CN100585890C - Luminous chip packaging body and manufacturing method therefor - Google Patents

Luminous chip packaging body and manufacturing method therefor Download PDF

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Publication number
CN100585890C
CN100585890C CN200610146448A CN200610146448A CN100585890C CN 100585890 C CN100585890 C CN 100585890C CN 200610146448 A CN200610146448 A CN 200610146448A CN 200610146448 A CN200610146448 A CN 200610146448A CN 100585890 C CN100585890 C CN 100585890C
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CN
China
Prior art keywords
thin film
film layer
wiring thin
encapsulation body
sealing
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Expired - Fee Related
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CN200610146448A
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Chinese (zh)
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CN101179103A (en
Inventor
潘玉堂
周世文
刘孟学
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Chipmos Technologies Inc
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Chipmos Technologies Inc
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Priority to CN200610146448A priority Critical patent/CN100585890C/en
Publication of CN101179103A publication Critical patent/CN101179103A/en
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Publication of CN100585890C publication Critical patent/CN100585890C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention discloses a luminescent chip package manufacturing method. Joint a patterned metal plate and a substrate, and the patterned metal plate comprises at least a heat-dissipating plate and a plurality of contacts and the heat-dissipating plate is among the contacts. Joint a thin film circuit layer and patterned metal plate, thus forming a plurality of conductors to connect thin film circuit layer and contacts. Form at least a first adhesive sealing to cover patterned metal plate, conductor and partial thin film circuit layer. Equip the thin film circuit layer exposed by the first adhesive sealing is with at least a luminescent chip and the luminescent chip has a plurality of bumps, through which the luminescent chip connects with the electrical property of thin film circuit layer. Perform a cutting procedure to form a luminescent chip package and removing substrate. Therefore the luminescent chip package has excellent heat emission efficiency.

Description

Luminous chip encapsulation body and manufacture method thereof
Technical field
The present invention is relevant for a kind of light source module, and is particularly to a kind of light source module that adopts luminous chip encapsulation body.
Background technology
In recent years, utilize the compound semiconductor of nitrogen gallium, (light emitting diode, LED) element gets most of the attention as the light-emitting diode of gallium nitride (GaN), aluminium gallium nitride alloy (AlGaN), InGaN (InGaN) etc.III-nitride is the material of a broadband energy gap, and its emission wavelength can be contained to ruddiness from ultraviolet light always, therefore can say so and almost contain the wave band of whole visible light.In addition, compared to conventional bulb, light-emitting diode has absolute advantage, for example volume is little, life-span length, low-voltage/current drives, be difficult for breaking, do not contain mercury (not having pollution problem) and the good characteristics such as (power savings) of luminous efficiency, so the application of light-emitting diode on industry is very extensive.
Because the luminescence phenomenon of light-emitting diode does not belong to thermoluminescence or Discharge illuminating, but it is luminous to belong to cold property, thus light-emitting diode assembly under the good situation of heat radiation, the life-span was more than 100,000 hours, and need not warm up the lamp time (idling time).In addition, light-emitting diode assembly have reaction speed fast (be about 10-9 second), volume little, power-saving, pollute low (not containing mercury), high-reliability, be fit to advantages such as volume production, so the field of its application is very extensive.Therefore, light-emitting diode is regarded as most important light source of 21 century.
Yet, because the light-emitting diode running time can produce a large amount of heat energy, and the brightness of light-emitting diode and life-span all can be subjected to Temperature Influence, therefore when the power of light-emitting diode increased, the demand of heat radiation is just increase gradually also.Prior art is to use complicated cooling system, yet complicated cooling system also can cause problems such as the excessive and cost increase of volume.
Summary of the invention
In view of this, the purpose of this invention is to provide a kind of manufacture method of luminous chip encapsulation body, have luminous chip encapsulation body than the long life with manufacturing.
In addition, the purpose of this invention is to provide a kind of luminous chip encapsulation body, to improve radiating efficiency.
For reaching above-mentioned or other purposes, the present invention proposes a kind of manufacture method of luminous chip encapsulation body, and it comprises the following steps.At first, engage a pattern metal plate and a base material, and the pattern metal plate comprises at least one heating panel and a plurality of contact, wherein heating panel is between contact.Engage a wiring thin film layer and pattern metal plate.Form many leads, to connect between wiring thin film layer and the contact.Form one first sealing on base material, this first sealing has an opening, exposes part wiring thin film layer, with overlay pattern metallic plate, lead and part wiring thin film layer.At least one luminescence chip of configuration on the wiring thin film layer that the first sealing opening is exposed, and luminescence chip has a plurality of projections, and luminescence chip electrically connects via these projections and wiring thin film layer.Carry out a cutting processing procedure, to form at least one luminous chip encapsulation body.Remove this base material at last again.
In one embodiment of this invention, after the configuration luminescence chip, the manufacture method of luminous chip encapsulation body also comprises formation one primer, to coat those projections.
In one embodiment of this invention, after forming primer, the manufacture method of luminous chip encapsulation body also is included on the wiring thin film layer that first sealing exposed and forms one second sealing, to coat luminescence chip.
In one embodiment of this invention, after the configuration luminescence chip, the manufacture method of luminous chip encapsulation body also is included in and forms one second sealing on the wiring thin film layer that this first sealing exposed, to coat luminescence chip.
In one embodiment of this invention, engaging the patterning metallic plate comprises with the step of base material and engages a metallic plate and base material.Carry out a patterning process for metallic plate, to form the pattern metal plate.
In one embodiment of this invention, the step of bonding film line layer and pattern metal plate is included in and forms an insulation glue-line on the heating panel.By insulation glue-line bonding film line layer and pattern metal plate.
For reaching above-mentioned or other purposes, the present invention proposes a kind of luminous chip encapsulation body, and it comprises a heating panel, a plurality of contact, a wiring thin film layer, many leads, one first sealing and at least one luminescence chips.Wherein, these joint configuration are in the heating panel outside.The wiring thin film layer is disposed on the heating panel, and is electrically insulated with heating panel.These leads connect between wiring thin film layer and the contact.First sealing is disposed at heating panel top, and covers lead, contact and part wiring thin film layer, and first sealing has an opening, exposes part wiring thin film layer.Luminescence chip is disposed on the wiring thin film layer that opening exposes, and luminescence chip has a plurality of projections, and luminescence chip electrically connects by projection and wiring thin film layer.
In one embodiment of this invention, the wiring thin film layer comprises a patterned metal layer and a welding cover layer that is disposed on the patterned metal layer.
In one embodiment of this invention, luminous chip encapsulation body also comprises a primer, it is disposed between luminescence chip and the wiring thin film layer, to coat projection, and luminescence chip has an active surface and a back side, wherein projection is disposed on the active surface, and primer and expose the back side of luminescence chip.
In one embodiment of this invention, luminous chip encapsulation body also comprises one second sealing, and it is disposed in the opening, to coat luminescence chip and primer.
In one embodiment of this invention, luminous chip encapsulation body also comprises one second sealing, and it is disposed in the opening, to coat luminescence chip.
In one embodiment of this invention, luminous chip encapsulation body also comprises an insulation glue-line, and it is disposed between wiring thin film layer and the heating panel.
In one embodiment of this invention, heating panel and contact are copline, and are made of identical material.
In one embodiment of this invention, the edge of the edge of first sealing and contact trims.
In one embodiment of this invention, the width of opening increases toward the direction away from the wiring thin film layer gradually from the wiring thin film layer.
In one embodiment of this invention, luminescence chip comprises light-emitting diode or Organic Light Emitting Diode.
Based on above-mentioned, because the present invention engages the wiring thin film layer with metallic plate, with the carrying luminescence chip, therefore luminous chip encapsulation body of the present invention has preferable radiating efficiency and long useful life.
For above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. is described in detail below.
Description of drawings
Figure 1A to Fig. 1 H is the generalized section according to the manufacture method of a kind of luminous chip encapsulation body of one embodiment of the invention.
Fig. 2 is according to the profile of a kind of luminous chip encapsulation body of one embodiment of the invention.
Embodiment
Figure 1A to Fig. 1 H is the generalized section according to the manufacture method of a kind of luminous chip encapsulation body of one embodiment of the invention.Please refer to Figure 1A, at first, provide a metallic plate 110 and a base material 210, and base material 210 can be a removable temporary supporting body, for example is winding or other films that easily separates with metallic plate 110.In addition, the material of metallic plate 110 can be that copper, aluminium or other have the metal of high heat-conduction coefficient.Then, bonding metal plates 110 and base material 210, and metallic plate 110 for example engages by a glue-line (not illustrating) with base material 210.
Please refer to Figure 1B, carry out a patterning process, to form pattern metal plate 110a for metallic plate 110.This pattern metal plate 110a comprises a plurality of heating panels 112 and a plurality of contacts 114, and wherein these heating panels 112 are between contact 114.Yet present embodiment does not limit the quantity of heating panel 112 and contact 114.For example, the quantity of the heating panel 112 of present embodiment can be 1.In addition, patterning process comprises lithographic process and etch process.Though it is first bonding metal plates 110 and base material 210 that present embodiment discloses the generation type of pattern metal plate 110a, just forms pattern metal plate 110a then.Yet, in another embodiment, also can directly provide a pattern metal plate 110a, and engage patterning metallic plate 110a and base material 210.
Please refer to Fig. 1 C, a wiring thin film layer 120 is provided, and engage this wiring thin film layer 120 and pattern metal plate 110a.In the present embodiment, wiring thin film layer 120 comprises a patterned metal layer 122 and a welding cover layer 124 that is disposed on the patterned metal layer 122.Yet present embodiment does not limit wiring thin film layer 120 and has the individual layer circuit, and wiring thin film layer 120 also can be to have multilayer line.In addition, when the bottom of wiring thin film layer 120 was metal level, bonding film line layer 120 was included in formation one insulation glue-line 130 on the heating panel 112 with the step of pattern metal plate 110a.Then, by insulation glue-line 130 bonding film line layers 120 and pattern metal plate 110a.Moreover when the bottom of wiring thin film layer 120 was dielectric layer, wiring thin film layer 120 also can or directly engage with pattern metal plate 110a via insulation glue-line 130.
Please refer to Fig. 1 D, carry out a routing processing procedure (wire bonding process), forming many leads 140, and these leads 140 connect between wiring thin film layers 120 and the contact 114.In addition, the material of lead 140 can be gold, copper or other metals.
Please refer to Fig. 1 E, carry out a manufacture procedure of adhesive (molding process), with formation one first sealing 150 on base material 210, and first sealing, 150 overlay pattern metallic plate 110a, lead 140 and part wiring thin film layer 120 and contact 114.Opening 150a that it should be noted that first sealing 150 needs expose portion wiring thin film layer 120, so that dispose luminescence chip 160 (describing in detail as the back) in processing procedure subsequently.In addition, after forming first sealing 150, also can on the inwall of opening 150a, for example form a metallic reflector (not illustrating), to improve the reflectivity of first sealing 150 with the evaporation processing procedure.
Please refer to Fig. 1 F, the a plurality of luminescence chips 160 of configuration on the wiring thin film layer 120 that first sealing 150 is exposed, and each luminescence chip 160 has an active surface 160a, a back side 160b and a plurality of projection 162, wherein projection 162 is disposed on the active surface 160a, and these luminescence chips 160 electrically connect via these projections 162 and wiring thin film layer 120.
Please refer to Fig. 1 G, in order more to guarantee to electrically connect between projection 162 and the wiring thin film layer 120, after configuration luminescence chip 160, also can form a primer 170, with coating projection 162, and primer 170 can expose the back side 160b of luminescence chip 160.In addition, after forming primer 170, also can on the wiring thin film layer 120 that first sealing 150 is exposed, form one second sealing 180, to coat luminescence chip 160.Perhaps, after configuration luminescence chip 160, directly form second sealing 180 and do not form primer 170.
Please refer to Fig. 1 H,, carry out a cutting processing procedure, to form a plurality of luminous chip encapsulation bodies 100 for the formed structure of above-mentioned processing procedure.Then, remove base material 210.So far, roughly finish the manufacturing process of luminous chip encapsulation body 100.It should be noted that after configuration luminescence chip 160, also can directly cut processing procedure.Perhaps, after forming primer 170, cut processing procedure.At configuration luminescence chip 160 and after directly forming second sealing 180, cut processing procedure.In addition, will describe in detail relevant for the structure of this luminous chip encapsulation body 100 as after.
Fig. 2 is according to the profile of a kind of luminous chip encapsulation body of one embodiment of the invention.Please refer to Fig. 2, the luminous chip encapsulation body 100 of present embodiment comprises a heating panel 112, a plurality of contact 114, a wiring thin film layer 120, many leads 140, first sealing 150 and at least one luminescence chip 160.Wherein, these contacts 114 are disposed at heating panel 112 outsides.In the present embodiment, because heating panel 112 and contact 114 formed by same metallic plate, so heating panel 112 and contact 114 be copline, and be made of identical material.Yet, in another embodiment, also can have a difference in height between heating panel 112 and the contact 114.In addition, in another embodiment, heating panel 112 more can be made of unlike material with contact 114.
Wiring thin film layer 120 is disposed on the heating panel 114, and is electrically insulated with heating panel 114.In the present embodiment, wiring thin film layer 120 comprises a patterned metal layer 122 and a welding cover layer 124 that is disposed on the patterned metal layer 122.Yet present embodiment does not limit wiring thin film layer 120 and has the individual layer circuit, and wiring thin film layer 120 also can be to have multilayer line.
In addition, when the bottom of wiring thin film layer 120 was metal level, luminous chip encapsulation body 100 also comprised an insulation glue-line 130, and it is disposed between wiring thin film layer 120 and the heating panel 112.Yet when the bottom of wiring thin film layer 120 was dielectric layer, wiring thin film layer 120 also can or directly engage with heating panel 112 via insulation glue-line 130.In addition, insulation glue-line 130 also can have thermal conduction characteristic, in order to conducting the heat that luminescence chip 160 is produced.
Please continue with reference to figure 2, these leads 140 connect wiring thin film layer 120 and contact 114.In addition, first sealing 150 is disposed at heating panel 112 tops, and covers lead 140, contact 114 and part wiring thin film layer 120.First sealing 150 has an opening 150a, exposes part wiring thin film layer 120.In the present embodiment, in order to improve the utilization rate of the light that is sent for luminescence chip 160, the width of opening 150a increases toward the direction away from wiring thin film layer 120 gradually from wiring thin film layer 120, so that the light that reflection luminescence chip 160 is sent.In addition, on the inwall of opening 150a, also can form a metallic reflector (not illustrating), to improve reflectivity.Moreover because first sealing 150 and contact 114 process cuttings, therefore the edge of first sealing 150 and the edge of contact 114 trim.
Luminescence chip 160 is disposed on the wiring thin film layer 120 that opening 150a exposed, and luminescence chip 160 has an active surface 160a, a back side 160b and a plurality of projection 162.Wherein projection 162 is disposed on the active surface 160a, and luminescence chip electrically connects by projection 162 and wiring thin film layer 120.More specifically, projection 162 electrically connects with the patterned metal layer 122 of wiring thin film layer 120.Only have single luminescence chip 160 though it should be noted that the luminous chip encapsulation body 100 of present embodiment, yet in another embodiment, luminous chip encapsulation body 100 also can comprise a plurality of luminescence chips 160.In addition, luminescence chip 160 comprises light-emitting diode or Organic Light Emitting Diode.
Luminous chip encapsulation body 100 also can comprise a primer 170 and/or one second sealing 180, and wherein primer 170 is disposed between luminescence chip 160 and the wiring thin film layer 120, coating projection 162, and exposes the back side 160b of luminescence chip 160.Moreover it is disposed at second sealing 180 in the opening 150a, to coat luminescence chip 160 and primer 170.In addition, second sealing 180 is a transparent material, so the light that luminescence chip 160 is sent can penetrate second sealing 180.
It should be noted that second sealing 180 also can be doped with fluorescent material.
In sum, luminous chip encapsulation body of the present invention and manufacture method thereof have following advantage at least:
One, the present invention engages the wiring thin film layer with the substrate with high thermal conductivity, so the heat energy that the luminescence chip running time is produced reaches the external world by extremely short path, to improve the useful life and the luminous efficiency of luminescence chip.
Two, the contact of luminous chip encapsulation body of the present invention is positioned at bottom or side, so this luminous chip encapsulation body can be with surface mount technology (SMT) or pluggable mode and the assembling of other electronic installations.
Three, if select second sealing and the welding cover layer of suitable material for use, then the absorbed ratio of the light that luminescence chip sent will descend.
Four, owing to luminescence chip electrically connects with chip bonding mode and wiring thin film layer, so the light that luminescence chip sent more is not subject to the interference of other members.
Though the present invention discloses as above with preferred embodiment; right its is not in order to qualification the present invention, any those of ordinary skills, without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is when with being as the criterion that claim was defined.

Claims (16)

1. the manufacture method of a luminous chip encapsulation body comprises:
Engage a pattern metal plate and a base material, and this pattern metal plate comprises at least one heating panel and a plurality of contact, wherein this heating panel is between those contacts;
Engage a wiring thin film layer and this pattern metal plate;
Form many leads, to connect this wiring thin film layer and those contacts;
Form at least one first sealing on this base material, this first sealing has an opening, exposes part wiring thin film layer, to cover this pattern metal plate, those leads and this wiring thin film layer of part;
At least one luminescence chip of configuration on this wiring thin film layer that this first sealing opening is exposed, and this luminescence chip has a plurality of projections, and this luminescence chip electrically connects via those projections and this wiring thin film layer;
Carry out a cutting processing procedure, to form at least one luminous chip encapsulation body; And
Remove this base material.
2. the manufacture method of luminous chip encapsulation body as claimed in claim 1 is characterized in that, after this luminescence chip of configuration, also comprises forming a primer, to coat those projections.
3. the manufacture method of luminous chip encapsulation body as claimed in claim 2 is characterized in that, after forming this primer, also is included on this wiring thin film layer that this first sealing exposed and forms one second sealing, to coat this luminescence chip.
4. the manufacture method of luminous chip encapsulation body as claimed in claim 1 is characterized in that, after this luminescence chip of configuration, also is included in and forms one second sealing on this wiring thin film layer that this first sealing exposed, to coat this luminescence chip.
5. the manufacture method of luminous chip encapsulation body as claimed in claim 1 is characterized in that, engages this pattern metal plate and this base material and comprises:
Engage a metallic plate and this base material; And
Carry out a patterning process for this metallic plate, to form this pattern metal plate.
6. the manufacture method of luminous chip encapsulation body as claimed in claim 1 is characterized in that, engages this wiring thin film layer and this pattern metal plate comprises:
On those heating panels, form an insulation glue-line; And
Engage this wiring thin film layer and this pattern metal plate by this insulation glue-line.
7. luminous chip encapsulation body comprises:
One heating panel;
A plurality of contacts are disposed at this heating panel outside;
One wiring thin film layer is disposed on this heating panel, and is electrically insulated with this heating panel;
Many leads connect this wiring thin film layer and those contacts;
One first sealing is disposed at this heating panel top, and covers those leads, those contacts and this wiring thin film layer of part, and this first sealing has an opening, exposes this wiring thin film layer of part; And
At least one luminescence chip be disposed on this wiring thin film layer that this opening exposes, and this luminescence chip has a plurality of projections, and this luminescence chip is by those projections and the electric connection of this wiring thin film layer.
8. luminous chip encapsulation body as claimed in claim 1 is characterized in that, this wiring thin film layer comprises a patterned metal layer and a welding cover layer that is disposed on this patterned metal layer.
9. luminous chip encapsulation body as claimed in claim 7, it is characterized in that, also comprise a primer, be disposed between this luminescence chip and this wiring thin film layer, to coat those projections, and this luminescence chip has an active surface and a back side, and wherein those projections are disposed on this active surface, and this primer exposes this back side.
10. luminous chip encapsulation body as claimed in claim 9 is characterized in that, also comprises one second sealing, is disposed in this opening, to coat this luminescence chip and this primer.
11. luminous chip encapsulation body as claimed in claim 7 is characterized in that, also comprises one second sealing, is disposed in this opening, to coat this luminescence chip.
12. luminous chip encapsulation body as claimed in claim 7 is characterized in that, also comprises an insulation glue-line, is disposed between this wiring thin film layer and this heating panel.
13. luminous chip encapsulation body as claimed in claim 7 is characterized in that, this heating panel and those contacts are copline, and are made of identical material.
14. luminous chip encapsulation body as claimed in claim 7 is characterized in that, the edge of this first sealing and the edge of those contacts trim.
15. luminous chip encapsulation body as claimed in claim 7 is characterized in that, the width of this opening increases toward the direction away from this wiring thin film layer gradually from this wiring thin film layer.
16. luminous chip encapsulation body as claimed in claim 7 is characterized in that, this luminescence chip comprises light-emitting diode or Organic Light Emitting Diode.
CN200610146448A 2006-11-06 2006-11-06 Luminous chip packaging body and manufacturing method therefor Expired - Fee Related CN100585890C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200610146448A CN100585890C (en) 2006-11-06 2006-11-06 Luminous chip packaging body and manufacturing method therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200610146448A CN100585890C (en) 2006-11-06 2006-11-06 Luminous chip packaging body and manufacturing method therefor

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CN101179103A CN101179103A (en) 2008-05-14
CN100585890C true CN100585890C (en) 2010-01-27

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101777542B (en) * 2009-01-14 2011-08-17 南茂科技股份有限公司 Chip packaging structure and packaging method
TWI445100B (en) * 2011-05-20 2014-07-11 Subtron Technology Co Ltd Package structure and manufacturing method thereof
CN104124237A (en) * 2013-04-26 2014-10-29 光明半导体(天津)有限公司 Light-emitting diode packaging piece and manufacturing method thereof
CN104124239A (en) * 2013-04-29 2014-10-29 展晶科技(深圳)有限公司 Light emitting diode module
US11107744B2 (en) * 2017-01-22 2021-08-31 Rayben Technologies (Zhuhai) Limited Insulated gate bipolar transistor module and manufacturing method thereof

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