CN101279372B - Method and device for preparing microparticles by splitting liquid drop using electric charge oscillation method - Google Patents

Method and device for preparing microparticles by splitting liquid drop using electric charge oscillation method Download PDF

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Publication number
CN101279372B
CN101279372B CN200710060649A CN200710060649A CN101279372B CN 101279372 B CN101279372 B CN 101279372B CN 200710060649 A CN200710060649 A CN 200710060649A CN 200710060649 A CN200710060649 A CN 200710060649A CN 101279372 B CN101279372 B CN 101279372B
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crucible
drop
vacuum chamber
nozzle
pole plate
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CN101279372A (en
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吴萍
周伟
刘立娟
李宝凌
张洪波
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Tianjin University
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Tianjin University
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Abstract

The invention discloses a method which adopts the charge oscillometry liquid drop breakup for preparing micro-particles, and the method comprises the following steps: (1) metal material to be melted is added in a crucible; (2) cooling liquid is added in collection devices; (3) the vacuum extraction of the crucible and a vacuum cavity is carried out, and protective gas is filled; (4) the metal material in the crucible is melted; (5) a piezoelectric oscillator is opened, and the voltage is added on a charging polar plate, thus ejecting the melted metal from a nozzle at the bottom part of the crucible with the form of laminar-flow jet and respectively charging the same amount of charge to the liquid drops with two sizes when passing through the middle gap of the charging polar plate; (6) thediameter of liquid drops is calculated; (7) the evenly charged liquid drops is broken up into main liquid drops with larger size and ultra-micro-liquid drops with smaller size by the charge oscillometry on the surface of the liquid drops when passing a high-frequency alternating electric field; (8) the main liquid drops and the ultra-micro-liquid drops are fallen into the respective collection devices after the separation of a deflecting polar plate. The method of the invention has strong process controllability, which can directly obtain the even particles with more micro-size, the process flow is short, the product quality is good, and the equipment investment is greatly reduced.

Description

A kind of method and apparatus that adopts electric charge succusion drop division preparation microparticle
Technical field
The present invention relates to the microparticle preparing technical field, make charged drop that a kind of method and apparatus that adopts electric charge succusion drop division preparation microparticle that coulomb division obtains atomic pellet shapes particle take place thereby be specifically related to a kind of symmetrical liquid drop injecting technology and high frequency alternating electric field of adopting.
Background technology
People such as the Chun of Massachusetts Institute Technology (MIT) and Passow have proposed a kind of novel symmetrical liquid drop production method one symmetrical liquid drop injecting technology on the basis of Rayleigh capillary liquid stream Instability Theory.This technology can obtain size uniform spherical molten drop or particle by the fracture behaviour of control continuous molten metal jet, compares with the conventional particles preparation method to have the technological process weak point, controllability is good, equipment investment is few, production efficiency height, characteristics such as good product quality.On this technical foundation, people's SEPARATE APPLICATION such as Wu Ping, Zhang Shaoming Chinese patent (CN2649227, CN1899732).But because the restriction of Rayleigh jet stability condition, the particle diameter that even droplet discharge technique produces is about 1.5 to 2.5 times of nozzle diameter, when nozzle bore is reduced to below 50 microns,, cause the obstruction and the jet unstability of nozzle during the preparation particle easily owing to the restriction of process conditions.Therefore, the symmetrical liquid drop injecting technology is produced particle diameter mainly in 50 microns to 1000 microns scope at present.
Summary of the invention
The objective of the invention is to overcome the shortcoming of prior art, provide a kind of can directly the acquisition to have the more small single-size of size, technological process is short, good product quality, and a kind of electric charge succusion drop that adopts that greatly reduces equipment investment divides the method and apparatus for preparing microparticle.
A kind of method that adopts the division of electric charge succusion drop to prepare microparticle of the present invention, it may further comprise the steps:
(1) opens the crucible loam cake, in crucible, add metal material that needs melting and sealing;
(2) cooling fluid is added in the gathering-device, baffle plate is moved to the top of gathering-device and sealed vacuum chamber;
(3) crucible and vacuum chamber are vacuumized, and charge into inert protective gas;
(4) heating crucible, the metal material in the melting cup, and metal material fusing back insulation 20-30 minute;
(5) opening piezoelectric oscillator, to make its frequency be 6-15KH Z, add voltage 200-300V to adding battery lead plate, utilize control pressurer system to make and reach between crucible and the vacuum chamber and stablize pressure reduction 0.5-1.5P 0Thereby, motlten metal is penetrated from the nozzle of the crucible bottom form with laminar jet, under the effect of piezoelectric oscillator vibration head, the metal jet of outflow is fractured into uniform drop, all is with the equivalent electric charge at each drop when adding the battery lead plate intermediate gaps;
(6) utilize the captured drop image of image monitoring system to calculate the diameter of drop accurately in conjunction with the computer image analysis system, thereby FEEDBACK CONTROL is adjusted the frequency that piezoelectric oscillator produces, thereby obtain to set the symmetrical liquid drop of size, the simultaneous computer analytical system calculates the electric weight of drop, thus the loading parameters of control high frequency alternation pole plate;
(7) charged drop electric charge vibration by the drop surface through the high frequency alternating electric field time uniformly splits into larger-size main droplet and the littler atomic drop of size;
(8) remove baffle plate, atomic drop separates through the deflection pole plate with bigger main droplet and falls into its gathering-device separately, by the moulding of cooling fluid final set.
A kind of device of realizing the described method of claim 1, it comprises:
(a) vacuum chamber, this vacuum chamber links to each other with vavuum pump by first appendix that it is provided with vacuum valve;
(b) Control System of Microcomputer, this Control System of Microcomputer comprises mainboard, is connected signal generator and image pick-up card on the described mainboard by control line respectively;
(c) one is dodged device frequently, and this sudden strains of a muscle frequency device is installed on the sidewall of described vacuum chamber and by line and is connected with frequency divider, and described frequency divider links to each other with signal generator in the Control System of Microcomputer;
(d) camera head, this camera head be installed in the described sidewall that dodges the vacuum chamber of device opposite position frequently on and link to each other with image pick-up card in the Control System of Microcomputer by line.
(e) crucible, this crucible is arranged on the top of described vacuum chamber, and the bottom of this crucible is inlaid with micro nozzle, and its lateral wall is equipped with heater, described crucible is built-in with temperature element, and this temperature element links to each other with temperature regulating device by control line respectively with heater;
(f) piezoelectric oscillator, the vibration head of this piezoelectric oscillator are arranged in the crucible and are positioned at the top of described nozzle, and piezoelectric oscillator up-down adjustment device is housed between described piezoelectric oscillator and crucible cover;
(g) one adds battery lead plate, and this adds the outside below that battery lead plate is arranged in the described vacuum chamber and is positioned at described micro nozzle, with respect to described nozzle place an opening is arranged in the middle of this adds battery lead plate;
(h) circular high frequency alternation pole plate, its inside has the high frequency alternating electric field, and described high frequency alternation pole plate links to each other with high-frequency ac power by line, and described high-frequency ac power links to each other with mainboard in the Control System of Microcomputer by line;
(i) two deflection pole plates that be arranged in parallel, this deflection pole plate is arranged in the described vacuum chamber and is positioned at the described alternation pole plate below that adds, the described battery lead plate that adds links to each other with power supply by lead respectively with the deflection pole plate, and described power supply links to each other with mainboard in the Control System of Microcomputer by lead;
(j) two gathering-devices, this gathering-device are arranged in the described vacuum chamber and are positioned at the below of described deflection pole plate;
(k) baffle plate, this baffle plate can be around the barrier support rotation and between described deflection pole plate and gathering-device;
(l) inert gas storage facilities, this gaseous storage device link to each other with described crucible, vacuum chamber by second, third appendix that first, second valve is housed on it respectively;
(m) gas pressure regulator, this gas pressure regulator link to each other with described first and second valve by first and second control line respectively, and two pressure sensors of this gas pressure regulator place described crucible and vacuum chamber inside respectively.
Microparticle preparation facilities of the present invention and method, process controllability is strong, can control crucible temperature, and the pressure differential of crucible and vacuum chamber can also be by controlling piezoelectric oscillator and nozzle aperture apart from control jet flow and response excursion.Utilize image monitoring system and circuit feedback control system to adjust the parameter of high frequency alternating electric field and deflecting electric field in real time, electric charge vibration by the drop surface when making symmetrical liquid drop through the high frequency alternating electric field splits into larger-size main droplet and the less little drop of size, the drop of two kinds of sizes separates under the deflecting electric field effect and falls into its gathering-device separately, thereby obtains to have minute sized particle.With respect to the additive method of present preparation particle, the present invention can directly obtain to have the more small single-size of size, and technological process is short, and good product quality greatly reduces equipment investment.
Description of drawings
Accompanying drawing is a kind of apparatus structure schematic diagram that adopts electric charge succusion drop division preparation microparticle of the present invention.
The specific embodiment
Below in conjunction with the drawings and specific embodiments the present invention is done to describe in detail.
A kind of method that adopts the division of electric charge succusion drop to prepare microparticle of the present invention, it may further comprise the steps: 1. one kind is adopted electric charge succusion drop to divide the method for preparing microparticle, it is characterized in that it may further comprise the steps: (1) opens the crucible loam cake, in crucible, add the metal material that needs melting, and sealing; (2) cooling fluid is added in the gathering-device, baffle plate is moved to the top of gathering-device and sealed vacuum chamber; (3) crucible and vacuum chamber are vacuumized, and charge into inert protective gas; (4) heating crucible, the metal material in the melting cup, and metal material fusing back insulation 20-30 minute; (5) opening piezoelectric oscillator, to make its frequency be 6-15KH Z, add voltage 200-300V to adding battery lead plate, utilize control pressurer system to make and reach between crucible and the vacuum chamber and stablize pressure reduction 0.5-1.5P 0Thereby, motlten metal is penetrated from the nozzle of the crucible bottom form with laminar jet, under the effect of piezoelectric oscillator vibration head, the metal jet of outflow is fractured into uniform drop, all is with the equivalent electric charge at each drop when adding the battery lead plate intermediate gaps; (6) utilize the captured drop image of image monitoring system to calculate the diameter of drop accurately in conjunction with the computer image analysis system, thereby FEEDBACK CONTROL is adjusted the frequency that piezoelectric oscillator produces, thereby obtain to set the symmetrical liquid drop of size, the simultaneous computer analytical system calculates the electric weight of drop, thus the loading parameters of control high frequency alternation pole plate; (7) charged drop electric charge vibration by the drop surface through the high frequency alternating electric field time uniformly splits into larger-size main droplet and the less little drop of size; (8) remove baffle plate, bigger main droplet separates through the deflection pole plate with the less little drop of size and falls into its gathering-device separately, by the moulding of cooling fluid final set.
Operation principle of the present invention is to use inert gas (nitrogen) to inject crucible and vacuum chamber, utilize control pressurer system to make crucible and vacuum chamber reach stable pressure reduction, make metal bath form ejection with laminar jet from the micro nozzle of crucible bottom, according to Rayleigh jet unstability principle, vibrational perturbation metal jet with piezoelectric oscillator produces makes metal jet be fractured into uniform drop.By the real-time dimensional parameters of surveillance in conjunction with Computerized analysis system acquisition generation drop, and then at optimized parameter, the frequency of FEEDBACK CONTROL oscillator, molten drop that reduces to produce and the error of setting drop size.Molten drop is induction charging when adding battery lead plate, charged drop electric charge vibration by the drop surface through the high frequency alternating electric field time splits into larger-size main droplet and the less little drop of size, after deflecting electric field enters its gathering-device separately with nano sized particles and bigger particle separation.
The inventive system comprises crucible 1 as shown in drawings, piezoelectric oscillator 2, piezoelectric oscillator up-down adjustment device 41 adds battery lead plate 6, high frequency alternation pole plate 38, deflection pole plate 40, baffle plate 8, barrier support 9, gathering-device 10.Crucible 1 is provided with piezoelectric oscillator 2, piezoelectric oscillator 2 is connected with signal generator 36 by control line, the bottom of crucible 1 is inlaid with nozzle 5, the vibration head 3 of this piezoelectric oscillator 2 is arranged on the top of nozzle 5, crucible 1 lateral wall having heaters 4, the battery lead plate of adding 6 is arranged below the outside of nozzle 5, with respect to the nozzle place opening 7 is arranged in the middle of adding battery lead plate 6, add battery lead plate 6 belows and be provided with circular high frequency alternation pole plate 38, its inside has the high frequency alternating electric field, and high frequency alternation pole plate 38 following both sides are provided with parallel deflection pole plate 40.The bottom of vacuum chamber 11 is provided with particle cooling gathering-device 10, and a baffle plate 8 is arranged on the gathering-device 10, is fixed on the bottom of vacuum chamber 11 by support 9, and baffle plate 8 can rotate around support 9.Crucible 1 sidewall and vacuum chamber 11 sidewalls are connected with first and second appendix 15,16 respectively, first and second appendix 15,16 is connected with valve 17,18 respectively, link to each other with valve 37 by the 3rd appendix 19, link to each other with inert gas storage facilities 14, first and second valve 17,18 is connected with gas pressure regulator 33 by control line 21,20 again.Gas pressure regulator 33 has two pressure sensors 22,23 to place crucible 1 and vacuum chamber 12 inside respectively.Vacuum chamber 11 right sides link to each other with vacuum valve 24 by appendix 31, are connected with vavuum pump 25 by appendix 32.Crucible 1 is built-in with temperature element can be thermocouple 12, is connected with temperature regulating device 13 by line, and heater 4 is connected with temperature regulating device 13 by control line.Adding battery lead plate 6 is connected with power supply 30 by line respectively with deflection pole plate 40.Power supply 30 is connected with mainboard 35 in the Control System of Microcomputer by line.High frequency alternation pole plate 38 is connected with high-frequency ac power 39 by line, and high-frequency ac power 39 is connected with mainboard 35 in the Control System of Microcomputer by line.Vacuum chamber 11 left side walls have one to dodge device 26 frequently, are connected with frequency divider 28 by line, and frequency divider 28 is connected with signal generator 36 in the Control System of Microcomputer 29.Device 26 opposite positions have camera head 27 with dodging frequently on vacuum chamber 11 right sides, are connected with image pick-up card 34 in the microcomputer control equipment 29 by line.Control System of Microcomputer 29 critical pieces include signal generator 36, image pick-up card 34 and mainboard 35.Signal generator 36 and image pick-up card 34 are connected on the computer motherboard 35 by control line respectively.Nozzle is circular sapphire aperture, and its diameter range is between 0.030~0.500mm, and the vibration frequency range of piezoelectric oscillator is between 6~15kHz.
Embodiment 1
(1) opens the crucible loam cake, in crucible, add metal material Sn-3.5Ag-0.5Cu 100g that needs melting and sealing; (2) cooling fluid is added in the gatherer, baffle plate moves to the top of gatherer, and the sealed vacuum chamber; (3) crucible and vacuum chamber are vacuumized, and charge into nitrogen; (4) heating crucible, the metal material in the melting cup, insulation was 20 minutes after temperature arrived 260 ℃; (5) opening piezoelectric oscillator, to make its frequency be 6KH Z, add voltage 250V to adding battery lead plate, utilize control pressurer system to make and reach between crucible and the vacuum chamber and stablize pressure reduction 0.5P 0Thereby motlten metal is penetrated from the nozzle of the crucible bottom form with laminar jet, under the effect of piezoelectric oscillator vibration head, the metal jet that flows out is fractured into uniform drop, all be with the equivalent electric charge at each drop when adding the battery lead plate intermediate gaps, distance between nozzle and the described vibration head is 2mm, and nozzle is circular sapphire aperture, and its diameter is 0.05mm; (6) diameter that utilizes the captured drop image of image monitoring system to calculate drop accurately in conjunction with computer aided video system is 0.120mm, thereby the frequency that FEEDBACK CONTROL adjustment piezoelectric oscillator produces is 6.8KH ZThereby obtaining to set diameter is the symmetrical liquid drop of 0.100mm, and the simultaneous computer analytical system calculates the electric weight of drop, thereby the loading parameters of control high frequency alternation pole plate is 1000V, 10KHz; (7) charged drop is isolated size less than 30 microns drop by the electric charge vibration on drop surface through the high frequency alternating electric field time.(8) remove baffle plate, little drop falls into minimum drop through the deflection pole plate and enters its gathering-device separately with bigger drop separation, by the moulding of silicone oil cooling fluid final set.
Embodiment 2
(1) opens the crucible loam cake, in crucible, add metal material Sn-37%Pb 100g that needs melting and sealing; (2) cooling fluid is added in the gatherer, baffle plate moves to the top of gatherer, and the sealed vacuum chamber; (3) crucible and vacuum chamber are vacuumized, and charge into nitrogen; (4) heating crucible, the metal material in the melting cup, insulation was 25 minutes after temperature arrived 250 ℃; (5) opening piezoelectric oscillator, to make its frequency be 10KH Z, add voltage 200V to adding battery lead plate, utilize control pressurer system to make and reach between crucible and the vacuum chamber and stablize pressure reduction 1.5P 0Thereby motlten metal is penetrated from the nozzle of the crucible bottom form with laminar jet, under the effect of piezoelectric oscillator vibration head, the metal jet that flows out is fractured into uniform drop, all be with the equivalent electric charge at each drop when adding the battery lead plate intermediate gaps, distance between nozzle and the described vibration head is 1.0mm, and nozzle is circular sapphire aperture, and its diameter is 0.1mm; (6) diameter that utilizes the captured drop image of image monitoring system to calculate drop accurately in conjunction with computer aided video system is 0.18mm, thereby the frequency that FEEDBACK CONTROL adjustment piezoelectric oscillator produces is 11.4KH ZThereby obtaining to set diameter is the drop of 0.15mm, and the simultaneous computer analytical system calculates the electric weight of drop, thereby the loading parameters of control high frequency alternation pole plate is 1000V, 18KHz; (7) charged drop is isolated size less than 20 microns drop by the electric charge vibration on drop surface through the high frequency alternating electric field time.(8) remove baffle plate, little drop falls into minimum drop through the deflection pole plate and enters its gathering-device separately with bigger drop separation, by the moulding of silicone oil cooling fluid final set.
Embodiment 3
(1) opens the crucible loam cake, in crucible, add metal material Sn-9Zn 100g that needs melting and sealing; (2) cooling fluid is added in the gatherer, baffle plate moves to the top of gatherer, and the sealed vacuum chamber; (3) crucible and vacuum chamber are vacuumized, and charge into nitrogen; (4) heating crucible, the metal material in the melting cup, insulation was 30 minutes after temperature arrived 250 ℃; (5) opening piezoelectric oscillator, to make its frequency be 14.2KH Z, add voltage 300V to adding battery lead plate, utilize control pressurer system to make and reach between crucible and the vacuum chamber and stablize pressure reduction 1P 0Thereby motlten metal is penetrated from the nozzle of the crucible bottom form with laminar jet, under the effect of piezoelectric oscillator vibration head, the metal jet that flows out is fractured into uniform drop, all be with the equivalent electric charge at each drop when adding the battery lead plate intermediate gaps, distance between nozzle and the described vibration head is 0.5mm, and nozzle is circular sapphire aperture, and its diameter is 0.5mm; (6) diameter that utilizes the captured drop image of image monitoring system to calculate drop accurately in conjunction with computer aided video system is 0.68mm, thereby the frequency that FEEDBACK CONTROL adjustment piezoelectric oscillator produces is 15KH ZThereby obtaining to set diameter is the drop of 0.65mm, and the simultaneous computer analytical system calculates the electric weight of drop, thereby the loading parameters of control high frequency alternation pole plate is 1000V, 20KHz; (7) charged drop is isolated size less than 40 microns drop by the electric charge vibration on drop surface through the high frequency alternating electric field time.(8) remove baffle plate, little drop falls into minimum drop through the deflection pole plate and enters its gathering-device separately with bigger drop separation, by the moulding of silicone oil cooling fluid final set.

Claims (6)

1. one kind is adopted electric charge succusion drop to divide the method for preparing microparticle, it is characterized in that it may further comprise the steps:
(1) opens the crucible loam cake that is arranged on vacuum chamber top, in crucible, add metal material that needs melting and sealing;
(2) the cooling fluid adding is arranged in the described chamber bottom gathering-device, baffle plate is moved to the top of gathering-device, and seal described vacuum chamber;
(3) crucible and vacuum chamber are vacuumized, and charge into inert protective gas;
(4) heating crucible, the metal material in the melting cup, and metal material fusing back insulation 20-30 minute;
(5) opening the piezoelectric oscillator that is arranged on described crucible top, to make its frequency be 6-15KHz, add voltage 200-300V for the battery lead plate that adds of outside below be arranged in the described vacuum chamber and be positioned at the nozzle of crucible bottom, utilize control pressurer system to make and reach between crucible and the vacuum chamber and stablize pressure reduction 0.5-1.5P 0, described P 0Be atmospheric pressure, thereby motlten metal is penetrated from the nozzle of the crucible bottom form with laminar jet, in being arranged on described crucible and be positioned under the effect of piezoelectric oscillator vibration head on nozzle top, the metal jet that flows out is fractured into uniform drop, by below the described nozzle outside add the battery lead plate intermediate gaps time each drop all be with the equivalent electric charge;
(6) utilize the captured drop image of camera head on the sidewall be installed in the vacuum chamber that dodges frequency device opposite position to combine the diameter that computer aided video system calculates drop accurately, thereby FEEDBACK CONTROL is adjusted the frequency that piezoelectric oscillator produces, thereby obtain to set the symmetrical liquid drop of size, the simultaneous computer analytical system calculates the electric weight of drop, thereby control is arranged on the described loading parameters that adds the circular high frequency alternation pole plate of battery lead plate below;
(7) charged drop electric charge vibration by the drop surface through described circular high frequency alternating electric field time the uniformly splits into larger-size main droplet and the less atomic drop of size;
(8) remove baffle plate, the less atomic drop of described larger-size main droplet and size both sides and deflection pole plate of being set parallel to each other below being arranged on described circular high frequency alternation pole plate separate and fall into its gathering-device separately, by the moulding of cooling fluid final set.
2. employing electric charge succusion drop division according to claim 1 prepares the method for microparticle, and it is characterized in that: the vertical range between described nozzle and the described vibration head is 0.3mm-2mm.
3. employing electric charge succusion drop division according to claim 1 prepares the method for microparticle, and it is characterized in that: described nozzle is the circular aperture that sapphire material is made, and its diameter range is between 0.03~0.5mm.
4. device of realizing the described method of claim 1 is characterized in that it comprises:
(a) vacuum chamber, this vacuum chamber links to each other with vavuum pump by first appendix that it is provided with vacuum valve;
(b) Control System of Microcomputer, this Control System of Microcomputer critical piece comprise mainboard, are connected signal generator and image pick-up card on the described mainboard by control line respectively;
(c) one is dodged device frequently, and this sudden strains of a muscle frequency device is installed on the sidewall of described vacuum chamber and by line and is connected with frequency divider, and described frequency divider links to each other with signal generator in the described Control System of Microcomputer;
(d) camera head, this camera head be installed in the described sidewall that dodges the vacuum chamber of device opposite position frequently on and link to each other with image pick-up card in the described Control System of Microcomputer by line.
(e) crucible, this crucible is arranged on the top of described vacuum chamber, the bottom of this crucible is inlaid with micro nozzle and described crucible lateral wall is equipped with heater, and described crucible is built-in with temperature element, and this temperature element links to each other with temperature regulating device by control line respectively with heater;
(f) piezoelectric oscillator, the vibration head of this piezoelectric oscillator are arranged in the crucible and are positioned at the top of described nozzle, and piezoelectric oscillator up-down adjustment device is housed between described piezoelectric oscillator and crucible cover;
(g) one adds battery lead plate, and this adds the outside below that battery lead plate is arranged in the described vacuum chamber and is positioned at described micro nozzle, with respect to described nozzle place an opening is arranged in the middle of this adds battery lead plate;
(h) circular high frequency alternation pole plate, its inside has the high frequency alternating electric field, and described high frequency alternation pole plate links to each other with high-frequency ac power by line, and described high-frequency ac power links to each other with mainboard in the Control System of Microcomputer by line;
(i) two deflection pole plates that be arranged in parallel, this deflection pole plate is arranged in the described vacuum chamber and is positioned at described high frequency alternation pole plate below, describedly adds that battery lead plate links to each other with power supply by lead respectively with the deflection pole plate and described power supply links to each other with mainboard in the Control System of Microcomputer by lead;
(j) two gathering-devices, these two gathering-devices are arranged in the described vacuum chamber and are positioned at the below of described deflection pole plate;
(k) baffle plate, this baffle plate can be around the barrier support rotation and between described deflection pole plate and gathering-device;
(l) inert gas storage facilities, this gaseous storage device link to each other with described crucible, vacuum chamber by second, third appendix that first, second valve is housed on it respectively;
(m) gas pressure regulator, this gas pressure regulator link to each other with described first and second valve by first and second control line respectively, and two pressure sensors of this gas pressure regulator place described crucible and vacuum chamber inside respectively.
5. the device of the described method of realization claim 1 according to claim 4 is characterized in that: described nozzle is the circular aperture of being made by sapphire, and its diameter range is between 0.03~0.5mm.
6. the device of the described method of realization claim 1 according to claim 4 is characterized in that: the vertical range between described nozzle and the described vibration head is 0.3mm-2mm.
CN200710060649A 2007-12-28 2007-12-28 Method and device for preparing microparticles by splitting liquid drop using electric charge oscillation method Expired - Fee Related CN101279372B (en)

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