CN100550137C - The substrate of magnetic recording media, magnetic recording media and magnetic recording and transcriber - Google Patents
The substrate of magnetic recording media, magnetic recording media and magnetic recording and transcriber Download PDFInfo
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- CN100550137C CN100550137C CNB200680022097XA CN200680022097A CN100550137C CN 100550137 C CN100550137 C CN 100550137C CN B200680022097X A CNB200680022097X A CN B200680022097XA CN 200680022097 A CN200680022097 A CN 200680022097A CN 100550137 C CN100550137 C CN 100550137C
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Abstract
The invention provides a kind of magnetic recording media substrate product, this substrate product can strengthen the contact strength between substrate end face and the soft magnetosphere, and can suppress the corrosion generation, a kind of magnetic recording media that comprises described substrate product also is provided, this magnetic recording media demonstrates not to be had the electromagnetic conversion characteristics of degenerating and has extraordinary durability, and a kind of magnetic recording and transcriber that comprises described magnetic recording media also is provided.Described magnetic recording media substrate product comprises a kind of disc non-magnetic substrate, this substrate heart therein partly has circular hole, and form scarf at least one part place that will form part and the described first type surface between magnetospheric first type surface and the outer face in the above and define in the part between the inner face of described circular hole, wherein, the surfaceness (Ra) of the described scarf that measures by AFM preferably drops in the scope of 4.0 ≤Ra≤50 in 4.0 ≤Ra≤100 scopes.
Description
The cross reference of related application
Require the right of priority of the Japanese patent application No.2005-200628 of acquisition submission on July 8th, 2005.The application is an application of submitting to according to 35U.S.C. § 111 (a), according to 35 U.S.C. § 119 (e), requires the date of application rights and interests that are specified in the provisional application 60/700,338 2005 year July 19 day submitted of acquisition according to 35U.S.C. § 111 (b).
Technical field
The present invention relates to a kind of substrate that is used for forming magnetic recording media, wherein, described magnetic recording media is used as the recording medium in the massaging device, the invention still further relates to a kind of magnetic recording media and a kind of magnetic recording and transcriber.
Background technology
In the last few years, along with the progress of various massaging devices, the memory capacity of magnetic recording media had also more and more increased.Specifically, the disk of in computing machine, playing the part of the center role as external storage, its recording capacity and recording density are increasing year by year.In this case, need a kind of disk that can carry out high density recording of exploitation.For example, the demand for development pen recorder size decreases of on knee and palm PC, and have high impact resistance, so, to carrying out high density recording and having the increase in demand of the small size magnetic recording media of high mechanical properties.Recently, navigational system and portability music player have also used the pen recorder that adopts extra small magnetic recording media.
Usually, this magnetic recording media (that is, disk) uses aluminum alloy substrate or the substrate of glass with plating NiP surface, and it can satisfy strict requirement, includes higher impact resistance, rigidity, hardness and chemical durability.The benefit of this substrate of glass is that it can easily form smooth surface, is suitable for making the flying height of the magnetic head that flies on the magnetic recording face to reduce, and described flying height to reduce for obtaining high density magnetic recording be very important.
In the last few years, the flying height of the magnetic head that flies on magnetic recording media has more and more reduced, so that obtain highdensity record, according to this trend, the substrate (being known as " magnetic recording media substrate " or " magnetic recording media substrate product " hereinafter) that requirement is used for forming magnetic recording media has smooth surface, have little surfaceness (for example, minute surface), and have minimum surface imperfection (such as little cut and Wei Keng).
Make magnetic recording media substrate (for example, hard disk (HD) substrate) by following step: the step of rough polishing (polishing) substrate surface, wherein said substrate has formed desirable size; By the step of polishing chamfering being carried out in the inner face and the outer face of substrate; The step that substrate surface is finally polished.Subsequently, on substrate surface, form some retes by for example following step: the veining step, wherein, substrate surface is by moderately alligatoring; On the surface of described substrate, form the step of lining; On the surface of described lining, form magnetospheric step; On described magnetosphere, form the step of protective seam; On described protective seam, form the step of lubricating layer.Afterwards, remove formed irregular projection on the film surface by polishing step, thereby prepare magnetic recording media as last product.
The substrate meeting for preparing like this produces a problem, and promptly the scarf part in substrate can take place by lining or magnetospheric peeling off, and causes finished product to produce defective.In order to address this problem, proposed to strengthen the method for the durability of formed rete in the substrate, wherein, the average surface roughness of described chamfered portion (Ra) is adjusted to below 0.20 micron (participate in, for example, patent document 1).
Flying height at the magnetic resistance type magnetic head is reduced so that improve in the situation of recording density, when magnetic head reproduces on the magnetic recording media recorded data, reconstruction error can take place, and perhaps data can not be reproduced.This phenomenon is caused by following mechanism: can cause coarse pyrogenicity (thermal asperity) phenomenon by the projection that particle constituted that deposits on the magnetic recording media surface, thereby in the magnetic resistance type magnetic head, produce heat, the generation of this heat can change the magnetic resistance of magnetic head, and this change can have a negative impact to electromagnetic conversion characteristics.The particle that can have a negative impact to the flight of magnetic head (for example, have the particle at angle or with respect to medium (disk) the surface ratio particle of projection more shrilly) is found to be in to be deposited in box during the magnetic recording media manufacturing and deposits being not intended to swipe and being produced of box by the end face of magnetic recording media substrate with described when transmitting substrate.Can imagine, the substrate that is not (comprising chamfered portion and base side wall) minute surface when end face be placed into by polycarbonate or similar material made deposit in the box or when therefrom taking out, the substrate end face will contact with the inwall of depositing box, so above-mentioned particle will produce from end face, and can be deposited on the surface of magnetic recording media.In order to address this problem, a kind of technology has been proposed, be used for in the chamfered portion of substrate and the sidewall at least the surface average roughness (Ra) of one of them adjust to below 1 micron, promptly, make the surface form the technology (referring to, for example, patent document 2) of minute surface.
Patent document 1: the open No.09-102120 of Japanese patent application (kokai)
Patent document 2: the open No.10-154321 of Japanese patent application (kokai)
Summary of the invention
Usually, comprise in the magnetic recording media of perpendicular magnetic recording layer and adopt by the soft magnetism lining that alloy constituted that contains Fe, Co etc.Yet, since like this thickness of the soft magnetosphere that forms and since this alloy material intrinsic corrosive property, take place near the soft magnetosphere of the corrosion meeting substrate end face, wherein, near the substrate end face, the contact between this soft magnetosphere and the substrate comes down to very weak.Show that this corrosion can cause the very big degeneration of magnetic recording media electromagnetic conversion characteristics, so, need the measure of corroding of preventing.To studies show that of the relation between substrate surface roughness and the soft magnetism lining bond strength, when the surfaceness of substrate end face is adjusted on the level of being advised usually, between substrate end face and soft magnetosphere, can not form contact fully closely, thereby (promptly at soft magnetosphere, perishable layer) can corrode in, just can not obtain high bond strength thus.
A target of the present invention is, a kind of magnetic recording media substrate product is provided, and this substrate product can strengthen the contact strength between substrate end face and the soft magnetosphere, and can suppress the generation of corrosion.Another target of the present invention is, a kind of magnetic recording media that comprises described substrate product is provided, this magnetic recording media demonstrates not to be had the electromagnetic conversion characteristics of degenerating and has extraordinary durability, another target of the present invention is that a kind of magnetic recording and transcriber that comprises described magnetic recording media is provided.
In order to realize above-mentioned target, the invention provides following content:
(1) a kind of magnetic recording media substrate product, comprise a kind of disc non-magnetic substrate, this substrate heart therein partly has circular hole, and form scarf at least one part place that will form part and the described first type surface between magnetospheric first type surface and the outer face in the above and define in the part between the inner face of described circular hole, wherein, can measure by AFM, the surfaceness of described scarf (Ra) drops on 4.0
≤ Ra≤100
In the scope;
(2) the magnetic recording media substrate product described in (1) wherein, can measure by AFM, and the surfaceness of described scarf (Ra) drops on 4.0
≤ Ra≤50
In the scope;
(3) the magnetic recording media substrate product described in (1) or (2) wherein, can measure by AFM, and the surfaceness of described outer face (Ra) drops on 4.0
≤ Ra≤100
In the scope;
(4) the magnetic recording media substrate product described in (3) wherein, can measure by AFM, and the surfaceness of described outer face (Ra) drops on 4.0
≤ Ra≤50
In the scope;
(5) as any a described magnetic recording media substrate product in (1) to (4), wherein, can measure by AFM, the curved surface of the corner part office between described substrate first type surface and described scarf (promptly, disc hereinafter is called " R face ") surfaceness (Ra) drop on 4.0
≤ Ra≤50
In the scope;
(6) as any a described magnetic recording media substrate product in (1) to (5), wherein, can measure by AFM, the surfaceness (Ra) that defines the inner face of described circular hole drops on 4.0
≤ Ra≤100
In the scope;
(7) as any a described magnetic recording media substrate product in (1) to (6), wherein, described non-magnetic substrate is made of any material in amorphous glass, crystallized glass, silicon and the aluminium.
(8) a kind of magnetic recording media comprises above-mentioned (1) any a described magnetic recording media substrate product in (7), and on the first type surface of described substrate product formed perpendicular magnetic recording medium layer; And
(9) a kind of magnetic recording and transcriber comprise the magnetic recording media described in above-mentioned (8).
When forming scarf when obtaining so little surfaceness, the contact strength between scarf and the soft magnetosphere will strengthen, and the generation of corroding in the soft magnetosphere just can be inhibited.So the magnetic recording media that obtains does not so have the degeneration of electromagnetic conversion characteristics.So; just can solve the problem that can run into usually effectively; these problems comprise; the reader error that reduces to cause of the periphery SNR of magnetic recording media; and the sidelights on that unstable flight caused of magnetic head (side writing) can make the fault of wiping of adjacent signal, wherein, and near flight corrosion part that magnetic head produces in the periphery place; and when described corrosion part deposits on the surface of magnetic head, described unstable flight can take place.
Description of drawings
Figure 1A is a skeleton view, has shown the substrate product that has been cut open in the magnetic recording media substrate product of the present invention;
Figure 1B has shown the sectional view of substrate product in the magnetic recording media substrate product of the present invention;
Fig. 2 is a sectional view that has amplified, and is used for describing the each several part of magnetic recording media substrate product of the present invention;
Fig. 3 has shown the configuration of substrate duplexer;
Fig. 4 has shown the finishing method of the periphery of substrate duplexer;
Fig. 5 has shown the finishing method in the interior week of substrate duplexer;
Fig. 6 has shown the method for the measure R curvature of face;
Fig. 7 has shown the configuration of magnetic recording of the present invention and transcriber.
The description of Reference numeral among the figure
1. magnetic recording media substrate product
5. pad, the end portion of 5a. pad
6. substrate duplexer
7,17. brushes
10. first type surface
11. outer face
12,22. scarves
13,23.R face
14. endoporus
15. corner part
21. inner face
26. media drive part
27. magnetic head
28. magnetic head drive part
29. recoding/reproduction signal processing system
30. magnetic recording media
40. magnetic recording and transcriber
Embodiment
To describe the present invention in detail below.Figure 1A and 1B have shown the magnetic recording media substrate product among the present invention.Figure 1A is a skeleton view, shown the magnetic recording media substrate product of the incision among the present invention, and Figure 1B is the sectional view of this substrate product.Fig. 2 is a sectional view that has amplified, and is used for describing the each several part of magnetic recording media substrate product among the present invention shown in Figure 1A and the 1B.
Shown in Figure 1A and 1B, the magnetic recording media substrate product 1 among the present invention has constituted the doughnut-shaped disk.In the upper and lower of disk is first type surface 10, will form magnetic recording layer on described first type surface.This disk has outer face 11 in its periphery.This disk heart therein partly has a circular hole 14 that is defined by inner face 21.Between first type surface 10 and outer face 11, form chamfered portion (scarf) 12.In addition, between first type surface 10 and inner face 21, also form chamfered portion (scarf) 22.
Fig. 2 is a sectional view that has amplified, and is used for describing the each several part of magnetic recording media substrate product among the present invention shown in Figure 1A and the 1B.Fig. 2 has shown such example, wherein forms radius and be 13 to 80 microns R face 13 between first type surface 10 and chamfered portion (scarf) 12.R face 13 has and suppresses the effect that particle produces, even the scraping that the end face of this substrate product is subjected to box when depositing substrate product and transmitting substrate product in box during making magnetic recording media also can suppress the generation of particle.
Substrate used in the present invention can be the Al substrate of amorphous glass substrate, crystallized glass substrate, monocrystalline silicon (Si) substrate, plating NiP or the Al alloy substrates of plating NiP.The amorphous glass substrate of using can be chemical enhanced substrate of glass or non-enhanced substrate of glass.The silicon base of using can be as high-purity monocrystal silicon substrate of semiconductor wafer, can be the substrate or the polycrystalline substrate of mixing.
At first, substrate used in the present invention (disc substrate) is polished, so that improve the form accuracy and the dimensional accuracy of substrate.Described bruting process is carried out in two steps with sanding apparatus usually.
Subsequently, with some single basilar fascicleses together, between adjacent substrate, provide pad, so substrate duplexer all set just.In stacked substrate, be formed centrally a circular hole, then the chamfering (chamfering) that the interior outer face of substrate duplexer is scheduled to.
Subsequently, with polish brush outer face in formed is polished.Among the preparation method of magnetic recording media substrate product in the present invention, above-mentioned steps (from the polishing that is formed into interior outer face of circular hole) batch processing on the substrate duplexer is carried out.
At last, the first type surface that will form magnetic recording layer is thereon polished.Polishing process carries out in two steps, that is, first polishing step removes cut and the distortion that produces by said process, and second polishing step forms minute surface.
Each substrate after such polishing is cleaned fully, test then.So the magnetic recording media substrate product has just prepared.
In described magnetic recording media substrate product, the important point is the precision of finishing of chamfered portion (scarf) and interior outer face.Traditionally, such surface finish precision by defining by the measured surfaceness of pin type method, wherein, described pin type method is usually the measuring method of used surfaceness.Yet, finish in the magnetic recording media of precision having such routine, lower in the contact strength of the first type surface of substrate and the boundary vicinity soft magnetosphere between the chamfered portion (scarf), therefore, in soft magnetosphere, can corrode, cause the deterioration of electromagnetic conversion characteristics.
So, in magnetic recording media substrate product of the present invention, finish precision by defining by the measured surfaceness of atomic force microscope (AFM), wherein, AFM can provide more accurate measurement.
Atomic force microscope (AFM) is a kind of by coming the device of the two-dimensional structure on observation sample surface in the power between the measurement of species on the atomic level.Specifically, AFM uses one to have the surface that most advanced and sophisticated cantilever (probe) comes scanning samples, controls height, direction and the position of cantilever simultaneously, makes that the atomic force between cantilever tip and the sample surfaces keeps constant.Biao Mian scrambling and do the cantilever of vertical moving per sample, its displacement is surveyed by the irradiation of laser, and the change in location of laser-bounce light is then surveyed by photodiode.AFM can survey the scrambling of nanometer scale; Can survey the small scrambling that can not detect with the pin type method.
In magnetic recording media substrate product of the present invention, regulate the surfaceness (Ra) of above-mentioned scarf, utilize AFM to measure, make this surfaceness drop on 4.0
≤ Ra≤100
Scope in, preferably 4.0
≤ Ra≤50
Scope in.The lower limit of Ra, promptly 4.0
, also be to process or measurable lower limit.When Ra smaller or equal to 50
The time, can not corrode.Yet, when Ra surpasses 50
The time, the contact strength of soft magnetosphere will reduce, and corrosion just can take place in soft magnetosphere.When Ra surpasses 100
The time, the possibility that corrosion takes place just increases, thereby electromagnetic conversion characteristics will degenerate.So, the surfaceness (Ra) of regulating described scarf, make its drop on utilize AFM measured 4.0
≤ Ra≤100
Scope in, preferably 4.0
≤ Ra≤50
Scope in.
In magnetic recording media substrate product of the present invention, as in the situation of scarf, regulate the surfaceness (Ra) of outer face, make its drop on utilize AFM measured 4.0
≤ Ra≤100
Scope in, preferably 4.0
≤ Ra≤50
Scope in.
In the surfaceness of outer face is adjusted to situation on the small like this level, when this substrate is stored in box and is transmitted, the danger that makes the outer face produce damage just can be lowered, and the problem relevant with the generation of particle also can be avoided.
As shown in Figure 2, in magnetic recording media substrate product of the present invention, corner part between the scarf of substrate first type surface and outer face one side, or the corner part between the scarf of substrate first type surface and described circular hole one side, preferably radius is more than or equal to 0.01mm and smaller or equal to the curved surface (R face) of 0.05mm.The surfaceness (Ra) of described curved surface (R face) also be adjusted to utilize AFM measured 4.0
≤ Ra≤100
Scope in, preferably 4.0
≤ Ra≤50
Scope in.
Corner part between first type surface and scarf is provided with in the situation of this curved surface, when this substrate is stored in box and is transmitted, the danger that makes the outer face produce damage just can be lowered, and the problem relevant with the generation of particle also can be avoided.If the surfaceness of R face (Ra) be adjusted to utilize AFM measured 4.0
≤ Ra≤100
Scope in, preferably 4.0
≤ Ra≤50
Scope in, so, the contact strength of soft magnetosphere has just strengthened, and can not corrode in soft magnetosphere, thereby can not cause degenerating of electromagnetic conversion characteristics.
As mentioned above, if the surfaceness of the corner part between first type surface and outer or the inner face be adjusted to utilize AFM measured 4.0
≤ Ra≤100
Scope in, preferably 4.0
≤ Ra≤50
Scope in, so, first type surface and outside or the contact strength of corner's soft magnetosphere between the inner face just strengthened, so can not corrode in soft magnetosphere, that is, resulting magnetic recording media substrate product presents extraordinary characteristic.
In magnetic recording media substrate product of the present invention, the surfaceness (Ra) of above-mentioned scarf, outer face or described curved surface (R face) also preferably be adjusted to utilize AFM measured 4.0
≤ Ra＜10
, 10
＜Ra≤100
Scope in, more preferably 4.0
≤ Ra＜10
, 10
＜Ra≤50
Scope in.
The finishing method that is used for obtaining the magnetic recording media substrate product of the present invention then will be described.
Substrate used in the present invention is polished, so that improve the form accuracy and the dimensional accuracy of substrate.Subsequently, in substrate, be formed centrally a circular hole, then the chamfering that the interior outer face of substrate is scheduled to.
To first type surface and outside or the corner part that comprises described scarf that forms between the inner face polish, as for example shown in Figure 3.Specifically,, with the plurality of magnetic recording medium substrate 1 stacked substrate duplexer 6 that forms described substrate duplexer 6 is polished by pad 5.
Each pad 5 is taked disc, the heart has a circular hole 14 therein, the same with the situation of magnetic recording media substrate 1, the pad 5 that is provided will make end portion (end face) 5a of pad 5 from the terminal indentation about 0 to about 2mm (preferably indentation about 0.5 is to about 2mm) of the scarf of the corner part 15 of magnetic recording media substrate 1.The thickness of pad 5 is preferably about 0.1 to about 0.3mm.Pad 5 preferably is made of the material softer than described base material, such as polyurethane (polyurethane), acrylic acid (acrylic) material, plastic material or with polishing step in the material identical materials of employed polishing pad.
In order to polish the corner part of the scarf that comprises the outer face, as shown in Figure 4, the periphery of substrate duplexer 6 is polished with rotating polish brush 7.The tubulose brush (diameter: 200 to 500mm) that the polish brush 7 that uses preferably is made of the polyamides ammonium filament of eccentric pattern, wherein, every filametntary diameter be 0.05mm to 0.3mm, length is 1 to arrive 10mm.
The outer face of substrate and corner part polish by following step: tubulose polish brush 7 is pressed on the periphery of substrate duplexer 6; In the periphery and the supply of the surface of contact place between the polish brush 7 polishing fluid of substrate duplexer 6, substrate duplexer 6 is with the rotational speed of about 60rpm, and this tubulose polish brush 7 with about 700rpm to the rotating speed of about 1000rpm along the rotation direction rotation opposite with substrate duplexer 6, and vertically move up and down.The carrying out of described polishing process will make described corner part reach bright finished effect, so that make that utilizing AFM measured surfaceness (Ra) in 10 microns visual field is 4.0
≤ Ra≤100
, be preferably 4.0
≤ Ra≤50
In order to polish the corner part of the scarf that comprises inner face, as shown in Figure 5, polish with the roll brush 17 in the endoporus 14 that inserts substrate duplexer 6, wherein, described substrate duplexer 6 constitutes by utilizing pad that magnetic recording media substrate 1 is piled up.Described endoporus polishing also will proceed to and make described corner part reach bright finished effect, is 4.0 so that make surfaceness (Ra)
≤ Ra≤100
, be preferably 4.0
≤ Ra≤50
, as AFM institute energy measurement in 10 microns visual field.
Material, diameter, hardness and length by the brush determining rightly for example will to use, the type of the polishing material that uses, grain size and concentration, the pressing force of brush, velocity of rotation and vertical moving speed, and the velocity of rotation of substrate duplexer is controlled the precision of polishing.
Be provided with in the situation of R face between scarf and first type surface (data surface will form magnetosphere on it), the radius-of-curvature of R face is preferably 0.01 to 0.05mm.
Here " radius-of-curvature of R face " mentioned obtains by following method.As shown in Figure 6, the extended line of substrate first type surface (data surface) point that leaves the substrate surface profile line is known as an A.The point that leaves 10 microns of A towards opposite direction on the substrate surface is known as a B and some C." radius-of-curvature of R face " is exactly the radius of a circle (hereinafter, this radius-of-curvature can be known as " R curvature of face radius ") by described some A, some B and some C.
Thereby forming magnetosphere through handling on the non-magnetic substrate that has obtained above-mentioned surfaceness.Described magnetosphere can be the longitudinal magnetic recording layer, also can be perpendicular magnetic recording layer.In the situation that forms perpendicular magnetic recording layer, the present invention has showed good especially effect.This magnetic recording layer preferably constitutes by containing the alloy of Co as principal ingredient.
For example, the magnetic recording layer of longitudinal magnetic recording medium can have sandwich construction, comprising nonmagnetic CrMo lining and ferromagnetic CoCrPtTa layer.
The magnetic recording layer of perpendicular magnetic recording medium can have sandwich construction, comprising soft ferromagnetic layer by for example non-retentive alloy constituted, this non-retentive alloy is that for example the FeCo alloy is (for example, FeCoB, FeCoSiB, FeCoZr, FeCoZrB or FeCoZrBCu), the FeTa alloy (for example, FeTaN or FeTaC) or Co alloy (for example, CoTaZr, CoZrNB or CoB); Described sandwich construction also comprises the orientation regulating course by for example Pt, Pd, NiCr or NiFeCr constituted; The middle layer that is constituted by for example Ru (providing as required); By 60Co-15Cr-15Pt alloy or 70Co-5Cr-15Pt-10SiO
2The magnetosphere that alloy constituted.
The thickness of magnetic recording layer is adjusted to more than or equal to 3nm and smaller or equal to 20nm, preferably more than or equal to 5nm smaller or equal to 15nm.Can come the thickness of determined magnetic recording layer rightly according to the type of the magnetic alloy that will use and the sandwich construction that will form, as long as can obtain enough magnetic head I/O performances.Usually, require magnetospheric thickness more than or equal to certain level, so that the output that obtains at reproduction period is more than or equal to certain predetermined level, and the parameter of expression recording reduces along with the increase of output.So the thickness of magnetic recording layer must be adjusted to optimum level.
Magnetic recording layer is the film by forming such as physical gas phase deposition technologies such as deposition in sputter, vacuum moulding machine, the gas or air-flow sputters normally.
Surface at magnetic recording layer forms protective seam.Protective seam can be made of common employed protective layer material, and for example, carbonaceous material is such as carbon (C), hydrocarbon (HxC), carboritride (CN), amorphous carbon or silit (SiC); SiO
2, Zr
2O
3, or TiN.Protective seam can be made of two-layer or multilayer.
The thickness of protective seam must be adjusted to below the 10nm.This is because when the thickness of protective seam surpassed 10nm, the distance between magnetic head and the magnetosphere became big, thereby can not obtain sufficiently high input/output signal.
Protective seam forms by sputter usually.
Preferably, on protective seam, form lubricating layer.The example that forms the employed lubricant of lubricating layer comprises the lubricant of fluorine containing lubricant, hydrocarbon-containiproducts and both potpourris.The thickness of formed lubricating layer is generally 1 to 4nm.
Fig. 7 has shown the magnetic recording among the present invention and the configuration of transcriber.Magnetic recording among the present invention and transcriber 40 comprise the described magnetic recording media 30 of the invention described above; Drive the media drive part 26 of described magnetic recording media in the record direction; Magnetic head 27 with record cell and reproduction units; Drive the magnetic head drive part 28 of magnetic head 27 with respect to magnetic recording media 30; Having comprised the recoding/reproduction signal processing apparatus is used for to magnetic head 27 input signals and reproduces from the recoding/reproduction signal processing system 29 of the signal of magnetic head 27 outputs.The magnetic recording and the transcriber that have comprised these parts can be realized high recording density.
In magnetic recording of the present invention and transcriber in the employed magnetic recording media, to carrying out meticulous polishing near the periphery of substrate and the endoporus and finish processing.Therefore, between substrate and magnetic recording media layer, can obtain high contact strength, thereby in the magnetic recording media layer, can not corrode, so electromagnetic conversion characteristics is degenerated.So described magnetic recording and transcriber can keep stable performance in long time.
(example)
Use substrate of glass (amorphous glass substrate and crystallized glass substrate) and silicon base (monocrystal silicon substrate that is used for semiconductor).Each substrate is handled, and to have the external diameter of 48mm, the internal diameter of 12mm and the thickness of 0.508mm clean then.
Make each described substrate sample formation duplexer as shown in Figure 3, polish with brush by the method shown in Figure 4 and 5 then, thereby prepare the magnetic recording media substrate product, wherein, the surfaceness of scarf (Ra) be adjusted to AFM measure more than or equal to 4.0
And smaller or equal to 100
Scope, the surfaceness of outer face or inner face (Ra) is adjusted to more than or equal to 4.0
And smaller or equal to 100
, the radius-of-curvature of R face is adjusted to more than or equal to 0.01mm and smaller or equal to 0.07mm.
Subsequently, each substrate product of preparing like this is placed in the film forming chamber of DC magnetic control sputtering device (C-3010, ANELVA produces), this film forming chamber is evacuated down to 1 * 10
-5Pa.Afterwards, on described substrate product, form the soft magnetism lining, this soft magnetism lining comprises following trilamellar membrane: 90Co-4Zr-6Nb (Co content: 90at%, Zr content: 4at%, Nb content: 6at%) soft magnetic film (50nm), Ru film (0.8nm) and 90Co-4Zr-6Nb (Co content: 90at%, Zr content: 4at%, Nb content: 6at%) film (50nm).In film formation process, substrate is not heated, in substrate, apply one radially (from outside all in thoughtful) magnetic field.
Subsequently, form the Ru orientation and regulate film (20nm) and 66Co-8Cr-18Pt-8SiO
2Perpendicular magnetic recording layer (12nm).
Subsequently, form amorphous carbon diaphragm (4nm) by CVD.
Subsequently, form the Perfluoropolyether lubricant film by the method for dipping, thereby produce magnetic recording media.
(reference examples 1 to 19)
Except substrate not being polished (for example, with brush end face being polished), the surfaceness that perhaps substrate is polished to described scarf is adjusted to more than or equal to 100
The surfaceness of (measuring by AFM), outer face or inner face is adjusted to more than or equal to 100
, the R curvature of face is adjusted to more than or equal to 0.01mm and smaller or equal to outside the 0.04mm, produces magnetic recording media thereby repeat the employed step of above-mentioned example.
(reference examples 20 to 22)
For the situation with the longitudinal magnetic recording medium compares, the conventional substrate of the outer face not being carried out the brush polishing heats by the DC magnetic control sputtering device, make its surface temperature reach 170 ℃, in the substrate of heating like this, form Cr50-Ti alloy film (200 then
), Ni50-Al alloy film (100
), Cr20-Ti alloy film (50
) and Co13-Cr6-Pt3-B alloy film (30
), produce magnetic recording media thus.
To surfaceness, the R curvature of face and the SNR characteristic of the substrate outer face of each magnetic recording media of formation (that is, record and reproducing characteristic) are assessed like this in described example and the reference examples.Near first type surface and scarf, film having or not of coming off confirmed, the number of the part that comes off is counted.
(by AFM evaluation form surface roughness)
Assess the roughness (Ra) of substrate surface with the AFM device (NanoScopeIIIa) of Veeco Instrument manufacturing.Under following condition, carry out the measurement of surfaceness:
Probe: the silicon single crystal probe, D-NCH-10V (nano-sensor, Nanosensors)
Visual field: 10 microns
Pixel count: 256 * 256 data points
Scan pattern: rap pattern
Sweep speed: 1 little meter per second
Measurement environment: in the atmosphere under the room temperature
Data processing: use " NanoScope ver5.30r2 "
(measurement of the R curvature of face)
Adopt Contracer CV-L400 (Mitutoyo Corporation product), by the curvature of method measure R face shown in Figure 6.The condition of measuring is as follows.
Scope: 1mm
Speed: 0.02mm/sec
Spacing: 0.002mm
(assessment of perpendicular magnetic recording medium)
Come evaluate recorded and reproducing characteristic by read/write analyser RWA1632 and universal stage S1701MP (GUZIK (US) product).
For evaluate recorded and reproducing characteristic, use the magnetic head that contains single magnetic pole elements (record cell) and GMR element (reproduction units) to get off to measure SNR in the condition of the track recording density (recording frequency) of 1000kFCI.
(corroding the assessment that caused film comes off)
With each magnetic recording media of being obtained in described example and the reference examples baking oven (temperature: 70 ℃, humidity: 80%) deposit 240 hours.Afterwards, described each magnetic recording media is taken out from baking oven, and be that 240 microscopically is observed the data surface of each magnetic recording media and the boundary vicinity between the outer face in enlargement factor.Boundary member between scarf and data surface is confirmed the film that causes because of corrosion having or not of coming off, and the number of the part that comes off is counted.
Assessment result is shown in table 1 and the table 2.
Table 1
Table 2
Clearly from these results see, adopt the perpendicular magnetic recording medium of magnetic recording media substrate product of the present invention manufacturing can not take place to come off, and demonstrated high SNR (that is, high performance) because of the film that corrosion causes.
In the longitudinal magnetic recording medium,, can not take place to come off because of the film that corrosion causes because the attribute of the film that uses makes so.
Industrial applicibility
When scarf being formed have so little surface roughness, between scarf and the soft magnetosphere Contact strength will strengthen, the generation of corroding in the soft magnetosphere just can be inhibited. So, like this The magnetic recording media that obtains can not show the degeneration of electromagnetic conversion characteristics. So, just can be effectively Solve the problem that usually can run into, these problems comprise that the periphery SNR of magnetic recording media reduces The wiping adjacent signal that the reader error that causes, the sidelights on that the unstable flight of magnetic head causes cause Fault, wherein, near flight corrosion part that magnetic head produces in the periphery place, and described corruption When losing on the surface that partly deposits to magnetic head, described unstable flight can take place.
Claims (11)
1. magnetic recording media substrate product that comprises the disc non-magnetic substrate, this substrate product comprises:
(1) circular hole of heart part therein;
(2) first type surface will form magnetosphere on this first type surface;
(3) outer face;
(4) inner face, this inner face has defined described circular hole;
(5) scarf of at least one the part place formation in the second portion between first between described first type surface and described outer face and described first type surface and the described inner face, and
(6) be formed on the curved surface of the corner part office between described first type surface and the described scarf, i.e. R face, this curved surface has the radius smaller or equal to 0.05mm more than or equal to 0.01mm,
Wherein, the surfaceness (Ra) of the described scarf that measures by AFM exists
In the scope, and the surfaceness (Ra) of the described curved surface that measures by AFM exists
In the scope.
2. magnetic recording media substrate product according to claim 1, wherein, described magnetic recording media substrate is the perpendicular magnetic recording medium substrate that is used for making perpendicular magnetic recording medium.
3. magnetic recording media substrate product according to claim 2, wherein, described perpendicular magnetic recording medium comprises the soft magnetism lining.
4. magnetic recording media substrate product according to claim 3, wherein, described soft magnetism lining comprises the alloy of a kind of Fe of containing or Co.
5. magnetic recording media substrate product according to claim 1, wherein, the surfaceness (Ra) of the described scarf that measures by AFM exists
In the scope.
6. magnetic recording media substrate product according to claim 1, wherein, the surfaceness (Ra) of the described outer face that measures by AFM exists
In the scope.
7. magnetic recording media substrate product according to claim 6, wherein, the surfaceness (Ra) of the described outer face that measures by AFM exists
In the scope.
8. magnetic recording media substrate product according to claim 1, wherein, the surfaceness (Ra) of the described inner face that measures by AFM exists
In the scope.
9. magnetic recording media substrate product according to claim 1, wherein, described non-magnetic substrate is made of any material in amorphous glass, crystallized glass, silicon and the aluminium.
10. a magnetic recording media comprises the described magnetic recording media substrate product of any one claim in the claim 1 to 9, and the perpendicular magnetic recording medium layer on the first type surface of described substrate product.
11. magnetic recording and transcriber comprise the described magnetic recording media of claim 10.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2005200628 | 2005-07-08 | ||
| JP200628/2005 | 2005-07-08 |
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| CN101203909A CN101203909A (en) | 2008-06-18 |
| CN100550137C true CN100550137C (en) | 2009-10-14 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102930874A (en) * | 2011-09-28 | 2013-02-13 | 旭硝子株式会社 | Glass substrate used by magnetic recording media |
| CN108133714A (en) * | 2014-03-31 | 2018-06-08 | Hoya株式会社 | Glass substrate for disc |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5776491B2 (en) | 2011-10-24 | 2015-09-09 | 信越化学工業株式会社 | Glass substrate for photomask, reticle or nanoimprint, and method for producing the same |
-
2006
- 2006-06-30 CN CNB200680022097XA patent/CN100550137C/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102930874A (en) * | 2011-09-28 | 2013-02-13 | 旭硝子株式会社 | Glass substrate used by magnetic recording media |
| CN102930874B (en) * | 2011-09-28 | 2016-03-09 | 旭硝子株式会社 | Glass base plate for magnetic recording carrier |
| CN108133714A (en) * | 2014-03-31 | 2018-06-08 | Hoya株式会社 | Glass substrate for disc |
| CN108133714B (en) * | 2014-03-31 | 2019-08-23 | Hoya株式会社 | Glass substrate for disc |
| US11024335B2 (en) | 2014-03-31 | 2021-06-01 | Hoya Corporation | Magnetic-disk glass substrate |
Also Published As
| Publication number | Publication date |
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| CN101203909A (en) | 2008-06-18 |
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