CN101318822A - Silicon nitride composite ceramics heater - Google Patents
Silicon nitride composite ceramics heater Download PDFInfo
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- CN101318822A CN101318822A CNA2008100316704A CN200810031670A CN101318822A CN 101318822 A CN101318822 A CN 101318822A CN A2008100316704 A CNA2008100316704 A CN A2008100316704A CN 200810031670 A CN200810031670 A CN 200810031670A CN 101318822 A CN101318822 A CN 101318822A
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- silicon nitride
- nitride composite
- composite ceramics
- composite ceramic
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Abstract
The invention discloses a silicon nitride composite ceramic heating element which is prepared by heat pressing and sintering a heating source and a silicon nitride composite ceramic heating matrix, wherein, the heating source is a tungsten alloy wire or a tungsten alloy printing conductive film, and the silicon nitride composite ceramic heating matrix comprises the following compositions by weight percentage: 71 to 87.05 percent of Si3N4, 0.75 to 6 percent of MgAl2O4, 3 to 10 percent of Y2O3, 0.1 to 2 percent of Ta2O5, 0.1 to 4 percent of La2o3, 1.5 to 6 percent of AlN, 5 to 12 percent of BN, and 0.1 to 5 percent of BaO. The product has better thermal conductivity, the coefficient of the thermal conductivity improved by 11 to 17 percent, better high temperature resistance and thermal shock resistance, good corrosion resistance, high intensity, long service life and safe and reliable use.
Description
Technical field
The present invention relates to a kind of silicon nitride composite ceramics heater.
Background technology
99113534.2 disclose a kind of silicon nitride heat generating body and manufacture method thereof, adopt silicon nitride as the heating body, with tungsten filament as pyrotoxin, form through hot pressed sintering, the prescription following (weight percentage) of its heating body: silicon nitride 82%～93%, aluminium sesquioxide 0.1%～5%, yttrium oxide 4%～8%, aluminium nitride 3%～5%.This heater heat conductivility is also not too high, and the thermal efficiency remains further to be improved; The point temperature range is also not too wide, and thermal shock performance remains further to be improved.
Summary of the invention
The object of the present invention is to provide the better silicon nitride composite ceramics heater of a kind of heating element heat conductivility.
Technical scheme of the present invention is: formed through hot pressed sintering by pyrotoxin and silicon nitride composite ceramics heating matrix, described pyrotoxin is tungsten alloy filament or tungsten alloy printing conductive film, and described silicon nitride composite ceramics heating matrix is made up of following component and percetage by weight: Si
3N
4: 71～87.05%, MgAl
2O
4: 0.75～6%, Y
2O
3: 3～10%, Ta
2O
5: 0.1～2%, La
2O
3: 0.1～4%, AlN:1.5～6%, BN:5～12%, BaO:0.1～5%.
The present invention compared with prior art, product thermal conductivity of the present invention is better, thermal conductivity can improve 11～17%, and is high temperature resistant, thermal shock resistance is better, and is corrosion-resistant, the intensity height, the life-span is long, and is safe and reliable.
Embodiment
Embodiment 1-4:
(1) preparation of raw material: the amount of pressing table 1 is than claiming batching, through vibromill ball milling 8 hours, discharging, sieve, constant temperature baking and wax makes gatch, sealing is preserved.
(2) biscuit preparation: press heating element shape requirement processing metal mould, adopt injection moulding to prepare biscuit.
(2) sintering: the biscuit dress mould for preparing, shove charge, dewaxing, hot pressing under the flowing nitrogen protection at the uniform velocity heat up, and firing temperature is 1720 ± 3 ℃; Pressure also slowly increases simultaneously, and pressure is controlled at 200-250kg/cm
2Reach constant temperature behind the firing temperature, constant voltage 1 hour, outage blowing out when lowering the temperature pressurize to 1550 ℃ subsequently.The demoulding of coming out of the stove in 2.5 hours to 3 hours after the outage blowing out, subsequent processing is advanced in initial survey, censorship.
The thermal conductivity that the product of four embodiment is measured is listed in the table 1
Four embodiment of table 1 generate heat body prescription (wt%) and product thermal conductivity
| Component | Embodiment 1 | Embodiment 2 | Embodiment 3 | Embodiment 4 |
| Si 3N 4 | 84.5 | 74.25 | 73 | 79.1 |
| MgAl 2O 4 | 0.9 | 4 | 3 | 1 |
| Y 2O 3 | 3.2 | 7 | 10 | 4.5 |
| Ta 2O 5 | 0.3 | 1 | 0.5 | 1.5 |
| La 2O 3 | 3 | 0.75 | 1 | 0.5 |
| AlN | 1.8 | 4 | 3.5 | 5.4 |
| BN | 5.7 | 8 | 6 | 6.5 |
| BaO | 0.6 | 1 | 3 | 1.5 |
| Thermal conductivity factor (Wm -1K -1) | 9.226 | 11.32 | 11.07 | 10.38 |
Illustrate: the product thermal conductivity adopts the test of HOT DISK thermal constant analyser, 25 ℃ of test room temperatures.
Claims (1)
1. silicon nitride composite ceramics heater, it is characterized in that, formed through hot pressed sintering by pyrotoxin and silicon nitride composite ceramics heating matrix, described pyrotoxin is tungsten alloy filament or tungsten alloy printing conductive film, and described silicon nitride composite ceramics heating matrix is made up of following component and percetage by weight: Si
3N
4: 71～87.05%, MgAl
2O
4: 0.75～6%, Y
2O
3: 3～10%, Ta
2O
5: 0.1～2%, La
2O
3: 0.1～4%, AlN:1.5～6%, BN:5～12%, BaO:0.1～5%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100316704A CN101318822B (en) | 2008-07-04 | 2008-07-04 | Silicon nitride composite ceramics heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100316704A CN101318822B (en) | 2008-07-04 | 2008-07-04 | Silicon nitride composite ceramics heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101318822A true CN101318822A (en) | 2008-12-10 |
| CN101318822B CN101318822B (en) | 2010-09-01 |
Family
ID=40179130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100316704A Expired - Fee Related CN101318822B (en) | 2008-07-04 | 2008-07-04 | Silicon nitride composite ceramics heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101318822B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102170716A (en) * | 2010-12-09 | 2011-08-31 | 江苏华盛精细陶瓷科技有限公司 | Method for manufacturing silicon nitride heating body |
| CN103024954A (en) * | 2012-12-10 | 2013-04-03 | 冷水江市明玉陶瓷工具有限责任公司 | Silicon nitride composite ceramic heating element materials and preparation method thereof |
| CN103096528A (en) * | 2010-12-09 | 2013-05-08 | 江苏华盛精细陶瓷科技有限公司 | Preparation method for silicon nitride heating body |
| CN101754497B (en) * | 2010-01-20 | 2013-09-04 | 贺连英 | Silicon nitride heat generator and manufacturing method thereof |
| CN104072150A (en) * | 2014-06-12 | 2014-10-01 | 安徽安尔达机电有限公司 | Preparation process of silicon nitride ceramic material for water seal of water pump |
| CN105884563A (en) * | 2014-09-20 | 2016-08-24 | 盖德新材料科技南通有限公司 | Preparation method of special ceramic ignition device |
| CN106747469A (en) * | 2016-12-27 | 2017-05-31 | 郑州源冉生物技术有限公司 | A kind of high-performance silicon nitride ceramic material and preparation method thereof |
| US9781774B1 (en) | 2014-08-05 | 2017-10-03 | Spex Sample Prep, Llc | Heating element and fusion furnace comprising same |
| CN107277946A (en) * | 2017-07-19 | 2017-10-20 | 合肥铭佑高温技术有限公司 | A kind of refractory ceramics heating plate |
| CN108530080A (en) * | 2018-06-22 | 2018-09-14 | 郑州秉同立智电子科技有限公司 | A kind of high temperature ceramic material and preparation method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997048659A1 (en) * | 1996-06-06 | 1997-12-24 | The Dow Chemical Company | METHOD OF MAKING SiAlON BODIES, MATERIAL FOR FORMING SiAlON, AND SiAlON BODIES FORMED THEREFROM |
| CN1849017A (en) * | 2005-04-05 | 2006-10-18 | 郜长福 | Silicon nitride heating body and its pressureless lower temperature sintering producing method |
| CN100488916C (en) * | 2007-03-09 | 2009-05-20 | 西南科技大学 | Ceramics containing powder body of cubic silicon nitride and preparation method |
-
2008
- 2008-07-04 CN CN2008100316704A patent/CN101318822B/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101754497B (en) * | 2010-01-20 | 2013-09-04 | 贺连英 | Silicon nitride heat generator and manufacturing method thereof |
| CN103096528B (en) * | 2010-12-09 | 2015-04-08 | 江苏金盛陶瓷科技有限公司 | Preparation method for silicon nitride heating body |
| CN103096528A (en) * | 2010-12-09 | 2013-05-08 | 江苏华盛精细陶瓷科技有限公司 | Preparation method for silicon nitride heating body |
| CN102170716B (en) * | 2010-12-09 | 2013-01-30 | 江苏华盛精细陶瓷科技有限公司 | Method for manufacturing silicon nitride heating body |
| CN102170716A (en) * | 2010-12-09 | 2011-08-31 | 江苏华盛精细陶瓷科技有限公司 | Method for manufacturing silicon nitride heating body |
| CN103024954A (en) * | 2012-12-10 | 2013-04-03 | 冷水江市明玉陶瓷工具有限责任公司 | Silicon nitride composite ceramic heating element materials and preparation method thereof |
| CN104072150A (en) * | 2014-06-12 | 2014-10-01 | 安徽安尔达机电有限公司 | Preparation process of silicon nitride ceramic material for water seal of water pump |
| CN104072150B (en) * | 2014-06-12 | 2019-07-02 | 安徽安尔达机电有限公司 | A kind of preparation process of water pump seal silicon nitride ceramic material |
| US9781774B1 (en) | 2014-08-05 | 2017-10-03 | Spex Sample Prep, Llc | Heating element and fusion furnace comprising same |
| CN105884563A (en) * | 2014-09-20 | 2016-08-24 | 盖德新材料科技南通有限公司 | Preparation method of special ceramic ignition device |
| CN106747469A (en) * | 2016-12-27 | 2017-05-31 | 郑州源冉生物技术有限公司 | A kind of high-performance silicon nitride ceramic material and preparation method thereof |
| CN107277946A (en) * | 2017-07-19 | 2017-10-20 | 合肥铭佑高温技术有限公司 | A kind of refractory ceramics heating plate |
| CN108530080A (en) * | 2018-06-22 | 2018-09-14 | 郑州秉同立智电子科技有限公司 | A kind of high temperature ceramic material and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101318822B (en) | 2010-09-01 |
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Granted publication date: 20100901 Termination date: 20170704 |