CN101085438B - Coating device and coating method - Google Patents

Abstract

The invention provides a coating device and coating method, comprising: nozzle for ejecting the said coating liquor from the front end; rotating table for loading basal plate thereon; nozzle travel machanism for making the nozzle reciproate at the direction of crossing over the surface of the table, in the space of the rotating table; box at least enclosing rotating table; a first supply port on one side of the box for supplying the preset gas to the inner space of the said box; a first discharge port on the other side of the box to discharge the gas in the inner space of the box; cycle machanism for at least make the gas discharged from the first fischarge port circulate, and then supply the gas to the inner space of the box; a second supply port on one side of the box for supplying the gas from the cycle machanism to the inner space of the said box.

Description

Apparatus for coating and coating process

Technical field

The present invention relates to a kind of apparatus for coating and coating process, relate in particular to a kind of from nozzle to being loaded into that substrate on the objective table sprays coating fluid such as organic EL Material and the apparatus for coating and the coating process that are coated with.

Background technology

All the time, all the apparatus for coating of coating fluid being coated on the processed objects such as substrate is being carried out various exploitations.For example, making organic EL (Electro Luminescence: electroluminescence) in the device of display unit, adopt such apparatus for coating: on the interarea that is loaded on the substrates such as glass substrate on the objective table, be coated with hole transporting material or organic EL Material with given pattern form by nozzle.In this apparatus for coating, spray coating fluid (organic EL Material or hole transporting material) with given pressure from nozzle.Particularly, in the supply sources such as groove that apparatus for coating had, store coating fluid, utilize pump that the coating fluid of supplying with from supply source is carried out supercharging, and remove after the foreign matter, spray from nozzle with being set at filter in the pipe arrangement.

Usually, well-known, the quality of organic EL Material can worsen because of oxidation.Therefore, to the base plate coating organic EL Material time, must prevent the oxidation of this organic EL Material.For example, at TOHKEMY 2004-164873 number bulletin (below be designated as patent documentation 1) technology of making in order to prevent this organic EL Material quality from worsening is disclosed in the management oxygen concentration.Patent documentation 1 disclosed manufacturing installation, assortment apparatus for coating, drying device, thermal-curable system, substrate layer pressure device etc. in chamber (chamber), making in this chamber becomes nitrogen environment manufacturing.

But in above-mentioned patent documentation 1 disclosed manufacturing installation, because multiple arrangement is arranged in the chamber, the volume in the chamber becomes greatly.Just, become nitrogen environment in the chamber, must supply with a large amount of nitrogen in order to make.In addition, remain on desirable oxygen concentration in order to supply with nitrogen to above-mentioned chamber, need be provided with a plurality of air-breathing/exhaust pump or gate, thereby device itself can complicate.Therefore, exist manufacturing cost and installation cost to become big problem.In addition, when making large space become nitrogen environment, exist because of the people enters this space to produce dangerous key element such as suffocate, thereby also produce the problem of secure context.

Summary of the invention

Therefore, the object of the present invention is to provide and prevent the coating fluid oxidation and improve apparatus for coating and coating process unit efficiency, that substrate is coated with.

To achieve these goals, the present invention has the feature of the following stated.

First scheme is that coating fluid is coated on apparatus for coating on the substrate.Apparatus for coating has nozzle, objective table, nozzle moving mechanism, casing, first supply port, first exhaust outlet, cycling mechanism and second supply port.Nozzle sprays described coating fluid from its leading section.Objective table, mounting substrate is gone up on the surface thereon.Nozzle moving mechanism, the space on objective table moves back and forth nozzle on the direction of traversing this loading table top.Casing surrounds objective table at least and is provided with.First supply port is arranged at a side of casing, supplies with given gas to the inner space of this casing.First exhaust outlet, it is arranged at the opposite side of casing, discharges the gas in the inner space of this casing.Cycling mechanism makes the gas circulation of discharging from first exhaust outlet at least, and supplies with to box house.Second supply port is arranged at a side of casing, supplies with from the cycling mechanism gas supplied to the inner space of this casing.

Alternative plan is that in above-mentioned first scheme, cycling mechanism will circulate from the gas former state that first exhaust outlet is discharged, and supplies with to box house from second supply port.

Third party's case is that in above-mentioned first scheme, cycling mechanism comprises oxygen separation mechanism.Oxygen separation mechanism makes oxygen separation remove and it is supplied with to box house from second supply port from gas, and wherein this gas is the gas of discharging from first exhaust outlet.

Cubic case is that in above-mentioned first scheme, casing comprises first casing and second casing.First casing, it surrounds objective table and is provided with, and separates the space that space that nozzle moving mechanism disposes and this objective table are disposed, and the surface is formed with at least a portion that makes nozzle and peristome of moving back and forth side-prominent from nozzle moving mechanism thereon.Second casing, it surrounds nozzle moving mechanism and is arranged on the top of first casing.First supply port is arranged at a side of first casing.Second supply port is arranged at a side of first casing.First exhaust outlet is arranged at the opposite side of first casing.Apparatus for coating also has second exhaust outlet.Second exhaust outlet is arranged on second casing, and the gas in the inner space of this second casing is discharged to the outside.

The 5th scheme is that in above-mentioned cubic case, apparatus for coating also has the 3rd supply port.The 3rd supply port is arranged on second casing, supplies with given gas to the inner space of this second casing.

The 6th scheme is that in above-mentioned cubic case, cycling mechanism makes from the gas circulation of first exhaust outlet and the discharge of second exhaust outlet, and supplies to first box house from second supply port.

The 7th scheme is that in above-mentioned the 5th scheme, apparatus for coating also has the 4th supply port.The 4th supply port is arranged on second casing, supplies with from the cycling mechanism gas supplied to the inner space of this second casing.

The all directions case is that in above-mentioned the 7th scheme, cycling mechanism makes from the gas circulation of first exhaust outlet and the discharge of second exhaust outlet, and supplies with to first casing and second box house respectively from second supply port and the 4th supply port.

The 9th scheme is that in above-mentioned first scheme, casing comprises first casing and second casing.First casing, it surrounds objective table and is provided with, and separates the space that space that nozzle moving mechanism disposes and this objective table are disposed, and the surface is formed with at least a portion of nozzle and peristome of moving back and forth side-prominent from nozzle moving mechanism thereon.Second casing, it surrounds nozzle moving mechanism and is arranged on the top of first casing.First supply port is arranged at a side of first casing.Second supply port is arranged at a side of second casing.First exhaust outlet is arranged at the opposite side of first casing.Apparatus for coating also has second exhaust outlet.Second exhaust outlet is arranged on second casing, and the gas in the inner space of this second casing is discharged to the outside.

The tenth scheme is that in above-mentioned first scheme, this device also has the oxygen concentration checkout gear.The oxygen concentration checkout gear detects the oxygen concentration in the interior given space of casing.During the oxygen concentration of cycling mechanism below the oxygen concentration checkout gear detects given oxygen concentration, make the gas circulation of discharging from first exhaust outlet and supply with to box house.

The 11 scheme is a kind of coating process, will be applied on the substrate that the objective table upper surface loads from the coating fluid of nozzle ejection, and wherein, this nozzle is supported and moves back and forth by nozzle moving mechanism on the direction on the top of traversing this loading table top.Till given space metathesis in the casing that will surround objective table at least is given gaseous environment, provides given gas from a side of this casing, and discharge gas at least from the opposite side of this casing.When given space is replaced into given gaseous environment, supply with given gas in a side from casing, and make the gas circulation of discharging from the opposite side of this casing, make the gas of circulation carry out once more on substrate, being coated with coating fluid under the condition of supplying from other positions of a side of casing.

The 12 scheme is, in above-mentioned the 11 scheme, after the oxygen concentration in given space arrives given oxygen concentration and when being higher than this given oxygen concentration, stop to make the action of gas circulation, supplying with given gas from a side of casing and discharging under the state of gas, on substrate, be coated with coating fluid from the opposite side of casing.

The 13 scheme is that in above-mentioned the 11 scheme, casing is divided into space that surrounds objective table and the space that surrounds nozzle moving mechanism.Make the gas circulation of discharging from the opposite side of casing and once more gas supplied supply with to the space that surrounds objective table.

The tenth cubic case is, in above-mentioned the 13 scheme, make the gas circulation of discharging from the opposite side of casing and once more gas supplied supply to the space that surrounds nozzle moving mechanism.

The 15 scheme is a kind of coating process, will be applied on the substrate that the objective table upper surface loads from the coating fluid of nozzle ejection, and wherein, this nozzle is supported and moves back and forth by nozzle moving mechanism on the direction on the top of traversing this loading table top.Till given space metathesis in the casing that will surround objective table at least is given gaseous environment, provide given gas from a side of this casing, and make the gas circulation of discharging from the opposite side of this casing, the gas of circulation is supplied with once more from other positions of this casing one side.When given space is replaced into given gaseous environment, supply with given gas in a side from this casing, and make the gas circulation of discharging from the opposite side of this casing, make the gas of circulation carry out once more on substrate, being coated with coating fluid under the condition of supplying from other positions of a side of casing.

The 16 scheme is that in above-mentioned the 15 scheme, casing is divided into space that surrounds objective table and the space that surrounds nozzle moving mechanism.Make the gas circulation of discharging from the opposite side of casing and once more gas supplied supply with to the space that surrounds nozzle moving mechanism.

The 17 scheme is, in the above-mentioned the 11 or the 15 scheme, adjust respectively to box house supply with given gas flow, discharge the flow of gas and make the gas circulation of box house and the flow supplied with once more from box house, be higher than atmospheric level and the internal pressure of casing maintained.

The tenth from all directions case be in the above-mentioned the 11 or the 15 scheme, by detecting the oxygen density value in given space, and to judge given space metathesis has been become given gaseous environment.

The 19 scheme is, in the above-mentioned the 11 or the 15 scheme, by measuring time from given gas to box house that supply with, and judges given space metathesis has been become given gaseous environment.

According to above-mentioned first scheme, by supplying with given gas (for example inert gas such as nitrogen) partly, and be coated with coating fluid under the given gaseous environment that generates at the gas given, thereby can prevent oxidation that is coated with the coating fluid in the processing etc. by this.In addition, be replaced into the gas that given environment is discharged owing to utilizing once more, so can suppress the consumption of institute's gas supplied.

According to above-mentioned alternative plan, supply with once more by the gas former state that will be replaced into given gaseous environment, thereby can constitute cycling mechanism by the equipment of minimums such as pump.

According to above-mentioned third party's case since circulation and once more the oxygen concentration of gas supplied further reduce, institute is so that the interior low oxygen concentration ambient stable of casing.

According to above-mentioned cubic case, first box house that is provided with the objective table of mounting substrate more effectively can be replaced into given gaseous environment.

According to above-mentioned the 5th scheme, also be replaced into given gaseous environment by nozzle being moved back and forth stir the second inner box house, therefore can prevent to become unstable because of this stirring makes the environment of first box house.

According to above-mentioned the 6th scheme, owing to also utilize and supply with once more the gas of discharging from second casing once more when cycling mechanism move, therefore circulation and the supply quantitative change of utilization is many once more can further suppress the consumption of new gas supplied.

According to above-mentioned the 7th scheme, by also supplying with, thereby can suppress the consumption of new gas supplied from cycling mechanism to the second casing gas supplied.

According to above-mentioned all directions case, when moving, cycling mechanism also utilizes the gas of discharging once more from second casing, and also supply with to the second casing gas supplied, thereby circulation and the supply quantitative change that utilizes once more is many can further suppress the consumption of new gas supplied from cycling mechanism.

According to above-mentioned the 9th scheme, because second box house is not the space that directly the first box house environment that is coated with processing is influenced, so by supply with the gas of cycling mechanism circulation to second box house, thereby can always supply with this gas, can suppress the consumption of new gas supplied.

According to above-mentioned the tenth scheme, during oxygen concentration below box house does not reach given oxygen concentration, do not carry out from the supply of cycling mechanism and preferentially supply with given gas.Therefore, when utilizing given gas that box house is replaced into the low oxygen concentration environment, can shorten the following time of given oxygen concentration that arrives.

According to above-mentioned the 11 scheme, by supplying with given gas (for example inert gas such as nitrogen) partly, and be coated with coating fluid under the given gaseous environment that generates at the gas given, thereby can prevent oxidation that is coated with the coating fluid in the processing etc. by this.In addition, owing to when coating is handled, utilize the gas that is replaced into given environment once more, so can suppress the consumption of institute's gas supplied.

According to above-mentioned the 12 scheme, can select suitable supply method according to the variation of oxygen concentration.

According to above-mentioned the 13 scheme, can be given gaseous environment more effectively with the space metathesis that is provided with the objective table of mounting substrate.

According to the above-mentioned the tenth cubic case, also be replaced into given gaseous environment by nozzle being moved back and forth stir volume inside, therefore can prevent to become unstable because of this stirring makes the given gaseous environment in the space that is provided with objective table.

According to above-mentioned the 15 scheme, by supplying with given gas (for example inert gas such as nitrogen) partly, and be coated with coating fluid under the given gaseous environment that generates at the gas given, thereby can prevent oxidation that is coated with the coating fluid in the processing etc. by this.In addition, be replaced into the gas of given gaseous environment owing to always utilize once more, so can suppress the consumption of institute's gas supplied.

According to above-mentioned the 16 scheme, be not the space that directly the given gaseous environment in the space that is coated with processing is influenced owing to surround the space of nozzle moving mechanism, so the gas by will circulation supplies to this space and can always supply with.

According to above-mentioned the 17 scheme, maintain by internal pressure and to be higher than atmospheric level, thereby, also can in stable given gaseous environment, carry out the coating of coating fluid even casing is not the outside relatively structure of sealing fully with casing.

According to the above-mentioned the 18 and the 19 scheme,, can the environment of box house be managed by directly detecting oxygen density value or measuring service time.

With reference to accompanying drawing, further clear and definite these and other the purpose of the present invention of meeting, feature, scheme, effect from following detailed description.

Description of drawings

Fig. 1 is the vertical view and the front view of schematic configuration of major part of the apparatus for coating 1 of expression one embodiment of the present invention,

Fig. 2 is the controlled function of apparatus for coating 1 of presentation graphs 1 and the block diagram of supply unit,

Fig. 3 is the vertical view that local environment that expression is set at the apparatus for coating 1 of Fig. 1 generates the schematic configuration of mechanism,

Fig. 4 is the sectional view that local environment that expression is set at the apparatus for coating 1 of Fig. 1 generates the schematic configuration of mechanism,

Fig. 5 is the stereogram of the outward appearance of expression the 3rd casing (box) 63,

Fig. 6 is the profile of the structure of expression nitrogen and recyclegas input port,

Fig. 7 is the stereogram of the structure of expression diffuser plate 731,

Fig. 8 is used for the curve chart of explanation in the oxygen concentration management value of point (point) C,

Fig. 9 is illustrated in the block diagram of supplying with the flow process of nitrogen in the local environment generating structure,

Figure 10 is the schematic diagram that is illustrated in the flow of nitrogen gas stream (flow) in the apparatus for coating 1 of first execution mode of the present invention,

Figure 11 is the preceding half section flow chart that the apparatus for coating 1 of expression first execution mode of the present invention is coated with the action when handling,

Figure 12 is the flow chart that the apparatus for coating 1 of expression first execution mode of the present invention is coated with the second half section of the action when handling,

To be expression supply with nitrogen and recyclegas, supply with the schematic diagram of first variation of the flow of nitrogen gas stream of nitrogen to sliding space to cavity space Figure 13,

Figure 14 is the schematic diagram of second variation of the expression flow of nitrogen gas stream of supplying with nitrogen and recyclegas to cavity space and sliding space respectively,

Figure 15 is the schematic diagram of the 3rd variation of flow of nitrogen gas stream that the gas of discharging from cavity space, sliding space and cabinet space is utilized again,

Figure 16 is the schematic diagram that is illustrated in the flow of nitrogen gas stream in the apparatus for coating 1 of second execution mode of the present invention,

Figure 17 is the flow chart that the apparatus for coating 1 of expression second execution mode of the present invention is coated with the action when handling.

Embodiment

Before explanation each concrete execution mode of the present invention,, the summary of apparatus for coating of the present invention is described with reference to accompanying drawing.In order to specifically describe,, carry out the following description this apparatus for coating is used to use organic EL Material or hole transporting material etc. to be example as apparatus for coating coating fluid, that make organic EL display.This apparatus for coating is on the glass substrate that is loaded on the objective table organic EL Material or hole transporting material etc. to be coated with into given pattern form, makes the apparatus for coating of organic EL display.Fig. 1 is the vertical view and the front view of the major part schematic configuration of expression apparatus for coating 1.In addition, as mentioned above, apparatus for coating 1 uses multiple coating fluids such as organic EL Material or hole transporting material, as their representative, is that coating fluid describes with the organic EL Material still.

Among Fig. 1, apparatus for coating 1 mainly has substrate loading device 2 and organic EL coating mechanism 5.Organic EL coating mechanism 5 has nozzle moving mechanism portion 51, nozzle unit 50 and meets 53L of liquid portion and 53R.Nozzle moving mechanism portion 51 makes nozzle unit 50 move in the diagram X-direction along ways 511 being provided with ways 511 along extending on the diagram X-direction.Nozzle unit 50 keeps under the state that the nozzle 52a～52c of the organic EL Material of any color that will spray the red, green and blue look is set up in parallel.Supply with the organic EL Material of any color the red, green and blue look from supply unit (with reference to Fig. 2) to each nozzle 52a～52c respectively.Like this, typically, though from the organic EL Material of three nozzle 52a～52c ejection same color, concrete in order to make explanation, use sprays the example of red organic EL Material from three nozzle 52a～52c.In addition, apparatus for coating 1, around it and inside is separated by first～the 3rd casing, 61～63 grades, and its detailed content is narrated in the back.

Substrate loading device 2 has objective table 21, rotating part 22, parallel travelling table 23, accepts guide part 24 and ways 25.The substrate P that objective table 21 will become glass substrate of body to be coated etc. is loaded in this objective table upper surface.Is supporting by rotating part 22 bottom of objective table 21, by the rotational action of rotating part 22, objective table 21 is rotated in diagram θ direction.In addition, be provided with adsorbing mechanism, the handing-over pin mechanism of heating arrangements, substrate P in the inside of objective table 21, this heating arrangements is used on the loading table top substrate P that has been coated with organic EL Material being preheated processing.

In the mode of the below by organic EL coating mechanism 5, ways 25 along the diagram Y direction vertical with above-mentioned X-direction extend be provided with also fixing.The lower surface of parallel travelling table 23 be set with ways 25 butts and on ways 25, slide accept guide part 24.In addition, at the upper surface of parallel travelling table 23, be set with rotating part 22.Thus,, thereby can move, also can move objective table 21 by rotating part 22 supportings in diagram Y direction along ways 25 as the actuating force of parallel travelling table 23 acceptance from linear motor (not shown).

On objective table 21, load and the absorption substrate P via the handing-over pin mechanism, parallel travelling table 23 move to organic EL coating mechanism 5 below the time, this substrate P is in the position of accepting the coating of red organic EL Material from nozzle 52a～52c.And, control part (with reference to Fig. 2), so that the mode that nozzle unit 50 reciprocatingly moves in X-direction is controlled nozzle moving mechanism portion 51, so that moving the mode that only moves given spacing at the Y direction straight line at every turn, objective table 21 controls parallel travelling table 23, from the organic EL Material of nozzle 52a～52c ejection given flow.In addition, in the X-direction of nozzle 52a～52c ejection position, the space, both sides that the substrate P on being loaded into objective table 21 breaks away from, be set with respectively receive depart from organic EL Material that substrate P is ejected meet 53L of liquid portion and 53R.Nozzle moving mechanism portion 51 makes nozzle unit 50 at the upper space that meets liquid portion 53 from the lateral edges outside that is configured in substrate P, and traverses substrate P and be configured between the upper space that meets liquid portion 53 in the outside, opposite side edge of substrate P and reciprocatingly move.In addition, parallel travelling table 23 when nozzle unit 50 is configured in the upper space that meets liquid portion 53, makes objective table 21 move back and forth the only mobile given spacing of the vertical assigned direction of direction (diagram Y direction) with nozzle.By in this nozzle moving mechanism portion 51 and parallel travelling table 23 actions, spray organic EL Material from nozzle 52a～52c with the fluid column state, thereby red organic EL Material is arranged in each groove of the striated that is formed on the substrate P, just forms striped arrangement on substrate P.

Then, with reference to Fig. 2, describe at the schematic configuration of controlled function in the apparatus for coating 1 and supply unit.In addition, Fig. 2 is the controlled function of expression apparatus for coating 1 and the block diagram of supply unit.

Among Fig. 2, apparatus for coating 1 also has control part 3, the first supply unit 54a, the second supply unit 54b and the 3rd supply unit 54c except that above-mentioned structural portion.First～the 3rd supply unit 54a～54c supplies with red organic EL Material to nozzle 52a～52c respectively via pipe arrangement.In addition, each pipe arrangement employing from supply source 541a～541c to nozzle 52a～52c is the pipe component of material with PE (polyethylene), PP (polypropylene), Teflon (registered trade mark, i.e. polytetrafluoroethylene) etc.

The first supply unit 54a have organic EL Material supply source 541a, be used for from supply source 541a take out organic EL Material pump 542a, detect the flowmeter 543a of the flow of organic EL Material.In addition, the second supply unit 54b have organic EL Material supply source 541b, be used for from supply source 541b take out organic EL Material pump 542b, detect the flowmeter 543b of the flow of organic EL Material.The 3rd supply unit 54c have organic EL Material supply source 541c, be used for from supply source 541c take out organic EL Material pump 542c, detect the flowmeter 543c of the flow of organic EL Material.And, each action of control part 3 controls first～the 3rd supply unit 54a～54c, rotating part 22, parallel travelling table 23 and nozzle moving mechanism portion 51.

Nozzle 52a has the filter part 521a of the foreign matter that is used for removing the organic EL Material of supplying with from the first supply unit 54a.Nozzle 52b has the filter part 521b of the foreign matter that is used for removing the organic EL Material of supplying with from the second supply unit 54b.Nozzle 52c has the filter part 521c of the foreign matter that is used for removing the organic EL Material of supplying with from the 3rd supply unit 54c.In addition, because nozzle 52a～52c is respectively an identical construction, under the situation of general designation explanation, puts on Reference numeral " 52 " and describe.

At this, on the surface of the substrate P of the coating of accepting red organic EL Material, with the mode that is set up in parallel be formed with many should be coated with organic EL Material, corresponding to the groove of the striated of given pattern form.As organic EL Material, can use the EL material of the organic property that for example has viscosity, this viscosity refers to and can extend such liquidity in the groove on substrate P, specifically, can use the organic EL Material of the macromolecule type of this color according to color.Nozzle unit 50, rotates around this bolster, thereby can adjust the coating intervals by the control of control part 3 being supported around the mode that given bolster freely rotates.

Control part 3 is based on position that is loaded into the substrate P on the objective table 21 or direction, so that be formed at the direction of the groove on the substrate P is the angle that the mode of above-mentioned X-direction is adjusted rotating part 22, calculates the coating starting point, promptly in coating starting position that an end side that is formed at the groove on the substrate P begins to be coated with.In addition, above-mentioned coating starting position is a upper space that meets liquid portion 53.And control part 3 drives parallel travelling table 23 and nozzle moving mechanism portion 51 as mentioned above like that.

In above-mentioned coating starting position, control part 3 each pump of indication 542a～542c begin to spray organic EL Material from each nozzle 52a～52c.At this moment, control part 3 is controlled its coating weight according to the translational speed of nozzle 52a～52c, and feed back and control from the flow information of flowmeter 543a～543c, so that the coating weight of the organic EL Material of each point of the groove of striated becomes evenly, with fluid column state ejection organic EL Material.And in order to inject organic EL Material in the groove on substrate P, control part 3 control nozzle units 50 move along ways 511, make organic EL Material be injected in this groove along the groove on the substrate P.According to this action, with the fluid column state from the organic EL Material of the redness of each nozzle 52a～52c ejection is injected into separately groove simultaneously.

Control part 3, when another that crosses the outside that is positioned at the end side that is fixedly installed on groove on the substrate P when nozzle unit 50 connects in the liquid portion 53, maintenance continues from nozzle 52a～52c under the state of ejection organic EL Material, stops to move of the nozzle unit 50 that undertaken by nozzle moving mechanism portion 51.By this time moving, finish operation to 3 row grooves coating organic EL Material.Specifically, owing to spray the organic EL Material of color of the same race, so serve as that the coating object just can be coated with organic EL Materials to the grooves that amount to 3 row with the groove of 1 row from each nozzle 52a～52c.

Then, control part 3, the spacing with parallel travelling table 23 is given set a distance (for example amount of 9 row grooves) along the feeding of Y-axis positive direction then, is coated with organic EL Material to the groove that becomes the coating object.And, control part 3, the upper space that meets liquid portion 53 from opposite side, nozzle unit 50 is crossed round about be positioned on the substrate P side connect in the liquid portion 53 time, maintenance continues the state of ejection organic EL Material from nozzle 52a～52c, stops to move of the nozzle unit 50 that brought by nozzle moving mechanism portion 51.By this secondary moving, finish to the next operation of 3 row grooves coating organic EL Material.By repeating such action, it is in the groove of coating object that red organic EL Material is injected into the redness.

Next, with reference to Fig. 3～Fig. 9, generate mechanism at the local environment that is set at apparatus for coating 1 and describe.Fig. 3 is the vertical view that local environment that expression is set at apparatus for coating 1 generates the schematic configuration of mechanism.Fig. 4 is the sectional view that local environment that expression is set at apparatus for coating 1 generates the schematic configuration of mechanism.Fig. 5 is the stereogram of the outward appearance of expression the 3rd casing 63.Fig. 6 is the cutaway view of the structure of expression nitrogen and recyclegas input port.Fig. 7 is the stereogram of the structure of expression diffuser plate 731.Fig. 8 is the curve chart that is used to illustrate in the oxygen concentration management value of a C.Fig. 9 is illustrated in the block diagram of supplying with the flow process of nitrogen in the local environment generating structure.

In Fig. 3～Fig. 5, apparatus for coating 1 is covered up from the outside respectively by first casing 61, second casing 62 and the 3rd casing 63.First casing 61 is set up in the mode of surrounding substrate loading device 2 and covering from the outside to space that the diagram Y direction moves back and forth (below be designated as cavity space).In addition, first casing 61, except nozzle 52 outstanding and move back and forth the peristome S1 of usefulness to cavity space, to separate cavity space and to be provided with the mode between the space of organic EL coating mechanism 5 and to be set up.The 3rd casing 63 comprises the space that is provided with organic EL coating mechanism 5, surrounds nozzle unit 50 grades and is set up space that the diagram X-direction moves back and forth (below be designated as slip (slider) space).In addition, also to be formed with nozzle 52 outstanding and move back and forth the peristome S1 (with reference to Fig. 5) of usefulness to cavity space from sliding space for the 3rd casing 63.In addition, be formed with the peristome S2 of pipe arrangement (not shown) by usefulness at the upper surface of the 3rd casing 63, this pipe arrangement is used for from first～the 3rd supply unit 54a～54c organic EL Material being supplied to nozzle 52a～52c respectively.Be provided with at nozzle unit 50 under the situation of hydrostatic bearing, be used for also connecting by peristome S2 to the pipe arrangement of this hydrostatic bearing supply gas.Second casing 62 surrounds the upper space of first casing 61 and is provided with.Be provided with organic EL coating mechanism 5 and the 3rd casing 63 in the inside of second casing 62, it is outstanding and move back and forth the peristome S1 of usefulness to cavity space from sliding space also to be formed with nozzle 52 at second casing 62.In addition, in the space that will surround by second casing 62, be designated as casing (box) space except the space of sliding space.Like this, apparatus for coating 1 is spaced by first～the 3rd casing 61～63 and is arranged to cavity space, sliding space and cabinet space respectively.In addition, first～the 3rd casing 61～63 all is formed with upper surface, still, in Fig. 3, for understanding and inner relation easily, and omits upper surface and lower surface, only represents sidewall with oblique line or cross spider zone.

At first～the 3rd casing 61～63, be connected with inert gases (the following nitrogen that only is designated as) such as being used for supplying with nitrogen and the supply pipe 71 of the mobile gas that circulates by cycling mechanism 9 described later (below be designated as recyclegas), be used to discharge the blast pipe 72 of the gas of its inner space to its inner space.In the example of Fig. 4, the wall of the Y-axis negative direction side of the supply pipe 71 and first casing 61 (below, the wall of Y-axis negative direction side is designated as the front) and the front of the 3rd casing 63 are connected.In addition, in the example of Fig. 4, a plurality of supply pipe 71a～71c are connected with the wall of first casing 61, and supply pipe 71d is connected with the wall of the 3rd casing 63.In addition, in Fig. 3, omit the diagram of supply pipe 71d.

In addition, the wall of the Y-axis positive direction side of the blast pipe 72 and first casing 61 (below, the wall of Y positive direction side is designated as the back side), the back side of second casing 62 and the back side of the 3rd casing 63 are connected.In the example of Fig. 4, a plurality of blast pipe 72a and 72b are connected with the wall of first casing 61, and blast pipe 72d is connected with the wall of second casing 62, and blast pipe 72c is connected with the wall of the 3rd casing 63.In addition, in Fig. 3, omit the diagram of blast pipe 72c.

As shown in Figure 4, under the situation that has connected supply pipe 71 and blast pipe 72, nitrogen or the recyclegas supplied with from supply pipe 71a～71c supply to cavity space, and flow out from the blast pipe 72a and the 72b at its back side.In addition, from nitrogen or recyclegas that supply pipe 71a～71c is supplied with, S1 flow into sliding space by peristome, and converges with nitrogen and the recyclegas supplied with from supply pipe 71d.Then, nitrogen that converges or recyclegas are mobile like this: flow out from the blast pipe 72c at the sliding space back side, perhaps flow into cabinet space by peristome S2 after, flow out from blast pipe 72d.In order to make gas stream in this cabinet space smooth and easy and realize the environment displacement of box house at short notice, in the present embodiment, with casing one side (right side shown in Figure 4) as supply side, with the opposite side (in left side shown in Figure 4) of casing as discharging side.

In addition, be provided with the input port of moving into and taking out of 611 that is used to carry out substrate P at first casing 61.Input port 611 is by being that the center is rotated the gate of (the diagram direction of arrow) and can be opened and closed with the rotating shaft.Substrate P, is moved in the cavity space by carrying manipulator (not shown), and is loaded on the objective table 21 by under the opened state in input port 611.In addition, when utilizing apparatus for coating 1 to be coated with to handle, close above-mentioned gate and cover cavity space from the outside.

Connect near first casing 61 and supply pipe 71a and the 71b and be connected the 3rd casing 63 and supply pipe 71d near, be provided with diffusion part 73, particularly, diffusion part 73 is set at from supply pipe 71a, 71b and 71d and flow near the inlet of inner space this inner space side.As shown in Figure 6 and Figure 7, diffusion part 73 comprises diffuser plate 731 and cowling panel (punching matel) 732.Diffuser plate 731 is to be fixedly installed on to hinder nitrogen or recyclegas from the tabular component that supply pipe 71a, 71b and 71d flow into the position of above-mentioned inner space, is formed with given gap around it.The nitrogen or the recyclegas that flow into above-mentioned inner space from supply pipe 71a, 71b and 71d are hindered because of diffuser plate 731, can not be fed directly to above-mentioned inner space, and the diffuser plate 731 that can alter course around flow.Cowling panel 732 is tabular components that punching processing has a plurality of holes, relatively is fixedly installed on above-mentioned inner space side with diffuser plate 731.In addition, cowling panel 732 is configured on the flow path of flowing nitrogen or recyclegas around the diffuser plate 731.Just, nitrogen or the recyclegas from supply pipe 71a, 71b and 71d supply must flow in the above-mentioned inner space by the hole that forms at cowling panel 732.Therefore, by diffusion part 73, can make nitrogen or the recyclegas supplied with from supply pipe 71a, 71b and 71d spread apart and supply in first～the 3rd casing 61～63.

In addition, near input port 611, be connected with supply pipe 71c.Usually, near input port 611, because of the switching of the moving into of substrate P/when taking out of, extraneous air is invaded easily, causes oxygen concentration to uprise easily, but by supplying with nitrogen or recyclegas to such place, and can make the oxygen diffusion of intrusion.In addition, near the stream that flow into from supply pipe 71c the inlet of inner space is bent, and diffusion part is not set near this inlet.

Connecting portion at blast pipe 72 and first～the 3rd casing 61～63 is provided with cowling panel 733.This cowling panel 733 is fixedly installed on the inner space side of blast pipe 72 and is configured on the gas flow path that blast pipe 72 flows.Just, the gas of discharging to blast pipe 72 must be by being discharged from cowling panel 733 formed holes.Like this, by near configuration cowling panel 733 outlet, and can prevent that gas is concentrated in the place of exhaust, thereby discharge the gas of entire inner space equably.

The gas of in first～the 3rd casing 61～63, supplying with nitrogen or recyclegas and discharging in first～the 3rd casing 61～63 from supply pipe 71 from blast pipe 72, thus first～the 3rd casing, 61～63 inside become nitrogen environment, inner oxygen concentration decline.Thus, apparatus for coating 1 can prevent the oxidation when substrate P coating organic EL Material.Here, in order to prevent the oxidation of organic EL Material, oxygen concentration in the whole cavity space is reduced get final product, but the space of the most necessary reduction oxygen concentration is successively to the space (at some C shown in Figure 4) of Y-axis positive direction side conveying from the space of nozzle 52 ejection organic EL Materials and the substrate P face after the coating.For example, the oxygen concentration upper limit when being coated on organic EL Material on the substrate P is during as oxygen concentration management value (for example 10ppm), and the oxygen concentration at a C must satisfy oxygen concentration management value at least.In addition, in first casing 61, be provided with the oxygen concentration test section 88 of detection in the oxygen concentration of above-mentioned some C.The oxygen concentration testing result that oxygen concentration test section 88 will be put C is presented on the not shown display unit and to user report, perhaps this testing result is outputed to the control part (for example, control part 3 (with reference to Fig. 2)) of apparatus for coating.

Satisfy under the state of oxygen concentration management value being coated with processing for oxygen concentration, make after the oxygen concentration of a C is reduced to below the oxygen concentration management value, must begin coating and handle at a C.Therefore, move into after the substrate P oxygen concentration at a C by shortening and be reduced to time (" time of advent " shown in Figure 8) below the oxygen concentration management value, and apparatus for coating 1 is more effectively turned round.In addition, in coating is handled, because must prevent to surpass oxygen concentration management value (" coating processing time " shown in Figure 8), so in coating is handled, also proceed from the supply of the nitrogen of supply pipe 71 or recyclegas and from the discharge of the gas of blast pipe 72 in the oxygen concentration of a C.Here, move back and forth in X-direction, thereby stirred gas in the sliding space and near the gas the peristome S1 by making nozzle unit 50 and nozzle 52.Therefore, for example remaining under the situation of oxygen in sliding space, can flow to a C because of stirring makes this oxygen, thereby the oxygen concentration of a C is risen.Just, in the management of the oxygen concentration of a C, need to consider coating handle before and the fluid balance of coating in handling.Among the described in the back embodiment,, do not allow perhaps effluent air flows to above-mentioned some C side in the slide block space, thereby prevented in coating is handled rising in the oxygen concentration of above-mentioned some C by will being replaced as low-oxygen environment in the sliding space He in the cabinet space yet.

In addition, stable in order to make in the oxygen concentration of a C, the pressure in first～the 3rd casing 61～63 is also very important.For example, first～the 3rd casing 61～63 relatively the outside be not under the situation of complete closed structure, when the pressure in first～the 3rd casing 61～63 was maintained at less than atmospheric pressure (just being lower than outside pressure), outside gas flowed in first～the 3rd casing 61～63.Therefore, in the present embodiment, before adjusting coating and handling and the fluid balance of coating in handling, so that the pressure in first～the 3rd casing 61～63 can be maintained more than the atmospheric pressure (just identical or be higher than outside pressure) with the outside.In addition, be provided with the pressure detecting portion 89 that detects the pressure in first casing 61.Pressure detecting portion 89 is presented at the force value in first casing 61 on the not shown display unit and to the user report of apparatus for coating, perhaps this force value is outputed to the control part (for example, control part 3 (with reference to Fig. 2)) of apparatus for coating.Therefore, though first～the 3rd casing 61～63 relatively the outside be not complete closed structure, also can the oxygen concentration at a C be managed.Like this, in first～the 3rd casing 61～63, the local environment of management becomes possibility, and the management that inner oxygen concentration is descended becomes possibility.

In Fig. 9, local environment generates mechanism except above-mentioned structural portion, also have the flow adjustment part 85 of nitrogen cylinder 81, filter 83, pressure adjustment part 84, supply side, flow adjustment part 86, attraction portion 87 and the cycling mechanism 9 of exhaust side, these mechanisms link together with pipe arrangement etc. mutually.Nitrogen cylinder 81, filter 83, pressure adjustment part 84 and flow adjustment part 85 are equivalent to supply with from supply pipe 71 feed system of nitrogen.On the other hand, flow adjustment part 86 and attraction portion 87 are equivalent to discharge from blast pipe 72 gas extraction system of gas.In addition, cycling mechanism 9 is equivalent to from blast pipe 72 first～the 3rd casing, 61～63 gas inside be discharged and turned back to from a side (rear side) circulatory system of the opposite side (front face side) of first～the 3rd casing 61～63.In addition, the mechanism that constitutes feed system and gas extraction system can be built in the apparatus for coating 1, also can be used as the external device (ED) setting of apparatus for coating 1.Under the situation that the external device (ED) as apparatus for coating 1 is provided with, also can use and be set at the equipment (for example, the nitrogen feedway or the suction device of factory) that the position is set in advance.

In the storage of the inside of nitrogen cylinder 81 liquid nitrogen etc. is arranged.From nitrogen cylinder 81 nitrogen is taken out with gaseous state, flow as the power supply of factory and to filter 83.Filter 83 is removed the foreign matter in the flowing nitrogen and is transported to pressure adjustment part 84 and flow adjustment part 85.Then, adjust the nitrogen pressure of supplying with to apparatus for coating 1, and adjust after the nitrogen flow that apparatus for coating 1 is supplied with, supply with nitrogen to supply pipe 71 by flow adjustment part 85 by pressure adjustment part 84.On the other hand, attraction portion 87 attracts gas from blast pipe 72, and the gas in first～the 3rd casing 61～63 is discharged to the outside.Then, attract gases and be discharged to outside flow from blast pipe 72 by 86 adjustment of flow adjustment part.Throttle part or the set point etc. of user by the stream that is adjusted at pressure adjustment part 84, flow adjustment part 85 and flow adjustment part 86 and is provided with, thus the fluid balance of above-mentioned apparatus for coating 1 can be adjusted.

Cycling mechanism 9 is to utilize the mechanism that has replaced the gas in first of environment～the 3rd casing 61～63 once more, and representative have two structure example.First example of cycling mechanism 9 is discharged first～the 3rd casing, 61～63 gas inside from blast pipe 72 merely from rear side, and the gas former state of discharging is turned back to supply pipe 71.At this moment, cycling mechanism 9 is made of the pump that gas is flowed to supply pipe 71 from blast pipe 72 etc., causes that by this pump mobile gas becomes above-mentioned recyclegas.In addition, the pressure gauge that flowmeter that the flow to the recyclegas that flows in the circulation stream detects also can be set on the cycling mechanism 9 of first example as required or the pressure of recyclegas is detected.

Second example of cycling mechanism 9 is discharged the gas in first～the 3rd casing 61～63 from blast pipe 72 from rear side, and supplies to the supply pipe 71 after the gas of discharging is removed oxygen.At this moment, cycling mechanism 9 except make gas from blast pipe 72 to the pump that supply pipe 71 flows, also in the circulation stream, be provided with and have the adsorption tank etc. that the oxygen separation of making arrives the film module of the gas separation membrane film outside or adsorbs (Pressure Swing Adsorption) mode adsorption of oxygen by pressure oscillating.Removed the gas of oxygen and become above-mentioned recyclegas from cause mobile gas by pump by above-mentioned film module or adsorption tank.In addition, in the cycling mechanism 9 of second example, the pressure gauge that flowmeter that the flow to the recyclegas that flows in the circulation stream detects also can be set as required or the pressure of recyclegas is detected.

(first execution mode)

Below, with reference to Figure 10～Figure 12, describe at the apparatus for coating 1 of first execution mode of the present invention.In first execution mode, move into after the substrate P, after the oxygen concentration of a C drops to below the oxygen concentration management value, begin the action of cycling mechanism 9, make recyclegas turn back to cavity space at least.Figure 10 is the schematic diagram of the flow of nitrogen gas stream in the apparatus for coating 1 of expression first execution mode.Figure 11 is the preceding half section flow chart that expression apparatus for coating 1 is coated with the action when handling.Figure 12 is the flow chart that expression apparatus for coating 1 is coated with the second half section of the action when handling.In addition, in 10, for convenience of explanation, in apparatus for coating 1, simplicity of illustration only illustrates first～the 3rd casing 61～63, cavity space, cabinet space, sliding space and cycling mechanism 9 and each valve.

In Figure 10, be connected with supply pipe 71 in the front of first casing 61, supply with nitrogen, recyclegas (diagram arrow C i and Cri to cavity space via a plurality of supply pipes 71 respectively from nitrogen cylinder 81, cycling mechanism 9; Be made as nitrogen and supply with Ci and circulation supply Cri).And, be connected with first casing 61 and the supply pipe 71 of supplying with nitrogen is provided with valve Vci.The supply pipe 71 that is connected with first casing 61 and supplies with recyclegas is provided with valve Vcri.For example, nitrogen is supplied with Ci and is equivalent to supply pipe 71a shown in Figure 4, and circulation is supplied with Cri and is equivalent to supply pipe 71b.Specifically, constitute by three supply pipe 71a that laterally link together side by side and three supply pipe 71b laterally connecting side by side, 6 supply pipes 71 are connected with the front of first casing 61 altogether.Nitrogen supplies with Ci and circulation supply Cri is fed in first casing 61 from three supply pipes 71 respectively.These supply pipes 71 are connected with the identical connected mode of structure of reference Fig. 6 explanation.In addition, supply to above-mentioned three supply pipe 71a, nitrogen can also be supplied with Ci and supply to supply pipe 71c (with reference to Fig. 4) except nitrogen being supplied with Ci.

In addition, be connected with a plurality of blast pipes 72 at the back side of first casing 61, the gas in the cavity space be discharged to (the diagram arrow C o of attraction portion 87 by a plurality of blast pipes 72; Be made as the outside Co of discharge).And the blast pipe 72 from cavity space to attraction portion 87 is provided with valve Vco.In addition, from the branch midway between first casing 61 and the valve Vco other blast pipe is arranged, the blast pipe of branch is via valve Vcro be connected with cycling mechanism 9 (being made as circulation discharge Cro).For example, the outside Co of discharge and the discharge Cro that circulates are equivalent to blast pipe 72a and 72b shown in Figure 4.For example, be connected supply pipe 71 similarly, amount to 6 blast pipes 72 and be connected with the back side of first casing 61 with front with first casing 61.In addition, a plurality of blast pipes 72 that are connected about the back side with first casing 61, the connected mode same with the structure that describes with reference Fig. 4 is connected.In addition, be connected with the blast pipe 72 that is provided with valve Vbo at the back side of second casing 62, the gas in the cabinet space be discharged to (the diagram arrow B o of attraction portion 87 by blast pipe 72; Be made as the outside Bo of discharge).In addition, be connected with the blast pipe 72 that is provided with valve Vso at the back side of the 3rd casing 63, the gas in the sliding space be discharged to (the diagram arrow So of attraction portion 87 by blast pipe 72; Be made as the outside So of discharge).

Then, with reference to Figure 10～Figure 12, the action when being coated with processing at apparatus for coating 1 describes.These actions can be undertaken by the control part (for example, control part 3 (with reference to Fig. 2)) of apparatus for coating, also can be carried out each action by the user of apparatus for coating, also can be set by step undertaken by the user of this control part or apparatus for coating.

At first, open input port 611 (step S51).Then, move into substrate P by carrying manipulator etc. from open input port 611, and substrate P is loaded into (step S52) on the objective table 21.Then, close input port 611 (step S53), thereby cavity space becomes and the outside space that has cut off.

Then, open valve Vci, Vco, Vbo and Vso, and shut off valve Vcri and Vcro (step S54).Then, begin in first～the 3rd casing 61～63, to supply with nitrogen from supply pipe 71, and the gas (step S55) of beginning in blast pipe 72 discharges first～the 3rd casing 61～63.At this moment, cycling mechanism 9 does not move, and the discharge rate of the quantity delivered of the nitrogen in first～the 3rd casing 61～63 and the gas of discharging in first～the 3rd casing 61～63 is adjusted to set value.Then, based on the oxygen concentration testing result that detects by oxygen concentration test section 88, wait for that the oxygen concentration of (for example putting C) in first～the 3rd casing 61～63 arrives oxygen concentration management value following (step S56).

Here, after in step S55, supplying with nitrogen that Ci supplies with and flow into cavity space, discharge Co from the outside at the back side that is in first casing 61 and be discharged from from nitrogen.In addition, after supplying with nitrogen that Ci supplies with and flow into cavity space from nitrogen, S1 flows into to sliding space from peristome.And the nitrogen that flow in the sliding space is discharged from from outside discharge So, perhaps flow into cabinet space from peristome S2, discharges Bo then from the outside and is discharged from.Then, supply with the quantity delivered of Ci supply and discharge the discharge rate that Co, So and Bo discharge, the pressure in first～the 3rd casing 61～63 is maintained more than the atmospheric pressure (this quantity delivered and discharge rate are designated as specified rate) from the outside by adjusting from nitrogen.Therefore, under the state of having opened valve Vci, Vco, Vbo and Vso, be formed with air-flow that the nitrogen supplied with from the many places of cavity space one side reveals to the many places of cavity space opposite side and, the air-flow revealed to sliding space by peristome S1.Like this, under the state of having opened valve Vci, Vco, Vbo and Vso, because while supplying with the direct gas in a plurality of blast pipes discharge cavity space of nitrogen to cavity space by a plurality of air supply pipes, so the gas quantitative change that flows in cavity space or be discharged from from cavity space is many, gas is replaced as speeding up of nitrogen environment in cavity space.Just, owing to also be carried out apace in the decline of the oxygen concentration of some C shown in Figure 4, so can shorten the time of advent shown in Figure 8.

And, when the oxygen concentration arrival oxygen concentration management value in first～the 3rd casing 61～63 is following (is "Yes" at step S56), open valve Vcri and Vcro, and shut off valve Vco (valve Vci, Vbo and Vso continue open mode) (step S57).At this moment, under the control part of apparatus for coating 1 had been obtained situation from the testing result of the oxygen concentration of oxygen concentration test section 88, whether this control part can use this testing result to come the oxygen concentration of judging point C below oxygen concentration management value.And, judge under the situation below the oxygen concentration management value at control part, open valve Vcri and Vcro, and shut off valve Vco.On the other hand, the testing result of oxygen concentration is presented at display unit and under the situation of the user report of apparatus for coating, the user who is reported opens valve Vcri and Vcro, and shut off valve Vco at oxygen concentration test section 88.Like this, the work of the judgement of arrival oxygen concentration management value and the switching of valve both can automatically be carried out by the control part of apparatus for coating, also can be undertaken by the user of this apparatus for coating.

Then, beginning cycling mechanism 9 makes the mobile action (step S58) of recyclegas.And, the flow (step S61) of the gas that adjustment is discharged to apparatus for coating 1 gas supplied flow with from apparatus for coating 1 maintains internal pressure management value scope (step S62) with the pressure of (particularly in first casings 61) in first～the 3rd casing 61～63.Here, internal pressure management value is to be used for the pressure in first～the 3rd casing 61～63 are maintained more than the atmospheric pressure and to adjust the pressure limit of flow equilibrium, is set in the above given range of atmospheric pressure.

Here, when in step S58, having begun the action of cycling mechanism 9, supply with nitrogen that Ci supplies with and supply with recyclegas that Cri supplies with from nitrogen and flow into cavity space and conflux from circulation.And the nitrogen and the recyclegas that flow into cavity space are discharged to cycling mechanism 9 or flow into sliding space from peristome S1 from circulation discharge Cro.The nitrogen and the recyclegas that flow into sliding space are discharged from or are discharged from from outside discharge Bo after peristome S2 flows into cabinet space from outside discharge So.Then, supply with Ci and circulation from nitrogen and supply with quantity delivered that Cri supplies with, discharge discharge rate that Cro discharges and discharge the discharge rate that So and Bo discharge by adjusting, the pressure in first～the 3rd casing 61～63 are maintained more than the atmospheric pressure from the outside from circulation.From this gas flow as can be known, recyclegas is that oxygen concentration in first～the 3rd casing 61～63 arrives back below the oxygen concentration management value from its inner gas of discharging.Therefore, the oxygen concentration of recyclegas self is also below oxygen concentration management value.

With the state of above-mentioned step S55 relatively, owing to only increase the quantity delivered of supplying with the Cri supply from circulation to first casing, 61 gas supplied, so in order to make the pressure in first～the 3rd casing 61～63 be the pressure same with step S55, need to adjust from nitrogen and supply with the flow of Ci and to the flow of outside discharge So and Bo.As mentioned above, in the present embodiment, adjust fluid balance in the mode that the pressure in first～the 3rd casing 61～63 can maintain more than the atmospheric pressure.For example, by make the quantity delivered of supplying with Ci from nitrogen only reduce increase, come self-loopa to supply with the quantity delivered of Cri, thereby can adjust the flow equilibrium in first～the 3rd casing 61～63.At this moment, can will only reduce the quantity delivered of supplying with the recyclegas of Cri supply from circulation to the quantity delivered of the nitrogen of apparatus for coating 1 supply from nitrogen cylinder 81.Like this, by utilizing oxygen concentration to become below the oxygen concentration management value once more and be discharged to outside gas, thereby can reduce the quantity delivered of the nitrogen of new supply.In addition, even because the recyclegas of supplying with from circulation supply Cri is that cycling mechanism 9 constitutes the gas that also keeps below the oxygen concentration management value by above-mentioned first example, so the oxygen concentration in the coating processing time shown in Figure 8 can not rise.In addition, under the situation that cycling mechanism 9 is made of above-mentioned second example, supply with the oxygen concentration of the recyclegas of Cri supply from circulation and further stablize, so can further stablize the oxygen concentration that is coated with in the processing time.

Then, pressure in first～the 3rd casing 61～63 maintains (is "Yes" at step S62) in the internal pressure management value scope, and the oxygen concentration in first～the 3rd casing 61～63 when (is "Yes" at step S63), is coated with processing (step S64) to substrate P when oxygen concentration management value is following.Then, the action of above-mentioned steps S62～S64 repeatedly finishes (being "Yes") up to the coating processing in step S65.(is "No" at step S62), the flow adjustment of step S61 repeatedly when on the other hand, the pressure in first～the 3rd casing 61～63 is outside internal pressure management value scope.

On the other hand, when the oxygen concentration in first～the 3rd casing 61～63 does not satisfy oxygen concentration management value (is "No" at step S63), stop the action (step S71) that cycling mechanism 9 flows recyclegas.Then, open valve Vci, Vco, Vbo and Vso and shut off valve Vcri and Vcro (step S54), carry out the flow adjustment once more and be above-mentioned specified rate (step S73), turn back to above-mentioned steps S56 and move repeatedly.Just, in the coating of substrate P is handled, surpassed in oxygen concentration under the situation of oxygen concentration management value, interrupted do action and change to the nitrogen of only supplying with from nitrogen cylinder 81.

Then, when the coating processing to substrate P finishes (is "Yes" at step S65), stop to supply with nitrogen, and stop to discharge gas (step S66) to blast pipe 72 from supply pipe 71.And, stop the action (step S67) that cycling mechanism 9 flows recyclegas.

Then, open input port 611 (step S68), and take out of substrate P (step S69) after the coating that is loaded on the objective table 21 is handled from open input port 611 by carrying manipulator etc.And, continuing under the situation that coating handles (step S70 is a "Yes"), get back to above-mentioned steps S52 and move repeatedly.On the other hand, under the situation that finishes the coating processing (is "No" at step S70), finish the action of this flow chart.

In addition, in above-mentioned action, following mode has been described: in the coating of substrate P is handled, surpassed in oxygen concentration under the situation of oxygen concentration management value, interrupt do action, supply with nitrogen and only change to, still, can not manage that also substrate P is coated with oxygen concentration in the processing from nitrogen cylinder 81.For example, under the situation that cycling mechanism 9 is made of above-mentioned second example, supply with the recyclegas that oxygen concentration that Cri supplies with has further been stablized, so that coating is only carried out the internal pressure management in handling is just enough owing to become from circulation.At this moment, carry out flow adjustment (step S61), still, in coating is handled, always continue do action, and do not switch to the action of only supplying with nitrogen corresponding to the pressure variation.

Like this, the apparatus for coating of first execution mode is supplied with nitrogen partly to the coating space, by in the low oxygen environment, carrying out the coating of coating fluid, and prevent in the oxidation that is coated with the coating fluid in handling, wherein, the coating space comprises the space of nozzle ejection coating fluid and the space of the substrate (coating position) that conveying has been coated with coating fluid.At this moment, circulate once more and supply with by making the local nitrogen that is discharged from of supplying with, thereby can reduce in order to be replaced as the low oxygen environment and to keep this environment and the total amount of needed nitrogen.

In addition, in the embodiment that uses Figure 10 to describe, only directly supply with nitrogen and recyclegas, but also can directly supply with nitrogen and recyclegas to other spaces to cavity space.Below, use Figure 13 and Figure 14 that variation from recyclegas to sliding space that directly supply with nitrogen and is described.In addition, to be expression supply with nitrogen and recyclegas and supply with the schematic diagram of first variation of the flow of nitrogen gas stream of nitrogen to sliding space to cavity space Figure 13.Figure 14 is the schematic diagram of second variation of the expression flow of nitrogen gas stream of supplying with nitrogen and recyclegas to cavity space and sliding space respectively.In addition, in Figure 13 and Figure 14, for the purpose of simplifying the description, to apparatus for coating 1, simplicity of illustration only illustrates first～the 3rd casing 61～63, cavity space, cabinet space, sliding space and cycling mechanism 9 and each valve.

In Figure 13, in first variation, identical with the embodiment of Figure 10, via with a plurality of supply pipes 71 that are connected previously of first casing 61, supply with nitrogen from nitrogen cylinder 81 to cavity space, and supply with recyclegas (nitrogen supplies with Ci and Cri is supplied with in circulation) to cavity space from cycling mechanism 9.And the supply pipe 71 that nitrogen is supplied with Ci is provided with valve Vci, and the supply pipe 71 of circulation supply Cri is provided with valve Vcri.And then supply pipe 71 is connected with the front of the 3rd casing 63, supplies with nitrogen (diagram arrow Si from nitrogen cylinder 81 to sliding space via supply pipe 71; Be made as nitrogen and supply with Si).And the supply pipe 71 that nitrogen is supplied with Si is provided with valve Vsi.For example, nitrogen supply Si is equivalent to supply pipe 71d shown in Figure 4.

In addition, a plurality of blast pipes 72 of being connected via the back side with first casing 61 of the gas in the cavity space are discharged to attraction portion 87 (outside discharge Co).And the blast pipe 72 of externally discharging Co is provided with valve Vco.In addition, from the branch midway between first casing 61 and the valve Vco blast pipe is arranged, the blast pipe of branch is via valve Vcro be connected with cycling mechanism 9 (circulation discharge Cro).In addition, be connected with the blast pipe 72 that is provided with valve Vbo at the back side of second casing 62, by the gas (outside discharge Bo) of blast pipe 72 in attraction portion 87 discharge cabinet spaces.In addition, on the back side of the 3rd casing 63, be connected with the blast pipe 72 that is provided with valve Vso, by the gas (outside discharge So) of blast pipe 72 in attraction portion 87 discharge sliding spaces.

Then, the action that is coated with when handling at the apparatus for coating 1 of first variation shown in Figure 13 describes.The action of apparatus for coating 1 shown in Figure 13 is identical with the action of using Figure 11 and Figure 12 explanation, only is that to supply with the relevant action of Si and valve Vsi different with nitrogen.

Specifically, move into substrate P and drop to below the oxygen concentration management value up to the oxygen concentration of a C afterwards, in above-mentioned steps S54, open valve Vci, Vsi, Vco, Vbo and Vso, and shut off valve Vcri and Vcro.Then, in first～the 3rd casing 61～63, supply with nitrogen, and discharge gas in first～the 3rd casing 61～63, wait for that the oxygen concentrations in first～the 3rd casing 61～63 arrive below the oxygen concentration management value from blast pipe 72 from supply pipe 71.

This state is supplied with nitrogen that Ci supplies with and flow into cavity space from nitrogen after, discharge Co from the outside at the back side that is in first casing 61 and discharge.In addition, after supplying with nitrogen that Ci supplies with and flow into cavity space from nitrogen, flow into sliding space, and supply with the nitrogen that Si supplies with from nitrogen and conflux from peristome S1.And the nitrogen that confluxes in sliding space is discharged So and is discharged from the outside, perhaps discharges from outside discharge Bo after peristome S2 flow into cabinet space.Then, supply with the quantity delivered of Ci and Si supply and discharge the discharge rate that Co, So and Bo discharge, the pressure in first～the 3rd casing 61～63 is maintained more than the atmospheric pressure from the outside by adjusting from nitrogen.

And, when the arrival of the oxygen concentration in first～the 3rd casing 61～63 oxygen concentration management value is following, in above-mentioned steps S57, open valve Vcri and Vcro, and shut off valve Vco (valve Vci, Vsi, Vbo and Vso continue open mode), the action that beginning cycling mechanism 9 flows recyclegas.

After this state flows into cavity space from the nitrogen of nitrogen supply Ci supply and from the recyclegas that circulation supply Cri supplies with, be discharged to cycling mechanism 9 from the discharge Cro that circulates, perhaps flow into sliding space from peristome S1.Flow into the nitrogen and the recyclegas of sliding space, conflux with the nitrogen of supplying with the Si supply from nitrogen.And, discharge the So discharge from the outside at the gas that sliding space confluxes, perhaps flow into cabinet space, and discharge Bo from the outside and discharge from peristome S2.And,, from the quantity delivered of nitrogen supply Ci and Si supply, from the quantity delivered of the supply Cri supply that circulates, from the discharge rate of the discharge Cro discharge that circulates, from the discharge rate of outside discharge So and Bo discharge first～the 3rd casing, 61～63 interior pressure are maintained more than the atmospheric pressure by adjustment.

In Figure 14, in second variation, identical with the embodiment of Figure 10, via with a plurality of supply pipes 71 that are connected previously of first casing 61, supply with nitrogen from nitrogen cylinder 81 to cavity space, supply with recyclegas (nitrogen supplies with Ci and Cri is supplied with in circulation) to cavity space from cycling mechanism 9.And the supply pipe 71 that nitrogen is supplied with Ci is provided with valve Vci, and the supply pipe 71 of circulation supply Cri is provided with valve Vcri.In addition, supply pipe 71 is connected with the front of the 3rd casing 63, supplies with nitrogen (nitrogen supply with Si) from nitrogen cylinder 81 to sliding space via supply pipe 71.And the supply pipe 71 that nitrogen is supplied with Si is provided with valve Vsi.And then, from the branch midway between cycling mechanism 9 and the valve Vcri supply pipe being arranged, the supply pipe of branch is connected (diagram arrow Sri with the front of the 3rd casing 63 via valve Vsri; Be made as circulation and supply with Sri).

In addition, a plurality of blast pipes 72 of being connected via the back side with first casing 61 of the gas in the cavity space are discharged to attraction portion 87 (outside discharge Co).And the blast pipe 72 of externally discharging Co is provided with valve Vco.In addition, from the branch midway between first casing 61 and the valve Vco blast pipe is arranged, the blast pipe of branch is via valve Vcro be connected with cycling mechanism 9 (circulation discharge Cro).In addition, be connected with the blast pipe 72 that is provided with valve Vbo at the back side of second casing 62, by the gas (outside discharge Bo) of blast pipe 72 in attraction portion 87 discharge cabinet spaces.In addition, on the back side of the 3rd casing 63, be connected with the blast pipe 72 that is provided with valve Vso, by the gas (outside discharge So) of blast pipe 72 in attraction portion 87 discharge sliding spaces.

Then, the action that is coated with when handling at the apparatus for coating 1 of second variation shown in Figure 14 describes.The action of apparatus for coating 1 shown in Figure 14 is identical with the action of using Figure 11 and Figure 12 explanation, only is to supply with Si, circulation with nitrogen to supply with the relevant action of Sri, valve Vsi and valve Vsri different.

Specifically, move into substrate P and drop to below the oxygen concentration management value up to the oxygen concentration of a C afterwards, in above-mentioned steps S54, open valve Vci, Vsi, Vco, Vbo and Vso, and shut off valve Vcri, Vsri and Vcro.Then, in first～the 3rd casing 61～63, supply with nitrogen, and discharge gas in first～the 3rd casing 61～63, wait for that the oxygen concentrations in first～the 3rd casing 61～63 arrive below the oxygen concentration management value from blast pipe 72 from supply pipe 71.In addition, because the flow of nitrogen gas stream in this state and above-mentioned first variation are same, the explanation that the Therefore, omited is detailed.

And, when the arrival of the oxygen concentration in first～the 3rd casing 61～63 oxygen concentration management value is following, in above-mentioned steps S57, open valve Vcri, Vsri and Vcro, and shut off valve Vco (valve Vci, Vsi, Vbo and Vso continue open mode), the action that beginning cycling mechanism 9 flows recyclegas.

After this state flows into cavity space from the nitrogen of nitrogen supply Ci supply and from the recyclegas that circulation supply Cri supplies with, be discharged to cycling mechanism 9 from the discharge Cro that circulates, perhaps flow into sliding space from peristome S1.Flow into the nitrogen and the recyclegas of sliding space, conflux with supplying with nitrogen that Si supplies with from nitrogen and supply with the recyclegas that Cri supplies with from circulation.And, discharge the So discharge from the outside at the gas that sliding space confluxes, perhaps after flowing into cabinet space, peristome S2 discharges from outside discharge Bo.And,, from the quantity delivered of nitrogen supply Ci and Si supply, from the quantity delivered of supply Cri and the Sri supply that circulates, from the discharge rate of the discharge Cro discharge that circulates, from the discharge rate of outside discharge So and Bo discharge first～the 3rd casing, 61～63 interior pressure are maintained more than the atmospheric pressure by adjustment.

In addition, identical with the above embodiments in second variation, can make the quantity delivered minimizing quantity delivered that increase, that come self-loopa supply Cri of supplying with Ci from nitrogen.And then, when comparing, in second variation, can also make the quantity delivered minimizing quantity delivered that increase, that come self-loopa supply Sri of supplying with Si from nitrogen with first variation.For example, also can make the quantity delivered from nitrogen supply Si is 0, and at this moment, when the oxygen concentration arrival oxygen concentration management value in first～the 3rd casing 61～63 was following, shut off valve Vsi got final product.

In addition, in the embodiment that uses Figure 10, Figure 13, Figure 14 explanation, cycling mechanism 9 only utilizes the gas of discharging from cavity space once more, but also can utilize the gas of discharging from other space once more.Below, use Figure 15 that the variation of utilizing the gas of discharging from cavity space, sliding space and cabinet space is once more described.In addition, Figure 15 is the schematic diagram of the 3rd variation of flow of nitrogen gas stream that the gas of discharging from cavity space, sliding space and cabinet space is utilized again.In addition, in Figure 15, for the purpose of simplifying the description, to apparatus for coating 1, simplicity of illustration only illustrates first～the 3rd casing 61～63, cavity space, cabinet space, sliding space and cycling mechanism 9 and each valve.

In Figure 15, in the 3rd variation, identical with second variation of Figure 14, via with a plurality of supply pipes 71 that are connected previously of first casing 61, supply with nitrogen from nitrogen cylinder 81 to cavity space, supply with recyclegas (nitrogen supplies with Ci and Cri is supplied with in circulation) to cavity space from cycling mechanism 9.And the supply pipe 71 that nitrogen is supplied with Ci is provided with valve Vci, and the supply pipe 71 of circulation supply Cri is provided with valve Vcri.In addition, supply pipe 71 is connected with the front of the 3rd casing 63, supplies with nitrogen (nitrogen supply with Si) from nitrogen cylinder 81 to sliding space via supply pipe 71.And the supply pipe 71 that nitrogen is supplied with Si is provided with valve Vsi.And then there is supply pipe in the branch midway between cycling mechanism 9 and valve Vcri, and the supply pipe of branch is connected (Sri is supplied with in circulation) with the front of the 3rd casing 63 via valve Vsri.

In addition, be connected with blast pipe 72 respectively at the back side of first casing 61, the back side of second casing 62 and the back side of the 3rd casing 63, blast pipe 72 confluxes and respectively the gas in first～the 3rd casing 61～63 is discharged to (the diagram arrow A o of attraction portion 87; Be made as the outside Ao of discharge).And, blast pipe 72 conflux and be discharged to attraction portion 87 be provided with valve Vao midway.In addition, there are other blast pipes in the branch midway of confluxing until valve Varo from blast pipe 72, the blast pipe of branch be connected with cycling mechanism 9 via valve Varo (being made as circulation and discharging Aro).For example, the outside Ao of discharge and the discharge Aro that circulates are equivalent to blast pipe 72a～72d shown in Figure 4.

Then, the action that is coated with when handling at the apparatus for coating 1 of the 3rd variation shown in Figure 15 describes.The action of apparatus for coating 1 shown in Figure 15 is identical with the action of using Figure 11 and Figure 12 explanation, only is to supply with nitrogen that Si, circulation supply with Sri, outside to discharge the relevant action of Ao, valve Vsi, valve Vsri and valve Vao, Varo different.

Specifically, move into substrate P and drop to below the oxygen concentration management value up to the oxygen concentration of a C afterwards, in above-mentioned steps S54, open valve Vci, Vsi and Vao, and shut off valve Vcri, Vsri and Varo.Then, in first～the 3rd casing 61～63, supply with nitrogen, and discharge gas in first～the 3rd casing 61～63, wait for that the oxygen concentrations in first～the 3rd casing 61～63 arrive below the oxygen concentration management value from blast pipe 72 from supply pipe 71.

After the nitrogen that this state is supplied with from nitrogen supply Ci flow into cavity space, the outside that is connected from the back side with first casing 61 was discharged Ao and is discharged.In addition, after supplying with nitrogen that Ci supplies with and flow into cavity space from nitrogen, flow into sliding space, and supply with the nitrogen that Si supplies with from nitrogen and conflux from peristome S1.And the nitrogen that confluxes in sliding space is discharged Ao and is discharged from the outside, perhaps discharges from outside discharge Ao after peristome S2 flow into cabinet space.Then, supply with the quantity delivered of Ci and Si supply and discharge the discharge rate that Ao discharges, the pressure in first～the 3rd casing 61～63 is maintained more than the atmospheric pressure from the outside by adjusting from nitrogen.

And, when the arrival of the oxygen concentration in first～the 3rd casing 61～63 oxygen concentration management value is following, in above-mentioned steps S57, open valve Vcri, Vsri and Varo, and shut off valve Vao (valve Vci and Vsi continue open mode), the action that beginning cycling mechanism 9 flows recyclegas.

After this state flows into cavity space from the nitrogen of nitrogen supply Ci supply and from the recyclegas that circulation supply Cri supplies with, be discharged to cycling mechanism 9 from the discharge Aro that circulates, perhaps flow into sliding space from peristome S1.Flow into the nitrogen and the recyclegas of sliding space, conflux with the nitrogen of supplying with the Si supply from nitrogen.And, discharge the Ao discharge at the gas that sliding space confluxes from circulation, perhaps after flowing into cabinet space, peristome S2 discharges from circulation discharge Aro.And, supply with the quantity delivered of Ci and Si by adjusting nitrogen, discharge the discharge rate that Aro discharges from the supply quantity delivered that Cri and Sri supplied with that circulates, from circulating, first～the 3rd casing, 61～63 interior pressure are maintained more than the atmospheric pressure.

As can be seen from Figure 15, in the 3rd variation,,, be the maximum embodiment of quantity delivered that supplies with recyclegas so compare with other embodiment owing to when the action of cycling mechanism 9, the gas of discharging from first～the 3rd casing 61～63 is all utilized once more.Just, owing to utilizing the quantity delivered of supplying with to become many relatively once more, be minimum so can make quantity delivered from nitrogen supply Ci and Si.For example, as long as satisfy internal pressure management value, also can make the quantity delivered from nitrogen supply Ci and/or Si is 0.At this moment, when internal pressure is lower than internal pressure management value, supply with at the nitrogen that begins once more from nitrogen supply Ci or Si by the flow adjustment of above-mentioned steps S61.

(second execution mode)

Below, with reference to Figure 16 and Figure 17, describe at the apparatus for coating 1 of second execution mode of the present invention.In second execution mode, move into after the substrate P, after dropping to below the oxygen concentration management value, the oxygen concentration of a C begins the action of cycling mechanism 9, perhaps move into after the substrate P, the action of beginning cycling mechanism 9 makes recyclegas turn back to sliding space at least before the oxygen concentration of a C drops to below the oxygen concentration management value.Figure 16 is the schematic diagram of the flow of nitrogen gas stream in the apparatus for coating 1 of expression second execution mode.Figure 17 is the flow chart that expression apparatus for coating 1 is coated with the action when handling.In addition, in Figure 16, for convenience of explanation, to apparatus for coating 1, simplicity of illustration only illustrates first～the 3rd casing 61～63, cavity space, cabinet space, sliding space and cycling mechanism 9 and each valve.

In Figure 16, be connected with a plurality of supply pipes 71 in the front of first casing 61, supply with nitrogen (diagram arrow C i * n by a plurality of supply pipes 71 to cavity space; Be made as nitrogen and supply with Ci * n).And, with each supply pipe 71 that first casing 61 is connected on be connected with valve Vci respectively and (be made as valve Vci * n).For example, supply with Ci * n and be equivalent to supply pipe 71a～71c shown in Figure 4.In addition, be connected with supply pipe 71, supply to sliding space (Sri is supplied with in circulation) via supply pipe 71 from cycling mechanism 9 in the front of the 3rd casing 63.And the supply pipe 71 that Sri is supplied with in circulation is provided with valve Vsri.

In addition, a plurality of blast pipes 72 of being connected via the back side with first casing 61 of the gas in the cavity space are discharged to attraction portion 87 (outside discharge Co).And the blast pipe 72 of externally discharging Co is provided with valve Vco.In addition, blast pipe is arranged, the blast pipe of branch be connected with cycling mechanism 9 via valve Vcro (circulation discharge Cro) from the branch midway between first casing 61 and the valve Vco.In addition, be connected with the blast pipe 72 that is provided with valve Vbo at the back side of second casing 62, by the gas (outside discharge Bo) of blast pipe 72 in attraction portion 87 discharge cabinet spaces.In addition, on the back side of the 3rd casing 63, be connected with the blast pipe 72 that is provided with valve Vso, by the gas (outside discharge So) of blast pipe 72 in attraction portion 87 discharge sliding spaces.

Then, the action that is coated with when handling at the apparatus for coating 1 of second variation shown in Figure 16 describes.Move into after the substrate P, action when after the oxygen concentration of a C drops to below the oxygen concentration management value, beginning the action of cycling mechanism 9, identical with the action that illustrates among the Figure 11 and first embodiment shown in Figure 12, only be to supply with Ci, circulation with nitrogen to supply with the relevant action of Sri, valve Vci * n and valve Vsri different.

Specifically, move into substrate P and drop to below the oxygen concentration management value up to the oxygen concentration of a C afterwards, in above-mentioned steps S54, open valve Vci * n, Vco, Vbo and Vso, and shut off valve Vsri and Vcro.Then, in first～the 3rd casing 61～63, supply with nitrogen, and discharge gas in first～the 3rd casing 61～63, wait for that the oxygen concentrations in first～the 3rd casing 61～63 arrive below the oxygen concentration management value from blast pipe 72 from supply pipe 71.

This state is supplied with nitrogen that Ci * n supplies with and flow into cavity space from nitrogen after, discharge Co from the outside at the back side that is in first casing 61 and discharge.In addition, after supplying with nitrogen that Ci * n supplies with and flow into cavity space from nitrogen, flow into sliding space from peristome S1.And the nitrogen that confluxes in sliding space is discharged So and is discharged from the outside, perhaps discharges from outside discharge Bo after peristome S2 flow into cabinet space.Then, supply with the quantity delivered of Ci * n supply and discharge the discharge rate that Co, So and Bo discharge, the pressure in first～the 3rd casing 61～63 is maintained more than the atmospheric pressure from the outside by adjusting from nitrogen.

And, when the arrival of the oxygen concentration in first～the 3rd casing 61～63 oxygen concentration management value is following, in above-mentioned steps S57, open valve Vsri and Vcro, and shut off valve Vco (valve Vci * n, Vbo and Vso continue open mode), the action that beginning cycling mechanism 9 flows recyclegas.

This state is supplied with nitrogen that Ci * n supplies with and is flow into cavity space from nitrogen after, discharge Cro from circulation and be discharged to cycling mechanism 9, perhaps flow into sliding space from peristome S1.Flowing into the nitrogen of sliding space confluxes with the recyclegas of supplying with the Sri supply from circulation.And, discharge the So discharge from the outside at the gas that sliding space confluxes, perhaps after flowing into cabinet space, peristome S2 discharges from outside discharge Bo.And,, from the quantity delivered of nitrogen supply Ci * n supply, from the quantity delivered of the supply Sri supply that circulates, from the discharge rate of the discharge Cro discharge that circulates, from the discharge rate of outside discharge So and Bo discharge first～the 3rd casing, 61～63 interior pressure are maintained more than the atmospheric pressure by adjustment.

In addition, the apparatus for coating 1 of second execution mode only supplies to sliding space with recyclegas.At this, when comparing with cavity space, because sliding space does not directly give the influence of environment the space of coating fluid, so gas supplied is little to the influence of the oxygen concentration management of a C.Therefore, in the action when the apparatus for coating 1 of second execution mode is coated with processing, move into after the substrate P, before the oxygen concentration of a C drops to below the oxygen concentration management value, also can begin the action of cycling mechanism 9.Below, with reference to Figure 16 and Figure 17 the action of the apparatus for coating 1 of the action of beginning cycling mechanism 9 drop to below the oxygen concentration management value in oxygen concentration before is described.These actions can be by the control part (for example control part 3 (with reference to Fig. 2)) of apparatus for coating, also can be carried out each action by the user of apparatus for coating, also can be set by step undertaken by the user of this control part or apparatus for coating.

At first, open input port 611 (step S81).Then, move into substrate P by carrying manipulator etc. from open input port 611, and substrate P is loaded into (step S82) on the objective table 21.Then, close input port 611 (step S83), cavity space becomes and the outside space that has cut off.

Then, open valve Vci, Vsri, Vcro, Vbo and Vso, and shut off valve Vco (step S84).Then, begin in first～the 3rd casing 61～63, to supply with nitrogen from supply pipe 71, and the gas (step S85) of beginning in blast pipe 72 discharges first～the 3rd casing 61～63.And then, the action (step S86) that beginning cycling mechanism 9 flows recyclegas.Then, based on the oxygen concentration testing result that detects by oxygen concentration test section 88, wait for that the oxygen concentration of (for example putting C) in first～the 3rd casing 61～63 arrives oxygen concentration management value following (step S87).

Here, after supplying with nitrogen that Ci * n supplies with and flow into cavity space from nitrogen, discharge Cro from the circulation at the back side that is in first casing 61 and be discharged to the cycling mechanism 9.In addition, after supplying with nitrogen that Ci * n supplies with and flow into cavity space from nitrogen, S1 flows into to sliding space from peristome, and and supplies with the recyclegas that Sri supplies with from circulation and conflux.And, discharge the So discharge from the outside or flow into cabinet space at the gas that sliding space confluxes, and discharge Bo from the outside and discharge from peristome S2.And,, from the quantity delivered of nitrogen supply Ci * n supply, from the quantity delivered of the supply Sri supply that circulates, from the discharge rate of the discharge Cro discharge that circulates, from the discharge rate of outside discharge So and Bo discharge first～the 3rd casing, 61～63 interior pressure are maintained more than the atmospheric pressure by adjustment.

Therefore, under the state of having opened valve Vci * n, Vsri, Vcro, Vbo and Vso, be formed with air-flow that the nitrogen supplied with from the many places of cavity space one side reveals to the many places of cavity space opposite side and, the air-flow revealed to sliding space by peristome S1.Like this, under the state of having opened valve Vci * n, Vsri, Vcro, Vbo and Vso, because while supplying with the direct gas in a plurality of blast pipes discharge cavity space of nitrogen to cavity space by a plurality of supply pipes, so the gas quantitative change that flows in cavity space or be discharged from from cavity space is many, the gas in cavity space is replaced as speeding up of nitrogen environment.Just, owing to also be carried out apace in the decline of the oxygen concentration of some C shown in Figure 4, so can shorten the time of advent shown in Figure 8.

Under the state of having closed valve Vci * n, Vsri, Vcro, Vbo and Vso, recyclegas is supplied directly onto sliding space.For example, under the situation that cycling mechanism 9 is made of above-mentioned first example (gas is circulated to supply side from exhaust side), the recyclegas of supplying with to sliding space invades the influence of the air in the cavity space etc. when moving into substrate P, and just includes oxygen at the supply initial stage.But, as mentioned above, because sliding space is little to the influence of managing in the oxygen concentration of a C, so few to the influence of the time of advent shown in Figure 8.In addition, by being replaced as nitrogen environment in the cavity space, recyclegas also becomes hypoxia soon.In addition, under the situation that cycling mechanism 9 is made of above-mentioned second example (just remove oxygen from the gas of discharging and to the supply side circulation), because recyclegas maintains hypoxia, so can expect further to shorten the time that sliding space is replaced into low-oxygen environment.

Then, when the oxygen concentration arrival oxygen concentration management value in first～the 3rd casing 61～63 is following (is "Yes" at step S87), substrate P is coated with processing (step S88).When the coating processing to substrate P finishes (is "Yes" at step S85), make to handle to enter into next step.

Then, stop to supply with nitrogen, and stop to discharge gas (step S89) to supply pipe 72 from supply pipe 71.And, stop the action (step S90) that cycling mechanism 9 flows recyclegas.

Then, substrate P (step S92) after the coating that objective table 21 loads is handled is taken out of by carrying manipulator etc. in open input port 611 (step S91) from open input port 611.And, under the situation that continues the coating processing (is "Yes" at step S93), turn back to above-mentioned steps S82, move repeatedly.On the other hand, under the situation that finishes the coating processing (is "No" at step S93), finish the action of this flow chart.

Like this, in the past, the nitrogen of supplying with to the 3rd casing 63 is provided by the recyclegas of supplying with the Sri supply from circulation, so can reduce the quantity delivered of nitrogen.Therefore, in the apparatus for coating 1 of second execution mode, comprise the state midway that oxygen concentration is descended, also be discharged to outside gas, thereby can further reduce the quantity delivered of the nitrogen of new supply by utilizing once more.

In addition, in the explanation of first and second execution modes, adopted such mode: when cycling mechanism 9 moves, close outside Co of discharge or Ao and will discharge stream and fully switch to circulation discharge Cro or Aro.But also can adopt the switching mode of other discharge stream.For example, when cycling mechanism 9 action, discharge Cro or Aro discharges internal gas, and the mode that satisfies the management value with internal pressure or oxygen concentration is discharged to the outside Co of discharge with the part of internal gas or Ao is also passable to circulation.

In addition, the supply pipe and the blast pipe (that is, nitrogen is supplied with Si, Sri, outside discharge So, the outside Bo of discharge are supplied with in circulation) in cabinet space and sliding space setting of the first and second above-mentioned execution mode have many respectively.In addition, supply pipe that is connected with cavity space and blast pipe can have one respectively.If adjust flow equilibrium as described above, no matter be 1 pipe arrangement or many pipe arrangements then, can both obtain effect of the present invention.

In addition, also can omit the 3rd casing 63 and the outside So of discharge of the first and second above-mentioned execution mode.Just, organic EL coating mechanism 5 is arranged in the cabinet space that is surrounded by second casing 62.At this moment, the gas that flows via peristome S1 from cavity space flow into cabinet space and discharges Bo from the outside and discharge.In addition, nitrogen is supplied with Si and circulation is supplied with Sri respectively to cabinet space supply nitrogen and recyclegas.Just, even the 3rd casing 63 and the outside So of discharge are not set, also can form the nitrogen of supplying with to cavity space leaks into cabinet space by peristome S1 air-flow.Just,, also be formed with the gas stream of cavity space → peristome S1 → cabinet space, so the gas in the cabinet space can flow in the cavity space seldom even stirred the gas in the cabinet space by moving back and forth of nozzle unit 50.Therefore even oxygen arranged in that cabinet space is remaining, can prevent that also oxygen from flowing in the cavity space.In addition, same, owing to can utilize the gas that is replaced into low-oxygen environment once more, so equally also can reduce the nitrogen amount of supply.

Further, move back and forth and stir when bringing the effect of influence by nozzle unit 50 can not obtaining to gas, also can be in single casing (for example only first casing 61) the generation local environment.At this moment, by in casing, supplying with nitrogen and under low-oxygen environment, carrying out the coating of coating fluid, obviously come to prevent to be coated with the oxidation of the coating fluid in the processing etc. thus, certainly, to be replaced into the gas of discharging from this casing behind the low-oxygen environment via cycling mechanism 9 and supply to once more in this casing, and can suppress the consumption of the nitrogen supplied with thus.

In addition, in above-mentioned action, represented to wait for that the oxygen concentration testing result that is detected by oxygen concentration test section 88 represents below the oxygen concentration management value that the order that begins to be coated with processing is thereafter handled but also can begin coating with additive method.For example, investigate the relation that the flow of the nitrogen of supplying with to apparatus for coating or pressure and some C become the time of advent (with reference to Fig. 8) below the oxygen concentration management value in advance.Then, utilize flow or the pressure and the service time of the nitrogen of in fact supplying with, also can manage oxygen concentration at a C.At this moment, after the supply of beginning nitrogen, wait for, begin coating then and handle through the given time (time of advent).

In addition, be provided with at nozzle unit 50 under the situation of hydrostatic bearing, can provide inert gas or recyclegas such as nitrogen this hydrostatic bearing.Thus, the gas that provides in order to constitute hydrostatic bearing also becomes hypoxia, and then the oxygen concentration in the sliding space is reduced.

In addition, in the above-described embodiment, in the middle of red, green and blueness, red organic EL Material is flowed in the groove of substrate P, but this painting process is for making the operation midway of organic EL display by nozzle 52a～52c of 31 group.Processing sequence when making organic EL display be hole transporting material (PEDOT) coating → drying → redness organic EL Material coating → drying → green organic EL Material coating → drying → blueness organic EL Material coating → drying this in proper order.At this moment, apparatus for coating of the present invention can be respectively applied for the operation of coating hole transporting material, red organic EL Material, green organic EL Material and blue organic EL Material.

In addition, can discharge red, green and blue organic EL Material respectively from nozzle 52a～52c.At this moment, according to red, green and blue tactic, so-called striped arrangement in a painting process, to form.And, in the above-described embodiment, in each groove of substrate P, inject organic EL Material, but many these nozzle 52a～52c of 31 group of group also can be set by nozzle 52a～52c of 31 group, in each groove of substrate P, inject organic EL Material.

In addition, in the above-described embodiment, illustrated one with organic EL Material or the hole transporting material manufacturing installation as the organic EL display of coating fluid, still, the present invention also can be applied to other apparatus for coating.For example, can be applicable to that also (Spin On Glass: the spin-coating glass method) liquid or be used to is made the device of the fluorescent material of PDP (Plasmia indicating panel) for coating protection liquid or SOG.In addition, show that also can be applied to be coated with the device of color material, this color material is used in and is manufactured on the chromatic filter that constitutes in the liquid crystal cell for liquid color display being carried out colour.

Coating process among the present invention and apparatus for coating improve unit efficiency and can prevent the oxidation of this coating fluid to the base plate coating coating fluid time, be applicable to from nozzle to spray the method for various coating fluids or device etc.

More than describe the present invention in detail, but above-mentioned explanation should not limit its scope in all respects nothing but illustration of the present invention.Certainly, only otherwise depart from the scope of the present invention, can carry out various improvement or distortion.

Claims (19)

1. apparatus for coating, it is applied to coating fluid on the substrate, it is characterized in that, comprising:

Nozzle sprays described coating fluid from its leading section;

Objective table is used to load described substrate on its upper surface;

Nozzle moving mechanism in the space on described objective table, makes described nozzle move back and forth on the direction of traversing described loading table top;

Casing, it surrounds described objective table at least;

First supply port, it is arranged at a side of described casing, supplies with given gas to the inner space of this casing;

First exhaust outlet, it is arranged at the opposite side of described casing, discharges the gas in the inner space of this casing;

Cycling mechanism, it makes the gas circulation of discharging from described first exhaust outlet at least, and supplies with to described box house;

Second supply port, it is arranged at a side of described casing, supplies with from described cycling mechanism gas supplied to the inner space of this casing.

2. apparatus for coating as claimed in claim 1 is characterized in that,

Described cycling mechanism makes the gas former state circulation of discharging from described first exhaust outlet, and supplies to described box house from described second supply port.

3. apparatus for coating as claimed in claim 1 is characterized in that,

Described cycling mechanism includes oxygen separation mechanism, and this oxygen separation mechanism supplies with to described box house from described second supply port after from the gas that described first exhaust outlet is discharged oxygen separation being removed.

4. apparatus for coating as claimed in claim 1 is characterized in that,

Described casing comprises:

First casing, it surrounds described objective table, and the space that described nozzle moving mechanism will be set separates with the space that this objective table is set, and is formed with the peristome that at least a portion that makes described nozzle is side-prominent from described nozzle moving mechanism and move back and forth on the upper surface of this first casing;

Second casing, the top that it surrounds described nozzle moving mechanism and is arranged on described first casing,

Described first supply port is arranged at a side of described first casing,

Described second supply port is arranged at a side of described first casing,

Described first exhaust outlet is arranged at the opposite side of described first casing,

Described apparatus for coating also includes second exhaust outlet, and this second exhaust outlet is arranged on described second casing, and the gas in the inner space of this second casing is discharged to the outside.

5. apparatus for coating as claimed in claim 4 is characterized in that,

Described apparatus for coating also includes the 3rd supply port, and the 3rd supply port is arranged on described second casing, supplies with described given gas to the inner space of this second casing.

6. apparatus for coating as claimed in claim 4 is characterized in that,

Described cycling mechanism makes from the gas circulation of described first exhaust outlet and the discharge of described second exhaust outlet, and supplies with to described first box house from described second supply port.

7. apparatus for coating as claimed in claim 5 is characterized in that,

Described apparatus for coating also includes the 4th supply port, and the 4th supply port is arranged on described second casing, supplies with from described cycling mechanism gas supplied to the inner space of this second casing.

8. apparatus for coating as claimed in claim 7 is characterized in that,

Described cycling mechanism makes from the gas circulation of described first exhaust outlet and the discharge of described second exhaust outlet, and supplies with to described first casing and second box house respectively from described second supply port and described the 4th supply port.

9. apparatus for coating as claimed in claim 1 is characterized in that,

Described casing comprises:

First casing, it surrounds described objective table, and the space that described nozzle moving mechanism will be set separates with the space that this objective table is set, and is formed with the peristome that at least a portion that makes described nozzle is side-prominent from described nozzle moving mechanism and move back and forth on the upper surface of this first casing;

Second casing, the top that it surrounds described nozzle moving mechanism and is arranged on described first casing,

Described first supply port is arranged at a side of described first casing,

Described second supply port is arranged at a side of described second casing,

Described first exhaust outlet is arranged at the opposite side of described first casing,

Described apparatus for coating also includes second exhaust outlet, and this second exhaust outlet is arranged on described second casing, and the gas in the inner space of this second casing is discharged to the outside.

10. apparatus for coating as claimed in claim 1 is characterized in that,

This apparatus for coating also includes the oxygen concentration checkout gear, and this oxygen concentration checkout gear detects the oxygen concentration in the interior given space of described casing,

When described cycling mechanism detects oxygen concentration below the given oxygen concentration at described oxygen concentration checkout gear, make the gas circulation of discharging from described first exhaust outlet and supply with to described box house.

11. a coating process will be applied on the substrate that is loaded on the objective table upper surface from the coating fluid of nozzle ejection, wherein, this nozzle support and moves back and forth on the direction on the top of traversing this loading table top on nozzle moving mechanism, it is characterized in that,

Supply with given gas from a side of the casing that surrounds described objective table at least, and discharge gas at least from the opposite side of this casing, the given space in this casing is replaced into till the given gaseous environment,

When described given space is replaced into given gaseous environment, supplying with described given gas from a side of described casing, make the gas circulation of discharging from the opposite side of this casing, and the gas of circulation is carried out under the condition of supplying once more from other positions of described casing one side, to the described coating fluid of described base plate coating.

12. coating process as claimed in claim 11 is characterized in that,

After the oxygen concentration in described given space reaches given oxygen concentration and when being higher than this given oxygen concentration, stop to make the action of described gas circulation, supplying with given gas from a side of described casing and discharging under the state of gas, to the described coating fluid of described base plate coating from the opposite side of described casing.

13. coating process as claimed in claim 11 is characterized in that,

Described casing is divided into space that surrounds described objective table and the space that surrounds described nozzle moving mechanism,

Make the gas circulation of discharging from the opposite side of described casing and once more gas supplied supply in the space that surrounds described objective table.

14. coating process as claimed in claim 13 is characterized in that,

Make the gas circulation of discharging from the opposite side of described casing and once more gas supplied supply in the space that surrounds described nozzle moving mechanism.

15. a coating process will be applied on the substrate that is loaded on the objective table upper surface, wherein from the coating fluid of nozzle ejection, this nozzle support is on nozzle moving mechanism, and on the direction on the top of traversing this loading table top, move back and forth, it is characterized in that

Supply with given gas from a side of the casing that surrounds described objective table at least, and make from the gas circulation of the opposite side discharge of this casing, the gas of circulation is supplied with once more from other positions of this casing one side, and the given space in this casing is replaced into till the given gaseous environment

When described given space is replaced into given gaseous environment, supplying with described given gas from a side of this casing, and make from the gas circulation of the opposite side discharge of this casing, the gas of circulation is carried out under the condition of supplying once more, to the described coating fluid of described base plate coating from other positions of a side of this casing.

16. coating process as claimed in claim 15 is characterized in that,

Described casing is divided into space that surrounds described objective table and the space that surrounds described nozzle moving mechanism,

Make the gas circulation of discharging from the opposite side of described casing and once more gas supplied supply in the space that surrounds described nozzle moving mechanism.

17. as claim 11 or 15 described coating processes, it is characterized in that,

The described box house of subtend supply with described given gas flow, discharge the flow of gas and make the gas circulation of described box house and the flow supplied with is once more adjusted respectively from described box house, described casing is kept is higher than atmospheric internal pressure.

18. as claim 11 or 15 described coating processes, it is characterized in that,

By detecting the oxygen density value in the described given space, become the situation of given gaseous environment to judge to described given space metathesis.

19. as claim 11 or 15 described coating processes, it is characterized in that,

By measuring time from described given gas to described box house that supply with, become the situation of given gaseous environment to judge to described given space metathesis.

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