CN101053861A - 注射泵、基板处理装置以及基板处理方法 - Google Patents
注射泵、基板处理装置以及基板处理方法 Download PDFInfo
- Publication number
- CN101053861A CN101053861A CNA2007100886313A CN200710088631A CN101053861A CN 101053861 A CN101053861 A CN 101053861A CN A2007100886313 A CNA2007100886313 A CN A2007100886313A CN 200710088631 A CN200710088631 A CN 200710088631A CN 101053861 A CN101053861 A CN 101053861A
- Authority
- CN
- China
- Prior art keywords
- piston
- cylinder body
- hole
- room
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
- B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
- B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
- B05B9/0409—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material the pumps being driven by a hydraulic or a pneumatic fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Details Of Reciprocating Pumps (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006111821 | 2006-04-14 | ||
JP2006111821A JP4832945B2 (ja) | 2006-04-14 | 2006-04-14 | シリンジポンプおよび基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101053861A true CN101053861A (zh) | 2007-10-17 |
CN100542683C CN100542683C (zh) | 2009-09-23 |
Family
ID=38759335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007100886313A Expired - Fee Related CN100542683C (zh) | 2006-04-14 | 2007-03-16 | 注射泵、基板处理装置以及基板处理方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4832945B2 (zh) |
KR (1) | KR100809219B1 (zh) |
CN (1) | CN100542683C (zh) |
TW (1) | TWI314067B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102463198A (zh) * | 2010-11-19 | 2012-05-23 | 大连德新机电技术工程有限公司 | 一种用于拧紧机的气压喷标装置 |
CN103480523A (zh) * | 2013-10-03 | 2014-01-01 | 尤潘垦 | 一种苯板加压注射防火液装置 |
WO2015003417A1 (zh) * | 2013-07-12 | 2015-01-15 | 深圳市华星光电技术有限公司 | 超声波清洗装置和具有该超声波清洗装置的涂布机 |
CN105499080A (zh) * | 2015-12-31 | 2016-04-20 | 昆山龙腾光电有限公司 | 供胶***及供胶方法 |
CN107387389A (zh) * | 2017-08-23 | 2017-11-24 | 四川达灿石油设备有限公司 | 一种压裂泵的液力端 |
CN107470051A (zh) * | 2016-06-07 | 2017-12-15 | 东京毅力科创株式会社 | 处理液供给装置、设备单元、处理液供给方法和存储介质 |
CN110271010A (zh) * | 2018-03-15 | 2019-09-24 | 欧姆龙株式会社 | 机器人***以及机器人的控制方法 |
CN111720301A (zh) * | 2019-03-20 | 2020-09-29 | 铠侠股份有限公司 | 泵、及涂布装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100912407B1 (ko) * | 2007-12-18 | 2009-08-14 | 주식회사 나래나노텍 | 개선된 도액 펌핑장치용 구동장치 및 이를 구비한 도액펌핑장치, 노즐 장치 및 코팅 장치 |
KR100948123B1 (ko) | 2008-07-10 | 2010-03-18 | 주식회사 나래나노텍 | 도액 펌핑장치 및 이를 구비한 슬릿 다이 및 코팅 장치 |
KR101259611B1 (ko) * | 2011-04-13 | 2013-05-13 | 주식회사 코디엠 | 엘씨디 기판 제조용 오븐챔버의 업다운장치 |
KR101365609B1 (ko) * | 2011-11-09 | 2014-02-20 | 나노에프에이 주식회사 | 접착액 도포 장치 및 이를 이용한 접착액 도포 방법 |
KR101512560B1 (ko) * | 2012-08-31 | 2015-04-15 | 가부시키가이샤 스크린 홀딩스 | 기판처리장치 |
JP2018204482A (ja) * | 2017-06-01 | 2018-12-27 | 国立研究開発法人日本原子力研究開発機構 | 溶液移送装置 |
JP7313782B2 (ja) * | 2020-02-28 | 2023-07-25 | 株式会社吉野工業所 | プランジャーポンプ、及び液体ブロー成形装置 |
KR102362969B1 (ko) * | 2020-05-07 | 2022-02-18 | (주)우원티씨에스 | 정량 토출을 위한 실린지 펌프, 코팅액 공급 방법 및 실린지 펌프 세척 방법 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1105773A (en) | 1979-11-26 | 1981-07-28 | Derek V. Mancini | Combination autoclave pump and nozzle |
JPS5862539A (ja) | 1981-10-11 | 1983-04-14 | Shinko Seiki Kk | 液体粘度自動復測定装置 |
JPH1192938A (ja) * | 1997-09-19 | 1999-04-06 | Shimadzu Corp | 液体材料気化装置 |
JP2000189872A (ja) | 1998-12-25 | 2000-07-11 | Toray Ind Inc | 塗布装置および塗布方法並びにプラズマディスプレイ用部材の製造方法および製造装置 |
JP4366757B2 (ja) * | 1999-05-27 | 2009-11-18 | 東レ株式会社 | 塗布装置、塗布方法ならびにプラズマディスプレイまたはディスプレイ用部材の製造方法 |
JP4494829B2 (ja) * | 2004-03-03 | 2010-06-30 | 東レエンジニアリング株式会社 | 塗布液供給装置および塗布液供給方法 |
-
2006
- 2006-04-14 JP JP2006111821A patent/JP4832945B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-02 TW TW096103932A patent/TWI314067B/zh active
- 2007-02-28 KR KR1020070020322A patent/KR100809219B1/ko not_active IP Right Cessation
- 2007-03-16 CN CNB2007100886313A patent/CN100542683C/zh not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102463198A (zh) * | 2010-11-19 | 2012-05-23 | 大连德新机电技术工程有限公司 | 一种用于拧紧机的气压喷标装置 |
CN102463198B (zh) * | 2010-11-19 | 2013-07-31 | 大连德新机电技术工程有限公司 | 一种用于拧紧机的气压喷标装置 |
WO2015003417A1 (zh) * | 2013-07-12 | 2015-01-15 | 深圳市华星光电技术有限公司 | 超声波清洗装置和具有该超声波清洗装置的涂布机 |
CN103480523A (zh) * | 2013-10-03 | 2014-01-01 | 尤潘垦 | 一种苯板加压注射防火液装置 |
CN103480523B (zh) * | 2013-10-03 | 2016-01-20 | 尤潘垦 | 一种苯板加压注射防火液装置 |
CN105499080A (zh) * | 2015-12-31 | 2016-04-20 | 昆山龙腾光电有限公司 | 供胶***及供胶方法 |
CN107470051A (zh) * | 2016-06-07 | 2017-12-15 | 东京毅力科创株式会社 | 处理液供给装置、设备单元、处理液供给方法和存储介质 |
CN107387389A (zh) * | 2017-08-23 | 2017-11-24 | 四川达灿石油设备有限公司 | 一种压裂泵的液力端 |
CN110271010A (zh) * | 2018-03-15 | 2019-09-24 | 欧姆龙株式会社 | 机器人***以及机器人的控制方法 |
CN111720301A (zh) * | 2019-03-20 | 2020-09-29 | 铠侠股份有限公司 | 泵、及涂布装置 |
TWI767187B (zh) * | 2019-03-20 | 2022-06-11 | 日商鎧俠股份有限公司 | 泵及塗佈裝置 |
US11413647B2 (en) | 2019-03-20 | 2022-08-16 | Kioxia Corporation | Pump and coating device |
Also Published As
Publication number | Publication date |
---|---|
CN100542683C (zh) | 2009-09-23 |
KR100809219B1 (ko) | 2008-02-29 |
TW200803994A (en) | 2008-01-16 |
JP4832945B2 (ja) | 2011-12-07 |
KR20070102388A (ko) | 2007-10-18 |
JP2007287831A (ja) | 2007-11-01 |
TWI314067B (en) | 2009-09-01 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kyoto City, Kyoto, Japan Patentee after: Skilling Group Address before: Kyoto City, Kyoto, Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto City, Kyoto, Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto City, Kyoto, Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090923 Termination date: 20190316 |
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CF01 | Termination of patent right due to non-payment of annual fee |