CN101274391A - 激光能测量装置与激光加工装置 - Google Patents
激光能测量装置与激光加工装置 Download PDFInfo
- Publication number
- CN101274391A CN101274391A CNA2008100840846A CN200810084084A CN101274391A CN 101274391 A CN101274391 A CN 101274391A CN A2008100840846 A CNA2008100840846 A CN A2008100840846A CN 200810084084 A CN200810084084 A CN 200810084084A CN 101274391 A CN101274391 A CN 101274391A
- Authority
- CN
- China
- Prior art keywords
- laser
- mentioned
- energy
- measuring unit
- energy measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003754 machining Methods 0.000 title description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 238000012545 processing Methods 0.000 claims description 41
- 238000005259 measurement Methods 0.000 claims description 29
- 230000007246 mechanism Effects 0.000 claims description 13
- 230000005856 abnormality Effects 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 description 28
- 238000007639 printing Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0455—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings having a throughhole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a through-hole for a light collecting or light injecting optical fibre
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-085843 | 2007-03-28 | ||
JP2007085843A JP4514767B2 (ja) | 2007-03-28 | 2007-03-28 | レーザエネルギ測定装置とレーザ加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101274391A true CN101274391A (zh) | 2008-10-01 |
CN101274391B CN101274391B (zh) | 2012-12-26 |
Family
ID=39793720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100840846A Expired - Fee Related CN101274391B (zh) | 2007-03-28 | 2008-03-26 | 激光能测量装置与激光加工装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7929127B2 (zh) |
JP (1) | JP4514767B2 (zh) |
CN (1) | CN101274391B (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102486405A (zh) * | 2010-12-01 | 2012-06-06 | 中国科学院西安光学精密机械研究所 | 高功率激光远场焦斑测试用纹影器件 |
CN102348528B (zh) * | 2009-03-13 | 2014-09-10 | 三菱电机株式会社 | 激光加工装置 |
CN104302437A (zh) * | 2012-05-18 | 2015-01-21 | 唯景公司 | 限制光学装置中的缺陷 |
US9507232B2 (en) | 2011-09-14 | 2016-11-29 | View, Inc. | Portable defect mitigator for electrochromic windows |
US9638977B2 (en) | 2012-03-13 | 2017-05-02 | View, Inc. | Pinhole mitigation for optical devices |
US9885934B2 (en) | 2011-09-14 | 2018-02-06 | View, Inc. | Portable defect mitigators for electrochromic windows |
CN109454324A (zh) * | 2017-08-25 | 2019-03-12 | 株式会社迪思科 | 激光光束分析仪单元和激光加工装置 |
CN110621437A (zh) * | 2017-05-17 | 2019-12-27 | 肖特股份有限公司 | 使用脉冲多色激光束和滤光片沿预定的加工线加工工件的装置和方法 |
TWI682154B (zh) * | 2018-01-29 | 2020-01-11 | 日商住友重機械工業股份有限公司 | 評價裝置、評價方法及顯示裝置 |
US10684524B2 (en) | 2010-11-08 | 2020-06-16 | View, Inc. | Electrochromic window fabrication methods |
US10914118B2 (en) | 2012-03-13 | 2021-02-09 | View, Inc. | Multi-zone EC windows |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102470484B (zh) * | 2009-08-11 | 2015-09-30 | 浜松光子学株式会社 | 激光加工装置及激光加工方法 |
KR101138453B1 (ko) * | 2010-05-31 | 2012-04-26 | (주)한빛레이저 | 광범위한 출력 영역과 온도 변화에서도 선형 특성이 우수한 레이저광 감쇄 및 광학면 오염을 모니터링하는 시스템 |
JP2015182104A (ja) * | 2014-03-24 | 2015-10-22 | ファナック株式会社 | レーザ光の伝播監視機能を備えたレーザ加工機 |
JP6825234B2 (ja) * | 2016-06-03 | 2021-02-03 | 株式会社リコー | 計測装置、計測方法、加工装置、および被加工物の生産方法 |
WO2020031406A1 (ja) * | 2018-08-07 | 2020-02-13 | パナソニックIpマネジメント株式会社 | レーザ加工装置 |
JP7303053B2 (ja) * | 2019-07-17 | 2023-07-04 | ファナック株式会社 | 調整補助具及びレーザ溶接装置 |
CN113295269B (zh) * | 2021-07-28 | 2021-10-08 | 成都沃达惠康科技股份有限公司 | 一种激光循环测试装置、测试方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3515489A (en) * | 1966-03-03 | 1970-06-02 | Bausch & Lomb | Optical apparatus |
JPS5425113Y2 (zh) * | 1974-10-31 | 1979-08-23 | ||
US4538884A (en) * | 1981-07-10 | 1985-09-03 | Canon Kabushiki Kaisha | Electro-optical device and method of operating same |
JPS5944684U (ja) * | 1982-09-14 | 1984-03-24 | 松下電器産業株式会社 | レ−ザ加工用アパ−チヤ |
JPH0743442B2 (ja) * | 1988-09-09 | 1995-05-15 | 株式会社小野測器 | 光学式エンハンサ |
US5389954A (en) * | 1990-11-21 | 1995-02-14 | Canon Kabushiki Kaisha | Laser process apparatus for forming holes in a workpiece |
US6059555A (en) * | 1996-09-04 | 2000-05-09 | International Business Machines Corporation | Optical apparatus for dual-beam laser texturing |
JP3437154B2 (ja) * | 2000-08-14 | 2003-08-18 | 川崎重工業株式会社 | レーザビーム計測装置および制御装置 |
JP2003136267A (ja) * | 2001-11-01 | 2003-05-14 | Hitachi Via Mechanics Ltd | レーザ加工方法およびレーザ加工装置 |
JP2003340577A (ja) * | 2002-05-24 | 2003-12-02 | Nippon Sharyo Seizo Kaisha Ltd | レーザ加工装置 |
JP3822188B2 (ja) * | 2002-12-26 | 2006-09-13 | 日立ビアメカニクス株式会社 | 多重ビームレーザ穴あけ加工装置 |
JP2006224174A (ja) * | 2005-02-21 | 2006-08-31 | Sumitomo Heavy Ind Ltd | レーザ加工装置及びパルスエネルギのしきい値設定方法 |
CN2789757Y (zh) * | 2005-03-25 | 2006-06-21 | 中国科学院西安光学精密机械研究所 | 实时动态体全息衍射效率测量装置 |
US7767930B2 (en) * | 2005-10-03 | 2010-08-03 | Aradigm Corporation | Method and system for LASER machining |
-
2007
- 2007-03-28 JP JP2007085843A patent/JP4514767B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-20 US US12/071,357 patent/US7929127B2/en not_active Expired - Fee Related
- 2008-03-26 CN CN2008100840846A patent/CN101274391B/zh not_active Expired - Fee Related
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102348528B (zh) * | 2009-03-13 | 2014-09-10 | 三菱电机株式会社 | 激光加工装置 |
US10684524B2 (en) | 2010-11-08 | 2020-06-16 | View, Inc. | Electrochromic window fabrication methods |
CN102486405B (zh) * | 2010-12-01 | 2014-03-26 | 中国科学院西安光学精密机械研究所 | 高功率激光远场焦斑测试用纹影器件 |
CN102486405A (zh) * | 2010-12-01 | 2012-06-06 | 中国科学院西安光学精密机械研究所 | 高功率激光远场焦斑测试用纹影器件 |
US9885934B2 (en) | 2011-09-14 | 2018-02-06 | View, Inc. | Portable defect mitigators for electrochromic windows |
US9507232B2 (en) | 2011-09-14 | 2016-11-29 | View, Inc. | Portable defect mitigator for electrochromic windows |
US10884310B2 (en) | 2011-09-14 | 2021-01-05 | View, Inc. | Portable defect mitigators for electrochromic windows |
US10532948B2 (en) | 2011-09-14 | 2020-01-14 | View, Inc. | Portable defect mitigator for electrochromic windows |
US11886088B2 (en) | 2011-09-14 | 2024-01-30 | View, Inc. | Portable defect mitigators for electrochromic windows |
US9638977B2 (en) | 2012-03-13 | 2017-05-02 | View, Inc. | Pinhole mitigation for optical devices |
US11550197B2 (en) | 2012-03-13 | 2023-01-10 | View, Inc. | Pinhole mitigation for optical devices |
US10914118B2 (en) | 2012-03-13 | 2021-02-09 | View, Inc. | Multi-zone EC windows |
US10534237B2 (en) | 2012-03-13 | 2020-01-14 | View, Inc. | Pinhole mitigation for optical devices |
US10583523B2 (en) | 2012-05-18 | 2020-03-10 | View, Inc. | Circumscribing defects in optical devices |
CN104302437A (zh) * | 2012-05-18 | 2015-01-21 | 唯景公司 | 限制光学装置中的缺陷 |
CN110621437A (zh) * | 2017-05-17 | 2019-12-27 | 肖特股份有限公司 | 使用脉冲多色激光束和滤光片沿预定的加工线加工工件的装置和方法 |
CN109454324B (zh) * | 2017-08-25 | 2021-11-30 | 株式会社迪思科 | 激光光束分析仪单元和激光加工装置 |
CN109454324A (zh) * | 2017-08-25 | 2019-03-12 | 株式会社迪思科 | 激光光束分析仪单元和激光加工装置 |
TWI682154B (zh) * | 2018-01-29 | 2020-01-11 | 日商住友重機械工業股份有限公司 | 評價裝置、評價方法及顯示裝置 |
Also Published As
Publication number | Publication date |
---|---|
US7929127B2 (en) | 2011-04-19 |
CN101274391B (zh) | 2012-12-26 |
JP2008238247A (ja) | 2008-10-09 |
US20080239300A1 (en) | 2008-10-02 |
JP4514767B2 (ja) | 2010-07-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101274391B (zh) | 激光能测量装置与激光加工装置 | |
EP0956498B1 (en) | Method and apparatus for checking the condition of a protective glass in connection with laser machining | |
US20130258321A1 (en) | Method and monitoring device for the detection and monitoring of the contamination of an optical component in a device for laser material processing | |
CN101815596B (zh) | 用于确定焦点位置的方法和用于确定激光束相对于孔的位置的方法以及激光加工喷嘴 | |
EP3689530B1 (en) | Industrial high power fiber laser system with optical monitoring assembly | |
EP2265407B1 (en) | Process monitoring | |
EP2605882B1 (en) | Method of and fibre laser for optimising the focus of the fibre laser | |
CN108736297A (zh) | 光功率监视装置和激光装置 | |
JP2005161361A (ja) | レーザ加工機の管理方法及びレーザ加工機 | |
KR20010034366A (ko) | 레이저 마킹방법과 장치 및 마킹된 부재 | |
KR102321951B1 (ko) | 레이저 빔의 기준 초점 위치를 결정하는 방법 | |
BRPI1007890B1 (pt) | dispositivo e método para perfurar material | |
JP6535480B2 (ja) | レーザ加工状態判別方法及び装置 | |
JP6134805B2 (ja) | 光加工ヘッドおよび3次元造形装置 | |
JP5414645B2 (ja) | レーザ加工装置 | |
CN205363011U (zh) | 激光切割机 | |
EP1903352B1 (de) | Optoelektronische Sensoreinheit und Verfahren zum Betreiben einer optoelektronischen Sensoreinheit | |
JPH08174255A (ja) | レーザ加工機焦点検出装置 | |
JP5738051B2 (ja) | レーザ加工装置 | |
CN215145781U (zh) | 激光加工*** | |
CN204307888U (zh) | 激光清洗机 | |
JP2018202421A (ja) | レーザ加工ヘッド及びレーザ加工機 | |
BRPI1007891B1 (pt) | métodos para perfurar material | |
CN111750982A (zh) | 激光监测模块及激光监测*** | |
KR20140014368A (ko) | 물체 식별 및/또는 인증용 광학 센서 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: VIA MECHANICS LTD. Free format text: FORMER OWNER: HITACHI BIA MACINE CO., LTD. Effective date: 20140219 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140219 Address after: Kanagawa Patentee after: Via Mechanics Ltd. Address before: Kanagawa Patentee before: Hitachi Bia Macine Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121226 Termination date: 20170326 |