CN100428057C - Air float support base for regulating air diaphragm two-way rigidity - Google Patents
Air float support base for regulating air diaphragm two-way rigidity Download PDFInfo
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- CN100428057C CN100428057C CNB2006100273521A CN200610027352A CN100428057C CN 100428057 C CN100428057 C CN 100428057C CN B2006100273521 A CNB2006100273521 A CN B2006100273521A CN 200610027352 A CN200610027352 A CN 200610027352A CN 100428057 C CN100428057 C CN 100428057C
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Abstract
The present invention relates to an air floated supporting seat for regulating the two-way rigidity of an air film, which comprises a plurality of compressed air cavities and a plurality of vacuum air cavities, wherein the compressed air cavities comprise air outlet holes communicated with the bottom surface of the air floated supporting seat, and a plurality of air discharge holes. The air outlet holes are respectively connected with an air inlet passage. The vacuum air cavities comprise air pumping holes communicated with the bottom surface of the air floated supporting seat. The air pumping holes are respectively connected with an air pumping passage. The bottom surface of the air floated supporting seat is provided with air discharge holes. The air discharge holes are communicated with an air discharge passage on the air floated supporting seat. The technique that air is compressed and air is pumped in a vacuum mode to control air floatation is simultaneously used by the air floated supporting seat. The air floated supporting seat has the function for simultaneously regulating air supply pressure and vacuum suction force, and the two-way regulation of the rigidity of an air film is realized. The stable air floated supporting seat is supplied.
Description
Technical field
The present invention relates to a kind of pneumatic regulation unit, particularly a kind of device of regulating the air film two-way stiffness.
Background technology
In the VLSI (very large scale integrated circuit) optical lithography, more and more higher to the degree of accuracy requirement of photoetching.The silicon chip platform in photoetching process tangential movement and the marble platform between produce friction, this friction force makes the accurate motion of silicon chip platform cause bigger error.
For fear of because the running precision of the silicon chip platform that the friction between silicon chip platform and the marble platform causes descends, generally adopt gas bearing support to eliminate this friction force now.The silicon chip stand is on gas bearing support, and gas bearing support is discharged gas by venthole, and air pressure makes gas bearing support and Dali platform keep a segment distance.
Yet, generally use now two rigidity gas bearing supports still have many deficiencies: the venthole of pressure gas mostly is metal and makes, and along with the increase of service time, metal is perishable, and is easy to wear, has directly influenced the accurate control to supply gas pressure; The vacuum gas chamber of gas bearing support is little, occurs the unbalanced of air film vacuum tightness easily when regulating air film vacuum tightness, has increased the instability of gas bearing support.In addition, gas bearing support is too high apart from the marble podium level, and the gas film stiffness between gas bearing support and marble platform is bad, and rigidity is meant the ability of object resistance to deformation under external force, and rigidity is high more, " firmly " more of object performance.
Though the gas bearing support that uses has overcome the contact friction between silicon chip platform and the marble platform at present, owing to causing gas bearing support, above reason is difficult for realizing the bidirectional modulation of gas film stiffness, can't guarantee that the silicon chip platform accurately moves on the gas bearing support.
Summary of the invention
The object of the present invention is to provide a kind of gas bearing support of regulating the air film two-way stiffness, can regulate gas film stiffness two-wayly, improve the surface error leveling effect and the anti-vibration performance of air film.
The present invention is achieved by the following technical solutions: a kind of gas bearing support of regulating the air film two-way stiffness, gas bearing support comprise a compressed gas chamber and a vacuum gas chamber; Compressed gas chamber comprises the venthole that communicates with the gas bearing support bottom surface, also comprises several vent ports, and the venthole of compressed gas chamber is communicated with inlet channel respectively; The vacuum gas chamber comprises the aspirating hole that communicates with the gas bearing support bottom surface, and aspirating hole is communicated with bleed-off passage respectively; Inlet channel links to each other with outside bleeding point with outer suction port respectively with bleed-off passage; The gas bearing support bottom surface has several vent ports, and vent port is connected with exhaust passage on the gas bearing support.
The compressed gas chamber that described a kind of gas bearing support of regulating the air film two-way stiffness comprises is distributed in the periphery of gas bearing support, and the vacuum gas chamber is positioned at the inboard of compressed gas chamber.Wherein, vent port is distributed in the venthole both sides of compressed gas chamber.The compressed gas chamber that gas bearing support comprises comprises the venthole that communicates with the gas bearing support bottom surface, and the vacuum gas chamber comprises the aspirating hole that communicates with the gas bearing support bottom surface.The venthole that compressed gas chamber communicates with the gas bearing support bottom surface comprises the ruby orifice plug, and wherein, venthole and vent port are provided with the pressure buffer groove respectively.The quantity of venthole is 8-15, and the quantity of vent port is 16-30, and the quantity of aspirating hole is 3-9.
Wherein, venthole and the aspirating hole in the vacuum gas chamber positive negative pressure of regulating air film of gas bearing support by compressed gas chamber makes gas bearing support reach balance.
The gas bearing support main body adopts metal material to make, particularly aviation aluminium.During at 3.5～4.0bar, gas film stiffness is 30kgf/um to described air film height at 5-9 micron, air pressure.
The present invention is applied to the support unit of high precision, high acceleration precision stage, is applied to the silicon chip table mount especially, has prevented the vibrations and the friction when motion that produce because of contact effectively.Gas bearing support has big air cavity size, has increased the negative pressure cavity area, thereby can avoid occurring the unstable vibration of self-excitation.The present invention has used pressure gas and vacuum suction to control pneumatically supported technology simultaneously, make gas bearing support can regulate supply gas pressure and pull of vacuum simultaneously, determined this support unit that the bearing of regulating the air film two-way stiffness is applied to high precision, the accurate X-Y worktable of high acceleration that has.
Description of drawings
Fig. 1 is the gas bearing support vertical cross section;
Fig. 2 is the gas bearing support bottom view.
Label declaration:
1 compressed gas chamber inlet channel, 2 vacuum gas chamber pumping passages
3 exhaust passages, 4 ruby orifice plugs
5 vent ports, 6 aspirating holes, 7 vacuum gas chambeies
8 pressure buffer grooves, 9 ventholes, 10 compressed gas chamber
11 marble platforms
Embodiment
See also Fig. 1, a kind of gas bearing support of regulating the air film two-way stiffness, comprise compressed gas chamber 10 and vacuum gas chamber 7, wherein, several ventholes 9 that communicate with the gas bearing support bottom surface are arranged in the compressed gas chamber 10, several aspirating holes 6 that communicate with the gas bearing support bottom surface are arranged in the vacuum gas chamber 7, and venthole 9 is communicated with inlet channel 1 on the gas bearing support, and aspirating hole 6 is communicated with bleed-off passage 2 on the gas bearing support; The gas bearing support bottom surface has several vent ports 5, and vent port 5 is connected with exhaust passage 3 on the gas bearing support.Venthole 9 places also are provided with ruby orifice plug 4, and adopting orifice plug is in order to reduce the size of venthole, to increase pressure, have anti abrasive characteristic and adopt ruby to do orifice plug, and the size of venthole can not change, thereby it is stable to use entraining air stream.The gas bearing support main body adopts metal material to make, particularly aviation aluminium.
See also Fig. 2, the compressed gas chamber 10 of gas bearing support is distributed in the periphery of gas bearing support, and vacuum gas chamber 7 is positioned at the inboard of compressed gas chamber 10.5 mouthfuls pressure buffer groove 8 is set at venthole 9 and vent port.Vent port 5 is distributed in the both sides of venthole 9.
The present invention regulates the gas bearing support of air film two-way stiffness, is positioned at marble platform 11 tops, by regulating the positive/negative pressure of air film, makes gas bearing support reach balance, and air film reaches best rigidity.As shown in Figure 2, the gas bearing support of regulating the air film two-way stiffness comprises that compressed air cell can form by being distributed in peripheral 8,11 or 15 equally distributed pressure gas cavitys.Venthole 9 links to each other with inlet channel 1 respectively as shown in Figure 1.16,22 or 30 vent ports 5 can correspondingly distribute in the both sides of venthole 9.By the inlet channel on the gas bearing support 1, to marble platform 11 air feed, reflux gas enters vent port 5 and discharges by the exhaust passage on the gas bearing support 3 gas from venthole 9.
In the centre of gas bearing support vacuum gas chamber 7 is arranged, can distribute above it 3,6 or 9 vacuum pumping holes 6, aspirating hole 6 is communicated with bleed-off passage 2.When bleed-off passage 2 one ends are bled, gas enters aspirating hole 6 and by being drawn out of behind the bleed-off passage 2, gas bearing support is adsorbed on the marble platform 11.
The venthole 9 that the inlet channel 1 of gas by compressed gas chamber communicates with the gas bearing support bottom surface among the present invention is given vent to anger to marble platform 11, between gas bearing support and marble platform, form one deck air film, utilize gas outlet 9 to increase supply gas pressure, gas bearing support is floated, air-film thickness increases, and runs into vent port 5 discharges that distribution venthole both sides are crossed in the circulation of air that refluxes behind the marble platform; Aspirating hole 6 extracting airs that can communicate with the gas bearing support bottom surface by the vacuum gas chamber 7 of gas bearing support simultaneously, negative pressure of vacuum produces suction to gas bearing support, makes gas bearing support near the marble platform, and air-film thickness reduces.When both are in mobile equilibrium, form distinctive air film steady state (SS).
Venthole and the aspirating hole in the vacuum gas chamber positive negative pressure of regulating air film of gas bearing support by compressed gas chamber makes gas bearing support reach balance.Through measuring, utilize gas bearing support of the present invention, during at 3.5～4.0bar, gas film stiffness is 30kgf/um to the air film height of formation at 5-9 micron, air pressure.
The present invention makes gas bearing support and marble platform that a stable distance be arranged by regulating the air film two-way stiffness, by regulating the vacuum tightness of pressure gas supply gas pressure and gas, the realization gas bearing support is highly stable, and air film has best rigidity, has improved the stability of gas bearing support.For the silicon chip platform provides a stable base.
Claims (11)
1, a kind of gas bearing support of regulating the air film two-way stiffness, it is characterized in that: gas bearing support comprises a compressed gas chamber and a vacuum gas chamber, several ventholes that communicate with the gas bearing support bottom surface are arranged in the compressed gas chamber, several aspirating holes that communicate with the gas bearing support bottom surface are arranged in the vacuum gas chamber, venthole is communicated with inlet channel on the gas bearing support, and aspirating hole is communicated with bleed-off passage on the gas bearing support; The gas bearing support bottom surface has several vent ports, and vent port is connected with exhaust passage on the gas bearing support.
2, gas bearing support as claimed in claim 1 is characterized in that: compressed gas chamber is distributed in the periphery of gas bearing support, and the vacuum gas chamber is positioned at the inboard of compressed gas chamber.
3, gas bearing support as claimed in claim 1 is characterized in that: vent port is distributed in the both sides of venthole.
4, gas bearing support as claimed in claim 3 is characterized in that: venthole and vent ports are provided with the pressure buffer groove.
5, gas bearing support as claimed in claim 4 is characterized in that: air outlet hole mouth also is provided with the ruby orifice plug.
6, gas bearing support as claimed in claim 5 is characterized in that: the quantity of venthole is 8-15.
7, gas bearing support as claimed in claim 4 is characterized in that: the quantity of vent port is 16-30.
8, gas bearing support as claimed in claim 1 is characterized in that: the quantity of aspirating hole is 3-9.
9, gas bearing support as claimed in claim 1 is characterized in that: by import the positive negative pressure that gas and the bleed-off passage extracting gases on gas bearing support are regulated air film to the inlet channel on the gas bearing support, make gas bearing support reach balance.
10, gas bearing support as claimed in claim 1 is characterized in that: the material of main part of gas bearing support is an aviation aluminium.
11, gas bearing support as claimed in claim 1 is characterized in that; The air film height that forms in the gas bearing support bottom surface is 5-9 micron, air pressure during at 3.5-4.0bar, and gas film stiffness is 30kgf/um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100273521A CN100428057C (en) | 2006-06-07 | 2006-06-07 | Air float support base for regulating air diaphragm two-way rigidity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100273521A CN100428057C (en) | 2006-06-07 | 2006-06-07 | Air float support base for regulating air diaphragm two-way rigidity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1858653A CN1858653A (en) | 2006-11-08 |
| CN100428057C true CN100428057C (en) | 2008-10-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100273521A Active CN100428057C (en) | 2006-06-07 | 2006-06-07 | Air float support base for regulating air diaphragm two-way rigidity |
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| CN (1) | CN100428057C (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504513B (en) * | 2009-01-23 | 2011-06-15 | 上海微电子装备有限公司 | Air-supporting slide rail system |
| CN102109011B (en) * | 2009-12-25 | 2013-01-16 | 上海微电子装备有限公司 | Pressure-sharing cavity air thrust bearing |
| JP4992986B2 (en) * | 2010-01-22 | 2012-08-08 | 新東工業株式会社 | Hydrostatic bearing device and stage with hydrostatic bearing device |
| CN102678748B (en) * | 2011-03-07 | 2014-07-16 | 上海微电子装备有限公司 | Split type air foot |
| CN103376664B (en) * | 2012-04-20 | 2016-02-03 | 上海微电子装备有限公司 | A kind of mask platform with Switch of working position function |
| CN103048886B (en) * | 2012-11-22 | 2015-10-28 | 中国电子科技集团公司第四十五研究所 | Spherical pneumatic leveling mechanism |
| CN104074867B (en) * | 2014-06-27 | 2017-01-04 | 上海仙丰智能设备有限公司 | A kind of constant voltage air-supporting slide rail system |
| US10308101B2 (en) * | 2017-10-09 | 2019-06-04 | Gm Global Technology Operations Llc. | Hybrid tonneau cover |
| CN108825656A (en) * | 2018-08-10 | 2018-11-16 | 天津大学 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
| CN112065858B (en) * | 2020-11-10 | 2021-01-29 | 上海隐冠半导体技术有限公司 | Qi foot |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2622131Y (en) * | 2003-05-14 | 2004-06-30 | 东捷半导体科技股份有限公司 | Air-floating type apparatus for bearing and transporting liquid crystal substrate |
| CN1564317A (en) * | 2004-03-18 | 2005-01-12 | 上海交通大学 | Air floation XY coordinates plane movoment platform |
-
2006
- 2006-06-07 CN CNB2006100273521A patent/CN100428057C/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2622131Y (en) * | 2003-05-14 | 2004-06-30 | 东捷半导体科技股份有限公司 | Air-floating type apparatus for bearing and transporting liquid crystal substrate |
| CN1564317A (en) * | 2004-03-18 | 2005-01-12 | 上海交通大学 | Air floation XY coordinates plane movoment platform |
Non-Patent Citations (2)
| Title |
|---|
| 投影光刻机工作台的压力-真空平衡气足研究. 徐国彬等.微细加工技术，第4期. 2001 |
| 投影光刻机工作台的压力-真空平衡气足研究. 徐国彬等.微细加工技术，第4期. 2001 * |
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| CN1858653A (en) | 2006-11-08 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |