CN101038213A - Two-chamber balanced type pneumatic room temperature infrared detector - Google Patents
Two-chamber balanced type pneumatic room temperature infrared detector Download PDFInfo
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- CN101038213A CN101038213A CN 200710065409 CN200710065409A CN101038213A CN 101038213 A CN101038213 A CN 101038213A CN 200710065409 CN200710065409 CN 200710065409 CN 200710065409 A CN200710065409 A CN 200710065409A CN 101038213 A CN101038213 A CN 101038213A
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Abstract
The present invention relates to a two-chamber equilibrium type infrared detector of the air-powered room temperature including: an absorbing chamber (10), an infrared window (2) covering the absorbing chamber, a sensitive thin film (6) positioned on the absorbing chamber and an element (14) for detecting the deformation of the sensitive thin film. The characteristics reside in: an equilibrium chamber (11) is provided on the other side of the sensitive thin film (6); the air pressure in the absorbing chamber (10) is the same as that in the equilibrium chamber (11). Wherein, the element (14) for detecting the deformation of the sensitive thin film is positioned in the absorbing chamber (10) or the equilibrium chamber and is a changeable capacitance (4), or an element consisting of a tunnel tip (9) and a sensitive thin film (6). The detector in the present invention has a simple structure, a wonderful temperature and pressure property and can be used in a wild range of temperature and pressure. At the same time, the influence of the air flow to the device is shielded and the property of the detector is improved.
Description
Technical field
The present invention relates to a kind of two-chamber balanced type pneumatic room temperature infrared detector that not influenced by environment temperature, pressure, pneumatic noise etc. substantially, belong to the detector field.
Background technology
Two-chamber balanced type pneumatic room temperature infrared detector of the present invention belongs to the detector field.At present, traditional pneumatic room temperature infrared detector (as the pneumatic room temperature detector of propositions such as Chevrier) adopts following structure to see Fig. 1, when infrared ray 1 shines the very little infrared absorption layer 3 of thermal capacity by infrared window 2, infrared absorption layer 3 can absorb infrared-ray 1 back temperature and raise, gas in the heated chamber afterwards, back pressure raises and promotes sensitive thin film 6 deformation thereby gas temperature raises, two distance between electrodes respective change of variable capacitance 4, like this by detecting the variation of variable capacitance 4, the just power of infrared-ray 1 as can be known.The effect of the micropore 5 that obtains by accurate Calculation is, when environment temperature, when pressure changes, gas can flow into or the outflow chamber by micropore 5, thereby the air pressure on the both sides of assurance sensitive thin film 6 is the same, sensitive thin film 6 can deformation, thereby guarantee that detector is in normal duty.This detector exists the following shortcoming: (1) chamber is sealing fully not, has the special gas of strong absorption directly to utilize gas absorption infrared-ray 1 so cannot seal up for safekeeping to infrared-ray 1; (2) micropore 5 is crossed conferences and is caused detector sensitivity to reduce, and environment temperature when micropore 5 is too small, micropore 5 can not compensate its variation when pressure change was fast, caused the device cisco unity malfunction; (3) owing to the influence of micropore 5, device is to the not response of steady signal.
The Kenny of Stanford University teaches and he is the breadboard colleagues of USA space microelectric technique center JPL, design is also developed a kind of pneumatic infrared sensor (see figure 2) in tunnel of non-refrigeration, and it mainly comprises the very little infrared absorption layer of thermal capacity 3, sensitive thin film 6, tunnel most advanced and sophisticated 9 and close-loop feedback circuit 8.Its basic thought is to utilize tunnel location feedback electrostatic force to stop sensitive thin film 6 to move, and surveys infrared-ray 1 by measuring this electrostatic force.Another effect of feedback circuit 8 is when the variation of environment temperature, pressure, the static voltage of control two-plate 7, thereby the position that control sensitive thin film 6 is requiring.This detector exists the following shortcoming: (1) feedback circuit 8 is complicated servo-drive systems, and the reliability of work and agility directly influence the operate as normal of device; (2) feedback circuit 8 has guaranteed that just device is in normal operating conditions when environment temperature, pressure change, fails to eliminate its influence.
Summary of the invention
The objective of the invention is to shortcoming at above-mentioned prior art, promptly shield environment temperature, pressure change method to the influence of detector, a kind of two-chamber balanced type pneumatic room temperature infrared detector is proposed, it is simple in structure, fabulous temperature, pressure characteristic are arranged, can be in very wide temperature, pressure range operate as normal.Simultaneously also shield the influence to device such as air-flow, improved the performance of detector.
Technical scheme of the present invention is as follows:
Two-chamber balanced type pneumatic room temperature infrared detector comprises the absorbing cavity 10 and the counter balance pocket 11 that are separated by sensitive thin film 6, is covered in the infrared window 2 on the absorbing cavity 10 and detects the element 14 of sensitive thin film deformation and the extraction electrode 13 that joins with it.For described two-chamber balanced type pneumatic room temperature infrared detector, in absorbing cavity 10 bottoms infrared external reflection film 12 is set, be provided with the gas that infrared-ray 1 is had strong absorption in the absorbing cavity 10, at this moment response mechanism is that the gas in the absorbing cavity 10 directly absorbs infrared-ray 1, and it is highly sensitive, response speed is fast.Infrared absorption layer 3 perhaps is set in absorbing cavity 10, is common gases in the absorbing cavity 10, and response mechanism at this moment is that infrared absorption layer 3 absorbs infrared-ray 1, again heat is passed to gas.Double cavity structure requires the pressure of the interior gas of absorbing cavity 10 and counter balance pocket 11 identical, and does not have the restriction of pressure size, and its pressure can be 0.5～2.0 atmospheric pressure.The element 14 that detects film deformation is arranged in the absorbing cavity 10 or in the counter balance pocket 11, is a variable capacitance 4 that is made of electrode and membrane electrode, or constitutes the element 14 that detects film deformation by tunnel most advanced and sophisticated 9 and sensitive thin film 6.
This device is used existing technology and can be realized, the preparation of sensitive thin film 6 can adopt directional etching to make from stopping technology, as about 1 micron dense borosilicate film or silicon nitride film; The encapsulation of device can be adopted the static of glass and silicon chip to be good for and close or adopt simple adhering technique; Identical in order to guarantee two-chamber pressure under equality of temperature accurately, sealing up for safekeeping preferably of two-chamber gas carried out simultaneously; For the ease of encapsulation, the gas that two-chamber is sealed up for safekeeping gas preferably of the same race, actual gas and coarsely satisfy The Ideal-Gas Equation in addition, gas of the same race just can better guarantee the shielding of double cavity structure to environment temperature, pressure change influence.
The present invention utilizes double cavity structure effectively to shield the influence to the detector duty of environment temperature, pressure change, according to The Ideal-Gas Equation, when the temperature variation of absorbing cavity 10 and counter balance pocket 11 is identical, the variation of pressure also can be identical, thereby sensitive thin film 6 environment temperature, can deformation when pressure changes, so two-chamber balanced type pneumatic room temperature infrared detector can be in very wide temperature, pressure range operate as normal.
The two-chamber of two-chamber balanced type pneumatic room temperature infrared detector of the present invention (absorbing cavity 10 and counter balance pocket 11) is as long as pressure is identical just passable, and do not have to keep with the identical restriction of environmental stress, so just can under the prerequisite that guarantees sealing, change the gas pressure intensity in the two-chamber arbitrarily.When in the absorbing cavity 10 when infrared-ray 1 had the gas of strong absorption, gas will strengthen the absorption characteristic of infrared-ray 1 behind the raising air pressure, but thermal conduction characteristic is constant substantially, thereby the sensitivity of device will improve, but because the amount of intracavity gas has increased, the increase of thermal capacity makes the response time of detector extend.So the pressure of suitable adjusting intracavity gas can improve sensitivity or improve response speed.
Double cavity structure of the present invention makes sensitive thin film 6 no longer be exposed in the air, and air-flow etc. will no longer influence detector like this.Big air-flow can not cause breaking of sensitive thin film 6 yet.
Compared with prior art, the present invention has the following advantages:
1) shielding to environment temperature, pressure change influence is a state, rather than a servo process, and it is easy, effective to realize.
2) be particularly suitable for having the special gas of strong absorption directly to absorb the detection mechanism of infrared-ray 1 to infrared-ray 1.
3) temperature, the pressure scope of application are wide, can work under special temperature, pressure conditions.
Description of drawings
The pneumatic room temperature infrared detector structural drawing that Fig. 1 Chevrier etc. propose;
The pneumatic room temperature infrared detector structural drawing that Fig. 2 professor Kenny etc. propose;
Fig. 3 two-chamber balanced type pneumatic room temperature infrared detector structural drawing of the present invention;
Among the figure, 1-infrared-ray, 2-infrared window, 3-infrared absorption layer, 4-variable capacitance, the 5-micropore, 6-sensitive thin film, 7-two-plate, 8-feedback circuit, tip, 9-tunnel, the 10-absorbing cavity, the 11-counter balance pocket, 12-infrared external reflection film, the 13-extraction electrode, 14-detects the element of sensitive thin film deformation.
Embodiment
Further specify content of the present invention below in conjunction with example:
As shown in Figure 3, two-chamber balanced type pneumatic room temperature infrared detector of the present invention, comprising two annular seal spaces that fill identical pressure gas that sensitive thin film 6 separates, one is that 10, one of absorbing cavities are counter balance pocket 11; Be covered in the infrared window 2 on the absorbing cavity 10; Detect the element 14 of sensitive thin film deformation; And with detect the extraction electrode 13 that film deformation element 14 joins.Double cavity structure wherein makes the variation of environment temperature, pressure can not cause the deformation of sensitive thin film 6, thereby screen has been kept away environment temperature, pressure influences device, and sensitive thin film 6 is not exposed in the air, thereby screen has been kept away the influence of air-flow etc.
Example 1: seal the special gas that infrared-ray 1 is had strong absorption up for safekeeping in the absorbing cavity 10 of two-chamber balanced type pneumatic room temperature infrared detector, as fluorothene, after infrared signal 1 enters absorbing cavity 10 by infrared window 2 (can adopt polysilicon or monocrystalline silicon), infrared-ray 1 temperature raises and then pressure increases thereby special gas can absorb, promote sensitive thin film 6 (being dense borosilicate film or the electroded silicon nitride film about 1 micron) distortion, the variation of the element 14 (being variable capacitance 4 herein) by detecting sensitive thin film deformation just can be learnt the power of infrared-ray 1.Effect at the infrared external reflection film 12 of absorbing cavity 10 bottoms is to improve the absorption of gas to infrared-ray 1, thereby improves sensitivity.The gaseous species of sealing up for safekeeping in the counter balance pocket 11 can with absorbing cavity 10 in identical also can be different, as long as it is identical just passable to satisfy pressure.Double cavity structure makes the pressure size of gas in the two-chamber not have restriction in addition, as long as detector can be finished encapsulation, the gas of sealing up for safekeeping in the two-chamber can be to be higher than an atmospheric pressure, as 1.5 atmospheric pressure, also can be lower than an atmospheric pressure, as 0.8 atmospheric pressure.When the special air pressure of sealing up for safekeeping in the absorbing cavity 10 increases by force, its infrared absorbance will strengthen, and thermal conduction characteristic is constant, thereby sensitivity increases, but the response time can extend, and can improve sensitivity or accelerate response speed so suitably regulate the air pressure of absorbing cavity 10.
Example 2: seal general gas (as the air of nitrogen, drying) in the absorbing cavity 10 of two-chamber balanced type pneumatic room temperature infrared detector up for safekeeping, at this moment infrared external reflection film 12 positions should be the very little infrared absorption layer of thermal capacitance 3 (as the thick gold of 10nm).To the detection of sensitive thin film deformation, the pneumatic infrared sensor in tunnel that can propose as professor Kenny, thus utilize the element 14 of the detection film deformation that constitutes by tunnel most advanced and sophisticated 10 and sensitive thin film 6 to detect the power that infrared-rays 1 are surveyed in the film deformation.
Claims (5)
1, two-chamber balanced type pneumatic room temperature infrared detector, comprise absorbing cavity (10), be covered in infrared window (2), sensitive thin film (6) on absorbing cavity (10) housing on the absorbing cavity (10) and the element (14) that detects sensitive thin film deformation, it is characterized in that: the opposite side at sensitive thin film (6) is provided with counter balance pocket (11).
2, two-chamber balanced type pneumatic room temperature infrared detector according to claim 1, it is characterized in that: also comprise the infrared external reflection film (12) that is arranged on absorbing cavity (10) bottom, be provided with the gas that infrared-ray (1) is had strong absorption in the absorbing cavity (10).
3, two-chamber balanced type pneumatic room temperature infrared detector according to claim 1 is characterized in that: also comprising the infrared absorption layer (3) that is arranged in the absorbing cavity (10), is common gases in the absorbing cavity (10).
4, according to claim 2 or 3 described two-chamber balanced type pneumatic room temperature infrared detectors, it is characterized in that: the pressure of the gas in absorbing cavity (10) and the counter balance pocket (11) is identical, is 0.5～2.0 atmospheric pressure.
5, according to claim 2 or 3 described two-chamber balanced type pneumatic room temperature infrared detectors, it is characterized in that: the element (14) that detects sensitive thin film deformation is arranged in the absorbing cavity (10) or in the counter balance pocket (11), be a variable capacitance (4) that constitutes by electrode and membrane electrode, or the element of the detection film deformation that constitutes by tip, tunnel (9) and sensitive thin film (6).
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200710065409 CN101038213A (en) | 2007-04-13 | 2007-04-13 | Two-chamber balanced type pneumatic room temperature infrared detector |
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| CN 200710065409 CN101038213A (en) | 2007-04-13 | 2007-04-13 | Two-chamber balanced type pneumatic room temperature infrared detector |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215338A (en) * | 2014-09-01 | 2014-12-17 | 电子科技大学 | Greenhouse detector integrating piezoelectric and pyroelectric characteristics and preparation method of greenhouse detector |
| WO2017140136A1 (en) * | 2016-02-15 | 2017-08-24 | 深圳大学 | Spp terahertz detector based on mim high sensitivity |
| CN111812753A (en) * | 2020-06-01 | 2020-10-23 | 湖南大学 | Silicon substrate 3-6 μm infrared window sheet |
-
2007
- 2007-04-13 CN CN 200710065409 patent/CN101038213A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215338A (en) * | 2014-09-01 | 2014-12-17 | 电子科技大学 | Greenhouse detector integrating piezoelectric and pyroelectric characteristics and preparation method of greenhouse detector |
| CN104215338B (en) * | 2014-09-01 | 2017-06-30 | 电子科技大学 | A kind of greenhouse detector of integrated piezoelectric pyroelectricity characteristic and preparation method thereof |
| WO2017140136A1 (en) * | 2016-02-15 | 2017-08-24 | 深圳大学 | Spp terahertz detector based on mim high sensitivity |
| US11099060B2 (en) | 2016-02-15 | 2021-08-24 | Shenzhen University | Metal-insulator-metal high-sensitivity surface plasmon polariton terahertz wave detector |
| CN111812753A (en) * | 2020-06-01 | 2020-10-23 | 湖南大学 | Silicon substrate 3-6 μm infrared window sheet |
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