CN100446901C - Surface-coated cutting tool having film with compressive stress intensity distribution - Google Patents

Abstract

A surface-coated cutting tool (1), comprising a base material (2) and a film (3) formed on the base material (2). The film (3) forms an outermost layer on the base material (2) and has a compressive stress. The compressive stress varies so as to have an intensity distribution in the thickness direction of the film (3). The intensity distribution is characterized in that the compressive stress on the surface of the film is continuously reduced from the surface of the film to a first intermediate point positioned between the front surface of the film and the bottom surface of the film and has a minimum point at the first intermediate point.

Description

Have compression stress intensity distributions the surface coating cutting tool of filming arranged

Technical field

The present invention relates to cutting element such as drill bit, end mill(ing) cutter (end mill), the throw-away tip of drill bit (throw away tip), the throw-away tip of end mill(ing) cutter, the throw-away tip of milling, the throw-away tip of rotary cut, the metal saw, gear cutting tool, reamer, and screw tap and relate more specifically on its surface (outermost layer), be formed with and be used to improve for example surface coating cutting tool of filming of the characteristic of wearability.

Background technology

Usually, hard metal (WC-Co alloy or by adding Ti (titanium) in the WC-Co alloy, Ta (tantalum), the alloy that carbonitride obtained of Nb (niobium) etc.) has been used for cutting element.Increased the trend of high-speed cutting in recent years, use sintered-carbide tool more and more, this sintered-carbide tool is by using CVD (chemical vapour desposition) or PVD (physical vapor deposition), at basic material such as hardmetal, cermet or on based on the surface of the pottery of aluminium oxide or silicon nitride coating 3-20 μ m thickness by the periodic table of elements in IVa family, the carbide of Va family and VIa family metal or Al (aluminium), nitride, carbonitride, boron nitride and oxide are formed films and obtains.

Especially,, the coating that is obtained by PVD do not damage the intensity of basic material because can improving wearability, so it is widely used for the cutting element of desired strength, and as drill bit, the throw-away tip that end mill(ing) cutter and milling or rotary cut are used.

Recently, in order further to improve the efficient in working angles, improved cutting speed.Because this trend needs bigger wearability in instrument.Yet, high-wearing feature if desired, toughness can reduce.Realize when therefore, having required high-wearing feature and high tenacity.

In order to satisfy this demand, advised continuously or changed the method (the open No.2001-315006 (patent documentation 1) of Japan Patent) of internal stress in the filming of on the surface of the basic material of cutting element, forming such as compression stress in the substep mode.Obtain some effects in the requirement that this suggestion realizes when satisfying for wearability and toughness.

In the cutting element according to above-mentioned suggestion, the face side of the compression stress of filming from the face side of filming towards basic material improves equably or descends.Therefore, in order to improve toughness significantly, compression stress should improve towards the face side of filming from the face side of basic material.Simultaneously, in order to improve wearability significantly, the face side that compression stress should improve from the face side of filming towards basic material improves.

In other words, if reach maximal compressed stress on film coated surface, then toughness is excellent and wearability is poor.This is because towards the surface of basic material, and compression stress descends (continuously or in a step-wise fashion) equably.On the contrary, if reach maximal compressed stress on the surface of basic material, then wearability is excellent and toughness is poor.This is because towards the surface of filming, and compression stress descends (continuously or in a step-wise fashion) equably.

Especially, reach on the surface of filming in the cutting element of maximal pressure stress under compression, (in coating by after covering with paint, lacquer, colour wash, etc.) big compression stress when applying impact stress is maybe filmed and is tended to self-destruction because after formation is filmed.Then, tend to take place fine film and peel off (below, be called the film chipization), it influences the outward appearance and the cutting ability in high accuracy processing of cutting element unfriendly.

Because realize it being in the fundamental characteristics one in toughness and the wearability in the cutting element of this type, the cutting element that obtains these characteristics of higher level simultaneously is required.

Patent documentation 1: the open No.2001-315006 of Japan Patent

Summary of the invention

The problem that the present invention solves

Finished the present invention in view of aforesaid situation, the purpose of this invention is to provide the cutting element of surface applied, the inhibition that in cutting element, has obtained excellent toughness and wearability and realized the rete chipization.

The mode of dealing with problems

Study in order to address the above problem, the inventor expects as a result, if the compression stress on the surface portion of filming that forms as outermost layer on the basic material be increased and the intensity distributions of the inner compression stress of filming in form relative minimum point, near relative minimum point, can suppress stress as impacting etc., keep lip-deep high tenacity simultaneously, and can improve simultaneously for the inhibitory action and the wearability of rete chipization from the teeth outwards.Finished the present invention based on this notion and further investigation.

Specifically, surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions embody feature in: on the surface of filming compression stress will be from the surface of filming towards film coated surface and first intermediate point between the bottom surface of filming reduces continuously and on first intermediate point compression stress reach relative minimum point.Because reach relative minimum point on first intermediate point, at this some place, self-destruction of filming or stress are inhibited as impacting etc., so crackle can suppress effectively towards the development of the bottom surface of filming.Therefore, first intermediate point is not to be positioned on the bottom surface (overlapping) of filming, but as described above between the surface of filming and the bottom surface of filming.

Mainly comprise four embodiments (being first to the 4th embodiment as described below) according to surface coating cutting tool of the present invention, as the embodiment (especially, the intensity distributions towards the bottom surface of filming) of intensity distributions from first intermediate point.

Be characterised in that according to the intensity distributions of first embodiment of the present invention and on the surface of filming, reach the maximal pressure stress under compression and to keep steady state value to this compression stress of the bottom surface of filming from first intermediate point.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 50% position at the most.

Compression stress on first intermediate point of filming can be set to the value that is equivalent at the 20-90% of the lip-deep compression stress of filming.

Additionally, the compression stress on first intermediate point of filming can be set to the value that is equivalent at the 40-80% of the lip-deep compression stress of filming.

Compression stress can reach maximum on the surface of filming, this maximal pressure stress under compression can from the surface of filming to the predetermined distance of first intermediate point kept and afterwards compression stress can reduce continuously towards first intermediate point.

Intensity distributions according to second embodiment of the present invention is characterised in that: increase continuously towards this compression stress of the bottom surface of filming from first intermediate point.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 50% position at the most.

Compression stress can reach maximum on the surface of filming.Compression stress on first intermediate point of filming can be set to the value that is equivalent at the 20-90% of the lip-deep compression stress of filming.

Additionally, the compression stress on first intermediate point of filming can be set to the value that is equivalent at the 40-80% of the lip-deep compression stress of filming.

The lip-deep compression stress of filming can from the surface of filming to the predetermined distance of first intermediate point kept and afterwards compression stress can reduce continuously towards first intermediate point.

Intensity distributions according to the 3rd embodiment of the present invention is characterised in that: compression stress increases continuously from first intermediate point towards second intermediate point between first intermediate point and the bottom surface of filming and reaches relative peak at second intermediate point.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 50% position at the most.Second intermediate point can be in the surface of filming at a distance of be equivalent to coating thickness at least 0.2% to 95% position at the most.

Compression stress can reach maximum on the surface of filming.In addition, the compression stress on first intermediate point of filming can be set to the value that is equivalent at the 20-90% of the lip-deep compression stress of filming.

Additionally, the compression stress on first intermediate point of filming can be set to the value that is equivalent at the 40-80% of the lip-deep compression stress of filming.

The lip-deep compression stress of filming can from the surface of filming towards the predetermined distance of first intermediate point kept and afterwards compression stress can reduce continuously towards first intermediate point.

Intensity distributions according to the 4th embodiment of the present invention is characterised in that: compression stress increases continuously from first intermediate point towards second intermediate point between first intermediate point and the bottom surface of filming and reaches relative peak at second intermediate point, and intensity distributions has one or more similar relative minimum points between second intermediate point and the bottom surface of filming.

In addition, intensity distributions can have one or more similar relative peaks between second intermediate point and the bottom surface of filming.Intensity distributions can have one or more similar relative minimum points and one or more similar relative peaks between second intermediate point and the bottom surface of filming, in the mode that replaces and repeat according to this order.

Whole relative minimum points can reach identical substantially compression stress and whole relative peaks can reach identical substantially compression stress.Additionally, whole relative minimum points can have the compression stress value that differs from one another with whole relative peaks.

Here, compression stress can be at least-stress of 15GPa in the 0GPa scope at the most.In addition, first intermediate point can be in film coated surface at a distance of be equivalent to coating thickness at least 0.1% to 40% position at the most.Second intermediate point can be in the surface of filming at a distance of be equivalent to coating thickness at least 0.2% to 80% position at the most.

Can be set to the value of the 10-80% of compression stress on the surface that is equivalent to filming in the compression stress on first intermediate point that can reach the maximal pressure stress under compression on the surface of filming and film.

Additionally, the compression stress on first intermediate point of filming can be set to the value that is equivalent at the 20-60% of the lip-deep compression stress of filming.

The lip-deep compression stress of filming can from the surface of filming towards the predetermined distance of first intermediate point kept and afterwards compression stress can reduce continuously towards first intermediate point.

Effect of the present invention

Owing to carry out structural design like that as mentioned above, obtained the performance of excellent toughness and excellent abrasive and the improved chipization of anti-the rete according to surface coating cutting tool of the present invention simultaneously.

Especially, can find out from intensity distributions according to aforesaid first embodiment, on the surface of filming, reach the maximal pressure stress under compression, can prevent chipization so effectively, and improve the toughness of cutting element at the instrument that causes of the starting stage of cutting etc.In addition, the relative minimum point in the intensity distributions of compression stress is to film to form in the inner part near the surface, and this part is used for alleviating effectively the self-destruction of filming or stress as impacting etc.Therefore, the performance of the chipization of anti-the rete is significantly improved.In addition, this compression stress keeps constant from relative minimum point to the bottom surface of filming, and wearability is improved significantly in view of the above.

In addition, from according to the intensity distributions of aforesaid second embodiment as can be seen, be higher than in the inner compression stress of filming in the lip-deep compression stress of filming, can prevent chipization so effectively, and improve the toughness of cutting element at the instrument that causes of the starting stage of cutting etc.And because the relative minimum point in the intensity distributions of compression stress is to film to form in the inner part near the surface, and this part is used for alleviating effectively the self-destruction of filming or stress as impacting etc.Therefore, the performance of the chipization of anti-the rete is significantly improved, and wearability also is improved simultaneously.In addition, compression stress increases to the bottom surface of filming from relative minimum point, can obtain more excellent toughness in view of the above.

In addition, from according to the intensity distributions of aforesaid the 3rd embodiment as can be seen, in the lip-deep compression stress of filming greater than in the inner compression stress of filming, can prevent chipization so effectively, and improve the toughness of cutting element at the instrument that causes of the starting stage of cutting etc.In addition, because the relative minimum point in the intensity distributions of compression stress is to film to form in the inner part near the surface, and this part is used for alleviating effectively the self-destruction of filming or stress as impacting etc.Therefore, the performance of the chipization of anti-the rete is significantly improved, and wearability also is improved simultaneously.In addition, relative minimum point not only is provided but also relative peak is provided, make and near relative peak, realized more excellent toughness.

In addition, from according to the intensity distributions of aforesaid the 4th embodiment as can be seen, in the lip-deep compression stress of filming greater than in the inner compression stress of filming, can prevent chipization so effectively, and improve the toughness of cutting element at the instrument that causes of the starting stage of cutting etc.In addition, because the relative minimum point in the intensity distributions of compression stress is to film to form in the inner part near the surface, and this part is used for alleviating effectively the self-destruction of filming or stress as impacting etc.Therefore, the performance of the chipization of anti-the rete is significantly improved, and wearability also is improved simultaneously.In addition, relative minimum point not only is provided but also relative peak is provided, make and near relative peak, realized more excellent toughness.In addition, formed a plurality of this type of relative minimum point and relative peak, the performance of toughness and wearability and the chipization of anti-the rete further is improved in view of the above.

As mentioned above, the present invention has successfully realized excellent toughness and excellent abrasive simultaneously and has been implemented in improvement on the performance of the chipization of anti-the rete, owing to having the intensity distributions of the compression stress of feature as previously discussed.

Description of drawings

Fig. 1 is the schematic cross-sectional view according to surface coating cutting tool of the present invention.

Fig. 2 is in the amplification schematic cross-sectional view according to a part in the filming of surface coating cutting tool of the present invention.

Fig. 3 is the figure of first embodiment that has shown the intensity distributions of the compression stress of filming.

Fig. 4 has shown when keeping on the distance of lip-deep maximal pressure stress under compression at defined of filming the figure of first embodiment of the intensity distributions of the compression stress of filming.

Fig. 5 is the schematic cross-sectional view according to surface coating cutting tool of the present invention with formed intermediate layer.

Fig. 6 is the figure of second embodiment that has shown the intensity distributions of the compression stress of filming.

Fig. 7 has shown when obtaining keeping on the distance of lip-deep compression stress at defined of filming the figure of second embodiment of the intensity distributions of the compression stress of filming.

Fig. 8 is amplifying schematic cross-sectional view according to another of a part in the filming of surface coating cutting tool of the present invention.

Fig. 9 is the figure of the 3rd embodiment that has shown the intensity distributions of the compression stress of filming.

Figure 10 has shown when obtaining keeping on the distance of lip-deep compression stress at defined of filming the figure of the 3rd embodiment of the intensity distributions of the compression stress of filming.

Figure 11 is amplifying schematic cross-sectional view according to another of a part in the filming of surface coating cutting tool of the present invention.

Figure 12 is the figure of the 4th embodiment that has shown the intensity distributions of the compression stress of filming.

Figure 13 has shown when obtaining keeping on the distance of lip-deep compression stress at defined of filming the figure of the 4th embodiment of the intensity distributions of the compression stress of filming.

The statement of reference character

1 surface coating cutting tool; 2 basic materials; 3 film; 4 surfaces of filming; 5 first intermediate points; 6 bottom surfaces of filming; 7 arrows; 8 intermediate layers; 9 second intermediate points; 10 the 3rd intermediate points; With 11 the 4th intermediate points.

The specific embodiment

Be described in more detail below the present invention.The narration of embodiment will be carried out with reference to the accompanying drawings, represent identical or corresponding element with those of the same reference character with defined.

＜surface coating cutting tool 〉

As shown in fig. 1, surface coating cutting tool 1 according to the present invention comprise basic material 2 and on basic material, form film 3.3 directly contact with the surface of basic material 2 after forming though film in Fig. 1, can film 3 and basic material 2 between any intermediate layer that will describe, formation back, condition is to film 3 as outermost layer.In this application, " what form on basic material films " is believed to comprise the situation that wherein forms any intermediate layer.

Can be used as cutting element such as drill bit, end mill(ing) cutter, the throw-away tip of drill bit, the throw-away tip of end mill(ing) cutter suitably according to this type of surface coating cutting tool of the present invention, the throw-away tip of milling, the throw-away tip of rotary cut, metal saw, gear cutting tool, reamer, or screw tap, or the like.Especially, it is suitable for modifying cutting or precision cutting and is used for the rotary cut process.In these were used, surface coating cutting tool reached excellent toughness and wearability.In addition, because surface coating cutting tool reaches the performance of the chipization of anti-rete of excellence, the machined surface roughness of the material that is cut is improved.In addition, because the excellent light on the finished surface of the material that is cut is also accomplished, there is rough machined processing procedure also to allow simultaneously.

＜basic material 〉

Usually any basic material of basic material that is known as the application of the above-mentioned type can be used for according in the surface coating cutting tool of the present invention.For example, preferred, use hard metal (, except that WC, also to contain the material of Co as WC type hardmetal, or added Ti, Ta, the material of the carbonitride of Nb or analog), cermet (mainly by TiC, TiN, TiCN or analog are formed), high-speed steel, pottery (titanium carbide, carborundum, silicon nitride, aluminium nitride, aluminium oxide, or analog), sintered cubic bodily form boron nitride, or sintered diamond.

Among these various matrix materials, especially, WC-type hardmetal, cermet or sintered cubic bodily form boron nitride are preferably selecteed.This be because these basic materials at high temperature hardness and the balance between the intensity on excellent especially, and have the basic material that excellent characteristic can be used as the surface coating cutting tool of above-mentioned application.

＜film

According to of the present invention film be on basic material, form and as outermost layer.Form as long as film in this way, filming needn't apply the whole surface of basic material and not have to form the part of filming or not have the part of the intensity distributions of the satisfied following compression stress that will describe can be included in the surface of basic material.Be noted that the following situation that the present invention includes: wherein, when in case form and to film and when removing the surface of filming a part of by some last handling processes afterwards, the layer that newly exposes to the open air can be used as filming of the intensity distributions that satisfies compression stress of the present invention.In addition, the present invention similarly comprises following situation: wherein, when forming intermediate layer (below will describe) at basic material with between filming and removing this coating and intermediate layer when coming out equally as outermost layer by some last handling processes, intermediate layer in expose portion has been used as film (if the intermediate layer forms by a plurality of layers, then the outermost layer among a plurality of layers (as the layer on surface) is as involved in the present invention the filming) of the intensity distributions that satisfies compression stress of the present invention.

Form this and film, so that in the various characteristics such as the wearability that are used for determining employed cutting edge part, oxidation resistance, the toughness of instrument, or obtain on the chromatic characteristic to improve.The composition of filming is not particularly limited and common known composition can both adopt.For example, exemplary composition comprises the IVa elements (Ti, Zr, Hf etc.) that is selected from the periodic table of elements, Va elements (V, Nb, Ta etc.), the element (Cr of VIa family, Mo, W etc.) at least a element in, Al (aluminium), B (boron), Si (silicon), and the carbide of Ge (germanium), nitride, oxide, carbonitride, oxycarbide, oxynitride, or carbide-nitride-oxide, or their solid solution.

Especially, exemplary suitable composition comprises Ti, Al, (Ti _1-xAl _x), (Al _1-xV _x), (Ti _1-xSi _x), (Al _1-xCr _x), (Ti _1-x-yAl _xSi _y), or (Al _1-x-yCr _xV _y) nitride of (x or y represent to be not more than any number of 1) (further contain B, the material of Cr or analog also can comprise), carbonitride, oxynitride or carbide-nitride-oxide.

More preferably, exemplary composition comprises TiCN, TiN, TiSiN, TiSiCN, TiAlN, TiAlCrN, TiAlSiN, TiAlSiCrN, AlCrN, AlCrCN, AlCrVN, TiBN, TiAlBN, TiSiBN, TiBCN, TiAlBCN, TiSiBCN, AlN, AlCN, AlVN, AlVCN and analog.In these are formed, the general formula that the ratio of each atom is exemplary as described above.

Can suppose that this based film forms as the single type layer.Should be pointed out that the single type layer here is meant such structure, wherein, it is identical for each layer that the quantity of accumulation horizon can be set at type one or more and that constitute the element of this layer.So,, be also included within the single type layer here by the formed structure of a plurality of layers of different atom ratios as long as the type of element is identical.

In according to of the present invention filming, especially on the whole, the type of element is preferably identical with the ratio of atom.Yet aforesaid single type layer is believed to comprise super multi-layer film structure, and wherein one deck has the thickness that is lower than 0.1 μ m and dissimilar elements constitutes layer separately.

＜the thickness of filming 〉

Though be not particularly limited, preferably have the thickness that is not less than 0.1 μ m and is not more than 10 μ m according to of the present invention filming.If thickness is lower than 0.1 μ m, in some cases, because the improvement on various characteristics that formation caused of filming can not obtain fully.Simultaneously, if thickness surpasses 10 μ m, then film and itself can easily peel off.

The method that＜formation is filmed 〉

Be not particularly limited though form method of filming according to the present invention, film and preferably use physical vapor deposition method (PVD) to form.Adopt physical vapor deposition, the compression stress of filming can easily be changed, to form intensity distributions.

That is, have been found that when filming with the formation of physical vapor deposition method according to the research that the inventor carried out, the compression stress of filming is subjected to temperature, active gases pressure, the influence of substrate bias-voltage etc., and especially, wherein, when filming, formation influenced by the substrate bias-voltage.

It is as follows that reason is considered to.Specifically, for example, when big substrate bias-voltage put on basic material, constituting the element of filming was to offer basic material with ionized state under high-energy.Then, the impulsive force when element collision basic material become bigger and therefore the compression stress of filming that forms become bigger.On the contrary, suppose, if the substrate bias-voltage is low since basic material and the caused impact of the collision between the element under the ionized state also be little and so compression stress also be little.

So,, can obtain the intensity distributions of the compression stress of on the thickness direction of filming, filming when on basic material, forming when filming by adopting the physical vapor deposition method and by regulating the substrate bias-voltage.As following described in detail, utilize the adjusting of mechanical shock or thermal shock, or the annealing phenomenon of use heat also is possible.

Form method of filming of the present invention though physical vapor deposition preferably is adopted to, do not wish to get rid of the chemical vapour desposition that is known as the another kind of method that formation films.

Exemplary physical vapor deposition method comprises known method such as sputter or ion plating usually, and wherein the substrate bias-voltage can be regulated.Especially, among the whole bag of tricks, ion plating or magnetron sputtering are preferred the employings.

Ion plating refers to following method.Specifically, metal is used as anode as negative electrode and vacuum chamber.Then, evaporation of metal and ionization and while negative voltage (substrate bias-voltage) are applied in basic material, and ion is displaced with metal ion and is deposited on the surface of basic material like this.In this method, if neutralizing to vacuum, nitrogen supply causes and metal reaction, then formed the nitride of this metal.For example, if titanium is used as metal and causes and the nitrogen reaction, then form titanium nitrogen (TiN).

Existing various types of ion platings, however the cathode arc ion plating that reaches the primitive element (rawelement) of macroion ratio is preferred especially the employing.

For the use of cathode arc ion plating, can before filming, formation carry out in the lip-deep metal ion bombardment method of basic material.Therefore, the remarkable improvement on the cohesive of filming also can realize effectively.Therefore, consider that from cohesive the cathode arc ion plating is a preferable methods.

Simultaneously, magnetron sputtering refers to following method.Specifically, after vacuum chamber reached high vacuum, Ar gas was introduced into and high voltage is put on target, thereby caused glow discharge.Then, this target is used and is carried out Ionized acceleration Ar by glow discharge and come radiation, and this target is implemented sputter then.Go out and Ionized target atom quickens and is deposited on the basic material by the substrate bias-voltage between target and substrate, therefore form film.Exemplary magnetically controlled sputter method comprises the magnetron sputtering of balance, unbalance magnetron sputtering or the like.

Use the method for physical vapor deposition method control substrate bias-voltage to show it is the method that forms the intensity distributions of the compression stress of filming, yet the present invention is not limited only to it.For example, utilize mechanical shock as applying the method for compression stress in the sandblast after forming of filming, alleviate the method for compression stress by use thermal source such as heater, laser or analog, or the combined method of these methods is possible.

＜the compression stress of filming 〉

Has compression stress according to of the present invention filming.Preferably, compression stress can be not less than-15GPa is to the stress that is not more than in the 0GPa scope.More preferably, the lower limit set of compression stress is to-10GPa and further preferably set to-8GPa, and its upper limit more preferably is set to-and 0.5GPa and more preferably being set to-1GPa.

If the compression stress of filming is lower than-15GPa, special release coated film on the crestal line part of cutting edge then, this depends on the shape (instrument that the instrument of minimum angle (included angle) is arranged or have complicated shape as cutting edge) of cutting element.Simultaneously, if the compression stress of filming is higher than 0GPa, the stress of then filming enters extended state.Then, in filming, cause crackle, cause the chipization of instrument itself.

One type the internal stress (intrinsic strain) that exists during here the compression stress of Shi Yonging is illustrated in and films, and by "-" (negative sign) numerical value (unit: GPa) express.Therefore, the absolute value of the above numerical value of this expression phrase " big compression stress (internal stress) " expression is big, represents that the absolute value of above numerical value is little and express phrase " little compression stress (internal stress) ".

Compression stress in the present invention is with sin ²The ψ method is measured.Use the sin of X ray ²The ψ method is widely used as the method for the residual stress of measurement in polycrystalline material.This measuring method be described in detail in " X-ray Stress Measurement " the 54-66 page or leaf (The Society of MaterialsScience, Japan, 1981, published by Yokendo Co., Ltd).In the present invention, at first, the penetration depth of X ray fixes by inclination method and inclination degree computing method are combined, and be in a plane of the direction that comprises measured stress and the sample surfaces normal that on the measuring position, provides, to measure, thereby prepare 2 θ-sin with respect to the various angles of the angle of diffraction 2 θ of ψ direction ²The ψ curve map.The mean pressure stress under compression that reaches this degree of depth (from the surperficial calculated distance of filming) can be that the basis records with the gradient of curve map.Similarly, sequentially measure mean pressure stress under compression that arrives different depth and the intensity distributions that mathematical method is used to find compression stress on the thickness direction of filming.

More particularly, X ray from the X ray light source enters in a kind of method by means of X-ray measurement stress of sample with predetermined angular therein, X ray by the sample diffraction is to be detected by X-ray detector, with internal stress be that the basis is measured with the detected value, can find out by following mode in the compression stress of sample interior.On the arbitrary portion of sample, enter the surface of sample along the angle of any setting from the X ray of X ray light source.When sample along the X-radiation point that passes sample and when rotating with the χ axle that overlaps with incident X-rays at the ω axle of the incident X-rays form right angle on the sample surfaces and along the time in the rotation parallel of ω axle with sample carrier, this sample requires to keep constant on the surface of sample and the angle between the incident X-rays when rotated, and change at normal on the diffraction surfaces and the angle ψ between the normal on the sample surfaces, to measure diffracted beam.

Here, consider that synchrotron radiation (SR) is preferably used as x-ray source and seeks intensity distributions on the coating thickness direction from the quality of x-ray source (as high radiance, high collimation, Wavelength variable etc.).

For from aforesaid 2 θ-sin ²Find compression stress on the ψ curve map, Young's modulus of filming and Poisson's ratio are essential.Here, Young's modulus can utilize dynamic stiffness meter or similar devices to measure, and as Poisson's ratio, uses the value that is set in about 0.2.This is because can marked change to another kind of material Poisson's ratio from a kind of material.In the present invention, the intensity distributions of compression stress is important, rather than compression stress value especially accurately.Therefore, from 2 θ-sin ²When finding compression stress among the ψ figure, the measure of seeking lattice paprmeter and interplanar distance rather than use Young's modulus can substitute the intensity distributions of compression stress.

＜intensity distributions 〉

Compression stress of filming according to the present invention changes, thereby has intensity distributions on the coating thickness direction.Here, the thickness direction of filming refers to from the surface of filming towards the direction of the bottom surface of filming (because film as the outermost layer on basic material, the bottom surface refers to outermost near the surface of basic material) with perpendicular to the direction on the surface of filming.Provide detailed description with reference to figure 2, Fig. 2 has shown the enlarged cross-sectional view of 3 the part of filming of Fig. 1.Here, the direction on coating thickness is to use from the surface 4 of filming that the arrow 7 towards the bottom surface 6 of filming shows.Though arrow 7 points to the bottom surface 6 of filming from the surface 4 of filming for convenience's sake,, this direction not necessarily is limited to direction from the top down, as long as this direction is perpendicular to the surface of filming.That is to say that the thickness direction of filming can point to the surface 4 of filming from the bottom surface 6 of filming.

Intensity distributions is represented according to the variation on the amplitude of mode in compression stress that forms distribution on the thickness direction of filming.In other words, refer to not to be to be parallel on the direction on the surface of filming but the variation of compression stress amplitude on perpendicular to the direction on the surface of filming in the intensity distributions of compression stress on the thickness direction of filming.

Intensity distributions is characterised in that in the compression stress that reaches on the surface of filming and reduces continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and compression stress reaches relative minimum point at first intermediate point.Hereinafter, explain first to the 4th embodiment of intensity distributions in detail.

＜intensity distributions--first embodiment 〉

First embodiment of intensity distributions is characterised in that on the surface of filming and reaches the maximal pressure stress under compression (in other words, reach the compression stress of maximum value), compression stress towards reducing continuously with first intermediate point between the bottom surface of filming on the surface of filming and reach relative minimum point at first intermediate point, and is that this compression stress keeps steady state value to the bottom surface of filming from first intermediate point from the surface of filming.

This characteristic will be described in detail with reference to Fig. 2 and Fig. 3 of first embodiment that has shown intensity distributions of the present invention.Fig. 3 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 2, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position of 1/2 distance of coating thickness (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming).Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming 4 at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.1% to the position of 50% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 40% and further preferably set 35% of this thickness.If will be when being set in 0.1% and the big and heavy cutting that is used for high impact forces when this instrument that are lower than thickness as the cutting interrupted, applying of compression stress be incomplete, and the effect of the inhibition of rete chipization does not show.In addition, if this distance is set greater than 50% of thickness, then the effect that produces in the reduction of the internal compression stresses of filming can reduce and the improvement of the chipization of anti-the rete can not show.

Preferably, the compression stress on first intermediate point of filming is set to the 20-90% in the lip-deep compression stress of filming.More preferably, on first intermediate point upper limit of compression stress be set to compression stress from the teeth outwards 85% and more preferably be set to 80% of compression stress from the teeth outwards, simultaneously its lower limit be set to compression stress from the teeth outwards 30% and more preferably be set to its 40%.

Be lower than 20% of compression stress from the teeth outwards if the compression stress on first intermediate point of filming is set, then can't obtain enough toughness.Simultaneously, if the compression stress on first intermediate point of filming surpasses 90% of compression stress from the teeth outwards, then impact absorption (stress relaxation) is incomplete, and the inhibition effect of rete chipization can not show.

Minimum point is that foundation one position is (in Fig. 3 relatively, with the point of the surface of filming at a distance of about 0.1 μ m) observed on first intermediate point 5, and show, on the surface of filming, reach degree that the compression stress (compression stress has approximately-value of 5GPa in Fig. 3) of peak reduces continuously and reduce towards the bottom surface 6 of filming and change in minimum point relatively.Here, reduce degree change and refer to that the value towards this compression stress of bottom surface of filming begins to become constant after reaching relative minimum point, as shown in Figure 3.Therefore, here relatively the meaning of minimum point is equal to, or more is wider than, as with the meaning of the relative minimum point of the term of the related use of the function in mathematics.

Have an independent relative minimum point in above-mentioned intensity distributions, this is different from the patent documentation 1 variation in the mode of going forward one by one basically.

In Fig. 3, compression stress only reaches on the surface of filming the highest (that is, with the point of the surface of filming at a distance of 0 μ m), yet, embodiment of the present invention are not limited to such situation, are only reaching the maximal pressure stress under compression with the surface of filming at a distance of the point of 0 μ m.That is, as shown in Figure 4, the present invention also comprises the situation that the predetermined distance scope (preferably being not more than 0.5 μ m) of the bottom surface of filming keeps the maximal pressure stress under compression of wherein crossing over from the surface of filming to.In other words, the present invention includes a kind of embodiment, wherein compression stress reaches peak on the surface of filming, leap from the surface of filming to the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point keep this maximal pressure stress under compression and afterwards compression stress reduce continuously towards first intermediate point.

As mentioned above, when crossing over from the surface of filming to the predetermined distance scope of the bottom surface of filming when remaining on the lip-deep maximal pressure stress under compression of filming, reached excellent especially toughness, this is preferred.

Wherein compression stress situation about reducing continuously to first intermediate point from the surface of filming not only comprises the situation that compression stress wherein reduces by the mode of the downward protrusion shown in Fig. 3 but also comprises the situation that compression stress wherein reduces by mode protruding upward or reduces linearly.In addition, if compression stress generally reduces to first intermediate point from the surface of filming, then the situation of the continuous reduction here comprises the situation that compression stress wherein partly increases, or the degree (slope) that wherein reduces changes at a certain mid point, and maybe the situation of (with the hierarchical approaches reduction) is carried out in this variation with hierarchical approaches.

Wherein compression stress value keeps constant situation to comprise that not only wherein compression stress is set to the situation of accurate steady state value but also comprises that wherein compression stress is set to the situation of steady state value substantially from first intermediate point to the bottom surface of filming.

As mentioned above, first embodiment according to intensity distributions of the present invention, compression stress reaches peak on the surface of filming, and compression stress from the surface of filming to reducing continuously with first intermediate point the bottom surface of filming on the surface of filming and reaching relative minimum point at first intermediate point.On the surface of filming, reach the maximal pressure stress under compression, be suppressed at the generation of the lip-deep crackle of filming so as much as possible, near relative minimum point, prevent because the self-destruction of filming that the big compression stress at film coated surface place causes, and alleviate the stress that is applied on the film coated surface as impacting.Therefore, showed the performance of especially effective excellent toughness and the chipization of anti-the rete.

In addition, according to first embodiment of intensity distributions of the present invention, compression stress is kept steady state value from first intermediate point to the bottom surface of filming, so that suppress the self-destruction of filming and extremely excellent abrasive is provided.In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that does not have relative minimum point and compression stress to improve equably or descend continuously or with hierarchical approaches from the surface of filming to the bottom surface of filming.

＜intensity distributions--second embodiment 〉

Second embodiment of intensity distributions is characterised in that, the compression stress of the surface of filming from the surface of filming to the surface of filming and first intermediate point the bottom surface of filming reduce continuously, and compression stress reaches relative minimum point at the first intermediate point place, and compression stress increases to the bottom surface of filming continuously from first intermediate point.

This characteristic will be described in detail with reference to Fig. 2 and Fig. 6 of second embodiment that has shown intensity distributions of the present invention.Fig. 6 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 2, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position of 1/2 distance of coating thickness (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming).Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.1% to the position of 50% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 40% and further preferably set 35% of this thickness.If will be when being set in 0.1% and the big and heavy cutting (heavy cutting) that is used for high impact forces when this instrument that are lower than thickness as the cutting (interrupted cutting) interrupted, applying of compression stress is incomplete, and the effect of the inhibition of rete chipization may can not show.In addition, if this distance is set greater than 50% of thickness, then can reduce and the improvement of the performance of the chipization of anti-the rete can not show in the effect of the reduction of the internal compression stresses of filming.

In this intensity distributions, compression stress can reach peak (in other words, compression stress reaches the highest absolute value) on the surface 4 of filming.Therefore, can obtain excellent especially toughness.Simultaneously, compression stress also can reach peak (in other words, compression stress reaches the highest absolute value) on the bottom surface 6 of filming.Therefore can obtain excellent especially toughness.

Preferably, the compression stress on first intermediate point of filming is set to the 20-90% in the compression stress of the surface of filming.More preferably, on first intermediate point upper limit of compression stress be set to compression stress from the teeth outwards 85% and more preferably be set to 80% of compression stress from the teeth outwards, simultaneously its lower limit be set to compression stress from the teeth outwards 30% and more preferably be set to its 40%.

Be lower than in 20% of surface compression stress if the compression stress on first intermediate point of filming is set, then can't obtain enough toughness.Simultaneously, if the compression stress on first intermediate point of filming surpasses 90% of compression stress from the teeth outwards, then impact absorption (stress relaxation) not exclusively and to the inhibition effect of rete chipization can not show.

Minimum point is that foundation one position is (in Fig. 6 relatively, with the point of the surface of filming at a distance of about 0.1 μ m) observed on first intermediate point, and show, reduce continuously towards the bottom surface 6 of filming in the lip-deep compression stress of filming (compression stress that in Fig. 6, has the value of about-5GPa), and the degree that reduces changes in relative minimum point.Here, reduce degree change and refer to that the value towards this compression stress of bottom surface of filming begins to increase continuously after reaching relative minimum point, as shown in Figure 6.

In Fig. 6, minimum point only exists on first intermediate point relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative minimum point exists with certain thickness on the coating thickness direction.Here, the relative minimum point that exists with certain thickness refers to such situation: wherein the compression stress on relative minimum point since first intermediate point cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially.As mentioned above, minimum point exists with certain thickness since first intermediate point relatively, and wearability can further be improved like this.

Therefore, here relatively the meaning of minimum point is equal to, or more is wider than, as with the meaning of " the relative minimum point " of the term of the related use of the function in mathematics.

In Fig. 6, compression stress reduces continuously from the surface (that is, with the point of the surface of filming at a distance of 0 μ m) of filming, yet embodiment of the present invention are not limited to it.That is, for example, as shown in Figure 7, the present invention also comprises wherein in the lip-deep compression stress of filming and crosses over the situation that the distance range (preferably being not more than 0.5 μ m) of regulation is maintained towards the bottom surface of filming.In other words, the present invention includes wherein greater than the embodiment of the compression stress of inside (in other words in the compression stress of the surface of filming, the absolute value of compression stress is greater than the absolute value in the compression stress of inside from the teeth outwards), and compression stress is crossed over from the surface of filming the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point and is maintained and reduces continuously towards first intermediate point afterwards.

As mentioned above, when crossing over from the surface of filming to that the predetermined distance scope of the bottom surface of filming remains on the lip-deep compression stress of filming, reached excellent especially toughness, this is preferred.

Wherein compression stress situation about reducing continuously to first intermediate point from the surface of filming not only comprises the situation that compression stress wherein reduces by the mode of the downward protrusion shown in Fig. 6 but also comprises the situation that compression stress wherein reduces by mode protruding upward or reduces linearly.In addition, if compression stress generally reduces to first intermediate point from the surface of filming, then the situation of the continuous reduction here comprises the situation that compression stress wherein partly improves, or the degree (slope) that wherein reduces changes at a certain mid point, and maybe the situation of (with the hierarchical approaches reduction) is carried out in this variation with hierarchical approaches.

Wherein compression stress situation about increasing continuously to the bottom surface of filming from first intermediate point not only comprises the situation that compression stress wherein increases by the mode of the downward protrusion shown in Fig. 6 but also comprises the situation that compression stress wherein increases by mode protruding upward or increases linearly.In addition, if compression stress generally increases to the bottom surface of filming from first intermediate point, then the situation of the continuous increase here comprises the situation that compression stress wherein partly reduces, or the degree (slope) that wherein increases changes at a certain mid point, and maybe the situation of (with the hierarchical approaches increase) is carried out in this variation with hierarchical approaches.

As mentioned above, according to second embodiment of intensity distributions of the present invention, reduce continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and this compression stress reaches relative minimum point at first intermediate point in the lip-deep compression stress of filming.In the lip-deep compression stress of filming greater than compression stress in inside, be suppressed at the generation of the lip-deep crackle of filming so as much as possible, near relative minimum point, prevent because the self-destruction of filming that the big compression stress at film coated surface place causes, and alleviate the stress that is applied on the film coated surface as impacting.Therefore, the performance and the wearability of especially effective excellent toughness and the chipization of anti-the rete have been showed.

In addition, according to second embodiment of intensity distributions of the present invention, compression stress increases to the bottom surface of filming continuously from first intermediate point, like this self-destruction that can suppress to film and extremely excellent toughness wearability is provided.In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that does not have relative minimum point and compression stress to improve equably or descend continuously or with hierarchical approaches from the surface of filming to the bottom surface of filming.

＜intensity distributions--the 3rd embodiment 〉

The 3rd embodiment of intensity distributions is characterised in that; Reduce continuously with first intermediate point the bottom surface of filming to the surface of filming from the surface of filming and this compression stress reaches relative minimum point at first intermediate point in the compression stress of the surface of filming, and compression stress from first intermediate point to increasing continuously with second intermediate point the bottom surface of filming at first intermediate point and reaching relative peak at second intermediate point.

This characteristic will be described in detail with reference to Fig. 8 and Fig. 9 of the 3rd embodiment that has shown intensity distributions of the present invention.Fig. 9 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 8, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position of 1/2 distance of coating thickness (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming).Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming 4 at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.1% to the position of 50% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 40% and further preferably set 35% of this thickness.If will be when being set in 0.1% and the big and heavy cutting that is used for high impact forces when this instrument that are lower than thickness as the cutting interrupted, applying of compression stress be incomplete, and the effect of the inhibition of rete chipization may not show.In addition, if this distance is set greater than 50% of thickness, then can reduce and the improvement of the performance of the chipization of anti-the rete can not show in the effect of the reduction of the internal compression stresses of filming.

In this intensity distributions, compression stress can reach peak (in other words, compression stress reaches maximum value) on the surface 4 of filming.Therefore, can obtain excellent especially toughness.

Preferably, the compression stress on first intermediate point of filming is set to the 20-90% in the lip-deep compression stress of filming.More preferably, on first intermediate point upper limit of compression stress be set to compression stress from the teeth outwards 85% and more preferably be set to 80% of compression stress from the teeth outwards, simultaneously its lower limit be set to compression stress from the teeth outwards 30% and more preferably be set to its 40%.

Be lower than 20% of on first intermediate point compression stress if be set, then can't obtain enough toughness in the lip-deep compression stress of filming.Simultaneously, if the compression stress on first intermediate point of filming surpasses 90% of compression stress from the teeth outwards, then the effect of impact absorption (stress relaxation) not exclusively and the inhibition effect of rete chipization may not can show.

Minimum point is that foundation one position is (in Fig. 9 relatively, with the point of the surface of filming at a distance of about 0.1 μ m) observed on first intermediate point, and show in the lip-deep compression stress of filming (compression stress that in Fig. 9, has the value of about-5GPa) and reduce continuously, and the degree that reduces changes in relative minimum point towards the bottom surface 6 of filming.Here, reduce degree change and refer to that the value towards second this compression stress of intermediate point begins to increase continuously after reaching relative minimum point, as shown in Figure 9.

In Fig. 9, minimum point only exists on first intermediate point relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative minimum point exists with certain thickness on the coating thickness direction.Here, the relative minimum point that exists with certain thickness refer to wherein on minimum point relatively compression stress since first intermediate point cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially.As mentioned above, minimum point exists with certain thickness since first intermediate point relatively, and toughness can further be improved like this.

Therefore, here relatively the meaning of minimum point is equal to, or more is wider than, as with the meaning of the term " relative minimum point " of the related use of the function in mathematics.

Simultaneously, as shown in Figure 8, second intermediate point 9 is between first intermediate point 5 and the bottom surface 6 of filming, yet, second intermediate point 9 not necessarily must be positioned at first intermediate point 5 at a distance of being equivalent to a position of that distance of 1/2 of the distance from first intermediate point 5 to the bottom surface 6 of filming in vertical direction.

Preferably, second intermediate point 9 be positioned at and the surface of filming at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.2% to the position of 95% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.5% and further preferably set to 1% of this thickness, and the upper limit that should distance be set to aptly this thickness 90% and further preferably set 80% of this thickness.If distance is set to and is lower than 0.2% of thickness, then the reduction of compression stress is not enough and and can show in the improvement of chipization of anti-rete the and wearability.In addition, if this distance is set to greater than 95% of thickness, then the inner effect of being brought of filming that is applied to of compression stress reduces, and can't demonstrate the improved effect of toughness.

Preferably, the compression stress on second intermediate point is set to the 50-200% of compression stress on film coated surface.More preferably, on second intermediate point upper limit of compression stress be set to from the teeth outwards compression stress 180% and more preferably be set to 150% of this compression stress, simultaneously, its lower limit be set to compression stress 60% and more preferably be set to its 70%.

If will be set to 50% of the compression stress that is lower than on first intermediate point in the compression stress on second intermediate point, then applying of compression stress is not enough and can't obtains enough toughness.Simultaneously, if the compression stress on second intermediate point surpasses 200% of from the teeth outwards compression stress, then impact absorption (stress relaxation) is excessive, and the effect that suppresses the rete chipization can descend.

Peak is that foundation one position is (in Fig. 9 relatively, with the point of the surface of filming at a distance of about 0.4 μ m) observed on second intermediate point, and show that the compression stress (compression stress that has the value of about-1.8GPa in Fig. 9) on first intermediate point 5 increases continuously towards the bottom surface 6 of filming, and the degree that increases changes at relative peak.Here, increase degree change and refer to after reaching relative peak, begin to reduce continuously, as shown in Figure 9 towards bottom surface 6 these compression stresses of filming.

In Fig. 9, peak only exists on second intermediate point relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative peak exists with certain thickness on the coating thickness direction.Here, the relative peak that exists with certain thickness refer to wherein on peak relatively compression stress since second intermediate point cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially.As mentioned above, peak exists with certain thickness since second intermediate point relatively, and toughness can further be improved like this.

Therefore, here relatively the meaning of peak is equal to, or more is wider than, as with the meaning of the relative peak of the term of the related use of the function in mathematics.

Though the embodiment that the compression stress wherein of having shown Fig. 9 reduces to the bottom surface of filming continuously from second intermediate point, but, embodiment of the present invention are not limited to it, and comprise the wherein situation of compression stress from second intermediate point to the bottom surface maintenance constant (constant substantially) of filming.When compression stress from second intermediate point when the bottom surface of filming reduces continuously, obtain excellent abrasive.On the other hand, when compression stress keeps steady state value from second intermediate point to the bottom surface of filming, shown the effect of further improvement toughness.

In Fig. 9, compression stress reduces (that is, with the point of the surface of filming at a distance of 0 μ m) continuously from the surface of filming, yet embodiment of the present invention are not limited to it.That is, for example, as shown in Figure 10, the present invention also comprises wherein in the lip-deep compression stress of filming and crosses over the situation that the distance range (preferably being not more than 0.5 μ m) of regulation is maintained towards the bottom surface of filming.In other words, the present invention includes such embodiment, wherein greater than the compression stress of inside (in other words in the lip-deep compression stress of filming, the absolute value of compression stress is greater than the absolute value in the compression stress of inside from the teeth outwards), and compression stress is crossed over from the surface of filming the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point and is maintained and reduces continuously towards first intermediate point afterwards.

As mentioned above, when crossing over from the surface of filming to that the predetermined distance scope of the bottom surface of filming remains on the lip-deep compression stress of filming, reached excellent especially toughness, this is preferred.

Compression stress situation about descending continuously not only comprises the situation that compression stress wherein descends by the mode of the protruding upward or downward protrusion shown in Fig. 9 but also comprises the situation that compression stress wherein descends linearly in this application.In addition, if compression stress generally descends, then the situation of continuous decline in this application comprises the situation that compression stress wherein partly increases, or the degree (slope) that wherein descends changes at a certain mid point, and maybe the situation of (with hierarchical approaches decline) is carried out in this variation with hierarchical approaches.

Compression stress situation about increasing continuously not only comprises the situation that compression stress wherein increases by the mode of the downward protrusion shown in Fig. 9 but also comprises wherein compression stress situation protruding upward or that increase linearly in this application.In addition, if compression stress generally increases, then the situation of continuous increase in this application comprises the situation that compression stress wherein partly descends, or the degree (slope) that wherein increases changes at a certain mid point, and maybe the situation of (with the hierarchical approaches increase) is carried out in this variation with hierarchical approaches.

As mentioned above, according to the 3rd embodiment of intensity distributions of the present invention, reduce continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and this compression stress reaches relative minimum point at first intermediate point in the lip-deep compression stress of filming.In the lip-deep compression stress of filming greater than compression stress in inside, suppressed the generation of crackle on the film coated surface so as far as possible, and prevented near relative minimum point because the self-destruction that the big compression stress in film coated surface place causes, in addition, alleviated stress such as the impulsive force that is applied on the film coated surface.Therefore, demonstrated the remarkable result of excellent toughness, wearability and the chipization of anti-the rete.

In addition, according to the 3rd embodiment of intensity distributions of the present invention, compression stress increases continuously from first intermediate point to second intermediate point and obtains relative peak at second intermediate point, and more excellent toughness is provided like this.In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that not to be had relative minimum point and do not have relative peak and compression stress to increase equably or descend continuously or with hierarchical approaches from the surface of filming to the bottom surface of filming yet.

＜intensity distributions--the 4th embodiment 〉

The 4th embodiment of intensity distributions is characterised in that; Reduce continuously with first intermediate point the bottom surface of filming to the surface of filming from the surface of filming and this compression stress reaches relative minimum point at first intermediate point in the lip-deep compression stress of filming, and compression stress from first intermediate point to increasing continuously with second intermediate point the bottom surface of filming at first intermediate point and reach relative peak at second intermediate point, and intensity distributions has the one or more similar relative minimum point between second intermediate point and the bottom surface of filming.

Here, similar relative minimum point refers to that compression stress wherein demonstrates a kind of point of behavior on intensity distributions, with be expressed as identical on the relative minimum point of first intermediate point and for example referring to the point that the reduction degree of compression stress after compression stress reduces to the bottom surface of filming continuously from second intermediate point changes.As mentioned above, between second intermediate point and the bottom surface of filming, provide one or more relative minimum points, the cracking that has taken place on film coated surface so can more effectively suppress and further improve the performance of the chipization of anti-the rete and show excellent abrasive towards the inner development of filming.

Simultaneously, intensity distributions can have one or more similar relative peaks between second intermediate point and the bottom surface of filming.

Here, similar relative peak refers to that compression stress wherein demonstrates a kind of point of behavior on intensity distributions, with be expressed as identical on the relative peak of second intermediate point, and for example refer at the compression stress point that the increase degree of compression stress changes after increase continuously to the bottom surface of filming between the bottom surface that is located at second intermediate point and films.As mentioned above, between second intermediate point and the bottom surface of filming, provide one or more relative peaks, so that demonstrate more excellent toughness and further improve the performance of the chipization of anti-the rete.

Intensity distributions can have one or more similar relative minimum points and the one or more similar relative peak between second intermediate point and the bottom surface of filming, by this order with alternately and the mode that repeats.Here, the interval of the number of times of repetition and repetition is not particularly limited.If minimum point (being included in the relative minimum point of first intermediate point) is to exist with the interval that equates substantially with relative peak (being included in the relative peak of second intermediate point) relatively, the number of times that repeats can be measured relatively with the thickness of filming, like this relative distance between the minimum point and the distance between the peak relatively be the upper limit of the 0.1%-70% of coating thickness and this distance preferably be set to coating thickness 60% and more preferably be set to 50% of coating thickness, lower limit that simultaneously should distance preferably be set to thickness 0.15% and more preferably be set to 0.2% of thickness.

Be lower than 0.1% of thickness if this distance set, the interval of the Chong Fuing weak point stable stress state that can't obtain to film too then, this causes the easy generation of rete chipization.Simultaneously, if this distance is set greater than 70% of thickness, the effect of then a plurality of relative peaks or the formation of minimum point relatively can reduce.

As mentioned above, a plurality of relative minimum points and relative peak be by this order with alternately and the mode that repeats exist, like this, the quantity that the development energy of the cracking that wherein takes place on film coated surface can absorbed point can increase.Therefore, cracking can more effectively be suppressed towards the inner development of filming, and further improves the performance of the chipization of anti-the rete and demonstrates more excellent abrasive and toughness.

The various characteristics of aforesaid intensity distributions will go through with reference to Figure 11 and Figure 12 of the 4th embodiment that has shown intensity distributions of the present invention.Figure 12 is the figure that shows intensity distributions, and wherein abscissa is illustrated on the thickness direction of filming and represents compression stress with the surface distance and the ordinate apart of filming.

At first, as shown in Figure 11, first intermediate point 5 is between the surface 4 of filming and the bottom surface 6 of filming.For in vertical direction with surface 4 distance apart of filming, first intermediate point 5 needn't one be positioned with this surface at a distance of being equivalent to the position of 1/2 distance of coating thickness (in vertical direction from the surface 4 of filming to the distance of the bottom surface 6 of filming).Normally, first intermediate point 5 more approaches the surface 4 of filming, and compares with the distance between the bottom surface 6 of filming with first intermediate point 5.

Preferably, first intermediate point 5 be positioned at and the surface of filming 4 at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.1% to the position of 40% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.3% and further preferably set to 0.5% of this thickness, and the upper limit that should distance be set to aptly this thickness 35% and further preferably set 30% of this thickness.If will be when being set in 0.1% and the big and heavy cutting that is used for high impact forces when this instrument that are lower than thickness as the cutting interrupted, applying of compression stress be incomplete, can not obtain the effect of the inhibition of rete chipization.In addition, if this distance is set at greater than 40% of thickness, then can reduce and the improvement of the chipization of anti-the rete can not show in the effect of the reduction of the internal compression stresses of filming.

In this intensity distributions, compression stress can reach maximum (in other words, compression stress reaches maximum value) at 4 places, surface of filming.Therefore, can obtain excellent especially toughness.

Preferably, the compression stress on first intermediate point of filming is set to the 10-80% in the lip-deep compression stress of filming.More preferably, on first intermediate point upper limit of compression stress be set to compression stress from the teeth outwards 70% and more preferably be set to 60% of compression stress from the teeth outwards, simultaneously its lower limit be set to compression stress from the teeth outwards 15% and more preferably be set to its 20%.From 4 second on the surface of filming or relative minimum point afterwards preferably have compression stress in the above-mentioned scope.

Be lower than 10% of compression stress on the surface of filming if be set, then can't obtain enough toughness in the compression stress on first intermediate point.Simultaneously, if the compression stress on first intermediate point of filming has surpassed in 80% of the compression stress on surface, then impact absorption (stress relaxation) is incomplete and can't demonstrates the effect of the inhibition of rete chipization.

There are a plurality of relative minimum points from the surface 4 of filming to the bottom surface 6 of filming.As for the position, the first relative minimum point of counting from film coated surface 4 sides is to occur at aforesaid first intermediate point, and any one or a plurality of point (for example, the 3rd intermediate point 10 in Figure 11) between second intermediate point 9 and the bottom surface 6 of filming are observed relative minimum point.Here, this relative minimum point finger pressure stress under compression demonstrates the point of following a kind of behavior on intensity distributions: the degree that compression stress reduces after compression stress reduces continuously towards the bottom surface 6 of filming can change.Here, reducing degree change is meant: the compression stress that reduces towards the bottom surface 6 of filming begins to increase continuously after arriving relative minimum point.

Though Figure 11 only is shown as the 3rd intermediate point 10 the relative minimum point of expression second or back, this expression is for convenience's sake.Second or the relative minimum point of back similarly without limits.

In Figure 12, minimum point exists as do not have the point of width on the coating thickness direction relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative minimum point exists with certain thickness (width) on the coating thickness direction.Here, the situation of the relative minimum point that exists with certain thickness refer to wherein the compression stress on minimum point relatively cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially value.As mentioned above, minimum point is to exist with certain thickness relatively, and wearability can further be improved like this.

Therefore, here relatively the meaning of minimum point is equal to, or more is wider than, as with the meaning of the relative minimum point of the term of the related use of the function in mathematics.

Simultaneously, as shown in Figure 11, second intermediate point 9 is between first intermediate point 5 and the bottom surface 6 of filming, yet, second intermediate point 9 not necessarily must and first intermediate point 5 at a distance of being equivalent in vertical direction a position of that distance of 1/2 from first intermediate point 5 to the distance the bottom surface 6 of filming.

Preferably, second intermediate point 9 be positioned at and the surface of filming at a distance of be equivalent to coating thickness (in vertical direction from the surface 4 of filming to the distance the bottom surface 6 of filming) at least 0.2% to the position of 80% distance at the most.More preferably, the lower limit set of this distance to this thickness 0.5% and further preferably set to 1% of this thickness, and the upper limit that should distance be set to aptly this thickness 75% and further preferably set 70% of this thickness.If distance is set to and is lower than 0.2% of thickness, then the reduction of compression stress is not enough and and can show in the effect that suppresses the improvement effect on the rete chipization and improve wearability.In addition, if this distance is set to greater than 80% of thickness, the inside of then filming applies the effect reduction that compression stress produces, and can't demonstrate excellent toughness.

Preferably, the compression stress on second intermediate point is set to the 50-200% of compression stress on film coated surface.More preferably, on second intermediate point upper limit of compression stress be set on film coated surface compression stress 180% and more preferably be set to 150% of compression stress from the teeth outwards, simultaneously its lower limit be set to compression stress from the teeth outwards 60% and more preferably be set to its 70%.If there are two or more relative peaks, each relative peak preferably has the compression stress in above-mentioned scope.

If will be set to 50% of the compression stress that is lower than on film coated surface in the compression stress on second intermediate point, then applying of compression stress is not enough and can't obtains enough toughness.Simultaneously, if the compression stress on second intermediate point surpasses 200% of from the teeth outwards compression stress, applying excessively of compression stress then, the effect that suppresses the rete chipization can descend.

There are one or more relative peaks from the surface 4 of filming to the bottom surface 6 of filming.As for the position, the first relative peak of counting from film coated surface 4 sides is to occur at aforesaid second intermediate point 9.If have second or the relative peak of back, then observe relative peak (for example, the 4th intermediate point 11 in Figure 11) on any one between second intermediate point 9 and the bottom surface 6 of filming or a plurality of point.Peak finger pressure stress under compression demonstrates the point of following a kind of behavior on intensity distributions relatively: the degree that compression stress increases after compression stress increases continuously towards the bottom surface 6 of filming can change.Here, increasing degree change is meant: the compression stress that increases towards the bottom surface 6 of filming begins to reduce continuously after arriving relative peak.

Though Figure 11 only is shown as the 4th intermediate point 11 the relative peak of expression second or back, this expression is for convenience's sake.Second or the relative peak of back similarly without limits.

In Figure 12, peak exists as do not have the point of width on the coating thickness direction relatively, yet embodiment of the present invention are not limited to it, and comprises the situation that wherein relative peak exists with certain thickness (width) on the coating thickness direction.Here, the situation of the relative peak that exists with certain thickness refer to wherein the compression stress on peak relatively cross over this thickness (preferred, be not more than coating thickness 1/2) keep constant substantially value.As mentioned above, peak exists with certain thickness relatively, and toughness can further be improved like this.

Therefore, here relatively the meaning of peak is equal to, or more is wider than, as with the meaning of the relative peak of the term of the related use of the function in mathematics.

Relatively minimum point and relatively peak preferably by this order with alternately and the mode that repeats between the surface 4 of filming and the bottom surface 6 of filming, exist, as shown in Figure 12.In addition, preferred, this relative minimum point is to exist with equal or unequal interval with relative peak, and compression stress is being to exist as identical substantially value on each relative minimum point or on each relative peak.

In Figure 12, compression stress reduces (that is, with the point of the surface of filming at a distance of 0 μ m) continuously from the surface of filming, yet embodiment of the present invention are not limited to it.That is, for example, as shown in Figure 13, the present invention also comprises wherein in the lip-deep compression stress of filming and crosses over the situation that the distance range (preferably being not more than 0.5 μ m) of regulation is maintained towards the bottom surface of filming.In other words, the present invention includes wherein greater than the embodiment of the compression stress of inside (in other words in the lip-deep compression stress of filming, the absolute value of compression stress is greater than the absolute value in the compression stress of inside from the teeth outwards), and compression stress is crossed over from the surface of filming the predetermined distance (preferably being not more than 0.5 μ m) of first intermediate point and is maintained and reduces continuously towards first intermediate point afterwards.

As mentioned above, when crossing over from the surface of filming to that the predetermined distance scope of the bottom surface of filming remains on the lip-deep compression stress of filming, reached excellent especially toughness, this is preferred.

Compression stress situation about reducing continuously not only comprises the situation that compression stress wherein reduces by downward protrusion shown in Figure 12 or mode protruding upward but also comprises the situation that compression stress wherein reduces linearly in this application.In addition, if compression stress generally reduces, then the situation of continuous reduction in this application comprises the situation that compression stress wherein partly increases, or the degree (slope) that wherein reduces changes at a certain mid point, and maybe the situation of (with the hierarchical approaches reduction) is carried out in this variation with hierarchical approaches.

Compression stress situation about increasing continuously not only comprises the situation that compression stress wherein increases by the mode of the downward protrusion shown in Figure 12 but also comprises wherein compression stress situation protruding upward or that increase linearly in this application.In addition, if compression stress generally increases, then the situation of continuous increase in this application comprises the situation that compression stress wherein partly reduces, or the degree (slope) that wherein increases changes at a certain mid point, and maybe the situation of (with the hierarchical approaches increase) is carried out in this variation with hierarchical approaches.

Can point out that in aforesaid intensity distributions, the point of the most approaching bottom surface of filming 6 can be relative minimum point or relative peak.Therefore, the compression stress on the bottom surface 6 of filming can be in the trend that increases or be in reduction, or additionally, minimum point or relative peak can overlap with bottom surface 6 relatively.

As mentioned above, according to the 4th embodiment of intensity distributions of the present invention, reduce continuously with first intermediate point between the bottom surface of filming towards the surface of filming from the surface of filming and this compression stress reaches relative minimum point at first intermediate point in the lip-deep compression stress of filming.In the lip-deep compression stress of filming greater than compression stress in inside, suppressed the generation of crackle on the film coated surface so as far as possible, and prevented near relative minimum point because the self-destruction that the big compression stress in film coated surface place causes, in addition, alleviated stress such as the impulsive force that is applied on the film coated surface.Therefore, demonstrated the remarkable result of excellent toughness, wearability and the chipization of anti-the rete.

In addition, according to the 4th embodiment of intensity distributions of the present invention, compression stress increases continuously from first intermediate point to second intermediate point and obtains relative peak at second intermediate point, and more excellent toughness is provided like this.In addition, according to the 4th embodiment of intensity distributions of the present invention, a plurality of relative minimum points and relatively peak be by this order with alternately and the mode that repeats between second intermediate point and the bottom surface of filming, exist.Therefore, the cracking that takes place on film coated surface can more effectively be suppressed towards the inner development of filming, and further improves the performance of the chipization of anti-the rete and demonstrates more excellent abrasive and toughness.

In this way, surface coating cutting tool according to the present invention is successfully obtaining toughness, obtains extremely excellent effect on the performance of wearability and the chipization of anti-the rete.

This type of excellent effect can not demonstrate in common surface coating cutting tool (patent documentation 1), and the latter is characterised in that not to be had relative minimum point and do not have relative peak and compression stress to increase equably or reduce continuously or with hierarchical approaches to the bottom surface of filming from the surface of filming yet.

＜other 〉

In surface coating cutting tool according to the present invention, can and film at basic material 2 and form between 3 in intermediate layer 8 arbitrarily, as shown in Figure 5.This type of intermediate layer 8 normally has the wearability of improvement or improves at basic material and the fusible performance between filming, and can implement by single layer or a plurality of layer.The bottom surface of filming here, 6 as film 3 and intermediate layer 8 between contact surface.

This intermediate layer can be for example by TiN, TiCN, and TiSiN, TiAlN, AlCrN, AlVN, TiAlCrN, TiAlSiN, TiAlSiCrN, AlCrVN or analog are formed.In these were formed, the ratio of each atom provided after the example as the general formula that composition exemplified of filming.

＜embodiment 〉

Hereinafter, the present invention will describe in detail with reference to the following examples, yet, the invention is not restricted to them.The compound composition of filming is in an embodiment confirmed by XPS (x-ray photoelectron spectroscopy analyzer).In addition, use aforesaid sin ²The ψ method is measured compression stress and thickness (or with the surface of filming distance apart).

Using sin ²In the measurement of ψ method, the ability of employed X ray is set to 10keV and diffraction maximum is set to Ti _0.5Al _0.5(embodiment 1-6, embodiment 11-16, embodiment 21-26 and the embodiment 31-36) of N, Al _0.7Cr _0.3(the embodiment 7-10) of N, Al _0.6Ti _0.35Cr _0.05(the embodiment 17-20) of N, Al _0.6Ti _0.3Si _0.1(the embodiment 27-30) of N, and Al _0.6Ti _0.2Si _0.1Cr _0.1(200) plane of N (embodiment 37-40).Then, measure measured diffraction maximum position and obtain 2 θ-sin by the match of Gaussian function ²The slope of ψ figure.In addition, be adopted to Young's modulus by using the measured value of dynamic stiffness meter (by the Nanoindenter of MTS Systems Corporation manufacturing), and the value of TiN (0.19) is adopted to Poisson's ratio.So set stress value.

Following filming forms by use cathode arc ion plating, yet film also can form by using balance or unbalance sputter.In addition, though following filming of forming specific composition never similarly can access similar effect with filming of composition.

＜embodiment 1-6 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the following table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

Table 1

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 2.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 1-6 of the intensity distributions of the compression stress shown in the table 3 according to surface coating cutting tool of the present invention.

Table 2

Time showing in above table 2 since the elapsed time of metal ion after begin by the evaporation the target of alloy composition.In addition, the numerical value of voltage has shown substrate bias-voltage group in aforesaid elapsed time process in each bezel, cluster.For example, if provided single numerical value as " 50V ", this shows that the substrate bias-voltage is constant in the elapsed time.The compression stress of filming here, is similarly kept steady state value.Simultaneously, if the scope that provides as " 50V to-150V ", this shows that in the elapsed time substrate bias-voltage increases to-150V from-50V gradually with constant speed.Here, the compression stress of filming little by little increases, with the relative minimum point that has formed compression stress on the point that begins to raise at voltage.

The substrate bias-voltage changes with respect to the elapsed time or is set to steady state value, and like this, compression stress keeps forming in the intensity distributions of the compression stress that the relative minimum point of steady state value or section can be in filming.

Table 3

No.	The surface compression stress	First intermediate point	Relative minimum point
				Embodiment 1	-5.0GPa	43.3％(1.3μm)	-1.8GPa
Embodiment 2	-5.1GPa	43.3％(1.3μm)	-3.0GPa
				Embodiment 3	-5.0GPa	43.3％(1.3μm)	-4.0GPa
Embodiment 4	-4.9GPa	16.7％(0.5μm)	-3.0GPa
				Embodiment 5	-5.2GPa	3.3％(0.1μm)	-3.2GPa
Embodiment 6	-5.0GPa	1.0％(0.03μm)	-2.9GPa

Should be pointed out that in above table 3 numerical value in the bezel, cluster of compression stress has from the teeth outwards provided the shown maximal pressure stress under compression that goes out on the surface of filming.In addition, the numerical value in the bezel, cluster of first intermediate point shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, the numerical value in the bezel, cluster of relative minimum point has shown the compression stress under this relative minimum point.This compression stress keeps constant towards the bottom surface of filming.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 1 to 6.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, be characterised in that with intensity distributions: on the surface of filming, reach the maximal pressure stress under compression, and this compression stress reduces continuously and reaches relative minimum point and this compression stress keeps steady state value from first intermediate point to the bottom surface of filming at first intermediate point from the surface of filming to first intermediate point the surface of filming and the bottom surface of filming.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid first embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: at metal ion from the target that alloy constitutes after the start vaporizer, substrate bias-voltage evenly raise from-20V to-150V 60 minutes (comparative example 1).

In the surface coating cutting tool according to comparative example 1, the intensity distributions of the compression stress of filming does not have relative minimum point and compression stress to increase equably to the surface of filming from the bottom surface of filming.

＜embodiment 7 to 10 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 1 to 6 as the basic material of surface coating cutting tool and this basic material attaching in cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

With argon gas introducing and with pressure chamber in remain on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Al by alloy composition as metal evaporation sources _0.7Cr _0.3N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 4.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 7-10 of the intensity distributions of the compression stress shown in the table 5 according to surface coating cutting tool of the present invention.

Table 4

With the same in the table 2, the time showing in above table 4 since metal ion elapsed time after the start vaporizer from the target that alloy constitutes.In addition, with the same in table 2, the numerical value of voltage has shown substrate bias-voltage group corresponding in the aforesaid elapsed time in each bezel, cluster.

Table 5

No.	The surface compression stress	First intermediate point	Relative minimum point
				Embodiment 7	-8.2GPa	3.3％(0.1μm)	-1.8GPa
Embodiment 8	-6.0GPa	3.3％(0.1μm)	-2.0GPa
				Embodiment 9	-4.1GPa	3.3％(0.1μm)	-2.1GPa
Embodiment 10	-3.3GPa	3.3％(0.1μm)	-2.2GPa

Should be pointed out that with the same in table 3 numerical value in the bezel, cluster of compression stress has provided the shown maximal pressure stress under compression that goes out on the surface of filming from the teeth outwards in above table 5.In addition, with the same in table 3, numerical value in the bezel, cluster of first intermediate point also shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, with the same in table 3, the numerical value in the bezel, cluster of relative minimum point has also shown compression stress at that point.This compression stress keeps steady state value towards the bottom surface of filming.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 7 to 10.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, be characterised in that with intensity distributions: on the surface of filming, reach the maximal pressure stress under compression, and this compression stress reduces continuously and reaches relative minimum point and this compression stress keeps steady state value from first intermediate point to the bottom surface of filming at first intermediate point from the surface of filming to first intermediate point the surface of filming and the bottom surface of filming.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid first embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes increases (comparative example 2) equably from-20V to-200V at metal ion.

In the surface coating cutting tool according to comparative example 2, the intensity distributions of the compression stress of filming does not have relative minimum point and compression stress increases to the surface of filming equably from the bottom surface of filming.

The evaluation of the wearability of＜surface coating cutting tool 〉

Under the condition shown in the above table 1, carry out continuous cutting test and wet cutting test of interrupting by the above method manufacturing according in the surface coating cutting tool of embodiment 1 to 10 and comparative example 1 and 2 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.2mm.

Table 6 and 7 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 6 and 7 has similarly shown observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 6 and 7, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 2 comparative example 1, verified, surface coating cutting tool according to the present invention in embodiment 1-10 has obtained further improved wearability, in final lip-deep brightness and further improved life-span.

＜in the evaluation of the toughness of surface coating cutting tool 〉

Be used to estimate a kind of test of toughness under condition shown below by each acceptance of the above method manufacturing according in the surface coating cutting tool of embodiment 1 to 10 and comparative example 1 and 2.

For the condition of cutting, specifically, as shown in above table 1, the bulk (the long 150mm that takes advantage of of 300mm is wide) that comprises 50 through holes in the S50C material is as the material that is cut.Dry abrasive cutting is tested below and carried out under the condition: cutting speed is set to 180m/min, feed rate is set at from the 0.10mm/ cutting edge increases the 0.05mm/ cutting edge, cutting depth (cutting) is set at 0.5mm, for the length of cut increase feed rate of every 300mm.

Table 6 and 7 has shown the result who estimates in the toughness of each surface coating cutting tool.Along with maximum feed rate is bigger, tenacity excellent.

Can be clear that from table 6 and 7 and compare with the surface coating cutting tool in 2 comparative example 1, the verified surface coating cutting tool according to the present invention in embodiment 1-10 has obtained improved toughness.

Table 6

Table 7

＜embodiment 11 to 16 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the above table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

With argon gas introducing and with pressure chamber in remain on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 8.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 11-16 of the intensity distributions of the compression stress shown in the following table 9 according to surface coating cutting tool of the present invention.

Table 8

Time showing in above table 8 since the elapsed time of metal ion after begin by the evaporation the target of alloy composition.In addition, the numerical value of voltage has shown substrate bias-voltage group in aforesaid elapsed time process in each bezel, cluster.For example, if the scope that provides as " 130V to-50V ", this shows that during the elapsed time substrate bias-voltage is reduced to-50V from-130V gradually with constant speed.The compression stress of filming here, little by little reduces.Simultaneously, if the scope that provides as " 50V to-160V ", this shows that during the elapsed time substrate bias-voltage is increased to-160V from-50V gradually with constant speed.Here, the compression stress of filming little by little raises, and has formed the relative minimum point of compression stress on the point that voltage begins to raise.

The substrate bias-voltage changed with respect to the elapsed time, can be formed in relative minimum point in the intensity distributions of compression stress or increase and decrease continuously in filming like this.

Table 9

No.	The surface compression stress	First intermediate point	Relative minimum point	Compression stress on the bottom surface
					Embodiment 11	-5.5GPa	33.3％ (1.0μm)	-2.0GPa	-4.6GPa
Embodiment 12	-5.6GPa	33.3％ (1.0μm)	-3.1GPa	-4.5GPa
					Embodiment 13	-5.4GPa	36.7％ (1.1μm)	-4.0GPa	-4.4GPa
Embodiment 14	-5.5GPa	16.7％ (0.5μm)	-3.0GPa	-4.5GPa
					Embodiment 15	-5.6GPa	3.3％ (0.1μm)	-3.1GPa	-4.5GPa
Embodiment 16	-5.5GPa	1.7％ (0.05μm)	-2.9GPa	-4.6GPa

Should be pointed out that in the bezel, cluster of the compression stress from the teeth outwards in above table 9 and on the bottom surface numerical value in the bezel, cluster of compression stress provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, the numerical value in the bezel, cluster of first intermediate point shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, the numerical value in the bezel, cluster of relative minimum point has shown the compression stress under this relative minimum point.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 11 to 16.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming reduces continuously and compression stress reaches relative minimum point at first intermediate point, and compression stress increases to the bottom surface of filming continuously from first intermediate point in the lip-deep compression stress of filming.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid second embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes is elevated to-150V (comparative example 3) from-20V at metal ion.

In the surface coating cutting tool according to comparative example 3, the intensity distributions of the compression stress of filming does not have relative minimum point and compression stress to increase equably to the surface of filming from the bottom surface of filming.

＜embodiment 17 to 20 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 11 to 16 as the basic material of surface coating cutting tool and this basic material attaching in cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Al by alloy composition as metal evaporation sources _0.6Ti _0.35Cr _0.15N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 10.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 17-20 of the intensity distributions of the compression stress shown in the following table 11 according to surface coating cutting tool of the present invention.

Table 10

With the same in the table 8, the time showing in above table 10 since metal ion elapsed time after the start vaporizer from the target that alloy constitutes.In addition, with the same in table 8, the numerical value of voltage has shown the substrate bias-voltage group during the aforesaid elapsed time in each bezel, cluster.

Table 11

No.	The surface compression stress	First intermediate point	Relative minimum point	Compression stress on the bottom surface
					Embodiment 17	-8.0GPa	3.3％ (0.1μm)	-3.0GPa	-4.5GPa
Embodiment 18	-6.8GPa	3.3％ (0.1μm)	-3.1GPa	-4.3GPa
					Embodiment 19	-4.6GPa	3.3％ (0.1μm)	-3.2GPa	-4.4GPa
Embodiment 20	-3.5GPa	3.3％ (0.1μm)	-3.0GPa	-4.3GPa

Should be pointed out that with the same in table 9 numerical value in the bezel, cluster of the compression stress from the teeth outwards in above table 11 and on the bottom surface in the bezel, cluster of compression stress has provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, with the same in table 9, numerical value in the bezel, cluster of first intermediate point also shown on the coating thickness direction from the surface of filming to the distance first intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary mark that " μ m " arranged).In addition, with the same in table 9, the numerical value in the bezel, cluster of relative minimum point has also shown compression stress at that point.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 17 to 20.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming reduces continuously and compression stress reaches relative minimum point and compression stress increases to the bottom surface of filming continuously from first intermediate point at first intermediate point.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid second embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, the substrate bias-voltage keeps 60 minutes (comparative example 4) under-75V at metal ion.

In the surface coating cutting tool according to comparative example 4, the intensity distributions and the compression stress that do not have the compression stress of filming are constant from the bottom surface of filming to the surface of filming.

The evaluation of the wearability of＜surface coating cutting tool 〉

Under the condition shown in the above table 1, carry out continuous cutting test and wet cutting test of interrupting by the above method manufacturing according in the surface coating cutting tool of embodiment 11 to 20 and comparative example 3 and 4 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.2mm.

Table 12 and 13 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 12 and 13 has similarly provided observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 12 and 13, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 4 comparative example 3, verified, surface coating cutting tool according to the present invention in embodiment 11-20 has obtained further improved wearability, have the brightness on finished surface, obtained the performance and the further improved life-span of the excellent chipization of anti-the rete.

＜in the evaluation of the toughness of surface coating cutting tool 〉

Be used to estimate a kind of test of the toughness under condition shown below by each acceptance of the above method manufacturing according in the surface coating cutting tool of embodiment 11 to 20 and comparative example 3 and 4.

For the condition of cutting, specifically, as shown in above table 1, the bulk (the long 150mm that takes advantage of of 300mm is wide) that comprises 50 through holes in the S50C material is as the material that is cut.Dry abrasive cutting is tested below and carried out under the condition: cutting speed is set to 180m/min, and cutting depth (cutting) is set at 2.0mm, and feed rate is set at from the 0.10mm/ cutting edge increases 0.05mm/ cutting edge (for the length of cut of every 300mm).

Table 12 and 13 has shown the result who estimates in the toughness of each surface coating cutting tool.Along with maximum feed rate is bigger, tenacity excellent.

Can be clear that from table 12 and 13 and compare with the surface coating cutting tool in 4 comparative example 3, the verified surface coating cutting tool according to the present invention in embodiment 11-20 has obtained improved toughness.

Table 12

Table 13

＜embodiment 21 to 26 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the above table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 14.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 21-26 of the intensity distributions of the compression stress shown in the following table 15 according to surface coating cutting tool of the present invention.

Table 14

Time showing in above table 14 since the elapsed time of metal ion after begin by the evaporation the target of alloy composition.In addition, the numerical value of voltage has shown substrate bias-voltage group in aforesaid elapsed time process in each bezel, cluster.For example, if the scope that provides as " 30V to-130V ", this shows that in the elapsed time substrate bias-voltage increases to-130V from-30V gradually with constant speed.The compression stress of filming here, little by little increases.Simultaneously, if the scope that provides as " 130V to-50V ", this shows that in the elapsed time substrate bias-voltage is reduced to-50V from-130V gradually with constant speed.The compression stress of filming here, little by little reduces.On being transformed on the point of decline and being transformed in the decline of voltage the point of raising, the raising of voltage formed the relative peak and relative minimum point of compression stress respectively.

The substrate bias-voltage changed with respect to the elapsed time, can be formed in the relative peak in the intensity distributions of compression stress and relative minimum point or raising or decline continuously in filming like this.

Table 15

No.	The surface compression stress	First intermediate point	Relative minimum point	Second intermediate point	Relative peak	Compression stress on the bottom surface
							Embodiment 21	-5.4GPa	36.7％ (1.1μm)	-2.1GPa	50.0％ (1.5μm)	-4.5GPa	-0.9GPa
Embodiment 22	-5.6GPa	33.3％ (1.0μm)	-3.0GPa	50.0％ (1.5μm)	-4.6GPa	-1.0GPa
							Embodiment 23	-5.5GPa	33.3％ (1.0μm)	-4.1GPa	53.3％ (1.6μm)	-4.5GPa	-1.0GPa
Embodiment 24	-5.5GPa	16.7％ (0.5μm)	-3.0GPa	50.0％ (1.5μm)	-4.4GPa	-1.1GPa
							Embodiment 25	-5.6GPa	3.3％ (0.1μm)	-3.0GPa	46.7％ (1.4μm)	-4.5GPa	-1.0GPa
Embodiment 26	-5.5GPa	1.7％ (0.05μm)	-3.1GPa	50.0％ (1.5μm)	-4.5GPa	-0.9GPa

Should be pointed out that in the bezel, cluster of the compression stress from the teeth outwards in above table 15 and on the bottom surface numerical value in the bezel, cluster of compression stress provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point have shown and are being clipped to first intermediate point and to the distance second intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged) from the surface branch of filming on the coating thickness direction.In addition, in the bezel, cluster of relative minimum point with bezel, cluster at relative peak in numerical value shown respectively compression stress under relative minimum point and relative peak.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 21 to 26.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming reduces continuously and compression stress reaches relative minimum point at first intermediate point, and compression stress increases to second intermediate point first intermediate point and the bottom surface of filming continuously from first intermediate point, on second intermediate point, reach relative peak and reduce continuously to the bottom surface of filming from second intermediate point.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid the 3rd embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes is raised to-150V (comparative example 5) from-20V at metal ion.

In the surface coating cutting tool according to comparative example 5, the intensity distributions of the compression stress of filming does not have relative minimum point and does not have relative peak yet, and compression stress increases to the surface of filming equably from the bottom surface of filming.

＜embodiment 27 to 30 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 21 to 26 as the basic material of surface coating cutting tool and this basic material attaching in cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Al by alloy composition as metal evaporation sources _0.6Ti _0.3Si _0.1N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 16.In this way, the arc current of 100A is supplied to negative electrode and metal ion to produce from electric arc type evaparation source, made in view of the above have the embodiment 27-30 of the intensity distributions of the compression stress shown in the following table 17 according to surface coating cutting tool of the present invention.

Table 16

With the same in the table 14, the time showing in above table 16 since metal ion elapsed time after the start vaporizer from the target that alloy constitutes.In addition, with the same in table 14, the numerical value of voltage has shown the substrate bias-voltage group during the aforesaid elapsed time in each bezel, cluster.

Table 17

No.	The surface compression stress	First intermediate point	Relative minimum point	Second intermediate point	Relative peak	Compression stress at the place, bottom surface
							Embodiment 27	-5.5GPa	3.3％ (0.1μm)	-3.1GPa	50.0％ (1.5μm)	-4.0GPa	-1.0GPa
Embodiment 28	-5.5GPa	3.3％ (0.1μm)	-3.0GPa	46.7％ (1.4μm)	-5.5GPa	-1.0GPa
							Embodiment 29	-5.4GPa	3.3％ (0.1μm)	-3.0GPa	50.0％ (1.5μm)	-6.5GPa	-0.9GPa
Embodiment 30	-5.6GPa	3.3％ (0.1μm)	-3.2GPa	53.3％ (1.6μm)	-8.0GPa	-1.0GPa

Should be pointed out that with the same in table 15 numerical value in the bezel, cluster of the compression stress from the teeth outwards in above table 17 and on the bottom surface in the bezel, cluster of compression stress has provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, with the same in table 15, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point also shown on the coating thickness direction from the surface of filming to the distance each intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, with the same in table 15, in the bezel, cluster of relative minimum point with bezel, cluster at relative peak in numerical value also shown the compression stress on these aspects respectively.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 27 to 30.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming reduces continuously and compression stress reaches relative minimum point at first intermediate point, and compression stress increases to second intermediate point first intermediate point and the bottom surface of filming continuously from first intermediate point, on second intermediate point, reach relative peak and increase continuously to the bottom surface of filming from second intermediate point.That is to say that this intensity distributions has shown the intensity distributions according to aforesaid the 3rd embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, the substrate bias-voltage keeps 60 minutes (comparative example 6) under-70V at metal ion.

In surface coating cutting tool, do not have the intensity distributions of the compression stress of filming, and this compression stress keeps constant from the bottom surface of filming to the surface of filming according to comparative example 6.

The evaluation of the wearability of＜surface coating cutting tool 〉

Be received in wet (water miscible emulsion) continous way cutting test and wet interrupt cutting test under the condition shown in the above table 1 by the above method manufacturing according in the surface coating cutting tool of embodiment 21 to 30 and comparative example 5 and 6 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.20mm.

Table 18 and 19 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 18 and 19 has similarly provided observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 18 and 19, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 6 comparative example 5, verified, surface coating cutting tool according to the present invention in embodiment 21-30 has obtained further improved wearability, have the brightness on finished surface, obtained the performance and the further improved life-span of the excellent chipization of anti-the rete.

The evaluation of the toughness of＜surface coating cutting tool 〉

By each acceptance of the above method manufacturing according in the surface coating cutting tool of embodiment 21 to 30 and comparative example 5 and 6 be used to estimate toughness under condition shown below-kind of test.

For the condition of cutting, specifically, as shown in above table 1, the bulk (the long 150mm that takes advantage of of 300mm is wide) that comprises 50 through holes in the S50C material is as the material that is cut.Dry abrasive cutting is tested below and carried out under the condition: cutting speed is set to 180m/min, and cutting depth (cutting) is set at 2.0mm, and feed rate is set at from the 0.10mm/ cutting edge increases 0.05mm/ cutting edge (for the length of cut of every 300mm).

Table 18 and 19 has shown the result who estimates in the toughness of each surface coating cutting tool.Because maximum feed rate is bigger, tenacity excellent.

Can be clear that from table 18 and 19 and compare with the surface coating cutting tool in 6 comparative example 5, the verified surface coating cutting tool according to the present invention in embodiment 21-30 has obtained improved toughness.

Table 18

Table 19

＜embodiment 31 to 36 〉

The manufacturing of＜surface coating cutting tool 〉

At first, basic material as surface coating cutting tool, prepared and have the material shown in the above table 1 and tool shape the throw-away tip that is used to cut of (according to the method for each characteristic that will describe below estimating different and different), and throw-away tip (basic material) is installed on the cathode arc ion plating device.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

Argon gas introducing and pressure chamber in remained on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Ti by alloy composition as metal evaporation sources _0.5Al _0.5N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 20.In this way, the arc current of 100A is supplied to negative electrode to reach 60 minutes and metal ion produces from electric arc type evaparation source, made in view of the above have the embodiment 31-36 of the intensity distributions of the compression stress shown in the following table 21 according to surface coating cutting tool of the present invention.

Table 20

No.	Period 1 (time/the substrate bias-voltage)	Second round (time/the substrate bias-voltage)
			Embodiment 31	15 minutes-150V is to-50V	15 minutes-50V is to-150V
Embodiment 32	5 minutes-150V is to-50V	5 minutes-50V is to-150V
			Embodiment 33	1 minute-150V is to-50V	1 minute-50V is to-150V
Embodiment 34	1 minute-150V is to-50V	2 minutes-50V is to-150V
			Embodiment 35	12 minutes-20V is to-210V	12 minutes-210V is to-20V
Embodiment 36	12 minutes-75V is to-150V	12 minutes-150V is to-75V

" period 1 " in above table 20 and " second round " expression apply the substrate bias-voltage as alternately repeating the result in (reaching 60 minutes) these cycles, continue that (this cycle is from " period 1 " in the time span shown in the bezel, cluster of the bezel, cluster of period 1 and second round these cycles, yet, there is no need to finish with " second round ").That is to say, the time showing in each bezel, cluster in cycle the elapsed time, metal ion evaporates from the target that alloy constitutes in this elapsed time.The numerical value of voltage has shown the substrate bias-voltage set in aforesaid elapsed time process in each bezel, cluster.For example, if the scope that provides as " 150V to-50V ", this shows that in the elapsed time substrate bias-voltage is reduced to-50V from-150V gradually with constant speed.The compression stress of filming here, little by little reduces.Simultaneously, if the scope that provides as " 50V to-150V ", this shows that in the elapsed time substrate bias-voltage increases to-150V from-50V gradually with constant speed.The compression stress of filming here, little by little increases.The decline of voltage therein is transformed into the relative minimum point and relative peak that (promptly converting on the point of " period 1 " from " second round ") on the point that (promptly converting on the point of " second round " from " period 1 ") and the raising of voltage therein on the point of rising be transformed into attenuating formed compression stress respectively.

The substrate bias-voltage changed with respect to the elapsed time, can be formed in the relative peak in the intensity distributions of compression stress and relative minimum point or raising or decline continuously in filming like this.

Should be pointed out that in the bezel, cluster of the compression stress from the teeth outwards in above table 21 and on the bottom surface numerical value in the bezel, cluster of compression stress provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point have shown and are being clipped to first intermediate point and to the distance second intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged) from the surface branch of filming on the coating thickness direction.In addition, in the bezel, cluster of relative minimum point with bezel, cluster at relative peak in numerical value shown respectively compression stress (, can suppose that this compression stress has reached any identical substantially value in this scope) under relative minimum point and relative peak though this numerical value is shown as a scope.In addition, relatively minimum point counting/distance and relatively peak counting/distance represented the relative minimum point that between the surface of filming and the bottom surface of filming, occurs and the quantity of relative peak respectively, and in distance between the relative minimum point and the distance between relative peak.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 31 to 36.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming reduces continuously and compression stress reaches relative minimum point at first intermediate point, and compression stress increases continuously from first intermediate point to second intermediate point first intermediate point and the bottom surface of filming and reaches relative peak at second intermediate point, and intensity distributions has one or more similar relative minimum point and one or more similar relative peaks between second intermediate point and the bottom surface of filming.These relative minimum points and relative peak according to this order with alternately and repetitive mode exist.In each embodiment, reach identical substantially value and the compression stress on each relative peak in the compression stress on each relative minimum point and reach identical substantially value.Minimum point or relative peak are to exist with the interval that equates substantially relatively.That is to say that this intensity distributions has shown the exemplary intensity distributions according to aforesaid the 4th embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, substrate bias-voltage cost 60 minutes increases to-150V (comparative example 7) equably from-20V at metal ion.

In the surface coating cutting tool according to comparative example 7, the intensity distributions of the compression stress of filming does not promptly have relative minimum point not have relative peak yet, and compression stress increases to the surface of filming equably from the bottom surface of filming.

＜embodiment 37 to 40 〉

The manufacturing of＜surface coating cutting tool 〉

At first, the basic material identical with the basic material that is used for embodiment 31 to 36 is attached in the cathode arc ion plating device as basic material and this basic material of surface coating cutting tool.

The heater that adjoining land, the pressure in the chamber of this device reduce by vavuum pump and the temperature utilization of basic material provides in device is heated to 450 ℃.The chamber is evacuated, and reaches 1.0 * 10 up to the pressure in the chamber ^-4Till the Pa.

With argon gas introducing and with pressure chamber in remain on 3.0Pa thereafter.The inclined to one side power source voltage of the substrate of basic material little by little is increased to-and the cleaning on the surface of 1500V and basic material carried out 15 minutes.Thereafter, argon gas runs out.

Then, set target, so that Al by alloy composition as metal evaporation sources _0.6Ti _0.2Si _0.1Cr _0.1N is formed up to the thickness of 3 μ m, when filming of forming on basic material is in direct contact with it.To introduce as the nitrogen of active gases, the temperature of basic material (substrate) is set to 450 ℃, and active gases pressure is set to 4.0Pa and substrate bias-voltage according to changing shown in following table 22.In this way, the arc current of 100A is supplied to negative electrode to reach 60 minutes and metal ion produces from electric arc type evaparation source, made in view of the above have the embodiment 37-40 of the intensity distributions of the compression stress shown in the following table 23 according to surface coating cutting tool of the present invention.

Table 22

No.	Period 1 (time/the substrate bias-voltage)	Second round (time/the substrate bias-voltage)
			Embodiment 37	5 minutes-210V is to-20V	5 minutes-20V is to-210V
Embodiment 38	5 minutes-210V is to-60V	5 minutes-60V is to-210V
			Embodiment 39	5 minutes-210V is to-100V	5 minutes-100V is to-210V
Embodiment 40	5 minutes-210V is to-150V	5 minutes-150V is to-210V

With the same in table 20, " period 1 " in above table 22 and " second round " expression apply the substrate bias-voltage as alternately repeating the result in (reaching 60 minutes) these cycles, and these cycles continue in the time span shown in the bezel, cluster of the bezel, cluster of period 1 and second round (this cycle is from " period 1 ").In addition, with the same in table 20, the numerical value of time and voltage has shown the substrate bias-voltage group in the elapsed time in each bezel, cluster.

Should be pointed out that with the same in table 21 numerical value in the bezel, cluster of the compression stress from the teeth outwards in above table 23 and on the bottom surface in the bezel, cluster of compression stress has provided on the surface of filming respectively and the shown compression stress that goes out on the bottom surface of filming.In addition, with the same in table 21, numerical value in the bezel, cluster of first intermediate point and the numerical value in the bezel, cluster of second intermediate point also shown on the coating thickness direction from the surface of filming to the distance each intermediate point (numerical value that shows with " % " is the value with respect to coating thickness, the subsidiary indication that " μ m " arranged).In addition, with the same in table 21, in the bezel, cluster of relative minimum point with bezel, cluster at relative peak in numerical value also shown the compression stress (, can suppose that this compression stress has reached any identical substantially value in this scope) under these are put respectively though this numerical value is shown as a scope.In addition, with identical in table 21, relatively minimum point counting/distance and relatively peak counting/distance represented the relative minimum point that between the surface of filming and the bottom surface of filming, occurs and the quantity of relative peak respectively, and in distance between the relative minimum point and the distance between relative peak.

Surface coating cutting tool according to the present invention comprises basic material and filming of forming on basic material in embodiment 37 to 40.Film as outermost layer on basic material and have compression stress.Compression stress changes so that have intensity distributions on the coating thickness direction, and intensity distributions is characterised in that: in the lip-deep compression stress of filming from the surface of filming to the surface of filming with first intermediate point the bottom surface of filming reduces continuously and compression stress reaches relative minimum point at first intermediate point, and compression stress increases continuously from first intermediate point to second intermediate point first intermediate point and the bottom surface of filming and reaches relative peak at second intermediate point, and intensity distributions has one or more similar relative minimum point and one or more similar relative peaks between second intermediate point and the bottom surface of filming.These relative minimum points and relative peak according to this order with alternately and repetitive mode exist.In each embodiment, reach identical substantially value and the compression stress on each relative peak in the compression stress on each relative minimum point and reach identical substantially value.Minimum point or relative peak are to exist with the interval that equates substantially relatively.That is to say that this intensity distributions has shown the exemplary intensity distributions according to aforesaid the 4th embodiment.

In order to contrast purpose, make surface coating cutting tool in a similar manner, but except the following condition: from the target that alloy constitutes after the start vaporizer, the substrate bias-voltage is kept 60 minutes (comparative example 8) under-75V at metal ion.

In the surface coating cutting tool according to comparative example 8, the intensity distributions of the compression stress of not filming and compression stress are constant from the bottom surface of filming to the surface of filming.

The evaluation of the wearability of＜surface coating cutting tool 〉

Be received in wet (water miscible emulsion) continous way cutting test and wet interrupt cutting test under the condition shown in the above table 1 by the above method manufacturing according in the surface coating cutting tool of embodiment 31 to 40 and comparative example 7 and 8 each.Then, the flank wear width on cutting edge was measured as the cutting time above the time of 0.20mm.

Table 24 and 25 shown, as the evaluation result of the wearability of surface coating cutting tool, and method cutting time of measuring as mentioned above.Along with the cutting time becomes longer, wearability is excellent.In addition, in continuous cutting test, also observe the brightness on the finished surface of the material that will cut.Table 24 and 25 has similarly provided observed result.Here, the finished surface of the material that " light " expression will be cut has brightness, and the finished surface of the material that " dim " expression will be cut does not have brightness but be dim.

From table 24 and 25, can be clear that, in the cutting test of continuous cutting test and interruption, with compare with the surface coating cutting tool in 8 comparative example 7, verified, surface coating cutting tool according to the present invention in embodiment 31-40 has obtained further improved wearability, have the brightness on finished surface, obtained the performance and the further improved life-span of the excellent chipization of anti-the rete.

The evaluation of the toughness of＜surface coating cutting tool 〉

Be used to estimate a kind of test of the toughness under condition shown below by each acceptance of the above method manufacturing according in the surface coating cutting tool of embodiment 31 to 40 and comparative example 7 and 8.

For the condition of cutting, specifically, as shown in above table 1, the bulk (the long 150mm that takes advantage of of 300mm is wide) that comprises 50 through holes in the S50C material is as the material that is cut.Dry abrasive cutting is tested below and carried out under the condition: cutting speed is set to 180m/min, and cutting depth (cutting) is set at 2.0mm, and feed rate is set at from the 0.10mm/ cutting edge increases 0.05mm/ cutting edge (for the length of cut of every 300mm).

Table 24 and 25 has shown the result that the toughness of each surface coating cutting tool is estimated.Along with maximum feed rate is bigger, tenacity excellent.

Can be clear that from table 24 and 25 and compare with the surface coating cutting tool in 8 comparative example 7, the verified surface coating cutting tool according to the present invention in embodiment 31-40 has obtained improved toughness.

Table 24

Table 25

Above disclosed embodiment and embodiment are illustrative purposes but do not play the qualification effect for example, and the spirit and scope of the present invention are not subjected to above embodiment and embodiment restriction but are subjected to the restriction of claim and hope is included in whole improvement and variation in the claim scope.

Claims (32)

1. surface coating cutting tool (1) comprising:

Basic material (2); With

Go up film (3) that form at described basic material (2); Wherein

These film (3) are as the outermost layer on described basic material (2) and have compression stress,

This compression stress changes so that have intensity distributions on the thickness direction of described filming (3), and

This intensity distributions is characterised in that: described compression stress of filming lowers continuously from described described surface (4) of filming towards being positioned at described described surface (4) of filming and first intermediate point (5) between the described bottom surface of filming (6), and this compression stress locates to reach relative minimum point at described first intermediate point (5).

2. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: locate to reach maximal pressure stress under compression and this compression stress on described described surface (4) of filming and keep steady state value from described first intermediate point (5) to described described bottom surface (6) of filming.

3. according to the surface coating cutting tool (1) of claim 2, wherein

Described compression stress be from least-stress of 15GPa in the 0GPa scope at the most.

4. according to the surface coating cutting tool (1) of claim 2, wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming apart be equivalent to described filming (3) thickness at least 0.1% to the position of 50% distance at the most.

5. according to the surface coating cutting tool (1) of claim 2, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 20-90% that is equivalent to the compression stress located on described described surface (4) of filming.

6. according to the surface coating cutting tool (1) of claim 5, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 40-80% that is equivalent to the compression stress located on described described surface (4) of filming.

7. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: described compression stress increases towards described described bottom surface (6) of filming continuously from described first intermediate point (5).

8. according to the surface coating cutting tool (1) of claim 7, wherein

Described compression stress be from least-stress of 15GPa in the 0GPa scope at the most.

9. according to the surface coating cutting tool (1) of claim 7, wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming at a distance of the thickness of described filming (3) at least 0.1% to the position of 50% distance at the most.

10. according to the surface coating cutting tool (1) of claim 7, wherein

Described compression stress locates to reach peak on described described surface (4) of filming.

11. according to the surface coating cutting tool (1) of claim 7, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 20-90% that is equivalent to the compression stress located on described described surface (4) of filming.

12. according to the surface coating cutting tool (1) of claim 11, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 40-80% that is equivalent to the compression stress located on described described surface (4) of filming.

13. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: described compression stress increases continuously and reaches relative peak at described second intermediate point (9) towards being positioned at second intermediate point (9) between described first intermediate point (5) and the described described bottom surface (6) of filming from described first intermediate point (5).

14. according to the surface coating cutting tool (1) of claim 13, wherein

Described compression stress be at least-stress of 15GPa in the 0GPa scope at the most.

15. according to the surface coating cutting tool (1) of claim 13, wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.1% to the position of 50% distance at the most.

16. according to the surface coating cutting tool (1) of claim 13, wherein

Described second intermediate point (9) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.2% to the position of 95% distance at the most.

17. according to the surface coating cutting tool (1) of claim 13, wherein

Described compression stress locates to reach peak on described described surface (4) of filming.

18. according to the surface coating cutting tool (1) of claim 13, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 20-90% that is equivalent to the compression stress located on described described surface (4) of filming.

19. according to the surface coating cutting tool (1) of claim 18, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 40-80% that is equivalent to the compression stress located on described described surface (4) of filming.

20. according to the surface coating cutting tool (1) of claim 1, wherein

Described intensity distributions is characterised in that: described compression stress increases continuously with second intermediate point (9) between the described described bottom surface (6) of filming and reaches relative peak at described second intermediate point (9) towards being positioned at described first intermediate point (5) from described first intermediate point (5), and this intensity distributions has one or more similar described relative minimum points between described second intermediate point (9) and described described bottom surface (6) of filming.

21. according to the surface coating cutting tool (1) of claim 20, wherein

Described intensity distributions has one or more similar described relative peaks between described second intermediate point (9) and described described bottom surface (6) of filming.

22. according to the surface coating cutting tool (1) of claim 20, wherein

Described intensity distributions has one or more described similar relative minimum points and one or more described similar relative peaks between described second intermediate point (9) and described described bottom surface (6) of filming, described relative minimum point and relative peak are according to this sequence alternate and repetition.

23. according to the surface coating cutting tool (1) of claim 20, wherein

Described compression stress be from least-stress of 15GPa in the 0GPa scope at the most.

24. according to the surface coating cutting tool (1) of claim 20, wherein

Described first intermediate point (5) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.1% to the position of 40% distance at the most.

25. according to the surface coating cutting tool (1) of claim 20, wherein

Described second intermediate point (9) be positioned at described described surface (4) of filming at a distance of described filming (3) thickness at least 0.2% to the position of 80% distance at the most.

26. according to the surface coating cutting tool (1) of claim 20, wherein

Described compression stress locates to reach peak on described described surface (4) of filming.

27. according to the surface coating cutting tool (1) of claim 20, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 10-80% that is equivalent to the compression stress located on described described surface (4) of filming.

28. according to the surface coating cutting tool (1) of claim 27, wherein

The described compression stress of locating at described first intermediate point (5) is set to the value of the 20-60% that is equivalent to the compression stress located on described described surface (4) of filming.

29. surface coating cutting tool (1) comprising:

Basic material (2); With

Go up film (3) that form at described basic material (2); Wherein

These film (3) are as the outermost layer on described basic material (2) and have compression stress,

This compression stress changes so that have intensity distributions on the thickness direction of described filming (3), and

This intensity distributions is characterised in that: described compression stress of filming lowers from described described surface (4) of filming towards being positioned at described described surface (4) of filming and first intermediate point (5) between the described bottom surface of filming (6), and this compression stress locates to reach relative minimum point at described first intermediate point (5)

Wherein said intensity distributions is characterised in that: locates to reach maximal pressure stress under compression and this compression stress on described described surface (4) of filming and keeps steady state value to described described bottom surface (6) of filming from described first intermediate point (5), and

Wherein said maximal pressure stress under compression is maintained at the predetermined distance from described described surface (4) of filming to described first intermediate point (5), and described afterwards compression stress lowers continuously towards described first intermediate point (5).

30. surface coating cutting tool (1) comprising:

Basic material (2); With

Go up film (3) that form at described basic material (2); Wherein

These film (3) are as the outermost layer on described basic material (2) and have compression stress,

This compression stress changes so that have intensity distributions on the thickness direction of described filming (3), and

This intensity distributions is characterised in that: described compression stress of filming lowers from described described surface (4) of filming towards being positioned at described described surface (4) of filming and first intermediate point (5) between the described bottom surface of filming (6), and this compression stress locates to reach relative minimum point at described first intermediate point (5)

Wherein said intensity distributions is characterised in that: described compression stress increases towards described described bottom surface (6) of filming continuously from described first intermediate point (5), and

Wherein said compression stress of filming is maintained at the predetermined distance from described described surface (4) of filming to described first intermediate point (5), and described afterwards compression stress lowers continuously towards described first intermediate point (5).

31. surface coating cutting tool (1) comprising:

Basic material (2); With

Go up film (3) that form at described basic material (2); Wherein

These film (3) are as the outermost layer on described basic material (2) and have compression stress,

This compression stress changes so that have intensity distributions on the thickness direction of described filming (3), and

This intensity distributions is characterised in that: described compression stress of filming lowers from described described surface (4) of filming towards being positioned at described described surface (4) of filming and first intermediate point (5) between the described bottom surface of filming (6), and this compression stress locates to reach relative minimum point at described first intermediate point (5)

Wherein said intensity distributions is characterised in that: described compression stress increases continuously and reaches relative peak at described second intermediate point (9) towards being positioned at second intermediate point (9) between described first intermediate point (5) and the described described bottom surface (6) of filming from described first intermediate point (5), and

Wherein said compression stress of filming is maintained at the predetermined distance from described described surface (4) of filming to described first intermediate point (5), and described afterwards compression stress lowers continuously towards described first intermediate point (5).

32. surface coating cutting tool (1) comprising:

Basic material (2); With

Go up film (3) that form at described basic material (2); Wherein

These film (3) are as the outermost layer on described basic material (2) and have compression stress,

This compression stress changes so that have intensity distributions on the thickness direction of described filming (3), and

This intensity distributions is characterised in that: described compression stress of filming lowers from described described surface (4) of filming towards being positioned at described described surface (4) of filming and first intermediate point (5) between the described bottom surface of filming (6), and this compression stress locates to reach relative minimum point at described first intermediate point (5)

Wherein said intensity distributions is characterised in that: described compression stress increases continuously with second intermediate point (9) between the described described bottom surface (6) of filming and reaches relative peak at described second intermediate point (9) towards being positioned at described first intermediate point (5) from described first intermediate point (5), and this intensity distributions has one or more similar described relative minimum points between described second intermediate point (9) and described described bottom surface (6) of filming, and

Wherein said compression stress of filming is maintained at the predetermined distance from described described surface (4) of filming to described first intermediate point (5), and described afterwards compression stress lowers continuously towards described first intermediate point (5).

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