CN100584988C - Method and equipment for planar reciprocating motion for spraying to deposit multilayer composite material - Google Patents
Method and equipment for planar reciprocating motion for spraying to deposit multilayer composite material Download PDFInfo
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- CN100584988C CN100584988C CN200710010694A CN200710010694A CN100584988C CN 100584988 C CN100584988 C CN 100584988C CN 200710010694 A CN200710010694 A CN 200710010694A CN 200710010694 A CN200710010694 A CN 200710010694A CN 100584988 C CN100584988 C CN 100584988C
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Abstract
The planar reciprocating process for spraying and depositing multilayer composite material includes pressurizing metal liquid inside crucible with inert gas for the metal liquid to be sprayed through the pore in the bottom of the crucible and to be deposited on the substrate, reciprocating the substrate horizontally and moving the substrate vertically. The corresponding apparatus includes one vacuum furnace body, one deposited substrate elevating mechanism, one deposited substrate, one low temperature inert gas forced cooler, one inert gas pressurized sprayer, one crucible-spray gun assembly, one inducing heater, one horizontal reciprocating guide board, one vacuumizing unit, one exhaust valve and one protecting gas intake valve. The present invention is used in making lumpy deposited multilayer noncrystalline and nanometer crystalline metal material.
Description
Technical field:
The present invention relates to multilayer spraying deposition method and equipment that a kind of preparation has the stratified composite of large block amorphous, nanocrystalline structure, especially a kind of preparation method of planar reciprocating spraying to deposit multilayer composite material and equipment, the matrix material of preparation can be widely used in fields such as electronics, aerospace, chemical industry, machinery.
Background technology:
Spray deposition technique is that the Singer by Britain teaches in the seventies and proposes the earliest, principle is: molten metal or alloy are atomized in inert atmosphere forms particle jetting stream, inject directly on and force on the refrigerative matrix, through bump, coalescent, solidify and form settling.Spray deposition technique is a kind of novel blank-making method, is widely used in various alloys of preparation and matrix material pipe thereof, slab, ingot blank etc.In recent years, though spray deposition technique has obtained fast development, all be the principle that adopts professor Singer to propose in essence.Existing spray deposition technique adopts the rotation shape to coat sedimentary mode, so multilayer material is difficult to control the structural uniformity of each layer metal for the rotation shape coats deposition material, can't obtain the stratified composite of two dimensional structure.
Summary of the invention:
At above-mentioned the deficiencies in the prior art, of the present inventionly provide a kind of method and apparatus that can prepare the multi-layer spray deposition of plane multilayer materials large deposited blank.
For achieving the above object, the technical solution used in the present invention is: a kind of preparation method of planar reciprocating spraying to deposit multilayer composite material, put in the crucible group of forming by many crucible linear arrangement and treat sedimentary different kinds of metals raw material, body of heater is evacuated down to 10
-3～10
-5Pa charges into melting protection rare gas element to 0.01～1 normal atmosphere then.Utilize induction heating that raw metal is melted, after treating that alloy solution evenly, carrying out the rare gas element pressurization in crucible makes molten metal be ejected on the deposition substrate through the hole of crucible bottom, substrate is done horizontal reciprocating movement simultaneously, molten metal will be frozen into amorphous with laminate structure or nanocrystalline strip on substrate, and back and forth deposit composite multi-layer, every layer of composite bed is the different kinds of metals layer, thereby obtains to have amorphous, nanocrystalline, the brilliant isostructural multilayer materials of micron and gradient material.
The horizontal reciprocating movement of deposition substrate and vertical movement are decided according to the material of concrete melting and to the requirement of product, for example, whether need chemical reaction etc. between the grain fineness number of product, the thickness of each layer and each layer.The tangential movement velocity range of deposition substrate is 0～2 meter per second; The vertical movement velocity range is 0～0.1 meter per second.
Crucible pass nozzle diameter is 0.2～2mm; Slit-type nozzle width 0.2～2mm, length is 0.3～100mm.
Distance between nozzle and the sedimentation products is 0.5～200mm.
The equipment of its preparation comprises: vacuum furnace body (5) and be in deposition substrate hoisting appliance (1), deposition substrate (3), low temperature rare gas element forced cooling device (4), rare gas element in the vacuum furnace body (5) and spray pressurizing device (6), crucible spray gun group (7), induction heating device (8), horizontal reciprocating movement guide plate (2) and be in vacuum extractor (11), vent valve (12), shielding gas intake valve (10) on the vacuum furnace body (5).Deposition substrate (3) is on the horizontal reciprocating movement guide plate (2).Deposition substrate hoisting appliance (1) is connected with horizontal reciprocating movement guide plate (2).Crucible spray gun group (7) is positioned at deposition substrate (3) top, sprays pressurizing device (6) with rare gas element and is connected with induction heating device (8).Crucible spray gun group (7) is made up of 1 or many quartz, graphite or ceramic crucibles, and crucible bottom has the slit of aperture or certain width.Low temperature rare gas element forced cooling device (4) is positioned at the top of deposition substrate (3).
Characteristics: the present invention can be with multiple metal and alloy, by melting, injection is prepared into the bulk stratified composite, by forcing cooling, can obtain amorphous, nano crystal metal material that the bulk deposition multilayer is piled up, by to spraying the control of crucible, can control the arrangement mode of composite bed; By adjusting, can control the thickness of each layer of matrix material to to-and-fro movement guide plate speed; By regulating speed of cooling, can control grain fineness number, tissue and the structure of metal.
Description of drawings:
Fig. 1 is a structural representation of the present invention.
Fig. 2 is a fundamental diagram of the present invention.
Fig. 3 is planar reciprocating jet deposition Fe, Ni, Cu stratified composite synoptic diagram.
Embodiment:
As depicted in figs. 1 and 2: a kind of preparation method of planar reciprocating spraying to deposit multilayer composite material, put in the crucible group and treat sedimentary different kinds of metals raw material, body of heater is evacuated down to 10
-2～10
-5Pa charges into melting protection rare gas element to 0.01～1 normal atmosphere then.Utilize induction heating that raw metal is melted, after treating that alloy solution evenly, carrying out the rare gas element pressurization in crucible makes molten metal be ejected on the deposition substrate through the hole of crucible bottom, at this moment substrate begins to do tangential movement, molten metal will be frozen into amorphous with laminate structure or nanocrystalline strip on substrate, every layer is the different kinds of metals layer, thereby obtains to have amorphous, nanocrystalline, the brilliant isostructural multilayer materials of micron and gradient material.
When substrate motion behind an end, stop the injection that rare gas element pressurizes and stops molten metal, substrate moves reciprocatingly and gets back to starting position and reduce height by hoisting appliance, again carry out rare gas element pressurized metal liquation and spray, molten metal is injected into once more on the metal composite strip that last layer solidified and is mutually compound with it.
Repeat said process and just can obtain to have layered composite metal material 9 arbitrary height, that have multilayered structure.
Deposition substrate is generally water-cooled pure Cu substrate or the material identical or close with deposit metallic material character, perhaps utilizes the low temperature rare gas element to force cooling, to obtain amorphous, nanocrystalline material.
Aforesaid way can obtain the matrix material of each subgrade aligned identical.
If allow the molten metal course of injection carry out continuously, can also obtain having the matrix material that each subgrade is the inversion layer structure of opposed alignment.
The horizontal reciprocating movement of deposition substrate and vertical movement are decided according to the material of concrete melting and to the requirement of product, for example, whether need chemical reaction etc. between the grain fineness number of product, the thickness of each layer and each layer.The tangential movement velocity range of deposition substrate is 0～2 meter per second; The vertical movement velocity range is 0～0.1 meter per second.
Crucible pass nozzle diameter is 0.2～2mm; Slit-type nozzle width 0.2～2mm, length is 0.3～100mm.
Distance between nozzle and the sedimentation products is 0.5～200mm.
The equipment of its preparation comprises: vacuum furnace body 5 and be in deposition substrate hoisting appliance 1, deposition substrate 3, low temperature rare gas element forced cooling device 4, rare gas elementes in the vacuum furnace body 5 and spray pressurizing device 6, crucible spray gun group 7, induction heating device 8, horizontal reciprocating movement guide plate 2 and be in vacuum extractor 11, vent valve 12, shielding gas intake valve 10 on the vacuum furnace body 5.Deposition substrate 3 is on the horizontal reciprocating movement guide plate 2.Deposition substrate hoisting appliance 1 is connected with horizontal reciprocating movement guide plate 2.Crucible spray gun group 7 is positioned at deposition substrate 3 tops, sprays pressurizing device 6 with rare gas element and is connected with induction heating device 8.Crucible spray gun group 7 is made up of one or many quartz, graphite or ceramic crucibles, and crucible bottom has the slit of aperture or certain width.Low temperature rare gas element forced cooling device 4 is positioned at the top of deposition substrate 3.Deposition substrate 3 can be done horizontal reciprocating movement, and movement velocity can be regulated as required.In addition, horizontal reciprocating movement guide plate 2 can drive the up-and-down movement of making vertical direction by deposition substrate hoisting appliance 1, and up-and-down movement speed can be regulated as required.
The to-and-fro movement speed and the movement travel of substrate all can be regulated within the specific limits.In addition, the hoisting appliance of substrate is by one group of gear drive and lifting controller control, and rising or falling speed and stroke also can be regulated.
Horizontal reciprocating movement control device of the present invention makes that the jet deposition size can be very big, and is unrestricted in principle, solved the shortcoming that existing spray deposition technique can only obtain turning round coating material.This method can also make two kinds of metals that can not dissolve each other realize compound by the metallic intermediate layer transition that can both dissolve each other by the transition of alloy.
Alloy species comprises: Cu, Al, Mg, Li, Fe, Ti, Ni, Mn, Zn, Sn, Nb, Nd, W, Mo, Si, B, C, V, Cr, Co, Ga, Ge, Zr, Au, Ag, In, Pb, Sb, Bi, La and alloy thereof.
Embodiment:
1: preparation Cu, Al stratified composite
As raw material, raw material is put into quartz crucible with industrial pure copper, fine aluminium, heat fused, pressurized jet are carried out unidirectional deposition on deposition substrate, obtain the Cu-Al-Cu-Al stratified composite.Level of base plate to-and-fro movement speed is 0.2 meter per second; Vertically underspeeding of substrate is 0.001 meter per second.The Cu/Al layer thickness is 0.2 millimeter.Shielding gas is a high-purity argon gas, and body of heater air pressure is 1 normal atmosphere, and spraying air pressure is 1.05 normal atmosphere, and strong device for cooling adopts through liquid nitrogen and carries out the rare gas element argon gas of heat exchange as refrigerant.
2: preparation Fe, Ni, Cu stratified composite
As raw material, raw material is put into quartz crucible with technically pure iron, nickel, copper, heat fused, pressurized jet are carried out two-way deposition on deposition substrate, obtain Fe-Ni-Cu-Ni-Fe stratified composite as shown in Figure 3.Level of base plate to-and-fro movement speed is 0.2 meter per second; Vertically underspeeding of substrate is 0.001 meter per second.Fe, Ni layer thickness are 0.2 millimeter; The Cu layer thickness is 0.4 millimeter.Shielding gas is a high-purity argon gas, and body of heater air pressure is 1 normal atmosphere, and spraying air pressure is 1.05 normal atmosphere, and strong device for cooling adopts through liquid nitrogen and carries out the rare gas element argon gas of heat exchange as refrigerant.
Claims (2)
1, a kind of preparation method of planar reciprocating spraying to deposit multilayer composite material is characterized in that, puts in the crucible group and treats sedimentary different kinds of metals raw material, and body of heater is evacuated down to 10
-2～10
-5Pa charges into melting protection rare gas element to 0.01～1 normal atmosphere then; Utilize induction heating that raw metal is melted, after treating that the alloy liquation evenly, carrying out the rare gas element pressurization in crucible makes molten metal be ejected on the deposition substrate through the hole of crucible bottom, substrate is done horizontal reciprocating movement simultaneously, molten metal will be frozen into amorphous with laminate structure or nanocrystalline strip on substrate, every layer is the different kinds of metals layer, thereby obtains to have the multilayer materials of amorphous or nanocrystalline structure; The horizontal reciprocating movement of deposition substrate is decided according to the material of concrete melting and to the requirement of product, and its tangential movement velocity range is 0～2 meter per second.
2, the preparation method of a kind of planar reciprocating spraying to deposit multilayer composite material as claimed in claim 1 is characterized in that, crucible pass nozzle diameter is 0.2～2mm; Slit-type nozzle width 0.2～2mm, length is 0.3～100mm; Distance between nozzle and the sedimentation products is 0.5～200mm.
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| CN200710010694A CN100584988C (en) | 2007-03-23 | 2007-03-23 | Method and equipment for planar reciprocating motion for spraying to deposit multilayer composite material |
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| CN200710010694A CN100584988C (en) | 2007-03-23 | 2007-03-23 | Method and equipment for planar reciprocating motion for spraying to deposit multilayer composite material |
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| CN101020999A CN101020999A (en) | 2007-08-22 |
| CN100584988C true CN100584988C (en) | 2010-01-27 |
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Families Citing this family (18)
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| CN103178062A (en) * | 2011-12-20 | 2013-06-26 | 中国科学院微电子研究所 | Metal nanocrystalline storage |
| CN103178017A (en) * | 2011-12-20 | 2013-06-26 | 中国科学院微电子研究所 | Preparation method of metal nanocrystalline storage |
| WO2014101020A1 (en) * | 2012-12-26 | 2014-07-03 | 机械科学研究总院先进制造技术研究中心 | Material increase manufacturing apparatus through multi-metal liquid spray deposition |
| CN103243324B (en) * | 2013-05-23 | 2015-08-26 | 沈阳航空航天大学 | The preparation method of the metallurgical jet direct forming of a kind of multi-degree of freedom numerical control and equipment |
| CN104001906B (en) * | 2014-05-26 | 2016-03-30 | 上海大学 | The shaping device and method of thin layer rapid solidification |
| CN105964488B (en) * | 2016-05-30 | 2019-12-03 | 中国科学院半导体研究所 | Sol evenning machine with substrate heating and atmosphere processing |
| CN107214343B (en) * | 2017-05-31 | 2020-01-21 | 河北工业职业技术学院 | Preparation method of gradient nozzle |
| CN107460426A (en) * | 2017-09-19 | 2017-12-12 | 湖南三泰新材料股份有限公司 | A kind of device of jet deposition billet surface composite |
| CN110465433B (en) * | 2019-08-06 | 2020-11-10 | 马鞍山市智新纳米材料有限公司 | Ceramic coating scraper coating spraying device |
| CN111101087A (en) * | 2020-01-06 | 2020-05-05 | 上海大学 | Monotectic alloy material and preparation method thereof |
| CN111962007B (en) * | 2020-09-02 | 2022-09-30 | 苏州合志杰新材料技术有限公司 | Plasma spraying process of semiconductor grade silicon |
| CN114619033B (en) * | 2020-12-10 | 2022-12-16 | 上海交通大学 | Multi-scale mixed crystal isomeric aluminum alloy material and preparation method and application thereof |
| CN115141999B (en) * | 2021-09-08 | 2023-09-19 | 武汉苏泊尔炊具有限公司 | Coating and cooker comprising the same |
| CN114042918A (en) * | 2021-11-05 | 2022-02-15 | 潍柴动力股份有限公司 | Preparation process and preparation tool for copper-steel bimetal component and cylinder body |
| CN114535603B (en) * | 2022-01-29 | 2024-05-24 | 沈阳航空航天大学 | Method for improving plasticity and toughness of weak area of additive manufacturing metal layered composite material |
| CN114645240B (en) * | 2022-03-23 | 2023-12-29 | 江苏金泰科精密科技有限公司 | Preparation method of metal nickel-aluminum composite strip for electronic industry |
| CN115007867B (en) * | 2022-06-30 | 2024-01-19 | 东北大学 | Method for preparing metal material by spray forming and spray forming device |
| CN117123778B (en) * | 2023-08-31 | 2024-07-05 | 广州广钢气体能源股份有限公司 | Forming device, preparation equipment and method for loose solid helium storage alloy |
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