finishes data processing, data storage, data-switching and data presentation with the software of establishment voluntarily.Specific implementation process is as follows:
1) will make SiO
2Dielectric film 2, the high-speed steel of NiCr film 3, NiSi film 4 or wimet cutter hub 1 are put into alcohol and are used ultrasonic cleaning 10 minutes, after drying up with nitrogen, put into vacuum chamber.Open slowly to open behind the mechanical pump and take out valve in advance and slightly vacuumize, open molecular pump when vacuum tightness reaches 17Pa, and close and take out valve in advance, the molecular pump rotating speed begins to increase, and until 24000 rev/mins, vacuum chamber bled reaches 5.0 * 10 up to vacuum tightness
-3Below the Pa.Regulate matching capacitance, self-bias is reduced to-90V～-80V between.Feed the N of certain flow
2Gas is opened the radio frequency power source that is added on the target, regulates matching capacitance, makes incident power P
Go into=250W～350W, reflective power P
Instead≤ 5W.On target, form self-bias and be-340V～-370V, at this moment can see the glow discharge phenomenon that vacuum chamber is interior, Ar
+The ion bombarded silicon target, silicon atom that sputters or atomic group rush at cutter hub 1, at cutter hub 1 back knife face and rake face and N
2React and generate Si
3N
4Thin film deposition forms Si on cutter hub 1 surface
3N
4Diaphragm 5, as shown in Figure 1.According to the sputtering sedimentation time of setting, microwave source can automatically reset, and plated film finishes.Close substrate radio frequency source, silicon target radio frequency source, magnetic field power supply, vacuum meter, molecular pump, N successively
2Gas and Ar gas, push-pull valve, shutdown valve.Molecular pump remains in operation under inertia and damping action, treats to close its power supply and circulating water cooling system after it stops.Workpiece is with vacuum chamber cooling taking-up in about 2 hours.
2) with NiCr compensating wire 7 one ends and membrane electrode 3 bondings of high temperature resistant conductive silver glue 6, with NiSi compensating wire 8 one ends and membrane electrode 4 bondings of high temperature resistant conductive silver glue 6 ' with 0.2mm with 0.2mm.The other end of the other end of NiCr compensating wire 7 and NiSi compensating wire 8 passes groove C respectively, groove C insulating gel 9 embeddings; In model is that knife bar 10 bottom surfaces of S45W25-4K16 are opened cannelure F, bores lateral aperture D, upright opening E, uropore G more in order respectively, removes burr; After adding insulating sheath for the extension line of NiCr compensating wire 7 and NiSi compensating wire 8, draw after making its lateral aperture D that passes knife bar 10 bottoms, upright opening E, cannelure F and uropore G; When multi-layer compound film temperature sensor I is installed, make cutter hub 1 and knife bar 10 insulation with insulation spacer 11 and insulation edge bearing 12; Cutter hub 1 usefulness clamping screw 13 and pressing plate 14 are fixing; With two screws 17 baffle plate 16 is fixed on the knife bar 10;
3) to multi-layer compound film temperature sensor static demarcating, with the method for rf magnetron sputtering on high-speed steel cutter hub 1 in the deposit film thermopair film, on the 16*16mm quartz glass plate, be coated with the NiCr/NiSi film thermocouple with stove respectively, as the demarcation film thermocouple.Concrete calibration process is as follows: whole temperature calibration scope is divided into three sections, 0 ℃～100 ℃, adopts HWS-I type standard water tank; 100 ℃～300 ℃ are adopted HWY-II type standard oil tank; 300 ℃～600 ℃ are adopted the horizontal electric thermo-couple test furnace of YG-3 type.Timing signal in tank and oil groove, the pyrometer fire-end temperature is to control with standard platinum resistance; And at the assay furnace timing signal, hot-side temperature platinum rhodium
10The control of one platinum thermocouple.According to the size of calibration point temperature, the measuring junction of being demarcated thin film thermoelectric even summation standard couple is successively put into the same temperature of tank, oil groove or assay furnace and located, and their cold junction is placed 0 ℃ Freezing point device.Regulating YG-ZL-PID-II type intelligence high accuracy temperature control instrument makes temperature reach the calibration point temperature, get a calibration point for per 50 ℃, after treating temperature constant, measure the thermoelectrical potential value of tested thermopair with HP34401A type multifunctional digital multimeter, obtain the thermoelectrical potential that film thermocouple produces and the relation property curve E=f (t) of hot-side temperature.
4) to multi-layer compound film temperature sensor dynamic calibration, multi-layer compound film temperature sensor dynamic calibration system theory diagram as shown in Figure 4.When introducing multiplying arrangement and demonstration, recording unit in test macro, the inverse that requires each link bandwidth is all less than order of magnitude of film thermocouple timeconstant.The PS2F type laser pulse generator that timing signal selects for use German LAMBDAPHYSIK company to produce, maximum output energy is 30W, and the individual pulse energy can reach 0.3J, and pulse width is adjustable in the 2-50ns scope.Send the laser pulse that a duration is 20ns by laser pulse generator, vertical irradiation is to the hot junction of film thermocouple, film surface is at the energy of transient absorption laser, produce TRANSIENT HIGH TEMPERATURE, and with heat exchange pattern to the film internal delivery, make thermopair experience temperature rise and produce voltage signal output.Through amplifier, after the laser pulse of film thermocouple response electromotive force is amplified by ratio, with 200KHz capture card acquired signal, send into computing machine with the dynamic cutting temperature and the cutting force testing system software of VC establishment show, analysis, data processing.Can draw the step response curve of test macro.Calibration curve as shown in Figure 5.The multi-layer compound film temperature sensor belongs to first-order system, according to the response theory of first-order system to step signal, the 63.2% needed time that the output valve of sensor reaches steady-state value is the timeconstant of system, and the timeconstant that can be got system by curve is about 0.8ms.The cold junction compensation of multi-layer compound film temperature sensing is experienced the cold junction environment temperature with AD590 integrated temperature sensing chip, introduces bias voltage loop, R in the circuit
1And R
2Value be the Seebeck coefficient of corresponding film thermocouple.Compensating circuit is seen accompanying drawing seven.
5) the cutting test cutting test is carried out at the C620-A engine lathe, and workpiece 21 is installed on the scroll chuck 19 by insulation spacer 20, when workpiece is longer, adopts top 22 axial restraints of insulation, sees accompanying drawing six.Cutting material is the 2A12T4 aluminium alloy, diameter of work
The cutting parameter of multi-layer compound film temperature probe is respectively: anterior angle γ
0=10 °, relief angle α
0=12 °, front clearance α
0'=4 °, tool cutting edge angle K
r=75 °, auxiliary angle K
r'=15 °, cutting edge inclination λ
s=-4 °; Test condition is respectively rotation speed n=200r/min, cutting depth a
p=1mm changes amount of feeding f (mm/r).Its test findings such as following table:
The NiCr/NiSi multi-layer compound film temperature sensor of development has favorable linearity, and dynamic response is fast, and time constant is at 0.8ms; The multi-layer compound film temperature sensor is integrated to be measured and the cutting function, but near the cutting zone transient cutting temp of cutting on-line measurement cutting edge; The NiCr/NiSi thin-film electro that microwave plasma strengthens the preparation of non-equilibrium reaction magnetocontrol sputtering method extremely each constituent element of alloy near target; and have characteristics such as fine and close even, smooth smooth and continuity is good; the protection of the outer deposition of film thermocouple high hardness spray coating; improved the serviceable life of sensor, good economy performance.The bond strength of laminated film and high-speed steel and hard alloy substrate reaches pre-provisioning request; Experimental result shows that the method for multi-layer compound film temperature sensor testing transient cutting temperature can satisfy the test request of transient cutting temp of cutting in the working angles.
Claims (1)
1. method that adopts multi-layer compound film temperature sensor testing transient cutting temperature, it is characterized in that, adopt the multi-layer compound film temperature sensor, carry out quiet, the dynamic calibration of multi-layer compound film temperature sensor, adopt AD590 cold junction compensation mode to finish the transient cutting temp of cutting test, concrete steps are as follows:
The first step is carried out the installation of multi-layer compound film temperature sensor:
1), has SiO
2Dielectric film (2) utilizes the microwave ECR plasma source to strengthen the radio frequency reaction non-balance magnetically controlled sputter and deposits Si on the high-speed steel of NiCri film (3), NiSi film (4) and groove (C) or the wimet cutter hub (1)
3N
4Protective film (5) constitutes multi-layer compound film temperature sensor (I);
2), with NiCr compensating wire (7) one ends and membrane electrode (3) bonding of high temperature resistant conductive silver glue (6), with NiSi compensating wire (8) one ends and membrane electrode (4) bonding of high temperature resistant conductive silver glue (6 ') with 0.2mm with 0.2mm;
3), the other end of NiCr compensating wire (7) and the other end of NiSi compensating wire (8) pass groove (C) respectively, afterwards, groove C is with insulating gel (9) embedding;
4), at knife bar (10) cannelure (F) of going to the bottom out, on knife bar (10), bore lateral aperture (D), upright opening (E), uropore (G) in order respectively, and remove burr;
5), add insulating sheath for the extension line of NiCr compensating wire (7) and NiSi compensating wire (8) after, draw after making its lateral aperture (D) that passes knife bar (10) bottom, upright opening (E), cannelure (F) and uropore (G);
6), when multi-layer compound film temperature sensor (I) is installed, make cutter hub (1) bottom surface and knife bar (10) insulation with insulation edge bearing (12); At other side fixed insulation pads (11) of cutter hub (1), clamping screw (13) and pressing plate (14) are fixing with cutter hub (1) by insulation spacer (11); With two screws (17) baffle plate (16) is fixed on the knife bar (10);
7), workpiece (21) is installed on the scroll chuck (19) by insulation spacer (20), when workpiece is longer, adopts insulation top (22) axial restraint;
Second step was carried out static demarcating to multi-layer compound film temperature sensor (I) in 0 ℃ ~ 600 ℃ scopes, in high-speed steel or the last deposition of wimet cutter hub (1) NiCr/NiSi thermopair film, at 16 * 16mm
2Be coated with the NiCr/NiSi film thermocouple with stove respectively on the quartz glass plate, use film thermocouple, whole temperature calibration scope is divided into three sections, 0 ℃～100 ℃, adopt standard water tank as demarcating; 100 ℃～300 ℃ employing standard oil tanks; 300 ℃～600 ℃ are adopted horizontal electric thermo-couple test furnace; Timing signal in tank and oil groove, the pyrometer fire-end temperature is controlled with standard platinum resistance; At the assay furnace timing signal, hot-side temperature platinum rhodium
10-platinum thermocouple control according to the size of calibrating point temperature, is successively put into the same temperature field of tank, oil groove or assay furnace to the measuring junction of being demarcated thermopair and standard couple, and their cold junction is placed 0 ℃ Freezing point device; Regulate intelligent high accuracy temperature control instrument and make temperature reach a calibrating point temperature, treat temperature constant after, measure the thermoelectrical potential value of tested thermopair with the multifunctional digital multimeter, obtain the relation property curve of multi-layer compound film temperature sensor thermoelectrical potential and hot-side temperature;
The 3rd step was carried out dynamic calibration to multi-layer compound film temperature sensor (I), send the laser pulse that a branch of duration is 20ns with laser pulse generator, vertical irradiation is to the contact (B) of film thermocouple, film thermocouple is experienced temperature rise and is produced voltage signal output, through amplifier, after the laser pulse response electromotive force of film thermocouple is amplified by ratio, use the data collecting card acquired signal, send into computing machine and carry out data processing with the system test software that VC works out, analyze and demonstration, obtain the step response curve of temperature test system, by computing time constant be about 0.8 millisecond;
The 4th step was carried out transient cutting temp of cutting when test, the multi-layer compound film temperature sensor thermoelectrical potential that static demarcating is obtained and the relation property curve input system testing software of hot-side temperature; The cold junction compensation of multi-layer compound film temperature sensing is experienced the cold junction environment temperature with AD590 integrated temperature sensing chip, introduces bias voltage loop, R in the circuit
1And R
2Value be the Seebeck coefficient of corresponding film thermocouple.
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