CN101122610A - Microchannel speed distribution measuring apparatus and method - Google Patents
Microchannel speed distribution measuring apparatus and method Download PDFInfo
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- CN101122610A CN101122610A CNA2006100892466A CN200610089246A CN101122610A CN 101122610 A CN101122610 A CN 101122610A CN A2006100892466 A CNA2006100892466 A CN A2006100892466A CN 200610089246 A CN200610089246 A CN 200610089246A CN 101122610 A CN101122610 A CN 101122610A
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Abstract
The invention discloses a measuring device and a measuring method for micro-channel velocity distribution, including a microscope, a double-pulse laser, a photons detector, a synchronous controller and a processor. The method includes the following steps: 1) regulating all instruments to a working state; 2) injecting fluorescent particle solution into micro channel and drive the liquid flowing in the channel; 3) adjusting the vertical position of lens to the clearest imaging position on the bottom surface of the micro channel; 4) the distance between two light spots on the same particle irradiating by the double-pulse laser should be within 20 to 50 pixels; 5) continuously shooting multi-frame images under the irradiation of the double-pulse laser; 6) adjusting the focal plane of lens to a new position and shoot multi-frame images again; 7) repeating the step 6) and shooting images in different positions. The invention has the advantages of high optical sensitivity, high spatial resolution of flow speed detection and high adjustable accuracy of vertical displacement.
Description
Technical field
The present invention relates to a kind of measurement mechanism and measuring method of fluid channel velocity distribution.
Background technology
The microscale main flow feature that flows: (1) in this characteristic dimension scope, surface to volume ratio increases to 10
6m
-1, the heat transfer relevant with the surface, mass transport process have a significant impact flowing; (2) yardstick dwindles and makes that some gradient quantitative change is big in the flow field, and the effect of the physical parameter relevant with velocity gradient, thermograde will strengthen: (3) interfacial force (liquid solid, liquid gas) will obviously strengthen the effect of flowing.In order deeply to be familiar with these new flow field problems, the observation that experimentizes in theory research is particularly important.
Microfluidic is an important content in MEMS (Micro-Electro-Mechanical System, the i.e. microelectromechanical systems) systematic study, the research of microfluidic mechanism is become the important foundation of MEMS field development.In the full-fledged gradually and successful experiment measuring that is applied to microfluidic of MicroPIV (Micro Particle Image Velocimetry) technology.
The measuring technique of existing fluid channel velocity distribution (MicroPIV technology before the feeling the pulse with the finger-tip), such as document 1: disclosed technology in " Wang Haoli etc.; Micro-PIV technology---the new development of particle image velocimetry technology; Proceedings of Mechanics; the 35th the 1st phase of volume, on February 25th, 2005 ", its flow field resolution is only in the level less than 5～10 μ m, and microscale flow performance length is 0.1 μ m～1mm, and the flow field velocity measurement spatial resolution requires to reach 0.5 μ m.And for example document 2: in " Hao Pengfei, the flow performance research of microtubule and micro-nozzle, Tsing-Hua University's PhD dissertation, 2006 ", and the fluorescent particles of the use diameter 1 μ m in φ 168 μ m pipes.And all recommend to use the fluorescent particles of diameter 〉=1 μ m such as commercial product Technical Sourcing Internation and Dantc company.
In order to observe the following fluid channel of 20 μ m, must use the fluorescent particles of diameter≤200nm.According to the Rayleigh scattering formula, the particle scattering light intensity reduces to form d with particle diameter
p 6Rule weakens.Therefore present commercial product can't be observed the fluorescent particles of diameter＜1 μ m, can't satisfy the microchannel of tens microns sectional dimensions and the observation that nearly wall flows.
In view of the deficiencies in the prior art, just need a kind of measurement mechanism and measuring method of new fluid channel velocity distribution.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, thereby a kind of measurement mechanism and measuring method of fluid channel velocity distribution are provided.
In order to achieve the above object, the present invention takes following technical scheme:
A kind of measurement mechanism of fluid channel velocity distribution comprises:
One microscope 10, this microscope have object lens 20 and a reflection unit 17; It is characterized in that, also comprise:
A pair of pulsed laser 12, the laser that this double-pulse laser device sends enters the reflection unit 17 of described microscope 10 through an optical system 11, and laser-bounce enters described object lens 20 and enters the visual field;
One light quantum detecting device 13 cooperates with described microscope 10, is used to write down the light distribution of the fluid channel 21 that object lens 20 are observed.
One synchronous controller 14 is connected with double-pulse laser device 12 with described light quantum detecting device 13 respectively;
One processor 15 is connected with described isochronous controller 14, light quantum detecting device 13 respectively.
In technique scheme, further, comprise that also a displacement controller 16 is installed on the described object lens, displacement controller 16 is regulated the position of object lens, can observe the flow field of different depth position in the fluid channel.
Further, described processor 15 is a computing machine.
Further, described optical system 11 is condenser lens and collimation lens.
Measuring method based on a kind of fluid channel velocity distribution of said apparatus comprises the steps:
1) each instrument is adjusted to the preliminary work state;
2) inject fluorescent particles solution to fluid channel, drive liquid flow in the pipeline, then microchannel is fixed on the microscope stage;
3) closed loop environmental light source uses continuous light to observe particle movement, and by light quantum detecting device images acquired; The upright position of regulating object lens is up to the bottom surface imaging of fluid channel position the most clearly; Continuous light herein is meant the fluorescence that microscopical mercury lamp light source sends;
4) set light quantum detector time shutter T, laser double-pulsed time time t, and t＜T; Adjust t value, make in the image that the light quantum detecting device catches, double-pulse laser shines the spacing of two hot spots of the same particle that obtains in 20～50 pixels;
5) under the double-pulse laser irradiation, continuous shoot multi-frame images;
6) adjust focal plane of lens to new position, adjust laser dipulse time interval t, use light quantum detecting device shoot multi-frame images again;
7) repeating step 6), the image of shooting diverse location.
In technique scheme, further, described step 2) in, drive liquid flow in the pipeline by source of the gas.
Further, the time shutter is 0ms～100ms in the described step 4).
Compared with prior art, the invention has the advantages that:
1) optical detection is highly sensitive;
2) flow field velocity space exploration resolution height;
3) vertical direction displacement degree of regulation height.
Description of drawings
Fig. 1 is the measurement mechanism synoptic diagram of fluid channel velocity distribution of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail:
Make the measurement mechanism synoptic diagram of fluid channel velocity distribution of the present invention with reference to Fig. 1.Wherein, microscope 10 adopts Olympus IX71 inverted fluorescence microscope, have the two light sources of white light and UV light, 10X, 40X, 60X and 100X object lens 20 are arranged, wherein 100X is oily mirror, numerical aperture NA=1.35, camera lens oil refractive index n=1.516, optical resolution δ=0.35 μ m, operating distance is 100 μ m.Reflection unit 17 adopts right-angle reflecting prism.
Optical system 11 adopts market to sell conventional condenser lens and collimation lens product.
Double-pulse laser device 12 adopts NewWave Solo PIV120, Nd:YAG double-pulse laser device, wavelength of transmitted light λ=532nm, pulsed frequency 1-15Hz is adjustable, spot diameter 5mm, pulsewidth 3～5ns, maximum laser energy 120mJ, usable range can be 5～15mJ during actual measurement.
Light quantum detecting device 13 adopts Andor iXon DV885 single photon detector, and photographic images 1004 * 1002 pixels, single pixel wide are 8 μ m, cooperates fluorescent microscope can reach 80nm in 1 * 1bining hypograph resolution.Have the electron gain function, be cooled to-70 ℃ of dark current and only be 0.007e-/pix/sec, quantum efficiency reaches 65%.Reading speed 35MHz, image transmitted for 31.5 frame/seconds, minimum exposure time 10 μ s under the frame revolving die formula.
Isochronous controller 14 adopts conventional products that sell in market, as Beijing cube world MicroPulse 710 products.
Processor 15 adopts market to sell conventional computing machine.
Displacement controller 16 adopts conventional products that sell in market, as the PI-721.LLQ product, and displacement range of adjustment 100 μ m, displacement degree of regulation 10nm.
Advantage of the present invention is as follows:
1. adopt the single photon detector of high luminous sensitivity, make system have high optical detection sensitivity
In order to detect the image of diameter≤500nm particle, to select for use in fluorescent wavelength ranges (≈ 620nm), quantum efficiency is up to 70% single photon detector.Under the laser radiation of 5ns pulsewidth, can capture the image of the fluorescent particles of diameter≤200nm, this is that present business system is beyond one's reach.
2. adopt 100x object lens and above-mentioned single-photon detector to cooperate, improved velocity space resolution
When adopting the 100x object lens, the observation flow field is 80 μ m.It is 1004 * 1002 that single photon detector is taken pixel, and single Pixel Dimensions is 8 μ m, so the velocity space resolution of this system reaches 80nm.
3. adopt the nanometer displacement controller, improved nanometer perpendicular displacement degree of regulation
Native system is introduced PI object lens nanometer displacement controller, makes the vertical moving precision of object lens in 100 mu m ranges reach 10nm.
Measuring method based on the fluid channel velocity distribution of said apparatus comprises the steps:
1) opens microscope white light, UV radiant, laser instrument, single-photon detector, PI nanometer displacement controller and computer (comprising laser instrument, single photon detector synchro control software and PI nanometer displacement Control Software in the computer), each instrument all is adjusted to the preliminary work state.
2) inject fluorescent particles solution to fluid channel, drive liquid flow in the pipeline, then microchannel is fixed on the microscope stage by modes such as sources of the gas.If use the oily mirror of 100x/1.35, need before fixing, drip camera lens oil.Under white light, (use the 1st grade of filter) by microscopic and regulate the workbench orientation, pipeline is placed in the field of microscope.
3) closed loop environmental light source use continuous light (using the 5th grade of filter) to observe particle movement, and (is shown in the computer by the single photon detector images acquired time shutter 20～30ms).Regulate the upright position (can use PI nanometer displacement controller accurately to regulate) of object lens, the bottom surface imaging of generally adjusting to runner is the most clear, and with this position as the experiment beginning.
4) switching-over light path all is made as the external trigger pattern to laser radiation pattern (and using the 4th grade of filter) with single photon detector and laser instrument, sets the sequential of isochronous controller by the Control Software of synchronizer.Set single-photon detector time shutter T, laser double-pulsed time time t, and guarantee t＜T.Adjust t value, make in the image that single photon detector catches the spacing suitable (generally in 20～50 pixels) of two hot spots of the same particle that the double-pulse laser irradiation obtains.After adjusting, under the double-pulse laser irradiation, one-time continuous is taken 50～100 two field pictures.
5) adjust focal plane of lens and (use PI nanometer displacement controller digital-control pattern accurately to regulate), adjust laser dipulse time interval t, use single photon detector to take the set of diagrams picture again to new position.Repeat the step of 4-5, can take the image of diverse location.
6) image of taking is derived with tif sequence image form, use image analysis software to handle.
Utilize the said apparatus and the method for present embodiment, superiority of the present invention be described in conjunction with following three experiments of measuring:
(1) fluid channel experiment:
The square tube fluid channel of pair cross-section 50 * 20 μ m, driving pressure P=30kPa, trace particle φ 200nm, laser pulse pulsewidth 5ns, recurrent interval 1ms, observation is flowed under the about 10mJ condition of laser intensity.The flow field figure picture has been noted down in 10 vertical positions, and with PIV methods analyst velocity field, maximal rate reaches 0.22m/s.
(2) magnetic liquid is at Y type fluid channel combined experiments:
The mixed process of observation magnetic liquid in Y type fluid channel (wide 101.6 μ m, dark 67.1 μ m, long 1cm), the flow field observation scope reaches 800 μ m in 10 * time.
(3) the static observation of φ 50nm fluorescent particles solution:
Utilize PI object lens nanometer positioning instrument, regulate the object lens focal plane position, the grey scale change of φ 50nm fluorescent particles in the static observation solution, in vertical direction 0～300nm range regulation, precision is 10nm.
It should be noted last that above embodiment is only unrestricted in order to technical scheme of the present invention to be described.Although the present invention is had been described in detail with reference to embodiment, those of ordinary skill in the art is to be understood that, technical scheme of the present invention is made amendment or is equal to replacement, do not break away from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (7)
1. the measurement mechanism of a fluid channel velocity distribution comprises:
One microscope (10), this microscope have object lens (20) and a reflection unit (17); It is characterized in that, also comprise:
A pair of pulsed laser (12), the laser that this double-pulse laser device sends enters the reflection unit (17) of described microscope (10) through an optical system (11), and laser-bounce enters described object lens (20) and enters the visual field;
The one light quantum detecting device (13) that is used for writing down the light distribution of fluid channel (21) fluorescent particles that object lens (20) are observed cooperates with described microscope (10);
One synchronous controller (14) is connected with double-pulse laser device (12) with described light quantum detecting device (13) respectively;
One processor (15) is connected with described isochronous controller (14), light quantum detecting device (13) respectively.
2. according to the measurement mechanism of the described fluid channel velocity distribution of claim 1, it is characterized in that, comprise that also a displacement controller (16) that is used to regulate described object lens (20) position is installed in described object lens (20).
3. according to the measurement mechanism of the described fluid channel velocity distribution of claim 1, it is characterized in that described processor (15) is a computing machine.
4. according to the measurement mechanism of claim 1,2 or 3 each described fluid channel velocity distribution, it is characterized in that described optical system (11) is condenser lens and collimation lens.
5. the measuring method according to the fluid channel velocity distribution of claim 1 comprises the steps:
1) each instrument is adjusted to the preliminary work state;
2) inject fluorescent particles solution to fluid channel, drive liquid flow in the pipeline, then microchannel is fixed on the microscope stage;
3) closed loop environmental light source uses continuous light to observe particle movement, and by light quantum detecting device images acquired; The upright position of regulating object lens is up to the bottom surface imaging of fluid channel position the most clearly;
4) set light quantum detector time shutter T, laser double-pulsed time time t, and t＜T; Adjust t value, make in the image that the light quantum detecting device catches, double-pulse laser shines the spacing of two hot spots of the same particle that obtains in 20～50 pixels;
5) under the double-pulse laser irradiation, continuous shoot multi-frame images;
6) adjust focal plane of lens to new position, adjust laser dipulse time interval t, use light quantum detecting device shoot multi-frame images again;
7) repeating step 6), the image of shooting diverse location.
6. according to the measuring method of the described fluid channel velocity distribution of claim 5, it is characterized in that described step 2) in be to drive liquid flow in the pipeline by source of the gas.
7. according to the measuring method of claim 5 or 6 described fluid channel velocity distribution, it is characterized in that the time shutter is 0ms～100ms in the described step 4).
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