CN101221273A - Parallel type macro-micro-driven high-precision heavy-caliber optical grating split joint device - Google Patents
Parallel type macro-micro-driven high-precision heavy-caliber optical grating split joint device Download PDFInfo
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- CN101221273A CN101221273A CNA2008100639522A CN200810063952A CN101221273A CN 101221273 A CN101221273 A CN 101221273A CN A2008100639522 A CNA2008100639522 A CN A2008100639522A CN 200810063952 A CN200810063952 A CN 200810063952A CN 101221273 A CN101221273 A CN 101221273A
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Abstract
A parallel type macro-micro driven raster splicing device with high precision and big caliber relates to a raster splicing device with high precision and big caliber. The invention can solve the problem that China has no raster splicing devices with high precision and big caliber. A two-dimensional moving platform part (7) is fixed on a base (6); the lower end of a movable raster part (1) is hinged with the upper end of the two-dimensional moving platform part (7); a fixed raster part (4) is fixedly arranged on the base (6); a first X-axle linear driver (2), a third X-axle linear driver (9) and a second X-axle linear driver (8) are arranged on the base (6) from top to bottom along the direction of an X-axle in turn; a first Y-axle linear driver (3)and a second Y-axle linear driver (5) are arranged on the base (6) from top to bottom along the direction of a Y-axle in turn; each linear driver is respectively fixedly connected with the base (6) and the raster part (1). The splicing device has the advantages of compact structure, convenient adjusting, flexible operation and high splicing precision, etc., and can realize the splicing with high precision along the five directions of freedom of motion of the space of the movable raster and a static raster in a large area.
Description
Technical field
The present invention relates to a kind of high-precision heavy-caliber optical grating splicing apparatus, belong to optical-mechanical motion positions technical field.
Background technology
Along with the high speed development of science and technology, diffraction grating obtains application more and more widely gradually, and is also more and more to the demand of large tracts of land high precision diffraction gratings.At present, China has carried out some large-scale science engineering projects such as synchrotron radiation light beam line, laser fusion, LAMOST astronomical telescope and infrared solar tower spectrometer successively, all presses for the high-quality large-area diffraction grating of development in these projects.For example, in the laser fusion project that China is just carrying out---in " refreshing light " series engineering project, utilize chirped pulse amplification (CPA), make to obtain more that high-energy, more high-intensity ultrashort pulse become possibility.In the CPA system, the damage threshold and the bore of the energy constraint of the ultrashort laser pulse of generation grating in the compression pond.Can multi-layer dielectric gratings has higher damage threshold, but be difficult to realize the manufacturing of heavy-caliber optical grating, thereby obtain the large tracts of land diffraction grating and become this project key of success factor that influences.
At present, directly make large-area diffraction grating and have following problem: one, directly make the optical grating graduating machine that large-area diffraction grating need be developed the big stroke of high precision, realize the manufacturing of large-area grating.This need drop into a large amount of funds and manpower, and the process-cycle is also very long, and difficulty is very big.Two, diffraction grating need be on matrix plated film, and depict the grating fringe of specific direction, the plated film homogeneity question of large-area grating is not easy to guarantee.Three, because the overall length of ruling grating increases, it is also very serious to the wearing and tearing of cutter therefore to process the large-area grating striped.Although can adopt diamond cutter to carry out grating ruling, its wear problem is still very serious.In addition, directly making the large tracts of land diffraction grating needs the automatic tool changer of litho machine to have very high cutter repetitive positioning accuracy.These problems also become the important bottleneck problem that the restriction large-area grating is made.Therefore, directly making large-area diffraction grating at present all is to be difficult to realize at aspects such as economy, technical guarantees.
Nineteen ninety, Italian scholar Mazzacurati and Ruocco show by theoretical research: obtaining large-area grating by the method for splicing is feasible in theory.The diffraction grating that the Hitachi company of Japan was 150 * 150mm in 1997 with 36 areas splices the big grating that area is 900 * 900mm, and is successfully applied on the astronomical instrument.The people such as S.G.Turukhano of Russian Academy Of Sciences Leningrad nuclear physics research institute utilize equipment such as the closed-loop control interference optics have the piezoelectric micromotor regulating mechanism, precision level Mobile Slide, canonical reference grating to splice grating constant in nineteen ninety-five be that 1 μ m, length (along dispersion direction) are the large tracts of land holographic grating of 1150mm.Nineteen ninety-five U.S. Jason Richardson grating laboratory (Richardson GratingLaboratory) has made the jointing grating of 840 * a 214 * 125mm for European Southern Observatory (ESO), and is used for its 8 meters attached spectrometers of large-scale astronomical telescope.Be used for the research of its uranology direction again for Japanese national astronomical observatory has made three jointing gratings in 1999.Utilize the method that the little grating of polylith splices to become the important channel that obtains large-area grating.
The high-precision heavy-caliber optical grating splicing relates to multi-disciplinary complex technologys such as Machine Design, precision positioning, ultraprecise processing, control theory, computer technology, is crucial gordian technique in national defence and the civil area.External starting is more morning than domestic, and has obtained certain achievement, has gone to the prostatitis in the world in the research of grating splicing as countries such as the U.S., Japan, Russia.But external grating splicing has been implemented blockade on new techniques to China to a certain extent, and this has greatly limited the general technical level that China obtains large tracts of land high precision grating.Thereby the device that exploitation is used for the splicing of heavy caliber high precision grating has important theory and realistic meaning.
Summary of the invention
The objective of the invention is for problem that solves domestic no high-precision heavy-caliber optical grating splicing apparatus and then the high-precision heavy-caliber optical grating splicing apparatus that the little driving of a kind of parallel type macro is provided.
The technical scheme that technical solution problem of the present invention is adopted is: the present invention by moving grating parts, decide the grating parts, five linear actuators, two-dimension moving platform parts, pedestals are formed; Described two-dimension moving platform parts are fixed on the pedestal, the upper end ball-joint of the lower end of described moving grating parts and two-dimension moving platform parts, describedly decide the grating parts and be packed on the pedestal, described five linear actuators are respectively the first X-axis linear actuators, the second X-axis linear actuator, the 3rd X-axis linear actuator, the first Y-axis linear actuator, the second Y-axis linear actuator, the described first X-axis linear actuator, the 3rd X-axis linear actuator, the second X-axis linear actuator from top to bottom is successively set on the pedestal along X-direction, the described first Y-axis linear actuator, the second Y-axis linear actuator from top to bottom is successively set on the pedestal along Y direction, and described each linear actuator is affixed with pedestal and moving grating parts respectively.
The invention has the beneficial effects as follows: the present invention has compact conformation, easy to adjust, flexible operation, splicing precision advantages of higher, and (400 * 400mm) moving grating and quiet grating be five degree of freedom in the space can to realize maximum area
High-precision joining on the direction.
Description of drawings
Fig. 1 is the isometric drawing of integrally-built main apparent direction of the present invention, Fig. 2 is the isometric drawing of integrally-built back of the present invention apparent direction, Fig. 3 is the isometric drawing of single linear actuator, Fig. 4 is the structural representation that grand moving locking member 18 and locking cushion block 22 are assembled together, Fig. 5 is the front view of micro flexible hinge member 11, and Fig. 6 is the vertical view of Fig. 5, and Fig. 7 is the front view of two-dimension moving platform parts 7, Fig. 8 is the vertical view of Fig. 7, and Fig. 9 is the left view of Fig. 7.
Embodiment
Embodiment one: in conjunction with Fig. 1 and Fig. 2 present embodiment is described, present embodiment by moving grating parts 1, decide grating parts 4, five linear actuators, two-dimension moving platform parts 7, pedestals 6 are formed; Described two-dimension moving platform parts 7 are fixed on the pedestal 6, the upper end ball-joint of the lower end of described moving grating parts 1 and two-dimension moving platform parts 7, describedly decide grating parts 4 and be packed on the pedestal 6, described five linear actuators are respectively the first X-axis linear actuators 2, the second X-axis linear actuator 8, the 3rd X-axis linear actuator 9, the first Y-axis linear actuator 3, the second Y-axis linear actuator 5, the described first X-axis linear actuator 2, the 3rd X-axis linear actuator 9, the second X-axis linear actuator 8 from top to bottom is successively set on the pedestal 6 along X-direction, the described first Y-axis linear actuator 3, the second Y-axis linear actuator 5 from top to bottom is successively set on the pedestal 6 along Y direction, and described each linear actuator is affixed with pedestal 6 and moving grating parts 1 respectively.
Embodiment two: in conjunction with Fig. 1, Fig. 3 present embodiment is described, each linear actuator of present embodiment is formed by flexibly connecting axle 10, micro flexible hinge member 11, nut seat 12, grand movable wire thick stick 13, grand moving stepper motor 14, flexible coupling 15, bearing holder component 16, screw 17, grand moving locking member 18, grand sound line slideway 19, grand moving line slideway 20, driver pedestal 21, locking cushion block 22; The described two ends that flexibly connect axle 10 are connected with nut seat 12 with micro flexible hinge member 11 respectively, the input end of described grand movable wire thick stick 13 passes the internal thread hole of nut seat 12 and screw 17 and the axis hole of bearing holder component 16 and the output terminal of flexible coupling 15 and is in transmission connection, the output shaft of the input end of flexible coupling 15 and grand moving stepper motor 14 is in transmission connection, nut seat 12 is affixed near the outer face and the screw 17 of bearing holder component 16 1 sides, nut seat 12 and grand moving moving line slideway 20 are all affixed with grand moving locking member 18, grand sound line slideway 19 longitudinally is fixed on the driver pedestal 21, grand moving line slideway 20 is contained on the grand sound line slideway 19 and with it and is slidingly matched, grand moving locking member 18 is contained on the locking cushion block 22, leave the gap between grand moving locking member 18 and the locking cushion block 22, can guarantee to realize free movement between two parts, locking cushion block 22 and bearing holder component 16 all are packed on the driver pedestal 21, driver pedestal 21 is affixed with pedestal 6, and micro flexible hinge member 11 and moving grating parts 1 are affixed.So be provided with, drive grand movable wire thick stick 13 by grand moving stepper motor 14 and rotate, and move, thereby can realize that grand moving locking member 18 moves along grand moving line slideway 20 by screw 17 drive nut seats 12.After the coarse adjustment campaign of grand moving stepper motor 14 is finished, adopt lock-screw that grand moving locking member 18 and locking cushion block 22 are coupled together.At this moment, grand moving locking member 18 is locked on the locking cushion block 22, because locking cushion block 22 is rigidly connected with driver pedestal 21, makes grand moving locking member 18 be locked on the driver pedestal 21 like this.Five linear actuators all adopt this mode to realize locking simultaneously, this moment, the coarse adjustment campaign of moving grating finished, can coarse adjustment mechanism be removed by removing grand movable wire thick stick 13, screw 17, bearing holder component 16, flexible coupling 15 and grand moving stepper motor 14, also can keep rack and rinion adjustment and realize coarse adjustment once more under its necessary condition.Other composition is identical with embodiment one with annexation.
Embodiment three: in conjunction with Fig. 4 present embodiment is described, the grand moving locking member 18 of present embodiment is provided with deep-slotted chip breaker 23.Design can guarantee can produce suitable little distortion between grand moving locking member 18 and 22 two parts of locking cushion block when locking like this, realizes the locking of grand moving motion.
Embodiment four: in conjunction with Fig. 1, Fig. 3, Fig. 5 and Fig. 6 present embodiment is described, the micro flexible hinge member 11 of present embodiment is made up of micro flexible hinge 24, fine motion piezoelectric ceramics spare 25, piezoelectric ceramics seat 26, piezoelectric ceramics steel ball 27, flexible hinge holding screw 28, piezoelectric ceramics holding screw 29, nut 30; One end of described micro flexible hinge 24 flexibly connects by the end of piezoelectric ceramics steel ball 27 with fine motion piezoelectric ceramics spare 25, the other end of micro flexible hinge 24 is connected with nut seat 12, micro flexible hinge 24 is contained on the piezoelectric ceramics seat 26, piezoelectric ceramics seat 26 and moving grating parts 1 are affixed, micro flexible hinge 24 axially is connected with piezoelectric ceramics seat 26 by piezoelectric ceramics holding screw 29, micro flexible hinge 24 vertically is connected with piezoelectric ceramics seat 26 by flexible hinge holding screw 28, and the central shaft hole that the other end of fine motion piezoelectric ceramics spare 25 passes piezoelectric ceramics seat 26 is threaded with nut 30.Moving grating adopts grand moving stepper motor 14 to drive grand movable wire thick stick 13 and rotates when needs are adjusted, and drives to flexibly connect axle 10 and promote micro flexible hinge member 11 by screw 17 and nut seat 12 and realizes grand moving motion.Above-mentioned is the grand moving mode of motion of linear actuator, is the motion conditions of moving grating coarse adjustment.After coarse adjustment is finished, need move the accurate adjustment of grating, during accurate adjustment, fine motion piezoelectric ceramics spare 25 drive pressure electroceramics seats 26 also drive moving grating parts 1 motion, realize the fine motion accurate adjustment.
The function of flexible hinge holding screw 28 is: behind fine motion piezoelectric ceramics spare 25 pretensions, realize the tightening function of micro flexible hinge 24 and piezoelectric ceramics seat 26; When 25 elongations of fine motion piezoelectric ceramics spare, micro flexible hinge 24 is stretched, and micro flexible hinge 24 will extend to the left and make moving grating parts 1 move, and then the fine motion of realization grating is regulated.Simultaneously, because fine motion piezoelectric ceramics spare 25 when mounted, realized the installation pretension of fine motion piezoelectric ceramics spare 25 jointly by piezoelectric ceramics holding screw 29 and nut 30, there is certain stretcher strain amount in micro flexible hinge 24.Therefore, when fine motion piezoelectric ceramics spare 25 shrinks, can realize the elastic recoil of micro flexible hinge 24, and then realize the shortening of micro flexible hinge 24 left sides, make moving grating parts 1 produce counter motion.Other composition is identical with embodiment two with annexation.
Embodiment five: in conjunction with Fig. 1, Fig. 7～Fig. 9 present embodiment is described, the two-dimension moving platform parts 7 of present embodiment are made up of to quiet line slideway 35, transition plectane 36, steel ball supporting plate 37, guide rail base plate 38 to moving line slideway 34, X to quiet line slideway 32, steel ball 33, X to moving line slideway 31, Y Y; Described X is affixed with guide rail base plate 38 to quiet line slideway 35, guide rail base plate 38 is packed on the pedestal 6, X is contained in X to moving line slideway 34 and is slidingly matched on quiet line slideway 35 and with it, X is affixed to the lower surface of the upper surface of moving line slideway 34 and transition plectane 36, the upper surface of transition plectane 36 and Y are affixed to the lower surface of quiet line slideway 32, Y is contained in Y to moving line slideway 31 and is slidingly matched on quiet line slideway 32 and with it, Y is affixed to the lower surface of the upper surface of moving line slideway 31 and steel ball supporting plate 37, the upper surface of steel ball supporting plate 37 is provided with ball-and-socket, and described steel ball 33 is contained in the ball-and-socket of steel ball supporting plate 37.So be provided with, the true origin of three rotational freedoms of moving grating is arranged on the sphere center position of steel ball 33.Carrying out
With
When direction moved, steel ball 33 did not rotate, and made moving grating integral body move along two moving sets directions (X and Y) of two-dimension moving platform parts 7.Carrying out around X, Y, when three directions of Z are rotated
Rotate at the whole wraparound commentaries on classics center of moving grating this moment, and do not move along two moving sets directions of two-dimension moving platform parts 7.Two-dimension moving platform parts 7 have guiding, support the effect of linear actuator, also play the effect of load-bearing simultaneously.The kinematic system accuracy that has guaranteed whole Parallel Control is set like this, the purpose that realized making things convenient for control simultaneously, improves system motion stability.Other composition is identical with embodiment one with annexation.
Splicing is: at first, will decide grating and be fixed on and decide on the grating parts 4, and decide the physical dimension of grating and can adjust according to actual conditions, the grating of deciding of 400 * 200mm and two types of sizes of 400 * 400mm can be installed.Attention: when deciding grating and installing, the stripe direction that guarantee to decide grating is vertical direction (Z-direction).Deciding on the grating fringe direction (Z-direction), moving grating and the relative position of decide between the grating are not adjusted, thus grating when splicing the motion on this direction do not do requirement.After deciding the grating installation, will move grating and be installed on the moving grating parts 1, its size can be adjusted according to actual conditions equally, notices guaranteeing that the stripe direction of moving grating is vertical direction (Z-direction).Two manual relative positions that are installed to the best of grating that needs splice.After control system energising work, the action that can splice this moment according to the moving grating needs of state decision of diffraction fringe or focal spot division.In the control of moving grating, the coordinate system of system motion control is based upon the centre of sphere place of two-dimension moving platform parts 7, and sets the direction that the forward that rotatablely moves around some coordinate axis meets the right-handed helix criterion.Five kinds of motion states of moving grating are as follows:
(1) when the athletic posture of moving grating need produce translation motion along the X-axis forward, at this moment, the first X-axis linear actuator 2, the second X-axis linear actuator 8, the 3rd X-axis linear actuator 9 carry out translation along the X-axis forward, and the first Y-axis linear actuator 3 and the second Y-axis linear actuator 5 produce the compensate for displacement of trace on the Y-axis negative direction simultaneously.Otherwise, when the athletic posture of moving grating need produce translation motion along the X-axis negative sense, the first X-axis linear actuator 2, the second X-axis linear actuator 8, the 3rd X-axis linear actuator 9 carry out translation along the X-axis negative sense, simultaneously, the first Y-axis linear actuator 3 and the second Y-axis linear actuator 5 produce the compensate for displacement of trace on the Y-axis negative direction.
(2) when the athletic posture of moving grating need produce translation motion along the Y-axis forward, at this moment, the first Y-axis linear actuator 3, the second Y-axis linear actuator 5 carry out translation along the Y-axis forward, simultaneously, the first X-axis linear actuator 2, the second X-axis linear actuator 8, the 3rd X-axis linear actuator 9 produce the compensate for displacement of trace on the X-axis positive dirction.Otherwise, when the athletic posture of moving grating need produce translation motion along the Y-axis negative sense, at this moment, the first Y-axis linear actuator 3, the second Y-axis linear actuator 5 carry out translation along the Y-axis negative sense, simultaneously, the first X-axis linear actuator 2, the second X-axis linear actuator 8, the 3rd X-axis linear actuator 9 produce the compensate for displacement of trace on the X-axis positive dirction.
(3) athletic posture when moving grating need produce when X-axis is rotated in the forward motion, at this moment, the first Y-axis linear actuator 3 carries out translation along the negative direction of Y-axis, owing to the second Y-axis linear actuator 5 center of circle (centre ofs sphere of two-dimension moving platform parts 7) with respect to the 3 more close rotations of the first Y-axis linear actuator on Z-direction, therefore, the second Y-axis linear actuator 5 produces little translation, the first X-axis linear actuator 2 with respect to the first Y-axis linear actuator 3 on the Y-axis negative direction, the second X-axis linear actuator 8, the 3rd X-axis linear actuator 9 produces compensate for displacement on the X-axis positive dirction.Otherwise, when the athletic posture of moving grating need produce around X-axis reverse rotation campaign, at this moment, the first Y-axis linear actuator 3 carries out translation along the positive dirction of Y-axis, the second Y-axis linear actuator 5 produces little translation on the Y-axis positive dirction, the first X-axis linear actuator 2, the second X-axis linear actuator 8, the 3rd X-axis linear actuator 9 produce compensate for displacement on the X-axis positive dirction.
(4) when the athletic posture of moving grating need produce around the rotatablely moving of Y-axis forward, at this moment, the first X-axis linear actuator 2 moved along the forward of X-axis, and it is mobile that the 3rd X-axis linear actuator 9 and the second X-axis linear actuator 8 carry out trace along the forward of X-axis.Make moving grating realize being rotated in the forward of Y-axis like this around the control rotation center.Under this condition, the first Y-axis linear actuator 3 and the second Y-axis linear actuator 5 compensate displacement along Y direction.Otherwise, when the athletic posture of moving grating need produce around Y-axis reverse rotatablely move the time, at this moment, the first X-axis linear actuator 2 moves along the negative sense of X-axis, the second X-axis linear actuator 8 and the 3rd X-axis linear actuator 9 carry out trace along the negative sense of X-axis and move, and the first Y-axis linear actuator 3 and the second Y-axis linear actuator 5 compensate displacement along Y direction.
(5) when the athletic posture of moving grating need produce around the rotatablely moving of Z axle forward, at this moment, the 3rd X-axis linear actuator 9 is along translation on the X positive dirction, the first X-axis linear actuator 2 and the second X-axis linear actuator 8 be along translation on the X negative direction, and the first Y-axis linear actuator 3 and the second Y-axis linear actuator 5 compensate displacement along Y direction.Otherwise, when the athletic posture of moving grating need produce around the Z axle reverse rotatablely move the time, at this moment, the 3rd X-axis linear actuator 9 is along translation on the X negative direction, the first X-axis linear actuator 2 and the second X-axis linear actuator 8 be along translation on the X positive dirction, and the first Y-axis linear actuator 3 and the second Y-axis linear actuator 5 compensate displacement along Y direction.
In above-mentioned five kinds of motion states, the compensate for displacement that five linear actuators produced is meant the coupling displacement that does not produce other direction for some athletic postures of realizing moving grating, the necessary repair motion that linear actuator will carry out.Because moving grating is to work under the parallel connection of five linear actuators drives, therefore, each athletic posture all will be referred to the accurate motion of five linear actuators, could realize the decoupling zero control of movement position like this.In designed grating splicing apparatus, except the independently moving of above-mentioned some degree of freedom, two or more degree of freedom can be moved simultaneously, realize the spatial attitude adjustment and the motion control of moving grating.
Claims (5)
1. the high-precision heavy-caliber optical grating splicing apparatus of the little driving of parallel type macro, it is characterized in that it by moving grating parts (1), decide grating parts (4), five linear actuators, two-dimension moving platform parts (7), pedestals (6) are formed; Described two-dimension moving platform parts (7) are fixed on the pedestal (6), the upper end ball-joint of the lower end of described moving grating parts (1) and two-dimension moving platform parts (7), describedly decide grating parts (4) and be packed on the pedestal (6), described five linear actuators are respectively the first X-axis linear actuators (2), the second X-axis linear actuator (8), the 3rd X-axis linear actuator (9), the first Y-axis linear actuator (3), the second Y-axis linear actuator (5), the described first X-axis linear actuator (2), the 3rd X-axis linear actuator (9), the second X-axis linear actuator (8) from top to bottom is successively set on the pedestal (6) along X-direction, the described first Y-axis linear actuator (3), the second Y-axis linear actuator (5) from top to bottom is successively set on the pedestal (6) along Y direction, and described each linear actuator is affixed with pedestal (6) and moving grating parts (1) respectively.
2. the high-precision heavy-caliber optical grating splicing apparatus of the little driving of parallel type macro according to claim 1, it is characterized in that described each linear actuator by flexibly connect axle (10), a micro flexible hinge member (11), nut seat (12), Hong Dongsigang (13), grand moving stepper motor (14), flexible coupling (15), bearing holder component (16), screw (17), grand moving locking member (18), grand sound line slideway (19), grand moving line slideway (20), driver pedestal (21), locking cushion block (22) is formed; The described two ends that flexibly connect axle (10) are connected with nut seat (12) with micro flexible hinge member (11) respectively, the input end of described Hong Dongsigang (13) passes the internal thread hole of nut seat (12) and screw (17) and the axis hole of bearing holder component (16) and the output terminal of flexible coupling (15) and is in transmission connection, the output shaft of the input end of flexible coupling (15) and grand moving stepper motor (14) is in transmission connection, nut seat (12) is affixed near the outer face and the screw (17) of bearing holder component (16) one sides, nut seat (12) and grand moving line slideway (20) are all affixed with grand moving locking member (18), grand sound line slideway (19) longitudinally is fixed on the driver pedestal (21), grand moving line slideway (20) is contained in grand sound line slideway (19) and upward and with it is slidingly matched, grand moving locking member (18) is contained on the locking cushion block (22), leave the gap between grand moving locking member (18) and the locking cushion block (22), locking cushion block (22) and bearing holder component (16) all are packed on the driver pedestal (21), driver pedestal (21) is affixed with pedestal (6), and micro flexible hinge member (11) is affixed with moving grating parts (1).
3. the high-precision heavy-caliber optical grating splicing apparatus of the little driving of parallel type macro according to claim 2 is characterized in that described grand moving locking member (18) is provided with deep-slotted chip breaker (23).
4. the high-precision heavy-caliber optical grating splicing apparatus of the little driving of parallel type macro according to claim 2 is characterized in that described micro flexible hinge member (11) is made up of micro flexible hinge (24), fine motion piezoelectric ceramics spare (25), piezoelectric ceramics seat (26), piezoelectric ceramics steel ball (27), flexible hinge holding screw (28), piezoelectric ceramics holding screw (29), nut (30); One end of described micro flexible hinge (24) flexibly connects by the end of piezoelectric ceramics steel ball (27) with fine motion piezoelectric ceramics spare (25), the other end of micro flexible hinge (24) is connected with nut seat (12), micro flexible hinge (24) is contained on the piezoelectric ceramics seat (26), piezoelectric ceramics seat (26) is affixed with moving grating parts (1), micro flexible hinge (24) axially is connected with piezoelectric ceramics seat (26) by piezoelectric ceramics holding screw (29), micro flexible hinge (24) vertically is connected with piezoelectric ceramics seat (26) by flexible hinge holding screw (28), and the central shaft hole that the other end of fine motion piezoelectric ceramics spare (25) passes piezoelectric ceramics seat (26) is threaded with nut (30).
5. the high-precision heavy-caliber optical grating splicing apparatus of the little driving of parallel type macro according to claim 1 is characterized in that described two-dimension moving platform parts (7) are made up of to quiet line slideway (35), transition plectane (36), steel ball supporting plate (37), guide rail base plate (38) to moving line slideway (34), X to quiet line slideway (32), steel ball (33), X to moving line slideway (31), Y Y; Described X is affixed to quiet line slideway (35) and guide rail base plate (38), guide rail base plate (38) is packed on the pedestal (6), X is contained in X to moving line slideway (34) and upward and with it is slidingly matched to quiet line slideway (35), X is affixed to the lower surface of the upper surface of moving line slideway (34) and transition plectane (36), the upper surface of transition plectane (36) and Y are affixed to the lower surface of quiet line slideway (32), Y is contained in Y to moving line slideway (31) and upward and with it is slidingly matched to quiet line slideway (32), Y is affixed to the lower surface of the upper surface of moving line slideway (31) and steel ball supporting plate (37), the upper surface of steel ball supporting plate (37) is provided with ball-and-socket, and described steel ball (33) is contained in the ball-and-socket of steel ball supporting plate (37).
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