CN101140163A - Contact and non-contact type dual-purpose surface roughness measuring systems - Google Patents

Contact and non-contact type dual-purpose surface roughness measuring systems Download PDF

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Publication number
CN101140163A
CN101140163A CNA2007101654385A CN200710165438A CN101140163A CN 101140163 A CN101140163 A CN 101140163A CN A2007101654385 A CNA2007101654385 A CN A2007101654385A CN 200710165438 A CN200710165438 A CN 200710165438A CN 101140163 A CN101140163 A CN 101140163A
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contact
contact type
worktable
measurement head
measuring
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孙正贵
李斌
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BEIJING HENG'AN TONGDA TECHNOLOGY Co Ltd
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BEIJING HENG'AN TONGDA TECHNOLOGY Co Ltd
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Abstract

The invention relates to a contact and non-contact type dual-purpose surface roughness measuring system which comprises a measuring sensor a computer and is characterized in that the computer is connected and provided with two groups of measuring sensors through measurement and data acquisition circuit, and the two groups of measuring sensors are respectively a non-contact type measuring head and a contact type measuring head. The contact and non-contact type dual-purpose surface roughness measuring system can realize the contact and non-contact type engineering surface roughness measuring method through a measuring instrument, centralize the advantages of contact type and non-contact type, enlarge the range of measuring objects, reduce the cost, provide the precise and reasonable measuring data, implement the real-time contrast and deviation correction for the two measuring results, and be applied to the two-dimensional or three-dimensional mark measurement of engineering roughness of various complex workpiece surfaces to be measured.

Description

Contact and non-contact type dual-purpose surface roughness measuring systems
Technical field
The invention belongs to engineering surface measuring technique and apparatus field thereof, be specifically related to a kind of small vestige of various engineering surfaces and workpiece such as bullet or instrument that is used for and measure, and possess contacting and non-contact type dual-purpose surface roughness measuring systems of contact and contactless two kinds of metering systems.
Background technology
The measurement of vestige generally adopts the method for digital photography to obtain the two-dimensional image of the amplification of article vestige to be measured, because small vestige is three-dimensional, the machinery wiping takes place for generally relevant parts and object under test surface draws and stays, often be depression, stereo structure, its shape and fine feature all are distributed in three dimensions, so two-dimensional image can't provide the complete description of vestige.For example bullet is being carried out vestige when measuring, vestige plane picture two-dimensional measurement instrument commonly used extracts the land border, and what relied on is the variation of edge gray-scale value, and there is bigger error in the true form that its gray-scale value can not reflecting edge.In addition, conventional vestige plane picture two-dimensional measurement instrument can not fully write down the fine feature of object under test, can not fully show the fine difference of object under test.
The three-dimensional measurement technology is emerging engineering surface metering system, it requires surveying instrument vertical survey and horizontal survey scope bigger, especially horizontal scanning scope should be at several millimeter or bigger, so as the comprehensive assessment table and shape error, surface wave temperature and surfaceness relation and to the surface of the work Effect on Performance.The employed instrument that is used for the engineering surface topography measurement adopts the diamond stylus contourgraph of contact measurement method to occupy main status at present, and this is because contact pin type instrument office has reliable, easy to operate, the advantages of cheap price of measurement.But, this diamond stylus contourgraph has two main shortcomings: this quasi-instrument belongs to instrument with contacts on the one hand, there are certain ergometry in contact pilotage and surface of the work, and increase along with the increase of range, sharp diamond stylus is meeting defective work piece surface under certain gaging pressure, and influences the authenticity of measurement result.Simultaneously, contact pilotage can be damaged easily in measuring process.Therefore, for some soft metals, biochemical material, rubber surface, and the surface that contains information and ultraprecise processing work, generally should not adopt this kind mode and instrument to measure, on the other hand, be subjected to the influence of measuring head radius, shape, ergometry and measuring head dynamic property, contact pin type apparatus measures speed is slow, generally be about 1mm/s, particularly in the measuring three-dimensional morphology process, need to consume the too much time, thereby introduce the error that temperature drift brings.
In order to overcome the above-mentioned shortcoming of contact measurement method, contactless measurement based on various measuring principles is developed rapidly, this method can realize the nondestructive measurement of surface topography and evaluation, and help to improve measuring accuracy and measuring speed, therefore be subjected to people's extensive attention and widespread usage.Topography measurement for engineering surface, illuminant-pointer type contourgraph based on the focusing-detection principle is the instrument of standing employing, yet this contourgraph is had relatively high expectations to the cleanliness of surface of the work, the degree of tilt of surface of the work has bigger influence to measurement structure, and also there is influence in the reflectivity of workpiece material to measurement result.
And in the engineering survey practical operation, it is very diversified producing the surface that needs to measure with research, need purchase at different measured surfaces, use different surveying instruments, then can't carry out correct measurement and evaluation for the diversified measured surface of same workpiece for measurement.
Adopt the formation of the vestige of three-dimensional measurement technical research bullet/instrument, Changing Pattern is also analyzed and is checked, can be used for distinguish sending out and variety of gun and instrument are penetrated in identification, thereby provide the evidence of solving a case, for judicial department quick, track down important cases such as gunslinging accurately strong support and scientific basis are provided, also can be used for checking firearms simultaneously, the performance condition of bullet, but because there are above-mentioned defective in existing contact measuring instrument and non-contact measurement instrument, and can't carry out respective detection result's contrast, therefore can't proofread and correct two kinds of measured deviations that measuring instrument produced.
Summary of the invention
The object of the present invention is to provide a kind of available employing contact and contactless dual mode to carry out the two dimension of vestige or contacting and non-contact type dual-purpose surface roughness measuring systems of three-dimensional Trace Data collection, enlarged the scope of measuring object, and can carry out the selection of contact or non-contact measurement mode according to the different parts condition of different measuring objects and same measuring object.
Another object of the present invention is to provide a kind of contact and non-contact type dual-purpose surface roughness measuring systems that can be used for measuring bullet or the small vestige measurement of instrument, its reasonable in design, applied widely, and the contrast and the complementary correction analysis of measurement data can be provided, solved many defectives and deficiency that existing contact type measurement instrument and non-contact measurement instrument exist.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of contact and non-contact type dual-purpose surface roughness measuring systems, comprise survey sensor and computing machine, it is characterized in that described computing machine is connected with two groups of survey sensors by measurement and data acquisition circuit, these two groups of survey sensors are respectively non-contact measurement head and contact type measurement head.
Described non-contact measurement head is an illuminant-pointer type non-cpntact measurement head, and described contact type measurement head is a diamond stylus formula measuring head.
The inductance signal wire of described non-contact measurement head and contact type measurement head inserts shared measurement and data acquisition circuit, worktable scanning system and a COMPUTER PARAMETER assessment module.
Described measuring system comprises horizontally disposed one dimension worktable, and the one dimension stationary table is arranged on the base, and the opposite side of base is provided with a column, is respectively installed with non-contact measurement head and contact type measurement head on the column.
Described one dimension worktable is provided with the object under test stationary installation, and the one dimension worktable is done the motion of one dimension by step motor drive, and stepper motor connects computing machine by driving circuit, and the computer control mode of motion is arranged.
The top of described one dimension worktable is provided with non-contact measurement head and contact type measurement head respectively, the contact type measurement head is pressed close to the setting of one dimension worktable, be sleeved on the lower end of column, the non-contact measurement headgear is contained in the upper end of column and is arranged on the top of contact type measurement head.
This contact and non-contact type dual-purpose surface roughness measuring systems, the vestige that can be used for bullet or instrument is measured, it is characterized in that described measuring system comprises a horizontally disposed worktable, one side of worktable is provided with column, movable set contact type measurement head and non-contact measurement head on the column, described non-contacting measuring head is a measuring microscope, and the contact type measurement head is a phase grating interfere type PGI feeler; The rotation and the clamping device of fixing bullet or instrument are set on the worktable.
Described worktable be the X/Y that moves of two dimension to worktable, X/Y adopts AC servo machinery driving to worktable, computing machine connects by one drive circuit and drives the AC servo motor of X/Y to worktable.
Described rotation and clamping device connect an AC servo motor and by its driving, AC servo motor connects computing machine by another driving circuit.
Described measuring system also comprises a base, and an end of described base fixedly installs X/Y and fixedly installs column to the other end of table base, and phase grating interfere type PGI feeler is sleeved on the below of measuring microscope.
This contact has been concentrated the advantage that contacts with contactless measuring method with non-contact type dual-purpose surface roughness measuring systems, enlarged the scope of measuring object, in same measuring system, can select different measuring methods for use with specific (special) requirements according to the actual conditions on measured workpiece surface.When adopting the contact type measurement head, by the non-cpntact measurement head that rotary sleeve is contained on the column it to be removed, the inductance signal wire of contact type measurement head inserts shared measurement and data acquisition circuit; When adopting the non-contact measurement head, by the contact type measurement head that rotating head is contained on the column it to be removed, the inductance signal wire of non-contact measurement head inserts shared measurement and data acquisition circuit.Contact type measurement head and non-contact measurement head can adopt same measurement and data acquisition circuit, worktable scanning system and COMPUTER PARAMETER assessment module, thereby the measurement of engineering surface roughness is combined.The motion of one dimension worktable is realized by the stepper motor of driving circuit control one dimension worktable by computing machine.
Adopt contacting and non-contact type dual-purpose surface roughness measuring systems of PGI contact displacement sensor and measuring microscope, realize the measurement of contact and contactless dual mode respectively, computing machine can combine two kinds of metering systems, concentrate the advantage of two kinds of measuring methods, enlarged the scope of measuring object, and can select different measuring methods for use with specific (special) requirements according to the actual conditions of measured workpiece.Computing machine can be proofreaied and correct the measuring error of two kinds of measuring methods easily, and can realize the contrast of two kinds of vestige pictures by the data acquisition to two kinds of measuring heads.
Adopt X/Y can satisfy measurement, and can realize flat and the measurement of various Trace Data is carried out in the two and three dimensions Trace Data collection surface more flexibly workpiece for measurement to plane and three-dimensional face to worktable.
Beneficial effect of the present invention is, this contact can realize contacting and contactless two kinds of engineering surface roughness concentration modes with non-contact type dual-purpose surface roughness measuring systems by a surveying instrument, concentrated the advantage of the two, enlarged the scope of measuring object, cheap, accurate and rational measurement data can be provided, also can contrast in real time and offset correction, measure applicable to the two dimension or the three-dimensional vestige of the engineering roughness on the workpiece for measurement surface of various complexity to two kinds of measurement results.
Description of drawings
Fig. 1 is the composition structural representation of measuring system in the embodiment of the invention 1;
Fig. 2 is the composition structural representation of measuring system in the embodiment of the invention 2.
Embodiment
Embodiment 1 is as Fig. 1, and this contact and non-contact type dual-purpose surface roughness measuring systems mainly are made up of one dimension worktable, column, illuminant-pointer type non-cpntact measurement head 2, diamond stylus formula measuring head 3, driving circuit, measurement and data acquisition circuit, computing machine.Be set with one by stepper motor driven one dimension worktable on a firm banking, the one dimension worktable is provided with the object under test stationary installation, and computing machine connects the control step motor by driving circuit.Be set with column 1 on the base on one dimension worktable next door, be respectively installed with illuminant-pointer type non-cpntact measurement head 2 and diamond stylus formula measuring head 3 on the column 1.Illuminant-pointer type non-cpntact measurement head 2 and diamond stylus formula measuring head 3 all are sleeved on to slide on the column and are provided with, and illuminant-pointer type non-cpntact measurement head 2 is positioned at the top of diamond stylus formula measuring head 3.The inductance signal wire of illuminant-pointer type non-cpntact measurement head 2 and diamond stylus formula measuring head 3 is connected computing machine, both shared same worktable scanning system and COMPUTER PARAMETER assessment module after all inserting a shared measurement and data acquisition circuit.
The stationary table of embodiment 2 these contacts and non-contact type dual-purpose surface roughness measuring systems is arranged on the base, and another of described base fixedly installs column, movable set measuring microscope and phase grating interfere type PGI feeler 4 on the column; Worktable be the X/Y that moves of two dimension to worktable, X/Y adopts AC servo machinery driving to worktable, computing machine connects by driving circuit 2 and drives the AC servo motor of X/Y to worktable; X/Y is provided with rotation and the clamping device that fixing bullet or instrument are used on worktable, rotation and clamping device connects the AC servo motor of this device and by its driving, AC servo motor connects computing machine by driving circuit 1.The inductance signal wire of measuring microscope and phase grating interfere type PGI feeler 4 inserts same measurement and data acquisition circuit, and, calculate interior resident have shared worktable scanning system and COMPUTER PARAMETER assessment module by this measurement and data acquisition circuit connection computing machine.
Adopt this measuring system to carry out three-dimensional measurement to bullet trace, the maximum measurement range 2mm of its vertical direction, resolution 0.1um by contact and noncontact dual mode; Horizontal shift scope 50mm * 50mm, minimum interval 0.2um.Before the measurement, operation rotation and clamping device clamping be bullet 5 fixedly, and the coaxiality error that guarantees warhead axis and rotation centerline is controlled within the specific limits, computing machine is by the AC servo motor of driving circuit 1 control X/Y worktable, and the PGI feeler or the measuring microscope of suit on the mobile column, the effective range that makes the tested position of bullet enter PGI feeler and measuring microscope, and can be by the relevant measurement sampling parameter of UI Preferences.After measuring beginning, computing machine is by driving circuit 1 AC servo motor driven rotary device and then drive the bullet rotation, and according to the difference of selecting metering system, measuring process is divided into contact and contactless.During contact type measurement, start the positional information that the PGI feeler is gathered contact pilotage, until having gathered tested one ring cross-section profile of bullet.After having surveyed a circle, X/Y moves axially certain distance to worktable along bullet, repeats above-mentioned steps until gathering complete bullet zone.During non-contact measurement, according to pickup area the measured zone of bullet is divided into some five equilibriums, by image capturing system the bullet image that obtains in the measuring microscope is gathered in real time, after having gathered a sub regions, rotation and clamping device drive bullet and turn over a calibration, until the whole measured zone of having gathered bullet.
The tool plan vestige is being measured, measured piece can directly be fixed on the X/Y worktable, the contact pilotage contact instrument of PGI feeler, drive X to AC servo motor, contact pilotage streaks instrument, obtain tool surfaces vestige contour curve, according to the curve data that collects, parameters such as the height of evaluation groove, peak valley and spacing.If measure three-dimensional vestige, can at X after measurement is finished, drive Y to AC servo motor, tested instrument moves a determining deviation, and measured X is to profile, and duplicate measurements process like this can measure the three-dimensional vestige of tool surfaces.Bullet that records and tool surfaces raw data can offer feature extraction and analysis system processes and demonstration after error such as replenishes at pre-service.

Claims (10)

1. one kind contacts and non-contact type dual-purpose surface roughness measuring systems, comprise survey sensor and computing machine, it is characterized in that described computing machine is connected with two groups of survey sensors by measurement and data acquisition circuit, these two groups of survey sensors are respectively non-contact measurement head and contact type measurement head.
2. contact according to claim 1 and non-contact type dual-purpose surface roughness measuring systems is characterized in that described non-contact measurement head is an illuminant-pointer type non-cpntact measurement head, and described contact type measurement head is a diamond stylus formula measuring head.
3. contact according to claim 1 and non-contact type dual-purpose surface roughness measuring systems is characterized in that the inductance signal wire of described non-contact measurement head and contact type measurement head inserts shared measurement and data acquisition circuit, worktable scanning system and a COMPUTER PARAMETER assessment module.
4. contact according to claim 1 and non-contact type dual-purpose surface roughness measuring systems, it is characterized in that described measuring system comprises horizontally disposed one dimension worktable, the one dimension stationary table is arranged on the base, the opposite side of base is provided with a column, is respectively installed with non-contact measurement head and contact type measurement head on the column.
5. contact according to claim 4 and non-contact type dual-purpose surface roughness measuring systems, it is characterized in that described one dimension worktable is provided with the object under test stationary installation, the one dimension worktable is done the motion of one dimension by step motor drive, stepper motor connects computing machine by driving circuit, and the computer control mode of motion is arranged.
6. contact according to claim 4 and non-contact type dual-purpose surface roughness measuring systems, the top that it is characterized in that described one dimension worktable is provided with non-contact measurement head and contact type measurement head respectively, the contact type measurement head is pressed close to the setting of one dimension worktable, be sleeved on the lower end of column, the non-contact measurement headgear is contained in the upper end of column and is arranged on the top of contact type measurement head.
7. contact according to claim 1 and non-contact type dual-purpose surface roughness measuring systems, the vestige that is used for bullet or instrument is measured, it is characterized in that described measuring system comprises a horizontally disposed worktable, one side of worktable is provided with column, movable set contact type measurement head and non-contact measurement head on the column, described non-contacting measuring head is a measuring microscope, and the contact type measurement head is a phase grating interfere type PGI feeler; The rotation and the clamping device of fixing bullet or instrument are set on the worktable.
8. contact according to claim 7 and non-contact type dual-purpose surface roughness measuring systems, it is characterized in that described worktable is that the mobile X/Y of two dimension is to worktable, X/Y adopts AC servo machinery driving to worktable, and computing machine connects the AC servo motor of driving X/Y to worktable by one drive circuit.
9. contact according to claim 7 and non-contact type dual-purpose surface roughness measuring systems is characterized in that described rotation and clamping device connect an AC servo motor and by its driving, AC servo motor connects computing machine by another driving circuit.
10. contact according to claim 7 and non-contact type dual-purpose surface roughness measuring systems, it is characterized in that described measuring system also comprises a base, one end of described base fixedly installs X/Y and fixedly installs column to the other end of table base, and phase grating interfere type PGI feeler is sleeved on the below of measuring microscope.
CNA2007101654385A 2007-10-29 2007-10-29 Contact and non-contact type dual-purpose surface roughness measuring systems Pending CN101140163A (en)

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101387665B (en) * 2008-05-07 2010-11-10 中国电子科技集团公司第十研究所 Computation method of radio frequency effective conductivity of rough surface of radio frequency microwave device
CN102322819A (en) * 2011-08-18 2012-01-18 天津市精诚机床制造有限公司 Gear chamfer laser measuring instrument
CN103090820A (en) * 2013-02-05 2013-05-08 中核(天津)科技发展有限公司 Detecting device of jewel bearing curvature radius
CN104019773A (en) * 2014-06-06 2014-09-03 东莞市瀛通电线有限公司 Wire rod surface roughness measuring method and device for implementing method
CN102865818B (en) * 2012-09-12 2015-08-05 昆山允可精密工业技术有限公司 Contact type distance measuring device
CN104880171A (en) * 2015-06-04 2015-09-02 深圳市商德先进陶瓷有限公司 System, method and device for detecting surface roughness of porous ceramic
CN107532892A (en) * 2015-05-20 2018-01-02 卡尔蔡司工业测量技术有限公司 Method for the dynamic vibration that detects roughness sensor, the method for the roughness for measuring workpiece surface, computer program product and the measuring apparatus for implementation
CN109238092A (en) * 2018-09-14 2019-01-18 佛山市恒力泰机械有限公司 Ceramic adobe thickness online automatic detection method and device
CN109269393A (en) * 2018-11-06 2019-01-25 吉林大学 A kind of surface whole audience microscopic three-dimensional pattern automatic tester
CN111272113A (en) * 2020-04-10 2020-06-12 中国建筑科学研究院有限公司 Concrete faying face roughness measurement instrument
CN112050737A (en) * 2020-09-17 2020-12-08 中国航发沈阳黎明航空发动机有限责任公司 Non-contact detection method for rubber sealing ring
CN112797925A (en) * 2021-01-22 2021-05-14 新智德精密零件(深圳)有限公司 Soft rubber detection method, device, equipment and computer readable storage medium
CN115808118A (en) * 2023-02-07 2023-03-17 山东中科普锐检测技术有限公司 Roughness and profile degree dual-purpose combination coordination measuring device and measuring method

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101387665B (en) * 2008-05-07 2010-11-10 中国电子科技集团公司第十研究所 Computation method of radio frequency effective conductivity of rough surface of radio frequency microwave device
CN102322819A (en) * 2011-08-18 2012-01-18 天津市精诚机床制造有限公司 Gear chamfer laser measuring instrument
CN102322819B (en) * 2011-08-18 2016-08-10 天津精诚机床股份有限公司 Gear chamfer laser measuring instrument
CN102865818B (en) * 2012-09-12 2015-08-05 昆山允可精密工业技术有限公司 Contact type distance measuring device
CN103090820A (en) * 2013-02-05 2013-05-08 中核(天津)科技发展有限公司 Detecting device of jewel bearing curvature radius
CN104019773A (en) * 2014-06-06 2014-09-03 东莞市瀛通电线有限公司 Wire rod surface roughness measuring method and device for implementing method
CN104019773B (en) * 2014-06-06 2017-10-13 东莞市瀛通电线有限公司 A kind of wire surface roughness measurement method and the equipment for implementing this method
CN107532892A (en) * 2015-05-20 2018-01-02 卡尔蔡司工业测量技术有限公司 Method for the dynamic vibration that detects roughness sensor, the method for the roughness for measuring workpiece surface, computer program product and the measuring apparatus for implementation
US10837752B2 (en) 2015-05-20 2020-11-17 Carl Zeiss Industrielle Messtechnik Gmbh Method for capturing dynamic vibrations of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product and measuring device configured to carry out the methods
CN104880171B (en) * 2015-06-04 2017-11-10 深圳市商德先进陶瓷股份有限公司 Detecting system, the method and device of porous ceramic surface roughness
CN104880171A (en) * 2015-06-04 2015-09-02 深圳市商德先进陶瓷有限公司 System, method and device for detecting surface roughness of porous ceramic
CN109238092A (en) * 2018-09-14 2019-01-18 佛山市恒力泰机械有限公司 Ceramic adobe thickness online automatic detection method and device
CN109269393A (en) * 2018-11-06 2019-01-25 吉林大学 A kind of surface whole audience microscopic three-dimensional pattern automatic tester
CN111272113A (en) * 2020-04-10 2020-06-12 中国建筑科学研究院有限公司 Concrete faying face roughness measurement instrument
CN112050737A (en) * 2020-09-17 2020-12-08 中国航发沈阳黎明航空发动机有限责任公司 Non-contact detection method for rubber sealing ring
CN112050737B (en) * 2020-09-17 2021-11-05 中国航发沈阳黎明航空发动机有限责任公司 Non-contact detection method for rubber sealing ring
CN112797925A (en) * 2021-01-22 2021-05-14 新智德精密零件(深圳)有限公司 Soft rubber detection method, device, equipment and computer readable storage medium
CN115808118A (en) * 2023-02-07 2023-03-17 山东中科普锐检测技术有限公司 Roughness and profile degree dual-purpose combination coordination measuring device and measuring method
CN115808118B (en) * 2023-02-07 2023-04-18 山东中科普锐检测技术有限公司 Roughness and profile degree dual-purpose combination coordination measuring device and measuring method

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