CN101000360B - Accelerometer - Google Patents
Accelerometer Download PDFInfo
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- CN101000360B CN101000360B CN2006100051795A CN200610005179A CN101000360B CN 101000360 B CN101000360 B CN 101000360B CN 2006100051795 A CN2006100051795 A CN 2006100051795A CN 200610005179 A CN200610005179 A CN 200610005179A CN 101000360 B CN101000360 B CN 101000360B
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- conductive
- conductive parts
- accelerometer
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- elastic
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Abstract
An accelerometer is prepared as forming a fixing unit by multiple first conduction component and multiple second conduction component, forming a active unit by a body and multiple third conduction component as well as multiple conduction fourth conduction component, connecting active unit to fixing unit and arranging an opening on said body, setting multiple third conduction component at an external side of said body in corresponding to multiple first component separately and setting multiple fourth conduction component within said opening in corresponding to multiple second conduction component separately.
Description
Technical field
The present invention is about a kind of accelerometer, especially in regard to a kind of capacitance microaccelerator (capacitance micro-accelerometer).
Background technology
Accelerometer is in order to measure the caused accekeration of external force, and it is applied to the for example information such as external force of vehicle automatic safe system to collect relevant vehicle energy and to act on vehicle.Because MEMS (Micro ElectroMechanical System; MEMS) development of technology; Utilize semiconductor technology incorporate mechanical assembly and circuit, produce micro-acceleration gauge, can have low cost, volume and advantages such as weight reduction and production reliability lifting.
Micro-acceleration gauge can be divided into pressure resistance type, condenser type and piezoelectric type or the like according to sensing mode difference; Wherein capacitance microaccelerator uses the change amount of electric capacity; Calculate acceleration magnitude; And can be divided into out-of-plane (out-of plane) and isoplanar (in plane) sensing mechanism according to structural design, the out-of-plane sensing is to utilize large tracts of land to put down shape battery lead plate sensing, and the isoplanar sensing is to utilize the staggered comb electrode that plugs as the sensing mode.
It below is structure with a kind of traditional capacitance microaccelerator 1 of isoplanar sensing mechanism description; It comprises a mass 10, an elastic 11, one first comb electrode 12 and one second comb electrode 13; Mass 10 borrows elastic 11 to be connected in a stiff end 14; Do not receiving under the external force, mass 10 is in a rest position, and first comb electrode 12 is connected in mass 10; Second comb electrode, 13 relative first comb electrodes 12 are arranged at another stiff end 15 places; When mass 10 receives an external force and during along direction of arrow D upper and lower displacement, the spacing of first comb electrode 12 and second comb electrode 13 changes, utilize the capacitance change that measures electrode and can calculate corresponding accekeration.
Be to increase the sensing sensitivity of capacitance microaccelerator 1, tradition with the mode of the number that increases comb electrode 12,13 or reduce by first comb electrode 12 and second comb electrode 13 between spacing reach.Yet, just increase comb electrode 12, with regard to 13, certainly will need increase the entire area of micro-acceleration gauge 1 relatively, be provided with so that electrode 12,13 to be provided, but this and do not meet the designer trends of product microminiaturization; In addition, with regard to reduce between 12,13 at the electrode apart from regard to, making apparatus still has its restriction now.
In view of this, how to overcome the problems referred to above, provide a kind of highly sensitive and do not influence the accelerometer of volume microminiaturization, real is one of important topic.
Summary of the invention
Because above-mentioned problem, the object of the invention is to provide a kind of highly sensitive and do not influence the accelerometer of volume microminiaturization.
So,, comprise a fixed cell and a mobile unit according to a kind of accelerometer of the present invention for reaching above-mentioned purpose.This fixed cell has a plurality of first conductive parts that are parallel to each other and a plurality of second conductive part that is parallel to each other; This mobile unit and this fixed cell link; And comprise a body, a plurality of the 3rd conductive part that is parallel to each other and a plurality of the 4th conductive part that is parallel to each other; This body center place has an opening, and these grade in an imperial examination three conducting positions are in an outside of this body, and respectively with the corresponding setting of these first conductive parts; These grade in an imperial examination four conducting positions in this opening to the relative inner in this outside that should body, and respectively with the corresponding setting of these second conductive parts.
For reaching above-mentioned purpose, comprise a fixed cell and a mobile unit according to another kind of accelerometer of the present invention.This fixed cell comprises a substrate, one first conductive component and a location structure, and this first conductive component has a plurality of first conductive parts that are parallel to each other, and this first conductive component is positioned this substrate by this location structure binding; This mobile component and this fixed cell link, and comprise a body and a plurality of second conductive part that is parallel to each other, and these second conducting positions are in one of this body outside, and respectively with the corresponding setting of these first conductive parts.
Hold the above; Because of offering an opening at the body of mobile unit (being mass) according to a kind of accelerometer of the present invention; These conductive parts (being comb electrode) are except an outside that can be arranged at body; Also can be arranged at a body inboard in the outside relatively, the quantity that increases conductive part whereby is to improve the sensitivity of accelerometer.Compare with conventional art,, and do not influence the microminiaturization trend of volume because the present invention is provided with the position by offering the extra conductive part that provides of opening; In addition; The present invention is arranged at these conductive parts of fixed cell on one conductive component; Relending location structure links conductive component and substrate orientation; These conductive parts of fixed cell are oppositely arranged with the conductive part of mobile unit after assembling, and promptly these conductive parts of fixed cell utilize the positioning design of location structure can produce more closely spaced to the coupling conductive part when assembling is inserted in the spacing of these conductive parts of mobile unit respectively; Be to overcome the spacing restricted problem between conventional conductive portion, to improve the sensitivity of accelerometer.
Description of drawings
Fig. 1 is a kind of synoptic diagram of traditional capacitance microaccelerator;
Fig. 2 is the synoptic diagram according to a kind of accelerometer of the preferred embodiment of the present invention;
Fig. 3 is according to the synoptic diagram before a kind of accelerometer combination of another preferred embodiment of the present invention;
Fig. 4 is according to the synoptic diagram after a kind of accelerometer combination of another preferred embodiment of the present invention; And
Fig. 5 is another synoptic diagram according to a kind of accelerometer of another preferred embodiment of the present invention.
The primary clustering symbol description
1 capacitance microaccelerator
10 masses
11 elastic partss
12 first comb electrodes
13 second comb electrodes
14 stiff ends
15 stiff ends
2 accelerometers
20 stiff ends
21 fixed cells
211 first conductive parts
212 second conductive parts
213 substrates
22 mobile unit
221 bodies
2211 outsides
2212 inboards
222 the 3rd conductive parts
223 the 4th conductive parts
224 openings
23 elastic partss
3 accelerometers
30 stiff ends
31 fixed cells
311 first conductive parts
312 the 4th conductive parts
313 substrates
314 first conductive components
315 location structures
3151 holding divisions
3152 elastic
316 second conductive components
32 mobile unit
321 bodies
3211 outsides
3212 inboards
322 second conductive parts
323 the 3rd conductive parts
324 openings
33 elastic partss
The D direction
Embodiment
Below will a kind of accelerometer according to the preferred embodiment of the present invention be described with reference to relevant drawings.
Please with reference to shown in Figure 2, comprise a fixed cell 21 and a mobile unit 22 according to a kind of accelerometer 2 of the preferred embodiment of the present invention.This accelerometer 2 can be a capacitance microaccelerator.
This mobile unit 22 can be a mass; Be suspended in a stiff end 20, in more detail, the relative both sides of this mobile unit 22 link by an elastic parts 23 and this stiff end 20 respectively; Do not receiving external force to do the time spent, this mobile unit 22 is by these elastic 23 supports and be in a rest position.Wherein, this elastic parts 23 can be a spring.
This fixed cell 21 comprises a substrate 213, a plurality of first conductive part 211 that is parallel to each other and a plurality of second conductive part 212 that is parallel to each other.Wherein these first conductive parts 211 form a pectination respectively with these second conductive parts 212; Preferably; These first conductive parts 211 and these second conductive parts 212 can form by manufacture craft such as this substrate of etching; But should be as limit, if form and to implement with electroforming mode, electrodischarge machining mode.
This mobile unit 22 comprises a body 221, a plurality of the 3rd conductive part 222 that is parallel to each other and a plurality of the 4th conductive part 223 that is parallel to each other.Wherein have an opening 224 in this body 221, for example opening 224 can be positioned at the centre of this body 221, but should be as limit; These grade in an imperial examination three conductive parts 222 form pectination, and are connected in an outside 2211 of this body 221, in this, and these first conductive parts 211 of this fixed cell 22 and these grade in an imperial examination three conductive parts 222 corresponding settings; These grade in an imperial examination four conductive parts 223 are positioned at this opening 224, are connected in a relative inner 2212 in this outside 2211 of corresponding these grade in an imperial examination three conductive parts 222 settings, and at this, 212 pairs of these second conductive parts of this fixed cell 21 should be provided with by the 4th conductive part 223.As shown in Figure 2; These first conductive parts 211 are the finger-fork type setting with these grade in an imperial examination three conductive parts 222; And these second conductive parts 212 also are the finger-fork type setting with these grade in an imperial examination four conductive parts 223; And these first conductive parts 211 link (figure does not show) with a power end and an earth terminal respectively with these grade in an imperial examination three conductive parts 222; And these second conductive parts 212 link (figure does not show) with a power end and an earth terminal respectively with these grade in an imperial examination four conductive parts 223; Make to form a plurality of capacitance sensing modular constructions between these first conductive parts 211 and this grade in an imperial examination three conductive parts 222, also form a plurality of capacitance sensing modular constructions between these second conductive parts 212 and this grade in an imperial examination four conductive parts 223 simultaneously.
Hold the above; When this mobile unit 22 receives an external force effect and when producing displacement along a direction D; Between these first conductive parts 211 and this grade in an imperial examination three conductive parts 222 and the spacing between these second conductive parts 212 and this grade in an imperial examination four conductive parts 223 change; Capacitance thereby change that conductive part is 211,222 and 212,223, relatively capacitance change during with rest position, and can push away the acceleration magnitude under the external force effect.
The configuration of described these first conductive parts 211 of the foregoing description, these second conductive parts 212, these grade in an imperial examination three conductive parts 222 and these grade in an imperial examination four conductive parts 223 is merely to be enumerated; Preferably; All there is the configuration of these first conductive parts 211 both sides of this mobile unit 22, to increase the sensitivity of accelerometer under the condition of the finite space; In addition, these first conductive parts 211 of the both sides of this mobile unit 22 can be symmetry or asymmetric with the configuration of these grade in an imperial examination three conductive parts 222, and this can obtain its accekeration equally by the difference of the change of the capacitance between it.
For specifying another embodiment provided by the present invention; Please be simultaneously with reference to Fig. 3 and shown in Figure 4; Wherein Fig. 3 is the synoptic diagram of accelerometer before combination of present embodiment; And Fig. 4 is the synoptic diagram of accelerometer after combination of present embodiment, and shown in the figure of present embodiment, accelerometer 3 comprises a fixed cell 31 and a mobile unit 32.This accelerometer 3 is a capacitance microaccelerator.
This mobile unit 32 is identical with previous embodiment; Link by an elastic 33 and a stiff end 30; This mobile unit 32 comprises a body 321 and a plurality of second conductive part 322 that is parallel to each other, and wherein these second conductive parts 322 are positioned at an outside 3211 of this body 321, and are arranged parallel to each other.
This fixed cell 31 comprises a substrate 313, one first conductive component 314 and a location structure 315.
This first conductive component 314 has a plurality of first conductive parts 311 that are parallel to each other; This first conductive component 314 is positioned this substrate 313 by these location structure 315 bindings, and makes these first conductive parts 311 and these second conductive part, 322 corresponding formation finger-fork type settings.
Shown in present embodiment; This location structure 315 comprises a holding division 3151 and an elastic 3152; In detail; This holding division 3151 can be linked on this first conductive component 314, and this elastic 3152 can be linked on this substrate 313, by connected modes such as mutual engagings this first conductive component 314 accurately is positioned on this substrate 313; Certainly vice versa for above-mentioned structure, and this holding division 3151 also can be linked on this substrate 313, and this elastic 3152 is linked on this first conductive component 314, reaches the positioning relation of this first conductive component 314 and this substrate 313; Preferably, this holding division 3151 can be a trip.
Because the technology of present embodiment is mainly in the spacing that reduces between these first conductive parts 311 and these second conductive parts 322; And then the sensitivity of lifting accelerometer; So present embodiment is when forming this above-mentioned fixed cell 31 with this mobile unit 32; The vertical view of its accelerometer 3 is as shown in Figure 3; Wherein these first conductive parts 311 and the setting of the not corresponding as yet formation finger-fork type of these second conductive parts 322, wherein the spacing between the spacing between these first conductive parts 311 and these second conductive parts 322 is processed and make its accelerometer 3 be very easy to use etching process, electroforming mode or electrodischarge machining modes of present stage greater than 5 μ m; Then; After this first conductive component 314 is close to this mobile unit 32 by above-mentioned location structure 315; Reach the positioning relation of this first conductive component 314 and this substrate 313, as shown in Figure 4, this moment, one of them the spacing of one of them and these second conductive parts 322 of these first conductive parts 311 was not more than 1 μ m; By dwindling, improve the sensitivity of accelerometer to the spacing between the coupling conductive part.
In addition, above-mentioned location structure 315 can also by one then portion's (not shown) and 3152 of elastic constitute, that is to say; First conductive component 314 after forming, can be close to this mobile unit 32 by elastic 3152 guidings after, so that then portion is fixing with first conductive component 314; Can reach above-mentioned effect equally, wherein, then portion can be colloid; Can form by a glue mode; Or then portion also can be the welding body, is formed by welding manner, makes the positioning relation of reaching this first conductive component 314 and this substrate 313.
As shown in Figure 5, this body 321 of this mobile unit 32 also can have an opening 324, and this mobile unit 32 more can comprise a plurality of the 3rd conductive parts 323 that are parallel to each other, and this outside 3211 is arranged at the interior relative inner 3212 of this opening 324 relatively.This fixed cell 31 more can comprise one second conductive component 316, and it has a plurality of the 4th conductive parts 312 that are parallel to each other, and with these grade in an imperial examination three conductive parts 323 corresponding formation finger-fork type settings.
Hold the above; This second conductive component 316 is linked to the same side (figure does not show) with this fixed cell 31; Make this second conductive component 316 not have relative motion compared to this fixed cell 31; Make these grade in an imperial examination four conductive parts 312 finger-fork types be arranged at this grade in an imperial examination three conductive parts 323, be not more than 1 μ m in one of them spacing of one of them and these grade in an imperial examination four conductive parts 312 of these these grade in an imperial examination three conductive parts 323, by dwindling to the spacing between the coupling conductive part; Increase the quantity of conductive part simultaneously, further improve the sensitivity of accelerometer.The modular construction of this location structure of present embodiment, functional character as stated, so repeat no more.
Because this mobile unit 32 of present embodiment is provided with relation as stated with the binding of this fixed cell 31; And this substrate 313 of present embodiment, these first conductive parts 311, this body 321, these second conductive parts 322, this grade in an imperial examination three conductive parts 323, these grade in an imperial examination four conductive parts 312 have identical formation and function with this substrate 213 of the foregoing description, these first conductive parts 211, this body 221, this grade in an imperial examination three conductive parts 222, these grade in an imperial examination four conductive parts 223 with these second conductive parts 212 respectively, so also repeat no more.
In sum; Because of foundation a kind of accelerometer of the present invention is to offer an opening at the body of mobile unit (being mass); These conductive parts (being comb electrode) are except an outside that can be arranged at body; Also can be arranged at a body inboard in the outside relatively, the quantity that increases conductive part whereby is to improve the sensitivity of accelerometer.Compare with conventional art,, and do not influence the microminiaturization trend of volume because the present invention is by offering the extra position that is provided with that conductive part is provided of opening; In addition; The present invention is arranged at these conductive parts of fixed cell on one conductive component; Relending location structure links conductive component and substrate orientation; These conductive parts of fixed cell are oppositely arranged in the conductive part of assembling back and mobile unit, when promptly these conductive parts of fixed cell are in the spacing of assembling these conductive parts that are inserted in mobile unit respectively, utilize the positioning design of location structure can produce more closely spaced the coupling conductive part; Be to overcome the spacing restricted problem between conventional conductive portion, to improve the sensitivity of accelerometer.
The above is merely illustrative, but not is restricted person.Anyly do not break away from spirit of the present invention and category, and, all should be contained in claims its equivalent modifications of carrying out or change.
Claims (9)
1. accelerometer comprises:
One fixed cell comprises:
One substrate;
One first conductive component has a plurality of first conductive parts; And
One location structure, this first conductive component is positioned this substrate by this location structure binding; And
One mobile unit links with a stiff end, comprising:
One body; And
A plurality of second conductive parts are positioned at the outside of this body, and respectively with the corresponding setting of this first conductive part,
Wherein, this location structure comprises a holding division and an elastic, and this holding division is positioned on this first conductive component and this elastic is positioned on this substrate, or this holding division is positioned on this substrate and this elastic is positioned on this first conductive component.
2. accelerometer comprises:
One fixed cell comprises:
One substrate;
One first conductive component has a plurality of first conductive parts; And
One location structure, this first conductive component is positioned this substrate by this location structure binding; And
One mobile unit links with a stiff end, comprising:
One body; And
A plurality of second conductive parts are positioned at the outside of this body, and respectively with the corresponding setting of this first conductive part,
Wherein, this location structure comprises that one follows a portion and an elastic, and the portion of should following is positioned on this first conductive component and this elastic is positioned on this substrate, and the portion of maybe should following is positioned on this substrate and this elastic is positioned on this first conductive component.
3. accelerometer according to claim 1 is characterized in that, this holding division is a trip, and this elastic is a spring or a shell fragment.
4. accelerometer according to claim 2 is characterized in that, then portion is a colloid.
5. accelerometer according to claim 1 and 2 is characterized in that, this first conductive part and this second conductive part are the finger-fork type setting, and the spacing of this first conductive part and adjacent this second conductive part is not more than 1 μ m.
6. accelerometer according to claim 1 and 2 is characterized in that, this body of this mobile unit has an opening, and wherein this mobile unit also comprises a plurality of the 3rd conductive parts, is positioned at an inboard of this opening.
7. accelerometer according to claim 6 is characterized in that, this fixed cell also comprises one second conductive component, and it has a plurality of the 4th conductive parts, and corresponding with the 3rd conductive part respectively setting.
8. accelerometer according to claim 7 is characterized in that, the 3rd conductive part and the 4th conductive part are the finger-fork type setting, and the spacing of the 3rd conductive part and adjacent the 4th conductive part is not more than 1 μ m.
9. accelerometer according to claim 1 and 2 is characterized in that, is a capacitance microaccelerator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2006100051795A CN101000360B (en) | 2006-01-13 | 2006-01-13 | Accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2006100051795A CN101000360B (en) | 2006-01-13 | 2006-01-13 | Accelerometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101000360A CN101000360A (en) | 2007-07-18 |
| CN101000360B true CN101000360B (en) | 2012-05-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100051795A Expired - Fee Related CN101000360B (en) | 2006-01-13 | 2006-01-13 | Accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101000360B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200322731A1 (en) * | 2013-10-17 | 2020-10-08 | Merry Electronics(Shenzhen) Co., Ltd. | Acoustic transducer |
| JP2017020897A (en) * | 2015-07-10 | 2017-01-26 | セイコーエプソン株式会社 | Physical quantity sensor, electronic apparatus and mobile body |
| CN106597016B (en) * | 2016-12-22 | 2022-12-27 | 四川知微传感技术有限公司 | Capacitive MEMS (micro-electromechanical system) double-axis accelerometer |
| IT201900009651A1 (en) | 2019-06-20 | 2020-12-20 | St Microelectronics Srl | MEMS INERTIAL SENSOR WITH HIGH RESISTANCE TO THE PHENOMENON OF ADHESION |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5780740A (en) * | 1995-10-27 | 1998-07-14 | Samsung Electronics Co., Ltd. | Vibratory structure, method for controlling natural frequency thereof, and actuator, sensor, accelerator, gyroscope and gyroscope natural frequency controlling method using vibratory structure |
| CN2338750Y (en) * | 1998-07-14 | 1999-09-15 | 中国科学院上海冶金研究所 | Grate structure and capacity type miniature acceleration sensor |
| US6070464A (en) * | 1997-09-05 | 2000-06-06 | Motorola, Inc. | Sensing structure comprising a movable mass and a self-test structure |
| CN2424450Y (en) * | 2000-06-02 | 2001-03-21 | 中国科学院上海冶金研究所 | Micromechanical comb capacity type acceleration transducer |
| US6591678B2 (en) * | 2000-10-24 | 2003-07-15 | Denso Corporation | Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion |
-
2006
- 2006-01-13 CN CN2006100051795A patent/CN101000360B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5780740A (en) * | 1995-10-27 | 1998-07-14 | Samsung Electronics Co., Ltd. | Vibratory structure, method for controlling natural frequency thereof, and actuator, sensor, accelerator, gyroscope and gyroscope natural frequency controlling method using vibratory structure |
| US6070464A (en) * | 1997-09-05 | 2000-06-06 | Motorola, Inc. | Sensing structure comprising a movable mass and a self-test structure |
| CN2338750Y (en) * | 1998-07-14 | 1999-09-15 | 中国科学院上海冶金研究所 | Grate structure and capacity type miniature acceleration sensor |
| CN2424450Y (en) * | 2000-06-02 | 2001-03-21 | 中国科学院上海冶金研究所 | Micromechanical comb capacity type acceleration transducer |
| US6591678B2 (en) * | 2000-10-24 | 2003-07-15 | Denso Corporation | Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion |
Non-Patent Citations (1)
| Title |
|---|
| JP特开平7-5194A 1995.01.10 |
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