CN101284263A - Liquid spray head based on piezoelectric bridge type beam - Google Patents
Liquid spray head based on piezoelectric bridge type beam Download PDFInfo
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- CN101284263A CN101284263A CNA200810114270XA CN200810114270A CN101284263A CN 101284263 A CN101284263 A CN 101284263A CN A200810114270X A CNA200810114270X A CN A200810114270XA CN 200810114270 A CN200810114270 A CN 200810114270A CN 101284263 A CN101284263 A CN 101284263A
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- type beam
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- 239000007788 liquid Substances 0.000 title claims abstract description 56
- 239000007921 spray Substances 0.000 title claims abstract description 19
- 238000005507 spraying Methods 0.000 claims abstract description 26
- 239000012530 fluid Substances 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 31
- 238000002347 injection Methods 0.000 claims description 17
- 239000007924 injection Substances 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 150000001875 compounds Chemical group 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 230000007547 defect Effects 0.000 abstract 1
- 238000004377 microelectronic Methods 0.000 abstract 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000002131 composite material Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000009616 inductively coupled plasma Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
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- 239000000377 silicon dioxide Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
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- 238000004043 dyeing Methods 0.000 description 1
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
The invention discloses a liquid spray head based on a piezoelectric bridge type beam, belonging to the field of micro-electronic machinery. Its main structure includes: micro-jet holes, micro-channels and piezoelectric bridge beams; the main characteristics are as follows: the outer surface of the liquid spray head is provided with a micro spray hole communicated with the micro channel, and a piezoelectric bridge beam containing a piezoelectric film layer and upper and lower electrodes is positioned at the upper part of the liquid micro channel or in the channel and is used as a driver for liquid spraying in the micro channel; the micro-jet holes, the micro-channels, the upper parts of the liquid micro-channels or the piezoelectric bridge beams in the channels which correspond to each other are combined to form a liquid jet structure; under the drive of voltage, the piezoelectric bridge beam deforms to drive the liquid in the micro-channel to be sprayed out from the micro-spray holes communicated with the micro-channel. The liquid sprayer overcomes the defects of a piezoelectric vibrating plate type liquid sprayer based on periphery fixation and a piezoelectric cantilever beam type liquid sprayer based on periphery fixation. Not only ensures the reliable operation of the spray head, but also considers the working efficiency of the spray head and reduces the manufacturing difficulty.
Description
Technical field
The invention belongs to the microelectron-mechanical field, particularly a kind of fluid jetting head that adopts micro-processing method to realize based on piezoelectric bridge type beam.
Background technology
The most common, the most extensive, the most typical ink jet type that is applied as of fluid jetting head and liquid injection apparatus is printed figure, image record and fields such as printing, printing and dyeing.Also be widely used in other little manufacturing side such as multiple display such as liquid crystal display, organic light emitting display and biochip.Fluid jetting head based on piezo-electric effect has the drop controlled amount, and jet velocity is controlled, realizes that easily high-precision drop sprays, and characteristics such as shower nozzle long service life are the important directions of liquid injection apparatus development.
The fluid jetting head cost that adopts piezoelectric principle to make is higher.For reducing use cost, generally fluid jetting head and liquid storage box are designed to detachable structure, needn't change shower nozzle when changing liquid or liquid storage box.A complete liquid injection apparatus should comprise parts such as fluid jetting head, liquid storage box, control circuit, bracing frame, shell.But fluid jetting head is wherein most crucial part, and its design and fabrication technology is determining the performance of whole liquid injection apparatus.
Along with the development of technology, the jet velocity of fluid jetting head and nozzle array density improve constantly.High performance fluid jetting head depends mainly on the global design and the manufacturing technology of liquid driver, liquid micro-channel and micro-spraying hole.
Seiko Epson Corp discloses a kind of piezoelectric type shower nozzle, upper wall in micro-channel is made piezoelectricity/elastic composite oscillating plate, when the piezoelectric element on piezoelectric vibrating plate applies voltage, protruding, spill change that oscillating plate takes place, thereby the volume in the change micro-channel, make liquid from micro-spraying hole that micro-channel communicates eject.Adopt the piezoelectric vibrating plate hardness of this mode bigger, make the required driving force of its deformation very big; And, link to each other with microchannel walls around the oscillating plate, and suffer restraints.These two kinds of reasons have seriously limited liquid driven in the micro-channel.And, because the effect of contraction of plate surrounding, when the area of oscillating plate more hour, the deformation of plate is just more little, the Volume Changes in the micro-channel is just more little, the liquid outlet quantity of injection is just more little.To eject liquid measure in order increasing, to need to increase the yardstick of micro-channel.And when forming more highdensity fluid jetting head array, but the width of micro-channel is restricted.Therefore, the type of drive of this shower nozzle has influenced the liquid spray volume, has hindered the size of further minimizing micro-channel and the integrated level of raising shower nozzle.
A kind of piezoelectric cantilever beam type fluid jetting head has overcome the problem that above-mentioned piezo jets exists.It adopts piezoelectric cantilever to spray from micro-spraying hole at the top or the middle liquid that directly drives in the micro-channel of micro-channel.Because piezoelectric cantilever is only at a side fixed support of beam, other parts are suspending movable, are not subjected to the restriction of substrate, therefore, the deflection of piezoelectric cantilever is far longer than aforesaid fixing piezoelectric vibrating plate all around, and it can spray from micro-spraying hole by the more liquid of more effective driving.Because piezoelectric cantilever can be realized big distortion under low-voltage, therefore, this shower nozzle can be worked under lower voltage.Perhaps, because piezoelectric cantilever can be realized bigger distortion, so just can keep reducing the lateral dimension of the total area or the micro-channel of driver under the constant situation of liquid jet amount, thereby realize having the more fluid jetting head of high density nozzle array.
But based on the fluid jetting head of piezoelectric cantilever, because piezoelectric cantilever has only an end to fix, the other end suspends movable, and like this, when cantilever beam was longer, cantilever beam structures was relatively more fragile, though the drive displacement of movable end can be very big, driving force reduces.On the other hand, the cantilever beam structures that an end floats has also been brought difficulty for the reliability of shower nozzle and manufacturing, has reduced service life and fabrication yield.
Summary of the invention
The purpose of this invention is to provide a kind of fluid jetting head that drives based on piezoelectric bridge type beam, its primary structure comprises, micro-spraying hole, micro-channel, piezoelectric bridge type beam; It is characterized in that: at the micro-spraying hole that the setting of fluid jetting head outer surface communicates with micro-channel, the piezoelectric bridge type beam that contains piezoelectric thin film layer and upper and lower electrode thereof is arranged in the top or the conduit of micro-channel, as the driver of liquid injection in the micro-channel; Piezoelectric bridge type beam in corresponding mutually micro-spraying hole, micro-channel, micro-channel top or the conduit of above-mentioned and the micro-channel formation liquid injection structure that combines; Under the driving of voltage, piezoelectric bridge type beam produces deformation, drive in the micro-channel liquid from micro-spraying hole that micro-channel communicates spray.
The two ends of described piezoelectric bridge type beam link to each other with substrate, and as the fixed support end of bridge type beam, the both sides of piezoelectric bridge type beam mid portion do not link to each other with substrate, form bridge architecture.
Described piezoelectric bridge type beam is the multi-layer compound structure that comprises piezoelectric layer and non-piezoelectric layer, wherein comprises one deck piezoelectric layer and upper and lower electrode layer thereof at least.
Each layer in the described piezoelectric bridge type beam covers whole bridge type beam, or partly is distributed on the bridge type beam.
The surface of described piezoelectric bridge type beam is an electric insulation layer.
Described piezoelectric bridge type beam is placed one at least in the top of each micro-channel or conduit, the liquid that drives in the same micro-channel sprays from the micro-spraying hole that communicates with it.
In the described fluid jetting head, comprise at least one group of corresponding mutually micro-spraying hole, micro-channel, piezoelectric bridge type beam and constitute array liquid injection structure based on piezoelectric bridge type beam based on piezoelectric bridge type beam.
The invention has the beneficial effects as follows since piezoelectric bridge type beam only at the two ends of beam fixed support, the bridge mid portion is not for being subjected to the restriction of substrate, therefore, fixing piezoelectric vibrating plate around the deflection of bridge type beam is far longer than, it can spray from micro-spraying hole by the more liquid of more effective driving.On the other hand, because piezoelectric bridge type beam at the two ends of beam fixed support, therefore, has been avoided in the Piezoelectric Cantilever Beams, an end fixed support only, and the other end suspend movable caused fragile structure, driving force is less relatively, reliability is low, make problems such as difficulty.Therefore, based on the fluid jetting head of piezoelectric bridge type beam overcome simultaneously based on around the fixing board-like fluid jetting head of piezoelectric vibration and based on the shortcoming of piezoelectric cantilever beam type fluid jetting head.It had both guaranteed the shower nozzle reliable operation, had taken into account the operating efficiency of shower nozzle again, had also reduced manufacture difficulty.
Description of drawings
Fig. 1 is first kind of structural representation of fluid jetting head, and in this structure, piezoelectric bridge type beam is at the micro-channel middle part.
Fig. 2 is the assembling schematic diagram of Fig. 1.
Fig. 3 is the split schematic diagram of Fig. 1.
Fig. 4 is second kind of structural representation of fluid jetting head, and in this structure, piezoelectric bridge type beam is on micro-channel top.
Fig. 5 is the third structural representation of fluid jetting head, and in this structure, piezoelectric bridge type beam is on micro-channel top.
Fig. 6 is the piezoelectric bridge type beam cross-sectional view.
The specific embodiment
The fluid jetting head that drives based on piezoelectric bridge type beam that the present invention proposes has multiple implementation.Fig. 1, Fig. 4, Fig. 5 respectively example three kinds of possible implementation structures wherein.Their common trait all is the micro-spraying hole that communicates with micro-channel in the setting of fluid jetting head outer surface, and the piezoelectric bridge type beam that contains piezoelectric thin film layer and upper and lower electrode thereof is arranged in the top or the conduit of micro-channel, as the driver of liquid injection in the micro-channel; Piezoelectric bridge type beam in the micro-spraying hole of above-mentioned mutual correspondence, micro-channel, micro-channel top or the conduit combines and constitutes the liquid injection structure; Under the driving of voltage, piezoelectric bridge type beam produces deformation, drive in the micro-channel liquid from micro-spraying hole that micro-channel communicates spray.Fig. 1, Fig. 4, the structural representation that can be considered as realizing having array liquid injection structure fluid jetting head shown in Figure 5.
In first kind of structural representation shown in Figure 1, form by jet orifice plate 100, substrate 200 and last substrate 300.The one row micro-spraying hole 110 corresponding with micro-channel 220 on the substrate 200 is being set on the jet orifice plate 100; Piezoelectric bridge type beam 210 is positioned at the top of the micro-channel 220 on the substrate 200; Micro-channel 220 on the substrate 200 and the last micro-channel 320 on the last substrate 300 combine, constitute a complete liquid micro-channel, after micro-channel 220 and last micro-channel 320 were merged into complete liquid micro-channel, piezoelectric bridge type beam 210 was positioned at the middle part of the liquid micro-channel that is merged into; The next door of the micro-channel 220 on substrate 200 is provided with fluid reservoir 230; Be connected by microflute 240 between micro-channel 220 and the fluid reservoir 230; On the last substrate 300 with substrate 200 on fluid reservoir 230 corresponding sections fluid reservoir 330 is set, fluid reservoir 230 combines with last fluid reservoir 330, becomes a big fluid reservoir, and on the top of last fluid reservoir 330 inlet 350 is set; On last substrate 300, be connected by last microflute 340 between last micro-channel 320 and the last fluid reservoir 330.Jet orifice plate 100, substrate 200 and last substrate 300 bond together successively forms the fluid jetting head (shown in Fig. 2,3) that piezoelectric bridge type beam drives.
Described piezoelectric bridge type beam 210 two ends are fixed on micro-channel 220 walls of substrate 200, and the intermediate portion is divided into bridge-like structure (shown in Fig. 2,3).
Described piezoelectric bridge type beam 210 comprises piezoelectric layer 212 and top electrode 213 thereof, lower electrode layer 211, can cover insulating medium layer 214 on the surface of bridge type beam, makes the liquid in upper and lower electrode layer and the micro-channel keep electric insulation.This piezoelectric bridge type beam 210 can also be for containing the MULTILAYER COMPOSITE piezoelectric bridge type beam of multi-layer piezoelectric layer and the non-piezoelectric layer of multilayer; Or to comprise the form formation piezoelectric bridge type beam of the identical or opposite piezoelectric layer of two-layer or two-layer above polarised direction.
Can place a plurality of piezoelectric bridge type beams by different way in the top of each micro-channel or conduit, the liquid that drives in the same micro-channel sprays from the micro-spraying hole that communicates with it.
(inductively coupled plasma) carries out dry etching, micro-channel 320 and last fluid reservoir 330 and the last microflute 340 that links to each other between them in the formation.Again carry out deposit silicon nitride after the two-sided thermal oxide, carry out photoetching again in the front, etching forms the inlet mask window.Utilize anisotropic etchants such as KOH, TMAH to carry out bulk silicon etching, or adopt ICP (inductively coupled plasma) to carry out dry etching, etching forms inlet 350.
At last, jet orifice plate 100, substrate 200 and 300 3 substrates of last substrate are grouped together by bonding or bonding mode, form fluid jetting head.
In the described fluid jetting head based on piezoelectric bridge type beam, be arranged in respectively separately on the substrate with at least one micro-spraying hole, micro-channel, piezoelectric bridge type beam, and corresponding mutually, each substrate combination back together just constitutes the array liquid injection structure that drives with piezoelectric bridge type beam.As Fig. 1, Fig. 4, the schematic diagram that can be considered as array liquid injection structure shown in Figure 5.
In second kind of structure split schematic diagram of fluid jetting head shown in Figure 4, piezoelectric bridge type beam is on micro-channel top.The major part of fluid jetting head and Fig. 1, Fig. 2, shown in Figure 3 the same, different with first kind of structure is, dividing wall between micro-channel is removed in second kind of structure on each in last substrate 300, form a big fluid reservoir 321, link to each other by last microflute 340 with the original fluid reservoir 330 of going up in next door.With above-mentioned three substrate combination together after, be equivalent to the top (as shown in Figure 4) that piezoelectric bridge type beam 210 is positioned at the liquid micro-channel.
In the third structure split schematic diagram of fluid jetting head shown in Figure 5, piezoelectric bridge type beam is also at the micro-channel top.But different with second kind of structure is that two fluid reservoirs on the last substrate 300 are merged into a big fluid reservoir 322 on the basis of second kind of structure.At this moment, inlet 350 can move to the substrate middle part in second kind of implementation, becomes inlet 351.With above-mentioned three substrate combination together after, also be equivalent to the top (as shown in Figure 5) that piezoelectric bridge type beam 210 is positioned at the liquid micro-channel.
The cross-section structure of the piezoelectric bridge type beam 210 in the foregoing description as shown in Figure 6, it is composited by silicon dioxide layer 215, bottom electrode 211, piezoelectric layer 212, top electrode 213, surface insulation dielectric layer 214.Except that this implementation, the following of silicon dioxide layer also can keep certain thickness monocrystalline silicon layer in the piezoelectric bridge type beam, constitutes bridge type beam with other layer.
In other implementation of the present invention, also can will be designed to different forms with the corresponding piezoelectric bridge type beam of each micro-channel, perhaps, place a plurality of piezoelectric bridge type beams by different way in the top of each micro-channel or conduit, the liquid that drives in the same micro-channel sprays from the micro-spraying hole that communicates with it.For example, a plurality of piezoelectric bridge type beams in same micro-channel or top arranged side by side, its fixed support end also can be positioned at different positions.
Fluid jetting head and part such as drive circuit, liquid storage box, bracing frame, shell etc., connecting line based on piezoelectric bridge type beam of the present invention is combined, can further constitute complete liquid injection apparatus or integrated fluid jetting head.
Fluid jetting head based on piezoelectric bridge type beam of the present invention can be widely used in inkjet printing, fields such as graphic record and Micropicture realization, and have the industry manufacture field that Micropicture is realized requirement.
Claims (7)
1. fluid jetting head based on piezoelectric bridge type beam, its primary structure comprises: micro-spraying hole, micro-channel, piezoelectric bridge type beam; It is characterized in that: at the micro-spraying hole that the setting of fluid jetting head outer surface communicates with micro-channel, the piezoelectric bridge type beam that contains piezoelectric thin film layer and upper and lower electrode thereof is arranged in the top or the conduit of micro-channel, as the driver of liquid injection in the micro-channel; Piezoelectric bridge type beam in corresponding mutually micro-spraying hole, micro-channel, micro-channel top or the conduit of above-mentioned and the micro-channel formation liquid injection structure that combines; Under the driving of voltage, piezoelectric bridge type beam produces deformation, drive in the micro-channel liquid from micro-spraying hole that micro-channel communicates spray.
2. according to the described fluid jetting head of claim 1 based on piezoelectric bridge type beam, it is characterized in that: the two ends of described piezoelectric bridge type beam link to each other with substrate, as the fixed support end of bridge type beam, the both sides of piezoelectric bridge type beam mid portion do not link to each other with substrate, form bridge architecture.
3. according to the described fluid jetting head based on piezoelectric bridge type beam of claim 1, it is characterized in that: described piezoelectric bridge type beam comprises the multi-layer compound structure of piezoelectric layer and non-piezoelectric layer, wherein comprises one deck piezoelectric layer and upper and lower electrode layer thereof at least.
4. according to the described fluid jetting head based on piezoelectric bridge type beam of claim 1, it is characterized in that: each layer in the described piezoelectric bridge type beam covers whole bridge type beam, or partly is distributed on the bridge type beam.
5. according to the described fluid jetting head based on piezoelectric bridge type beam of claim 1, it is characterized in that: the surface of described piezoelectric bridge type beam is an electric insulation layer.
6. according to the described fluid jetting head based on piezoelectric bridge type beam of claim 1, it is characterized in that: described piezoelectric bridge type beam is placed one at least in the top of each micro-channel or conduit, the liquid that drives in the same micro-channel sprays from the micro-spraying hole that communicates with it.
7. according to the described fluid jetting head of claim 1 based on piezoelectric bridge type beam, it is characterized in that: in the described fluid jetting head based on piezoelectric bridge type beam, comprise at least one group with the mutually corresponding micro-spraying hole of micro-channel, micro-channel, piezoelectric bridge type beam formation array liquid injection structure based on piezoelectric bridge type beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810114270XA CN101284263B (en) | 2008-06-02 | 2008-06-02 | Liquid showerhead based on piezoelectric bridge type beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810114270XA CN101284263B (en) | 2008-06-02 | 2008-06-02 | Liquid showerhead based on piezoelectric bridge type beam |
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| Publication Number | Publication Date |
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| CN101284263A true CN101284263A (en) | 2008-10-15 |
| CN101284263B CN101284263B (en) | 2012-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810114270XA Active CN101284263B (en) | 2008-06-02 | 2008-06-02 | Liquid showerhead based on piezoelectric bridge type beam |
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| CN (1) | CN101284263B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104339865A (en) * | 2013-07-30 | 2015-02-11 | 珠海纳思达企业管理有限公司 | Liquid spray head |
| CN104908421A (en) * | 2014-03-12 | 2015-09-16 | 精工电子打印科技有限公司 | Liquid jet head and liquid jet apparatus |
-
2008
- 2008-06-02 CN CN200810114270XA patent/CN101284263B/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104339865A (en) * | 2013-07-30 | 2015-02-11 | 珠海纳思达企业管理有限公司 | Liquid spray head |
| CN104908421A (en) * | 2014-03-12 | 2015-09-16 | 精工电子打印科技有限公司 | Liquid jet head and liquid jet apparatus |
| CN104908421B (en) * | 2014-03-12 | 2017-07-28 | 精工电子打印科技有限公司 | Jet head liquid and liquid injection apparatus |
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| Publication number | Publication date |
|---|---|
| CN101284263B (en) | 2012-01-04 |
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