CN100492021C - Positioning unit for probe device - Google Patents
Positioning unit for probe device Download PDFInfo
- Publication number
- CN100492021C CN100492021C CNB2005101134979A CN200510113497A CN100492021C CN 100492021 C CN100492021 C CN 100492021C CN B2005101134979 A CNB2005101134979 A CN B2005101134979A CN 200510113497 A CN200510113497 A CN 200510113497A CN 100492021 C CN100492021 C CN 100492021C
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- opening
- keeper
- probe
- probe unit
- described keeper
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention relates to probe device locations which can conveniently assemble, locate each probe for the probe device without damaging its structure. The locations has many the first opening with throughout shape each of which at least one the second opening is set around. Each the second opening extends outward from each the fist opening wall surface.
Description
Technical field
The present invention is relevant with probe unit, is meant a kind of keeper that is used for probe unit especially.
Background technology
As shown in figure 11, generally be used for the probe unit 80 of measuring semiconductor chip, comprise a top base 81, a bottom base 82, and most probe 90, as shown in figure 12, head 92 cross sections of each probe 90 are generally rounded, and the cross section of body portion 94 can be oval or square; That assembles probe unit 80 for convenience respectively forms member; usually meeting is positioned the head 92 of each probe 90 for positioning piece 84 earlier; keeper 84 is to become with the flexible strip system; and has the perforate 85 that majority is penetration state; the shape of perforate 85 is similar in appearance to the cross sectional shape of probe 90 heads 92, and the head 92 of each probe 90 is arranged in the perforate 85 of keeper 84, makes perforate 85 can restrain probe 90; and be placed in the guide hole 86 of top base 81 again, make the body portion 94 of each probe 90 extend to bottom base 82.
Yet, in the above-mentioned probe unit 80 of assembling, owing to be earlier keeper 84 to be located at bottom base 82, each perforate 85 that makes each probe 90 pass keeper 84 again, each probe 90 must pass each perforate 85 with the body portion 94 of ovalize, and the profile of forcibly changing perforate 85, could allow the head 92 of each probe 90 be located in the perforate 85, therefore, probe 90 can contact and produces structural failure or even the situation that ruptures easily because interfere mutually with the wall of perforate 85; And in each probe 90 of assembling, each probe 90 must the application of force just can pass each perforate 85, makes that the assembling of whole probe unit 80 is comparatively time-consuming, efficient is relatively poor.
Summary of the invention
Therefore, fundamental purpose of the present invention is to provide a kind of keeper of probe unit, and it is each probe that can assemble and locate this probe unit comparatively easily, can not damage the structure of probe and keeper, and increases the convenience of maintenance.
Take off purpose for before reaching, a kind of keeper that is used for probe unit provided by the present invention is characterized in that this keeper has the opening that majority is penetration state, and be provided with at least one crack around this opening respectively, these cracks are to stretch out from the wall of this opening respectively.
Wherein respectively this opening is generally rounded.
Wherein respectively this opening is generally triangular in shape.
Wherein respectively this opening is generally to be polygon.
Wherein this keeper is to be the made thin slice of Polyimide material.
Wherein respectively this opening and respectively this crack all make with laser processing mode.
Wherein these cracks are to be symmetry shape ground from respectively this opening extension.
A kind of keeper that is used for probe unit of the present invention, it is characterized in that, this keeper has first opening that majority is penetration state, and is provided with at least one second opening around this first opening respectively, and respectively this second opening is to stretch out from the wall of this first opening respectively.
Wherein respectively this first opening is generally rounded.
Wherein respectively this first opening is generally triangular in shape.
Wherein respectively this first opening is generally to be polygon.
Wherein respectively this second opening is generally elongated.
Wherein respectively this second opening is generally triangular in shape.
Wherein this keeper is to be the made thin slice of Polyimide material.
Wherein respectively this first opening and respectively this second opening all make with laser processing mode.
Wherein these second openings are to be symmetry shape ground from respectively this first opening extension.
A kind of keeper that is used for probe unit of the present invention, it is characterized in that, this keeper has general rounded one first opening and one second opening, and this first opening and this second opening are overlapped and are interconnected, and integral width is slightly larger than the cross section of a probe approximately.
Thus, the present invention can assemble and locate each probe of this probe unit comparatively easily, can not damage the structure of probe and keeper, prevents keeper because of the accurate position probe of shedding deformation, and increases the convenience of maintenance.
Description of drawings
Below, conjunction with figs. is enumerated some preferred embodiments, in order to detailed structure of the present invention and effect are described further, wherein:
Fig. 1 is the stereographic map of the present invention's first preferred embodiment;
Fig. 2 is the partial view of the present invention's first preferred embodiment, the main wherein state of one first opening that shows;
Fig. 3 is the application synoptic diagram of the present invention's first preferred embodiment;
Fig. 4 is the partial view of the present invention's second preferred embodiment;
Fig. 5 is the partial view of the present invention's the 3rd preferred embodiment;
Fig. 6 is the partial view of the present invention's the 4th preferred embodiment;
Fig. 7 is the application synoptic diagram of the present invention's the 4th preferred embodiment;
Fig. 8 is the partial view of the present invention's the 5th preferred embodiment;
Fig. 9 is the partial view of the present invention's the 6th preferred embodiment;
Figure 10 is the partial view of the present invention's the 7th preferred embodiment;
Figure 11 is the synoptic diagram for existing probe unit; And
Figure 12 is the stereographic map for existing probe.
Embodiment
See also shown in Figure 1, it is keeper 10 for the present invention's first probe unit that preferred embodiment is provided for, keeper 10 is the made thin slice of Polyimide (Polyimide) material, keeper 10 has first opening 12 that majority is penetration state, as shown in Figures 2 and 3, each first opening 12 is generally rounded, and head 92 that can ccontaining probe as shown in figure 12 90; Be provided with 2 second openings 14 around each first opening 12, each second opening 14 is generally elongated, 2 second openings 14 are symmetry shape ground and stretch out from the wall of each first opening 12, the integral width of 2 second openings 14 is slightly larger than body portion 94 cross sections of probe 90 approximately, first opening 12 and second opening 14 can utilize Laser Processing, or machining mode direct forming such as punching press is in keeper 10.
As shown in Figure 3, when each probe 90 is assembled in each first opening 12 of keeper 10, can pass for the body portion 94 of probe 90 ovalizes by 2 second openings 14, and after 2 second openings 14 pass in the body portion 94 of probe 90, the head 92 of probe 90 can be placed in first opening 12, and by the wall of first opening 12 location and restrain probe 90, make probe 90 in the process that is assembled in keeper 10, probe 90 itself can not be in contact with one another interference with keeper 10, reducing probe 90 structures is damaged, simultaneously do not need the application of force can make the body portion 94 of probe 90 directly pass keeper 10, thereby make that the assembling of each probe 90 is comparatively convenient and quick; In addition, must change and maintenance job the time, also only need directly to extract the head 92 of probe 90 out keepers 10 with body portion 94 along first opening 12 and second opening 14, just probe 90 can be located away from keeper 10 when probe 90.
Thus, the present invention can utilize first opening and second opening of keeper, reaches each probe of assembling comparatively easily and position probe device, can not damage probe structure, and increases the purpose of the convenience of maintenance.
Above-mentioned keeper is other multi-form opening that can be shaped, and can reach goal of the invention of the present invention equally; As shown in Figure 4, it is wherein one first opening 20 for the present invention's second keeper that preferred embodiment provides, its characteristics are: each second opening 22 around first opening 20 is generally triangular in shape, the integral width of 2 second openings 22 also is slightly larger than body portion 94 cross sections of probe 90 approximately, can directly be arranged in first opening 20 and second opening 22 for probe 90.
As shown in Figure 5, it is wherein one first opening 30 for the present invention's the 3rd keeper that preferred embodiment provides, characteristics are: first opening 30 is to be quadrangle, and first opening 30 also can be polygon, as long as the area of first opening 30 can be located and the head 92 of ccontaining probe 90.
As shown in Figure 6, be a wherein opening 40 for the present invention's the 4th keeper that preferred embodiment provides, characteristics are: being provided with 42, two cracks 42, two cracks around the opening 40 is to be symmetry shape ground to stretch out from the wall of each opening 40; As shown in Figure 7, when two cracks 42 were passed by the body portion 94 of probe 90, body portion 94 caused the keeper distortion by each crack 42, also can make probe 90 directly pass keeper; And as shown in Figure 8, be the wherein opening 50 for the present invention's the 5th keeper that preferred embodiment provides, characteristics then are: be provided with four cracks 52 around the opening 50, so that probe 90 is when passing opening 50, can more easily make each crack 52 distortion, make things convenient for probe 90 to be installed in keeper.
As shown in Figure 9, be a wherein opening 60 for the present invention's the 6th keeper that preferred embodiment provides, its version and the 4th preferred embodiment are roughly the same, are provided with two cracks 62 around the opening 60, and characteristics are: opening 60 is triangular in shape.
And as shown in figure 10, it is first and second opening 71,72 for the present invention's the 7th keeper that preferred embodiment provides, first opening 71 and second opening 72 are all generally rounded, first opening 71 and second opening 72 are overlapped and are interconnected, the integral width of this two opening 71,72 is slightly larger than body portion 94 cross sections of probe 90 approximately, and is also available for wearing probe 90.
Claims (17)
1. keeper that is used for probe unit, it is characterized in that this keeper has a plurality of openings that are penetration state, the wall location of this opening and a contained probe, and be provided with at least one crack around this opening respectively, described crack stretches out from the wall of this opening respectively.
2. according to the described keeper that is used for probe unit of claim 1, it is characterized in that wherein respectively this opening is generally rounded.
3. according to the described keeper that is used for probe unit of claim 1, it is characterized in that wherein respectively this opening is generally triangular in shape.
4. according to the described keeper that is used for probe unit of claim 1, it is characterized in that wherein respectively this opening generally is polygon.
5. according to the described keeper that is used for probe unit of claim 1, it is characterized in that this keeper is the made thin slice of Polyimide material.
6. according to the described keeper that is used for probe unit of claim 1, it is characterized in that, respectively this opening and respectively this crack all make with laser processing mode.
7. according to the described keeper that is used for probe unit of claim 1, it is characterized in that described crack is symmetry shape ground from respectively this opening extension.
8. keeper that is used for probe unit, it is characterized in that, this keeper has a plurality of first openings that are penetration state, the wall location of first opening and a contained probe, and be provided with at least one second opening around this first opening respectively, respectively this second opening stretches out from the wall of this first opening respectively.
9. according to the described keeper that is used for probe unit of claim 8, it is characterized in that wherein respectively this first opening is generally rounded.
10. according to the described keeper that is used for probe unit of claim 8, it is characterized in that wherein respectively this first opening is generally triangular in shape.
11., it is characterized in that wherein respectively this first opening generally is polygon according to the described keeper that is used for probe unit of claim 8.
12., it is characterized in that wherein respectively this second opening is generally elongated according to the described keeper that is used for probe unit of claim 8.
13., it is characterized in that wherein respectively this second opening is generally triangular in shape according to the described keeper that is used for probe unit of claim 8.
14., it is characterized in that this keeper is the made thin slice of Polyimide material according to the described keeper that is used for probe unit of claim 8.
15. according to the described keeper that is used for probe unit of claim 8, it is characterized in that, respectively this first opening and respectively this second opening all make with laser processing mode.
16., it is characterized in that described second opening is symmetry shape ground from respectively this first opening extension according to the described keeper that is used for probe unit of claim 8.
17. keeper that is used for probe unit, it is characterized in that, this keeper has general rounded one first opening and one second opening, the wall location of first opening and a contained probe, this first opening and this second opening are overlapped and be interconnected, and integral width is greater than the cross section of this probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101134979A CN100492021C (en) | 2005-10-14 | 2005-10-14 | Positioning unit for probe device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101134979A CN100492021C (en) | 2005-10-14 | 2005-10-14 | Positioning unit for probe device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1948972A CN1948972A (en) | 2007-04-18 |
| CN100492021C true CN100492021C (en) | 2009-05-27 |
Family
ID=38018548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101134979A Active CN100492021C (en) | 2005-10-14 | 2005-10-14 | Positioning unit for probe device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100492021C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109581006B (en) * | 2017-09-29 | 2021-09-07 | 中华精测科技股份有限公司 | Probe device and rectangular probe thereof |
| CN112986687B (en) * | 2021-04-30 | 2021-09-10 | 成都宏明电子股份有限公司 | Thermistor chip screening test auxiliary fixtures with surface electrode |
-
2005
- 2005-10-14 CN CNB2005101134979A patent/CN100492021C/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN1948972A (en) | 2007-04-18 |
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