CN208224713U - A kind of air-floating apparatus, work stage and litho machine - Google Patents
A kind of air-floating apparatus, work stage and litho machine Download PDFInfo
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- CN208224713U CN208224713U CN201820628746.0U CN201820628746U CN208224713U CN 208224713 U CN208224713 U CN 208224713U CN 201820628746 U CN201820628746 U CN 201820628746U CN 208224713 U CN208224713 U CN 208224713U
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Abstract
The utility model discloses a kind of air-floating apparatus, work stage and litho machine, which includes load bearing unit and air flotation cell；The load bearing unit is fixedly connected on the first surface of the air flotation cell；The air flotation cell includes multiple gas outlets, and the multiple gas outlet is in array distribution in the second surface of the air flotation cell；The second surface of the air flotation cell is oppositely arranged with first surface.The technical solution of the utility model, in the gas outlet of array distribution, makes the second surface uniform force of air-floating apparatus, deformation is small, to improve the air bearing rigidity of air-floating apparatus by the second surface setting in air flotation cell.
Description
Technical field
The utility model relates to semiconductor device fabrication technical field more particularly to a kind of air-floating apparatus, work stage and light
Quarter machine.
Background technique
Air-floating apparatus be provided for close sports platform air-bearing support, with guarantee sports platform air floating platform (generally
Marble air floating platform) on make the critical component of frictionless motion, generally comprise air flotation cell and pretightning force unit.Existing gas
Floating device is usually rectangular air-floating apparatus, and the bottom surface of air-floating apparatus four, air flotation cell is arranged in vertex, and middle part is that vacuum is pre-
Clamp force unit.When air-floating apparatus works, it is passed through barotropic gas in air flotation cell, forms gas between air-floating apparatus and air floating platform
Film, makes supporting role of the air-floating apparatus by lift of gas, guarantees that air-floating apparatus makees frictionless motion on air floating platform, and vacuum
Pretightning force unit is then passed through negative-pressure gas, makes air-floating apparatus by the vacuum pretightning force equal in magnitude, contrary with lift of gas
Effect, to guarantee air-floating apparatus stress balance.By adjusting the size of lift of gas and vacuum pretightning force, i.e., adjustable air bearing dress
The air bearing rigidity set.
At this point, need to increase simultaneously lift of gas and vacuum pretightning force to the air bearing rigidity for improving air-floating apparatus, and with
The increase of vacuum pretightning force can generate bending in the middle part of air-floating apparatus bottom surface, thus make between air-floating apparatus and air floating platform away from
From becoming smaller.Due to usually only several microns to more than ten microns of the air-film thickness between air-floating apparatus and air floating platform, work as gas
It will be generated when amount of bow in the middle part of floating device bottom surface is excessive and air floating platform contacts, between air-floating apparatus and air floating platform mechanical
Friction, causes air-floating apparatus ineffective.
Utility model content
The utility model provides a kind of air-floating apparatus, work stage and litho machine, so that air flotation cell uniform force, deformation
It is small, to improve air bearing rigidity.
In a first aspect, the utility model embodiment proposes a kind of air-floating apparatus, which includes: that load bearing unit is gentle
Floating unit；
The load bearing unit is fixedly connected on the first surface of the air flotation cell；
The air flotation cell includes multiple gas outlets, and the multiple gas outlet is in battle array in the second surface of the air flotation cell
Column distribution；
The second surface of the air flotation cell is oppositely arranged with first surface.
Further, the air flotation cell further includes at least one air inlet, and is connected at least one described air inlet
With the gas circuit of the multiple gas outlet；
Wherein, at least one described air inlet is located at the third surface of the air flotation cell, and the third surface connects institute
State first surface and the second surface.
It further, further include multiple outlet ducts, the gas circuit includes intersecting the first gas circuit and the second gas circuit of connection；
First opening in each outlet duct forms a gas outlet, second opening in the outlet duct and institute
It states the first gas circuit to be connected to second gas circuit, second opening in the outlet duct is set to first gas circuit and described the
The connectivity part of two gas circuits.
It further, further include multiple plug interfaces；
The multiple plug interface is set to the opening that first gas circuit is located at the third surface of the air flotation cell,
And second gas circuit is located at the opening on the third surface of the air flotation cell；
In the opening of first gas circuit and second gas circuit on the third surface, the not set plug interface
Opening constitutes the air inlet.
It further, further include multiple sealing structures；
The sealing structure is for sealing the plug interface；
The quantity of the sealing structure is equal to the quantity of the plug interface.
It further, further include balancer structure；
The balancer structure is located at the second surface of the air flotation cell；
The balancer structure connects at least partly described gas outlet.
Further, the balancer structure includes the first balancing slit and the second balancing slit；
First balancing slit connects the gas outlet along first direction；
Second balancing slit connects the gas outlet in a second direction.
Further, first balancing slit and second balancing slit are from the second surface of the air flotation cell to
One surface indentation, the value range of the width A1 of first balancing slit are 0.2mm≤A1≤0.6mm, the value model of depth B 1
It encloses for 0.05mm≤B1≤0.1mm；The value range of the width A2 of second balancing slit is 0.2mm≤A2≤0.6mm, deep
The value range for spending B2 is 0.05mm≤B1≤0.1mm.
Further, the shape of the gas outlet is circle, and the value range of the diameter D of the circular gas outlet is
0.03mm≤D≤0.08mm。
Further, the value range of the distance between adjacent described gas outlet E is 80mm≤E≤160mm.
It further, further include flow nipple；
The flow nipple is located inside the outlet duct, is fixedly connected with the outlet duct.
Further, the gas outlet is in the array distribution that m row n is arranged in the second surface of the air flotation cell；
Wherein, m and n is the integer equal to or more than 2.
Further, the load bearing unit includes support plate and external frame；
The support plate is fixedly connected with the external frame, surrounds the first surface and third table of the air flotation cell
Face；
Auxilairy air intake corresponding with the air inlet of the air flotation cell is provided in the external frame.
Second aspect, the utility model embodiment also provide a kind of work stage, which includes what first aspect provided
Air-floating apparatus article carrying platform and air floating platform；
Wherein, the air-floating apparatus is used to support the article carrying platform and makees frictionless motion on the air floating platform.
The third aspect, the utility model embodiment also provide a kind of litho machine, which includes what second aspect provided
Work stage.
The utility model provides a kind of air-floating apparatus, is in the outlet of array distribution in the second surface setting of air flotation cell
Mouthful, make the second surface uniform force of air-floating apparatus, deformation is small, to improve the air bearing rigidity of air-floating apparatus, solves existing
Have using vacuum pre-fastening structure in air-floating apparatus, when improving air bearing rigidity, since air-floating apparatus deforms larger, air-floating apparatus
It is contacted with air floating platform and generates mechanical friction, lead to the problem that air-floating apparatus is ineffective.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art does one and simply introduces, it should be apparent that, the accompanying drawings in the following description is
Some embodiments of the utility model, for those of ordinary skill in the art, without creative efforts,
It is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the air-floating apparatus of the prior art；
Fig. 2 is the operation principle schematic diagram of the air-floating apparatus of the prior art；
Fig. 3 is a kind of structural schematic diagram of air-floating apparatus provided by the embodiment of the utility model；
Fig. 4 is a kind of structural schematic diagram of the second surface of air flotation cell provided by the embodiment of the utility model；
Fig. 5 is a kind of structural schematic diagram of air flotation cell provided by the embodiment of the utility model；
Fig. 6 is the schematic diagram of the section structure of the OO ' along Fig. 5；
Fig. 7 is the schematic diagram of the section structure of the PP ' along Fig. 5；
Fig. 8 is the structural schematic diagram of another air-floating apparatus provided by the embodiment of the utility model；
Fig. 9 is a kind of structural schematic diagram of work stage provided by the embodiment of the utility model.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than the restriction to the utility model.It further needs exist for
It is bright, part relevant to the utility model is illustrated only for ease of description, in attached drawing rather than entire infrastructure.
Fig. 1 is the structural schematic diagram of the air-floating apparatus of the prior art.Referring to Fig. 1, air-floating apparatus 10 is a kind of rectangular air bearing
Air flotation cell 101,102,103 and 104 is arranged in device, bottom surface (second surface) four angles, and bottom center is vacuum pretightning force
Unit 105.Fig. 2 is the operation principle schematic diagram of the air-floating apparatus of the prior art.Air-floating apparatus 10 works combined with Figure 1 and Figure 2,
When, air flotation cell 101,102,103 and 104 is passed through barotropic gas, air film is formed between air-floating apparatus 10 and air floating platform 20,
Make air-floating apparatus 10 by the supporting role of lift of gas N；And vacuum pretightning force unit 105 is then passed through negative-pressure gas, fills air bearing
10 are set by the effect with lift of gas N vacuum pretightning force F equal in magnitude, contrary, to guarantee 10 stress of air-floating apparatus
Balance, air-floating apparatus 10 make frictionless motion on air floating platform 20.By adjusting the size of lift of gas N and vacuum pretightning force F,
The air bearing rigidity of i.e. adjustable air-floating apparatus 10.Air-floating apparatus 10 shown in fig. 1, the air bearing to raising air-floating apparatus 10 are rigid
Degree, needs to increase simultaneously lift of gas N and vacuum pretightning force F, since lift of gas N and vacuum pretightning force F are contrary, as it takes
The increase of value can be bent in the middle part of 10 bottom surface of air-floating apparatus to air floating platform 20, thus make air-floating apparatus 10 and air floating platform 20 it
Between distance become smaller.Illustratively, the air-film thickness T2 between air-floating apparatus 10 and air floating platform 20 is usually several microns to ten
Several microns, the amount of bow T1 of air-floating apparatus 10 is excessive, and when reaching the value size of air-film thickness T2, air-floating apparatus 10 and air bearing are flat
Platform 20 contacts, and can generate mechanical friction, cause air-floating apparatus 10 ineffective.
The utility model embodiment is in view of the above-mentioned problems, provide a kind of air-floating apparatus.
Fig. 3 is a kind of structural schematic diagram of air-floating apparatus provided by the embodiment of the utility model, and Fig. 4 is the utility model reality
A kind of structural schematic diagram of the second surface of air flotation cell of example offer is provided.Referring to Fig. 3 and Fig. 4, air-floating apparatus 03 includes carrying
Unit 40 and air flotation cell 30；Load bearing unit 30 is fixedly connected on the first surface 30A of air flotation cell 40；Air flotation cell 30 includes
Multiple gas outlets 301, multiple gas outlets 301 are in array distribution in the second surface 30B of air flotation cell 30；The of air flotation cell 30
Two surface 30B and first surface 30A is oppositely arranged.
Wherein, load bearing unit 40 can be used for carrying the other structures or load being attached thereto, and air flotation cell 30 is for generating
Lift of gas.Air-floating apparatus 03 only includes air flotation cell 30, and without including vacuum pretightning force unit, load is can be used in preloading mode
Gravity preloads mode.Due to reducing vacuum pretightning force unit, so as to make the structure and air flotation cell 30 of air-floating apparatus 03
Internal gas circuit design is simpler, reduces the processing technology difficulty of air-floating apparatus 03 namely the processing work of air-floating apparatus 03
Skill is more preferable.Meanwhile the second surface 30B of air flotation cell 30 can be described as air bearing surface, by gas outlet outlet, form air film,
Make air-floating apparatus 03 by the effect of lift of gas, the gravity preload force of this lift of gas and air-floating apparatus 03 balances each other, due to outlet
Mouthfuls 301 in second surface 30B be in array distribution, entire second surface 30B buoyancy of being bullied can be made uniform, when lift of gas increases
Second surface 30B deformation is small, so that the load capacity with higher of air-floating apparatus 03 and higher air bearing rigidity can be realized.
Optionally, multiple gas outlets 301 are equidistantly arranged in the second surface 30B of air flotation cell 30.
Illustratively, along the distance between two first direction X adjacent gas outlets 301, E1 is adjacent with Y in a second direction
The distance between two gas outlets 301 E2 it is equal.Can make as a result, each position of the second surface 30B of air flotation cell 30 by
More evenly, i.e., the air bearing rigidity of each position of entire second surface 30B is more balanced, to improve air-floating apparatus for the lift of gas arrived
The stability of 03 air bearing rigidity.
It should be noted that the shape of Fig. 4 merely exemplary second surface 30B for showing air flotation cell 30 be it is rectangular,
But the restriction not to air flotation cell provided by the utility model.In other embodiments, the second surface of air flotation cell 30
The shape of 30B can also be circle, or be other polygons such as triangle, pentagon.
Optionally, Fig. 5 is a kind of structural schematic diagram of air flotation cell provided by the embodiment of the utility model.Referring to fig. 4 and
Fig. 5, air flotation cell 30 further includes at least one air inlet 302, and is connected at least one air inlet 302 and multiple gas outlets
301 gas circuit 303；Wherein, at least one air inlet 302 is located at the third surface 30C of air flotation cell 30, and third surface 30C connects
Meet first surface 30A and second surface 30B.
Wherein, gas circuit 303 is positive pressure gas channel.Due to gravity preload force direction straight down, for guarantee air-floating apparatus 03
It works normally, barotropic gas need to be passed through to air inlet 302, make the direction of lift of gas straight up, as a result, gravity preload force and gas
Buoyancy balances each other.
Wherein, the quantity of air inlet 302 can be one or more.
Illustratively, the quantity of air inlet 302 is one, to only need to be connected to outside positive pressure gas source at one, is connected
Mode is simple.
In addition, being arranged such, there are also following effects, on the one hand, air inlet 302 is not set to the second of air flotation cell 30
Surface 30B can make second surface 30B that gas outlet 301 only be arranged, to ensure that second surface 30B uniform force, avoid into
Influence of the port 302 to the distribution of lift of gas.On the other hand, air inlet 302 is not set to the first surface of air flotation cell 30
30A can make first surface 30A more smooth, be easily carried load or connection other structures.
It should be noted that the shape of third side 30C is not quite similar according to the difference of the shape of air flotation cell 30, this
Utility model embodiment is not construed as limiting this.In addition, the utility model embodiment is not construed as limiting the quantity of air inlet 302.
Optionally, Fig. 6 is the schematic diagram of the section structure of the OO ' along Fig. 5.Referring to figs. 5 and 6, air flotation cell 30 further includes
Multiple outlet ducts 304, gas circuit 303 include intersecting the first gas circuit 3031 and the second gas circuit 3032 of connection；Each outlet duct
304 the first opening forms a gas outlet 301, and the second opening and first gas circuit 3031 and the second gas circuit 3032 in outlet duct connect
Logical, second opening in outlet duct 304 is set to the connectivity part of the first gas circuit 3031 and the second gas circuit 3032.
Wherein, the axial direction in multiple outlet ducts 304 is consistent, illustratively, can be for perpendicular to air flotation cell 30
The direction of second surface 30B.The processing technology difficulty in outlet duct 304 on the one hand can be reduced as a result,；On the other hand, gas circuit 303
In the axial direction of the barotropic gas that is passed through along outlet duct 304 blow out, airflow direction is consistent everywhere, is each perpendicular to air flotation cell
30 second surface 30B, so as to make one timing of throughput, lift of gas is larger, so that air bearing rigidity is larger.
It should be noted that merely exemplary in Fig. 5 show that the first gas circuit 3031 is vertical with the second gas circuit 3032 to be handed over
Fork, but the restriction not to air-floating apparatus provided by the utility model.In other embodiments, the first gas circuit 3031 and second
The intersecting angle of gas circuit 3032 can be set according to the actual demand of air-floating apparatus.
Optionally, with continued reference to Fig. 5 and Fig. 6, air flotation cell 30 further includes multiple plug interfaces 305；Multiple plug interfaces
305 be set to the first gas circuit 3031 be located at air flotation cell 30 third surface 30C opening and the second gas circuit 3032 be located at
The opening of the third surface 30C of air flotation cell 30；In the first gas circuit 3031 and the second opening in third surface 30C of gas circuit 3032
Mouthful, the opening of not set plug interface 305 constitutes air inlet 302.
Illustratively, the opening that the first gas circuit 3031 is located at the third surface 30C of air flotation cell 30 is plug interface
305；Second gas circuit 3032 is located at the opening of the third surface 30C of air flotation cell 30, and having an opening is air inlet 302, remaining
Each opening is plug interface 305.To which gas circuit 303 (including the first gas circuit 3031 and second gas circuit 3032) is in air flotation cell 30
Third surface 30C opening total quantity be plug interface 305 quantity and air inlet 302 the sum of quantity.
It should be noted that the third table for showing the second gas circuit 3032 and being located at air flotation cell 30 merely exemplary in Fig. 5
An opening of face 30C is air inlet 302, but is not the restriction to the utility model.In other embodiments, settable
The opening that one or several gas circuits 303 of anticipating are located at the third surface 30C of air flotation cell 30 is air inlet 302.
Optionally, with continued reference to Fig. 5 or Fig. 6, air flotation cell 30 further includes multiple sealing structures 306, and sealing structure 306 is used
In seal plug interface 305, the quantity of sealing structure 306 is equal to the quantity of plug interface 305.
Wherein, sealing structure 306 can be connected gluing, screw-tightened or seal plug interface by way of snapping connection
305.Wherein, the mode of gluing connection can make the better tightness between sealing structure 306 and plug interface 305；Screw-tightened
Or the mode snapped connection can make sealing structure 306 be easily installed and dismantle, convenient in subsequent 03 use process of air-floating apparatus
Maintenance and maintenance.
Optionally, with continued reference to Fig. 4 and Fig. 6, air flotation cell 30 further includes balancer structure 307, and balancer structure 307 is located at gas
The second surface 30B of floating unit 30, the connection of balancer structure 307 at least partly gas outlet 301.
Optionally, balancer structure 307 includes the first balancing slit 3071 and the second balancing slit 3072,3071 edge of the first balancing slit
First direction X connection gas outlet 301, the second balancing slit 3072 Y connection gas outlet 301 in a second direction.
Wherein, balancer structure 307 can be cyclic annular or rectangular-shaped, by using balancer structure 307 by the throttling of venthole 301 and
Second surface 30B throttling combines, and the load capacity and air bearing rigidity of air-floating apparatus 03 can be improved.
Illustratively, balancer structure 307 is set to the second surface 30B of air flotation cell 30, that is, air bearing surface, with outlet
The outlet duct 304 that hole 301 throttles is connected.Barotropic gas flows into air film from the side of balancer structure 307, and positive pressure gas flow is equal
The suffered flow impedance in air film is different from positive pressure gas flow for suffered flow impedance in press mechanism 307, therefore generates secondary surface section
Effect is flowed, to improve the air bearing rigidity of air-floating apparatus 03, and then improves the load capacity of air-floating apparatus 03.
It should be noted that Fig. 4 it is merely exemplary show the position of the first balancing slit 3071 and the second balancing slit 3072
It sets, does not show that its size.
Optionally, Fig. 7 is the schematic diagram of the section structure of the PP ' along Fig. 4.In conjunction with Fig. 4 and Fig. 7,3071 He of the first balancing slit
Second balancing slit 3072 is recessed from the second surface 30B of air flotation cell 30 to first surface 30A, the first balancing slit 3071
The value range of width A1 is 0.2mm≤A1≤0.6mm, and the value range of depth B 1 is 0.05mm≤B1≤0.1mm；Second
The value range of the width A2 of balancing slit 3072 is 0.2mm≤A2≤0.6mm, the value range of depth B 2 be 0.05mm≤B1≤
0.1mm。
It should be noted that the value of the width A1 of the first balancing slit 3071 and the width A2's of the second balancing slit 3072 takes
Value may be the same or different；The value of the depth B 1 of first balancing slit 3071 and the depth B 2 of the second balancing slit 3072
Value may be the same or different, and the utility model embodiment is not construed as limiting this.
Optionally, with continued reference to Fig. 4, the shape of gas outlet 301 is circle, the value of the diameter D of circular gas outlet 301
Range is 0.03mm≤D≤0.08mm.So as to make air-floating apparatus 03 in one timing of throughput, higher air bearing rigidity is obtained.
Optionally, it (is illustratively shown with continued reference to Fig. 4, the distance between adjacent gas outlet 301 E in Fig. 4 with E1, E2
The distance between adjacent gas outlet 301) value range be 80mm≤E≤160mm.So as to guarantee higher air bearing rigidity
Under the premise of be arranged negligible amounts venthole 301, to reduce the process time of air flotation cell 30.
Optionally, with continued reference to Fig. 6, air flotation cell 30 further includes flow nipple 308；Flow nipple 308 is located at outlet duct 304
Inside is fixedly connected with outlet duct 304
Wherein, flow nipple 308 can be process by ruby, and be nested in outlet duct 304 close to the one of the first opening
End.
Optionally, with continued reference to Fig. 4, gas outlet 301 is in the array that the second surface 30B of air flotation cell 30 is in m row n column
Distribution；Wherein, m and n is the integer equal to or more than 2.
Wherein, the line number of venthole 301 and columns can be arranged according to the size of air flotation cell 30.
Illustratively, the layout of venthole 301 can be the array layouts point such as 2 rows 2 column, 3 rows 3 column, 3 rows 4 column, 5 rows 5 column
Cloth.
It should be noted that Fig. 4 merely exemplary venthole 301 for showing 3 rows 3 and arranging, only to the utility model reality
The explanation of example is applied, and non-limiting.
Illustratively, with continued reference to Fig. 4 and Fig. 7, the value of the diameter D of 9 gas outlets 301 is 0.045mm；First
The value of the width A2 of the width A1 of balancing slit 3071 and the second balancing slit 3072 is 0.4mm, the depth of the first balancing slit 3071
The value for spending the depth B 2 of B1 and the second balancing slit 3072 is 0.08mm；Two gas outlets 301 adjacent along first direction X
The distance between E1 value be 110mm, in a second direction the value of the distance between two Y adjacent gas outlets 301 E2 be
140mm.The air floating properties of the corresponding air-floating apparatus 03 of above-mentioned parameter are as shown in table 1.
The air floating properties table of 1 air-floating apparatus of table
Wherein, air pressure is the air pressure for the barotropic gas being passed through, and zero load refers to the case where load is 0.
According in table data estimation load be 95kg when air-floating apparatus 03 air bearing rigidity, air bearing rigidity can be by gravity
The difference of preload force and the difference in air film gap carry out division arithmetic and obtain, it may be assumed that
Optionally, Fig. 8 is the structural schematic diagram of another air-floating apparatus provided by the embodiment of the utility model.Referring to Fig. 8,
Load bearing unit 40 includes support plate 401 and external frame 402；Support plate 401 is fixedly connected with external frame 402, surrounds air bearing
The first surface 30A and third surface 30C of unit 30；The air inlet 302 with air flotation cell 30 is provided in external frame 402
Corresponding auxilairy air intake 403.
Wherein, load bearing unit 40 also plays a protective role to air flotation cell 30.Meanwhile auxilairy air intake 403 and air inlet
302 are correspondingly arranged, and can simplify the gas circuit design in air-floating apparatus 03 between air flotation cell 30 and load bearing unit 40.
The utility model embodiment also provides a kind of work stage, and Fig. 9 is a kind of workpiece provided by the embodiment of the utility model
The structural schematic diagram of platform.Referring to Fig. 9, the work stage include above embodiment provide air-floating apparatus 03, article carrying platform 04 and
Air floating platform 05；Wherein, air-floating apparatus 03 is used to support article carrying platform 04 and makees frictionless motion on air floating platform 05.
Wherein, air floating platform 05 can be air-float guide rail.
At this point, lift of gas N balances each other with gravity preload force G, gravity preload force G is that the gravity of air-floating apparatus 03 and loading are put down
The sum of the gravity of platform 04.
The utility model embodiment also provides a kind of litho machine, which includes the workpiece that above embodiment provides
Platform.
Litho machine provided by the embodiment of the utility model and work stage include above-mentioned air-floating apparatus, therefore including above-mentioned gas
Beneficial effect possessed by floating device, details are not described herein.
Note that above are only the preferred embodiment and institute's application technology principle of the utility model.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, is able to carry out for a person skilled in the art various bright
Aobvious variation, readjustment and substitution is without departing from the protection scope of the utility model.Therefore, although passing through above embodiments
The utility model is described in further detail, but the utility model is not limited only to above embodiments, is not departing from
It can also include more other equivalent embodiments in the case that the utility model is conceived, and the scope of the utility model is by appended
Scope of the claims determine.
Claims (15)
1. a kind of air-floating apparatus, which is characterized in that including load bearing unit and air flotation cell；
The load bearing unit is fixedly connected on the first surface of the air flotation cell；
The air flotation cell includes multiple gas outlets, and the multiple gas outlet is divided in the second surface of the air flotation cell in array
Cloth；
The second surface of the air flotation cell is oppositely arranged with first surface.
2. air-floating apparatus according to claim 1, which is characterized in that the air flotation cell further includes at least one air inlet
Mouthful, and it is connected to the gas circuit of described at least one air inlet and the multiple gas outlet；
Wherein, at least one described air inlet is located at the third surface of the air flotation cell, the third surface connection described the
One surface and the second surface.
3. air-floating apparatus according to claim 2, which is characterized in that further include multiple outlet ducts, the gas circuit includes
Intersect the first gas circuit and the second gas circuit of connection；
First opening in each outlet duct forms a gas outlet, second opening and described the in the outlet duct
One gas circuit is connected to second gas circuit, and second opening in the outlet duct is set to first gas circuit and second gas
The connectivity part on road.
4. air-floating apparatus according to claim 3, which is characterized in that further include multiple plug interfaces；
The multiple plug interface is set to the opening that first gas circuit is located at the third surface of the air flotation cell, and
Second gas circuit is located at the opening on the third surface of the air flotation cell；
In the opening of first gas circuit and second gas circuit on the third surface, the opening of the not set plug interface
Constitute the air inlet.
5. air-floating apparatus according to claim 4, which is characterized in that further include multiple sealing structures；
The sealing structure is for sealing the plug interface；
The quantity of the sealing structure is equal to the quantity of the plug interface.
6. air-floating apparatus according to claim 3, which is characterized in that further include balancer structure；
The balancer structure is located at the second surface of the air flotation cell；
The balancer structure connects at least partly described gas outlet.
7. air-floating apparatus according to claim 6, which is characterized in that the balancer structure includes the first balancing slit and second
Balancing slit；
First balancing slit connects the gas outlet along first direction；
Second balancing slit connects the gas outlet in a second direction.
8. air-floating apparatus according to claim 7, which is characterized in that first balancing slit and second balancing slit are equal
It is recessed from the second surface of the air flotation cell to first surface, the value range of the width A1 of first balancing slit is
0.2mm≤A1≤0.6mm, the value range of depth B 1 are 0.05mm≤B1≤0.1mm；The width A2's of second balancing slit
Value range is 0.2mm≤A2≤0.6mm, and the value range of depth B 2 is 0.05mm≤B1≤0.1mm.
9. air-floating apparatus according to claim 1, which is characterized in that the shape of the gas outlet is circle, the circle
Gas outlet diameter D value range be 0.03mm≤D≤0.08mm.
10. air-floating apparatus according to claim 1, which is characterized in that the value of the distance between adjacent described gas outlet E
Range is 80mm≤E≤160mm.
11. air-floating apparatus according to claim 3, which is characterized in that further include flow nipple；
The flow nipple is located inside the outlet duct, is fixedly connected with the outlet duct.
12. air-floating apparatus according to claim 1, which is characterized in that the gas outlet in the air flotation cell second
Surface is in the array distribution of m row n column；
Wherein, m and n is the integer equal to or more than 2.
13. air-floating apparatus according to claim 1, which is characterized in that the load bearing unit includes support plate and external frame
Frame；
The support plate is fixedly connected with the external frame, surrounds first surface and the third surface of the air flotation cell；
Auxilairy air intake corresponding with the air inlet of the air flotation cell is provided in the external frame.
14. a kind of work stage, which is characterized in that including the described in any item air-floating apparatus of claim 1-13, article carrying platform and
Air floating platform；
Wherein, the air-floating apparatus is used to support the article carrying platform and makees frictionless motion on the air floating platform.
15. a kind of litho machine, which is characterized in that including the work stage described in claim 14.
Priority Applications (1)
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112901657A (en) * | 2019-11-19 | 2021-06-04 | 上海微电子装备（集团）股份有限公司 | Air supporting block mounting structure, air supporting sliding block and linear motor |
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2018
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112901657A (en) * | 2019-11-19 | 2021-06-04 | 上海微电子装备（集团）股份有限公司 | Air supporting block mounting structure, air supporting sliding block and linear motor |
| CN112901657B (en) * | 2019-11-19 | 2022-05-17 | 上海微电子装备（集团）股份有限公司 | Air supporting block mounting structure, air supporting sliding block and linear motor |
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