CN101110437B - Semiconductor device and method of manufacturing the same - Google Patents

Semiconductor device and method of manufacturing the same Download PDF

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Publication number
CN101110437B
CN101110437B CN200710142234XA CN200710142234A CN101110437B CN 101110437 B CN101110437 B CN 101110437B CN 200710142234X A CN200710142234X A CN 200710142234XA CN 200710142234 A CN200710142234 A CN 200710142234A CN 101110437 B CN101110437 B CN 101110437B
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film
semiconductor film
dielectric film
crystal
opening
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CN101110437A (en
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矶部敦生
山崎舜平
小久保千穗
田中幸一郎
下村明久
荒尾达也
宫入秀和
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Abstract

An objective is to provide a method of manufacturing a semiconductor device, and a semiconductor device manufactured by using the manufacturing method, in which a laser crystallization method is used that is capable of preventing the formation of grain boundaries in TFT channel formation regions, and is capable of preventing conspicuous drops in TFT mobility, reduction in the ON current, and increases in the OFF current, all due to grain boundaries. Depressions and projections with stripe shape or rectangular shape are formed. Continuous wave laser light is then irradiated to a semiconductor film formed on an insulating film along the depressions and projections with stripe shape of the insulating film, or along a longitudinal axis direction or a transverse axis direction of the rectangular shape. Note that although it is most preferable to use continuous wave laser light at this point, pulse wave laser light may also be used.

Description

The method of semiconductor device and manufacturing semiconductor device
Technical field
The present invention relates to method by film formed semiconductor device of the semiconductor with crystal structure and manufacturing semiconductor device, more specifically, relate to and comprise that its channel formation region is by the semiconductor device of the film formed field-effect transistor of crystal semiconductor on the insulating surface with make the method for this semiconductor device.
Background technology
Known amorphous semiconductor film and the technology by laser radiation crystallization film of on glass or other dielectric film substrate, forming.The thin-film transistor of being made by the semiconductor film with crystal structure (crystal semiconductor film) (hereinafter being called TFT) is applied to flat display apparatus (flat-panel monitor), typically, and liquid crystal indicator.
Laser is applied to semiconductor fabrication with the form of the technology of amorphous layer in the recrystallization Semiconductor substrate or ruined layer or semiconductor film and with the form that crystallization is formed at the technology of the amorphous semiconductor film on the insulating surface.Normally used laser oscillator is to be the gas laser of representative with the excimer laser or to be the solid state laser of representative with the YAG laser.
Example by the crystallizing amorphous semiconductor film of laser radiation is disclosed among the JP 62-104117A.In this example, laser scanning speed is set at beam spot diameter, and multiply by per second 5000 or faster by high-velocity scanning amorphous semiconductor film is made polycrystalline film and not exclusively melted film.Another known example is with optical system laser treatment to be become linear (linear) light beam with disclosed laser processing apparatus among the JP 08-195375A and at pre-irradiation.
JP 2001-144027A discloses the technology of making TFT, wherein adopts such as Nd:YVO 4The solid laser oscillator of laser is so that with the second harmonic of its laser irradiation amorphous semiconductor film and form crystal semiconductor film than bigger crystallite dimension in the former technology.
Yet, have on the still less defective and grain boundary or subgrain (sub-grain) border and orientation the recrystallization that the main stream approach of the high-quality crystal semiconductor film of fluctuation still less is film single crystalline substrate semiconductor-on-insulator film in heat and after melting always forming on the insulating surface, it is considered to regional thawing method.
The problem of it is believed that be this method as is known figure extension (graphoepitaxy) technology utilize like that the basis differential (level difference), and crystal along differential growth so that on resulting single crystal semiconductor films surface, stay differential.In addition, single crystal semiconductor films can not form on the glass substrate with low relatively distortion point with the figure extension.
On the other hand, the amorphous semiconductor film on being formed at flat surfaces is during by the laser radiation crystallization, obtains polycrystalline and optionally forms such as the defective of grain boundary.Thereby the crystal that can not obtain having same orientation.
There is a large amount of crystal defects the grain boundary, and it is as the trap of charge carrier and think to reduce the reason of electronics or hole mobility.The lattice of can not formation not following crystallization to produce does not match, the semiconductor film of the thermal strain on basis and defective, grain boundary or subgrain boundary that semi-conductive volume contraction causes.Therefore, can not reach the quality that is formed at the MOS transistor on the single crystalline substrate and non-caked SOI (silicon on the insulator) by crystallization or recrystallization for the crystal semiconductor film that is formed on the insulating surface.
For example, when semiconductor film is formed on the glass substrate when building TFT, do not consider that the grain boundary that forms arbitrarily arranges TFT, thereby the crystallinity of TFT channel formation region can not be controlled strictly.The crystal defect of any grain boundary that forms has reduced performance and has caused the fluctuation of performance between the element.
Summary of the invention
Consider that the problems referred to above have produced the present invention, one object of the present invention thereby provide the semiconductor device of forming by semiconductor element or semiconductor element group, the crystal semiconductor film that wherein has the least possible grain boundary in the channel formation region is formed on the insulating surface, and it can run up, it has high current drives performance and still less fluctuation between element.
In order to address the above problem, the present invention have form dielectric film on the substrate of insulating surface with opening, on the dielectric film and form the polycrystal semiconductor film of grain boundary or amorphous semiconductor film on the opening, and form the crystal semiconductor film of filling opening with the crystal semiconductor film with any formation.In order at length to set forth, the crystal semiconductor film pours into opening and the crystallization or the formation of recrystallization semiconductor film of dielectric film by the thawing semiconductor film, with the semiconductor that melts.Be removed the part of the crystal semiconductor of crystal semiconductor film in being in opening then.Form gate insulating film and contact and on gate insulating film, form gate electrode with the end face of crystal semiconductor film.Above-mentioned is feature of the present invention.
Can pass through the direct etching processing of insulated substrate surface, or form opening by the etching processing of silicon oxide film, silicon nitride film or silicon oxynitride (silicon oxynitride) film etc.Opening is positioned according to the arrangement of island semiconductor film of the channel formation region that comprises TFT, ideally, is positioned so that overlap with channel formation region at least.Opening extends in the direction of channel length.The width of opening (when opening overlaps with channel formation region in channel width dimension) is equal to or greater than 0.01 μ m and is equal to or less than 2 μ m, and is preferred, is equal to or greater than 0.1 μ m and is equal to or less than 1 μ m.The degree of depth of opening is equal to or greater than 0.01 μ m and is equal to or less than 1 μ m, and is preferred, is equal to or greater than 0.05 μ m and is equal to or less than 0.2 μ m.
In early days the stage be formed on the dielectric film and opening on semiconductor film be to pass through plasma CVD), sputter or decompression the CVD polycrystal semiconductor film or the amorphous semiconductor film that form, or the polycrystal semiconductor film that forms by solid state growth.Amorphous semiconductor film not only refers on the stricti jurise film of non crystalline structure fully but also refers to comprise the film or the microcrystalline semiconductor film of tiny crystal grains among the present invention, and refers to have in some position the semiconductor film of crystal structure.Typically, adopt amorphous silicon film.Outside this, amorphous germanium silicon fiml, amorphous silicon carbide film etc. also can adopt.The term polycrystal semiconductor film refers to the film that one of these amorphous semiconductor films of method crystallization by known obtain.
The mode (means) of thawing and crystallization semiconductor film is impulse hunting or the continuous wave laser from gas laser oscillator or solid laser oscillator.Laser is converged to linear shape with optical system.The intensity of laser vertically can be uniformly, and laterally is being variable.Laser oscillator as light source is the rectangular light beam solid laser oscillator, and sheet (slab) laser oscillator is preferred especially.In addition, use the solid laser oscillator of the rod of mixed Nd, Tm or Ho also can be used.Particularly, it has been to use such as using Nd, Tm or Ho doped YAG, YVO 4, YLF or YAlO 3The solid laser oscillator of crystal and the combination of laminated structure amplifier.Used flaky material is such as Nd:YAG, Nd:GGG (Gd-Ga garnet (gadoliniumgallium garnet)) or the Nd:GsGG (crystal of gadolinium scandium gallium garnet (gadolinium scandiumgallium garnet).The laser of slab laser is propagated along Z font light path in this sheet laser medium, repeats total reflection.
Can also be with the high light that is similar to above-mentioned laser.For example, from the light of Halogen lamp LED, xenon lamp, high-pressure mercury lamp, metal halide lamp or Excimer lamp irradiation with convergences such as specular reflector, lens to obtain the light of high-energy-density.
Semiconductor film is with being converged to the high light of linear shape or laser radiation and in vertical expansion.When relatively mobile laser irradiating position and the top substrate that forms the crystallization semiconductor film, laser is on the whole surface of crystal semiconductor film or advance above the part to melt and crystallization or recrystallization crystal semiconductor film.Laser scanning direction is set at the vertical of transistor channel length direction or opening.Crystal is grown along laser scanning direction like this, and prevents that grain boundary or subgrain boundary from crossing orientation.
The semiconductor device feature of the present invention of Zhi Zaoing is that the dielectric film with opening is formed on the substrate with insulating surface, be formed at the regional filling opening of the crystal semiconductor film on the substrate, and channel formation region places the fill area as mentioned above.Semiconductor device feature of the present invention is to be formed at the crystal semiconductor on the insulating surface, its contact a pair of a kind of conduction type impurity range, have at least two crystal orientations and have and extend and do not form at least two crystal grain of grain boundary in the direction that is parallel to orientation, and be that the crystal semiconductor film is in the same dark opening with the crystal semiconductor film thickness.
Another architectural feature of the present invention is that the dielectric film with opening is formed on the substrate with insulating surface, this opening extends in orientation, be formed at the regional filling opening of the crystal semiconductor film on the substrate, channel formation region places the fill area, and opening is the same with the crystal semiconductor film dark or darker.
The present invention has the crystal semiconductor that is formed on the insulating surface, it contacts the impurity range of a pair of a kind of conduction type, have at least two crystal orientations and have at least two crystal grain, do not form the grain boundary being parallel to the orientation extension, and semiconductor device is equipped with a kind of structure, wherein raceway groove forms with the crystal semiconductor film, one conductive layer is overlapped in the crystal semiconductor film, and a dielectric film is inserted in wherein, the present invention is characterised in that the crystal semiconductor film is equal to or greater than 0.01 μ m and is equal to or less than 2 μ m in the channel width dimension measurement, preferably be equal to or greater than 0.1 μ m and be equal to or less than 1 μ m, and has the thickness that is equal to or greater than 0.01 μ m and is equal to or less than 1 μ m, preferably be equal to or greater than 0.05 μ m and be equal to or less than 0.2 μ m, and be that the crystal semiconductor film is formed in the same dark opening with the crystal semiconductor film thickness.
By setting the thickness that the opening degree of depth equals semiconductor film, assemble and curing at opening (recess) by surface tension with the semiconductor that high light or laser radiation are melted.The result is, semiconductor film at opening (projection) attenuate so that make stress deformation concentrate on the zone of attenuate.The side of opening has the effect that definite crystal orientation is a certain angle.Open side is 5-90 ℃ with respect to the angle of substrate surface, preferred 30-90 ℃.Laser navigates on the semiconductor film in the direction that is parallel to orientation, thereby basically at directional crystal on the particular crystal orientation of the opening that extends in this direction.
After semiconductor film melts by the irradiation of laser or high light, the zone that the curing of film is met from the side and the bottom of opening, and crystal growth is from this zone.For example, heat is analyzed emulation and is carried out on the differential coordinate system mid point A-D of dielectric film shown in Figure 39 (1) and dielectric film (2) formation.The result is to obtain performance shown in Figure 40.Heat is delivered to two places; Lucky dielectric film (2) and the other dielectric film (1) of semiconductor film below semiconductor film.Thereby temperature reduces the most apace at a B.Second fast be an A, be a C and some D successively.This simulation result is when the angle of side is 45 ℃.Yet qualitatively, similar phenomenon will take place when the side angle is 90 ℃.In a word, follow crystallization deformation can by once melt semiconductor film, utilize surface tension to accumulate in the opening that is formed on the insulating surface with the semiconductor film that will melt and the point that meets from the side and the bottom of opening near the beginning crystal growth concentrate on zone outside the opening.Therefore, the crystal semiconductor film of filling opening can not have deformation.
The crystal semiconductor film that is retained on the dielectric film then and comprises grain boundary and crystal defect is removed by etching.
Aforesaid the invention enables specifies formation such as transistor, and particularly the position of the semiconductor element of the channel formation region of TFT becomes possibility, thereby obtains not having the crystal semiconductor film of grain boundary.This has eliminated the fluctuation cause such as the grain boundary of any formation and crystal defect, and TFT group or the TFT that still less fluctuates on the performance is provided.
Description of drawings
In the figure that encloses:
Figure 1A-1E is the figure of crystallization method among explanation the present invention;
Fig. 2 A-2E is the vertical cross-section diagram that describes the relation of the form of crystal semiconductor film in the crystallization and opening shape in detail;
Fig. 3 A-3E is the figure of crystallization method among explanation the present invention;
Fig. 4 A-4E is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Fig. 5 A-5E is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Fig. 6 A-6E is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Fig. 7 A-7E is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Fig. 8 A-8F is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Fig. 9 A-9F is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Figure 10 A-10F is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Figure 11 A-11C is the vertical view and the vertical cross-section diagram of explanation TFT structure constructed in accordance;
Figure 12 A-12F is the vertical view and the vertical cross-section diagram of explanation TFT structure constructed in accordance;
Figure 13 is the layout plan that the laser irradiating device pattern that adopts among the present invention is shown;
Figure 14 A and 14B are converged to the laser of linear shape and the figure of its scanning direction among explanation the present invention;
Figure 15 is the example of the external view of semiconductor device constructed in accordance;
Figure 16 is the vertical view that the process of semiconductor device pixel portion shown in Figure 15 is made in explanation;
Figure 17 is the vertical view that the process of semiconductor device pixel portion shown in Figure 15 is made in explanation;
Figure 18 is the vertical view that the process of semiconductor device pixel portion shown in Figure 15 is made in explanation;
Figure 19 is the vertical view that the process of semiconductor device pixel portion shown in Figure 15 is made in explanation;
Figure 20 A and 20B are the vertical cross-section diagrams of the pixel portion structure of explanation Figure 19;
Figure 21 is surface sweeping Electronic Speculum (SEM) photo (after the Secco etching), and it illustrates and is formed into 150nm thickness and in that to have a 170nm dark differential and the surface state of the amorphous silicon film of crystallization on the basic dielectric film of 1.5 μ m, 1.5 μ m width bossings at interval arranged;
Figure 22 is surface sweeping Electronic Speculum (SEM) photo (after the Secco etching), and it illustrates and is formed into 150nm thickness and in that to have a 170nm dark differential and the surface state of the amorphous silicon film of crystallization on the basic dielectric film of 1.8 μ m, 1.8 μ m width bossings at interval arranged;
Figure 23 illustrates EBSP mapping (mapping) data that are formed at recessed part crystal orientation;
Figure 24 A-24G is the figure that the semiconductor device example is shown;
Figure 25 A-25D is the figure that the projecting apparatus example is shown;
Figure 26 A and 26B are the figure of crystallization method among explanation the present invention;
Figure 27 is the perspective view of crystallization method among explanation the present invention;
Figure 28 is the perspective view of crystallization method among explanation the present invention;
Figure 29 is the perspective view of crystallization method among explanation the present invention;
Figure 30 is the perspective view of crystallization method among explanation the present invention;
Figure 31 A-31C is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Figure 32 A-32C is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Figure 33 A-33C is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Figure 34 A-34C is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Figure 35 A-35C is the vertical view and the vertical cross-section diagram of the process of explanation TFT constructed in accordance;
Figure 36 A-36C is the vertical view and the vertical cross-section diagram of explanation TFT example constructed in accordance;
Figure 37 A-37C is the vertical view and the vertical cross-section diagram of explanation TFT example constructed in accordance;
Figure 38 A-38D is the vertical view and the vertical cross-section diagram of explanation TFT example constructed in accordance;
Figure 39 illustrates the sectional view that heat is analyzed used structure in the emulation; And
Figure 40 illustrates the figure that heat is analyzed simulation result.
Embodiment
Embodiment of the present invention will describe in detail with reference to the accompanying drawings.Yet, the invention is not restricted to following explanation, the personnel of art technology will be readily appreciated that details of the present invention and pattern can revise in various manners and do not deviate from the spirit and scope of the present invention.Therefore, the present invention should not be subjected to the restriction of following embodiment content.
The present invention has the dielectric film that is formed with opening on the substrate of insulating surface, on the dielectric film and form the polycrystal semiconductor film and the amorphous semiconductor film of grain boundary on the opening with any formation, and form the crystal semiconductor film, with crystal semiconductor film filling opening.This pattern is at first with reference to Figure 27 explanation.
The perspective view of Figure 27 illustrates a kind of pattern, wherein is formed on the substrate 101 for the banded second dielectric film 103-105 and first dielectric film 102 by graphical moulding.Second dielectric film has drawn 3 band figures here but the number of band is not limited to 3.Substrate 101 is that its surface is insulated commercial non-alkali glass substrate, quartz substrate, Sapphire Substrate, single crystalline substrate or the poly semiconductor substrate that film covers.In addition, substrate 101 can be the metal substrate that its surface covers with dielectric film.
The width W 1 of each banded second dielectric film is 0.1-10 μ m (preferred 0.5-1 μ m).Gap W2 between adjacent second dielectric film is 0.1-5 μ m (preferred 0.5-1 μ m).Being of uniform thickness of the thickness of each second dielectric film and non-single crystal semiconductor film formed thereon, or thicker.If the differential periodic appearance of rule always is just enough but form differential shape and position with the island semiconductor district that is fit to comprise the TFT channel formation region.Therefore, the length L of each second dielectric film is also unrestricted, for example, if the second dielectric film long enough is just enough with the channel formation region that forms TFT.
First dielectric film is formed by silicon nitride or silicon oxynitride (silicon nitroxide).Second dielectric film is formed by silica or silicon oxynitride (silicon oxynitride).Silicon oxide film can use tetraethyl orthosilicate (tetraethyl orthosilica te) (TEOS) and O by plasma CVD 2Mixture form.Silicon oxynitride film can be by plasma CVD SiH 4, NH 3, and N 2O, or SiH 4And N 2O forms as raw material.
When near the recess the opening and projection as Figure 27 in during with the formation of first dielectric film and second dielectric film, be ideally suitably regulate material with the film formation condition so that make the relative etch rate of second dielectric film faster and guarantee selection ratio in etching process.It is desirable to have the effect that stops sodium or other alkali metal ion equally for dielectric film.The film formed open side of second insulation suitably is set in 5-90 ° scope with respect to the angle of substrate surface, preferred 30-90 °.
As shown in figure 28, the amorphous semiconductor film 106 with 50-200nm thickness covers surface and the opening of being made up of first dielectric film 102 and the second dielectric film 103-105.Amorphous semiconductor film is formed by the alloy of silicon, silicon and germanium or the alloy or the compound of compound or silicon and carbon.
The irradiation of amorphous semiconductor film 106 usefulness continuous wave lasers is with crystallization.The laser that is adopted can be expanded to have linear shape by coalescence with optical system.The intensity of laser can be uniformly in the vertical, and is variable in the horizontal.Laser oscillator as light source is the rectangular light beam solid laser oscillator, and the sheet laser oscillator is preferred especially.In addition, can adopt the solid state laser of the rod that uses mixed Nd, Tm or Ho.Particularly, be to use YAG, YVO such as mixed Nd, Tm or Ho 4, YLF or YA1O 3The combination of the solid laser oscillator of crystal and laminated structure amplifier.Shown in arrow among the figure, laser is being advanced with the direction of vertical intersection of linear shape.Optimal, laser be parallel to the banded figure that forms on the basic dielectric film longitudinally direction advance.Here linear shape means vertical than laterally long 10 times or more.
Used flaky material is the crystal such as Nd:YAG, Nd:GGG (Gd-Ga garnet) or Nd:GsGG (gadolinium scandium gallium garnet).The laser of slab laser is propagated along Z font light path in this sheet laser medium, repeats total reflection.
Consider the absorption coefficient of amorphous semiconductor film, the wavelength of continuous wave laser is 400-700nm ideally.Second harmonic or triple-frequency harmonics that the light of this wave band is selected first-harmonic by Wavelength changing element obtain.Adoptable Wavelength changing element is ADP (ammonium dihydrogen phosphate, ammoniumdihydrogen phosphate), Ba 2NaNb 5O 15(barium-sodium niobate, barium sodiumniobate), CdSe (cadmium selenide), KDP (potassium dihydrogen phosphate), LiNbO 3(lithium niobate), Se, Te, LBO, KB5 etc.LBO is desirable especially.In typical example, use Nd:YVO 4Laser oscillator (first-harmonic: second harmonic 1064nm) (532nm).The laser oscillation mode that is adopted is TEM 00The single mode of pattern.
In the situation of silicon, it is selected as only material, and absorption coefficient is 10 3-10 4Cm -1The zone mostly at visible-range.When crystallization highly sees through on the substrate that the material of visible light forms when being formed into the amorphous semiconductor film of 30-200nm thickness by silicon at glass or other, the visible light radiation that semiconductor region can be by having the 400-700nm wavelength is not destroyed basic dielectric film by the heating of selectivity and crystallization.Particularly, the penetration depth of light in amorphous silicon film with 532nm wavelength approximately is 100nm-1000nm, thereby light can arrive the inside of the amorphous semiconductor film 106 with 30-200nm thickness fully.This means that semiconductor film can be heated internally, and almost whole semiconductor film can be by uniform heating in the laser irradiation area.
The semiconductor that melts with laser radiation accumulates in (recessed part) in the opening by surface tension.Semiconductor solidifies then to obtain almost smooth surface as shown in figure 29.Crystal growth finishes, and grain boundary or subgrain boundary are formed at (at bossing) on second dielectric film (shadow region 110 among the figure).What form like this is crystal semiconductor film 107.
Afterwards, crystal semiconductor film 107 is etched as shown in figure 30 to form island semiconductor district 108 and 109.By etching, remove by etching in zone that growth ending and grain boundary or subgrain boundary are assembled 110, thereby only stay high-quality semiconductor region.Gate insulating film and gate electrode form with island semiconductor district 108 and 109, especially, crystal semiconductor filling opening (recessed part) thus channel formation region is positioned at opening part.TFT finishes by these steps.
Fig. 2 A-2E is concept nature figure, and it illustrates the knowledge of the crystallization that obtains about the experimental result of being undertaken by the inventor.Fig. 2 A-2E schematically illustrates is the spacing of the opening (recessed part) formed of first dielectric film and second dielectric film and the degree of depth relation with respect to crystal growth.
Among Fig. 2 A-2E, as the reference symbol about length, t01 refers to the upward thickness of amorphous semiconductor film of second dielectric film (bossing), the thickness of amorphous semiconductor film among the t02, opening (recessed part), t11, second dielectric film (bossing) is gone up the thickness of crystal semiconductor film, the thickness of crystal semiconductor film among the t12, opening (recessed part), d, the thickness of each second dielectric film (degree of depth of each opening), W1, the width of each second dielectric film, and W2, the width of each opening.201 the expression be first dielectric film, 202, the second dielectric films, and 203, the three dielectric films.
Fig. 2 A illustrates that d＜t02 and W1 and W2 are equal to or less than the situation of 1 μ m.When the degree of depth of each opening (groove) during,, smooth inadequately by the surface of melting the crystal semiconductor film 205 that crystallization obtains because opening is shallow less than the thickness of amorphous semiconductor film 204.In other words, differential the remaining on most of crystal semiconductor film 205 bases.
Fig. 2 B illustrates d 〉=t 02 and W1 and W2 is equal to or less than the situation of 1 μ m.When the degree of depth of each opening (groove) during no better than or greater than the thickness of amorphous semiconductor film 204, semiconductor accumulates in the opening (recessed part) by surface tension.Semiconductor solidifies then to obtain almost smooth surface as shown in Fig. 2 B.In this situation, t11＜t12 and stress concentrate on the thin part 220 on second dielectric film 202.The result is that the distortion accumulation is to form the grain boundary in the zone 220.
Fig. 2 C illustrates d〉t02 and W1 and W2 is equal to or less than the situation of 1 μ m.In this situation, can form crystal semiconductor film 205 so that filling opening and almost do not have the crystal semiconductor film to stay on second dielectric film 202.
Fig. 2 D illustrates d 〉=t02 and W1 and W2 be equal to or be slightly larger than the situation of 1 μ m.When opening was roomy, crystal semiconductor film 205 filling openings were to provide smooth (leveling) effect.On the other hand, around open centre, form grain boundary and subgrain boundary.Stress not only concentrates on opening but also on second dielectric film, and distortion in this accumulation to form the grain boundary.This is conceivable, because the increase of spacing has reduced the Stress Release effect.
Fig. 2 E illustrates d 〉=t02 and W1 and W2 be all greater than the situation of 1 μ m.Among Fig. 2 E, the state of Fig. 2 D is more outstanding.
The ESEM of Figure 22 (SEM) picture illustrates the example.In this example, amorphous silicon film is formed into the thickness of 150nm and in that to have formed 170nm dark differential and formed and have 1.8 μ m crystallization on the basic dielectric film of 1.8 μ m width bossings at interval.The surface of crystal semiconductor film with Secco solution etching so that the grain boundary to be shown clearly.Compare with Figure 21, obviously the grain boundary is not the differential bossing of formation but stretches on whole surface here.Can not pick out in this structure and not have the crystal semiconductor of grain boundary film.
With reference to figure 2A-2E as mentioned above, the most suitable formation semiconductor element of the pattern of Fig. 2 B, particularly, TFT.In the example shown here, the recess and the projection that are used to form the basis of crystal semiconductor film are made up of first dielectric film and second dielectric film.Yet the pattern shown in the invention is not restricted to here is as long as shape equally can be with other pattern formation recess and projection.For example, recess and projection can directly form opening and obtain by the etching processing of quartz substrate surface.
Figure 13 illustrates the example of the laser processing apparatus structure that can be used in the crystallization.Figure 13 is front view and the end view that the laser processing apparatus structure is shown, and its composition comprises laser oscillator 401a and 401b, baffle plate 402, high conversion efficiency minute surface 403-406, cylindrical lens 407 and 408, slit 409, supporting base 411, drive unit 412 and 413, control device 414, information processor 415 etc.Drive unit 412 and 413 moves supporting base 411 at directions X and Y direction.Control device 414 accessory drives.Information processor 415 transmits a signal to laser oscillator 401 and based on the control device 414 of the program of prior preservation.
Laser oscillator is the rectangular light beam solid laser oscillator, and the sheet laser oscillator is preferred especially.In addition, can adopt YAG, the YVO of laminated structure amplifier and use such as mixed Nd, Tm or Ho 4, YLF or YA1O 3The combination of solid laser oscillator of crystal.Used flaky material is the crystal such as Nd:YAG, Nd:GGG (Gd-Ga garnet) or Nd:GsGG (gadolinium scandium gallium garnet).In addition, can also adopt continuous wave gas laser oscillator and solid laser oscillator.The continuous wave solid state laser that is adopted uses YAG, the YVO such as mixed Cr, Nd, Er, Ho, Ce, Co, Ti or Tm 4, YLF or YAlO 3Crystal.Although the first-harmonic of oscillation wavelength depends on changes in material used in the doping, laser vibrates in the wave-length coverage of 1 μ m-2 μ m.The solid laser oscillator that utilizes diode to excite can connect to obtain 5W or higher output by cascade.
Being converged to cross section at irradiating surface with cylindrical lens 407 and 408 from the circle of this class laser oscillator output or rectangular laser is linear shape.Suitably regulating the high conversion efficiency minute surface makes laser enter on the irradiating object (at 10-80 °) sideling to prevent the interference on the irradiating surface.Form cylindrical lens 407 and 408 to obtain high permeability with synthetic quartz.Coating is to obtain optical maser wavelength 99% or higher transmitance on the surface of cylindrical lens.Can always not linear cross section at irradiating surface laser, and can be such as rectangle, ellipse, and the Any shape of elongating (oblong).In any situation, the ratio of the major axis of laser and minor axis is 1: 10-1: 100 scope.Provide Wavelength changing element 410 to obtain the second harmonic of first-harmonic.
Drive unit 412 and 413 moves axially supporting base 411 to carry out laser treatment on substrate 420 at two.Supporting base can be in a direction with 1-200cm/sec, and the speed of preferred 5-75cm/sec moves the longer distance of length than substrate 420 1 sides continuously.Supporting base can move the distance that equals the linear beam longitudinal length step by step off and in another direction.The information processor that the mobile usefulness of the vibration of laser oscillator 401a and 401b and supporting base 411 has microprocessor mounted thereto makes it synchronous.
Directions X is linear in the drawings moves for base rack 411, thereby the whole surface of substrate can be with the laser treatment of shining in the fixing optical system.Position detecting device 416 detects substrates 420 in the position of laser radiation and send a signal to information processor 415.One receives signal, and laser radiation takes place information processor 415 synchronously.That is, when substrate 420 during not at laser irradiating position, baffle plate 402 is closed to stop laser radiation.
The substrate 420 that relatively moves on directions X or the Y direction in the drawings from the laser radiation of the laser irradiating device of such structure.The whole surface of semiconductor film or required zone can be handled like this.
As mentioned above, differentially be formed on the basic dielectric film and the irradiation crystallization of amorphous semiconductor film by continuous wave laser, follow distortion that crystallization produces or stress to concentrate on differentially to go up and avoid as distortion on the crystal semiconductor of active layer or stress thereby make.Form TFT and make its channel formation region place to remove the crystal semiconductor film of distortion or stress.This has improved the reliability of high speed current drives performance and element.
Embodiment 1
With reference to figure 1A-1E, will provide explanation by above-mentioned pattern of the present invention.Figure 1A-1E is the vertical cross-section diagram that explanation forms the process of crystal semiconductor film of the present invention.
Among Figure 1A, silicon oxynitride, aluminium nitride or aluminium oxynitride that first dielectric film, 201 usefulness silicon nitrides, nitrogen content are higher than oxygen content are formed into 30-300nm.On first dielectric film 201, form the thickness that second dielectric film 202 arrives 10-1000nm, preferred 50-200nm with silica or silicon oxynitride.Second dielectric film 202 has required shaped aperture.Required form can be rectangle, circle, polygon, band shape or the shape of mating TFT island semiconductor film (active layer) shape that will make.Silicon oxide film can be by plasma CVD tetraethyl orthosilicate (TEOS) and O 2Mixture form.Oxygen silicon nitride membrane can be by plasma CVD SiH 4And N 2O or SiH 4, NH 3, and N 2The O raw material forms.
First dielectric film 201 and second dielectric film are with buffer fluoric acid or by using CHF 3Etching optionally at dried quarter.In any one situation, it is desirable to suitably regulate raw material and film formation condition and make second dielectric film than the relative fast speed etching of first dielectric film, and guarantee the selection ratio of etching process.The angle of the second dielectric film split shed side suitably is set in 5-90 ° scope, preferred 30-90 ℃.
Used substrate is poly semiconductor substrate, single crystalline substrate, Sapphire Substrate, quartz substrate or the commercial non-alkali glass substrate that its surface covers with dielectric film.In addition, the metal substrate that can adopt its surface to cover with dielectric film.
The width W 1 of second dielectric film 202 that keeps after the etching is unrestricted but be 0.1-10 μ m.The width W 2 of each opening is 0.01-2 μ m (preferred 0.1-1 μ m) in second dielectric film 202.The thickness d of second dielectric film is 0.01-1 μ m (preferred 0.05-0.2 μ m).The length of each opening (in the direction perpendicular to paper) is not restricted especially, and opening can be linear or crooked.For example, if each opening long enough is just enough with the channel formation region that forms TFT.
Shown in Figure 1B, formation has the amorphous semiconductor film 204 of 0.2-3 μ m (preferred 0.5-1.5 μ m) thickness to cover surface and the opening of being made up of first dielectric film 201 and second dielectric film 202.In other words, the ideal thickness of amorphous semiconductor film 204 is equal to or greater than the degree of depth of the opening that forms in second dielectric film.Amorphous semiconductor film is formed by the alloy of silicon, silicon and germanium or the alloy or the compound of compound or silicon and carbon.As shown in the figure, amorphous semiconductor film is formed on the basic dielectric film He on the opening and makes semiconductor be deposited, and reflects the differential of basis.Preferably they are not exposed to and under amorphous semiconductor film, form oxygen silicon nitride membrane in the air as the 3rd dielectric film 203 by in same film forming device, forming film continuously.This has removed the influence of the chemical impurity that sticks to first dielectric film and second dielectric film surface such as the boron, and prevents the direct contact between silicon nitride and the amorphous semiconductor film.
Amorphous semiconductor film 204 instantaneous thawing and crystallization.In the crystallization, after irradiation is assembled with optical system, semiconductor film with laser or from the rayed of lamp source to have enough energy densities to melt semiconductor film.In this step, be preferred from the laser of cw lasing device.Used laser is converged to linear shape with optical system and in vertical expansion.Laser intensity vertically is being uniformly ideally, and laterally is being variable.
Used laser oscillator is rectangular light beam (rectangular beam) solid laser oscillator, and the sheet laser oscillator is preferred especially.Used flaky material is the crystal such as Nd:YAG, Nd:GGG (Gd-Ga garnet) or Nd:GsGG (gadolinium scandium gallium garnet).The laser of slab laser is propagated along Z font light path in this sheet laser medium, repeats total reflection.In addition, can adopt the solid laser oscillator of the rod that uses mixed Nd, Tm or Ho.Particularly, it is YAG, the YVO of chip architecture amplifier and use such as mixed Nd, Tm or Ho 4, YLF or YAlO 3The combination of solid laser oscillator of crystal.Shown in arrow among the figure, laser is being advanced with linear vertical direction of intersecting.Here linear shape refers to vertically than laterally 10 times of length or more shape.
Consider the absorption coefficient of amorphous semiconductor film, the wavelength of continuous wave laser is 400-700nm ideally.Second harmonic or triple-frequency harmonics that the light of this wave band is selected first-harmonic by Wavelength changing element obtain.Adoptable Wavelength changing element is ADP (ammonium dihydrogen phosphate), Ba 2NaNb 5O 15(barium-sodium niobate (barium sodium niobate)), CdSe (cadmium selenide), KDP (potassium dihydrogen phosphate), LiNbO 3(lithium niobate), Se, Te, LBO, KB5 etc.LBO is desirable especially.In typical example, use Nd:YVO 4Laser oscillator (first-harmonic: second harmonic 1064nm) (532nm).The laser oscillation mode that is adopted is TEM 00The single mode of pattern.
In the situation of silicon, it is selected as only material, and absorption coefficient is 10 3-10 4Cm -1The zone mostly at visible-range.When crystallization highly sees through on the substrate that the material of visible light forms when being formed into the amorphous semiconductor film of 30-200nm thickness by silicon at glass or other, the visible light radiation that semiconductor film can be by having the 400-700nm wavelength is not destroyed basic dielectric film by the heating of selectivity and crystallization.Particularly, the penetration depth of light in amorphous silicon film with 532nm wavelength approximately is 100nm-1000nm, thereby light can arrive the inside of the amorphous semiconductor film with 30-200nm thickness fully.This means that semiconductor film can be heated internally, and almost whole semiconductor film can be by uniform heating in the laser irradiation area.
Semiconductor with the instantaneous thawing of laser radiation accumulates in (recessed part) in the opening by surface tension.Semiconductor solidifies then with formation and has the almost crystal semiconductor film 205 of flat surfaces shown in Fig. 1 C.Crystal growth finishes, and the grain boundary is formed at (at bossing) on second dielectric film (zone 220 among Fig. 1 C).
Afterwards, heat treatment is preferred the 500-600 ℃ of distortion of carrying out being accumulated in the crystal semiconductor film to remove shown in Fig. 1 D.The lattice that distortion is brought by crystallization does not match, basic thermal stress and the contraction of semiconductor volume causes.This heat treatment is adopted, and for example, gas heated type rapid thermal annealing (RTA) also continues 1-10 minute.This step is not imperative in the present invention, but optionally.
Shown in Fig. 1 E, the surface of crystal semiconductor film 205 is etched selectively to extract the crystal semiconductor film 206 that is formed in the opening (recessed part).This is to remove the crystal semiconductor film that is retained on second dielectric film 202 and comprises grain boundary and crystal defect, thereby only stays the high quality crystal in opening (recessed part).Crystal semiconductor film 206 is with crystal orientation with variation and not have the grain boundary be feature.
Especially, form gate insulating film by the crystal semiconductor film of filling opening (recessed part) and gate electrode makes channel formation region be positioned in the opening.Finished TFT like this.If opening forms in the direction that is parallel to the TFT orientation, and laser advances in this direction, and crystal is in this direction growth.This makes that main is possible at specific oriented crystal growth crystal.Its details is shown in Fig. 2 A-2E, and best pattern is that W1 and W2 are equal to or less than 1 μ m, and the degree of depth of each opening (groove) is no better than or greater than the thickness of amorphous semiconductor film 203.
The ESEM of Figure 21 (SEM) picture shows the example.In this example, 170nm is dark, and differential second dielectric film that forms on quartz substrate with silica forms, amorphous silicon film is formed into the thickness of 150nm on the basic dielectric film that forms 0.5 μ m width (W1) bossing with the spacing (W2) of 0.5 μ m, and amorphous silicon film laser radiation crystallization.The surface of crystal semiconductor film with Secco solution etching so that the grain boundary to be shown clearly.Secco solution is by mixing the K as additive 2Cr 2O 7And HF:H 2O=2: 1 preparation.The grain boundary concentrates on and forms differential bossing obviously from this figure.
Figure 23 illustrates the result who obtains the orientation of crystal semiconductor film in the opening (recessed part) with Electron Back-Scattered Diffraction figure (EBSP).EBSP is a kind of method, wherein specific detector is attached on the ESEM (SEM), plane of crystal shines with electron beam, and crystal orientation is differentiated to measure not only at surface orientation but the micro-crystalline all directions of crystal (hereinafter this for simplicity method is known as the EBSP method) from its Kikuchi line by image recognition with computer.
The crystal that the data of Figure 23 illustrate in the opening (recessed part) is grown on the direction that is parallel to the laser scanning direction that is converged to linear shape.Leading crystal face (domi nantplane) orientation of growth is＜110〉orientation, still＜100〉oriented growth also exists.
As implied above, opening (or thereupon produce differential) is provided at below the amorphous semiconductor film and the irradiation crystallization of amorphous semiconductor film by continuous wave laser, thereby makes and follow distortion that crystallization produces or stress to concentrate on zone outside the opening.This makes that optionally forming the bad crystallinity zone with grain boundary etc. becomes possibility.In other words, have only crystal semiconductor film in the opening to be left and the crystal semiconductor film has at least two crystal orientations and extends and do not form at least two crystal grain of grain boundary in the direction that is parallel to orientation.
Thereby form its channel formation region of TFT and place such crystal semiconductor film.This has improved the reliability of high speed current drives performance and element.
Embodiment 2
When forming crystal semiconductor film of the present invention, shown in enforcement scheme 1 with the amorphous semiconductor film of laser radiation crystallization can with laser further irradiation be used for recrystallization to melt film once more.
Fig. 3 A-3E illustrates the example.At first, first dielectric film 201, second dielectric film 202, oxygen silicon nitride membrane 203 and amorphous semiconductor film 204 form in the mode described in the embodiment 1.Amorphous semiconductor film 204 is used as the metallic element Ni with catalytic action and mixes to quicken crystallization, such as the crystallization temperature that reduces silicon and improve orientation.It is unrestricted how to mix with Ni, can adopt spin coating, evaporation, sputter or other method.When using spin coating, coating contains the aqueous solution of 5-10ppm nickel acetate to form the layer 210 of containing metal element.Catalytic elements is not limited to Ni, can also adopt other known element.
Secondly, shown in Fig. 3 B, amorphous semiconductor film 204 passes through 550-580 ℃ of heat treatment 4-8 hour crystallization to form crystal semiconductor film 211.Crystal semiconductor film 211 is a large amount of bar-shaped or acicular crystals.On the macroscopic view, each crystal is grown at specific direction, thereby crystal semiconductor film 211 has uniform crystallinity.Crystal semiconductor film 211 is a feature to have high orientation ratio at specific direction also.
Shown in Fig. 3 C, the crystal semiconductor film that obtains by the heat treatment crystallization comes recrystallization with the rayed of continuous wave laser or equal intensities to melt film.What obtain like this is to have the almost crystal semiconductor film 212 of flat surfaces.Grain boundary in crystal growth end and the crystal semiconductor film 212 is on second dielectric film (on the bossing) also.The amorphous area that is retained in the crystal semiconductor film 211 is handled crystallization with this.Is the mutability of semiconductor film absorption coefficient with the crystal semiconductor film as being excited the advantage of light-struck object; Even absorption coefficient also is difficult to change when the semiconductor film of crystallization melts by laser radiation.This allows wide surplus when the setting laser illuminate condition.
Afterwards, preferably draw processing to remove the metallic element that is retained in the crystal semiconductor film 212.The thin silicon oxide film forms so that contact with crystal semiconductor film 212 as barrier film 213.Contain 1x10 20/ cm 3Or the amorphous silicon film 214 of the rare gas element of higher concentration forms as gettering site.Substrate is subjected to heat treatment at 500-700 ℃ then.For the details of this technology, see JapanesePatent Application No.2001-019367 (or JapanesePatent Application No.2002-020801).The effect of the distortion of crystal semiconductor film 212 is removed in the heat treatment that is used to draw processing in addition.
Afterwards, shown in Fig. 3 E, remove amorphous semiconductor film 214 and barrier film 213, and be similar to embodiment 1, the surface of crystal semiconductor film 212 is etched optionally to extract the crystal semiconductor film 215 that is formed in the opening (recessed part).The crystal semiconductor film 215 that obtains like this has variable crystal orientation and does not have the grain boundary.As two stage crystallization handle to make form and to compare crystal semiconductor film with embodiment 1 and become possibility with relative few distortion.
Embodiment 3
The present embodiment provides with reference to figure 4A-10F and makes the explanation that its channel formation region places the TFT pattern of fill area.Fill area is the zone of filling the crystal silicon film that is formed at the basic dielectric film opening under the crystal silicon film.Fig. 4 A is a vertical view, and Fig. 4 B and figure subsequently are the vertical cross-section diagrams of Fig. 4 A various piece.Similarly, Fig. 5 A, 6A, 7A, 8A, 9A and 10A are vertical views and remaining is a vertical cross-section diagram.
Among Fig. 4 A-4E, aluminium oxynitride film that 30-300nm is thick or silicon nitride film are formed on the glass substrate 301 as first dielectric film 302.On first dielectric film 302, form silicon oxide film or oxygen silicon nitride membrane and be subjected to photoetching has rectangular graph with formation second dielectric film 303.The thick silicon oxide film of 1000nm by plasma CVD with TEOS and O 2Mixture and set reaction pressure be 40Pa, underlayer temperature be 400 ℃, and the discharge high frequency (13.56MHz) power density be 0.6W/cm 2Form.Silicon oxide film is etched to form opening 304 then.In this situation, the degree of depth of opening is the thickness of second dielectric film no better than, is 0.01-1 μ m, preferred 0.05-0.2 μ m.
On first dielectric film 302 and second dielectric film 303, shown in Fig. 5 A-5E, the continuous formation of plasma apparatus that the 3rd dielectric film 305 and amorphous semiconductor film 306 usefulness are same and not being exposed in the air.The 3rd dielectric film 305 is silicon oxide film or oxygen silicon nitride membrane.Amorphous semiconductor film 306 is main siliceous semiconductor films, by plasma CVD SiH 4Form as unstrpped gas.In this stage, the side of film covering opening 304 and bottom and its air spots are smooth.
Then, shown in Fig. 6 A-6E, semiconductor film passes through the irradiation of continuous wave laser by crystallization.Crystallization condition comprises employing continuous wave pattern YVO 4Laser oscillator uses optical system so that (wavelength: 532nm) be converged to linear laser, it is vertically than laterally growing 10 times and vertically have the homogeneous energy density distribution, and with the speed of 10-200cm/sec laser is advanced with its 2-10W power second harmonic.It not exclusively is the things of constant that phrase homogeneous energy density distribution is not got rid of.Acceptable energy density distribution is ± 10%.Gou Zao laser processing apparatus can be used in laser radiation as shown in figure 13.
Figure 14 A and 14B illustrate the scanning direction of laser 360 of linear convergence and the relation of aperture position.The intensity that has that the intensity distributions of the laser 360 of linear convergence is desirable vertically is being uniform zone.This is to be constant for the temperature by the semiconductor film that is heated keeps the temperature of irradiated region.If the laser that temperature online shape is assembled vertically (direction of intersecting with the scanning direction) is variable, then crystal growth direction can not remain on the direction of laser scanning.As shown in the figure, opening 304 is aimed at the scanning direction of the laser 360 of linear convergence.This makes crystal growth direction mate the orientation of each TFT.Reduced the fluctuation on the performance between each TFT element like this.
By the irradiation of laser under these conditions, amorphous semiconductor film melts rapidly and crystallization.In fact, crystallization is carried out along with melt zone moves.The silicon that melts accumulates in the opening (recessed part) by surface tension and solidifies.Shown in Fig. 6 A-6E, form crystal semiconductor film 307 filling openings 304 like this with flat surfaces.
Afterwards, shown in Fig. 7 A-7E, crystal semiconductor film 307 is etched and stays the part of crystal semiconductor film 307 in opening 304 at least.By this etching processing, the part that the crystal semiconductor film is positioned on second dielectric film 303 is removed, and the island semiconductor film 308 that is shaped to mate opening shape is formed by the crystal semiconductor film.The crystal semiconductor film is used as the fluorine base gas and the oxygen etching of etching gas, thereby guarantees the selectivity with respect to base oxide film.For example, CF 4And O 2Mist as etching gas.As implement shown in the scheme 1, island semiconductor film 308 is with crystal orientation with variation and not have the grain boundary be its feature.End face can be used chemico-mechanical polishing (CMP) etching.The thickness of island semiconductor film 308 is 0.01-1 μ m, preferred 0.05-0.2 μ m.
Fig. 7 A-7E is not the shape that will limit island semiconductor film 308, i.e. the shape of the opening of being made up of first dielectric film and second dielectric film 304.As implement in the scheme 1 pointedly, as long as following the design rule that provides, the shape of film just is not restricted especially.The island semiconductor film of Fig. 7 A-7E is by combining moulding with a plurality of strips (slip-like) crystal semiconductor film with a pair of rectangle crystal semiconductor film.As hereinafter described, the channel formation region of TFT places a plurality of strip crystal semiconductor films.
Among Fig. 8 A-8F, form as the 4th dielectric film 310 of gate insulating film and as the conducting film 311 of gate electrode to cover the side and the top of island semiconductor film 308.The 4th dielectric film 310 is silicon oxide film or the oxygen silicon nitride membranes with 30-200nm thickness.Conducting film 311 is formed by the alloy of tungsten or tungstenic or other element.
The impurity range 313 that Fig. 9 A-9F illustrates a kind of conduction type is formed at the stage in the island semiconductor film 308.The conducting film 311 that impurity range 313 can be used as gate electrode forms in self aligned mode as mask, maybe can use photoresist masks such as (photo resist) to form.Impurity range 313 formation source and drain regions, if necessary, lightly doped drain.
Be to form impurity range 313, the ion that uses foreign ion wherein to quicken and be injected in the semiconductor film with electric field injects or ion doping.Whether the ion samples of being injected when application is of the present invention has mass separation is not a main thing.
Then, shown in Figure 10 A-10F, hydrogeneous oxygen silicon nitride membrane or silicon nitride film are formed into the thickness of 50-100nm as pentasyllabic quatrain velum 314.In this state, 400-500 ℃ heat-treat and silicon nitride film or oxygen silicon nitride membrane in contained hydrogen be released with the hydrogenation island semiconductor film.Silicon oxide films etc. form forming circuit 316 as the 6th dielectric film, and it contacts with impurity range 313 as source and drain region.
TFT makes like this.The TFT that makes according to Fig. 4 A-10F is many channel TFT, wherein a plurality of channel formation regions be arranged in parallel and with a pair of impurity range adjacency.In this structure, the number of the channel formation region that is arranged in parallel is unrestricted, can set as required.Channel formation region is by having at least two crystal orientations and having at least two crystal grain that extend in the direction that is parallel to orientation and the crystal semiconductor film that do not form the grain boundary forms.
Embodiment 4
Figure 11 A-11C illustrates by the many channel TFT of the many channel TFT of n raceway groove with lightly doped drain (LDD) structure and p raceway groove and builds example as the inverter circuit of CMOS structure basic circuit.Among Figure 11 A-11C, second dielectric film 320, open 321 and island semiconductor film 322 and 323 form in the mode described in the embodiment 3.
Figure 11 A is a vertical view.The one n type impurity range 333 in formation source and drain region is formed in the island semiconductor film 322.The one p type impurity range 334 in the drain region in formation source is formed in the island semiconductor film 323.Except impurity range, form the conductive layer 330 and source and the thread cast-off road 337-339 that are used for forming gate electrode.The thickness of island semiconductor film 323 is 0.01 μ m-1 μ m, preferred 0.05 μ m-0.2 μ m.
Figure 11 B and 11C are the vertical cross-section diagrams that obtains along line G-G ' and H-H '.In the n channel TFT, the 2nd n type impurity range that forms the LDD district forms adjacent to a n type impurity range 333.Gate electrode 330 has double-layer structure, and a n type impurity range 333, the two n type impurity ranges and a p type impurity range can form in self aligned mode.331 represented be channel formation region.The details of gate electrode and impurity range with and manufacture method see JP 2002-14337A or Japanese Patent Application No.2001-011085.
Pentasyllabic quatrain velum 314 and the 6th dielectric film 315 are identical with the 5th and the 6th dielectric film in the embodiment 3 among Figure 11 A-11C, and it illustrates in this omission.
Embodiment 5
Figure 12 A-12F illustrates the mutation of many channel TFT shown in the embodiment 3, and wherein gate electrode is by different structures.TFT among Figure 12 A-12F except the structure in gate electrode and LDD district with embodiment 3 in identical.General in used symbol and embodiment 3 and 5 describes in detail and just omitted.
TFT structure shown in Figure 12 A-12F is by such as the metal nitride 350a of titanium nitride or tantalum nitride and by the example that forms gate electrode such as the refractory metal 351b of tungsten or tungsten alloy.Sept 351 is formed at the side of gate electrode 350b.Ask that parting 351 can be by forming to have conductivity such as the insulator of silica or by n type polysilicon.Carve formation sept 351 with anisotropic dry.LDD district 352 formed before sept, made it to form with self-aligned manner with gate electrode 350b.When forming with electric conducting material when asking parting, LDD district basically with gate electrode with the overlapping LDD district of formation grid.
Sept and effective especially with the structure in self-aligned manner formation LDD district wherein is provided when design rule is accurate.Although one pole TFT structure is shown in here, also might executes scheme 4 strictly according to the facts and form the CMOS structure like that.
Embodiment 6
This embodiment illustrates makes the example that its channel formation region places the TFT of fill area.Fill area is the zone of filling the crystal silicon film be formed at the basic dielectric film opening below the crystal silicon film.
Among Figure 31 A-31C, the oxygen silicon nitride membrane with 100nm thickness is formed on the glass substrate 601 as first dielectric film 602.On first dielectric film 602, form silicon oxide film and be subjected to photoetching has rectangular graph with formation second dielectric film 603.Silicon oxide film is by plasma CVD TEOS and O 2Mixture and set reaction pressure be 40Pa, underlayer temperature be 400 ℃, the discharge high frequency (13.56MHz) power density be 0.6W/cm 2Be formed into the thickness of 150nm.The etching oxidation silicon fiml is opened 604a and 604b with formation then.
Figure 31 A is a vertical view, and Figure 31 B is the vertical cross-section diagram that obtains along Figure 31 A center line A-A ', and Figure 31 C is the vertical cross-section diagram that obtains along 31A center line B-B '.Same explanation be used for Figure 32 A-36C.
Shown in Figure 32 A-32C, amorphous silicon film 605 is formed into the thickness of 150nm to cover first dielectric film 602 and second dielectric film 603.Amorphous silicon film 605 is by plasma CVD SiH 4Form as unstrpped gas.
Then shown in Figure 33 A-33C, silicon fiml is with the irradiation crystallization of continuous wave laser.Crystallization condition comprises employing continuous wave pattern YVO 4Laser oscillator, use optical system with its 5.5W power second harmonic (wavelength: 532nm) be converged to linear laser, it vertically is 400 μ m, laterally is 50-100 μ m and vertically has the homogeneous energy density distribution, and with the speed of 50cm/sec laser is advanced.It not exclusively is the things of constant that phrase homogeneous energy density distribution is not repelled.Acceptable energy density distribution is ± 5%.Gou Zao laser processing apparatus can be used in this laser radiation as shown in figure 13.The laser intensity of assembling in optical system can vertically be uniformly, and laterally is being variable.Distributing in longitudinal strength is that uniform laser region is used for crystallization, makes the effect of crystal in the direction growth that is parallel to laser scanning direction thereby strengthen.
By the irradiation of laser under these conditions, amorphous silicon film melt rapidly and crystallization along with the mobile of melt zone carries out.The silicon that melts is assembled in the split shed (recessed part) by surface tension and is solidified.Form crystal semiconductor film 606 filling opening 604a and 604b like this.
Afterwards, shown in Figure 34 A-34C, be formed for the mask graph of etching processing so that stay the part of crystal semiconductor film in opening 604a and 604b at least.The result is to form the island semiconductor district 607 and 608 that comprises channel formation region.
Among Figure 35 A-35C, gate insulating film 609 and gate electrode 610 and 611 are formed on semiconductor region 607 and 608.Gate insulating film is the silicon oxide film that is formed into 80nm thickness with plasma CVD.The alloy of gate electrode 610 and 611 usefulness tungsten or tungstenic forms.This structure makes and places the island semiconductor district of filling opening 604a and 604b to become possibility channel formation region.
Next, suitably form source and drain region, lightly doped drain and other is to finish TFT.
Embodiment 7
Single grid/many channel TFT can form with the process that is similar to embodiment 6.Shown in Figure 36 A-36C, opening 604c is formed in second dielectric film 603 and uses arrow gauge shape district and district's shaping of adjacency with it.Forming island semiconductor district 620 with crystal silicon film also is shaped with the shape of coupling opening 604c.Form gate insulating film 621 and gate electrode 622 then to finish TFT.
Embodiment 8
If second dielectric film in the embodiment 7 is than amorphous semiconductor thickness and for example have, the thickness of 350nm can be formed in opening 604d completely by the film formed island semiconductor of crystal semiconductor district 620.Then, be similar to embodiment 7, form gate insulating film 621 and gate electrode 622 to finish single grid/many channel TFT.
Embodiment 9
Figure 38 A-38D illustrates another example of single grid/many channel TFT.First dielectric film 602, second dielectric film 603, island semiconductor district 630, gate insulating film 631 and gate electrode 632 are formed on the substrate 601 in the mode that is similar to embodiment 1-3.The difference of the present embodiment and embodiment 1-3 is, among Figure 38 A-38D, forms second opening 625 except the opening 604e that forms second dielectric film 603.After forming, island semiconductor district 630 forms second opening 625 by removing the part of second dielectric film of part that encirclement will form the island semiconductor district 630 of channel formation region.
The zone that surrounds channel formation region is exaggerated and is shown among Figure 38 D.Gate insulating film 631 contacts and forms gate electrode 632 with the top so that the covering gate dielectric film with the side in island semiconductor district 630.In this situation, channel formation region is formed at the side 635 of semiconductor region 630 and end face 634 on the two.The current drives performance that this has increased depletion region and has improved TFT.
Embodiment 10
The present invention can be used for various semiconductor devices.With the pattern of explanation according to the display floater of embodiment 1-5 manufacturing.
Among Figure 15, substrate 900 is equipped with pixel portion 902, gate signal side drive circuit 901a and 901b, data-signal side drive circuit 901c, input/output terminal subdivision 908 and circuit or sets of lines 917.Sealing figure 940 can be partly with gate signal side drive circuit 901a with 901b and data-signal side drive circuit 901c and to be used for circuit or sets of lines 917 that drive circuit is connected with input terminal overlapping.Like this, the area of the framework region of display floater (surrounding the district of pixel portion) can reduce.FPC 936 is fixed to the external input terminals subdivision.
Wherein the chip that formed by TFT of the present invention such as microprocessor, memory, Media Processor/DSP (digital signal processor) can be installed on the display floater.These functional circuits be different from pixel portion 902, gate signal side drive circuit 901a and 901b, and the design rule of data-signal side drive circuit 901c under form.Particularly, employing is less than the design rule of 1 μ m.It is unrestricted how chip is installed, and can adopt COG etc.
For example, the TFT shown in the embodiment 3-5 can be as the switch element of pixel portion 902 and the active element of composition gate signal side drive circuit 901a and 901b and data-signal side drive circuit 901c.
Figure 19 illustrates the example of a dot structure in the pixel portion 902.This pixel has the TFT 801-803 of control pixel light emission element or liquid crystal cell, and it is respectively a switching TFT, reset TFT and drive TFT, is used to control the light-emitting component or the liquid crystal cell of pixel.The process of making these TFT is shown among Figure 16-19.The details of process illustrates in embodiment 3, here no longer repeats.
Figure 16 illustrates the stage that forms second dielectric film 503 and form opening 504 and 505 in second dielectric film.Figure 17 illustrates opening 504 and 505 and forms the stage afterwards, and wherein amorphous semiconductor film 506 forms by deposit, and shines to form crystal semiconductor film 508 with the laser 507 of linear convergence.
Among Figure 18, the crystal semiconductor film on second dielectric film 503 is by etching removing to obtain by the film formed island semiconductor film 509 of the crystal semiconductor of filling opening and 510 by selectivity.
Form gate insulating film (not illustrating among the figure) and gate electrode (or gate wire) 514-516 then.Opening 511-513 is formed at the position that island semiconductor film 509 and 510 intersects with gate electrode (or gate wire) 514-516.Can obtain being similar to the grid structure in the embodiment 3 like this.Afterwards, form n type or p type impurity range, form dielectric film above, on dielectric film, form power supply 819, other various circuits 820 and 821 and pixel electrode 517.What obtain like this is dot structure shown in Figure 19.
Figure 20 A is the vertical cross-section diagram that obtains along Figure 19 center line A-A '.Pixel electrode 517 can be used for forming the organic illuminating element shown in Figure 20 B.
Figure 20 B illustrates a kind of pattern (upwards light emitting-type), the light that wherein comes self-emission device 33 from substrate to surface launching.Pixel electrode 517 is as negative electrode, and it is being connected in the lump on the circuit 520 of electrode of light-emitting component 33.The composition of organic compound layer 27 comprises that electronics injects transport layer, luminescent layer and hole and injects transport layer, and it forms in proper order according to this, and wherein electronics injection transport layer and negative electrode are nearest.Anode 29 is formed on the organic compound layer 27.Thin printing opacity metal level 28 is formed between organic compound and the anode.Anode 29 is formed by the transparency conducting film such as indium tin oxide target (ITO) film, zinc oxide (ZnO) film or indium zinc oxide (IZO) film by resistance heating evaporation.Destroy organic compound layer 27 when metal level 28 has been avoided formation anode 29 and avoid element function to degenerate.Form diaphragm 24 and passivating film 25 then.
If organic compound layer 27 is formed by low molecular weight organic compound, transport layer is injected by CuPc (copper phthalocyanine in the hole, CuPc) and the MTDATA of fragrant amido material and α-NPD form, also the electron injecting layer that serves a dual purpose as luminescent layer is by three-oxine aluminium complex (Alq 3) form and be placed on the hole injection transport layer.Alq 3Make and become possibility from singlet excited luminous (fluorescence).
In order to improve brightness, be preferred from luminous (phosphorescence) of triplet excited state.In this situation, organic compound layer 27 can be that the lamination that transport layer, luminescent layer, hole blocking layer and electronics inject transport layer is injected in stacked in order hole.The hole is injected transport layer and is formed by the CuPc of phthalocyanine sill (phthalocyanine-based material) and the α-NPD of fragrant amido material.Luminescent layer is by carbazyl CBP+Ir (ppy) 3Form.Hole blocking layer is formed by bathocuproin (BCP).Electronics injects transport layer by Alq 3Form.
Above-mentioned two structures are to use the example of low molecular weight organic compound.Also might obtain organic illuminating element, wherein HMW organic compound and low molecular weight organic compound combination.For example, organic compound layer 27 can be hole that polythiophene (polythiophene) derivative (PEDOT) by the HMW organic compound the forms hole injection transport layer injecting transport layer, form by α-NPD, by CBP+Ir (ppy) 3The luminescent layer that forms, the hole blocking layer that forms by BCP and by Alq 3The electronics that forms injects the lamination of transport layer.They with the most close anode of PEDOT layer with described sequential cascade.By use PEDOT in hole injection layer, hole injection efficiency and luminous efficiency improve.
In any situation, has recently luminous (fluorescence) higher luminous efficiency from singlet excited from luminous (phosphorescence) of triplet excited state.Thereby can obtain same luminosity with lower operating voltage (causing the luminous needed voltage of organic illuminating element).
As mentioned above, the display floater with organic illuminating element can be made with the present invention.Although here do not provide as an example, the present invention can also be used to making the display floater that utilizes the liquid crystal electrooptical performance.
Embodiment 11
When illustrating second dielectric film 202 in forming Figure 1A-1E and form dielectric film corresponding to first dielectric film 201 on second dielectric film 202, the present embodiment use glass substrate to stop the example of thing as etching.
Among Figure 26 A, second dielectric film 702 is at first formed the thickness of 10-3000nm by silica and silicon oxynitride on glass substrate 701, and is preferred, 100-2000nm.Having institute is formed in second dielectric film 702 to shaped aperture.Details is seen embodiment 1.Opening is with forming at the wet quarter or the quarter of doing.In the present embodiment, adopt and use CHF 3Dried quarter.In this situation, gas flow rate is set at 30-40sccm, and reaction pressure is set at 2.7-4.0kPa, applies voltage to 500W, and underlayer temperature is 20 ℃.
Glass substrate 701 preferable material have high selectivity (for example, Corning#1737 glass substrate (product of Corning company)) with respect to silicon oxide film in the present embodiment.This is to can be used as etching prevention thing because have the glass substrate 701 of high selectivity constantly at formation second dielectric film 702.
After second dielectric film 702 forms, cover with first dielectric film 703.First dielectric film 703 is the oxygen silicon nitride membrane that silicon nitride film or nitrogen content are Duoed than oxygen content, the perhaps lamination of these films.Amorphous semiconductor film 704 is formed on first dielectric film 703 to obtain the state of Figure 26 B.The details of first dielectric film 703 and amorphous semiconductor film 704 is seen the explanation of embodiment 1.Then the step of Figure 26 B is followed the explanation of embodiment 1, no longer repeats here.
According to the present embodiment, guarantee that sufficiently high selection is than the process allowance that forms second dielectric film 702 with improvement between the glass substrate 701 and second dielectric film 702.The problem that the present embodiment does not also have the lower edge of second dielectric film 702 to scrap, or other similar problem.In the zone that second dielectric film does not have to form, the oxygen silicon nitride membrane that silicon nitride film or nitrogen content are higher than oxygen content, and the lamination of these films is placed on the glass substrate.This has eliminated the needs such as the special insulation film of aluminium nitride film.
The present embodiment can be used any structure independent assortment of embodiment 1-10.
Embodiment 12
The present invention can be used in the various devices.The example comprises portable data assistance (electronic calendar, movable computer, cell phone etc.), video camera, digital camera, personal computer, televimonitor, projection display equipment etc.Figure 24 A-25D illustrates the example of device.
Figure 24 A illustrates the example that applies the present invention to televimonitor.Device is made up of casing 3001, support pedestal 3002, display unit 3003 and other part.TFT constructed in accordance can be used in the display unit 3003 and, in addition, the various integrated circuits that are formed on the glass substrate are such as various logic circuitry, high-frequency circuit, memory, microprocessor, Media Processor and figure LSI.
Figure 24 B illustrates the example that applies the present invention to video camera.The composition of device comprises main body 3011, display unit 3012, sound input unit 3013, console switch 3014, battery 3015, visual receiving element 3016 and other parts.TFT constructed in accordance can be used on display unit 3012 and, in addition, the various integrated circuits that are formed on the glass substrate are such as various logic circuitry, high-frequency circuit, memory, microprocessor, Media Processor and figure LSI.
Figure 24 C illustrates the example that applies the present invention to notebook-sized personal computer.The composition of device comprises main body 3021, casing 3022, display unit 3023, keyboard 3024 and other parts.TFT constructed in accordance can be used in the display unit 3023 and, in addition, the various integrated circuits that are formed on the glass substrate are such as various logic circuitry, high-frequency circuit, memory, microprocessor, Media Processor, figure LSI and encoder LSI.
Figure 24 D illustrates the example that applies the present invention to PDA (personal digital assistant).The composition of device comprises that main body 3031, stylus 3032, display unit 3033, action button 3034, outside connect 3035 and other parts.TFT constructed in accordance can be used in the display unit 3033 and, in addition, the various integrated circuits that are formed on the glass substrate are such as various logic circuitry, high-frequency circuit, memory, microprocessor, Media Processor, figure LSI and encoder LSI.
Figure 24 E illustrates and applies the present invention to the sound equipment player, and is concrete, the example of vehicle audible device.The composition of device comprises main body 3041, display unit 3042, console switch 3043 and 3044 and other part.TFT constructed in accordance can be used in the display unit 3042 and, in addition, the various integrated circuits that are formed on the glass substrate are such as various logic circuitry, high-frequency circuit, memory, microprocessor, Media Processor, figure LSI and amplifier circuit.
Figure 24 F illustrates the example that applies the present invention to digital camera.The composition of device comprises main body 3051, display unit (A) 3052, eyepiece 3053, console switch 3054, display unit (B) 3055, battery 3056 and other part.TFT constructed in accordance can be used in display unit (A) 3052 and the display unit (B) 3056 and, in addition, the various integrated circuits that are formed on the glass substrate are such as various logic circuitry, high-frequency circuit, memory, microprocessor, Media Processor, figure LSI and encoder LSI.
Figure 24 G illustrates and applies the present invention to cellular example.The composition of device comprises main body 3061, video output unit 3062, video input unit 3063, display unit 3064, console switch 3065, antenna 3066 and other part.TFT constructed in accordance can be used in the display unit 3064 and, in addition, the various integrated circuits that are formed on the glass substrate are such as various logic circuitry, high-frequency circuit, memory, microprocessor, Media Processor, figure LSI, encoder LSI and cell phone LSI.
Figure 25 A illustrates the pre-projecting type projecting apparatus, and it comprises projection arrangement 2601, screen 2602 and other parts.Figure 25 B illustrates rear projector for projecting, and it comprises main body 2701, projection arrangement 2702, speculum 2703, screen 2704 and other parts.
Figure 25 C is the example that projection arrangement 2601 and 2702 structures among Figure 25 A and the 25B are shown.Projection arrangement 2601 and 2702 composition respectively comprise light source optical system 2801, speculum 2802 and 2804-2806, dichronic mirror 2803, prism 2807, liquid crystal indicator 2808, differ sheet 2809 and projection optical system 2810.Projection optical system 2810 is the optical systems that comprise projecting lens.The present embodiment is depicted as 3 types, but has no particular limits.For example, can be monolithic type.If desired, can be provided among Figure 25 C in the light path shown in the arrow such as optical lens, film, the optical system of regulating the film differ or IR film with polarization function.
Figure 25 D is the example that light source optical system 2801 structures among Figure 25 C are shown.In the present embodiment, the composition of light source optical system 2801 comprises reflector 2811, light source 2812, lens arra 2813 and 2814, polarization conversion device 2815 and collector lens 2816.Light source optical system shown in Figure 25 only is an example, does not limit the present invention.If desired, such as optical lens, have polarization function film, regulate the film differ or the optical system of IR film can be provided in the light source optical system.
Here only be example shown in, the invention is not restricted to these purposes.
As mentioned above, semiconductor film melts and accumulates in the opening that is formed on the insulating surface by surface tension, grows near the point that crystal allows to meet from open bottom and side.Like this, the distortion of following crystallization to produce concentrates on the zone outside the opening.The crystal semiconductor film not zone in opening is removed by etching, therefore can pick out to have fabulous crystalline zone.
Also by specifying such as transistor, especially, the position of the semiconductor element of the channel formation region of TFT makes to form does not have the crystal semiconductor film of grain boundary to become possibility in the present invention.Like this, the cause of performance inconsistency, promptly grain boundary and the crystal defect that forms arbitrarily is removed, and can form to have still less the TFT group or the TFT of performance inconsistency.

Claims (3)

1. semiconductor device, it comprises:
First dielectric film on substrate with opening;
Has a crystal semiconductor island that forms on first dielectric film of opening described, at least the first and second parts that this crystal semiconductor island comprises a pair of impurity range and is parallel to each other between this is to impurity range and extends, wherein each described first and second part all comprises channel formation region;
The gate insulating film that on first and second parts, forms;
Be formed at the gate electrode on first and second parts, and gate insulating film is inserted in wherein,
Wherein, gate insulating film contacts the end face and the side of each described first and second part on described crystal semiconductor island, and gate electrode is formed on the end face and side of each described first and second part on described crystal semiconductor island, and gate insulating film is inserted in wherein,
This of wherein said crystal semiconductor island forms on described first dielectric film impurity range, but is not formed in the opening of described first dielectric film, and
First and second parts on wherein said crystal semiconductor island form at the opening part of described first dielectric film.
2. the semiconductor device of claim 1, described device also comprises second dielectric film that is located between described substrate and described first dielectric film.
3. semiconductor device, it comprises:
First dielectric film on substrate with opening;
Has a crystal semiconductor island that forms on first dielectric film of opening described, at least the first and second parts that this crystal semiconductor island comprises a pair of impurity range and is parallel to each other between this is to impurity range and extends, wherein each described first and second part all comprises channel formation region;
Be formed at the gate insulating film on first and second parts, wherein, gate insulating film contacts the part on the surface of at least a portion of at least a portion of end face of each described first and second part on described crystal semiconductor island and side and second dielectric film between the substrate and first dielectric film between first and second parts;
Be formed at the gate electrode on first and second parts, and gate insulating film is inserted in wherein, wherein said gate electrode is formed on the end face and side of each described first and second part on described crystal semiconductor island, and described gate insulating film is inserted in wherein,
This of wherein said crystal semiconductor island forms on described first dielectric film impurity range, but is not formed in the opening of described first dielectric film, and
First and second parts on wherein said crystal semiconductor island form at the opening part of described first dielectric film.
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